Method of dividing a workpiece

Abstract

To provide a workpiece division method that can reliably divide a workpiece into multiple division lines even when a cutting blade wears during multi-step cutting to divide the workpiece.SOLUTION: A detection step for detecting the position of the tip of a cutting blade after completing one or more grooving steps and before starting a dividing step is performed to divide a workpiece at each of a plurality of planned dividing lines. This allows the dividing step to be performed with the tip of the cutting blade positioned at an appropriate position. As a result, even when the cutting blade wears during one or more grooving steps, it is possible to reliably divide the workpiece along each of the plurality of planned dividing lines.SELECTED DRAWING: Figure 4

Description

Technical Field

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[0001] The present invention relates to a method for dividing a workpiece, in which the surface is exposed and a tape is adhered to the back surface, at each of a plurality of planned division lines.

Background Art

[0002] Chips of devices such as IC (Integrated Circuit) are an essential component in various electronic devices such as mobile phones and personal computers. Such chips are manufactured, for example, by dividing a workpiece such as a wafer on which a plurality of devices are formed along the boundaries of the plurality of devices.

[0003] In a workpiece, the boundaries of a plurality of devices are often set in a grid pattern, and each of the plurality of linear portions included in this grid pattern is also called a planned division line. Further, the division of the workpiece is performed, for example, by bringing a rotating cutting blade into contact with the workpiece at each of the plurality of planned division lines and cutting (see, for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0007] In view of this, the object of the present invention is to provide a method for dividing a workpiece that can reliably divide the workpiece into multiple division lines, even when the cutting blade wears out during multi-stage cutting for dividing the workpiece. [Means for solving the problem]

[0008] According to the present invention, a method for dividing a workpiece having an exposed surface and tape attached to its back surface at each of a plurality of planned division lines, comprising: a cutting step of cutting the workpiece at each of the plurality of planned division lines using a rotating cutting blade; and a detection step of detecting the position of the tip of the cutting blade, wherein the cutting step comprises a groove forming step of forming a groove on the surface of the workpiece by moving the workpiece and the cutting blade relative to each other so that the cutting blade, whose tip is positioned at a position corresponding to the workpiece in the thickness direction of the workpiece, cuts into the workpiece; , applicable The process includes: performing the groove-forming step multiple times such that the tip of the cutting blade gradually approaches the back surface of the workpiece, and then dividing the workpiece by moving the workpiece and the cutting blade relative to each other such that the cutting blade, with its tip positioned in the thickness direction corresponding to the tape, cuts into the tape, wherein the detection step is performed to divide the workpiece at each of the multiple planned division lines. Between multiple groove-forming steps and After the completion of multiple groove-forming steps and before the start of the division step Each of the to at A method for dividing a workpiece is provided. [Effects of the Invention]

[0009] In the present invention, a detection step is performed to detect the position of the tip of the cutting blade after the completion of one or more groove-forming steps, which are performed to divide the workpiece in each of the multiple planned division lines, and before the start of the division step.

[0010] This allows the splitting step to be performed with the tip of the cutting blade positioned appropriately. As a result, in this invention, even if the cutting blade wears out during one or more groove-forming steps, it becomes possible to reliably split the workpiece into multiple planned splitting lines. [Brief explanation of the drawing]

[0011] [Figure 1] Figure 1 is a schematic perspective view showing an example of a frame unit including a workpiece. [Figure 2] Figure 2 is a schematic perspective view showing an example of a cutting device capable of dividing a workpiece. [Figure 3] Figure 3 is a magnified perspective view showing the cutting blade detection mechanism and cutting unit of the cutting device. [Figure 4] Figure 4 is a flowchart schematically showing one example of a method for dividing a workpiece. [Figure 5] Figure 5(A) is a schematic partial cross-sectional side view showing the first groove formation step, Figure 5(B) is a schematic partial cross-sectional side view showing the second groove formation step, and Figure 5(C) is a schematic partial cross-sectional side view showing the third groove formation step. [Figure 6] Figure 6 is a schematic front view illustrating the detection step. [Figure 7] Figure 7 is a schematic cross-sectional side view illustrating the division steps. [Modes for carrying out the invention]

[0012] Referring to the accompanying drawings, embodiments of the present invention will be described. FIG. 1 is a perspective view schematically showing an example of a frame unit including a workpiece. The frame unit 11 shown in FIG. 1 has a disk-shaped workpiece 13 with its surface 13a exposed. The workpiece 13 is, for example, a wafer made of a single crystal semiconductor material such as silicon (Si), silicon carbide (SiC), or gallium nitride (GaN).

[0013] Furthermore, the workpiece 13 is partitioned into a plurality of rectangular regions 13c by a plurality of division planned lines 15a each extending along a first direction and a plurality of division planned lines 15b each extending along a second direction orthogonal to the first direction. And a device is formed in each of the plurality of rectangular regions 13c.

[0014] Also, in the back surface 13b of the workpiece 13, the central region of a disk-shaped tape 17 having a diameter larger than that of the workpiece 13 is attached. This tape 17 has, for example, a flexible film-shaped tape base material and an adhesive layer (paste layer) provided on the workpiece 13 side of this tape base material.

[0015] And the tape base material is made of polyolefin (PO), polyethylene terephthalate (PET), polyvinyl chloride (PVC), polystyrene (PS), or the like. The adhesive layer is made of an ultraviolet curable silicone rubber, an acrylic material, an epoxy material, or the like.

[0016] Also, an annular frame 19 having an inner diameter larger than the diameter of the workpiece is attached to the outer peripheral region of the tape 17. This annular frame 19 is made of a metal material such as aluminum or stainless steel, for example.

[0017] FIG. 2 is a perspective view schematically showing an example of a cutting apparatus capable of dividing a workpiece 13. The X-axis direction (machining feed direction, front-rear direction) and Y-axis direction (indexing feed direction, left-right direction) shown in FIG. 2 are directions orthogonal to each other on a horizontal plane, and the Z-axis direction (cutting feed direction, up-down direction) is a direction (vertical direction) orthogonal to each of the X-axis direction and Y-axis direction.

[0018] The cutting apparatus 2 shown in FIG. 2 includes a base 4 that supports each component. On the upper surface of this base 4, a rectangular opening 4a whose longitudinal direction is parallel to the X-axis direction is formed. And inside the opening 4a, a flat table cover 6 and a bellows-shaped dust and splash cover 8 that expands and contracts as the table cover 6 moves are provided.

[0019] Also, a holding table 10 is provided above the table cover 6. The holding table 10 has a disk-shaped frame body 10a made of ceramics or the like. This frame body 10a has a disk-shaped bottom wall and a cylindrical side wall standing from this bottom wall. That is, on the upper surface side of the frame body 10a, a disk-shaped recess defined by the bottom wall and the side wall is formed.

[0020] And in the recess formed on the upper surface side of the frame body 10a, a disk-shaped porous plate 10b having a diameter approximately equal to the diameter of this recess is fixed. This porous plate 10b is made of, for example, porous ceramics. And when the frame unit 11 is carried into the cutting apparatus 2, the workpiece 13 is placed on the upper surface of the holding table 10 via a tape 17.

[0021] Also, a plurality of clamps 12 are provided around the holding table 10. The plurality of clamps 12 are provided at substantially equal intervals along the circumferential direction of the holding table 10. And when the frame unit 11 is carried into the cutting apparatus 2, the plurality of clamps 12 grip the annular frame 19 at a position lower than the upper surface of the holding table 10.

[0022] Furthermore, the holding table 10 and the multiple clamps 12 are connected to a ball screw type X-axis movement mechanism (not shown) located inside the opening 4a. When this X-axis movement mechanism is operated, the holding table 10 and the multiple clamps 12 move along the X-axis.

[0023] Furthermore, the holding table 10 and the multiple clamps 12 are connected to a rotational drive source (not shown), such as a motor, which is located inside the opening 4a. When this rotational drive source is operated, the holding table 10 and the multiple clamps 12 rotate around a straight line passing through the center of the upper surface of the porous plate 10b and along the Z-axis direction as the axis of rotation.

[0024] Furthermore, the porous plate 10b of the holding table 10 communicates with a suction source (not shown), such as an ejector, located inside the opening 4a, through a through-hole formed in the bottom wall of the frame 10a. When this suction source is activated, a suction force acts on the space near the upper surface of the porous plate 10b.

[0025] Furthermore, a cutting blade detection mechanism 14 for detecting the position of the tip of the cutting blade 40, which will be described later, is provided at the corner of the upper surface of the table cover 6. Details of the structure of the cutting blade detection mechanism 14 and the method for detecting the tip of the cutting blade 40 in the cutting blade detection mechanism 14 will be described later.

[0026] A support structure 16 is provided near the opening 4a on the upper surface of the base 4. This support structure 16 comprises an upright portion 16a extending from the upper surface of the base 4 along the Z-axis direction, and an arm portion 16b extending from the upper end of the upright portion 16a along the Y-axis direction so as to span the opening 4a. A Y-axis movement mechanism 18 is provided on the front side of the arm portion 16b.

[0027] This Y-axis movement mechanism 18 is fixed to the front of the arm portion 16b and includes a pair of Y-axis guide rails 20 that extend along the Y-axis direction. A Y-axis movement plate 22 is connected to the front side of the pair of Y-axis guide rails 20 in a manner that allows it to slide along the pair of Y-axis guide rails 20.

[0028] Furthermore, a screw shaft 24 extending along the Y-axis direction is positioned between the pair of Y-axis guide rails 20. A motor (not shown) for rotating the screw shaft 24 is connected to one end of this screw shaft 24. A nut portion (not shown) for housing balls that roll on the surface of the rotating screw shaft 24 is provided on the surface of the screw shaft 24, where a helical groove is formed, thus forming a ball screw.

[0029] In other words, when the screw shaft 24 rotates, the balls circulate within the nut portion, causing the nut portion to move along the Y-axis direction. This nut portion is fixed to the rear side of the Y-axis moving plate 22. Therefore, if the screw shaft 24 is rotated by a motor connected to one end of the screw shaft 24, the Y-axis moving plate 22 moves along the Y-axis direction together with the nut portion.

[0030] A Z-axis movement mechanism 26 is provided on the front side of the Y-axis movement plate 22. This Z-axis movement mechanism 26 is fixed to the front surface of the Y-axis movement plate 22 and includes a pair of Z-axis guide rails 28 that extend along the Z-axis direction. The Z-axis movement plate 30 is connected to the front side of the pair of Z-axis guide rails 28 in a manner that allows it to slide along the pair of Z-axis guide rails 28.

[0031] Furthermore, a screw shaft 32 extending along the Z-axis direction is positioned between a pair of Z-axis guide rails 28. A motor 34 for rotating the screw shaft 32 is connected to one end of this screw shaft 32. A nut portion (not shown) for housing balls that roll on the surface of the rotating screw shaft 32 is provided on the surface of the screw shaft 32, where a helical groove is formed, thus forming a ball screw.

[0032] In other words, as the screw shaft 32 rotates, the balls circulate within the nut portion, causing the nut portion to move along the Z-axis direction. Furthermore, this nut portion is fixed to the rear side of the Z-axis moving plate 30. Therefore, when the screw shaft 32 is rotated by the motor 34, the Z-axis moving plate 30 moves along the Z-axis direction together with the nut portion.

[0033] A cutting unit 36 ​​is fixed to the lower part of the Z-axis moving plate 30. The cutting unit 36 ​​has a cylindrical spindle housing 38 whose longitudinal direction is parallel to the Y-axis direction, and a cutting blade 40 whose tip position is detected by a cutting blade detection mechanism 14. Figure 3 is an enlarged perspective view showing the cutting blade detection mechanism 14 and the cutting unit 36.

[0034] The spindle housing 38 of the cutting unit 36 ​​houses a cylindrical spindle 42 that extends along the Y-axis. This spindle 42 is supported by the spindle housing 38 in a rotatable state. The tip of the spindle 42 protrudes outside the spindle housing 38, and a cutting blade 40 having an annular cutting edge 40a is mounted on this tip.

[0035] Furthermore, the base end of the spindle 42 is connected to a rotational drive source (not shown), such as a motor, which is built into the spindle housing 38. When this rotational drive source is operated, the cutting blade 40 rotates together with the spindle 42, with a straight line along the Y-axis as the axis of rotation.

[0036] Furthermore, the cutting blade detection mechanism 14 is equipped with a detector 44. This detector 44 includes a support portion 44a that is generally rectangular in shape and a detection portion 44b provided above the rear end of the support portion 44a. The upper end of the detection portion 44b is formed with a blade entry portion 44c that is cut out in such a way that the cutting edge 40a of the cutting blade 40 can enter.

[0037] A pair of columnar sections are provided on both sides of the blade entry section 44c in the Y-axis direction. A light-emitting section 46 and a light-receiving section 48 are housed in the pair of columnar sections, facing each other via the blade entry section 44c.

[0038] The light-emitting unit 46 is connected to a light source (not shown), such as an LED, via an optical fiber or the like, and emits light toward the light-receiving unit 48. The light-receiving unit 48 is connected to a photoelectric conversion unit (not shown) via an optical fiber or the like. This photoelectric conversion unit includes, for example, a photoelectric conversion element and generates a voltage corresponding to the amount of light received by the light-receiving unit 48.

[0039] Furthermore, two air supply nozzles 50 for supplying air to the light-emitting unit 46 and the light-receiving unit 48 are provided on the upper surface of the support unit 44a located in front of the detection unit 44b. Also, two liquid supply nozzles 52 for supplying liquid such as water to the light-emitting unit 46 and the light-receiving unit 48 are provided adjacent to the air supply nozzles 50. The light-emitting unit 46 and the light-receiving unit 48 are then washed with liquid from the liquid supply nozzles 52, for example, and then dried with air from the air supply nozzles 50.

[0040] A rectangular parallelepiped cover portion 56 is attached to the rear end surface of the detector 44 via a connecting device 54, such as a hinge. The inside of this cover portion 56 is hollow. Therefore, for example, by rotating the cover portion 56 around the connecting device 54, the detection unit 44b, the air supply nozzle 50, the liquid supply nozzle 52, etc., are housed inside the cover portion 56.

[0041] Then, when the cutting blade detection mechanism 14 detects the position of the tip of the cutting blade 40 (the lower end of the cutting edge 40a), the cover portion 56 is opened to expose the detection unit 44b, the air supply nozzle 50, and the liquid supply nozzle 52, etc. This allows the cutting edge 40a of the cutting blade 40 to enter the blade entry portion 44c, enabling the position of the tip of the cutting blade 40 to be detected.

[0042] Furthermore, as shown in Figure 2, an imaging unit 58 is provided adjacent to the cutting unit 36 ​​in the X-axis direction, fixed to the lower part of the Z-axis moving plate 30. This imaging unit 58 includes, for example, a light source such as an LED (Light Emitting Diode), an objective lens, and an image sensor such as a CCD (Charge Coupled Device) image sensor or a CMOS (Complementary Metal Oxide Semiconductor) image sensor.

[0043] The frame unit 11, once loaded into the cutting device 2, is placed on the holding table 10 with the tape 17 facing downwards, and then the annular frame 19 is gripped by multiple clamps 12. In this state, when the suction source communicating with the porous plate 10b is activated, the workpiece 13 is held on the holding table 10 via the tape 17.

[0044] Figure 4 is a schematic flowchart illustrating an example of a method for dividing a workpiece 13 held on a holding table 10. In this method, first, grooves are formed on the surface 13a of the workpiece 13 by cutting the workpiece 13 a predetermined number of times (for example, 1 to 19 times) along one of the multiple division lines 15a, 15b (groove formation step: S11).

[0045] The following describes an example of a method for cutting the workpiece 13 in three steps such that the depth of the groove formed in the workpiece 13 gradually increases along one of the multiple planned division lines 15a, 15b.

[0046] This groove forming step (S11) is performed, for example, after the following steps. First, a rotary drive source connected to the holding table 10 rotates the holding table 10 so that one of the multiple division lines 15a, 15b of the workpiece 13 is parallel to the X-axis direction (front-back direction).

[0047] Next, the X-axis movement mechanism located inside the opening 4a adjusts the position of the holding table 10 and / or the Y-axis movement mechanism 18 adjusts the position of the cutting unit 36 ​​so that the planned division lines 15a and 15b, which are parallel to the X-axis direction, are positioned in the X-axis direction (forward) when viewed from the cutting blade 40 in a plan view.

[0048] Next, the Z-axis movement mechanism 26 adjusts the position (height) of the cutting unit 36 ​​so that the tip of the cutting blade 40 is positioned at a predetermined distance lower than the surface 13a of the workpiece 13. This predetermined distance is set to be shorter than the distance obtained by dividing the thickness of the workpiece 13 by the planned number of groove-forming steps (S11) (in this case, 3), and longer than the distance obtained by dividing that number plus 1 (in this case, 4).

[0049] This positions the tip of the cutting blade 40 (the lower end of the cutting edge 40a) in the Z-axis direction (the thickness direction of the workpiece 13) in a position corresponding to the workpiece 13. Next, a rotational drive source connected to the base end of the spindle 42 rotates the spindle 42 so as to rotate the cutting blade 40.

[0050] Next, the first groove-forming step (S11) is performed. Figure 5(A) is a schematic partial cross-sectional side view showing the first groove-forming step (S11). Specifically, in the groove-forming step (S11), the X-axis movement mechanism provided inside the opening 4a moves the holding table 10 in the opposite direction (rearward) of the X-axis so that the tip of the cutting blade 40 passes from one end to the other of the workpiece 13 in the X-axis direction.

[0051] As a result, the surface 13a side of the workpiece 13 is cut, and a groove is formed on the surface 13a of the workpiece 13. If the groove forming step (S11) is performed only once (S12:NO), the groove forming step (S11) is performed again. This second groove forming step (S11) is performed, for example, after the following steps.

[0052] First, the Z-axis movement mechanism 26 raises the cutting unit 36 ​​so that the tip of the cutting blade 40 is separated from the workpiece 13. Next, the X-axis movement mechanism located inside the opening 4a moves the holding table 10 in the X-axis direction (forward) so that the division lines 15a and 15b, where grooves are formed, are positioned in the X-axis direction (forward) when viewed from the cutting blade 40 in a plan view.

[0053] Next, the tip of the cutting blade 40 in the Z-axis direction is brought closer to the back surface 13b of the workpiece 13 (approach step: S13). Specifically, in the first approach step (S13), the Z-axis movement mechanism 26 lowers the cutting unit 36 ​​so that it is positioned at a predetermined distance lower than the position of the cutting unit 36 ​​in the first groove forming step (S11).

[0054] Next, the second groove-forming step (S11) is performed. Figure 5(B) is a schematic partial cross-sectional side view showing the second groove-forming step (S11). This deepens the groove formed on the surface 13a of the workpiece 13. If the groove-forming step (S11) has been performed twice (S12:NO), the groove-forming step (S11) is performed again.

[0055] This third groove-forming step (S11) is performed, for example, after the following steps. First, the Z-axis movement mechanism 26 raises the cutting unit 36 ​​so that the tip of the cutting blade 40 is separated from the workpiece 13. Next, the X-axis movement mechanism located inside the opening 4a moves the holding table 10 in the X-axis direction (forward) so that the planned division lines 15a and 15b, where grooves are formed, are positioned in the X-axis direction (forward) relative to the cutting blade 40 in a plan view.

[0056] Next, the second approach step (S13) is performed. Specifically, in the second approach step (S13), the Z-axis movement mechanism 26 lowers the cutting unit 36 ​​so that it is positioned at a predetermined distance lower than the position of the cutting unit 36 ​​in the second groove forming step (S11).

[0057] Next, the third groove-forming step (S11) is performed. Figure 5(C) is a schematic partial cross-sectional side view showing the third groove-forming step (S11). This forms a groove on the surface 13a of the workpiece 13, with its bottom surface close to the back surface 13b. If the groove-forming step (S11) is performed three times (S12: YES), the position of the tip of the cutting blade 40 is detected (detection step: S20).

[0058] This detection step (S20) is performed, for example, after the following steps: First, the cover portion 56 is opened so that the detector 44 of the cutting blade detection mechanism 14 is exposed. Next, the X-axis movement mechanism located inside the opening 4a adjusts the position of the holding table 10 and / or the Y-axis movement mechanism 18 adjusts the position of the cutting unit 36 ​​so that the cutting blade 40 is positioned directly above the blade entry portion 44c of the detector 44.

[0059] Next, the detection step (S20) is performed. Figure 6 is a schematic front view showing the detection step (S20). In this detection step (S20), first, the light source connected to the light-emitting unit 46 is controlled so that light L is irradiated from the light-emitting unit 46 toward the light-receiving unit 48. Next, the Z-axis movement mechanism 26 lowers the cutting unit 36 ​​so that the tip of the cutting blade 40 enters the blade entry part 44c.

[0060] As a result, as shown in Figure 6, the light L irradiated from the light-emitting unit 46 to the light-receiving unit 48 is partially blocked by the cutting blade 40, and the amount of light received by the light-receiving unit 48 gradually decreases. Accordingly, the voltage generated in the photoelectric conversion unit connected to the light-receiving unit 48 also gradually decreases. When this voltage reaches a predetermined value, it is determined that the tip of the cutting blade 40 is at a predetermined position (height) in the blade entry portion 44c.

[0061] This allows the position of the tip of the cutting blade 40 to be detected. Once the position of the tip of the cutting blade 40 is detected, the workpiece 13 is divided (dividing step: S30). This dividing step (S30) is performed, for example, after the following steps.

[0062] First, the X-axis movement mechanism located inside the opening 4a adjusts the position of the holding table 10 and / or the Y-axis movement mechanism 18 adjusts the position of the cutting unit 36 ​​so that the planned division lines 15a and 15b, which are formed on the surface 13a of the workpiece 13 with grooves that are close to the bottom surface on the back surface 13b, are positioned in the X-axis direction (forward) when viewed from the cutting blade 40 in a plan view.

[0063] Next, the Z-axis movement mechanism 26 adjusts the position of the cutting unit 36 ​​so that the tip of the cutting blade 40 is positioned lower than the back surface 13b of the workpiece 13 and higher than the upper surface of the holding table 10. This positions the tip of the cutting blade 40 in the Z-axis direction in a position corresponding to the tape 17.

[0064] Next, the splitting step (S30) is performed. Figure 7 is a schematic partial cross-sectional side view showing the splitting step (S30). Specifically, the X-axis movement mechanism provided inside the opening 4a moves the holding table 10 in the opposite direction (rearward) of the X-axis so that the tip of the cutting blade 40 passes from one end to the other of the workpiece 13 in the X-axis direction.

[0065] As a result, the cutting blade 40 penetrates the workpiece 13, and the workpiece 13 is divided at one of the multiple division lines 15a, 15b. Furthermore, by sequentially performing the groove forming step (S11), detection step (S20), and division step (S30) on the remaining division lines 15a, 15b, the workpiece 13 can be divided at each of the multiple division lines 15a, 15b.

[0066] In the workpiece division method described above, a detection step (S20) is performed to detect the position of the tip of the cutting blade 40 after the completion of three groove forming steps (S11) performed to divide the workpiece 13 in each of the multiple division lines 15a, 15b, and before the start of the division step (S30).

[0067] This allows the splitting step (S30) to be performed with the tip of the cutting blade 40 positioned appropriately. As a result, in the method described above, even if the cutting blade 40 wears out during the three groove forming steps (S11), it becomes possible to reliably split the workpiece 13 into multiple planned splitting lines 15a and 15b.

[0068] It should be noted that the above description represents only one aspect of the present invention, and the present invention is not limited to the above description. For example, in the cutting apparatus 2, an X-axis movement mechanism for moving the cutting unit 36 ​​along the X-axis direction may be provided in place of or in addition to the X-axis movement mechanism provided inside the opening 4a of the base 4.

[0069] Similarly, in the cutting apparatus 2, a movement mechanism for moving the holding table 10 along the Y-axis and Z-axis directions may be provided instead of or in addition to the Y-axis direction movement mechanism 18 and the Z-axis direction movement mechanism 26. In other words, in the present invention, it is sufficient that the cutting blade 40 and the workpiece 13 can be moved relative to each other along the X-axis, Y-axis, and Z-axis directions, and there are no restrictions on the structure for this purpose.

[0070] Furthermore, in the method shown in Figure 3, the number of times the groove forming step (S11) is performed (i.e., the "predetermined number" shown in step S12) is not limited to three times. In other words, in the present invention, the detection step (S20) may be performed after the completion of one, two, or four or more groove forming steps (S11) and before the start of the division step (S30).

[0071] Furthermore, in the present invention, the detection step (S20) may be performed not only after the completion of multiple groove-forming steps (S11) and before the start of the division step (S30), but also in between the multiple groove-forming steps (S11). For example, if the groove-forming step (S11) is performed 10 times, the detection step (S20) may be performed not only after the completion of the 10th groove-forming step (S11), but also after the completion of the 5th groove-forming step (S11) and before the start of the 6th groove-forming step (S11).

[0072] Furthermore, the structures and methods of the embodiments described above can be modified as appropriate without departing from the scope of the present invention. [Explanation of symbols]

[0073] 2:Cutting device 4: Base (4a: Opening) 6: Table cover 8: Dustproof and waterproof cover 10: Holding table (10a: frame, 10b: porous plate) 11: Frame Unit 12: Clamp 13: Workpiece (13a: front side, 13b: back side) 14: Cutting blade detection mechanism 15a, 15b: Planned division lines 16: Support structure (16a: standing part, 16b: arm part) 17: Tape 18:Y-axis direction movement mechanism 19: Ring frame 20: Y-axis guide rail 22: Y-axis movement plate 24: Screw shaft 26:Z-axis direction movement mechanism 28: Z-axis guide rail 30: Z-axis movement plate 32: Screw shaft 34: Motor 36: Cutting Unit 38: Spindle Housing 40: Cutting blade 42: Imaging Unit 44: Detector (44a: Support part, 44b: Detection part, 44c: Blade entry part) 46: Light-emitting part 48: Light receiving part 50: Air supply nozzle 52: Liquid supply nozzle 54: Connector 56: Cover section 58: Imaging Unit

Claims

[Claim 1] A method for dividing a workpiece, in which the surface is exposed and tape is attached to the back surface, at each of a plurality of planned division lines, A cutting step of cutting the workpiece in each of the multiple division lines using a rotating cutting blade, The system includes a detection step for detecting the position of the tip of the cutting blade, The cutting step is, A groove forming step in which a groove is formed on the surface of a workpiece by moving the workpiece and the cutting blade relative to each other so that the cutting blade, whose tip is positioned at a position corresponding to the workpiece in the thickness direction of the workpiece, cuts into the workpiece; The process includes: performing the groove-forming step multiple times such that the tip of the cutting blade gradually approaches the back surface of the workpiece, and then dividing the workpiece by moving the workpiece and the cutting blade relative to each other such that the cutting blade, with its tip positioned in the thickness direction corresponding to the tape, cuts into the tape; The detection step is a method for dividing a workpiece, which is performed in each of the multiple planned division lines, between multiple groove-forming steps and after the completion of multiple groove-forming steps and before the start of the division step.

Images