Sheet application device and sheet application method

Abstract

To provide a sheet application device which can determine that an adhesive sheet is applied so that an adherend is placed at a proper position relative to a frame member, and to provide a sheet application method.SOLUTION: A sheet application device EA includes application means 10 which applies an adhesive sheet AS to a ring frame RF and an adherend WK disposed within an opening RF1 of the ring frame RF. The sheet application device EA further includes inspection means 20 which inspects a position of the adherend WK relative to the ring frame RF in the ring frame RF and the adherend WK to which the adhesive sheet AS is applied.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a sheet sticking device and a sheet sticking method.

Background Art

[0002] There is known a sheet sticking device that sticks an adhesive sheet to a frame member and an adherend disposed within an opening of the frame member (see, for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] Since the tape sticking device 2 (sheet sticking device) described in Patent Document 1 is not configured to inspect the position of the adherend with respect to the frame member after sticking the tape 3a (adhesive sheet) to the frame 13 (frame member) and the workpiece 11 (adherend), there is a disadvantage that it is impossible to determine that the adhesive sheet has been stuck so that the adherend is in an appropriate position with respect to the frame member.

[0005] An object of the present invention is to provide a sheet sticking device and a sheet sticking method capable of determining that an adhesive sheet has been stuck so that an adherend is in an appropriate position with respect to a frame member.

Means for Solving the Problems

[0006] The present invention employs the configurations described in the claims.

Effects of the Invention

[0007] According to the present invention, in a frame member and adherend to which an adhesive sheet is attached, it is possible to determine that the adhesive sheet has been attached so that the adherend is in the appropriate position relative to the frame member, in order to inspect the position of the adherend relative to the frame member. Furthermore, if the inspection means measures a first distance, which is the distance from the edge of the frame member to the edge of the adherend along a predetermined first virtual line, and a second distance, which is the distance from the edge of the frame member to the edge of the adherend along a predetermined second virtual line different from the first virtual line, and inspects the position of the adherend relative to the frame member based on the measurement results of the first and second distances, the accuracy of the inspection of the adherend position can be improved. [Brief explanation of the drawing]

[0008] [Figure 1] An explanatory diagram of a sheet application device according to one embodiment of the present invention and an explanatory diagram of the operation of the same device. [Modes for carrying out the invention]

[0009] An embodiment of the present invention will be described below with reference to Figure 1. In this embodiment, the X, Y, and Z axes are orthogonal to each other. The X and Y axes are axes within a predetermined plane, and the Z axis is an axis perpendicular to the predetermined plane. Furthermore, in this embodiment, when directions are indicated based on a view from the front direction in Figure 1(A) parallel to the Y axis, "up" is the direction of the Z-axis arrow and "down" is the opposite direction, "left" is the direction of the X-axis arrow and "right" is the opposite direction, "front" is the front direction in Figure 1(A) parallel to the Y axis and "back" is the opposite direction.

[0010] The sheet application device EA comprises an application means 10 that performs an application process of applying an adhesive sheet AS to a ring frame RF as a frame member and an adherend WK placed in the opening RF1 of the ring frame RF, and an inspection means 20 that performs an inspection process of checking the position of the adherend WK relative to the ring frame RF in the ring frame RF and adherend WK to which the adhesive sheet AS has been applied, and is arranged near a support means 30 that supports the ring frame RF and adherend WK.

[0011] The adhesive means 10 includes a support roller 11 that supports a roll RS with an adhesive sheet AS temporarily attached to one side of a release sheet RL, a guide roller 12 that guides the roll RS, a release plate 13 as a release means that folds the release sheet RL at the release edge 13A and peels the adhesive sheet AS from the release sheet RL, a drive roller 14 supported on the output shaft (not shown) of a rotary motor 14A as a drive device and sandwiches the release sheet RL with a pinch roller 14B, a recovery roller 15 supported on the output shaft of a drive device (not shown) and constantly applies a predetermined tension to the release sheet RL between itself and the pinch roller 14B while the sheet adhesive device EA is in automatic operation and recovers the release sheet RL, and a pressing roller 16 as a pressing means that presses and attaches the adhesive sheet AS to the ring frame RF and the adherend WK.

[0012] The inspection means 20 includes an inversion means 21 for inverting an integrated object UP in which an adhesive sheet AS is attached to a ring frame RF and an object WK; a plurality of detection means 22 arranged in the front-to-back direction, consisting of imaging means such as a camera or projector, and various sensors such as optical sensors and ultrasonic sensors, for detecting the outer edge RF2 as the edge of the ring frame RF and the outer edge WK1 as the edge of the object WK; relative movement means 23 for moving the detection means 22 relative to the ring frame RF and the object WK; and control means 24 such as a personal computer or sequencer for inspecting the position of the object WK relative to the ring frame RF and for controlling the overall or partial operation of the sheet application device EA. In this embodiment, the inspection means 20 measures a first distance SD1, which is the distance from the outer edge RF2 of the ring frame RF to the outer edge WK1 of the adherend WK along a predetermined first virtual line SL1, and a second distance SD2, which is the distance from the outer edge RF2 of the ring frame RF to the outer edge WK1 of the adherend WK along a predetermined second virtual line SL2 that is different from the first virtual line SL1, and inspects the position of the adherend WK relative to the ring frame RF based on the measurement results of the first distance SD1 and the second distance SD2. The reversing means 21 is composed of multiple arms and includes a so-called articulated robot 21A, which is a drive device that can displace what is supported by the tip arm 21B, which is the work part, to any position and angle within its working range, and a holding means for holding the integrated object UP, which is a chuck cylinder 21C, which is a drive device supported by the tip arm 21B. The relative movement means 23 comprises a linear motor 23A as a drive device, a rotary motor 23C as a drive device supported by a slider 23B of the linear motor 23A, and an inspection table 23F supported by the output shaft 23D of the rotary motor 23C, which has a support surface 23E capable of being held by a pressure reducing means (not shown), such as a pressure reducing pump or a vacuum ejector. The first and second virtual lines SL1 and SL2 are parallel lines that, in a plan view, pass through positions at predetermined distances PD1 and PD2 in the front-rear direction from the axis center AR of the output shaft 23D of the rotary motor 23C, and extend in the left-right direction. The control means 24, based on the inspection results of checking the position of the adherend WK relative to the ring frame RF, determines that an adhesion defect has occurred, where the adherend WK is in an inappropriate position relative to the ring frame RF, and outputs a defect detection signal to a warning means (not shown), such as a display or speaker. The warning device (not shown), upon receiving the defect detection signal output by the control means 24, outputs a warning signal such as light or sound via a display or speaker.

[0013] The support means 30 is supported by the slider 23G of the linear motor 23A and includes a table 31 having an object support surface 31A and a frame support surface 31B, respectively, which can be held by suction using a depressurization means (holding means) not shown, such as a depressurization pump or a vacuum ejector, and the linear motor 23A is also used as the relative movement means 23.

[0014] The operation of the sheet application device EA described above will now be explained. First, the user of the sheet application device EA (hereinafter simply referred to as "user") sets the raw material RS as shown in the figure, with the components positioned in the initial positions indicated by the solid lines in Figure 1(A). Then, a signal to start automatic operation is input via an operating means such as an operation panel or personal computer (not shown). The application means 10 then drives the rotary motor 14A to feed out the raw material RS, and when the leading end of the adhesive sheet AS in the feeding direction is peeled off by a predetermined length from the peeling edge 13A of the release plate 13, the application means 10 stops driving the rotary motor 14A.

[0015] Next, when a user or a transport means (not shown) such as an articulated robot or a belt conveyor places the adherend WK and ring frame RF at predetermined positions on the adherend support surface 31A and frame support surface 31B, as shown in Figure 1(A), the support means 30 drives a depressurization means (not shown) to start adsorption and holding of the adherend WK and ring frame RF on the adherend support surface 31A and frame support surface 31B. Subsequently, the support means 30 drives a linear motor 23A to move the table 31 to the left, and when the table 31 reaches the predetermined position, the adhesive means 10 drives a rotary motor 14A to feed out the raw material RS in accordance with the movement speed of the table 31. As a result, as shown by the dashed line in Figure 1(A), the leading adhesive sheet AS is peeled off from the release sheet RL at the release edge 13A of the release plate 13, and the adhesive sheet AS peeled off from the release sheet RL is pressed and attached to the ring frame RF and adherend WK by the pressure roller 16.

[0016] Next, the entire leading adhesive sheet AS is attached to the ring frame RF and the adherend WK to form an integrated object UP. When the leading edge of the next adhesive sheet AS following the leading adhesive sheet AS is peeled off by a predetermined length at the peeling edge 13A of the release plate 13, the adhesive means 10 stops driving the rotary motor 14A. Then, when the table 31 supporting the integrated object UP moves out from below the pressure roller 16 and reaches a predetermined position in front of the articulated robot 21A, as shown by the dashed line in Figure 1(A), the support means 30 stops driving the linear motor 23A, then stops driving the depressurization means (not shown), and releases the suction holding of the adherend WK and ring frame RF on the adherend support surface 31A and the frame support surface 31B. Next, the inspection means 20 drives the articulated robot 21A and the chuck cylinder 21C, and when the chuck cylinder 21C lifts the integrated object UP and inverts it, the support means 30 drives the linear motor 23A and returns the table 31 to its initial position. After that, the inspection means 20 drives the linear motor 23A and moves the inspection table 23F to the right, and when the inspection table 23F reaches a predetermined position in front of the articulated robot 21A, the inspection means 20 stops driving the linear motor 23A. Next, the inspection means 20 drives the articulated robot 21A and places the inverted integrated object UP at a predetermined position on the support surface 23E, and then drives a depressurization means (not shown) to start suction holding of the integrated object UP on the support surface 23E. Then, the inspection means 20 drives the articulated robot 21A and the linear motor 23A to return the chuck cylinder 21C and the inspection table 23F to their initial positions.

[0017] Next, the inspection means 20 drives the linear motor 23A to move the inspection table 23F to the right by a predetermined distance, as shown by the dashed line in Figure 1(A). At this time, as the inspection table 23F moves to the right, when the step between the inspection table 23F and the ring frame RF passes below each detection means 22, the inspection means 20 detects the outer edge RF2 of the ring frame RF with each detection means 22 and stores the distance the inspection table 23F has moved from its initial position in the control means 24. Subsequently, when the step between the adhesive sheet AS and the adherend WK passes below each detection means 22, the inspection means 20 detects the outer edge WK1 of the adherend WK with each detection means 22 and stores the distance the inspection table 23F has moved from its initial position in the control means 24. Next, the inspection means 20 measures the first and second distances SD1 and SD2 by calculating the distance from the outer edge RF2 of the ring frame RF to the outer edge WK1 of the adherend WK along the first and second virtual lines SL1 and SL2 shown in Figure 1(B), and based on these measurement results, the amount of displacement of the adherend WK relative to the ring frame RF in the DX axis direction of the inspection table 23F is calculated using the following formula (1).

[0018] Deviation amount = Reference distance RD - (First distance SD1 + Second distance SD2) / 2 ... Equation (1) In formula (1) above, the reference distance RD is a predetermined design value and corresponds to the first and second distances SD1 and SD2 when the center of the outer edge WK1 of the adherend WK coincides with the center of the ring frame RF, as shown in Figure 1(B). The inspection means 20 then drives the linear motor 23A to return the inspection table 23F to its initial position. Next, after the inspection means 20 stops driving the linear motor 23A, it drives the rotary motor 23C to rotate the inspection table 23F 90 degrees clockwise around the axis center AR of the output shaft 23D, as shown in Figure 1(C). After that, the inspection means 20 measures the first and second distances SD1 and SD2 by moving the inspection table 23F a predetermined distance in the same manner as above, and then calculates the amount of displacement of the adherend WK relative to the ring frame RF in the DY axis direction of the inspection table 23F based on these measurement results.

[0019] Next, the inspection means 20 compares the absolute values of the amounts of deviation in the DX-axis direction and the DY-axis direction with a predetermined threshold value by the control means 24, and inspects the position of the adherent body WK with respect to the ring frame RF. As a result of the inspection, when the amounts of deviation in the DX-axis direction and the DY-axis direction are below the predetermined threshold value, the inspection means 20 determines that the adhesive sheet AS is attached so that the adherent body WK is in an appropriate position with respect to the ring frame RF, and does not output a defect determination signal to a warning means (not shown). Then, the inspection means 20 stops the driving of a decompression device (not shown) and releases the adsorption and holding of the integrated object UP on the support surface 23E. Next, when the user or a conveying means (not shown) conveys the integrated object UP to the next process, the inspection means 20 drives the linear motor ........

[0020] It should be noted that the content in the original text seems to be incomplete in the middle of the description in the English translation of . Please check and supplement the original text if necessary for a more accurate translation.Here, if the inspection of the position of the adherend WK reveals that the amount of displacement in either the DX axis direction or the DY axis direction exceeds a predetermined threshold, the inspection means 20 determines that a defect has occurred in which the adhesive sheet AS has been attached while the adherend WK is in an inappropriate position relative to the ring frame RF. For example, as shown by the dashed line in Figure 1(B), if the adherend WK is misaligned relative to the ring frame RF in the opposite direction to the arrow of the DY axis, when the inspection means 20 measures the first and second distances SD1 and SD2 in the DX axis direction, the first distance SD1 becomes shorter than the reference distance RD, but the second distance SD2 becomes longer than the reference distance RD, so the absolute value of the displacement in the DX axis direction is less than or equal to the predetermined threshold. On the other hand, as shown in Figure 1(C), when the inspection means 20 measures the first and second distances SD1 and SD2 in the DY axis direction, both the first and second distances SD1 and SD2 become shorter than the reference distance RD, so the absolute value of the displacement in the DY axis direction exceeds the predetermined threshold. Therefore, the inspection means 20 determines that an adhesion defect has occurred and outputs a defect detection signal to a warning means (not shown). When the warning device (not shown) receives the defect detection signal, it emits a warning signal via a display, speaker, etc., to inform the user that an adhesion defect has occurred. Subsequently, when the user or a transport means (not shown) removes the integrated object UP from the inspection table 23F, the inspection means 20 drives the linear motor 23A and the rotary motor 23C to return the inspection table 23F to its initial position, and the above operation is repeated thereafter.

[0021] According to the embodiments described above, in a ring frame RF and adherend WK to which an adhesive sheet AS is attached, it is possible to determine that the adhesive sheet AS has been attached so that the adherend WK is in an appropriate position relative to the ring frame RF, in order to inspect the position of the adherend WK relative to the ring frame RF.

[0022] As described above, the best configuration, method, etc. for implementing the present invention are disclosed in the above description, but the present invention is not limited thereto. That is, although the present invention has been particularly illustrated and described mainly with respect to specific embodiments, various modifications can be made by those skilled in the art to the above-described embodiments in terms of shape, material, quantity, and other detailed configurations without departing from the scope of the technical idea and purpose of the present invention. In addition, the descriptions limiting the shape, material, etc. disclosed above are illustrative descriptions for facilitating the understanding of the present invention and do not limit the present invention. Therefore, the descriptions using the names of members with some or all of the limitations on those shapes, materials, etc. removed are included in the present invention.

[0023] For example, the adhesive means 10 may feed out a roll of adhesive sheets in which a closed loop shape or a cut along the entire width direction is formed in a strip-shaped adhesive sheet substrate temporarily attached to a release sheet RL, and a predetermined area partitioned by the cut becomes the adhesive sheet AS. Alternatively, a roll of adhesive sheets with a strip-shaped adhesive sheet substrate temporarily attached to a release sheet RL may be used, and a closed loop shape or a cut along the entire width direction may be formed in the adhesive sheet substrate using a cutting means such as a cutting blade, and a predetermined area partitioned by the cut becomes the adhesive sheet AS. Alternatively, plate-shaped members or shaft members may be used to support or guide the roll RS and release sheet RL instead of rollers such as the support roller 11 and guide roller 12. Alternatively, the roll RS may be supported by, for example, a fanfold fold without being wound, or the release sheet RL may be fanfold fold without being wound, shredded with a shredder, or piled up haphazardly. A recovery means may be employed to recover the release sheet RL, or a recovery means may not be employed. Alternatively, the adhesive sheet AS may be held by a holding member that is supported on the output shaft of a linear motor acting as a pressing means, and can be held by suction by a depressurizing means (not shown), such as a depressurizing pump or a vacuum ejector, and the adhesive sheet AS held by the holding member may be pressed and attached to the ring frame RF or the adherend WK. In the above embodiment, the ring frame RF and the adherend WK were moved relative to the immovable attaching means 10, and the adhesive sheet AS was attached to the ring frame RF and the adherend WK. However, the adhesive sheet AS may be attached to the ring frame RF and the adherend WK without moving them, or while moving the ring frame RF and the adherend WK, by moving the attaching means 10.

[0024] The inspection means 20 does not necessarily have to include a reversal means 21. In this case, a detection means 22 provided above the table 31 may detect the outer edge WK1 of the adherend WK through a transparent adhesive sheet AS. Alternatively, the inspection table 23F may be made transparent, and a detection means 22 provided below the inspection table 23F may detect the outer edge RF2 of the ring frame RF and the outer edge WK1 of the adherend WK through the inspection table 23F. The inspection means 20 may comprise one or more detection means 22, or the relative moving means 23 may comprise a driving means for moving the detection means 22 in the forward and backward directions, and one detection means 22 may detect the outer edge RF2 of the ring frame RF and the outer edge WK1 of the adherend WK along a first virtual line SL1, and then detect the outer edge RF2 of the ring frame RF and the outer edge WK1 of the adherend WK along a second virtual line SL2, or instead of the outer edge RF2 of the ring frame RF, the inner edge formed by the opening RF1 of the ring frame RF may be used. The edge of the ring frame RF may be detected, and the distance from the inner edge of the ring frame RF to the outer edge WK1 of the adherend WK may be measured as the first and second distances SD1 and SD2. Alternatively, if the adherend WK is annular, instead of detecting the outer edge WK1 of the adherend WK, the inner edge of the adherend WK may be detected, and the distance from the outer edge RF2 of the ring frame RF to the inner edge of the adherend WK may be measured as the first and second distances SD1 and SD2, or the distance from the inner edge of the ring frame RF to the inner edge of the adherend WK may be measured as the first and second distances SD1 and SD2. The inspection means 20 does not necessarily have to include a rotating motor 23C. If it does not include a rotating motor 23C, the position of the adherend WK relative to the ring frame RF may be inspected based on the amount of displacement of the inspection table 23F in the DX axis direction. Alternatively, the rotational movement of the inspection table 23F may be performed in multiple steps, and the position of the adherend WK relative to the ring frame RF may be inspected based on the amount of displacement calculated in three or more directions of the inspection table 23F. Alternatively, the predetermined distances PD1 and PD2 between the first and second virtual lines SL1 and SL2 and the axis center AR of the output shaft 23D of the rotating motor 23C may be equal to each other or different to each other. Alternatively, the distance from the outer edge RF2 of the ring frame RF to the outer edge WK1 of the adherend WK may be measured along one virtual line in each direction of the inspection table 23F in the DX axis direction and the DY axis direction, and the position of the adherend WK relative to the ring frame RF may be inspected based on these distances. The inspection means 20 may output the direction and amount of misalignment of the adherend WK relative to the ring frame RF to the warning means, and display this information on a display provided on the warning means.

[0025] The support means 30 may or may not be provided in the sheet application apparatus EA of the present invention. If it is not provided, the adherend WK or ring frame RF may be supported by another device.

[0026] While the sheet application device EA is inspecting the position of the adherend WK relative to the ring frame RF of the integral object UP supported on the inspection table 23F, it may apply the next adhesive sheet AS to the ring frame RF and adherend WK supported on the table 31. The frame members may be other than the ring frame RF, including non-annular (without a connected outer circumference), circular, elliptical, polygonal, or other shapes.

[0027] The means and processes in the present invention are not limited in any way as long as they can perform the operations, functions, or processes described for those means and processes, and are certainly not limited in any way to the components or processes of a single embodiment shown in the above-mentioned embodiments. For example, the adhesive means can be any means capable of attaching an adhesive sheet to a frame member and a substrate placed in the opening of the frame member, and is not limited in any way as long as it is within the scope of the common technical knowledge at the time of filing (the same applies to other means and processes).

[0028] The material, type, shape, etc., of the adhesive sheet AS, the adherend WK, and the frame member are not particularly limited. For example, the adhesive sheet AS, the adherend WK, and the frame member may be circular, elliptical, polygonal (triangle, square, etc.), or have other shapes. The adhesive sheet AS may also be of a pressure-sensitive adhesive or heat-sensitive adhesive type. If a heat-sensitive adhesive sheet AS is used, it should be bonded by an appropriate method, such as providing a heating means such as a suitable coil heater or heat pipe to heat the adhesive sheet AS. Furthermore, the adhesive sheet AS may be, for example, a single layer of adhesive only, one with an intermediate layer between the substrate and the adhesive layer, one with three or more layers including a cover layer on the upper surface of the substrate, or even a so-called double-sided adhesive sheet that allows the substrate to be peeled off the adhesive layer. The double-sided adhesive sheet may have a single or multi-layer intermediate layer, or be a single or multi-layer without an intermediate layer. Furthermore, the adherend WK may be a single object such as food, a resin container, a semiconductor wafer such as a silicon semiconductor wafer or a compound semiconductor wafer, a circuit board, an information recording substrate such as an optical disc, a glass plate, a steel plate, a ceramic, a wooden board, or a resin, or it may be a composite object formed from two or more of these, and any form of component or article can also be included. Note that the adhesive sheet AS may be read in a functional or application-based way, and may be any sheet, film, tape, etc. such as an information label, decorative label, protective sheet, dicing tape, die attach film, die bonding tape, or recording layer forming resin sheet.

[0029] The drive equipment in the above embodiment can be electric equipment such as rotary motors, linear motors, single-axis robots, articulated robots with two or more axes, actuators such as air cylinders, hydraulic cylinders, rodless cylinders, and rotary cylinders, or a combination of these directly or indirectly. In the above embodiment, if a rotating member such as a roller is used, a drive device for rotating the rotating member may be provided, the surface of the rotating member or the rotating member itself may be made of a deformable material such as rubber or resin, the surface of the rotating member or the rotating member itself may be made of a non-deformable material, other members such as rotating or non-rotating shafts or blades may be used instead of rollers, and if a means or member for pressing the object to be pressed, such as a pressing roller or pressing head, is used, in addition to the examples given above, a means of blowing gas such as air or gas may be used, in addition to rollers, round bars, blade materials, brush-like members, or a means of blowing gas may be used, and the pressing material may be made of a deformable material such as rubber, resin, or sponge, or it may be made of a non-deformable material such as metal or resin, and if a means or member for peeling the object to be peeled, such as a peeling plate or peeling roller, is used, in addition to the examples given above, In combination, plate-shaped members, round bars, rollers, and other members may be used, the material to be peeled off may be made of a deformable material such as rubber or resin, or a non-deformable material, and if a support (holding) means or support (holding) member or other means for supporting (holding) the supported member (held member) is used, a configuration in which the supported member is supported (held) by gripping means such as mechanical chucks or chuck cylinders, Coulomb force, adhesive (adhesive sheets, adhesive tapes), adhesive agents (adhesive sheets, adhesive tapes), magnetic force, Bernoulli adsorption, suction adsorption, drive equipment, etc. may be used, and if a cutting means or cutting member or other means for cutting the member to be cut or forming cuts or cutting lines in the member to be cut is used, instead of or in combination with the examples above, a cutter blade, laser cutter, ion beam, thermal power, heat, water pressure, electric heating wire, spraying of gas or liquid, etc. may be used, or the material to be cut may be moved by combining appropriate drive equipment to perform the cutting. [Explanation of symbols]

[0030] EA... Sheet application device 10…Method of attachment 20…Inspection methods AS...Adhesive sheet RF... Ring frame (frame component) WK...Adherent

Claims

1. The system includes means for attaching an adhesive sheet to a frame member and a substrate placed within the opening of the frame member, The frame member and the adherend to which the adhesive sheet is attached further include an inspection means for inspecting the position of the adherend relative to the frame member, The sheet application device is characterized in that the inspection means measures a first distance, which is the distance from the edge of the frame member to the edge of the adherend, along a predetermined first virtual line, and a second distance, which is the distance from the edge of the frame member to the edge of the adherend, along a predetermined second virtual line different from the first virtual line, and inspects the position of the adherend relative to the frame member based on the measurement results of the first distance and the second distance.

2. The process involves attaching an adhesive sheet to the frame member and the adherend placed within the opening of the frame member. Further inspection steps are performed to check the position of the adherend relative to the frame member and the adherend to which the adhesive sheet has been attached. The sheet application method is characterized in that, in the inspection step, a first distance is measured, which is the distance from the edge of the frame member to the edge of the adherend, along a predetermined first imaginary line, and a second distance is measured, which is the distance from the edge of the frame member to the edge of the adherend, along a predetermined second imaginary line different from the first imaginary line, and the position of the adherend relative to the frame member is inspected based on the measurement results of the first distance and the second distance.

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