Expanding device and expanding method

Abstract

To reduce the risk that an undivided area is to be created in a workpiece.SOLUTION: An expanding device 1 that expands an expand sheet to which a workpiece on which a modified layer is formed, which is a split starting point, is attached, and divides the workpiece includes an expansion unit 10 which is an expansion mechanism that expands the expand sheet, and a cooling unit 20 that cools an area between the inner edge of an annular frame of the expand sheet and the outer edge of the workpiece such that the area is cooler than an area inside the outer edge of the workpiece of the expand sheet.SELECTED DRAWING: Figure 1

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