Extension device

Abstract

To solve the problems associated with the movement of gases inside a heat treatment part of a stretching device or between the inside and the outside of the heat treatment portion.SOLUTION: The stretching device includes a heat treatment unit 12 for performing heat treatment on a membrane 8 to be processed by stretching. The heat treatment unit 12 has a chamber 31, an air supply unit 32 for supplying air into the chamber 31, an exhaust unit 33 for exhausting air from the chamber 31, a pressure measuring unit 34 for measuring the pressure in the chamber 31, and a control unit 35. The exhaust unit 33 has an exhaust port 51 provided on the chamber 31, and a blower 54 for air exhaustion to make it possible to exhaust air from the exhaust port 51. The control unit 35 controls the pressure in the chamber 31 by adjusting the flow rate of the blower 54 for air exhaustion on the basis of the pressure measured by the pressure measuring unit 34.SELECTED DRAWING: Figure 5

Description

Technical Field

[0001] The present invention relates to a stretching device.

Background Art

[0002] The stretching of a film can be performed using a stretching device. A stretching device for stretching a thermoplastic resin film includes a heat treatment unit for heat-treating the film, and the film is stretched while being heat-treated.

[0003] For example, Japanese Patent Application Laid-Open No. 2014-180779 (Patent Document 1) describes a technique related to a stretching machine.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0009] Other challenges and novel features will become apparent from the description and accompanying drawings in this specification. [Means for solving the problem]

[0010] According to one embodiment, a stretching apparatus for a thermoplastic resin film includes a heat treatment section for heat treating the thermoplastic resin film. The heat treatment section includes a chamber, an air supply section for supplying air into the chamber, an exhaust section for exhausting air from the chamber, a pressure measuring section for measuring the pressure inside the chamber, and a control section. The exhaust section includes an exhaust port provided in the chamber and an exhaust blower that enables exhaust from the exhaust port. The control section controls the pressure inside the chamber by adjusting the airflow rate of the exhaust blower based on the pressure measured by the pressure measuring section. [Effects of the Invention]

[0011] According to one embodiment, problems related to the movement of gas inside the heat treatment section of the stretching apparatus, or the movement of gas between the inside and outside of the heat treatment section, can be solved or improved. [Brief explanation of the drawing]

[0012] [Figure 1] This is a schematic diagram showing the configuration of a thin film manufacturing system in one embodiment. [Figure 2] Figure 1 is a plan view showing the configuration of the stretching device. [Figure 3] Figure 2 is a plan view of the stretching apparatus shown. [Figure 4] This is an explanatory diagram of the stretching device. [Figure 5] This is a cross-sectional view of the heat treatment section of the stretching device. [Figure 6]It is a cross-sectional view of the heat treatment section of the stretching device. [Figure 7] It is a cross-sectional view of the heat treatment section of the stretching device. [Figure 8] It is a graph showing an example of the pressure distribution in the chamber of the heat treatment section of the stretching device. [Figure 9] It is a graph showing an example of the pressure distribution in the chamber of the heat treatment section of the stretching device. [Figure 10] It is a graph showing an example of the pressure distribution in the chamber of the heat treatment section of the stretching device. [Figure 11] It is a graph showing an example of the pressure distribution in the chamber of the heat treatment section of the stretching device. [Figure 12] It is a graph showing an example of the pressure distribution in the chamber of the heat treatment section of the stretching device. [Figure 13] It is a graph showing an example of the pressure distribution in the chamber of the heat treatment section of the stretching device. [Figure 14] It is an explanatory diagram showing the heat treatment section of the stretching device. [Figure 15] It is a flowchart showing the control of pressure. [Figure 16] It is a graph showing the measured pressure and the output of the inverter. [Figure 17] It is an explanatory diagram showing an operation unit for operating the switching of control for a plurality of areas of the chamber. [Figure 18] It is an explanatory diagram showing the heat treatment section of the stretching device. [Figure 19] It is an explanatory diagram showing the heat treatment section of the stretching device. [Figure 20] It is a flowchart showing the control of pressure. [Figure 21] It is a cross-sectional view of the heat treatment section of the stretching device. [Figure 22] It is a cross-sectional view of the heat treatment section of the stretching device.

Embodiments for Carrying Out the Invention

[0013] The embodiments will be described in detail below with reference to the drawings. In all the drawings used to describe the embodiments, the same reference numerals are used for members having the same function, and repeated descriptions of them will be omitted. In addition, in the following embodiments, descriptions of the same or similar parts will not be repeated unless it is particularly necessary.

[0014] (Embodiment 1) <Regarding the overall configuration of the manufacturing system> Figure 1 is a schematic diagram showing the configuration of the thin film manufacturing system in this embodiment.

[0015] The thin film manufacturing system 1 of this embodiment, shown in Figure 1, comprises an extruder 2, a T-die (mold) 3 attached to the extruder 2, a raw material cooling device 4, a stretching device 5, a take-up device 6, and a winding device 7.

[0016] Next, we will describe the general operation of the thin film manufacturing system 1.

[0017] First, raw materials are supplied into the extruder 2 from the raw material supply section 2a of the extruder 2. The raw materials supplied to the extruder 2 consist of resin material and additives. Thermoplastic resin material is preferably used as the resin material. The extruder 2 transports (conveys) the raw materials supplied to it while kneading (mixing) them. For example, the raw materials supplied into the extruder 2 are melted and kneaded while being sent forward by the rotation of the screw within the extruder 2. The kneaded mixture (molten resin) kneaded in the extruder 2 is supplied to the T-die 3, passes through the T-die 3, and is extruded from the slits of the T-die 3 toward the raw material cooling device 4. The kneaded mixture (molten resin) supplied from the extruder 2 to the T-die 3 is molded into a predetermined cross-sectional shape (in this case, a film shape) by passing through the T-die 3.

[0018] The kneaded material (molten resin) extruded from the T-die 3 is cooled in the raw material cooling device 4 to form a film (sheet, resin film) 8. The film 8 is a film in a solid state. More specifically, the film 8 is a thermoplastic resin film. The film 8 is supplied to the stretching device 5. Since the molded kneaded material (molten resin) is continuously extruded from the T-die 3, the film 8 is continuously supplied to the stretching device 5. In the following explanation, we will use as an example a case in which a transverse stretching device that performs a transverse stretching process on the film 8 in the lateral direction (TD direction) is used as the stretching device 5.

[0019] The film 8 supplied (transported) from the raw material cooling device 4 to the stretching device 5 is stretched in the TD direction by the stretching device 5. Alternatively, a longitudinal stretching device (not shown) can be placed between the raw material cooling device 4 and the stretching device 5 to perform a longitudinal stretching process on the film 8 in the TD direction. In this case, the longitudinal stretching device stretches the film 8 in the MD direction, and the stretching device 5 stretches the film 8 in the TD direction.

[0020] The film 8, which has been stretched (stretched) in the stretching device 5, is transported to the winding device 7 via the take-up device 6 and wound onto the winding device 7. The film 8 wound onto the winding device 7 is cut by a cutting machine (not shown) as needed.

[0021] In this way, thin films can be manufactured using the thin film manufacturing system 1. Note that the thin film manufacturing system 1 shown in Figure 1 is just one example, and various modifications are possible depending on the characteristics of the thin film to be formed. For example, an extraction layer (not shown) may be provided near the take-up device 6 shown in Figure 1, and plasticizers (such as paraffin) in the film 8 may be removed in the extraction tank.

[0022] In this embodiment, the stretching device 5 stretches the film 8 in the TD direction while transporting it in the MD direction. The MD (Machine Direction) direction is the direction in which the film is transported, and is also called the longitudinal direction. The TD (Transverse Direction) direction is the direction that intersects the direction in which the film is transported, and is also called the transverse direction. The MD direction and the TD direction are directions that intersect each other, or more specifically, directions that are orthogonal to each other.

[0023] <About the stretching device> Next, the stretching apparatus 5 will be described. Figure 2 is a plan view showing the configuration of the stretching apparatus 5 shown in Figure 1. Figure 3 is a plan perspective view of the stretching apparatus 5, showing the heat treatment section 12 as viewed through in Figure 2. In Figure 1, the heat treatment section 12 is not shown for the sake of simplicity. Also, since Figures 2 and 3 are schematic diagrams, the dimensional ratios of each component differ from those of the actual components. Figure 4 is an explanatory diagram of the stretching apparatus 5, showing the state in which both ends of the film 8 are gripped by clips 13L and 13R in the stretching apparatus 5.

[0024] As shown in Figures 2 and 3, the stretching apparatus 5 includes a transport apparatus 11 for transporting the film 8 and a heat treatment apparatus 12 for applying heat treatment to the film 8.

[0025] The conveying device 11 includes a pair of guide rails 14L and 14R that guide the movement of the clips 13, and a plurality of clips 13 that grip the membrane 8 and travel along the guide rails 14L and 14R. Here, the clips 13 that travel along the guide rail 14L are denoted as clips 13L and referred to as clips 13L, and the clips 13 that travel along the guide rail 14R are denoted as clips 13R and referred to as clips 13R. The conveying device 11 has the function of conveying the membrane 8 and the function of performing a stretching process on the membrane 8.

[0026] In Figures 2 and 3, guide rail 14R is positioned to the right of the transport direction (MD direction), and guide rail 14L is positioned to the left of the transport direction (MD direction). Guide rails 14R and 14L are spaced apart in the TD direction and face each other in the TD direction with the membrane 8 in between. Guide rails 14L and 14R are each arranged in annular shapes.

[0027] In the conveying device 11, multiple clips 13L are arranged to be able to travel along the guide rail 14L, and multiple clips 13R are arranged to be able to travel along the guide rail 14R. The membrane 8 is placed between the guide rail 14R and the guide rail 14L, with one end (left end) in the TD direction being gripped by clip 13L and the other end (right end) in the TD direction being gripped by clip 13R. As clips 13L and 13R travel along the guide rails 14L and 14R, the membrane 8 gripped by clips 13L and 13R is conveyed in the MD direction between the guide rail 14R and the guide rail 14L.

[0028] The stretching device 5 has three regions 20A, 20B, and 20C in a plan view. Region 20A is the preheating region, region 20B is the stretching region, and region 20C is the heat-setting region. In the MD direction, regions 20A, 20B, and 20C are arranged in order, with region 20B located between regions 20A and 20C. The inlet for the film 8 in the stretching device 5 (corresponding to the part indicated as "IN" in Figure 2) is located in region 20A, and the outlet for the film 8 in the stretching device 5 (corresponding to the part indicated as "OUT" in Figure 2) is located in region 20C. The direction from the inlet to the outlet of the film 8 in the stretching device 5 corresponds to the transport direction of the film 8 (MD direction).

[0029] The heat treatment unit 12 covers the conveying device 11, except for a portion on the inlet side and a portion on the outlet side. Therefore, the conveying device 11 is positioned inside the chamber 31 of the heat treatment unit 12, except for a portion on the inlet side and a portion on the outlet side. Figure 2 shows the case where an oven is used as the heat treatment unit 12. The film 8 passes through the chamber 31 of the heat treatment unit 12 while being held by the clips 13L and 13R of the conveying device 11. While the film 8 passes through the chamber 31 of the heat treatment unit 12, it can be heated to a desired temperature within the chamber 31. Therefore, the film 8 can be stretched at a temperature suitable for the stretching process.

[0030] Next, we will explain the operation of the stretching device 5.

[0031] The film 8 supplied (conveyed) from the raw material cooling device 4 to the stretching device 5 is gripped at the inlet of the stretching device 5 by clips 13L and 13R provided by the conveying device 11. That is, one end of the film 8 is gripped by clip 13L of the conveying device 11, and the other end of the film 8 is gripped by clip 13R of the conveying device 11. The film 8 gripped by clips 13L and 13R is then conveyed together with the clips 13L and 13R from the inlet to the outlet of the stretching device 5 in the MD direction, passing through regions 20A, 20B, and 20C in sequence. While passing through regions 20A, 20B, and 20C, the film 8 gripped by clips 13L and 13R is heated and stretched in the TD direction when passing through region 20B. Finally, the film 8 gripped by clips 13L and 13R reaches the outlet of the stretching device 5, where it is released from clips 13L and 13R. The membrane 8, removed from clips 13L and 13R, is transported from the outlet of the stretching device 5 to the take-up device 6, and from the take-up device 6 to the winding device 7 where it is wound up.

[0032] The operation of the stretching device 5 in region 20B will be explained further.

[0033] In region 20B, as the movement progresses in the MD direction, the distance L1 between the guide rail 14L and the guide rail 14R (distance in the TD direction) gradually increases. Clip 13L travels along the guide rail 14L, and clip 13R travels along the guide rail 14R. Therefore, in region 20B, as the movement progresses in the MD direction, the distance between clip 13L, which grips one end of the film 8, and clip 13R, which grips the other end of the film 8 (distance in the TD direction) gradually increases. As a result, in region 20B, as the movement progresses in the MD direction, the film 8 is pulled and stretched in the TD direction by clips 13L and 13R, and thus the film 8 is stretched in the TD direction. Therefore, in region 20B, the film 8 is subjected to a stretching process in the TD direction.

[0034] The operation of the stretching device 5 in regions 20A and 20C will be explained further.

[0035] In region 20A, the distance L1 between guide rail 14L and guide rail 14R is approximately constant. Similarly, in region 20C, the distance L1 between guide rail 14L and guide rail 14R is also approximately constant. Therefore, no stretching treatment is performed on the film 8 in regions 20A and 20C.

[0036] <Regarding the intake and exhaust of the stretching device> Figures 5 to 7 are cross-sectional views of the heat treatment section 12 of the stretching apparatus 5. Figure 5 corresponds to a cross-sectional view that is substantially parallel to the TD direction and substantially perpendicular to the MD direction, Figure 6 corresponds to a cross-sectional view that is substantially parallel to the MD direction and substantially perpendicular to the TD direction, and Figure 7 corresponds to a cross-sectional view that is substantially parallel to both the TD direction and the MD direction. In Figures 5 to 7, the TD direction, MD direction and H direction are shown, where the H direction is the height direction. The H direction is substantially perpendicular to both the TD direction and the MD direction.

[0037] The heat processing unit 12 of the stretching device 5 in this embodiment has an air supply and exhaust mechanism. Specifically, the heat processing unit 12 includes a chamber (oven chamber) 31, an air supply unit (air supply system, air supply mechanism) 32 for supplying air into the chamber 31, an exhaust unit (exhaust system, exhaust mechanism) 33 for exhausting air from the chamber 31, a pressure measuring unit (pressure gauge) 34, and a control unit 35 for controlling them. The stretching device 5 also has an operation unit (control panel) 36 for performing various operations and displays related to the stretching device 5. The operation unit 36 ​​has various buttons and an input keyboard. The display unit on the operation unit 36 ​​can also display the set pressure SV and measured pressure PV, which will be described later. The control unit 35 includes, for example, a control semiconductor device (processor) and a memory semiconductor device (memory). The control unit 35 can perform various controls based on information input to the operation unit 36 ​​and information stored in the control unit 35.

[0038] As described above, the conveying device 11 is located inside the chamber 31 of the heat treatment unit 12, except near the entrance and exit of the membrane 8. Therefore, the membrane 8, held by the clips 13L and 13R of the conveying device 11, passes through the chamber 31 of the heat treatment unit 12, during which time it undergoes stretching and heat treatment within the chamber 31. The chamber 31 has an entrance 31a into which the membrane 8 is transported and an exit 31b from which the membrane 8 is transported out of the chamber 31.

[0039] In the heat treatment unit 12, air can be supplied into the chamber 31 via the air supply unit 32, and the air inside the chamber 31 can be exhausted to the outside of the chamber 31 via the exhaust unit 33.

[0040] The air supply unit 32 includes an air intake port (opening) 41 for supplying air into the chamber 31, an air supply pipe (air supply duct, air supply path) 42 connected to the air intake port 41, a blower 44 connected to the air supply pipe 42, and an inverter 45 connected to the blower 44. The blower 44 can function as an air supply blower. The air supply pipe 42 is connected to the blowing side of the blower 44. The air intake port 41 can be provided in the ceiling, bottom, or side wall of the chamber 31. The motor constituting the air supply blower 44 receives the output of the inverter 45 connected to the blower 44. Therefore, the rotational speed of the motor constituting the air supply blower 44 can be controlled by the output of the inverter 45 connected to the blower 44.

[0041] The exhaust section 33 includes an exhaust port (opening) 51 for exhausting air from the chamber 31, an exhaust pipe (exhaust duct, exhaust path) 52 connected to the exhaust port 51, a damper 53 provided on the exhaust pipe 52, a blower 54 connected to the exhaust pipe 52, and an inverter 55 connected to the blower 54. The blower 54 can function as an exhaust fan. The exhaust pipe 52 is connected to the suction side of the blower 54. The exhaust port 51 can be provided on the ceiling, bottom, or side wall of the chamber 31. The motor constituting the exhaust blower 54 receives the output of the inverter 55 connected to the blower 54. Therefore, the rotational speed of the motor constituting the exhaust blower 54 can be controlled by the output of the inverter 55 connected to the blower 54. Also, in the case of Figures 5 to 7, a damper 53 is provided on the exhaust pipe 52, while a damper is not provided on the intake pipe 42, but in other configurations, a damper may also be provided on the intake pipe 42.

[0042] The heat treatment unit 12 further includes a nozzle 37, a heater (heating unit, heating mechanism) 38, and a blower fan 39. The nozzles 37 are positioned above and below the film 8, respectively. Air heated by the heater 38 is sent to the nozzles 37 by the blower fan 39 and blown towards the film 8 from multiple holes in the nozzles 37.

[0043] Air is supplied into the chamber 31 from the air supply unit 32. Specifically, air sent to the air supply pipe 42 by the blower 44 passes through the air supply pipe 42 and is supplied into the chamber 31 from the air supply port 41. In Figure 5, the air supply from the air supply port 41 to the chamber 31 is schematically shown by an arrow labeled 46. The air inside the chamber 31 moves (circulates) according to the airflow generated by the blower fan 39, is heated by the heater 38, and is sent to the nozzle 37, where it is blown onto the film 8 from multiple holes in the nozzle 37. In Figures 5 and 6, the heated air blown onto the film 8 from the nozzle 37 is schematically shown by an arrow labeled 37a. By blowing heated air (hot air) onto the film 8, the film 8 can be heated. This allows the film 8 to undergo heat treatment inside the chamber 31. Therefore, it is desirable to adjust the heater 38 so that the temperature of the air heated by the heater 38 is suitable for heating the membrane 8. The heated air blown towards the membrane 8 from the multiple holes of the nozzle 37 circulates within the chamber 31 according to the airflow generated by the blower fan 39, is heated again by the heater 38, and is blown towards the membrane 8 from the multiple holes of the nozzle 37.

[0044] A portion of the air inside the chamber 31 is exhausted to the outside of the chamber 31 through the exhaust section 33. Specifically, the blower 54 draws in air from the exhaust pipe 52, drawing in air from inside the chamber 31 through the exhaust pipe 52 and the exhaust port 51. As a result, the air inside the chamber 31 is exhausted to the outside of the chamber 31 through the exhaust port 51 and the exhaust pipe 52. In Figure 5, the exhaust from the exhaust port 51 is schematically shown by an arrow labeled 56. The damper 53 is an exhaust damper and has the function of adjusting the airflow rate passing through the exhaust pipe 52. Note that airflow rate corresponds to the amount (volume) of air moving (passing) per unit time.

[0045] The control unit 35 can control the airflow of each blower 44, 54 by adjusting the output of each inverter 45, 55. By adjusting the output of the inverter 45, the airflow of the blower 44 can be controlled, thereby controlling the amount of air supplied (amount of air supplied per unit time) from the air intake port 41 through the air intake pipe 42 into the chamber 31. Specifically, increasing the output from the inverter 45 to the blower 44 increases the rotational speed of the blower 44's motor, which increases the airflow of the blower 44, and consequently increases the amount of air supplied from the air intake port 41 through the air intake pipe 42 into the chamber 31. On the other hand, decreasing the output from the inverter 45 to the blower 44 decreases the rotational speed of the blower 44's motor, which decreases the airflow of the blower 44, and consequently decreases the amount of air supplied from the air intake port 41 through the air intake pipe 42 into the chamber 31.

[0046] Furthermore, the airflow of the blower 54 can be controlled by adjusting the output of the inverter 55, thereby controlling the amount of air (amount of air exhausted per unit time) exhausted from the chamber 31 through the exhaust port 51 and exhaust pipe 52. Specifically, increasing the output from the inverter 55 to the blower 54 increases the rotational speed of the blower 54's motor, which increases the airflow of the blower 54, and consequently increases the amount of air exhausted from the chamber 31 through the exhaust port 51 and exhaust pipe 52. On the other hand, decreasing the output from the inverter 55 to the blower 54 decreases the rotational speed of the blower 54's motor, which decreases the airflow of the blower 54, and consequently decreases the amount of air exhausted from the chamber 31 through the exhaust port 51 and exhaust pipe 52.

[0047] Furthermore, the control unit 35 can also control the degree to which the damper 53 is open or closed. By controlling the degree to which the damper 53 is open or closed, the amount of air exhausted from the chamber 31 through the exhaust pipe 52 to which the damper 53 is installed can be controlled. Specifically, when the damper 53 is moved closer to the open state, the amount of air exhausted from the chamber 31 through the exhaust pipe 52 to which the damper 53 is installed increases, while when the damper 53 is moved closer to the closed state, the amount of air exhausted from the chamber 31 through the exhaust pipe 52 to which the damper 53 is installed decreases.

[0048] Chamber 31 is provided with a pressure measuring unit 34 capable of measuring the pressure inside the chamber 31. Specifically, the pressure measuring unit 34 is a pressure gauge or pressure measuring instrument, and for example, a manometer (differential pressure gauge) can be used. When a manometer is used as the pressure measuring unit 34, the pressure measuring unit 34 can measure the difference (differential pressure) between the pressure inside the chamber 31 and the pressure outside the chamber 31.

[0049] The pressure inside the chamber 31 of the heat treatment section 12 of the stretching device 5 can be controlled by adjusting the amount of air supplied to the air supply section 32, specifically the amount of air supplied into the chamber 31 from the air inlet 41 through the air supply pipe 42, and the amount of air exhausted from the exhaust section 33, specifically the amount of air exhausted from the chamber 31 through the exhaust port 51 and exhaust pipe 52. The pressure inside the chamber 31 may be referred to as internal pressure below. The pressure outside the chamber 31, i.e., external pressure, is approximately equal to atmospheric pressure.

[0050] <Regarding the pressure inside the chamber of the heat treatment section of the stretching device> In this embodiment, the pressure measuring unit 34 can measure the pressure inside the chamber 31, and the control unit 35 can control the pressure inside the chamber 31 by adjusting the airflow rate of the exhaust blower 54 based on the pressure measured by the pressure measuring unit 34. Specifically, the control unit 35 can control the pressure inside the chamber 31 by adjusting the airflow rate of the exhaust blower 54 by adjusting the output from the inverter 55 to the exhaust blower 54 based on the pressure measured by the pressure measuring unit 34. Increasing the output from the inverter 55 to the blower 54 increases the airflow rate of the exhaust blower 54 and lowers the pressure inside the chamber 31. Conversely, decreasing the output from the inverter 55 to the blower 54 decreases the airflow rate of the exhaust blower 54 and raises the pressure inside the chamber 31. Therefore, when the control unit 35 determines that the pressure measured by the pressure measuring unit 34 is outside the acceptable range, it adjusts the output from the inverter 55 to the exhaust blower 54 so that the pressure inside the chamber 31 is within the acceptable range, thereby controlling the pressure inside the chamber 31 to the desired pressure.

[0051] Problems related to the movement of gas within the heat treatment section of the stretching apparatus, or the movement of gas between the inside and outside of the heat treatment section, include the generation of accompanying flow as the film to be stretched progresses, the inflow of cold outside air into the heat treatment section from the inlet or outlet, or the outflow of volatile components from the inlet or outlet. These can occur due to the pressure distribution within the chamber 31. In this embodiment, the pressure inside the chamber 31 can be controlled by adjusting the airflow rate of the exhaust blower 54 based on the pressure measured by the pressure measuring unit 34. Therefore, the pressure inside the chamber 31 can be quickly and accurately controlled to a desired pressure. Consequently, problems related to the movement of gas within the heat treatment section of the stretching apparatus, or the movement of gas between the inside and outside of the heat treatment section, can be resolved or improved.

[0052] Furthermore, the airflow of the blower 54 can also be adjusted by adjusting the degree of opening and closing of the damper 53. Therefore, in another configuration, the control unit 35 can also control the pressure in the chamber 31 by adjusting the degree of opening and closing of the damper 53 based on the pressure measured by the pressure measuring unit 34, thereby adjusting the airflow of the exhaust blower 54. Increasing the opening of the damper 53 increases the airflow of the exhaust blower 54 and lowers the pressure in the chamber 31, while decreasing the opening of the damper 53 decreases the airflow of the exhaust blower 54 and raises the pressure in the chamber 31. In yet another configuration, both the output of the inverter 55 and the degree of opening and closing of the damper 53 can be adjusted based on the pressure measured by the pressure measuring unit 34.

[0053] However, when the control unit 35 automatically adjusts the output of the inverter 55, the device configuration required for automatic adjustment is simpler than when the control unit 35 automatically adjusts the opening and closing degree of the damper 53, and it is also easier to fine-tune the airflow of the blower 54. For this reason, it is more preferable to adjust the output from the inverter 55 to the exhaust blower 54 based on the pressure measured by the pressure measuring unit 34.

[0054] Next, an example of the pressure distribution inside the chamber 31 of the heat treatment section 12 of the stretching device 5 will be described. Figures 8 to 13 are graphs showing an example of the pressure distribution inside the chamber 31 of the heat treatment section 12 of the stretching device 5. In the graphs of Figures 8 to 13, the horizontal axis corresponds to the position in the MD direction, and the vertical axis corresponds to the pressure. In the graphs of Figures 8 to 13, the area indicated as "inside the chamber 31" corresponds to the pressure inside the chamber 31, and the area outside of that corresponds to the pressure outside the chamber 31. In the graphs of Figures 8 to 13, the position indicated as "inlet" corresponds to the inlet 31a of the chamber 31, and the position indicated as "outlet" corresponds to the outlet 31b of the chamber 31. The pressure outside the chamber 31 is approximately equal to the atmospheric pressure P0.

[0055] In the case of the pressure distributions in Figure 8 and Figure 9, the pressure inside chamber 31 is higher than the pressure outside chamber 31. Furthermore, the pressure inside chamber 31 increases as you move from the inlet side to the outlet side in the MD direction. In this case, the internal pressures of each of the regions 20A, 20B, and 20C are higher than the external pressure, and the internal pressure is higher in region 20B than in region 20A, and higher in region 20C than in region 20B.

[0056] In the pressure distribution shown in Figure 8, the pressure inside chamber 31 gradually increases as it progresses in the MD direction. On the other hand, in the pressure distribution shown in Figure 9, the pressure inside chamber 31 increases in a stepwise manner as it progresses in the MD direction.

[0057] In the case of the pressure distributions in Figure 10 and Figure 11, the pressure inside chamber 31 is higher than the pressure outside chamber 31. Furthermore, the pressure inside chamber 31 is higher towards the center in the MD direction than at the inlet and outlet. In this case, the internal pressures of the aforementioned regions 20A, 20B, and 20C are higher than the external pressure, and the internal pressure of region 20B is higher than that of region 20A, and the internal pressure of region 20B is higher than that of region 20C.

[0058] In the pressure distribution shown in Figure 10, the pressure inside the chamber 31 gradually increases from the inlet and outlet sides towards the center in the MD direction. In the pressure distribution shown in Figure 11, the pressure inside the chamber 31 increases in a stepwise manner from the inlet and outlet sides towards the center in the MD direction.

[0059] In the case of the pressure distributions in Figure 12 and Figure 13, the pressure inside chamber 31 is lower than the pressure outside chamber 31. Furthermore, the pressure inside chamber 31 is lower towards the center in the MD direction than at the inlet and outlet. In this case, the internal pressures of the aforementioned regions 20A, 20B, and 20C are lower than the external pressure, and the internal pressure of region 20B is lower than that of region 20A, and the internal pressure of region 20B is lower than that of region 20C.

[0060] In the pressure distribution shown in Figure 12, the pressure inside the chamber 31 gradually decreases from the inlet and outlet sides towards the center in the MD direction. On the other hand, in the pressure distribution shown in Figure 13, the pressure inside the chamber 31 decreases in a stepwise manner from the inlet and outlet sides towards the center in the MD direction.

[0061] When the pressure distribution within the chamber 31 is controlled as shown in Figures 8 and 9, the following advantages can be obtained. Specifically, the generation of adjoint flow within the chamber 31 can be suppressed or prevented. Here, adjoint flow refers to the airflow that flows along the direction of travel of the membrane 8 from the inlet side to the outlet side when the membrane 8 is transported in the chamber 31 in the MD direction from the inlet side to the outlet side by the transport device 11. If adjoint flow occurs within the chamber 31, the temperature near the membrane 8 is likely to fluctuate, which may cause the properties of the stretched membrane 8 to become non-uniform. When the pressure distribution within the chamber 31 is controlled as shown in Figures 8 and 9, the generation of adjoint flow within the chamber 31 can be suppressed or prevented, thereby suppressing or preventing temperature fluctuations near the membrane 8 caused by the generation of adjoint flow within the chamber 31, and making the properties of the stretched membrane 8 uniform.

[0062] When the pressure distribution within the chamber 31 is controlled as shown in Figures 10 and 11, the following advantages can be obtained. Specifically, the inflow of cold outside air into the chamber 31 can be suppressed or prevented at both the inlet and outlet sides. This makes it easier to control the temperature inside the chamber 31, and facilitates the stretching process while heat-treating the film 8 within the chamber 31. As a result, the properties of the stretched film 8 can be made uniform.

[0063] Controlling the pressure distribution within the chamber 31 as shown in Figures 12 and 13 offers the following advantages: Specifically, it is possible to more effectively prevent air from leaking out of the chamber 31 at both the inlet and outlet sides. This also allows for more effective prevention of substances generated within the chamber 31 (such as volatile gaseous components) from flowing out of the chamber 31.

[0064] Depending on the type of film 8 to be stretched and its components, a target value for the pressure distribution inside the chamber 31 can be set, and the film 8 can be stretched while controlling the pressure distribution inside the chamber 31 to that target value. This allows the film 8 to be stretched while controlling the pressure distribution inside the chamber 31 to a pressure distribution appropriate for the film 8 being stretched, thus enabling accurate stretching of the film 8 using the stretching device 5.

[0065] <Regarding the first example of a method for controlling pressure within a chamber> An example of a method for controlling the pressure inside chamber 31 is described below.

[0066] First, a first example of a method for controlling the pressure in the chamber 31 will be described with reference to Figures 14 and 15. Figure 14 is an explanatory diagram showing the heat treatment section 12 of the stretching device 5. Figure 15 is a flow chart showing the pressure control.

[0067] Chamber 31 has multiple areas (rooms, compartments) Z1 to Z10, which are arranged sequentially in the MD direction from the inlet side to the outlet side. The conveying device 11 and the membrane 8 held by it are arranged across the multiple areas Z1 to Z10. The multiple areas Z1 to Z10 may be virtual areas, but it is preferable that they are separated by partition walls (divider plates) 61. The partition walls 61 are connected to the inner wall of Chamber 31. The partition walls 61 are shown in Figures 6 and 7. The area indicated by reference numeral 31c in Figures 7 and 8 corresponds to one of the multiple areas Z1 to Z10. Therefore, each area Z1 to Z10 has the structure shown in Figures 5 to 7, but the control unit 35 and the operation unit 36 ​​are common to all of the multiple areas Z1 to Z10. The placement of partition walls 61 between multiple zones Z1 to Z10 suppresses airflow (movement) between these zones. Furthermore, the partition walls 61 do not interfere with the placement of the conveying device 11 and the movement of the membrane 8. In other words, within the chamber 31, the conveying device 11 and the membrane 8 it conveys pass through areas where partition walls 61 do not exist.

[0068] As described above, the chamber 31 of the heat treatment unit 12 has a preheating region 20A, a stretching region 20B, and a heat-fixing region 20C. In the case of Figure 14, the chamber 31 has 10 regions Z1 to Z10, of which four regions Z1, Z2, Z3, and Z4 constitute the preheating region 20A, four regions Z5, Z6, Z7, and Z8 constitute the stretching region 20B, and two regions Z9 and Z10 constitute the heat-fixing region 20C. However, this is just one example, and the number of regions constituting the chamber 31, and the number of regions constituting each region 20A, 20B, and 20C can be changed in various ways.

[0069] Each of the multiple sections Z1 to Z10 of the chamber 31 is provided with the aforementioned pressure measuring section 34, nozzle 37, heater 38, and blower fan 39. Therefore, each section Z1 to Z10 of the chamber 31 has the aforementioned pressure measuring section 34, nozzle 37, heater 38, and blower fan 39, and this is true not only for the case in Figure 14, but also for the cases of Figures 18 and 19 described later. As a result, when the membrane 8 passes through each section Z1 to Z10 of the chamber 31, heated air is blown onto the membrane 8 from the multiple holes of the nozzle 37 provided in each section Z1 to Z10, thereby allowing the membrane 8 to be heat-treated. In addition, the pressure measuring section 34 provided in each section Z1 to Z10 can measure the pressure (internal pressure) in each section Z1 to Z10.

[0070] In Figure 14, the above-described air supply section 32 and exhaust section 33 are provided for each of the multiple sections Z1 to Z10 of the chamber 31. Therefore, each of the multiple sections Z1 to Z10 of the chamber 31 is provided with an air supply port 41, an air supply pipe 42, a blower 44 and an inverter 45 that constitute the air supply section 32, and an exhaust port 51, an exhaust pipe 52, a damper 53, a blower 54 and an inverter 55 that constitute the exhaust section 33. Therefore, in Figure 14, air can be supplied to each of the multiple sections Z1 to Z10 of the chamber 31 by the air supply section 32 provided for that section, and the amount of air supplied can be controlled by adjusting the output of the inverter 45 that constitutes the air supply section 32. Also, in Figure 14, air can be exhausted to each of the multiple sections Z1 to Z10 of the chamber 31 by the exhaust section 33 provided for that section, and the amount of exhaust can be controlled by adjusting the opening and closing degree of the damper 53 that constitutes the exhaust section 33 and the output of the inverter 54. Therefore, the amount of air supplied can be controlled independently for each of the multiple zones Z1 to Z10 of the chamber 31, and the amount of exhaust can be controlled independently for each of the multiple zones Z1 to Z10 of the chamber 31.

[0071] Figure 14 also shows examples of the set pressures SV for each zone Z1 to Z10 of the chamber 31. Note that differential pressure can also be used for both the set pressures SV and the measured pressures PV, which will be discussed later. Differential pressure corresponds to the difference between the internal pressure (pressure inside the chamber 31) and the external pressure (pressure outside the chamber 31). The example of set pressure SV shown in Figure 14 is differential pressure, and its unit is Pa.

[0072] In the example of set pressure SV shown in Figure 14, the set pressure SV for areas Z1 to Z4 is the same at 1.0 Pa. The set pressure SV for areas Z5 to Z8 is higher than that of areas Z1 to Z4, but is still the same at 3.0 Pa. The set pressure SV for area Z9 is higher than that of areas Z5 to Z8, at 5.0 Pa. The set pressure SV for area Z10 is higher than that of area Z9, at 7.0 Pa. This corresponds to the pressure distribution shown in Figure 9 above.

[0073] The set pressure SV is the target pressure value for each of the zones Z1 to Z10 of the chamber 31, and it is preferable to set it in advance before performing the stretching process of the film 8 by the stretching device 5. For example, the set pressure SV for each of the zones Z1 to Z10 can be input using the operation unit 36. The measured pressure PV is the measured value from the pressure measuring unit 34. Since a pressure measuring unit 34 is provided for each of the multiple zones Z1 to Z10 of the chamber 31, the pressure (differential pressure) of each zone Z1 to Z10 can be measured by the pressure measuring unit 34 provided for that zone.

[0074] The pressure control of one of the multiple zones Z1 to Z10, specifically zone Z3, will be explained with reference to Figure 15.

[0075] Furthermore, the exhaust section 33 provided for area Z3 will be referred to as "the exhaust section 33 of area Z3" below, and the exhaust port 51, exhaust pipe 52, damper 53, blower 54, and inverter 55 that constitute "the exhaust section 33 of area Z3" will be referred to as "the exhaust port 51 of area Z3", "the exhaust pipe 52 of area Z3", "the damper 53 of area Z3", "the blower 54 of area Z3", and "the inverter 55 of area Z3", respectively. In addition, the air supply section 32 provided for area Z3 will be referred to as "the air supply section 32 of area Z3" below, and the air supply port 41, air supply pipe 42, blower 44, and inverter 45 that constitute "the air supply section 32 of area Z3" will be referred to as "the air supply port 41 of area Z3", "the air supply pipe 42 of area Z3", "the blower 44 of area Z3", and "the inverter 45 of area Z3", respectively.

[0076] First, the pressure measuring unit 34 located in area Z3 measures the pressure in area Z3, and the control unit 35 acquires the measured pressure PV (step S1 in Figure 15).

[0077] Next, the control unit 35 calculates the difference EV between the measured pressure PV of area Z3 acquired in step S1 and the set pressure SV of area Z3 (step S2 in Figure 15). Here, EV = PV - SV holds true.

[0078] Next, the control unit 35 compares the absolute value of the difference EV calculated in step S2 with a predetermined allowable limit value GV (step S3 in Figure 15). The allowable limit value GV may be input via the operation unit 36, or it may be stored in the memory unit included in the control unit 35 as a standard value.

[0079] In step S3, if the control unit 35 determines that the absolute value of the difference EV is greater than or equal to the allowable limit value GV, it performs step S4 in Figure 15 to adjust the pressure in area Z3. This is because if the absolute value of the difference EV is greater than or equal to the allowable limit value GV, the pressure in area Z3 is considered to be outside the allowable range, and therefore it is necessary to adjust the pressure in area Z3. On the other hand, in step S3, if the control unit 35 determines that the absolute value of the difference EV is less than the allowable limit value GV, it does not perform step S4 in Figure 15 for area Z3. This is because if the absolute value of the difference EV is less than the allowable limit value GV, the pressure in area Z3 is considered to be within the allowable range, and therefore it is not necessary to adjust the pressure in area Z3.

[0080] In step S4 of Figure 15, the control unit 35 adjusts the output of the inverter 55 in area Z3 so that the pressure in area Z3 approaches the set pressure SV, based on a pre-prepared PID control law.

[0081] For example, if the absolute value of the difference EV is greater than or equal to the allowable limit value GV, and the difference EV is positive, the pressure in area Z3 will be too high. Therefore, the control unit 35 increases the output of the inverter 55 in area Z3 to lower the pressure in area Z3. As a result, the rotational speed of the motor constituting the blower 54 in area Z3 increases, increasing the airflow of the blower 54 in area Z3, and consequently lowering the pressure in area Z3.

[0082] On the other hand, if the absolute value of the difference EV is greater than or equal to the allowable limit value GV, and the difference EV is negative, the pressure in area Z3 will be too low. Therefore, the control unit 35 reduces the output of the inverter 55 in area Z3 so that the pressure in area Z3 increases. As a result, the rotational speed of the motor constituting the blower 54 in area Z3 decreases, the airflow of the blower 54 in area Z3 decreases, and consequently, the pressure in area Z3 increases.

[0083] During the control shown in Figure 15, the output of the inverter 45 in area Z3 remains unchanged, so the rotational speed of the motor constituting the blower 44 in area Z3 does not change. In other words, in the control shown in Figure 15, the output of the inverter 45 in area Z3 is kept constant, and the pressure in area Z3 is controlled by adjusting the output of the inverter 55 in area Z3 according to the measured pressure PV in area Z3.

[0084] By repeatedly performing the control shown in Figure 15, the difference EV between the measured pressure PV and the set pressure SV in area Z3 can be kept within the acceptable range. Furthermore, if the difference EV between the measured pressure PV and the set pressure SV in area Z3 falls outside the acceptable range, it can be quickly returned to within the acceptable range.

[0085] Figure 16 is a graph showing the measured pressure PV in area Z3 and the output of the inverter 55 in area Z3. In Figure 16, the horizontal axes of the upper and lower graphs correspond to elapsed time. In Figure 16, the vertical axis of the upper graph corresponds to the measured pressure PV in area Z3, and the vertical axis of the lower graph corresponds to the output of the inverter 55 in area Z3. In addition, in Figure 16, the set pressure SV in area Z3 is shown as a dashed line in the upper graph.

[0086] As can be seen from the graph in Figure 16, when the measured pressure PV is greater than or equal to "SV + GV", and when the measured pressure PV is less than or equal to "SV - GV", the absolute value of the difference EV between the measured pressure PV and the set pressure SV is greater than or equal to the allowable limit value GV. Therefore, while the graph in Figure 16 shows "Output adjustment in progress", the control in step S4 in Figure 15 is performed to adjust the output of the inverter 55 (see the lower graph in Figure 16), so that the absolute value of the difference EV between the measured pressure PV and the set pressure SV converges to less than or equal to the allowable limit value GV (see the upper graph in Figure 16).

[0087] By applying the control shown in Figure 15 to each of the multiple zones Z1 to Z10 of the chamber 31, the difference EV between the measured pressure PV and the set pressure SV in each zone Z1 to Z10 of the chamber 31 can be kept within an acceptable range. Furthermore, if the difference EV between the measured pressure PV and the set pressure SV in each zone Z1 to Z10 falls outside the acceptable range, it can be quickly returned to within the acceptable range. This allows the pressure inside the chamber 31 to be controlled to a desired pressure distribution. For example, the pressure inside the chamber 31 can be controlled to any of the pressure distributions shown in Figures 8 to 13.

[0088] The control shown in Figure 15 can be performed in parallel for each of the multiple regions Z1 to Z10 of the chamber 31, or it can be performed sequentially for the multiple regions Z1 to Z10 of the chamber 31.

[0089] Figure 17 is an explanatory diagram showing the control unit for switching the control of multiple areas Z1 to Z10 of the chamber 31 as shown in Figure 15. The control unit shown in Figure 17 corresponds to a part of the control unit 36 ​​described above.

[0090] In the control unit shown in Figure 17, when the overall control button is turned ON, the control shown in Figure 15 can be performed for each of the multiple areas Z1 to Z10 of the chamber 31 in a specific order. For example, the control shown in Figure 17 can be performed sequentially for the multiple areas Z1 to Z10 of the chamber 31 in an order such as area Z1, area Z2, ..., area Z9, area Z10, area Z1, area Z2, ..., area Z9, area Z10, area Z1, area Z2, ...

[0091] Furthermore, the control shown in Figure 15 can be applied only to selected areas among the multiple areas Z1 to Z10 of the chamber 31. In the operation unit shown in Figure 17, if any of the individual control buttons for areas Z1 to Z10 are set to the ON state, the control shown in Figure 15 can be applied only to the areas that are set to the ON state. For example, if the individual control buttons for areas Z2, Z3, Z6, Z7, Z9, and Z10 are set to the ON state, the control shown in Figure 15 can be applied to areas Z2, Z3, Z6, Z7, Z9, and Z10. In this case, the control shown in Figure 15 will not be applied to areas that are set to the OFF state among the individual control buttons.

[0092] <Regarding a second example of a method for controlling pressure within a chamber> Next, a second example of a method for controlling the pressure in chamber 31 will be described. The second example is a modification of the first example described above.

[0093] Figure 18 is an explanatory diagram showing the heat treatment section 12 of the stretching device 5, and corresponds to Figure 14 above. The differences between Figure 18 and Figure 14 are as follows:

[0094] In other words, in the case of Figure 14 above, each of the multiple zones Z1 to Z10 of the chamber 31 was provided with a supply air blower 44 and inverter 45, and an exhaust air blower 54 and inverter 55. On the other hand, in the case of Figure 18, at least one of the multiple zones Z1 to Z10 of the chamber 31 shared an exhaust air blower 54 and inverter 55 with the other zones, and also shared a supply air blower 44 and inverter 45.

[0095] Specifically, in the case of Figure 18, for areas Z9 and Z10 of the chamber 31, a supply air blower 44 and inverter 45, and an exhaust air blower 54 and inverter 55 are provided for each area Z9 and Z10. However, in the case of Figure 18, for areas Z1 to Z8 of the chamber 31, a common supply air blower 44 and inverter 45, and a common exhaust air blower 54 and inverter 55 are provided for every two areas.

[0096] In other words, in the case of Figure 18, a common supply blower 44a and inverter 45a, and a common exhaust blower 54a and inverter 55a are provided for areas Z1 and Z3 of the chamber 31. The common supply blower 44a and inverter 45a are used to supply air to both areas Z1 and Z3, and the common exhaust blower 54a and inverter 55a are used to exhaust air from both areas Z1 and Z3. Similarly, a common supply blower 44b and inverter 45b, and a common exhaust blower 54b and inverter 55b are provided for areas Z2 and Z4 of the chamber 31. The common supply blower 44b and inverter 45b are used to supply air to both areas Z2 and Z4, and the common exhaust blower 54b and inverter 55b are used to exhaust air from both areas Z2 and Z4. Similarly, for areas Z5 and Z7 of chamber 31, a common supply blower 44c and inverter 45c, and a common exhaust blower 54c and inverter 55c are provided. The common supply blower 44c and inverter 45c are used to supply air to both areas Z5 and Z7, and the common exhaust blower 54c and inverter 55c are used to exhaust air from both areas Z5 and Z7. Similarly, for areas Z6 and Z8 of chamber 31, a common supply blower 44d and inverter 45d, and a common exhaust blower 54d and inverter 55d are provided. The common supply blower 44d and inverter 45d are used to supply air to both areas Z6 and Z8, and the common exhaust blower 54d and inverter 55d are used to exhaust air from both areas Z6 and Z8.

[0097] In the case of Figure 18, the control shown in Figure 15 can be applied to each of the regions Z9 and Z10 of chamber 31. However, for regions Z1 and Z3, regions Z2 and Z4, regions Z5 and Z7, and regions Z6 and Z8, the control shown in Figure 15 can be applied to only one of them. For example, for regions Z1 and Z3, the control shown in Figure 15 can be applied to one (assuming region Z3 in this case), while the control shown in Figure 15 cannot be applied to the other (assuming region Z1 in this case).

[0098] Therefore, in step S3 of Figure 15, if the control unit 35 determines that the absolute value of the difference EV between the measured pressure PV of area Z3 and the set pressure SV of area Z3 is greater than or equal to the allowable limit value GV, it performs step S4 of Figure 15 to adjust the pressure of area Z3. In this case, with the output of the inverter 45a connected to the common blower 44a for areas Z1 and Z3 kept constant, the pressure of area Z3 is controlled by adjusting the output of the inverter 55a connected to the common blower 54a for areas Z1 and Z3 according to the measured pressure PV of area Z3. As a result, the pressure of area Z3 approaches the set pressure SV of area Z3, but since the blower 54a is used not only for exhaust of area Z3 but also for exhaust of area Z1, the pressure of area Z1 may also change. For this reason, it is preferable to perform the control shown in Figure 15 for the area where the internal pressure should be preferentially controlled (for example, area Z3) among areas Z1 and Z3.

[0099] In the case of Figure 14 (first example), the pressure in each of the multiple zones Z1 to Z10 of the chamber 31 can be controlled independently, so the pressure distribution of the chamber 31 can be controlled more precisely.

[0100] On the other hand, in the case of Figure 18 (second example), the number of blowers 44, 54 and inverters 45, 55 required can be reduced. Therefore, the structure of the stretching device 5 can be simplified, and the stretching device 5 can be made smaller. In addition, the manufacturing cost of the stretching device 5 can be reduced.

[0101] <Regarding the third example of a method for controlling pressure within a chamber> Next, a third example of a method for controlling the pressure in chamber 31 will be described. The third example is a further modification of the second example.

[0102] Figure 19 is an explanatory diagram showing the heat treatment section 12 of the stretching device 5, and corresponds to Figure 18 above. In the case of Figure 19, the air supply section 32 is the same as in Figure 18 above, and for simplification, the illustration of the air supply section 32 (air inlet 41, air supply pipe 42, blower 44 and inverter 45) is omitted. Figure 20 is a flow chart showing pressure control. The differences between Figure 19 and Figure 18 above are as follows.

[0103] In the case of Figure 19, of the multiple areas Z1 to Z10 of the chamber 31, areas Z1, Z2, Z3, and Z4 are treated as section SC1, areas Z5, Z6, Z7, and Z8 are treated as section SC2, area Z9 is treated as section SC3, and area Z10 is treated as section SC4. It is preferable that the set pressure SV be the same for areas Z1, Z2, Z3, and Z4 that constitute the same section SC1. Similarly, it is preferable that the set pressure SV be the same for areas Z5, Z6, Z7, and Z8 that constitute the same section SC2.

[0104] In the case of Figure 19, the air intake section 32 (air intake port 41, air intake pipe 42, blower 44, and inverter 45) and the exhaust section 33 (exhaust port 51, exhaust pipe 52, damper 53, blower 54, and inverter 55) are the same as in Figure 18, so a repeated explanation will be omitted here.

[0105] In Figures 19 and 20, the chamber 31 is divided into multiple sections SC1, SC2, SC3, and SC4, and pressure control is performed on each section individually.

[0106] First, pressure control is performed on one of the multiple sections SC1, SC2, SC3, and SC4, in this case section SC2, as shown in step S21 of Figure 20. The pressure control in step S21 of Figure 20 is as follows:

[0107] First, the control unit 35 acquires the measured pressure PV of each master area in section SC2, which is the target of step S21 (step S11 in Figure 20). The measured pressure PV can be obtained by measuring the pressure in the master area using the pressure measuring unit 34 provided in the master area.

[0108] Here, the master area corresponds to the area whose pressure can be controlled by the exhaust blower 54. Therefore, if exhaust is performed in only one area using one exhaust blower 54, that area corresponds to the master area, and if exhaust is performed in two areas using a common exhaust blower 54, one of those two areas corresponds to the master area. Specifically, one of the two areas Z1 and Z3 that are exhausted by the common exhaust blower 54a (assuming area Z3 here) and one of the two areas Z2 and Z4 that are exhausted by the common exhaust blower 54b (assuming area Z2 here) correspond to the master area in section SC1. Also, one of the two areas Z5 and Z7 that are exhausted by the common exhaust blower 54c (assuming area Z7 here) and one of the two areas Z6 and Z8 that are exhausted by the common exhaust blower 54d (assuming area Z6 here) correspond to the master area in section SC2. Furthermore, the master area in section SC3 corresponds to area Z9, and the master area in section SC4 corresponds to area Z10. In Figure 19, the master area is indicated as "MST".

[0109] After step S11, the control unit 35 calculates the square of the difference EV between the measured pressure PV and the set pressure SV in each master area of ​​section SC2 (here, areas Z6 and Z7), and calculates the sum T (step S12 in Figure 20). Here, the square of the difference EV between the measured pressure PV and the set pressure SV in area Z6 is (EV6). 2 This is expressed as (EV7), where (EV7) is the square of the difference EV between the measured pressure PV and the set pressure SV in area Z7. 2 Expressed as such, the total value T in section SC2 is T=(EV6)2 +(EV7) 2 can be represented as

[0110] After step S12, the control unit 35 compares the total value T calculated in step S12 with a predetermined allowable limit value GV (step S13 in FIG. 20). In step S13, if it is determined that the total value T in section SC2 is greater than or equal to the allowable limit value GV (i.e., T≧GV), then in order to adjust the pressure in section SC2, step S14 in FIG. 20 is performed. This is because when the total value T is greater than or equal to the allowable limit value GV, it is considered that the pressure in section SC2 is outside the allowable range. On the other hand, in step S13, if it is determined that the total value T in section SC2 is less than the allowable limit value GV (i.e., T<GV), then step S14 in FIG. 20 is not performed for section SC2. This is because when the total value T is less than the allowable limit value GV, it is considered that the pressure in section SC2 is within the allowable range

[0111] In step S14 of FIG. 20, the control unit 35 adjusts the outputs of the inverters 55 (here, inverters 55c and 55d) respectively connected to the blowers 54 (here, blowers 54c and 54d) for section SC2 so that the pressure (internal pressure) in the master area of section SC2 approaches the set pressure SV based on the PID control rule prepared in advance

[0112] For example, when the pressure in the master area of section SC2 is too high, the outputs of the inverters 55 (here, inverters 55c and 55d) respectively connected to the blowers 54 (here, blowers 54c and 54d) for section SC2 are increased so that the pressure in section SC2 decreases. As a result, the rotational speed of the motor constituting the blower 54 for section SC2 increases, and thus the air volume of the blower 54 for section SC2 increases, and as a result, the pressure in section SC2 (i.e., areas Z5, Z6, Z7, Z8) decreases

[0113] On the other hand, when the pressure in the master area of section SC2 is too low, the outputs of inverters 55 (here, inverters 55c and 55d) respectively connected to blowers 54 for section SC2 (here, blowers 54c and 54d) are decreased so that the pressure in section SC2 increases. As a result, the rotational speed of the motor constituting blower 54 for section SC2 decreases, and thus the air volume of blower 54 for section SC2 decreases. Consequently, the pressure in section SC2 (i.e., areas Z5, Z6, Z7, Z8) increases. In step S21 of FIG. 20, the outputs of inverters 45 connected to the respective blowers 44 for air supply are kept constant.

[0114] Thus, in step S21 of FIG. 20, the pressure in section SC2 (i.e., areas Z5, Z6, Z7, Z8) is controlled by adjusting the outputs of inverters 55 (here, inverters 55c and 55d) respectively connected to blowers 54 for section SC2 (here, blowers 54c and 54d) according to the measured pressures PV in the respective master areas (here, areas Z6 and Z7) of section SC2.

[0115] Steps S11, S12, S13, and S14 are repeated for section SC2 until it is determined in step S13 that the total value T in section SC2 is smaller than the allowable limit value GV (i.e., T < GV). If it is determined in step S13 that the total value T in section SC2 is smaller than the allowable limit value GV (i.e., T < GV), the control of step S21 for section SC2 ends, and the control of step S22 in FIG. 20 is performed for section SC3.

[0116] In step S22 of FIG. 20, the same control as step S21 described above (i.e., steps S11, S12, S13, S14) is performed for section SC3. However, in section SC3, the master area is area Z9. Therefore, in step S11 of step S22 in FIG. 20, the measured pressure PV of area Z9, which is the master area of section SC3, is acquired. Also, in step S14 of step S22 in FIG. 20, the control unit 35 adjusts the output of the inverter 55 connected to the blower 54 for section SC3 so that the pressure in area Z9, which is the master area of section SC3, approaches the set pressure SV.

[0117] In step S22, steps S11, S12, S13, and S14 are repeated for section SC3 until it is determined in step S13 that the total value T in section SC3 is less than the allowable limit value GV (i.e., T < GV). When it is determined in step S13 of step S22 that the total value T in section SC3 is less than the allowable limit value GV (i.e., T < GV), the control of step S22 for section SC3 ends, and the control of step S23 in FIG. 20 is performed for section SC4.

[0118] In step S23 of FIG. 20, the same control as step S21 described above (i.e., steps S11, S12, S13, S14) is performed for section SC4. However, in section SC4, the master area is area Z10. Therefore, in step S11 of step S24 in FIG. 20, the measured pressure PV of area Z10, which is the master area of section SC4, is acquired. Also, in step S14 of step S23 in FIG. 20, the control unit 35 adjusts the output of the inverter 55 connected to the blower 54 for section SC4 so that the pressure in area Z10, which is the master area of section SC4, approaches the set pressure SV.

[0119] In step S23, steps S11, S12, S13, and S14 are repeated for section SC4 until it is determined in step S13 that the total value T in section SC4 is less than the tolerance limit value GV (i.e., T < GV). If it is determined in step S13 in step S23 that the total value T in section SC4 is less than the tolerance limit value GV (i.e., T < GV), the control of step S23 for section SC4 ends, and the control of step S24 in FIG. 20 is performed for section SC1.

[0120] In step S24 of FIG. 20, the same control as step S21 described above (i.e., steps S11, S12, S13, S14) is performed for section SC1. However, in section SC1, the master areas are areas Z2 and Z3. Therefore, in step S11 in step S24 of FIG. 20, the measured pressures PV of areas Z2 and Z3, which are the master areas of section SC1, are acquired. Also, in step S14 in step S24 of FIG. 20, the control unit 35 adjusts the outputs of the inverters 55 (here, inverters 55a and 55b) connected to the blowers 54 (here, blowers 54a and 54b) for section SC1 so that the pressures in areas Z2 and Z3, which are the master areas of section SC1, approach the set pressure SV.

[0121] In step S24, steps S11, S12, S13, and S14 are repeated for section SC1 until it is determined in step S13 that the total value T in section SC1 is less than the tolerance limit value GV (i.e., T < GV). If it is determined in step S13 in step S24 that the total value T in section SC1 is less than the tolerance limit value GV (i.e., T < GV), the control of step S24 for section SC1 ends, and the control of step S21 in FIG. 20 is performed for section SC2.

[0122] The control of section SC2 in step S21, section SC3 in step S22, section SC4 in step S23, and section SC1 in step S24 are repeated in sequence. This ensures that the pressures in each section SC1, SC2, SC3, and SC4 are kept within the acceptable range, and if the pressures in each section SC1, SC2, SC3, and SC4 fall outside the acceptable range, they can be quickly returned to the acceptable range.

[0123] In the case of Figure 20 (third example), section SC2, which includes multiple areas Z5, Z6, Z7, and Z8, is controlled collectively in step S21, and section SC1, which includes multiple areas Z1, Z2, Z3, and Z4, is controlled collectively in step S24. Therefore, the control time required in Figure 20 (third example) can be reduced compared to the case where areas Z1, Z2, Z3, Z4, Z5, Z6, Z7, Z8, Z9, and Z10 are controlled sequentially. As a result, if a fluctuation in the measured pressure occurs for any reason, the pressure inside the chamber can be corrected more quickly and brought into an acceptable range.

[0124] (Embodiment 2) Figure 21 is a cross-sectional view of the heat treatment section 12 of the stretching apparatus 5 of this second embodiment, showing the cross-section corresponding to Figure 5 above.

[0125] In this second embodiment, the heat processing unit 12 of the stretching device 5 has a temperature measuring unit 71 instead of a pressure measuring unit 34. That is, in this second embodiment, the chamber 31 is provided with a temperature measuring unit 71 capable of measuring the temperature inside the chamber 31. Specifically, the temperature measuring unit 71 is, for example, a thermometer or a temperature sensor.

[0126] The temperature inside the chamber 31 is primarily determined by the temperature of the heated air ejected from the nozzle 37, but it can also be controlled by adjusting the exhaust velocity of the chamber 31 from the exhaust port 51 of the exhaust unit 33. That is, the heated air ejected from the multiple holes of the nozzle 37 circulates inside the chamber 31, is heated again by the heater 38, and ejected from the multiple holes of the nozzle 37, but a portion of the heated air inside the chamber 31 is exhausted to the outside of the chamber 31 through the exhaust port 51. Since the temperature of the heated air exhausted from the exhaust port 51 is higher than the temperature of the air supplied into the chamber 31 from the air supply port 41 of the air supply unit 32, increasing the exhaust velocity of the heated air inside the chamber 31 from the exhaust port 51 will lower the temperature inside the chamber 31. For this reason, the temperature inside the chamber 31 can be controlled by adjusting the airflow rate of the exhaust blower 54. Specifically, when the airflow of the exhaust blower 54 increases, the exhaust velocity of the heated air in the chamber 31 from the exhaust port 51 increases, causing the temperature inside the chamber 31 to decrease. Conversely, when the airflow of the exhaust blower 54 decreases, the exhaust velocity of the heated air in the chamber 31 from the exhaust port 51 decreases, causing the temperature inside the chamber 31 to increase.

[0127] In this second embodiment, the temperature measuring unit 71 can measure the temperature inside the chamber 31, and the control unit 35 can control the temperature inside the chamber 31 by adjusting the airflow rate of the exhaust blower 54 based on the temperature measured by the temperature measuring unit 71. Specifically, the control unit 35 can control the temperature inside the chamber 31 by adjusting the airflow rate of the exhaust blower 54 by adjusting the output from the inverter 55 to the exhaust blower 54 based on the temperature measured by the temperature measuring unit 71. Increasing the output from the inverter 55 to the blower 54 increases the airflow rate of the exhaust blower 54, lowering the temperature inside the chamber 31. Conversely, decreasing the output from the inverter 55 to the blower 54 decreases the airflow rate of the exhaust blower 54, raising the temperature inside the chamber 31. Therefore, when the control unit 35 determines that the temperature measured by the temperature measuring unit 71 is outside the acceptable range, it adjusts the output from the inverter 55 to the exhaust blower 54 so that the temperature inside the chamber 31 is within the acceptable range, thereby controlling the temperature inside the chamber 31 to a desired temperature.

[0128] Furthermore, the airflow of the blower 54 can also be adjusted by adjusting the degree of opening and closing of the damper 53. Therefore, in another configuration, the control unit 35 can also control the temperature inside the chamber 31 by adjusting the degree of opening and closing of the damper 53 based on the temperature measured by the temperature measuring unit 71, thereby adjusting the airflow of the exhaust blower 54. Increasing the opening of the damper 53 increases the airflow of the exhaust blower 54 and lowers the temperature inside the chamber 31, while decreasing the opening of the damper 53 decreases the airflow of the exhaust blower 54 and raises the temperature inside the chamber 31. In yet another configuration, both the output of the inverter 55 and the degree of opening and closing of the damper 53 can be adjusted based on the temperature measured by the temperature measuring unit 71.

[0129] In this second embodiment, problems that may occur when the temperature inside the chamber 31 falls outside the acceptable range can be solved or improved. For example, when an accompanying flow is generated inside the chamber 31 as the film 8 progresses, the temperature near the film 8 tends to fluctuate. To suppress temperature fluctuations near the film 8, it is effective to maintain the temperature inside the chamber 31 within the acceptable temperature range. In this second embodiment, the temperature inside the chamber 31 can be controlled by adjusting the airflow rate of the exhaust blower 54 based on the temperature measured by the temperature measuring unit 71. This allows the temperature inside the chamber 31 to be controlled quickly and accurately to a desired temperature. As a result, temperature fluctuations inside the chamber 31 when an accompanying flow is generated can be suppressed, and the properties of the stretched film can be made uniform.

[0130] Furthermore, the method for controlling the temperature inside the chamber 31 can be carried out in the same manner as the example of the method for controlling the pressure inside the chamber 31 described in Embodiment 1 above.

[0131] For example, let's describe the case where the first example in Figures 14 and 15 above is applied to Embodiment 2. In this case, each area Z1 to Z10 (Figure 14) of the chamber 31 is provided with a temperature measuring unit 71 instead of a pressure measuring unit 34. In Figure 15, the set pressure SV becomes the set temperature, and the measured pressure PV becomes the measured temperature measured by the temperature measuring unit 71. The temperature of each area Z1 to Z10 can be measured by the temperature measuring unit 71 provided in each area Z1 to Z10.

[0132] In the case of this second embodiment, the control shown in Figure 15 will be explained in detail. In step S1 of Figure 15, the temperature of the target area is measured by a temperature measuring unit 71 provided in the target area among the areas Z1 to Z10, and the control unit 35 acquires the measured temperature instead of the measured pressure PV. In step S2 of Figure 15, the control unit 35 calculates the difference between the measured temperature acquired in step S1 and the set temperature of the target area. In step S3 of Figure 15, the control unit 35 compares the absolute value of the difference calculated in step S2 with a predetermined allowable limit value. If the control unit 35 determines in step S3 that the absolute value of the difference calculated in step S2 is greater than or equal to the allowable limit value, the temperature of the target area is considered to be outside the allowable range, so step S4 in Figure 15 is performed to adjust the temperature of the target area. On the other hand, if the control unit 35 determines that the absolute value of the difference calculated in step S2 is less than the allowable limit value, the temperature of the target area is considered to be within the allowable range, so step S4 in Figure 15 is not performed for the target area. In step S4 of Figure 15, the control unit 35 adjusts the output of the inverter 55 in the symmetric area based on a pre-prepared PID control law so that the temperature of the symmetric area approaches the set temperature. Increasing the output of the inverter 55 in the target area increases the rotational speed of the motor constituting the blower 54 in the target area, thus increasing the airflow of the blower 54 in the symmetric area, and as a result, the temperature of the symmetric area decreases. Decreasing the output of the inverter 55 in the target area decreases the rotational speed of the motor constituting the blower 54 in the target area, thus decreasing the airflow of the blower 54 in the symmetric area, and as a result, the temperature of the symmetric area increases. By repeating the control shown in Figure 15, the difference between the measured temperature and the set temperature of the symmetric area can be kept within an acceptable range, and if the difference between the measured temperature and the set temperature of the symmetric area falls outside the acceptable range, it can be quickly returned to within the acceptable range.

[0133] Furthermore, the second example shown in Figures 18 and 15 above can also be applied to this second embodiment. In this case, a temperature measuring unit 71 is provided in place of the pressure measuring unit 34 in each region Z1 to Z10 (Figure 18) of the chamber 31, and in Figure 15 above, the set pressure SV becomes the set temperature, and the measured pressure PV becomes the measured temperature measured by the temperature measuring unit 71.

[0134] Furthermore, the third example shown in Figures 19 and 20 above can also be applied to this second embodiment. In this case, each region Z1 to Z10 (Figure 19) of the chamber 31 is provided with a temperature measuring unit 71 instead of a pressure measuring unit 34, and in Figure 20 above, the measured pressure PV becomes the measured temperature measured by the temperature measuring unit 71.

[0135] (Embodiment 3) Figure 22 is a cross-sectional view of the heat treatment section 12 of the stretching apparatus 5 in this third embodiment, showing the cross-section corresponding to Figures 5 and 21.

[0136] This third embodiment corresponds to a combination of the first and second embodiments described above. Therefore, in this third embodiment, the heat treatment unit 12 of the stretching device 5 has both a pressure measuring unit 34 and a temperature measuring unit 71. That is, in this second embodiment, the chamber 31 is provided with a pressure measuring unit 34 capable of measuring the pressure inside the chamber 31 and a temperature measuring unit 71 capable of measuring the temperature inside the chamber 31. Therefore, in this third embodiment, both a pressure measuring unit 34 and a temperature measuring unit 71 can be provided in each of the chamber 31's regions Z1 to Z10 (Figures 14, 18, and 19).

[0137] In this third embodiment, the pressure measuring unit 34 can measure the pressure inside the chamber 31, the temperature measuring unit 71 can measure the temperature inside the chamber 31, and the control unit 35 can control the pressure and temperature inside the chamber 31 by adjusting the airflow rate of the exhaust blower 54 based on the pressure measured by the pressure measuring unit 34 and the temperature measured by the temperature measuring unit 71. Specifically, the control unit 35 can control the temperature inside the chamber 31 by adjusting the airflow rate of the exhaust blower 54 by adjusting the output from the inverter 55 to the exhaust blower 54 based on the pressure measured by the pressure measuring unit 34 and the temperature measured by the temperature measuring unit 71. Therefore, when the control unit 35 determines that either or both of the pressure measured by the pressure measuring unit 34 and the pressure and temperature measured by the temperature measuring unit 71 are outside the acceptable range, it adjusts the output from the inverter 55 to the exhaust blower 54 so that the pressure and temperature inside the chamber 31 are within the acceptable range, thereby controlling the pressure and temperature inside the chamber 31 to the desired pressure and temperature. In another configuration, the control unit 35 can also control the pressure and temperature inside the chamber 31 by adjusting the airflow of the exhaust blower 54 based on the pressure measured by the pressure measuring unit 34 and the temperature measured by the temperature measuring unit 71, by adjusting the degree of opening and closing of the damper 53 (or by adjusting both the output of the inverter 55 and the degree of opening and closing of the damper 53).

[0138] In this third embodiment, it is possible to resolve or improve problems that may occur when either or both of the pressure and / or temperature inside the chamber 31 fall outside the acceptable range.

[0139] The present invention has been described in detail above based on its embodiments, but it goes without saying that the present invention is not limited to the above embodiments and can be modified in various ways without departing from its essence.

[0140] For example, in embodiments 1 to 3 described above, the example given was a case where a transverse stretching device is used as the stretching device 5 to stretch the film 8 in the MD direction (lateral direction). However, in other forms, the technical concept of embodiments 1 to 3 can also be applied to a simultaneous biaxial stretching device that can stretch the film 8 simultaneously in the MD direction (lateral direction) and the TD direction (longitudinal direction). [Explanation of Symbols]

[0141] 1. Thin film manufacturing system 2. Extruder 2a Raw material supply section 3 T-die 4 Fabric cooling device 5 Stretching device 6. Collection device 7. Winding device 8 membrane 11. Conveying device 12 Heat treatment 13, 13L, 13R clips 14L, 14R Guide Rails 20A, 20B, 20C area 31 Chambers 32 Air supply section 33 Exhaust section 34 Pressure measuring section 35 Control Unit 37 nozzles 38 Heater 39. Blower fan 41 Air supply port 42 Air supply pipe 44 Blower 45 Inverter 51 Exhaust vent 52 Exhaust pipe 53 Damper 54 Blower 55 Inverter 71 Temperature measurement section SC1, SC2, SC3, SC4 sections Z1,Z2,Z3,Z4,Z5,Z6,Z7,Z8,Z9,Z10 area

Claims

1. A stretching apparatus for thermoplastic resin films, including the following: A conveying device for conveying and stretching the thermoplastic resin film; and A heat treatment unit for performing heat treatment on the thermoplastic resin film, Here, the heat treatment unit is A chamber covering the aforementioned conveying device; An air supply unit for supplying air into the chamber; Exhaust section for exhausting from the chamber; A pressure measuring unit for measuring the pressure inside the chamber; and Control unit, It has, The exhaust unit comprises an exhaust port provided in the chamber and an exhaust fan that enables exhaust from the exhaust port. The control unit controls the pressure inside the chamber by adjusting the airflow rate of the exhaust blower based on the pressure measured by the pressure measuring unit. The chamber has a plurality of areas arranged in the direction of transport of the thermoplastic resin film, Each of the aforementioned multiple areas is provided with the air supply unit, the exhaust unit, and the pressure measuring unit. The chamber has an inlet into which the thermoplastic resin film is introduced and an outlet from which the thermoplastic resin film is discharged. The control unit controls the pressure inside the chamber so that the pressure inside the chamber is higher than the pressure outside the chamber, and the pressure inside the chamber increases as it moves from the inlet side to the outlet side.

2. A stretching apparatus for thermoplastic resin films, including the following: A conveying device for conveying and stretching the thermoplastic resin film; and A heat treatment unit for performing heat treatment on the thermoplastic resin film, Here, the heat treatment unit is A chamber covering the aforementioned conveying device; An air supply unit for supplying air into the chamber; Exhaust section for exhausting from the chamber; A pressure measuring unit for measuring the pressure inside the chamber; and Control unit, It has, The exhaust unit comprises an exhaust port provided in the chamber and an exhaust fan that enables exhaust from the exhaust port. The control unit controls the pressure inside the chamber by adjusting the airflow rate of the exhaust blower based on the pressure measured by the pressure measuring unit. The chamber has a plurality of areas arranged in the direction of transport of the thermoplastic resin film, Each of the aforementioned multiple areas is provided with the air supply unit, the exhaust unit, and the pressure measuring unit. The chamber has an inlet into which the thermoplastic resin film is introduced and an outlet from which the thermoplastic resin film is discharged. The control unit controls the pressure inside the chamber so that the pressure inside the chamber is higher than the pressure outside the chamber, and the pressure inside the chamber is higher towards the center than at the inlet and outlet ends.

3. A stretching apparatus for thermoplastic resin films, including the following: A conveying device for conveying and stretching the thermoplastic resin film; and A heat treatment unit for performing heat treatment on the thermoplastic resin film, Here, the heat treatment unit is A chamber covering the aforementioned conveying device; An air supply unit for supplying air into the chamber; Exhaust section for exhausting from the chamber; A pressure measuring unit for measuring the pressure inside the chamber; and Control unit, It has, The exhaust unit comprises an exhaust port provided in the chamber and an exhaust fan that enables exhaust from the exhaust port. The control unit controls the pressure inside the chamber by adjusting the airflow rate of the exhaust blower based on the pressure measured by the pressure measuring unit. The chamber has a plurality of areas arranged in the direction of transport of the thermoplastic resin film, Each of the aforementioned multiple areas is provided with the air supply unit, the exhaust unit, and the pressure measuring unit. The chamber has an inlet into which the thermoplastic resin film is introduced and an outlet from which the thermoplastic resin film is discharged. The control unit controls the pressure inside the chamber so that the pressure inside the chamber is lower than the pressure outside the chamber, and the pressure inside the chamber is lower towards the center than towards the inlet and outlet.

4. In the stretching apparatus according to any one of claims 1 to 3, The exhaust unit further includes an inverter connected to the exhaust blower, The stretching device controls the pressure in the chamber by adjusting the airflow of the exhaust blower based on the pressure measured by the pressure measuring unit, thereby adjusting the output from the inverter to the exhaust blower.

5. In the stretching apparatus according to claim 4, The extension device includes a control unit that, when it determines that the pressure measured by the pressure measuring unit is outside the acceptable range, adjusts the output from the inverter to the exhaust blower so that the pressure in the chamber falls within the acceptable range.

6. In the stretching apparatus according to any one of claims 1 to 3, The exhaust section further comprises an exhaust pipe provided between the exhaust fan and the exhaust port, and a damper provided in the middle of the exhaust pipe. The control unit controls the pressure inside the chamber by adjusting the airflow of the exhaust blower based on the pressure measured by the pressure measuring unit, thereby adjusting the degree of opening and closing of the damper.

7. In the stretching apparatus according to any one of claims 1 to 3, The stretching device comprises an air supply section having an air supply port provided in the chamber and an air supply blower that enables the supply of air from the air supply port into the chamber.

8. In the stretching apparatus according to any one of claims 1 to 3, The exhaust unit further includes an inverter connected to the exhaust blower, The control unit controls the pressure inside the chamber by adjusting the airflow of the exhaust blower in one or more selected areas from the plurality of areas, based on the pressure measured by the pressure measuring unit, thereby adjusting the output from the inverter to the exhaust blower.

9. In the stretching apparatus according to claim 8, The extension device includes a control unit that, when it determines that the pressure measured by the pressure measuring unit is outside the acceptable range in one or more selected areas among the plurality of areas, adjusts the output from the inverter to the exhaust blower so that the pressure in the chamber is within the acceptable range.

10. In the stretching apparatus according to any one of claims 1 to 3, The exhaust unit further includes an inverter connected to the exhaust blower, The stretching device controls the pressure in the chamber by adjusting the airflow of the exhaust blower in each of the plurality of areas, by adjusting the output from the inverter to the exhaust blower based on the pressure measured by the pressure measuring unit.

11. In the stretching apparatus according to claim 10, The extension device includes a control unit that, when it determines that the pressure measured by the pressure measuring unit in each of the plurality of areas is outside the acceptable range, adjusts the output from the inverter to the exhaust blower so that the pressure in the chamber is within the acceptable range.

12. In the stretching apparatus according to any one of claims 1 to 3, The exhaust unit further includes an inverter connected to the exhaust blower, An extension device in which at least one of the aforementioned multiple areas shares the exhaust blower and inverter with the other areas.

13. In the stretching apparatus according to any one of claims 1 to 3, The heat treatment unit further includes a temperature measuring unit for measuring the temperature inside the chamber, The control unit controls the pressure and temperature inside the chamber by adjusting the airflow rate of the exhaust blower based on the pressure measured by the pressure measuring unit and the temperature measured by the temperature measuring unit, thereby controlling the pressure and temperature inside the chamber.

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