Semiconductor equipment

Abstract

To provide a semiconductor device achieving Pb-free and the suppression of semiconductor chip cracks with a simple process when electronic components are mounted in a compact package at high density.SOLUTION: Provided is a semiconductor device including a semiconductor chip 1, an upper electrode 4, and a lower electrode 7. In the semiconductor device, the upper electrode is bonded to an upper surface of the semiconductor chip with a bonding material 5 that does not contain lead, the lower electrode is bonded to a lower surface of the semiconductor chip with a bonding material that does not contain lead, an end portion of the upper electrode at a bond portion with the semiconductor chip is located inside an end portion of the semiconductor chip, the lower electrode is formed into a plate shape, and an end portion of the lower electrode is located outside the end portion of the semiconductor chip. A plate-shaped thickness T of the lower electrode is 0.5 mm or more, and an external shape D obtained by flatly projecting the semiconductor device in a direction from the upper electrode toward the lower electrode is 20 mm or less.SELECTED DRAWING: Figure 1

Description

Technical Field

[0005] ,

[0001] The present invention relates to a semiconductor device.

Background Art

[0002] Semiconductor devices used in switching circuits and rectifying circuits are widely used in automobiles, industrial equipment, and the like. Since these semiconductor devices are used in products such as automobiles with limited mounting space, the density of mounting a plurality of electronic components in one package and miniaturization are progressing. For example, a semiconductor device used for rectifying the AC output of an automotive alternator includes a semiconductor chip, a base, a lead, and a conductive bonding material for joining them.

[0003] Examples of the types of semiconductor chips, which are the main components of semiconductor devices, include diodes and MOSFETs (Metal Oxide Semiconductor Field-Effect Transistors). These semiconductor chips are usually joined to different electrodes on the upper and lower surfaces. Conventionally, a Pb-based solder containing Pb has been used as a bonding material for joining the semiconductor chip to the upper and lower electrodes. However, in recent years, from the perspective of reducing environmental impact, Pb-free conversion without using Pb has been promoted. A typical Pb-free bonding material is an Sn-based solder mainly composed of Sn. However, Sn-based solder has higher elasticity than Pb-based solder, and the stress generated in the semiconductor chip due to temperature changes in the manufacturing process tends to be higher, and cracks are likely to occur. In particular, in a double-sided mounting structure in which electrodes are joined to both the upper and lower surfaces of the semiconductor chip, the stress tends to increase because the semiconductor chip is constrained from the upper and lower surfaces during temperature changes.

[0004] As background art in such a technical field, for example, the technologies of Patent Document 1 and Patent Document 2 are disclosed.

[0005] The abstract of Patent Document 1 states: "[Problem] To provide a semiconductor device that can be easily realized at low cost and without requiring a complex manufacturing process, and an alternator using the same. [Solution] A semiconductor device comprising a base 21 having a base 24, leads 22 having lead headers 25, and an electronic circuit body 100, wherein the electronic circuit body is located between the base and the leads, the base is connected to a first surface of the electronic circuit body, the lead headers are connected to a second surface of the electronic circuit body, and the electronic circuit body is integrally covered with resin 16 and comprises a transistor circuit chip 11 having a switching element, a control circuit chip 12 for controlling the switching element, a drain frame 14, and a source frame 15, wherein the base is connected to either the drain frame or the source frame, and the leads are connected to either the source frame or the drain frame." Thus, the technology of a semiconductor device is disclosed. Furthermore, Patent Document 1 shows a structure in which multiple electronic components, such as transistor circuit chips and capacitors, are densely mounted within a single small package.

[0006] Furthermore, the abstract of Patent Document 2 states, "[Problem] To provide a semiconductor device in which lead-free solder capable of suppressing crack generation in semiconductor chips is formed. [Solution] The semiconductor device comprises a semiconductor chip 21, a die pad 12 facing the back surface of the semiconductor chip 21, an intermetallic compound 19 mainly composed of Cu-Sn disposed between the peripheral part of the back surface of the semiconductor chip 21 and the die pad 12, a Sn-based solder 18 mainly composed of Sn disposed between the central part of the back surface of the semiconductor chip 21 and the die pad 12, and a bonding member 17 that bonds the back surface of the semiconductor chip 21 to the die pad 12 facing it." Thus, the technology of a semiconductor device is disclosed. Thus, Patent Document 2 describes a technique for suppressing the occurrence of cracks in semiconductor chips while using Sn-based solder. [Prior art documents] [Patent Documents]

[0007] [Patent Document 1] Japanese Patent Publication No. 2017-98276 [Patent Document 2] Japanese Patent Publication No. 2008-34514 [Overview of the project] [Problems that the invention aims to solve]

[0008] However, Patent Document 1 mentioned above does not contain any description regarding Pb-free formulation. Furthermore, Patent Document 2, mentioned above, describes a technique for suppressing cracks in semiconductor chips using Sn-based solder in relation to Pb-free technology. However, there is a problem in that this requires a complicated process of laminating an Ag layer and Sn-based solder between the semiconductor chip and the die pad, and providing an intermetallic compound mainly composed of Cu-Sn on both sides of the lamination.

[0009] This invention was conceived in view of the aforementioned problems, and aims to provide a semiconductor device that achieves lead-free design and suppression of semiconductor chip cracking through a simple process when mounting electronic components at high density in a small package. [Means for solving the problem]

[0010] In order to solve the aforementioned problems and achieve the objectives of the present invention, the device was configured as follows. In other words, the semiconductor device of the present invention comprises a semiconductor chip, an upper electrode, and a lower electrode, wherein the upper electrode is bonded to the upper surface of the semiconductor chip with a lead-free bonding material, the lower electrode is bonded to the lower surface of the semiconductor chip with a lead-free bonding material, the end of the bonding portion of the upper electrode with the semiconductor chip is located inward from the edge of the semiconductor chip, the lower electrode is formed in a plate shape, and the end of the lower electrode is located outward from the edge of the semiconductor chip, wherein the plate-shaped thickness of the lower electrode is 0.5 mm or more, and the semiconductor device is projected planarly from the upper electrode towards the lower electrode. Maximum shape External shape size It is characterized by being 20 mm or less. [Effects of the Invention]

[0011] According to the present invention, when mounting electronic components at high density within a small package, it is possible to provide a semiconductor device that achieves lead-free design and suppression of semiconductor chip cracking through a simple process. [Brief explanation of the drawing]

[0012] [Figure 1] This figure schematically shows an example of a cross-sectional structure of a semiconductor device according to the first embodiment of the present invention. [Figure 2] This figure schematically shows an example of a cross-sectional structure near a semiconductor chip, an upper chip electrode, a bonding material for the chip, and a lower chip electrode in a semiconductor device according to the first embodiment of the present invention. [Figure 3] This figure shows an example of deformation during cooling in the bonding process at the tip bonding end when the thickness T of the lower electrode of the chip is less than 0.5 mm. [Figure 4] This figure shows an example of the results of a stress analysis performed using the finite element method to verify the stress reduction effect of semiconductor chips. [Figure 5A] This figure shows an example of the structural relationship between a semiconductor device and a fin according to a second embodiment of the present invention. [Figure 5B] This figure shows an example of the structure of a horseshoe-shaped fin as an external component, viewed from above. [Figure 6] This figure schematically shows an example of a cross-sectional structure of a semiconductor device according to a third embodiment of the present invention. [Modes for carrying out the invention]

[0013] Hereinafter, embodiments for carrying out the present invention (hereinafter referred to as "embodiments") will be described with reference to the drawings as appropriate. The drawings referenced in the following description are schematic representations of the embodiments, and therefore the scale, spacing, and positional relationships of each component may be exaggerated, or some components may be omitted from the illustration. Furthermore, the present invention is not limited to the embodiments described herein, and combinations and improvements can be made as appropriate without changing the gist.

[0014] ≪First Embodiment≫ The configuration of the semiconductor device according to the first embodiment of the present invention will be described with reference to FIGS. 1 and 2.

[0015] <Regarding the cross-sectional structure of the semiconductor device> FIG. 1 is a diagram schematically showing an example of the cross-sectional structure of a semiconductor device 100 according to the first embodiment of the present invention. In FIG. 1, the semiconductor device 100 includes a base electrode 9, a lead electrode 10, and an internal package 12. The internal package 12 includes a semiconductor chip 1, a capacitor 2, a control circuit chip (control circuit) 3, a chip upper electrode (upper electrode) 4, and chip lower electrodes (lower electrodes) 7, 7B.

[0016] The semiconductor chip 1 is configured to include a semiconductor element, for example, a MOSFET (Metal Oxide Semiconductor Field-Effect Transistor). A chip upper electrode 4 is disposed on the upper part (in the plane of the paper) of the semiconductor chip 1, and a chip lower electrode 7 is disposed on the lower part (in the plane of the paper) of the semiconductor chip 1. The semiconductor chip 1 and the chip upper electrode 4, and the semiconductor chip 1 and the chip lower electrode 7 are respectively joined by a chip bonding material (bonding material, solder) 5 which is a Pb-free material. Also, the internal package 12, or between the chip lower electrode 7 and the base electrode 9, is connected by an inter-electrode bonding material 11. Also, the chip upper electrode 4 is connected to the lead electrode 10 via the inter-electrode bonding material 11. With such electrical connections, the semiconductor device 100 including the semiconductor chip 1 has, for example, a function as a rectifying element between the base electrode 9 and the lead electrode 10.

[0017] The control circuit chip (control circuit) 3 and capacitor 2 are positioned on the chip's lower electrode 7B. Capacitor 2 is connected to supply power to the circuit elements of the control circuit chip 3. The thickness of the chip's lower electrode 7B and chip's lower electrode 7 are the same. Furthermore, a wire (bonding wire) 6 connects one end of the lower electrode 7B of the chip to a terminal electrode provided on the upper part of the semiconductor chip 1. The semiconductor chip 1 is used, for example, as a rectifier element. The control signal from the control circuit chip 3 is transmitted to the semiconductor chip 1 via the wire 6 to control the rectification characteristics of the semiconductor chip 1 as a rectifier element. As described above, when semiconductor chip 1 is composed of MOSFETs, the control signal of control circuit chip 3 controls the potential of the gate electrode of the MOSFET of semiconductor chip 1, thereby driving the MOSFET and causing it to rectify.

[0018] In the internal package 12, the semiconductor chip 1, capacitor 2, control circuit chip 3, upper chip electrode 4, lower chip electrodes 7, 7B, chip bonding material 5, and wire 6 are sealed with resin 8A for electrical insulation and to stabilize their arrangement.

[0019] In paper view, the internal package 12 is positioned on its lower side above the base electrode 9 and held in place on its upper side by the lead electrode 10. As described above, the internal package 12 and the base electrode 9, and the internal package 12 and the lead electrode 10 are joined together with an inter-electrode bonding material 11. Furthermore, the upper part of the base electrode 9, the internal package 12, and the lead electrodes 10 (excluding the upper part of the leads) are resin-sealed (molded) with resin 8B.

[0020] Furthermore, the materials for the upper chip electrode 4, lower chip electrodes 7 and 7B, base electrode 9, and lead electrode 10 should preferably be copper or a copper alloy, which has excellent electrical and thermal conductivity. Furthermore, as a second embodiment, which will be described in detail later with reference to Figures 5A and 5B, the semiconductor device 100 of the first embodiment shown in Figure 1 may be used by press-fitting it into a perforated member. In this case, clamping force and pressing force are applied to the base electrode 9. For this reason, a high-strength material such as a copper-zirconium alloy is desirable for the base electrode 9.

[0021] Furthermore, in Figure 1, the external dimensions D of the semiconductor device 100 may need to be miniaturized in cases where mounting space is limited. Therefore, the external dimensions D are usually set to 20 mm or less. Note that the semiconductor device 100 is approximately circular when viewed from the top surface where the lead electrodes 10 are located. Furthermore, in the case of space constraints in the height direction of the semiconductor device 100, each component of the semiconductor device 100 is designed to be as thin as possible, while ensuring sufficient performance, reliability (including crack suppression), and heat dissipation. Thus, the semiconductor device 100 in Figure 1 is primarily described as a small semiconductor device with external dimensions D of 20 mm or less.

[0022] <Cross-sectional structure of a semiconductor chip, near the upper electrode and lower electrode of the chip> Figure 2 is a schematic diagram showing an example of the cross-sectional structure near the semiconductor chip 1, the upper chip electrode 4, the chip bonding material 5, and the lower chip electrode 7 in a semiconductor device 100 according to the first embodiment of the present invention. As shown in Figure 2, in the semiconductor chip 1 bonding process of the semiconductor device 100, the lower chip electrode 7, chip bonding material 5, semiconductor chip 1, chip bonding material 5, and upper chip electrode 4 are stacked in that order from bottom to top. After stacking these components, they are heated and cooled using a reflow method or similar process to join the aforementioned members together.

[0023] In Figure 2, the region of the chip junction end 13, which is the edge of the chip, will be explained. In the region of the chip junction end 13 in Figure 2, the end of the junction of the upper chip electrode 4 is located inward from the end of the semiconductor chip 1. This inward region will be appropriately referred to as the non-junction region (non-junction region of the upper semiconductor chip electrode) 16. Furthermore, the lower electrode 7 of the chip is plate-shaped, and its end is located outside the end of the semiconductor chip 1.

[0024] The material of the chip bonding material 5 is a lead-free material that does not contain Pb (lead). A typical example is Sn-based solder (Sn solder), which has Sn (tin) as its main component. Sn-based solder may contain one or more additive elements such as Ag (silver), Cu (copper), and Sb (antimony). Other Pb-free materials besides Sn-based solder include sintered bonding, which involves sintering paste materials containing fine particles of Cu or Ag, and conductive adhesives.

[0025] The semiconductor chip 1 is composed of, for example, rectifier elements such as diodes and transistor elements such as MOSFETs and IGBTs (Insulated Gate Bipolar Transistors). If the system is composed of transistor elements, the same semiconductor chip 1 may also contain functions such as a control circuit and a capacitor, in addition to the rectifier element. In that case, the capacitor 2, control circuit chip 3, chip bottom electrode 7B, and wire 6 are all contained within the semiconductor chip 1 and can therefore be omitted. The main materials that make up semiconductor chips 1 and control circuit chips (3: Figure 1) are Si (silicon), SiC (silicon carbide), GaN (gallium nitride), etc.

[0026] When the semiconductor chip 1 is configured as a rectifier element such as a diode, the positive and negative polarities differ on the upper and lower surfaces of the semiconductor chip 1, and a surface protective film is formed on the upper surface. Therefore, there is a non-junction region 16 (Figure 2) on the upper surface of the semiconductor chip 1 where the upper chip electrode 4 is not connected.

[0027] Furthermore, if the semiconductor chip 1 is composed of transistor elements, a surface protective film is formed on one side, for example, the source side in the case of a MOSFET and the emitter side in the case of an IGBT. In addition, control electrodes such as gate electrodes are formed on the upper surface of the semiconductor chip 1. Therefore, there is a non-junction region 16 on the upper surface of the semiconductor chip 1 to which the upper chip electrodes 4 are not connected.

[0028] Thus, a non-bonding region 16 exists on the upper surface of the semiconductor chip 1. Therefore, the external dimensions of the upper electrode 4 are smaller than the external dimensions of the semiconductor chip 1.

[0029] On the other hand, since there is usually no need to provide a non-bonding area on the underside of the semiconductor chip 1, the entire underside of the semiconductor chip 1 is bonded to the chip lower electrode 7. Therefore, the external dimensions of the chip lower electrode 7 are larger than the external dimensions of the semiconductor chip 1. Furthermore, the thickness T of the lower electrode 7 of the chip is 0.5 mm or more. For reasons described later with reference to Figures 3 and 4, setting the thickness T of the lower electrode 7 of the chip to 0.5 mm or more is a major feature of the configuration in this invention.

[0030] Furthermore, from the perspective of miniaturization alone, it is desirable that the thickness T of the lower electrode 7 of the chip be as thin as possible. Furthermore, typical thermal stress is the stress that arises when components with different thermal deformations are constrained together. Therefore, in order to reduce the constraining force, the related components are often made thinner and less rigid. Therefore, conventionally, the thickness T of the lower electrode 7 of the chip was generally made thin, about 0.1 to 0.2 mm. However, the inventors of this invention have found that, in small semiconductor devices, a specific effect of reducing stress for Pb-free design is that the thickness T of the chip's lower electrode 7 is 0.5 mm or more. Next, the reasons and background will be explained with reference to Figures 3 and 4.

[0031] <Regarding deformation during cooling in the joining process> Figure 3 shows an example of deformation during cooling in the bonding process when the thickness T of the lower chip electrode 7 is less than 0.5 mm at the chip bonding end 13 shown in Figure 2. In Figure 3, a semiconductor chip 1 and a bonding material 5 for the chip are placed between the upper electrode 4 and the lower electrode 7 of the chip, and the figure shows how the semiconductor chip 1 and the lower electrode 7 are deformed due to the cooling during the bonding process.

[0032] If semiconductor chip 1 is made of, for example, Si (silicon), the coefficient of thermal expansion of Si is approximately 3 ppm / K. In contrast, the upper chip electrode 4 and the lower chip electrode 7, for example, in the case of Cu, have a coefficient of thermal expansion of approximately 17 ppm / K, which is larger than that of Si. Therefore, in the aforementioned bonding process, when the bonding material is heated to a temperature above its melting point, the upper electrode 4 and lower electrode 7 of the chip, which have larger coefficients of linear expansion, expand more thermally than the semiconductor chip 1. Afterward, as it cools and the bonding material 5 for the chip solidifies, the individual components shrink due to heat while joined together. During this thermal contraction, the amount of thermal contraction of the upper electrode 4 and lower electrode 7 of the chip is greater than the amount of thermal contraction of the semiconductor chip 1, resulting in thermal stress and warping deformation.

[0033] This deformation is considered by dividing it into two regions: region 14 (Figure 3) where both the upper and lower surfaces of the semiconductor chip 1 are joined to the electrodes, and region 15 (Figure 3) where only the lower surface of the semiconductor chip 1 is joined to the electrodes. We will then examine the deformation and its effects in each region.

[0034] Regarding Area 14 In the region 14 (the semiconductor chip upper and lower electrode bonding region) where both the upper and lower surfaces of the semiconductor chip 1 are bonded to electrodes, the region is susceptible to the effects of thermal contraction of the thicker and more rigid of the upper electrode 4 and the lower electrode 7 of the chip. Therefore, for example, if the upper electrode 4 of the chip is thicker than the lower electrode 7 of the chip, the convex shape on the lower surface will warp. However, in region 14, since both the upper and lower surfaces of the semiconductor chip 1 are bonded to electrodes, the asymmetry between the upper and lower parts is smaller compared to region 15, and the warping deformation is smaller.

[0035] Regarding Area 15 On the other hand, in region 15 (semiconductor chip lower electrode junction region), since electrodes are not junctioned to the upper surface of the semiconductor chip 1, a relatively large convex warp deformation occurs on the upper surface due to the thermal contraction of the chip lower electrode 7. In the case of large electronic components with an external diameter exceeding 20 mm, the individual components become thicker in proportion to the product size, resulting in sufficient rigidity, which makes warping deformation less likely to occur. However, in small semiconductor devices with an external diameter of 20 mm or less, due to the circumstances described above, the lower electrode 7 of the chip is usually designed to be thin, resulting in a distinctive phenomenon of significant warping deformation.

[0036] During this deformation, the stress acting on the semiconductor chip 1 is largely influenced by two types of stress: shear force resulting from the difference in lateral thermal contraction between the semiconductor chip 1 and the lower electrode 7 of the chip, and bending stress resulting from the warping deformation. In small semiconductor devices (for example, those with an external diameter of 20 mm or less) where warping deformation is significant, increasing the rigidity of the lower chip electrode 7 by making it thicker is an effective means of reducing stress.

[0037] <Stress analysis using finite element method> To verify the stress reduction effect of thickening the lower electrode 7 of the chip, an example of the results of a stress analysis using the finite element method is explained with reference to Figure 4. The analysis model was configured as shown in Figure 2, and a temperature change simulating cooling during reflow was applied to the entire analysis model. Furthermore, the material of the tip bonding material 5 was specified as having two conditions: Pb-based solder and Sn-based solder. Furthermore, under conditions where a lead-free bonding material, Sn-based solder, was used, the maximum principal stress σ generated in the semiconductor chip 1 was evaluated when the thickness T of the lower electrode 7 of the chip was varied.

[0038] Figure 4 shows an example of the results of a stress analysis performed using the finite element method to verify the stress reduction effect of semiconductor chip 1. In Figure 4, the horizontal axis represents the thickness T of the lower electrode 7 of the chip, in units of [mm]. The vertical axis represents the stress σ of the semiconductor chip 1, in units of [pu]. Furthermore, Pb-based solder and Sn-based solder were selected as the materials for the chip bonding material 5. In Figure 4, the point indicated by the symbol "A" represents a case where Pb-based solder is used as the material for the chip bonding material 5. The stress σ of the semiconductor chip 1 in this case is set to 1 [pu], which is the standard value in the unit system. Note that at the point indicated by the symbol "A", the thickness T of the lower electrode 7 of the chip is 0.15 mm.

[0039] Furthermore, in Figure 4, the characteristic curve consisting of multiple measurement points indicated by the symbol "B" shows the change in stress σ of the semiconductor chip 1 when the thickness T of the chip's lower electrode 7 is used as a parameter. As mentioned above, the reference value of stress σ is 1 [pu], the reference value at "A". In the following, the symbols "A" for lead-based solder and "B" for sn-based solder will be abbreviated simply as "A" and "B," respectively.

[0040] In Figure 4, "A" and "B" are compared under the condition T=0.15mm. Note that the thickness T of the chip lower electrode 7, 0.15mm, was selected as a typical dimension for current small semiconductor devices with an outer diameter of 20mm or less. Comparing the stress σ of "A" and "B" under the condition T=0.15mm, it can be seen that the stress in "B" is higher, more than 1.4 times greater. This result is because the Pb-free bonding material used in "B" has high rigidity. As mentioned above, a large stress σ makes deformation and cracking more likely. Therefore, even if the thickness T of "B" is increased under the condition T < 0.5 mm, the stress remains higher in "B" (T < 0.5 mm) than in "A" (T = 0.15 mm).

[0041] However, if the thickness T of the lower electrode 7 of chip "B" is increased according to the characteristic curve of "B", the stress σ of "B" becomes lower than the stress σ of "A" when T ≥ 0.5 mm. Furthermore, when "B" is thickened to T=0.7mm, the stress σ in "B" is lower than the stress σ in "A" (T=0.15mm). In other words, the bending stress caused by warping deformation is lower in "B". In other words, even in "B," which uses Sn-based solder, a Pb-free bonding material, setting the thickness T of "B" to "T≧0.5mm," and further, as shown in Figure 4, to "T≧0.7mm," reduces the stress σ, mitigates deformation and cracking, and demonstrates that the use of Pb-free bonding materials becomes practical.

[0042] <Summary of the First Embodiment> When selecting Sn-based solder as the lead-free bonding material to reduce environmental impact, it exhibits higher elasticity than lead-based solder. Therefore, temperature changes during the bonding process tend to increase stress on the semiconductor chip. Consequently, it is necessary to reduce the stress on the semiconductor chip and suppress crack formation. In the first embodiment of the present invention, in small semiconductor devices (for example, those with an outer diameter of 20 mm or less) where warping deformation is a characteristic phenomenon of high-density, miniaturized semiconductor devices, increasing the thickness of the lower chip electrode 7 is an effective means of reducing stress. Specifically, we found that the use of Pb-free bonding material becomes practical by setting the thickness T of the lower electrode 7 of the chip to "T≧0.5mm", and further to "T≧0.7mm". Increasing the thickness T of the lower electrode 7 of the chip to "T≧0.5mm" or "T≧0.7mm" generally does not pose a significant burden in the manufacturing process.

[0043] <Effects of the First Embodiment> When mounting electronic components at high density within a small package, a simple process of increasing the thickness T of the lower electrode of the chip can provide a semiconductor device that achieves lead-free operation and suppresses cracking of the semiconductor chip.

[0044] ≪Second Embodiment≫ The configuration of a semiconductor device according to a second embodiment of the present invention will be described with reference to Figures 5A and 5B. Figure 5A shows an example of the structural relationship between the semiconductor device 101 and the fin (heat dissipation fin) 91F according to a second embodiment of the present invention. The semiconductor device 101 in Figure 5A has some differences in shape from the semiconductor device 100 in Figure 1, but is basically the same in configuration. In other words, in Figure 5A, the semiconductor device 101 comprises a base electrode 9, a lead electrode 10, a semiconductor chip 1, a capacitor 2, a control circuit chip 3, an upper chip electrode (upper electrode) 4, a lower chip electrode (lower electrode) 7, a chip bonding material 5, a wire (bonding wire) 6, a resin 8, and an inter-electrode bonding material 11.

[0045] These parts and components, despite differences in shape, generally correspond to the configuration of semiconductor device 100 in Figure 1; therefore, redundant explanations will be omitted where appropriate. The insulating film (insulating film formed by printing) 18 in Figure 5A is for selectively separating the lower electrode of the control circuit chip 3 from the lower electrode (lower electrode) 7 of the semiconductor device 101. As a result, the function of the lower electrode (lower electrode) 7 can be shared by the lower electrode (lower electrode) 7, making the lower electrode (lower electrode) 7B unnecessary. The chip bonding material 51 is equivalent to the chip bonding material 5.

[0046] In Figure 5A, the base electrode 9 of the semiconductor device 101 is press-fitted and fitted into the space between (holes in) the fins 91F, which are external members provided for heat dissipation and fixation. Furthermore, since the base electrode 9 is press-fitted into the space (hole) between the fins 91F, contact and current flow occur due to the restoring force generated by the clamping force during this process. Therefore, when fixing the base electrode 9 to the fin 91F, work such as soldering is not required, contributing to a reduction in environmental impact and manufacturing costs. Furthermore, this structure ensures that the semiconductor device 101 is fixed in place, and that the heat generated by the semiconductor device 101 is transferred to the fin 91F for heat dissipation, thereby ensuring that the semiconductor device 101 can operate within a normal temperature range.

[0047] Figure 5B shows an example of the structure of the horseshoe-shaped fin (heat dissipation fin) 91F as an external component, viewed from above (in the direction from the lead electrode 10 toward the base electrode 9). In Figure 5B, the horseshoe-shaped heat dissipation fins 91F are provided with holes (fin cavities) 9H into which multiple semiconductor devices 101 are pressed. In Figure 5A, the base electrode 9 of the semiconductor device 101 is shown sandwiched between the fins 91F. However, in reality, as shown in Figure 5B, one semiconductor device 101 is press-fitted into one hole 9H. Note that a semiconductor device 100 or a semiconductor device 102 (described later) may be used instead of semiconductor device 101.

[0048] As shown in Figure 5B, the fin 91F is provided with multiple holes (fin cavities) 9H, and multiple semiconductor devices 101 are press-fitted into each of the holes 9H. Furthermore, the horseshoe-shaped heat dissipation fins 91F are provided, for example, on an alternator (not shown), which is a generator. The reason the fins 91F are shown in a horseshoe shape is that it is suitable for mounting on an alternator.

[0049] As shown in Figures 5A and 5B, the semiconductor device 101 is press-fitted into the hole 9H of the fin 91F, which is an external component. Therefore, the shape and structure of the semiconductor device 101 must be suitable for press-fitting into the hole of the external component. Furthermore, as mentioned above, the base electrode 9 of the semiconductor device 101 fits into the hole (fin cavity) 9H of the fin 91F, which is a perforated member. During press-fitting, tightening and pressing forces act on the base electrode 9. Therefore, a high-strength material such as a copper-zirconium alloy is desirable for the base electrode 9.

[0050] Furthermore, the external dimensions D of the semiconductor device 101(100) are designed according to the diameter of the hole into which it is fitted, as described above. Due to limited mounting space and the need for miniaturization, the external dimensions D are usually 20 mm or less. Furthermore, regarding the height of the semiconductor device 101 (100), there are similar constraints on mounting space, so each component is designed to be as thin as possible while ensuring sufficient performance, reliability (including crack suppression), and heat dissipation.

[0051] <Effects of the second embodiment> As shown in Figures 5A and 5B, the base electrode 9 of the semiconductor device 101 is press-fitted between the fins 91F. This structure fixes the semiconductor device 101 in place and allows heat generated by the semiconductor device 101 to be transferred to the fins 91F for heat dissipation, thus ensuring a temperature range in which it can operate normally.

[0052] ≪Third Embodiment≫ The configuration of a semiconductor device according to the third embodiment of the present invention will be described with reference to Figure 6. Figure 6 is a schematic diagram showing an example of the cross-sectional structure of a semiconductor device 102 according to the third embodiment of the present invention. In Figure 6, the circuit components corresponding to the internal package 12 shown in Figure 1 are housed in the semiconductor chip 1B.

[0053] In other words, for example, the circuit elements such as semiconductor chip 1, control circuit chip 3, and capacitor 2 in Figure 1 are represented and used as a single semiconductor chip 1B in Figure 6. Furthermore, the semiconductor device 102 in Figure 6 includes a base electrode 9, a lead electrode (upper chip electrode (upper electrode)) 10, a semiconductor chip 1B, a lower chip electrode (lower electrode) 7, and a resin 8. In Figure 6, the lead electrode also serves as the upper chip electrode (upper electrode). Furthermore, in Figure 6, the bonding process (soldering process) using the chip bonding material 5 uses a Pb-free material, such as Sn-based solder. Furthermore, the thickness of the lower electrode (bottom electrode) 7 of the chip shall be 0.5 mm or more, or 0.7 mm or more. Furthermore, the lateral length of the base electrode 9, which corresponds to the outer shape of the semiconductor device 102, shall be 20 mm or less.

[0054] As described above, in Figure 6, the configuration of the semiconductor device 102 is simplified by composing the circuit elements such as the semiconductor chip 1, control circuit chip 3, and capacitor 2 in Figure 1, as well as the various processes such as the wire (bonding wire) 6, into a single semiconductor chip 1B. This allows for the provision of a smaller, more cost-effective semiconductor device. The semiconductor chip 1B may also be a rectifier element such as a diode.

[0055] <Effects of the Third Embodiment> By simplifying the configuration of semiconductor device 102 to a single semiconductor chip, a lead-free, compact, and cost-effective semiconductor device can be provided.

[0056] <Other embodiments and supplementary information> It should be noted that the present invention is not limited to the embodiments described above, and includes a variety of further modifications. For example, the embodiments described above are described in detail for the purpose of clearly illustrating the present invention, and are not necessarily limited to those having all the configurations described. Furthermore, it is possible to replace a part of the configuration of one embodiment with a part of the configuration of another embodiment, and it is also possible to add a part or all of the configuration of another embodiment to the configuration of one embodiment. Further descriptions of other embodiments, variations, and supplementary information are provided below.

[0057] 《Bonding material for chips》 In the first embodiment, as a representative example of a Pb-free material that does not contain Pb, "Sn-based solder" was given as the chip bonding material 5. However, this is not limited to Sn-based solder. Various other metals besides Sn can also be included. Furthermore, while "solder" was given as an example of a joining material, it is not limited to the form of "solder." For example, bonding materials made from mixtures of organic and inorganic materials could also be included.

[0058] Semiconductor chips In the description of the first embodiment of the present invention, the semiconductor chip 1 was described in an example in which it is composed of MOSFETs. However, it is not limited to MOSFETs. For example, in addition to the MOSFETs and IGBTs mentioned above, the device may also be composed of superjunction MOSFETs, power bipolar transistors, thyristors, and other semiconductor elements.

[0059] Semiconductor equipment The semiconductor device of the present invention has been described with reference to three embodiments of the semiconductor device with reference to Figures 1, 5A, and 6. Essentially, the semiconductor device of the present invention is characterized in that the upper electrode and lower electrode of the semiconductor chip are joined with a Pb-free bonding material, the end of the bonding portion of the upper electrode to the semiconductor chip is located inward from the edge of the semiconductor chip, the end of the lower electrode is located outward from the edge of the semiconductor chip, the thickness of the lower electrode is 0.5 mm or more, and the outer dimensions of the semiconductor device are 20 mm or less. In other words, various semiconductor devices that satisfy the above conditions are also effective, even in semiconductor devices with structures other than those shown in the figure above.

[0060] Fins, heat dissipation fins The fins 91F shown in Figures 5A and 5B are external components and are not included in the semiconductor device 101, but we will add an explanation as they affect the operation of the semiconductor device 101. In Figure 5B, the fin 91F is described as having a horseshoe shape, but it is not limited to a horseshoe shape. The horseshoe shape was given as an example of a suitable fin 91F for use, for example, when attached to an alternator, but other shapes may be more appropriate when used for purposes other than alternators. Furthermore, the number of holes (fin cavities) 9H provided in the fin 91F is not limited to the six shown as illustrated in Figure 5B. Also, if the outer shape of the semiconductor device 101 is other than circular (for example, hexagonal or elliptical), other shapes may be taken depending on the situation. Furthermore, it is also possible to provide the fins (heat dissipation fins) as part of the semiconductor device (101). [Explanation of Symbols]

[0061] 1.1B semiconductor chip 2 Capacitors 3. Control circuit chip (control circuit) 4. Top electrode of the chip (top electrode) 5.51 Bonding material for chips (bonding material, solder, soldering compound) 6. Wire (bonding wire) 7,7B Chip lower electrode (lower electrode) 8,8A,8B resin 9 Base electrode 9H Hole (Fin cavity) 91F Fin (Heat Dissipation Fin) 10 Lead electrodes 11 Bonding material between electrodes 12 internal packages 13. Tip bonding end 14 regions (electrode junction regions on both the upper and lower parts of the semiconductor chip) 15 regions (semiconductor chip lower electrode junction region) 16. Non-bonding region (non-bonding region of the upper electrode of the semiconductor chip) 100, 101, 102 Semiconductor equipment

Claims

1. It comprises a semiconductor chip, an upper electrode, and a lower electrode. The upper electrode is bonded to the upper surface of the semiconductor chip with a lead-free bonding material. The lower electrode is bonded to the lower surface of the semiconductor chip with a lead-free bonding material. The end of the junction of the upper electrode with the semiconductor chip is located inward from the end of the semiconductor chip. The lower electrode is formed in a plate shape, and the end of the lower electrode is located outside the end of the semiconductor chip. A semiconductor device, The plate-like thickness of the lower electrode is 0.5 mm or more. The maximum external dimensions of the semiconductor device, when projected planarly from the upper electrode towards the lower electrode, are 20 mm or less. A semiconductor device characterized by the following features.

2. In claim 1, The plate-like thickness of the lower electrode is 0.7 mm or more. A semiconductor device characterized by the following features.

3. In claim 1, The aforementioned bonding material is solder mainly composed of Sn. A semiconductor device characterized by the following features.

4. In claim 3, The aforementioned solder has one or more components of Ag, Cu, and Sb added to it. A semiconductor device characterized by the following features.

5. In claim 1, The semiconductor chip is configured to have diode characteristics. A semiconductor device characterized by the following features.

6. In claim 1, The aforementioned semiconductor chip is configured to have a MOSFET. A semiconductor device characterized by the following features.

7. In claim 1, The aforementioned semiconductor chip is configured to have an IGBT. A semiconductor device characterized by the following features.

8. In claim 6 or claim 7, The semiconductor chip is composed of Si or SiC. A semiconductor device characterized by the following features.

9. In claim 6, A control circuit that drives the MOSFET of the aforementioned semiconductor chip to perform rectification, A capacitor connected to supply power to the aforementioned control circuit, Having, A semiconductor device characterized by the following features.

10. In claim 6 or claim 9, The semiconductor device has a structure in which it is press-fitted into a hole in an external member. A semiconductor device characterized by the following features.

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