Method for coating a workpiece with resin

Abstract

To provide a resin coating method that sets an appropriate waiting time until the start of curing in relation to the temperature in a processing chamber in the case where a workpiece is coated with resin.SOLUTION: The coating method in a resin coating device includes the steps of: obtaining in advance a relationship between a temperature in a processing chamber and a waiting time until the posture of a workpiece becomes a shape in accordance with internal stresses after a workpiece is coated with a liquid resin is as correlation data; measuring the temperature inside the processing chamber during the actual coating of the resin; determining the waiting time corresponding to the measured temperature using the correlation data; and curing the liquid resin after the waiting time has elapsed after the coating of the liquid resin.SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] The present invention relates to a resin coating method for coating a workpiece with a resin.

Background Art

[0002] In order to flatten a workpiece, the workpiece is pressed against a liquid resin to coat the workpiece with the liquid resin, then the liquid resin is cured, the surface on the opposite side of the coated surface of the resin is ground to flatten it, and then the resin is peeled off, and the surface coated with the resin is ground to flatten it (see, for example, Patent Document 1).

[0003] In the above process, when the resin coating the workpiece is cured, if the workpiece is cured in a corrected posture instead of the posture corresponding to the internal stress of the workpiece, the workpiece is ground and flattened in the corrected state, and since it cannot be flattened along the internal stress of the workpiece, there is a problem that the workpiece is deformed such as warping or undulating after flattening. Therefore, after coating the workpiece with resin and before curing, the holding of the holding surface of the workpiece is released, and a waiting time is set to return to the posture along the internal stress of the workpiece itself.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] If the waiting time is too short, the posture of the workpiece will not return sufficiently. On the other hand, if the waiting time is too long, the liquid resin will flow to the outer periphery of the workpiece and change the posture of the workpiece. Therefore, it is necessary to appropriately set the waiting time so that the curing of the liquid resin starts when the posture of the workpiece becomes the shape along the internal stress.

[0006] Furthermore, while higher viscosity liquid resins tend to result in longer waiting times than lower viscosity resins, the viscosity of liquid resins changes with the temperature inside the processing room. Since the temperature inside the processing room is not always constant, there is a problem in that the waiting time cannot be set uniformly.

[0007] This invention has been made in view of such problems, and aims to enable setting an appropriate waiting time until curing begins when coating a workpiece with resin, in relation to the temperature inside the processing chamber. [Means for solving the problem]

[0008] The present invention relates to a method for coating a workpiece with a resin, comprising: a resin supply step of supplying a liquid resin to the upper surface of a stage; a holding step of holding the workpiece on the holding surface of a holding table that faces the upper surface of the stage and has a holding surface for holding the workpiece; a temperature measurement step of measuring the temperature at least at one location in a processing chamber that includes at least a part of the holding table and the stage; a resin coating step of bringing the holding table relatively close to the upper surface of the stage, pressing the workpiece held on the holding table into the liquid resin, and coating the workpiece with the resin; a waiting step of releasing the hold of the workpiece by the holding table and returning the posture of the workpiece to a shape that conforms to the internal stress of the workpiece itself; and a curing step of curing the liquid resin coated on the workpiece after the waiting step has been performed, wherein the waiting time in the waiting step is calculated based on the temperature measured in the temperature measurement step, using pre-set correlation data between the temperature in the processing chamber and the waiting time. [Effects of the Invention]

[0009] In the above method of resin coating a workpiece, correlation data is acquired in advance regarding the relationship between the temperature in the processing room and the waiting time from when the workpiece is coated with liquid resin until its posture conforms to the shape of the internal stress. When actually coating the workpiece with resin, the temperature in the processing room is measured, and the waiting time corresponding to the measured temperature is determined using the correlation data. After coating with liquid resin, the liquid resin is allowed to harden after the waiting time has elapsed. Therefore, the hardening of the liquid resin begins when the posture of the workpiece conforms to the shape of the internal stress, and the workpiece can be flattened according to its internal stress rather than a corrected posture, thus preventing deformation of the workpiece after flattening. [Brief explanation of the drawing]

[0010] [Figure 1] This is a perspective view showing an example of a resin coating apparatus. [Figure 2] This is a side view showing a part of a resin coating device. [Figure 3] This is a flowchart illustrating the present invention step by step. [Figure 4] This is a cross-sectional view illustrating the steps involved in coating one side of a wafer with resin. (a) shows the wafer being held on a holding table and liquid resin being dropped onto a film; (b) shows the liquid resin being pressed down by the wafer; (c) shows the wafer being released from the holding table; and (d) shows the liquid resin being cured by irradiation with ultraviolet light. [Figure 5] This is a schematic cross-sectional view illustrating an example where liquid resin flowed to the outer periphery of the workpiece, forcibly changing the wafer's orientation. [Figure 6] This graph shows an example of correlation data. [Figure 7]This is a cross-sectional view illustrating the process of grinding a wafer that has been planarized along its internal stresses and coated with resin, with (a) being the wafer before grinding with the resin coating, (b) being the state where the resin side is held by suction on the chuck table of the grinding device and the other side of the wafer is being ground, and (c) being the state where the other side of the wafer that has been ground is held by suction on the chuck table of the grinding device and the other side of the wafer is being ground. [Figure 8] This is a cross-sectional view illustrating the process of grinding a wafer coated with resin without planarization along internal stresses, with (a) being the wafer before grinding with the resin coating, (b) being held by the chuck table of the grinding device with the resin side being sucked and the other side of the wafer being ground, (c) being held by the chuck table of the grinding device with the other side being ground and the other side of the wafer being ground, and (d) being a schematic cross-sectional view illustrating the state when the suction holding by the chuck table of the grinding device is released. [Modes for carrying out the invention]

[0011] The resin coating apparatus 1 shown in Figure 1 is an example of an apparatus that coats one side of a wafer, which is a workpiece, with resin by pressing and curing a liquid resin onto that side. The apparatus comprises a housing 100, an apparatus base 101 disposed within the housing 100, a column 102 erected from the apparatus base 101, a support base 103 disposed adjacent to the apparatus base 101, and a cassette housing body 104 connected to the rear end (+Y direction) of the housing 100 and having two vertical storage spaces 2a and 2b. The space enclosed by the housing 100 constitutes a processing chamber 100a where the resin coating is performed. The upper storage space 2a contains a cassette 3a containing multiple wafers W before one side is coated with resin, and the lower storage space 2b contains a cassette 3b containing multiple wafers W after one side has been coated with resin.

[0012] On the +Y direction side of column 102, there is a first support base 6a and a second support base 6b located below the first support base 6a. The first support base 6a is equipped with a wafer detection unit 7 for detecting the center position and orientation of the wafer W before it is coated with resin. The second support base 6b is equipped with a film cutter 8 for cutting the film, which is integrated with the resin coating on the wafer W, along the outer shape of the wafer W.

[0013] Between the cassette housing body 104, the wafer detection unit 7, and the film cutter 8, a first wafer transport mechanism 4 is provided to transport the wafer W before it is coated with resin from the cassette 3a and into the first support stand 6a, and to transport the wafer W after it has been coated with resin from the second support stand 6b and into the cassette 3b.

[0014] The first wafer transfer mechanism 4 includes a holding section 45 for suction and holding the wafer W, a bendable arm section 46 with the holding section 45 attached to its tip, a lifting drive section 47 for raising and lowering the arm section 46, and a base section 48 that supports the lifting drive section 47. The base section 48 is driven by an X-axis drive mechanism 49 and is movable in the X-axis direction. The X-axis drive mechanism 49 consists of a ball screw 491 extending in the X-axis direction, a motor 492 for rotating the ball screw 491, and a pair of guide rails 493 arranged parallel to the ball screw 491. When the motor 492 rotates the ball screw 491 in forward and reverse directions, a nut (not shown) inside the base section 48 moves in either the +X direction or the -X direction, thereby causing the first wafer transfer mechanism 4 to move in the same direction.

[0015] The device base 101 includes a film supply mechanism 10 having a roll section 11 on which a film 12, on which resin is dripped, is wound in a roll shape, and a stage 20 having a circular film holding surface 21 for holding the film 12. The stage 20 is made of a translucent material such as glass. The film holding surface 21 is made of quartz glass, for example. Although not shown, the film holding surface 21 has a plurality of suction holes connected to a suction source, and is configured to hold the film 12 placed on the film holding surface 21 by suction from below. A ring-shaped protrusion 22 is formed on the outer circumference of the film holding surface 21, and liquid resin is accumulated in the area inside this protrusion 22 to prevent the liquid resin from splashing outside the protrusion 22.

[0016] A film mounting mechanism 30 is provided on the support base 103. The film mounting mechanism 30 comprises an arm portion 31 extending in the X-axis direction, which is perpendicular to the Y-axis direction, a clamp portion 32 attached to the side of the arm portion 31 on the -Y direction side, and a first temperature sensor 33 provided, for example, on the lower side of the arm portion 31. The clamp portion 32 can pull the film 12, which is wound on the roll portion 11, by clamping it and moving in the +Y direction, thereby placing the film 12 on the stage 20. The first temperature sensor 33 measures the temperature when the clamp portion 32 passes over the stage 20, for example, when it clamps the film 12 and pulls it in the +Y direction.

[0017] Near the stage 20 is a resin supply mechanism 40 that drops a predetermined amount of liquid resin onto the film 12 held by the stage 20. The resin supply mechanism 40 includes a resin supply nozzle 41, a dispenser 42 that delivers liquid resin to the resin supply nozzle 41, and a connecting pipe 43 that connects the resin supply nozzle 41 and the dispenser 42. The resin supply nozzle 41 has a supply port 41a that discharges liquid resin toward the film holding surface 21 of the stage 20. The dispenser 42 is connected to a resin supply source (not shown). The resin supply nozzle 41 is rotatable, with its supply port 41a swiveling between above the stage 20 and a position retracted from above the stage 20.

[0018] On the side surface of column 102 on the -Y direction side, a holding mechanism 50 is disposed at a position facing the film holding surface 21 of stage 20 to suck and hold the other surface of wafer W (the surface not coated with resin), and an expansion mechanism 60 for pushing and spreading the liquid resin dropped onto film 12 by the wafer W held by lowering the holding mechanism 50 toward stage 20 are provided. Below stage 20 within apparatus base 101, a curing mechanism 70 for curing the liquid resin pushed and spread on one surface of wafer W by expansion mechanism 60 is provided. Curing mechanism 70 has, for example, a UV lamp that emits ultraviolet rays upward.

[0019] As shown in FIG. 2, holding mechanism 50 includes a disk-shaped wheel 51, a holding table 52 having a wafer holding surface 52a for sucking and holding wafer W on its lower surface, and a second temperature sensor 53 disposed within wheel 51 for measuring the temperature of wafer holding surface 52a. Holding table 52 is formed, for example, by a porous member or a pin chuck table in which a plurality of pins are arranged at intervals serving as suction paths. A suction source (not shown) is connected to holding table 52, and wafer W can be sucked and held at wafer holding surface 52a. Wafer holding surface 52a of holding table 52 faces the upper surface of stage 20.

[0020] Second temperature sensor 53 is constituted, for example, by a contact-type temperature sensor and is disposed in a state of contacting holding table 52. Second temperature sensor 53 can measure the surface temperature of wafer holding surface 52a when the wafer W sucked and held by holding table 52 pushes and spreads the liquid resin.

[0021] As shown in Figures 1 and 2, the expansion mechanism 60 comprises a ball screw 61 extending in the Z-axis direction, a motor 62 connected to one end of the ball screw 61, a pair of guide rails 63 extending parallel to the ball screw 61, and a lifting plate 64 on which a holding mechanism 50 is connected to one side. The other side of the lifting plate 64 slides against the pair of guide rails 63, and the ball screw 61 is screwed into a nut (not shown) formed on the other side of the lifting plate 64. In the expansion mechanism 60, when the ball screw 61 is rotated by the motor 62, the lifting plate 64 moves in the Z-axis direction along the pair of guide rails 63, and the holding mechanism 50 can be raised and lowered in a direction perpendicular to the film holding surface 21 of the stage 20.

[0022] As shown in Figure 1, a second wafer transport mechanism 5 is provided on the -X side of the column 102 for transporting the wafer W between the first support base 6a or the second support base 6b and the stage 20. The second wafer transport mechanism 5 includes a holding part 54 for suction holding the wafer W, a bendable arm part 55 with the holding part 54 attached to its tip, a lifting drive part 56 for raising and lowering the arm part 55, and a base part 57 that supports the lifting drive part 56. The base part 57 is driven by a Y-axis drive mechanism 58 and is movable in the X-axis direction. The Y-axis drive mechanism 58 consists of a ball screw 581 extending in the Y-axis direction, a motor (not shown) that rotates the ball screw 581, and a pair of guide rails 582 arranged parallel to the ball screw 581. When the motor rotates the ball screw 581 in forward and reverse directions, a nut (not shown) inside the base portion 57 moves in either the +Y direction or the -Y direction, thereby causing the second wafer transport mechanism 5 to move in either the +Y direction or the -Y direction.

[0023] The resin coating apparatus 1 includes a control unit 80 that controls the first wafer transport mechanism 4, the second wafer transport mechanism 5, the wafer detection unit 7, the film supply mechanism 10, the stage 20, the film placement mechanism 30, the resin supply mechanism 40, the holding mechanism 50, the expansion mechanism 60, and the like. The control unit 80 includes at least a CPU and a memory unit such as memory.

[0024] Next, an example of the operation of the resin coating apparatus 1 will be explained with reference to the flowchart in Figure 3. Note that the wafer W shown in this embodiment is an example of a circular plate-shaped workpiece, such as a silicon wafer cut from an ingot, or a wafer with bumps formed on its surface. Multiple wafers W before resin coating are stored in the cassette 3a.

[0025] 1. Holding step (S1) First, the first wafer transport mechanism 4 takes one wafer W from the cassette 3a and transports it to the first support stand 6a. When the wafer detection unit 7 detects the center position and orientation of the wafer W, the second wafer transport mechanism 5 unloads the wafer W from the first support stand 6a and hands it over to the holding mechanism 50. As shown in Figure 2, the holding mechanism 50 uses the wafer holding surface 52a of the holding table 52 to hold the other side of the wafer W, the top surface W2, by suction. Even if the wafer W has warping or undulation, the suction force of the wafer holding surface 52a corrects these distortions.

[0026] 2. Film placement step (S2) In parallel with, or prior to, the transfer of the wafer W to the holding mechanism 50, the clamping section 32 of the film placement mechanism 30 shown in Figure 1 clamps the film 12, moves in the +Y direction to pull the film 12 from the roll section 11, and places it on the film holding surface 21 of the stage 20. The film 12 is then held in place by suction from a suction source (not shown) on the film holding surface 21. Note that this step is not mandatory, and a film may not be used.

[0027] 3. Temperature measurement step (S3) This step is performed, for example, in parallel with the film placement step S2. When the clamping unit 32 clamps the film 12 and moves in the +Y direction during the film placement step S2, the first temperature sensor 33, which is located at the bottom of the arm unit 31, passes over the stage 20, and measures the temperature above the stage 20 at that time. The temperature measurement is stored in the memory unit of the control unit 80. In this step, instead of measuring the temperature above the stage 20 with the first temperature sensor 33, the temperature of the wafer holding surface 52a may be measured using the second temperature sensor 53 shown in Figure 2 and stored in the memory unit of the control unit 80. Alternatively, the temperature of the wafer holding surface 52a may be measured using the second temperature sensor 53 along with the temperature measurement above the stage 20 using the first temperature sensor 33. If temperature measurements are performed using both the first temperature sensor 33 and the second temperature sensor 53, for example, the average value of the two temperature measurements may be stored in the memory unit of the control unit 80. Alternatively, the temperature measurement may be calculated by multiplying at least one of the temperature measurements by a coefficient depending on the degree of influence on the viscosity of the liquid resin 44.

[0028] 4. Liquid resin supply step (S4) Next, as shown in Figure 2, the resin supply mechanism 40 rotates the resin supply nozzle 41 to position the supply port 41a above the stage 20. Subsequently, the dispenser 42 shown in Figure 1 delivers liquid resin 44, which is temperature-controlled to a predetermined temperature (for example, 19°C), to the resin supply nozzle 41, and the liquid resin 44 is dripped from the supply port 41a towards the film 12 which is held by suction on the stage 20. For example, an ultraviolet-curing resin is used as the liquid resin 44. When a predetermined amount of liquid resin 44 has accumulated on the film 12, the resin supply mechanism 40 stops supplying liquid resin 44 to the film 12.

[0029] 5. Resin coating step (S5) Next, as shown in Figure 4(a), with the upper surface W2 of the wafer W held by suction on the wafer holding surface 52a of the holding mechanism 50, the expansion mechanism 60 rotates the ball screw 61 driven by the motor 62 to lower the holding mechanism 50, bringing the holding table 52 relatively closer to the upper surface of the stage 20. As a result, the lower surface W1 of the wafer W, which is held by suction on the holding mechanism 50, comes into contact with the liquid resin 44. As the holding mechanism 50 descends further, as shown in Figure 4(b), the liquid resin 44, which is pressed downward by the lower surface W1 of the wafer W, expands radially across the wafer W. Since the wafer W is held by suction on the wafer holding surface 52a of the holding mechanism 50 in a state where warping and undulation have been corrected in the holding step S1, and this state is maintained, the liquid resin 44 is spread out on one side of the wafer W where warping and undulation have been corrected, and in this state, the resin coats one side of the wafer W.

[0030] 6. Waiting time calculation step (S6) In the resin coating step, if the liquid resin 44 spread on one side of the wafer W hardens while the other side of the wafer W is still held by the wafer holding surface 52a of the holding mechanism 50, the wafer's orientation is corrected in that state, which can lead to deformation such as warping or undulation after flattening by grinding. Therefore, a waiting time is provided to release the holding surface 52a and allow the liquid resin to harden before it is fully cured. If the waiting time is too short, the wafer W will not be able to return to its original orientation. On the other hand, if the waiting time is too long, as shown in Figure 5, the liquid resin will flow to the outer circumference of the workpiece, forcibly changing the orientation of the wafer W. Therefore, it is necessary to set the waiting time so that the wafer W takes on a shape that conforms to the internal stress. To this end, correlation data 81 between the temperature in the processing room and the waiting time, as shown in Figure 6, is prepared in advance, and the waiting time is determined according to the temperature in the processing room.

[0031] The correlation data 81 in Figure 6 is obtained in advance by repeating tests using multiple experimental wafers before actually coating the wafer W with resin. Specifically, the correlation data 81 is obtained by, for example, the following procedure. (1) While keeping the temperature in the processing chamber 100a constant, the resin coating of the wafer W is repeatedly performed while changing the waiting time, and the waiting time required to achieve the desired bonding shape is determined. The desired bonding shape here includes not only a shape that has an orientation in line with the internal stress inherent in the wafer W, but also a shape with less warping or undulation, such as a convex shape or other intentionally formed specific shape. (2) Record the temperature inside the processing chamber 100a and the waiting time when the desired adhesive shape is achieved. (3) While changing the temperature inside the processing chamber 100a, the resin coating of the wafer W is repeatedly performed for each temperature, changing the waiting time in the same manner as in (1), and the waiting time required to achieve the desired bonding shape is determined. The temperature inside the processing chamber 100a at that time and the waiting time are recorded in correspondence. (4) For example, the horizontal axis is set to the temperature inside the processing chamber 100a and the vertical axis to the waiting time, and the recorded data is plotted to create a function (graph), which is then stored in the memory unit of the control unit 80.

[0032] Furthermore, since the optimal waiting time differs depending on the type of workpiece, the type of liquid resin used, and the combination thereof, correlation data is created by performing steps (1)-(4) above for each different condition.

[0033] This correlation data 81 is stored in advance, for example, in the memory of the control unit 80. The viscosity of the liquid resin decreases as the temperature increases and increases as the temperature decreases. Therefore, the waiting time is shortened as the temperature increases and lengthened as the temperature decreases. In this way, there is a correlation between the temperature in the processing chamber 100a and the viscosity of the liquid resin, and a correlation is also observed between the temperature in the processing chamber 100a and the waiting time. By utilizing this correlation, it is possible to shape the wafer W into the desired shape.

[0034] In this step, the correlation data 81 is used to determine the waiting time corresponding to the temperature measured in the temperature measurement step S3, and this waiting time is stored, for example, in the memory unit of the control unit 80. For example, if the measurement result in the temperature measurement step S3 is 26°C, then in the correlation data 81 in Figure 6, 26°C corresponds to 5 seconds, so the waiting time is set to 5 seconds.

[0035] 7 Waiting Step (S7) In this step, as shown in Figure 4(c), the suction holding of the wafer W by the wafer holding surface 52a is released, and the holding mechanism 50 is raised. That is, by making the orientation of the wafer W free from constraint by the wafer holding surface 52a, the orientation of the wafer W is brought closer to a shape that conforms to the internal stress of the wafer W itself.

[0036] Here, when the suction hold is released, for example, the timer in the control unit 80 is activated and the waiting time obtained in the waiting time calculation step S6 is set in the timer. When the waiting time has elapsed, the control unit 80 is notified of this and the process proceeds to the next curing step S8. For example, if the measurement result in the temperature measurement step S3 is 26°C, then in the correlation data 81 in Figure 6, 26°C corresponds to 5 seconds, so the waiting time is set to 5 seconds. If the waiting time is too long, the wafer W will deform, and if the waiting time is too short, waviness will occur in the wafer W. However, by waiting for the amount of time determined in relation to the temperature in the processing chamber 100a using the correlation data 81 before curing the liquid resin 44, the wafer W is flattened along the internal stress rather than in a corrected position, thus preventing deformation after flattening.

[0037] 8. Curing step (S8) In this step, as shown in Figure 4(d), with the wafer W released from the suction holding surface 52a, the liquid resin 44 is cured by irradiating it with ultraviolet light 70a from the curing mechanism 70 through the stage 20 and film 12. Since the waiting time was set in the waiting step S7 using the correlation data 81 shown in Figure 6, at the start of this step, the wafer W is flattened along its inherent internal stress, and as the liquid resin 44 hardens, the wafer W is fixed in a flattened state along its internal stress.

[0038] After the liquid resin has cured, the resin-coated wafer W is transported to the second support base 6b by the second wafer transport mechanism 5, and after the excess film 12 is cut along the outer shape of the wafer W by the film cutter 8, it is placed in the cassette 3b by the first wafer transport mechanism 4.

[0039] 9. Grinding step (S9) Next, as shown in Figure 7(a), the film 12 side is held by suction at the chuck table 91 of the grinding apparatus 90, exposing the upper surface W2 of the wafer W. Here, the line W3 extending in the plane direction of the wafer W inside the wafer W represents the plane indicating the midpoint in the thickness direction of the wafer W.

[0040] With the film 12 side held by suction on the chuck table 91, as shown in Figure 7(b), the chuck table 91 is rotated while the grinding wheel 94 mounted on the wheel 93 at the lower end of the rotating spindle 92 is brought into contact with the upper surface W2 to flatten it. Next, after removing the resin 44, as shown in Figure 7(c), the wafer W is inverted, and the flattened upper surface W2 side is held on the chuck table 91. The chuck table 91 is rotated while the rotating grinding wheel 94 is brought into contact with the lower surface W1 side of the wafer W to grind and flatten the lower surface W1 of the wafer W. Since the line W3 passes through the middle of the thickness direction of the wafer W and extends in the surface direction before, during, and after grinding, a wafer W is formed that is not affected by the deformation when the resin 44 is attached.

[0041] Furthermore, if the liquid resin 44 hardens in a state where the upper part of the wafer W is deformed into a convex shape with a protruding top due to an inappropriate waiting time, as shown in Figure 8(a), the line W4, which indicates a surface extending in the planar direction in the middle part of its thickness, will also become a convex shape with an upward protrusion. Therefore, as shown in Figure 8(b), if the film 12 side is held by suction on the chuck table 91, and the chuck table 91 is rotated, the grinding wheel 94 attached to the wheel 93 at the lower end of the rotating spindle 92 is brought into contact with the upper surface W2 to flatten it, and then, as shown in Figure 8(c), after removing the resin 44, the wafer W is inverted, the flattened upper surface W2 side is held on the chuck table 91, and the chuck table 91 is rotated while the rotating grinding wheel 94 is brought into contact with the lower surface W1 side to grind it, flattening the lower surface W1 of the wafer W, the line W4 will become a convex shape with a protruding bottom. Therefore, when the suction holding in the chuck table 91 is released, the wafer W attempts to deform so that the line W4 becomes a straight line, resulting in the curvature shown in Figure 8(d).

[0042] However, by using correlation data 81 to set the waiting time according to the temperature of the processing chamber 100a, it is possible to form a wafer W that does not warp even after the grinding step is completed, as shown in Figure 7.

[0043] The positions in which the first temperature sensor 33 and the second temperature sensor 53 are installed are not particularly limited as long as they are within the processing chamber 100a, which is the space covered by the housing 100. However, it is preferable that they be as close as possible to the location where the liquid resin 44 is applied, and preferably near the wafer holding surface 52a and the stage 20. Furthermore, it is desirable that the position where the temperature is measured when performing the test to acquire correlation data 81 be the same as the position where the temperature measurement step S3 is performed. Furthermore, the processing chamber 100a only needs to be a space that includes at least a portion of the holding table 52 and the stage 20. Therefore, a portion of the holding table 52 or the stage 20 may be located outside the housing 100.

[0044] Furthermore, the timing of the temperature measurement step is not limited to the above example, as long as it is performed before the waiting time calculation step S6, but the optimal timing will differ depending on the location of the temperature sensor. When performing the temperature measurement step using only the first temperature sensor 33 provided on the film placement mechanism 30, measuring the temperature while pulling out the film in the film placement step S2, as in this embodiment, can prevent a decrease in productivity. On the other hand, if temperature measurement is performed using only the second temperature sensor 53, it does not need to be performed in parallel with the film placement step S2, and this step only needs to be completed before the waiting time calculation step S6. However, considering that temperature changes may occur over time, it is desirable to measure the temperature immediately before the waiting time calculation step S6. [Explanation of Symbols]

[0045] 1: Resin coating device 2a: Storage space 2b: Storage space 3a: Cassette 3b: Cassette 4: First wafer transport mechanism 45: Holding part 46: Arm part 47: Lifting drive part 48: Base part 49: X-axis drive mechanism 491: Ball screw 492: Motor 493: Guide rail 5: Second wafer transport mechanism 54: Holding part 55: Arm part 56: Lifting drive part 57: Base part 58: Y-axis drive mechanism 581: Ball screw 582: Guide rail 6a: First support base 6b: Second support base 7: Wafer detection unit 8: Film cutter 10: Film feeding mechanism 11: Roll section 12: Film 20: Stage 21: Film holding surface 22: Protrusion 30: Film placement mechanism 31: Arm section 32: Clamp section 33: First temperature sensor 40:Resin supply mechanism 41: Resin supply nozzle 41a: Supply port 42: Dispenser 43: Connecting tube 44: Liquid resin 50: Holding mechanism 51: Wheel 52: Holding table 52a: Wafer holding surface 53: Second temperature sensor 60: Expansion mechanism 61: Ball screw 62: Motor 63: Guide rail 64: Lifting plate 70: Curing mechanism 70a: Ultraviolet light 8: Control Unit 81: Correlation Data 90: Grinding equipment 91: Chuck table 92: Spindle 93: Wheel 94: Grinding wheel 100: Enclosure 100a: Processing chamber 101: Equipment base 102: Column 103: Support base 104: Cassette storage unit W: Wafer W1: Bottom surface W2: Top surface W3: Line W4: Line

Claims

[Claim 1] A method for coating a workpiece with resin, A resin supply step that supplies liquid resin to the upper surface of the stage, A holding step for holding a workpiece on a holding table having a holding surface that faces the upper surface of the stage and holds the workpiece, A temperature measurement step in which the temperature is measured at least at one location in a processing chamber that includes at least a portion of the holding table and the stage, A resin coating step in which the holding table is brought relatively close to the upper surface of the stage, the workpiece held on the holding table is pressed into the liquid resin, and the workpiece is coated with resin, A waiting step in which the workpiece is released from the holding table and the workpiece's orientation is returned to a position that conforms to the internal stress of the workpiece itself, After the waiting step is performed, a curing step is performed to cure the liquid resin coated on the workpiece, Equipped with, The waiting time in the waiting step is calculated based on the temperature measured in the temperature measurement step, using pre-set correlation data between the temperature in the processing room and the waiting time. A method for coating a workpiece with resin.

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