Positioning device

Abstract

To desirably provide a replaceable accurate positioning manipulator.SOLUTION: A parallel positioning manipulator includes retainers, a base plate, and a plurality of transitional joint actuators. Each of the actuators includes an actuator joint having five Degrees of Freedom (DOF) at either the base plate or the retainer. When one or more of the actuators extend or shrink, a pivotal point of the remaining actuators or five DOF actuator joint are allowed to shift in any axial direction other than a primary axis of motion of the actuator.SELECTED DRAWING: Figure 17B

Description

Technical Field

[0001] Related Applications This application claims the benefit of U.S. Provisional Patent Application No. 62 / 402,674, entitled "MULTI-AXIS RELATIVE POSITIONING STAGE," filed on September 30, 2016, which is hereby incorporated by reference in its entirety.

[0002] The concepts of the present invention relate to positioning Device and, in particular, to multi-axis relative positioning. Device Related.

Background Art

[0003] Positioning manipulators are utilized in many applications to position objects, tools, or instruments with various accuracies. An overview of the kinematic joints or pairs that may be used in a positioning manipulator is shown in FIG. 1 and includes rigid (stationary), translational, rotational, parallel cylinder, cylindrical, spherical, planar, edge slider, cylindrical slider, point slider, spherical slider, and crossed cylinder.

[0004] A Stewart platform (also known herein as a hexapod) is a multi-axis positioning stage composed of, for example, six actuators, each having a spherical, ball, or universal joint at both ends. While the hexapod is considered a globally recognized multi-axis positioning stage design for most applications, it is often prohibitively expensive. One problem with the hexapod is that it is a synergistic motion platform due to the interaction of the actuators. As a result of the interaction of the actuators, none of the actuators can move independently, and many or all of the actuators need to move by different specific amounts with different velocity profiles to prevent the stage from becoming constrained. In addition, these motion and velocity profiles change continuously as the defined start and end points are changed. Therefore, even when a short-distance single-axis motion is desired, a very complex computer algorithm is required to individually calculate the travel distance and velocity profile required for each actuator to move the upper plate of the stage from point A to point B. Consequently, a human operator cannot manually perform this simple motion without constraining the stage.

[0005] Another significant drawback of hexapods is that the stiffness of the joints (against off-axis motion) requires stage "slop" or "play" and resolution. This presents a design challenge, as it becomes exponentially more difficult to create ball joints (used in hexapods) with tighter tolerances. Specifically, when designers create world-renowned ball bearings to maximize stage resolution and minimize slop, the conventional approach exacerbates two inherent problems. The first problem is that, due to the stiffness of the ball joints, the accuracy of the motion and velocity profile requirements for each actuator increases exponentially to prevent constraints. The second problem is that the performance requirements of the actuators increase exponentially to achieve the required precision motion and velocity profiles. As a result, improving the resolution of a hexapod requires an exponential increase in computational power for determining motion and velocity profiles, an exponential increase in the performance capabilities of the actuators, and 12 high-quality ball bearings. All of these factors significantly increase the cost of hexapods.

[0006] Hexapods are often preferred because, although they typically cost 3 to 10 times more than their kinematic chain counterparts, they are not plagued by tolerance stacking problems. Ten-micron accuracy is not an uncommon positioning device requirement for many applications; for example, the optical communications industry often requires sub-micron accuracy. Nowadays, hexapods typically cost between $60,000 and over $120,000, depending on their physical size, weight constraints, and accuracy requirements, respectively. Alternative precision positioning manipulators would be highly desirable. [Overview of the Initiative] [Means for solving the problem]

[0007] In accordance with the principles of the present invention, a parallel positioning manipulator includes an upper plate, a base plate (also referred to herein as a bottom plate or base plate), and three, four, five, or six translational articulated actuators. Each actuator includes an actuator joint having five degrees of freedom (DOF) on either the base plate or the upper plate. When one or more of the actuators extend or retract during operation, the pivot points of the remaining actuators, for example, the 5DOF actuator joints, are made capable of moving in any axial direction other than the actuator's operating axis (i.e., the axis defined by the extension and retraction of the actuators). In exemplary embodiments, magnetism, gravity, and / or a flexible polymer such as silicone may be used to maintain the maximum 5DOF pivot points within the contact area in contact with their respective (i.e., upper or bottom) plates when the translational actuators are extended or retracted. In exemplary embodiments, at least two of the translational actuators are perpendicular to at least two other translational actuators. If a fifth axis is added, the translation actuators of the fifth axis are arranged perpendicular to the other four translation actuators.

[0008] In the exemplary embodiments, the actuator may be of several types, such as a piezoelectric actuator, a manual micrometer screw, a magnetic actuator, a stepping motor (either integrated or separate) with a linear actuator, a hydraulic cylinder, a pneumatic cylinder, or a rotary motor with an eccentric cam. In the exemplary embodiments, according to the principle of the concept of the present invention, the parallel positioning manipulator is configured such that the pressing and tensile forces acted by each actuator are greater than the shear friction of all other actuators combined. In the exemplary embodiments, this is achieved by using a material with high holding force but low shear force, such as a hard alloy sphere magnetically held in contact with a hard flat metal surface. In such embodiments, only one of the sides (i.e., either the hard alloy sphere or the hard flat metal surface) is magnetized because if both sides were magnetized, it would be semi-constrained in the sliding axis direction and thus behave like a spherical 3DOF joint.

[0009] In accordance with the principles of the present invention, the positioning stage includes a plurality of magnetic translational articulated actuators, a base plate, and an upper plate. The upper plate may support the apparatus for precise positioning of the apparatus. The upper plate may be supported by the plurality of magnetic translational articulated actuators, which are supported by the base plate. In the exemplary embodiment, each actuator is fixed to a portion of the base plate, which positions each actuator at a certain angle with respect to the horizontal. In the exemplary embodiment, the angle is 45 degrees, and the actuators are positioned at opposite ends or end portions of the base plate, and at 90 degrees to each other. In the exemplary embodiment, the sides of the upper plate are formed at the same angle as the sides of the base plate with respect to the horizontal, but other configurations are conceivable within the scope of the present invention. Magnets are provided on the angled sides of the upper plate. Each actuator includes a magnetic material, which may be an iron alloy, at its distal end, for example. In the exemplary embodiment, the magnetic material is hemispherical, but other shapes and combinations are conceivable within the scope of the present invention. In a preferred embodiment, each end of the magnetic material is configured to support the upper plate above the base plate by contacting a magnet on the side surface of the upper plate.

[0010] During operation, the distal end of the actuator is held in contact with the magnet on the side of the upper plate by the force of the magnet. When the actuator is activated (i.e., extended or retracted), the upper plate moves linearly in the direction of motion determined by the actuator's movement. The distal end of the actuator, which is in contact with the magnet on the opposing side of the upper plate, remains in contact with the magnet due to the magnetic force of the magnet acting on the magnetic material of the distal end of the actuator. Simultaneously, the distal end of the actuator can slide the magnet (and the upper plate) in the direction defined by the movement of the activated actuator.

[0011] A method for positioning a device is provided in accordance with the concept of the present invention, the method comprising the steps of: providing a base plate; providing a retainer having a first angled side and a second angled side; and providing a plurality of actuators arranged such that their extension and retraction directions are at an angle with respect to the horizontal plane, each having a first end fixed to the base plate and a second end sliding against the first angled side or the second angled side of the retainer, wherein the plurality of actuators are capable of moving the retainer in accordance with the extension or retraction of one or more of the plurality of actuators.

[0012] In various embodiments, at least two of the plurality of actuators maintain contact with the retainer by sliding joints having four degrees of freedom.

[0013] In various embodiments, at least two of the plurality of actuators maintain contact with the retainer by sliding joints having five degrees of freedom.

[0014] In various embodiments, at least four of the plurality of actuators maintain contact with the retainer by sliding joints having five degrees of freedom.

[0015] In various embodiments, one or more of the actuators are arranged to extend and retract in a direction at an angle of approximately 90 degrees with respect to the first angled side or the second angled side of the retainer.

[0016] In various embodiments, all of the actuators of the plurality of actuators are arranged to extend and retract in a direction at an angle of about 90 degrees with respect to the first angled side or the second angled side of the retainer.

[0017] In various embodiments, a four-axis positioning stage is used.

[0018] In various embodiments, when one of the plurality of actuators, which is positioned between the first angled side portion of the base plate and the first angled side portion of the retainer, is in the neutral position, the base plate has a first angled side portion that is parallel to the first angled side portion of the retainer.

[0019] In various embodiments, when one of the plurality of actuators, which is positioned between the second angled side portion of the base plate and the second angled side portion of the retainer, is in the neutral position, the base plate has a second angled side portion that is parallel to the second angled side portion of the retainer.

[0020] In various embodiments, the neutral position refers to the position in which the actuator is not extended.

[0021] In various embodiments, at least one of the plurality of actuators has a magnetic second end that forms a slidable joint that contacts the first or second angled side of the retainer.

[0022] In various embodiments, the second ends of two or more actuators among the plurality of actuators form a magnetic joint with the first angled side or the second angled side of the retainer.

[0023] In various embodiments, the second ends of all of the actuators of the plurality of actuators form a magnetic joint with the first angled side or the second angled side of the retainer.

[0024] In various embodiments, the retainer is provided with grooves formed to hold an elongated, cable-like object.

[0025] In various embodiments, the elongated cable-like object includes at least an optical fiber.

[0026] In various embodiments, the retainer is V-shaped.

[0027] In various embodiments, further comprising the step of providing an electronic control device capable of moving the retainer to a specified position by effectively combining the extension and / or contraction of the plurality of actuators.

[0028] In various embodiments, the actuator is configured such that the same amount of extension or contraction of any pair of actuators generates movement of the retainer only along a single axis, and the extension or contraction is performed under the control of the electronic control device.

[0029] In various embodiments, further comprising the step of providing one or more sensors capable of detecting the position of the retainer and transmitting sensor data of the position of the retainer to the electronic control device by a feedback loop, and the electronic control device can control the plurality of actuators to adjust the position of the retainer according to the sensor data.

[0030] The present invention will become more apparent when considering the accompanying drawings and the accompanying detailed description. The embodiments shown in this specification are provided as examples rather than limitations, and like reference numerals refer to the same or similar elements. The drawings do not necessarily have a common scale; instead, emphasis is placed on showing the features of the present invention.

Brief Description of the Drawings

[0031] [Figure 1] Shows various conventional joints. [Figure 2] Front end view of an embodiment of a 4-axis stage or positioning device in which all actuators are contracted, with a third actuator (not shown) behind the first actuator and a fourth actuator (not shown) behind the second actuator. [Figure 3]This is the same front end view of the 4-axis stage shown in Figure 2, with the first and third actuators extended along the axis ("X-axis"). [Figure 4] This is the same end view of the 4-axis stage shown in Figure 2, with the second and fourth actuators extended along the axis ("Y-axis"). [Figure 5] Figure 2 is a first (left) side view of the 4-axis stage, where the first and third actuators are extended along the "X-axis," the second actuator (not shown) is located behind the first actuator, and the fourth actuator (not shown) is located behind the third actuator. [Figure 6] Figure 2 shows a second (right) side view of the 4-axis stage, opposite to the first (left) side view, where the second and fourth actuators are extended along the "Y-axis," with the first actuator (not shown) behind the second actuator and the third actuator (not shown) behind the fourth actuator. [Figure 7] Figures 2 and 5 show the first (left) side view of the 4-axis stage, where the upper plate is pitched by the first actuator being retracted and the third actuator being extended, with the second actuator (not shown) located behind the first actuator and the fourth actuator (not shown) located behind the second actuator. [Figure 8] Figures 2 and 6 show a second (right) side view of the 4-axis stage, where the upper plate yaws due to the extension of the second actuator and the contraction of the fourth actuator, with the first actuator (not shown) behind the second actuator and the third actuator (not shown) behind the fourth actuator. [Figure 9] Figure 2 is a plan view of the 4-axis stage, with the base plate omitted for clarity. [Figure 10] This table shows single-axis / dual-actuator motions that may be applied to a 4-axis stage, in accordance with the principles of the present invention. [Figure 11]This table shows single-axis / single-actuator motions that may be applied to a 5-axis stage, in accordance with the principles of the present invention. [Figure 12] This is a plan view of an embodiment of a 5-axis stage that conforms to the principles of the present invention. [Figure 13] Another embodiment of a multi-axis stage is shown, which may achieve a "rolling" motion of the upper plate in accordance with the principles of the present invention. [Figure 14A] This figure shows another embodiment of a four-axis stage using a manual actuator capable of single-digit micron accuracy, in accordance with the principles of the present invention. [Figure 14B] This figure shows another embodiment of a four-axis stage using a manual actuator capable of single-digit micron accuracy, in accordance with the principles of the present invention. [Figure 14C] This figure shows another embodiment of a four-axis stage using a manual actuator capable of single-digit micron accuracy, in accordance with the principles of the present invention. [Figure 15] This is a plan view of an embodiment of a 5-axis stage that uses cylindrical magnets in the joints, in accordance with the principles of the present invention. [Figure 16] This is a block diagram of an embodiment of a photonic positioning device including an electronic control device, in accordance with the principles of the present invention. [Figure 17A] This is a plan view of an embodiment of a photonic positioning device system using a four-axis stage, in accordance with the principles of the present invention. [Figure 17B] Figure 17A is a side view of the photonic positioning device system. [Modes for carrying out the invention]

[0032] Various aspects of the concept of the present invention will be more fully described below with reference to the accompanying drawings, which show several exemplary embodiments. The concept of the present invention may, however, be embodied in many different forms and should not be construed as being limited to the exemplary embodiments shown herein.

[0033] While terms such as 1, 2, etc. may be used herein to describe various elements, it will be understood that these elements are not limited by these terms. These terms are used to distinguish one element from another, but do not imply a required order of elements. For example, without departing the scope of the invention, 1st element may be called 2nd element, and similarly, 2nd element may be called 1st element. When used herein, the terms "and / or" include any and all combinations of one or more of the related listed items. The term "or" is used in the sense of inclusive OR, not exclusive OR.

[0034] When an element is described as "on top of," "connected to," or "bound to" another element, it may be directly on top of the other element, or connected to or bound to it, or there may be an intervening element. Conversely, when an element is described as "directly on top of," "directly connected to," or "directly bound to" another element, there is no intervening element. Other words used to describe the relationship between elements (e.g., "directly between" versus "between," "directly adjacent" versus "adjacent") must be interpreted in a similar manner.

[0035] The technical terms used herein are for the sole purpose of describing specific embodiments and are not intended to limit the invention. Where used herein, the singular forms “a,” “an,” and “the” are intended to include the plural form unless the context explicitly indicates otherwise. When the terms “equipped,” “equipped,” “contained,” and / or “contained” are used herein, they specify the presence of an expressed feature, step, operation, element, and / or component, but do not preclude the presence or addition of one or more other features, steps, operations, elements, components, and / or groups thereof.

[0036] Spatial relative terms such as "below," "below," "on the lower side," "above," and "on the upper side" may be used to describe the relationship of an element and / or feature to another element and / or feature, for example, as shown in the figure. It will be understood that spatial relative terms are intended to include different orientations of the device in use and / or operation, in addition to the orientation shown in the figure. For example, if the device in the figure is inverted, the element described as "below" and / or "below" another element or feature will be oriented "above" the other element or feature. The device may be oriented in a different way (e.g., rotated by only 90 degrees or in a different orientation), and the spatial relative descriptive terms used herein may be interpreted accordingly.

[0037] Exemplary embodiments are described herein with respect to schematic cross-sectional views of idealized exemplary embodiments (and intermediate structures). Thus, variations from the resulting explanatory diagram shape may be assumed, for example, with respect to manufacturing techniques and / or tolerances. Accordingly, exemplary embodiments should not be interpreted as being limited to specific shapes of the region shown herein, and may include, for example, shape deviations resulting from manufacturing.

[0038] To the extent that the features, operation, and / or steps of a function are described herein or understood to be included in various embodiments of the concept of the present invention, such features, operation, and / or steps of a function may be embodied in blocks, units, modules, operation, and / or methods of the function. And to the extent that such functional blocks, units, modules, operation, and / or methods include computer program code, such computer program code may be stored in a computer-readable medium such as non-transient memory and media that can be executed by at least one computer processor.

[0039] In exemplary embodiments following the principles of the present invention, a parallel positioning manipulator includes an upper plate, a base plate, and four, five, or six or more translational articulated actuators. In preferred embodiments, each actuator includes an actuator joint having five degrees of freedom (DOF) on either the base plate or the upper plate. When one or more of the actuators extend or retract during operation, the pivot points of the remaining actuators are made capable of moving in the direction of any axis other than the axis of motion of that actuator (i.e., the axis defined by the extension and retraction of the actuators).

[0040] In the exemplary embodiment, magnetic force, gravity and / or a flexible polymer such as silicone may be used to maintain the 5DOF pivot points in contact with their respective (i.e., upper or bottom) plates when the translation actuator is retracted.

[0041] In some exemplary embodiments, at least two of the translational actuators may be perpendicular to at least two other translational actuators.

[0042] In some embodiments, a fifth motion axis may be added. If a fifth axis is added, its associated translational actuator may be arranged perpendicularly to the other four translational actuators.

[0043] In the exemplary embodiments, the actuator may be any of several types, such as a piezoelectric actuator, a manual micrometer screw, a magnetic actuator, a stepping motor with a linear actuator (integrated or independent), a hydraulic cylinder, a pneumatic cylinder, or a rotary motor with an eccentric cam. In the exemplary embodiments following the principles of the concept of the present invention, the parallel positioning manipulator is configured such that the pressing and tensile forces acted by each actuator are greater than the shear friction of all other coupled actuators. In the exemplary embodiments, this is achieved by using materials with high coercivity but low shear force, such as a hard flat metal surface and a hard alloy sphere held in contact by magnetism. In such embodiments, only one side (i.e., the hard alloy sphere or the hard flat metal surface) is magnetized, because if both sides were magnetized, they would be semi-connected in the sliding axis direction and thus behave like a spherical 3DOF joint.

[0044] In an exemplary embodiment following the principles of the present invention, the positioning stage includes a plurality of magnetic translational articulated actuators, a base plate, and an upper plate. The upper plate may support the device for its precise positioning. The upper plate is supported by the plurality of magnetic translational articulated actuators, which may be supported by the base plate. In the exemplary embodiment, each actuator is fixed to a portion of the base plate, which positions each actuator at a certain angle with respect to the horizontal. In the exemplary embodiment, the sides of the upper plate are formed at the same angle as the sides of the base plate with respect to the horizontal, but other configurations are conceivable within the scope of the present invention. Magnets are provided on the angled sides of the upper plate. Each actuator includes a magnetic material, which may be, for example, an iron alloy, at its distal end. In the exemplary embodiment, the magnetic material is hemispherical, but other shapes and combinations are conceivable within the scope of the present invention. Each end of the magnetic material is configured to support the upper plate above the base plate by contacting the magnets on the sides of the upper plate.

[0045] In some embodiments, the magnets on the sides of the upper plate conform to the outer surface of the upper plate. For example, the upper plate may have a cross-section that is planar, V-shaped, semi-cylindrical, or has another shape.

[0046] During operation, the distal end of the actuator is maintained in contact with the magnet on the outer or side surface of the upper plate by the force of the magnet. When the actuator is activated, for example, when it is extended or retracted, the upper plate moves linearly in the direction of the movement determined by the actuator's operation. Thus, the actuator may be extendable and retractable along its axis. The distal end of the actuator, in contact with the magnet on the opposite side surface of the upper plate, remains in contact with the magnet due to the magnetic force of the magnet acting on the magnetic material of the distal end of the actuator. At the same time, the distal end of such an actuator allows the magnet (and the upper plate) to slide in the direction indicated by the operation of the activated actuator. With respect to activation, in various embodiments, this opposite actuator may be passive, i.e., not activated, or activated in a different direction.

[0047] A positioning stage according to the principles of the present invention may take the form of a parallel positioning manipulator. Because it is a parallel positioning manipulator, it is not plagued by the mechanical stacking problems associated with multiple single-axis stages stacked on top of each other in what is called a kinematic chain. Furthermore, unlike a hexapod, a positioning stage according to the principles of the present invention allows any combination of four actuators to extend or retract by any amount at any speed without stage constraints. Each actuator may be arranged to achieve two different axial movements of the upper plate of the stage. To perform a single-axis motion, two actuators may be moved in such a manner that they complement each other in the desired axial direction and cancel each other out in the undesired axial direction. As a result, in the exemplary embodiments according to the principles of the present invention, all single-axis stage motions utilize dual-actuator motion. Single-axis stage motions and associated actuator actions are shown in the tables in Figures 10 and 11.

[0048] In addition to being parallel actuators, a positioning stage according to the principles of the present invention may have several other advantages. For example, a positioning stage according to the principles of the present invention can be gradually increased from four axes to six axes, whereas a Stewart platform always has three or six axes. Unlike a kinematic chain, a positioning stage according to the principles of the present invention does not exhibit a stacking of individual stage allowances. A positioning stage according to the principles of the present invention does not require annular or linear bearings, whereas a kinematic chain requires one for each axis of freedom. For a positioning stage according to the principles of the present invention, each operating axis requires only two actuators that move in a fixed, intuitive ratio, and thus the desired operation can be achieved relatively easily. As mentioned above, this is not true for a Stewart platform. Furthermore, unlike a Stewart platform, the drive speed does not need to be controlled to prevent stage constraint, and individual actuators may move without linking the stages. In the exemplary embodiment, the upper plate of the positioning stage may be easily removed and replaced by disconnecting interfaces such as magnetic interfaces.

[0049] In the exemplary embodiment, the resolution and rigidity of the stage may be determined by the characteristics of the actuator, the smoothness of the spherical slider components, and the strength of the magnetic (or other) force holding the spherical slider joints together. By optimizing all of these embodiments, a stage with submicron accuracy can be achieved at a fraction of the cost of a hexapod with similar accuracy. In many cases, a positioning stage following the principles of the present invention is superior to a standard kinematic chain and at the same time more cost-effective. In the exemplary embodiment, the holding force (e.g., magnetic holding force) of the actuator spherical slider (or another 5DOF connection) is greater than the coefficient of friction of all other actuator joints. If this is true, the upper plate will settle into a state of equilibrium that allows four (or more) connections to slide or pivot, as it is required to be supported by all contact points.

[0050] A four-axis stage having a constrained Z-axis and other degrees of freedom not interfering with it may be implemented according to the principles of the present invention, by using a rigid beam that constrains or limits motion such as Z-axis motion, as shown in Figure 15, or by limiting Z-axis motion by replacing one of the four 5DOF actuator joints with a 4DOF joint.

[0051] Figures 2-9, when combined, provide illustrations of exemplary embodiments of a four-axis positioning stage that conforms to the principles of the present invention.

[0052] Figure 2 shows a front end view of an embodiment of a four-axis stage or positioning device in which all actuators are retracted, with a third actuator (not shown) located behind the first actuator and a fourth actuator (not shown) located behind the second actuator. Figures 5-9 show the third and fourth actuators. For example, as can be seen from Figure 9, the third actuator is located behind the first actuator, and the fourth actuator is located behind the second actuator.

[0053] With respect to Figure 2, all actuators are retracted in this figure. In this exemplary embodiment, the positioning stage is a four-axis stage 100 comprising a base plate 102, an upper plate 104, and a plurality of actuators, which may be translational actuators. The plurality of actuators include a first actuator 106 (i.e., translational actuator 1), a second actuator 108 (i.e., translational actuator 2), a third actuator 110 (i.e., translational actuator 3), and a fourth actuator 112 (i.e., translational actuator 4).

[0054] In the exemplary embodiment, the base plate 102 includes angled side portions 118 and 120 formed at an angle θ with respect to the horizontal, where in this embodiment θ = θ1 = θ2. In another embodiment, it may be θ1 ≠ θ2. The sides 122 and 124 of the upper plate 104 are formed at the same angle θ with respect to the horizontal. Therefore, the side portion 118 of the base plate 102 is parallel to the side portion 122 of the upper plate 104, and the side portion 120 of the base plate is parallel to the side portion 124 of the upper plate 104. In the embodiment of Figure 2, the base plate 102 includes an intermediate portion extending from the side portions 118 and 120. The intermediate portion may be a flat portion in the horizontal plane, but the intermediate portion does not need to be flat in all embodiments.

[0055] In this embodiment, each of the actuators 106, 108, 110, and 112 extends from one of the side portions 118, 120 of the base plate 102 toward the upper plate 104. For example, in this embodiment, each actuator is fixed to or coupled to a side portion of the base plate 102 and extends toward the corresponding side portion 122 or 124 of the upper plate 104 at a 90-degree angle to the corresponding side portion 118 or 120.

[0056] The distal ends of each actuator 106, 108, 110, and 112 include a magnetic material. In this embodiment, each of the actuators 106, 108, 110, and 112 includes iron alloy hemispherical ends 134, 136, 138, and 140. Magnets 126, 128, 130, and 132 are disposed on or within the sides 122, 124 of the upper plate 104, at positions corresponding to the iron alloy hemispherical ends 134, 136, 138, and 140 of each of the actuators 106, 108, 110, and 112.

[0057] Figure 3 is the same front end view of the 4-axis stage as in Figure 2, with the first and third actuators extended along the axis ("X-axis"). In Figure 3, the first actuator 106 and the third actuator 110 are extended to move the upper plate 104 in the direction of the X-axis, as indicated by the X-axis arrow. As described above, the third actuator 110 (actuator 3) is behind the first actuator 106 (actuator 1), and the fourth actuator 112 (actuator 4) is behind the second actuator 108 (actuator 2). In the exemplary embodiment, the first actuator 106 and the third actuator 110 are extended by the same amount to provide only X-axis motion. The dashed line shows the original positions of the upper plate 104 and magnets 126, 128, which is the position of the upper plate in Figure 2.

[0058] Figure 4 shows the same end view of the 4-axis stage of Figure 2, with the second and fourth actuators extended along the axis ("Y-axis"). In the exemplary embodiment of Figure 4, the first actuator 106 and the third actuator 110 (X-axis), and the second actuator 108 and the fourth actuator 112 (Y-axis) are extended. As described above, the third actuator 110 is behind the first actuator 106, and the fourth actuator 112 is behind the second actuator 108. In the exemplary embodiment, the first actuator 106 and the third actuator 110 are extended by the same amount to provide X-axis motion, and the second actuator 108 and the fourth actuator 112 are extended by the same amount to provide Y-axis motion. The dashed lines indicate the original positions of the upper plate 104 and magnets 126, 128.

[0059] Figure 5 shows a first (left) side view of the four-axis stage of Figure 2, where the first and third actuators are extended along the "X-axis," with a second actuator (not shown) behind the first actuator and a fourth actuator (not shown) behind the third actuator. In the exemplary embodiment of Figure 5, the first actuator 106 and the third actuator 110 are extended by the same amount to generate motion only in the X-axis direction. From this perspective view, the second actuator 108 is behind the first actuator 106, and the fourth actuator 112 is behind the third actuator 110. The dashed lines indicate the original positions of the upper plate 104 and magnets 126 and 130.

[0060] Figure 6 shows a second (right) side view of the 4-axis stage of Figure 2, opposite to the first (left) side view, where the second and fourth actuators are extended along the "Y-axis," with the first actuator (not shown) behind the second actuator and the third actuator (not shown) behind the fourth actuator. In the embodiment of Figure 6, the second actuator 108 and the fourth actuator 112 are extended by the same amount to generate motion only in the Y-axis direction. From this perspective view, the first actuator 106 is behind the second actuator 108, and the third actuator 110 is behind the fourth actuator 112. The dashed lines indicate the original positions of the upper plate 104 and magnets 128 and 132.

[0061] Figure 7 shows a first (left) side view of the four-axis stage of Figures 2 and 5, where the upper plate 104 is pitched by the first actuator 106 being retracted and the third actuator 110 being extended, with the second actuator 108 (not shown) located behind the first actuator and the fourth actuator 112 (not shown) located behind the second actuator.

[0062] Figure 8 shows a second (right) side view of the four-axis stage of Figures 2 and 6, in which the upper plate 104 is yawed by the extension of the second actuator 108 and the contraction of the fourth actuator 112, with the first actuator 106 (not shown) located behind the second actuator and the third actuator 110 (not shown) located behind the fourth actuator.

[0063] Figure 9 shows a plan view of the four-axis stage of Figure 2, with the base plate 102 omitted for clarity. In the illustrative embodiment of Figure 9, a plan view of the four-axis stage according to the principles of the present invention shows the relative positions of the first, second, third, and fourth actuators 106, 108, 110, and 112, along with their respective associated magnets 126, 128, 130, and 132 and the upper plate 104.

[0064] Figure 10 shows a table of single-axis / dual-actuator motions that may be applied to a four-axis stage according to the principles of the present invention. The table in Figure 10 shows combinations of dual-actuator motions that implement upper plate motion according to the principles of the present invention. For example, to extend the upper plate only in the positive X-axis direction, the first actuator 106 and the third actuator 110 are extended while the second actuator 108 and the fourth actuator 112 remain in place; to extend the upper plate only in the positive Y-axis direction, the second actuator 108 and the fourth actuator 112 are extended while the first actuator 106 and the third actuator 110 remain in place.

[0065] Figure 11 shows a table of single-axis / single-actuator motions that may be applied to a 5-axis stage according to the principles of the present invention. For example, Figure 12 shows a fifth actuator 113 added to influence the motion of the upper plate 4 in the Z-axis direction, which is in the horizontal plane. In another embodiment, a sixth actuator may be provided on the opposite side of the fifth actuator.

[0066] The table in Figure 11 shows the single-axis single-actuator motion of the fifth actuator 113 when it is added to, for example, actuators 106, 108, 110, and 112. That is, the table in Figure 11 may be added to the table in Figure 10 when five actuators are used. Therefore, a five-axis stage, such as the one shown in Figure 12, may have positive Z-axis motion achieved by extension of the fifth actuator 113 and negative Z-axis motion achieved by contraction of the fifth actuator 113. In the exemplary embodiment in which a four-axis stage with a constrained Z-axis is used, the fifth actuator 113 may be replaced by, for example, a rigid beam.

[0067] Figure 13 shows another embodiment of a multi-axis stage that can achieve a “roll” motion of the upper plate according to the principles of the present invention. In an exemplary embodiment according to the principles of the present invention, a sixth operating axis, the roll, may be introduced as shown in Figure 13. In this exemplary embodiment, the upper plate 104 is semi-cylindrical, such as the magnet 133. In such an exemplary embodiment, the action of the sixth axis does not interfere with the action of the other five. The roll may be achieved by selective extension and / or contraction of actuators 106, 108, 110 and 112. A fifth actuator 113 may also be provided here optionally if motion in the Z-axis direction is intended.

[0068] Figures 14A, 14B, and 14C are an end view, perspective view, and exploded view of an exemplary positioning device according to the principles of the present invention, respectively. In this exemplary embodiment, the upper plate 104 and the base plate 102 are V-shaped, and their sides have the same angle θ with respect to the horizontal, where in this embodiment θ = θ1 = θ2. In another embodiment, it may be θ1 ≠ θ2. In this exemplary embodiment, the first to fourth actuators 106, 108, 110, and 112 penetrate the base plate 102 and contact magnets 135, 137 mounted on the side surface of the upper plate 104.

[0069] The magnets 135 and 135 are disposed on or within the sides 122, 124 of the upper plate 104, at positions corresponding to the iron alloy hemispherical ends 134, 136, 138, and 140 at the distal ends of the respective actuators 106, 108, 110, and 112.

[0070] In the exemplary embodiment, actuators 106, 108, 110, and 112 may be precision adjustment mechanisms such as micrometer screws 106a, 108a, 110a, and 112a that enable single-digit micron precision adjustment.

[0071] Figure 15 is a plan view of an embodiment of a five-axis stage using cylindrical magnets in a joint, according to the principles of the present invention. As shown in the exemplary embodiment of Figure 15, one of the magnets 139 attached to the upper plate 104 in this exemplary embodiment may be in the form of a cylindrical magnet that provides a 4DOF joint, for example, which is a positioning device with restricted movement in the Z-axis direction. The cylindrical magnet may be configured to provide a sixth axis of a roll, for example, by bending.

[0072] Figure 16 is a block diagram of an embodiment of a photonic positioning device including an electronic control unit, according to the principles of the present invention. The block diagram of Figure 16 shows a photonic system 200 that utilizes a photonic device 101, such as a fiber connector or an alignment device, along with a positioning device 100 according to the principles of the present invention. In the exemplary embodiment, the positioning device 100 is controlled by a control unit 103, which operates actuators of the positioning device in the manner described above to precisely move the photonic device 101. Such movement may, for example, enable alignment of optical fiber ends. The control unit 103 may receive feedback from, for example, the photonic equipment 101 that the control unit uses to adjust the positioning device 100. In the exemplary embodiment where the photonic equipment 101 is a connector, for example, a sensor representing the quality of alignment between fibers may provide a mark to the control unit 103, which then uses, for example, such a mark to adjust the positioning device for precise alignment of the optical fibers.

[0073] Figures 17A and 17B are a plan view and a side view, respectively, of a photonic positioning system 105 that utilizes a positioning device according to the principles of the present invention. In this exemplary embodiment, a pair of positioning devices 100 support and connect optical fiber ends F1 and F2, respectively. Each positioning device 100 is operated using an electronic control unit 103 as described above to align the ends of the fibers F1 and F2 and connect them by an optical fiber connector including a heating element such as a plasma heater (not shown), which is configured to heat the fiber ends once they have been aligned using the positioning device 100. In this exemplary embodiment, the upper plate of the positioning device 100 may include or support a fiber retainer 107. Such fiber retainers are known and may include grooves in a flat upper surface for holding, positioning, or connecting one or more fibers in place.

[0074] Although the above has described what is considered to be the best mode and / or other preferred embodiments, it can be seen that various modifications may be made therein, that one or more of the present inventions may be implemented in various forms and embodiments, and that they may be applicable to a number of uses, although only some of them have been described herein. The following claims are intended to claim what is written literally and all equivalents thereto, including all modifications and changes within the scope of each claim.

[0075] For clarity, certain features of the present invention described in the context of separate embodiments may be provided in combination in a single embodiment. Conversely, for brevity, certain features of the present invention described in the context of a single embodiment may be provided separately or in any preferred partial combination.

[0076] For example, it can be seen that all features described in any of the claims (whether independent or dependent) may be combined in any given manner.

Claims

1. A positioning device, Base plate and A retainer having a first angled side and a second angled side, A plurality of linear actuators are arranged so as to be at an angle to the horizontal plane, with each having a first end fixed to the base plate and a second end sliding against the first angled side or second angled side of the retainer, A control device configured to move the retainer to a designated position by controlling the plurality of linear actuators and effectively combining the extension and / or contraction of the plurality of linear actuators, Equipped with, The plurality of linear actuators are configured to move the retainer in accordance with the extension or contraction of one or more of the plurality of linear actuators. A positioning device characterized in that at least two of the plurality of linear actuators maintain contact with the retainer by sliding joints having four degrees of freedom.

2. A positioning device according to claim 1, A positioning device characterized in that at least two of the plurality of linear actuators maintain contact with the retainer by sliding joints having five degrees of freedom.

3. A positioning device according to claim 1, A positioning device characterized in that at least four of the plurality of linear actuators maintain contact with the retainer by sliding joints having five degrees of freedom.

4. A positioning device according to claim 1, A positioning device characterized in that one or more of the plurality of linear actuators are arranged to extend and retract in a direction at an angle of approximately 90 degrees with respect to the first angled side surface or the second angled side surface of the retainer.

5. A positioning device according to claim 1, A positioning device characterized in that all of the plurality of linear actuators are arranged to extend and retract in a direction at an angle of approximately 90 degrees with respect to the first angled side surface or the second angled side surface of the retainer.

6. A positioning device according to claim 1, A positioning device characterized by using a four-axis positioning stage.

7. A positioning device according to claim 1, A positioning device characterized in that, when one of the plurality of linear actuators, which is positioned between the first angled side portion of the base plate and the first angled side portion of the retainer, is in the neutral position, the base plate has a first angled side portion that is parallel to the first angled side portion of the retainer.

8. A positioning device according to claim 7, A positioning device characterized in that, when one of the plurality of linear actuators, which is positioned between the second angled side portion of the base plate and the second angled side portion of the retainer, is in the neutral position, the base plate has a second angled side portion that is parallel to the second angled side portion of the retainer.

9. A positioning device according to claim 8, The positioning device is characterized in that the neutral position refers to the position in which the linear actuator is not extended.

10. A positioning device according to claim 1, A positioning device characterized in that at least one of the plurality of linear actuators has a magnetic second end that forms a slidable joint that contacts the first angled side or the second angled side of the retainer.

11. A positioning device according to claim 1, A positioning device characterized in that the second ends of two or more linear actuators among the plurality of linear actuators form a magnetic joint with the first angled side surface or the second angled side surface of the retainer.

12. A positioning device according to claim 1, A positioning device characterized in that the second ends of all of the linear actuators of the plurality of linear actuators form a magnetic joint with the first angled side surface or the second angled side surface of the retainer.

13. A positioning device according to claim 1, The positioning device is characterized in that the holder is provided with grooves formed to hold an elongated cable-like object.

14. A positioning device according to claim 13, The positioning device is characterized in that the elongated cable-like object includes at least an optical fiber.

15. A positioning device according to claim 13, A positioning device characterized in that the retainer is V-shaped.

16. A positioning device according to claim 1, The positioning device is characterized in that the linear actuators are configured such that the same amount of extension or contraction of any pair of linear actuators generates motion of the retainer along only a single axis, and the extension or contraction is performed under the control of the control device.

17. A positioning device according to claim 1, One or more sensors capable of detecting the position of the retainer and transmitting sensor data of the retainer's position to the control device via a feedback loop, Furthermore, The positioning device is characterized in that the control device can control the plurality of linear actuators to adjust the position of the retainer according to the sensor data.

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