Solid-state imaging device, method for driving a solid-state imaging device, and electronic equipment

Abstract

To provide a solid-state imaging device, a method for driving a solid-state imaging device, and an electronic apparatus that are capable of avoiding generation of a false signal, preventing a deterioration in image quality and also achieving stable operation.SOLUTION: A photoelectric conversion reading part 210 of a pixel 200 includes: a photoelectric conversion element PD1 for storing therein, in a storing period, charges generated by a photoelectric conversion; a transfer element TG1-Tr capable of transferring, in a transfer period following the storing period, the charges stored in the photoelectric conversion element; an output node FD1 to which the charges stored in the photoelectric conversion element are transferred through the transfer element; a reset element RST1-Tr for resetting, in a reset period, the output node to a predetermined potential; an output buffer part 211 for converting the charges in the output node into a voltage signal according to the amount of the charges and outputting the converted voltage signal as a pixel signal; and an output voltage control part 213 for controlling an output signal level of the pixel signal from the output buffer part to a controlled level according to an operational state.SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] The present invention relates to a solid-state imaging device, a method for driving the solid-state imaging device, and an electronic device.

Background Art

[0002] As a solid-state imaging device (image sensor) using a photoelectric conversion element that detects light and generates electric charge, a CMOS (Complementary Metal Oxide Semiconductor) image sensor has been put into practical use.

[0003] CMOS image sensors are widely applied as a part of various electronic devices such as digital cameras, video cameras, surveillance cameras, medical endoscopes, personal computers (PCs), and mobile devices such as mobile phones.

[0004] A CMOS image sensor has a FD amplifier having a photodiode (photoelectric conversion element) and a floating diffusion layer (FD: Floating Diffusion) for each pixel, and its readout is mainly of a column parallel output type in which a certain row in the pixel array is selected and they are simultaneously read out in the column (column) output direction.

[0005] By the way, various methods have been proposed to realize a high-quality CMOS image sensor with a wide dynamic range for improving characteristics (see, for example, Patent Document 1).

[0006] Patent Document 1 describes a solid-state imaging device provided with a photodiode PD and a storage capacitor Cs, which can increase the maximum signal and expand the dynamic range by holding the signal charge in the storage capacitor Cs larger than the capacitance of the photodiode PD.

[0007] In this solid-state imaging device, when the brightness is high, the charge overflowing from the photodiode PD is stored in the storage capacitance Cs. The high-brightness signal overflowing from the storage capacitance Cs is read out with a low conversion gain (LCG(FD capacitance CFd+Cs)). Low-brightness signals are read out with a high conversion gain (HCG(FD capacitance CFd)) for high gain.

[0008] Furthermore, a wide variety of pixel signal readout (output) circuits have been proposed for column-parallel output type CMOS image sensors.

[0009] Among these, one of the most advanced circuits is one that incorporates an analog-to-digital converter (ADC) for each column, extracting the pixel signal as a digital signal (see, for example, Patent Documents 2 and 3).

[0010] In this column-parallel ADC-equipped CMOS image sensor (column AD type CMOS image sensor), the comparator compares the so-called RAMP wave with the pixel signal, and AD conversion is performed by performing digital CDS in a subsequent counter.

[0011] However, while this type of CMOS image sensor allows for high-speed signal transfer, it has the disadvantage of not being able to perform global shutter readout.

[0012] In response to this, a digital pixel sensor has been proposed that includes an ADC (and even a memory unit) with a comparator for each pixel, enabling a global shutter that starts and ends exposure at the same timing for all pixels in the pixel array (see, for example, Patent Documents 4 and 5).

[0013] However, while the aforementioned conventional CMOS image sensors equipped with digital pixel sensors can achieve a global shutter function, they have limitations in terms of wide dynamic range and high frame rate because, for example, they do not utilize the charge overflowing from the photodiode during the storage period in real time.

[0014] A CMOS image sensor equipped with a digital pixel sensor that can effectively achieve a wide dynamic range and high frame rate has been proposed (see, for example, Patent Document 6).

[0015] In this CMOS image sensor, each digital pixel DP has an AD conversion function, and the AD conversion unit has a comparator that performs a comparison process by comparing the voltage signal output (read out) by the output buffer unit of the photoelectric conversion readout unit with a reference voltage and outputting a digitized comparison result signal.

[0016] The comparator then performs a first comparison process, which outputs a digitized first comparison result signal for the voltage signal corresponding to the overflow charge that spilled from the photoelectric conversion element to the output node (floating diffusion) during the storage period, and a second comparison process, which outputs a digitized second comparison result signal for the voltage signal corresponding to the stored charge of the photoelectric conversion element transferred to the output node during the transfer period after the storage period. [Prior art documents] [Patent Documents]

[0017] [Patent Document 1] Patent No. 4317115 [Patent Document 2] Japanese Patent Publication No. 2005-278135 [Patent Document 3] Japanese Patent Publication No. 2005-295346 [Patent Document 4] US 7164114 B2 FIG, 4 [Patent Document 5] US 2010 / 0181464 A1 [Patent Document 6] Japanese Patent Publication No. 2019-062398 [Overview of the Initiative] [Problems that the invention aims to solve]

[0018] However, in the above-described CMOS image sensor, for example, during the reset level sampling period, if a rapid signal drop is observed due to very strong light, a false signal such as a high-brightness black dot (black sun) appears for a very bright object such as the "sun", that is, a so-called "eclipse" including structural noise of a high-brightness black dot occurs, resulting in a disadvantage of causing image quality degradation.

[0019] Similarly, during the signal level sampling period, when the incident light increases, the output signal level (output signal voltage) of the output buffer section of the photoelectric conversion readout section of the pixel decreases, and the input swing of the negative input of the comparator decreases.

[0020] In some cases, the signal input level of the negative input of the comparator becomes negative, and the negative input of the comparator exceeds the allowable input range of the rated input voltage, resulting in a disadvantage that it is difficult to perform stable operation. This is because a large current flows through the pn junction of the input node due to the negative input.

[0021] An object of the present invention is to provide a solid-state imaging device, a driving method of the solid-state imaging device, and an electronic apparatus capable of suppressing the generation of false signals, preventing degradation of image quality, and realizing stable operation.

[0022] Another object of the present invention is to provide a solid-state imaging device, a driving method of the solid-state imaging device, and an electronic apparatus capable of suppressing the generation of false signals, preventing degradation of image quality, realizing stable operation, and substantially realizing a wide dynamic range and a high frame rate.

Means for Solving the Problems

[0023] The solid-state imaging device according to the first aspect of the present invention includes a pixel portion in which pixels including a photoelectric conversion readout portion that performs photoelectric conversion are arranged, and a readout portion that reads pixel signals from the pixels of the pixel portion, and the photoelectric conversion readout portion of the pixel includes a photoelectric conversion element that accumulates charges generated by photoelectric conversion during an accumulation period, a transfer element that can transfer the charges accumulated in the photoelectric conversion element to a transfer period after the accumulation period, an output node to which the charges accumulated in the photoelectric conversion element are transferred through the transfer element, a reset element that resets the output node to a predetermined potential during a reset period, an output buffer portion that converts the charges of the output node into a voltage signal corresponding to the charge amount and outputs the converted voltage signal as a pixel signal, and an output voltage control portion that controls the output signal level of the pixel signal of the output buffer portion to a limit level corresponding to the operating state.

[0024] The second aspect of the present invention is a driving method for a solid-state imaging device including a pixel portion in which pixels including a photoelectric conversion readout portion that performs photoelectric conversion are arranged, and a readout portion that reads pixel signals from the pixels of the pixel portion, and the photoelectric conversion readout portion of the pixel includes a photoelectric conversion element that accumulates charges generated by photoelectric conversion during an accumulation period, a transfer element that can transfer the charges accumulated in the photoelectric conversion element to a transfer period after the accumulation period, an output node to which the charges accumulated in the photoelectric conversion element are transferred through the transfer element, a reset element that resets the output node to a predetermined potential during a reset period, and an output buffer portion that converts the charges of the output node into a voltage signal corresponding to the charge amount and outputs the converted voltage signal as a pixel signal. The method outputs, as the pixel signal, a voltage signal corresponding to the charge amount from the output buffer portion of the photoelectric conversion readout portion of the pixel in accordance with the operating state, and controls the output signal level of the pixel signal of the output buffer portion to a limit level corresponding to the operating state.

[0025] An electronic device according to a third aspect of the present invention comprises a solid-state imaging device and an optical system for forming an image of a subject on the solid-state imaging device, wherein the solid-state imaging device comprises a pixel section on which pixels are arranged, including a photoelectric conversion readout section that performs photoelectric conversion, and a readout section that reads pixel signals from the pixels of the pixel section in accordance with the operating state, wherein the photoelectric conversion readout section of the pixel includes a photoelectric conversion element that stores charge generated by photoelectric conversion during a storage period, a transfer element that can transfer the charge stored in the photoelectric conversion element during a transfer period after the storage period, an output node to which the charge stored in the photoelectric conversion element is transferred through the transfer element, a reset element that resets the output node to a predetermined potential during a reset period, an output buffer section that converts the charge of the output node into a voltage signal corresponding to the amount of charge and outputs the converted voltage signal as a pixel signal, and an output voltage control section that controls the output signal level of the pixel signal of the output buffer section to a limiting level according to the operating state. [Effects of the Invention]

[0026] According to the present invention, it is possible to suppress the generation of false signals, prevent deterioration of image quality, and achieve stable operation.

[0027] Furthermore, according to the present invention, it is possible to suppress the generation of false signals, prevent degradation of image quality, achieve stable operation, and moreover, substantially achieve a wide dynamic range and a high frame rate. [Brief explanation of the drawing]

[0028] [Figure 1] This is a block diagram showing an example configuration of a solid-state imaging device according to the first embodiment of the present invention. [Figure 2] This figure shows an example of a digital pixel array in the pixel section of a solid-state imaging device according to the first embodiment of the present invention. [Figure 3] This is a circuit diagram showing an example of a pixel in a solid-state imaging device according to the first embodiment of the present invention. [Figure 4]This is a simplified cross-sectional view and a potential diagram during overflow showing an example of the configuration of the charge storage and transfer system, which is the main part of the digital pixel according to the first embodiment of the present invention. [Figure 5] These are a simplified top view and a simplified cross-sectional view showing an example of the configuration of a charge storage and transfer system including a storage capacitor, which is a main part of a digital pixel according to the first embodiment of the present invention. [Figure 6] This diagram schematically shows the relationship between the input level of the output buffer unit, the output level of the output voltage control unit, and the two limiting levels set in the output voltage control unit according to the first embodiment of the present invention. [Figure 7] This figure illustrates the function of the output voltage control unit as a vignetting prevention control circuit according to the first embodiment of the present invention. [Figure 8] This is a diagram to explain the principle behind the occurrence of vignetting. [Figure 9] This diagram illustrates the input voltage stabilization function of the comparator, which is the next-stage circuit of the output voltage control unit according to this first embodiment. [Figure 10] This figure illustrates the minimum input level of a comparator according to the first embodiment of the present invention. [Figure 11] This is a timing chart of the operation of the AD conversion unit in the solid-state imaging device according to the first embodiment of the present invention, including the timestamp (TTS) mode during the first comparison processing period, the HCG (first conversion gain) mode during the second comparison processing period, and the LCG (second conversion gain) mode during the third comparison processing period. [Figure 12] This figure illustrates an example of the signal level of the source follower output in TTS mode in this first embodiment. [Figure 13] This figure illustrates the first comparison process of the comparator according to this embodiment. [Figure 14] This figure illustrates the first comparison process of the comparator according to this embodiment, and illustrates other examples of reference voltage patterns. [Figure 15]This figure shows the state of optical time conversion when various reference voltages are input to the comparator according to this embodiment. [Figure 16] This figure shows the optical response coverage related to the first comparison process and the second comparison process in a digital pixel according to the first embodiment of the present invention. [Figure 17] This figure shows the optical response coverage related to the first comparison process, the second comparison process, and the third comparison process in a digital pixel according to the first embodiment of the present invention. [Figure 18] This is a potential diagram of the signal charge of LCG and HCG. [Figure 19] This figure shows the optical response coverage (optical conversion plot) related to the first comparison process, the second comparison process, and the third comparison process in a digital pixel according to the first embodiment of the present invention, and is a figure showing the relationship between light intensity and the total amount Qp of electrons converted by light. [Figure 20] This figure shows the optical response coverage (optical conversion plot) related to the first comparison process, the second comparison process, and the third comparison process in a digital pixel according to the first embodiment of the present invention, and is a figure showing the relationship between light intensity and ADC code. [Figure 21] This figure shows the optical response coverage (optical conversion plot) related to the first comparison process, the second comparison process, and the third comparison process in a digital pixel according to the first embodiment of the present invention, and illustrates the relationship between light intensity and memory code. [Figure 22] This figure shows the optical response coverage (optical conversion plot) related to the first comparison process, the second comparison process, and the third comparison process in a digital pixel according to the first embodiment of the present invention, and is a diagram showing the relationship between light intensity and SNR. [Figure 23] This diagram illustrates the configuration and function of the memory unit and memory control unit according to the first embodiment. [Figure 24] This figure shows an example of status information of the operating mode stored in the second memory in accordance with various light intensity levels according to the first embodiment of this invention. [Figure 25]This figure shows an example configuration of the first memory and output circuit of the memory unit according to the first embodiment of the present invention. [Figure 26] This is a flowchart illustrating the read mode sequence in the memory control unit and memory unit of a solid-state imaging device according to the first embodiment of the present invention. [Figure 27] This is a flowchart illustrating the operation sequence in the memory section of a solid-state imaging device according to the first embodiment of the present invention. [Figure 28] This figure shows an example of a frame readout sequence in a solid-state imaging device according to the first embodiment of the present invention. [Figure 29] This is a diagram illustrating an example of the configuration of the main part of a memory control unit according to the first embodiment of the present invention. [Figure 30] This timing chart explains the operation of the memory control unit when the comparator output is inverted in timestamp ADC mode. [Figure 31] This timing chart explains the operation of the memory control unit when the comparator output does not invert in timestamp ADC mode. [Figure 32] This is a schematic diagram illustrating the stacked structure of the solid-state imaging device according to the first embodiment of this invention. [Figure 33] This is a simplified cross-sectional view illustrating the stacked structure of a solid-state imaging device according to the first embodiment of this invention. [Figure 34] This is a timing chart for illustrating the readout operation of the solid-state imaging device according to the first embodiment in a predetermined shutter mode. [Figure 35] This figure shows the operation sequence and potential transitions to explain the readout operation, mainly in the pixel section, during a predetermined shutter mode of the solid-state imaging apparatus according to the first embodiment of this invention. [Figure 36] This figure shows the operation sequence and potential transitions, including unsaturated and saturated photodiodes, during the readout operation, primarily in the pixel section, in a predetermined shutter mode of the solid-state imaging device according to the first embodiment of this invention. [Figure 37] This figure illustrates a solid-state imaging device according to a second embodiment of the present invention, and shows an example of the selection process between timestamp ADC mode operation and linear ADC mode operation. [Figure 38] This is a circuit diagram showing an example of a pixel in a solid-state imaging device according to a third embodiment of the present invention. [Figure 39] This is a circuit diagram showing an example of a pixel in a solid-state imaging device according to a fourth embodiment of the present invention. [Figure 40] This figure shows an example of the configuration of an electronic device to which a solid-state imaging device according to an embodiment of the present invention is applied. [Modes for carrying out the invention]

[0029] Hereinafter, embodiments of the present invention will be described in relation to the drawings. (First embodiment) Figure 1 is a block diagram showing an example configuration of a solid-state imaging device according to the first embodiment of the present invention.

[0030] In this embodiment, the solid-state imaging device 10 is composed of a CMOS image sensor that includes, for example, digital pixels as pixels.

[0031] As shown in Figure 1, this solid-state imaging device 10 mainly consists of a pixel unit 20 as an imaging unit, a vertical scanning circuit (row scanning circuit) 30, an output circuit 40, and a timing control circuit 50.

[0032] Among these components, for example, the vertical scanning circuit 30, the output circuit 40, and the timing control circuit 50 constitute the pixel signal readout unit 60.

[0033] In this first embodiment, the solid-state imaging device 10 is configured as, for example, a stacked CMOS image sensor, with a pixel section 20 that includes a photoelectric conversion readout section, an AD (analog-to-digital) conversion section, and a memory section as digital pixels, and has a global shutter operation function.

[0034] In the solid-state imaging device 10 according to this first embodiment, as will be described in detail later, each digital pixel DP has an AD conversion function, and the AD conversion unit has a comparator that performs a comparison process that compares the voltage signal as a pixel signal read out by the photoelectric conversion readout unit with a reference voltage and outputs a digitized comparison result signal.

[0035] The comparator performs the following under the control of the readout unit 60: a first comparison process that outputs a digitized first comparison result signal for a voltage signal corresponding to the overflow charge that spilled from the photoelectric conversion element to the output node (floating diffusion) during the storage period; a second comparison process that outputs a digitized second comparison result signal for a voltage signal corresponding to the stored charge of the photoelectric conversion element transferred to the output node during the transfer period after the storage period; and a third comparison process that outputs a digitized third comparison result signal for a voltage signal corresponding to the sum of the stored charge of the photoelectric conversion element transferred to the output node during the transfer period after the storage period and the stored charge of the charge storage unit.

[0036] The solid-state imaging device 10 has an output voltage control unit in the pixel photoelectric conversion readout section that controls the output signal level of the pixel signal (voltage signal) of the output buffer section, which includes a floating diffusion FD as an output node, to a limit level according to the operating state, for example, during the reset level sampling period and the operating state during the signal level sampling period. This is achieved by suppressing the generation of false signals such as high-brightness black spots, preventing degradation of image quality, and suppressing fluctuations in the signal input level to the comparator so that it can be kept within the signal input range of the rated input voltage of the negative input.

[0037] In this first embodiment, the output voltage control unit can control the output signal level to at least the minimum pixel signal level when reading a reset signal, and can control the output signal level to at least the maximum pixel signal level when reading a signal.

[0038] The output voltage control unit controls the output signal level to at least the minimum pixel signal level when the predetermined assumed conditions (in this embodiment, the conditions under which a high-brightness black spot phenomenon occurs) are met and the output signal level fluctuates during reset readout.

[0039] Furthermore, the output voltage control unit controls the output signal level to at least the maximum pixel signal level so that, for example, if the photoelectric conversion element is in a charge overflow state and the signal is read out, the output signal level does not exceed the allowable input range of the rated input voltage of the input terminal (negative input terminal) of the comparator, which is the next stage circuit.

[0040] Furthermore, the solid-state imaging device 10 has a memory control unit that controls access to the memory unit according to the state of the comparison result signal of the comparator (level in this embodiment).

[0041] The memory control unit then controls whether or not to write data corresponding to the second comparison result signal from the second comparison process to the memory unit, depending on the state of the first comparison result signal from the first comparison process.

[0042] Specifically, if the level of the first comparison result signal from the first comparison process changes from the first level to the second level during the first comparison processing period, the memory control unit prohibits writing data corresponding to the second comparison result signal from the second comparison process to the memory unit.

[0043] On the other hand, if the level of the first comparison result signal from the first comparison process remains at the first level during the first comparison processing period, the memory control unit allows the writing of data corresponding to the second comparison result signal from the second comparison process to the memory unit.

[0044] Furthermore, the memory control unit of this embodiment controls whether or not to write data corresponding to the third comparison result signal from the third comparison process to the memory unit, depending on the state of the first and second comparison result signals from the first and second comparison processes.

[0045] Specifically, if the level of the second comparison result signal from the second comparison process remains unchanged at the second level during the second comparison processing period, the memory control unit allows the writing of data corresponding to the third comparison result signal from the third comparison process to the memory unit.

[0046] The following provides an overview of the configuration and function of each part of the solid-state imaging device 10, in particular the configuration and function of the pixel unit 20 and digital pixels, the related readout processes, and the stacked structure of the pixel unit 20 and the readout unit 60. (Configuration of pixel section 20 and digital pixel 200) Figure 2 shows an example of a digital pixel array in the pixel section of a solid-state imaging device 10 according to the first embodiment of the present invention.

[0047] Figure 3 is a circuit diagram showing an example of a pixel in a solid-state imaging device 10 according to the first embodiment of the present invention.

[0048] As shown in Figure 2, the pixel section 20 consists of multiple digital pixels 200 arranged in an N x M matrix.

[0049] In Figure 2, for the sake of simplifying the diagram, an example is shown in which nine digital pixels 200 are arranged in a 3x3 matrix (M=3, N=3).

[0050] The digital pixel 200 according to this first embodiment includes a photoelectric conversion readout unit (indicated as PD in Figure 2) 210, an AD conversion unit (indicated as ADC in Figure 2) 220, a memory unit (indicated as MEM in Figure 2) 230, and a memory control unit (indicated as MCL in Figure 2) 240.

[0051] As will be described in detail later, the pixel unit 20 of this first embodiment is configured as a stacked CMOS image sensor consisting of a first substrate 110 and a second substrate 120. In this example, as shown in Figure 3, a photoelectric conversion readout unit 210 is formed on the first substrate 110, and an AD conversion unit 220, a memory unit 230, and a memory control unit 240 are formed on the second substrate 120.

[0052] The photoelectric conversion readout unit 210 of the pixel 200 is composed of a photodiode (photoelectric conversion element) and an in-pixel amplifier.

[0053] Specifically, the photoelectric conversion readout unit 210 includes, for example, a photodiode PD1, which is a photoelectric conversion element.

[0054] This photodiode PD1 has one each of the following elements: a transfer transistor TG1-Tr as a transfer element, a reset transistor RST1-Tr as a reset element, a first source follower transistor SF1-Tr and a second source follower transistor SF2-Tr as source follower elements, a current transistor IC1-Tr as a current source element, an enable transistor EN1-Tr as an enable element, a storage transistor CG1-Tr, a storage capacitor CS1 as a storage capacitance element, a floating diffusion FD1 as an output node ND1, and a readout node ND2.

[0055] Thus, the photoelectric conversion readout unit 210 of the digital pixel 200 according to the first embodiment is configured to include seven transistors (7Tr), namely a transfer transistor TG1-Tr, a reset transistor RST1-Tr, a first source follower transistor SF1-Tr, a second source follower transistor SF2-Tr, a current transistor IC1-Tr, an enable transistor EN1-Tr, and a storage transistor CG1-Tr.

[0056] In this first embodiment, the output buffer section 211 is configured including a first source follower transistor SF1-Tr, a current transistor IC1-Tr, an enable transistor EN1-Tr, and a read node ND2.

[0057] Furthermore, the charge storage unit 212 is configured including a storage transistor CG1-Tr and a storage capacitor CS1 as a storage capacitance element.

[0058] The output voltage control unit 213 is configured with a second source follower transistor SF2-Tr, as well as a current transistor IC1-Tr and an enable transistor EN1-Tr.

[0059] In this first embodiment, the current transistor IC1-Tr and the enable transistor EN1-Tr are shared by the output buffer unit 211 and the output voltage control unit 213.

[0060] In this first embodiment, the photoelectric conversion readout unit 210 has the readout node ND2 of the output buffer unit 211 connected to the input unit of the AD conversion unit 220.

[0061] The photoelectric conversion readout unit 210 converts the charge of the floating diffusion FD1, which acts as an output node, into a voltage signal corresponding to the amount of charge, and outputs the converted voltage signal VSL to the AD conversion unit 220.

[0062] More specifically, the photoelectric conversion readout unit 210 outputs a voltage signal VSL as a pixel signal during the first comparison processing period PCMPR1 of the AD conversion unit 220, corresponding to the overflow charge that spilled from the photodiode PD1, which is a photoelectric conversion element, to the floating diffusion FD1, which is an output node, during the storage period PI.

[0063] In this case, the output signal level of the pixel signal (voltage signal) of the output buffer unit 211 is controlled by the output voltage control unit 213 to a limited level according to the operating state, for example, the signal levels of the read reset signal and read signal according to the operating state during the reset level sampling period and the signal level sampling period. For example, the output voltage control unit 213 controls the output signal level to at least the minimum pixel signal level when a predetermined assumed condition (in this embodiment, the condition under which high-brightness black spots (vignetting phenomenon) occur) is met and the output signal level fluctuates during reset readout.

[0064] Furthermore, the output voltage control unit 213 controls the output signal level to at least the maximum pixel signal level so that, for example, when the photoelectric conversion element is in a charge overflow state and the signal is read out, the output signal level does not exceed the allowable input range of the rated input voltage of the input terminal (negative input terminal) of the comparator, which is the next stage circuit.

[0065] Furthermore, the photoelectric conversion readout unit 210 outputs a voltage signal VSL corresponding to the accumulated charge of the photodiode PD1 transferred to the floating diffusion FD1 as an output node during the transfer period PT after the storage period PI in the second comparison processing period PCMPR2 of the AD conversion unit 220.

[0066] During the second comparison processing period PCMPR2, the photoelectric conversion readout unit 210 outputs a readout reset signal (signal voltage) (VRST) and a readout signal (signal voltage) (VSIG) as pixel signals to the AD conversion unit 220.

[0067] In this case, the output signal level of the pixel signal (voltage signal) of the output buffer unit 211 is controlled by the output voltage control unit 213 to a limited level according to the operating state, for example, the signal levels of the read reset signal and read signal according to the operating state during the reset level sampling period and the signal level sampling period. Furthermore, in the third comparison processing period PCMPR3 of the AD conversion unit 220, the photoelectric conversion readout unit 210 outputs a voltage signal VSL corresponding to the combined charge (added charge) of the accumulated charge of the photodiode PD1 transferred to the floating diffusion FD1 as an output node during the transfer period PT after the storage period PI, and the accumulated charge stored in the storage unit 212.

[0068] During the third comparison processing period PCMPR3, the photoelectric conversion readout unit 210 outputs a readout reset signal (signal voltage) (VRST) and a readout signal (signal voltage) (VSIG) as pixel signals to the AD conversion unit 220.

[0069] More specifically, the photoelectric conversion readout unit 210, as the first conversion gain reset readout process HCGRRD, reads out a first readout reset signal HCGVRST from the output buffer unit 211 during the first reset period PR1, which is converted with a first conversion gain (for example, high conversion gain: HCG) corresponding to the first charge amount of the floating diffusion FD1, which is the output node ND1.

[0070] The photoelectric conversion readout unit 210 reads out the first readout signal HCGVSIG from the output buffer unit 211 with a first conversion gain (HCG) corresponding to the first charge amount of the floating diffusion FD1, which is the output node ND1, during the readout period PRD following the transfer period PT1 after the first reset period PR1, as the first conversion gain signal readout process HCGSRD.

[0071] Next, the photoelectric conversion readout unit 210 reads out a second readout signal LCGVSIG2 from the output buffer unit 211 as a second conversion gain signal readout process LCGSRD, which is converted with a second conversion gain (low conversion gain: LCG) corresponding to the second charge amount obtained by sharing the charge of the storage capacitor CS1 with the charge of the floating diffusion FD1, which is the output node ND1.

[0072] Next, the photoelectric conversion readout unit 210 performs a second conversion gain reset readout process LCGRRD, during the second reset period PR2, by reading out the second readout reset signal LCGVRST from the output buffer unit 211, which has been converted with a second conversion gain (LCG) corresponding to the second charge amount.

[0073] In this case, the output signal level of the pixel signal (voltage signal) of the output buffer unit 211 is controlled by the output voltage control unit 213 to a limited level according to the operating state, for example, the signal levels of the read reset signal and read signal according to the operating state during the reset level sampling period and the signal level sampling period. Thus, in this first embodiment, the solid-state imaging device 10 operates in timestamp (TTS) mode during the first comparison processing period PCMPR1 of the AD conversion unit 220, in HCG (first conversion gain) mode during the second comparison processing period PCMPR2, and in LCG (second conversion gain) mode during the third comparison processing period PCMPR3.

[0074] The photodiode PD1 generates and stores a signal charge (in this case, electrons) in an amount corresponding to the amount of incident light.

[0075] The following explanation assumes that the signal charge is an electron and each transistor is an n-type transistor; however, it is also acceptable for the signal charge to be a hole or for each transistor to be a p-type transistor.

[0076] Furthermore, this embodiment is also effective when multiple photodiodes and transfer transistors share each transistor.

[0077] In each of the 200 digital pixels, an embedded photodiode (PPD) is used as the photodiode (PD).

[0078] Because the substrate surface on which the photodiode (PD) is formed has interface states due to defects such as dangling bonds, a large amount of charge (dark current) is generated by thermal energy, making it impossible to read the correct signal.

[0079] In embedded photodiodes (PPDs), the charge storage portion of the photodiode (PD) is embedded within the substrate, which reduces the interference of dark current with the signal.

[0080] The transfer transistor TG1-Tr of the photoelectric conversion readout unit 210 is connected between the photodiode PD1 and the floating diffusion FD1 and is controlled by the control signal TG applied to the gate through the control line.

[0081] The transfer transistor TG1-Tr becomes conductive when the control signal TG is selected as a high (H) level transfer period PT, and transfers the charge (electrons) that has been photoelectrically converted and stored by the photodiode PD1 to the floating diffusion FD1.

[0082] After the photodiode PD1 and floating diffusion FD1 are reset to a predetermined reset potential, the transfer transistor TG1-Tr enters a non-conducting state when the control signal TG is at a low (L) level, and the photodiode PD1 enters the storage period PI. At this time, if the intensity (amount) of incident light is very high, the charge exceeding the saturation charge amount will overflow into the floating diffusion FD1 as overflow charge through the overflow path under the transfer transistor TG1-Tr.

[0083] Furthermore, in the case of very high illumination, for example, if the charge exceeds the saturation charge amount of the floating diffusion transistor FD1, it will overflow as overflow charge to the storage capacitor CS1 side through the overflow path under the storage transistor CG1-Tr.

[0084] The reset transistor RST1-Tr is connected between the power supply line Vdd (the power supply voltage VDD) and the floating diffusion FD1, and is controlled by the control signal RST, which is applied to the gate through the control line.

[0085] The reset transistor RST1-Tr is selected to conduct during the reset period when the control signal RST is at a high level, and resets the floating diffusion FD1 to the potential of the power supply line Vdd of the power supply voltage VDD. (Configuration of the charge storage unit 212) The charge storage unit 212 is composed of a storage capacitor CS1 and a storage transistor CG1-Tr.

[0086] The storage transistor CG1-Tr is connected between the floating diffusion FD1 and the reset transistor RST1-Tr, and the storage capacitor CS1 is connected between its connection node ND3 and the reference potential VSS.

[0087] The storage transistor CG1-Tr is controlled by the control signal DCG, which is applied to the gate via a control line.

[0088] The storage transistor CG1-Tr is selected to conduct during the reset period when the control signal DCG is at a high level, and connects the floating diffusion FD1 and the storage capacitor CS1.

[0089] Furthermore, the connection (junction) between the floating diffusion FD1, which serves as the output node, and the storage capacitor CS1 can also be controlled by the readout unit 60 to be performed selectively according to the signal illuminance.

[0090] Figures 4(A) and 4(B) are a simplified cross-sectional view and a potential diagram during overflow, respectively, showing an example configuration of the charge storage and transfer system, which is the main part of the digital pixel according to the first embodiment of the present invention.

[0091] Figures 4(A) and (B) show the basic charge storage transfer system from the photodiode PD1 to the floating diffusion FD1, and the storage transistor CG1-Tr and storage capacitor CS1 that form the charge storage section 212 are not shown for the sake of simplicity in the drawing.

[0092] Figures 5(A) and (B) are a simplified top view and a simplified cross-sectional view showing an example configuration of a charge storage and transfer system including a storage capacitor, which is a main part of a digital pixel according to the first embodiment of the present invention.

[0093] Each digital pixel cell PXLC is formed on a substrate (in this example, the first substrate 110) having a first substrate surface 1101 side (for example, the back side) that is irradiated with light L, and a second substrate surface 1102 side that is opposite to the first substrate surface 1101 side, and is separated by a separation layer SPL.

[0094] The digital pixel cell PLXC shown in Figure 4(A) is composed of a photodiode PD1 forming a photoelectric conversion readout section 210, a transfer transistor TG1-Tr, a floating diffusion FD1, a reset transistor RST1-Tr, a separation layer SPL, and also a color filter section and microlenses (not shown). (Photodiode configuration) The photodiode PD1 includes a first conductivity type (n-type in this embodiment) semiconductor layer (n-layer in this embodiment) 2101 formed to be embedded in a semiconductor substrate having a first substrate surface 1101 side and a second substrate surface 1102 side facing the first substrate surface 1101 side, and is formed to have a photoelectric conversion function for received light and a charge storage function.

[0095] A second conductivity type (p-type in this embodiment) isolation layer SPL is formed on the side of the photodiode PD1 in a direction perpendicular to the normal to the substrate (the X direction in the Cartesian coordinate system shown in the figure).

[0096] Thus, in this embodiment, an embedded photodiode (PPD) is used as the photodiode (PD) in each digital pixel cell PXLC.

[0097] Because the substrate surface on which the photodiode (PD) is formed has interface states due to defects such as dangling bonds, a large amount of charge (dark current) is generated by thermal energy, making it impossible to read the correct signal.

[0098] In embedded photodiodes (PPDs), the charge storage portion of the photodiode (PD) is embedded within the substrate, which reduces the interference of dark current with the signal.

[0099] In the photodiode PD1 shown in Figure 4(A), the n-layer (first conductivity type semiconductor layer) 2101 is configured to have a two-layer structure in the direction normal to the substrate 110 (the Z direction in the Cartesian coordinate system shown in the figure).

[0100] In this example, an n-layer 2102 is formed on the first substrate surface 1101, an n-layer 2103 is formed on the second substrate surface 1102 of the n-layer 2102, and a p+ layer 2104 and a p-layer 2105 are formed on the second substrate surface 1102 of the n-layer 2103.

[0101] Furthermore, a p+ layer 2106 is formed on the first substrate surface 1101 side of the n-layer 2102.

[0102] The p+ layer 2106 is uniformly formed not only on the photodiode PD1 but also on the isolation layer SPL and even on other digital pixel cells PXLC.

[0103] Furthermore, a color filter is formed on the light-incident side of the P+ layer 2106, and a microlens is formed on the light-incident side of the color filter so as to correspond to the photodiode PD1 and a part of the separation layer SPL.

[0104] These configurations are just examples; they may be single-layer structures, or they may be laminated structures of three, four or more layers. (Configuration of the separation layer in the X direction (column direction)) In the p-type isolation layer SPL in the X direction (column direction) of Figure 4(A), the first p-layer (second conductivity type semiconductor layer) 2107 is formed on the right side of the side that is in contact with the n-layer 2102 of the photodiode PD1 and in the direction perpendicular to the normal of the substrate (the X direction in the Cartesian coordinate system in the figure).

[0105] Furthermore, in the p-type isolation layer SPL, the second p-layer (second conductive semiconductor layer) 2108 is located to the right of the first p-layer 2107 in the X direction, and is configured to have a two-layer structure in the direction normal to the substrate 110 (the Z direction in the Cartesian coordinate system shown in the figure).

[0106] In this example, in the second p-layer 2108, a p-layer 2109 is formed on the first substrate surface 1101 side, and a p-layer 2110 is formed on the second substrate surface 1102 side of this p-layer 2109.

[0107] These configurations are just examples; they may be single-layer structures, or they may be laminated structures of three, four or more layers.

[0108] A p+ layer 2106, similar to that of the photodiode PD1, is formed on the first substrate surface 1101 side of the first p-layer 2107 and the second p-layer 2109 of the p-type isolation layer SPL.

[0109] The n-layer 2103 is formed to extend over a portion of the second substrate surface 1102 side of the first p-layer 2107 of the p-type separation layer SPL, thereby forming an overflow path OVP.

[0110] Then, the gate electrode 2111 of the transfer transistor TG1-Tr is formed on the p layer 2105 on the second substrate surface 1102 side of the n layer 2103 via a gate insulating film.

[0111] Furthermore, an n+ layer 2112, which forms a floating diffusion FD1, is formed on the second substrate surface 1102 side of the first p layer 2107 of the p-type isolation layer SPL. Adjacent to the n+ layer 2112 is a p layer 2113, which forms the channel formation region of the reset transistor RST1-Tr, and adjacent to the p layer 2113 is an n+ layer 2114.

[0112] Then, a gate electrode 2115 is formed on the p layer 2113 via a gate insulating film.

[0113] In such a structure, if the intensity (amount) of incident light is very high, the charge exceeding the saturation charge amount overflows into the floating diffusion FD1 as overflow charge through the overflow path OVP below the transfer transistor TG1-Tr. (Configuration of output buffer section 211) As described above, in this first embodiment, the output buffer unit 211 is configured including a first source follower transistor SF1-Tr, a current transistor IC1-Tr, an enable transistor EN1-Tr, and a read node ND2.

[0114] The first source follower transistor SF1-Tr, acting as the first source follower element, has its source connected to the read node ND2, its drain connected to the power line Vdd, and its gate connected to the floating diffusion FD1.

[0115] An enable transistor EN1-Tr and a current transistor IC1-Tr, acting as a current source, are connected in series between the readout node ND2 and the reference potential VSS (e.g., GND). The gates of the enable transistor EN1-Tr and the current transistor are connected to the supply line of the control signal VBNEN, and the gate of IC1-Tr is connected to the supply line of the control signal VBNPIX.

[0116] Furthermore, the second source follower transistor SF2-Tr of the output voltage control unit 213, and the signal line LSGN1 between the readout node ND2 and the input of the AD conversion unit 220, are driven by the current transistor IC1-Tr, which acts as a current source element, during the period when the enable transistor EN1-Tr is conducting.

[0117] The output buffer unit 211 converts the charge of the floating diffusion FD1, which acts as the output node ND1, into a voltage signal VSL corresponding to the amount of charge, and outputs the converted voltage signal VSL as a pixel signal to the readout node ND2. (Configuration of the output voltage control unit 213) In this first embodiment, the output voltage control unit 213 is configured by a second source follower transistor SF2-Tr, which serves as a second source follower element.

[0118] The second source follower transistor SF2-Tr has its source connected to the read node ND2 of the output buffer section 211, its drain connected to the power supply line Vdd of the power supply voltage VDD, and its gate connected to the supply line of the control bias signal CBS which specifies the limiting level CLVx according to the operating state of the output signal level of the pixel signal.

[0119] This output voltage control unit 213 functions as a source follower circuit, causing the signal level of the pixel signal (voltage signal VSL) output from the readout node ND2 to follow the limit level CLVx specified by the supplied control bias signal CBS.

[0120] The output voltage control unit 13 allows multiple limit levels CLVx (1, 2, ...) to be set by the control bias signal CBS to correspond to multiple operating states of the operating mode, and controls the output signal level of the pixel signal of the output buffer unit 211 to the limit level CLVx according to the operating state (for example, by clamping).

[0121] As described above, in this first embodiment, the operating modes include the timestamp (TTS) mode in the first comparison processing period PCMPR1 of the AD conversion unit 220, the HCG (first conversion gain) mode in the second comparison processing period PCMPR2, and the LCG (second conversion gain) mode in the third comparison processing period PCMPR3.

[0122] Furthermore, the operating state includes two operating states for each operating mode, for example, the operating state during the reset level sampling period and the operating state during the signal level sampling period.

[0123] Therefore, in this first embodiment, the output voltage control unit 213 is configured, for example, to be able to specify two limit levels CLV1 and CLV2 by a control bias signal CBS in accordance with the operating state.

[0124] Figure 6 is a schematic diagram showing the relationship between the input level of the output buffer unit, the output level of the output voltage control unit, and the two limiting levels set in the output voltage control unit according to the first embodiment of the present invention.

[0125] In Figure 6, the horizontal axis represents the level Vin of the floating diffusion FD1 as the output node of the output buffer unit 211, and the vertical axis represents the output voltage Vout of the output voltage control unit 213.

[0126] In the example shown in Figure 6, two first restriction levels, CLV1 and CLV2, are set.

[0127] The first limit level CLV1 is set to, for example, 2.0V, and the second limit level CLV2 is set to, for example, 1.3V.

[0128] In this case, the output signal level of the pixel signal (voltage signal) of the output buffer unit 211 is controlled (clamped) by the output voltage control unit 213 to a first limit level CLV1 or a second limit level CLV2, depending on the operating state, for example, the signal level LS of the read reset signal and the read signal according to the operating state during the reset level sampling period PSRST and the signal level sampling period PSILT.

[0129] For example, when the output voltage control unit 213 satisfies pre-defined conditions (conditions under which vignetting occurs in this embodiment) and the output signal level fluctuates during reset readout, it controls (clamps) the output signal level LS to a first limiting level CLV1 corresponding to the minimum pixel signal level.

[0130] Furthermore, the output voltage control unit 213 controls (clamps) the output signal level LS to a second limiting level CLV2, which corresponds to the maximum pixel signal level, so that, for example, if the photodiode PD1 is in an overflow state and the signal is read out, the output signal level does not exceed the allowable input range of the rated input voltage of the input terminal (negative input terminal) of the comparator, which is the next stage circuit.

[0131] Furthermore, if this output voltage control unit 213 is not used in the photoelectric conversion readout unit 210, the output signal level LS will not be controlled (clamped) to the second limiting level CLV2, which corresponds to the maximum pixel signal level, and will drop to 0V, and even to a negative voltage, as the amount of incident light increases. (Function of the output voltage control unit 213 as a vignetting prevention control circuit) Here, the function of the output voltage control unit 213 as a vignetting prevention control circuit according to the first embodiment will be explained in relation to Figures 7 and 8.

[0132] Figures 7(A) and 7(B) illustrate the function of the output voltage control unit 213 as a vignetting prevention control circuit according to this first embodiment.

[0133] Figure 7(A) shows the relationship between the incident light and the output SFout of the output buffer section 211, which includes a source follower circuit. Figure 7(B) shows the relationship between the incident light and the readout reset signal VRST.

[0134] Figure 8 is a diagram illustrating the principle behind the occurrence of vignetting.

[0135] In the solid-state imaging device 10, for example, during the reset level sampling period PSRST, if the output signal level LS of the readout reset signal VRST from the output buffer unit 211 is lower than the first limiting level CLV1, a transistor that couples the floating diffusion FD1 of the photoelectric conversion readout unit 210 to the power supply terminal (power line) Vdd, such as the reset transistor RST1-Tr, may be asserted (enabled).

[0136] In such a solid-state imaging device 10, if the output voltage control unit 213 according to the first embodiment is not used in the photoelectric conversion readout unit 210, for example, if a rapid decrease in the signal is observed with very strong light during the reset level sampling period, as shown in Figure 8, false signals such as high-luminance sunspots containing structural noise called "eclipse" will be generated, such as a "black sun (high-luminance sunspot) BS" appearing with a very bright object such as the "sun," resulting in the disadvantage of image quality degradation.

[0137] In contrast, when the output voltage control unit 213 of the first embodiment is used in the photoelectric conversion readout unit 210, if the conditions for vignetting are met and the output signal level fluctuates during reset readout, the output signal level LS is controlled (clamped) to a first limiting level CLV1 corresponding to the minimum pixel signal level. (Input voltage stabilization function of the output voltage control unit 213 for the comparator 221) Next, the input voltage stabilization function of the comparator 221, which is the next stage circuit of the output voltage control unit 213 according to this first embodiment, will be explained in relation to Figures 9 and 10.

[0138] Figures 9(A) and (B) illustrate the input voltage stabilization function of the comparator 221, which is the next stage circuit of the output voltage control unit 213 according to this first embodiment.

[0139] Figure 9(A) shows the relationship between the incident light and the output SFout of the output buffer section 211, which includes a source follower circuit. Figure 9(B) shows the relationship between the incident light and the minimum signal level in the comparator.

[0140] Furthermore, the input level of the comparator after AC coupling is also shown to decrease as the incident light increases, assuming a reset bias of 1V at the comparator input.

[0141] Figure 10 is a diagram illustrating the minimum input level of the comparator according to this first embodiment.

[0142] When the output voltage control unit 213 of this first embodiment is used in the photoelectric conversion readout unit 210, for example, in TTS-ADC operation, when the signal level LS of the readout signal VSIG matches the second limiting level CLV2 on the lower level side during the signal level sampling period PSILT, the output signal level LS is controlled (clamped) to the second limiting level CLV2 corresponding to the maximum pixel signal level.

[0143] In the circuit shown in Figure 10, when the output voltage control unit 213 is used in the photoelectric conversion readout unit 210, the minimum input level is suppressed by exceeding 0V.

[0144] In other words, the output voltage control unit 213 according to this first embodiment suppresses the minimum signal input level of the comparator 221 to 0V or higher.

[0145] If the output voltage control unit 213 is not used in the photoelectric conversion readout unit 210, in some cases the signal input level of the comparator's negative input may become negative, causing the negative input of the comparator to exceed the allowable input range of the rated input voltage, which is disadvantageous as it makes stable operation difficult. This is because a large current flows through the pn junction of the input node due to the negative input.

[0146] In the solid-state imaging device 10 according to this first embodiment, it is possible to suppress the generation of false signals, prevent deterioration of image quality, and achieve stable operation. (Configuration of the AD conversion unit 220) The AD conversion unit 220 of the digital pixel 200 has the function of converting the analog voltage signal VSL output by the photoelectric conversion readout unit 210 into a digital signal by comparing it with a ramp waveform that has been changed with a predetermined slope or a reference voltage VREF that is a fixed voltage.

[0147] As shown in Figure 3, the AD conversion unit 220 is composed of a comparator (COMP) 221, a counter (CNT) 222, an input coupling capacitor C221, an output load capacitor C222, and a reset switch SW-RST.

[0148] The comparator 221 receives a voltage signal VSL, output to the signal line LSGN1 from the output buffer unit 211 (whose output signal level is controlled by the output voltage control unit 213 of the photoelectric conversion readout unit 210), as the negative first input terminal (-), and a reference voltage VREF, as the positive second input terminal (+). The comparator 221 compares the voltage signal VST with the reference voltage VREF and performs a comparison process to output a digitized comparison result signal SCMP. The comparator 221 has a coupling capacitor C221 connected to its inverting input terminal (-) which serves as the first input terminal. By AC coupling the output buffer section 211 of the photoelectric conversion readout section 210 on the first board 110 side and the input section of the comparator 221 of the AD conversion section 220 on the second board 120 side, noise is reduced and a high SNR can be achieved at low light levels.

[0149] Furthermore, the comparator 221 has a reset switch SW-RST connected between the output terminal and the inverting input terminal (-) which serves as the first input terminal, and a load capacitor C222 connected between the output terminal and the reference potential VSS.

[0150] Basically, in the AD conversion unit 220, the analog signal (potential VSL) read out from the output buffer unit 211 of the photoelectric conversion readout unit 210 to the signal line LSGN1 is compared by the comparator 221 with a reference voltage VREF, for example, a ramp signal RAMP which is a linearly changing slope waveform with a certain slope.

[0151] At this time, the counters 222, which are arranged in rows similar to the comparator 221, are operating, and the counter values ​​change in a one-to-one correspondence with the ramp signal RAMP, which has a ramp waveform, thereby converting the voltage signal VSL into a digital signal.

[0152] Basically, the AD conversion unit 220 converts a change in the reference voltage VREF (for example, the ramp signal RAMP) into a change in time, and then converts that time into a digital value by counting it in a certain period (clock).

[0153] Then, when the analog signal VSL and the ramp signal RAMP (reference voltage VREF) intersect, the output of the comparator 221 inverts, stopping the input clock of the counter 222, or inputting the previously stopped clock back into the counter 222. The value (data) of the counter 222 at that time is stored in the memory unit 230, completing the AD conversion.

[0154] After the AD conversion period described above is complete, the data (signals) stored in the memory section 230 of each digital pixel 200 are output from the output circuit 40 to a signal processing circuit (not shown), and a two-dimensional image is generated by predetermined signal processing. (Basic first and second comparison processes in comparator 221, as well as a third comparison process) Furthermore, the comparator 221 of the AD conversion unit 220 in this first embodiment is driven and controlled by the readout unit 60 to perform a first comparison process, a second comparison process, and a third comparison process during the readout period of the pixel signal.

[0155] Figures 11(A) to (J) are timing charts of the operation of the AD conversion unit 220 in the solid-state imaging device according to the first embodiment of the present invention, including the timestamp (TTS) mode in the first comparison processing period PCMPR1, the HCG (first conversion gain) mode in the second comparison processing period PCMPR2, and the LCG (second conversion gain) mode in the third comparison processing period PCMPR3.

[0156] Figure 11(A) shows the operating mode, Figure 11(B) shows the control signal RST of the pixel reset transistor RST1-Tr (with "PIX-" added in the figure to indicate pixels for easier understanding), Figure 11(C) shows the reset signal RST-COMP of the reset switch SW-RST of the comparator 221, Figure 11(D) shows the control signal DCG of the storage transistor CG1-Tr, Figure 11(E) shows the control signal TG of the transfer transistor TG1-Tr, Figure 11(F) shows the state Ramp-DAC of the ramp signal PAMP, and Figure 11(G) shows the data bits. <9> Figure 11(H) shows the data bits. <0> ~ <8> Figure 11(I) shows the control bias signals CBS(CLV1,CLV2) set in the output voltage control unit 213, and Figure 11(J) shows the source follower output of the output buffer unit 212 controlled by the output voltage control unit.

[0157] In the first comparison process CMPR1, the comparator 221, under the control of the readout unit 60, outputs a digitized first comparison result signal SCMP1 to the voltage signal VSL1 corresponding to the overflow charge that spilled from the photodiode PD1, which is a photoelectric conversion element, to the floating fusion FD1, which is an output node, during the storage period PI.

[0158] In practice, in the first comparison process CMPR1, before digitizing the voltage signal VSL1(VSIG) corresponding to the accumulated charge, the voltage signal VSL1(VRST) corresponding to the reset voltage of the floating diffusion FD1 at the time of reset is read out.

[0159] This first comparison process, CMPR1, is also referred to as TTS (timestamp) mode or TTS (timestamp)-ADC mode.

[0160] In the TTS mode in which this first comparison process CMPR1 is performed, for example, the output voltage control unit 213 is supplied with a control bias signal CBS at a first limit level CLV1 for a predetermined period from the start of the mode, and then supplied at a second limit level CLV2 during the subsequent storage period, etc.

[0161] Figure 12 illustrates an example of the signal level of the source follower output in TTS mode in this first embodiment.

[0162] As shown in Figure 12, if, for example, RST_lo can be set to 1.8V, the ASIC input swing level can be reduced to (2.1-0.9V = 1.2V) by TTS.

[0163] Further decreases result in an excessive overflow current boost signal level that exceeds the maximum ASIC input swing level in TTS (2.1 - 0.3V = 1.8V).

[0164] In the second comparison process CMPR2, the comparator 221, under the control of the readout unit 60, outputs a digitized second comparison result signal SCMP2 for the voltage signal VSL2 (VSIG) corresponding to the accumulated charge of the photodiode PD1, which was transferred to the floating fusion FD1, an output node, during the transfer period PT after the storage period PI.

[0165] In practice, in the second comparison process CMPR2, before digitizing the voltage signal VSL2(VSIG) corresponding to the accumulated charge, digitization is performed on the voltage signal VSL2(VRST) corresponding to the reset voltage of the floating diffusion FD1 at the time of reset.

[0166] This second comparison process, CMPR2, is also referred to as the HCG mode or PD (linear)-ADC mode.

[0167] In the PD-ADC mode in which this second comparison process CMPR2 is performed, for example, the control bias signal CBS is supplied to the output voltage control unit 213 at a first limiting level CLV1 for a predetermined period from the start of the mode, and then supplied at a second limiting level CLV2 during the subsequent readout period, etc.

[0168] Furthermore, during the third comparison processing period PCMPR3, a digitized third comparison result signal SCMP3 is output for the voltage signal VSL3 (VSIG), which corresponds to the combined charge (added charge) of the accumulated charge of the photodiode PD1 transferred to the floating diffusion FD1 as an output node during the transfer period PT after the storage period PI, and the accumulated charge stored in the charge storage unit 212.

[0169] In practice, in the third comparison process CMPR3, after digitization of the voltage signal VSL3(VSIG) corresponding to the accumulated charge, digitization of the voltage signal VSL3(VRST) corresponding to the reset voltage of the floating diffusion FD1 at the time of reset is performed.

[0170] This third comparison process, CMPR3, is also referred to as LCG mode or FD (linear)-ADC mode.

[0171] In the FD-ADC mode in which this third comparison process CMPR3 is performed, for example, the output voltage control unit 213 is supplied with a control bias signal CBS at a second limiting level CLV2 for the entire period from the start of the mode.

[0172] In this embodiment, the storage period PI is basically the period from when the photodiode PD1 and floating diffusion FD1 are reset to the reset level until the transfer transistor TG1-Tr is switched to the conduction state and the transfer period PT begins.

[0173] The period PCMPR1 of the first comparison process CMPR1 is the period from when the photodiode PD1 and floating diffusion FD1 are reset to the reset level until the floating diffusion FD1 is reset to the reset level before the transfer period PT begins.

[0174] The period PCMPR2 for the second comparison process CMPR2 is the period after the floating diffusion FD1 has been reset to the reset level, and includes the period after the transfer period PT.

[0175] The period PCMPR3 of the third comparison process CMPR3 is the period after the floating diffusion FD1 has been reset to the reset level, and is the period following the period PCMPR2 of the second comparison process CMPR2, which includes the period after the transfer period PT.

[0176] Here, we will describe the first comparison process, CMPR1, in more detail.

[0177] Figure 13 is a diagram illustrating the first comparison process CMPR1 of the comparator 221 according to this embodiment.

[0178] In Figure 13, the horizontal axis represents time, and the vertical axis represents the voltage level VFD of the floating diffusion FD1, which is the output node.

[0179] The voltage level VFD of the floating diffusion FD1 is highest at level VFDini when the charge amount is lowest at the reset level.

[0180] On the other hand, when the system is saturated, the amount of charge is high, and the voltage level VFD is low, resulting in a low level VFDsat.

[0181] According to these conditions, the reference voltage VREF1 of the comparator 221 is set to a fixed voltage VREFsat, which is the level of the unsaturated state just before saturation, or to a ramp voltage VREFramp, which is the voltage from the reset level VREFrst to the voltage level VREFsat.

[0182] When the first comparison process CMPR1 is performed, if such a reference voltage VREF1 is set to VREFsat or VREFramp, as shown in Figure 13, the amount of charge is greater when the intensity of the incident light is high, so the time it takes for the output of comparator 221 to flip (invert) is faster.

[0183] In the case of the highest illuminance example EXP1, the output of comparator 221 immediately flips (inverts) from the first level (e.g., low level) to the second level (high level) at time t1.

[0184] In the case of example EXP2, which has a lower illuminance than example EXP1, the output of comparator 221 flips (inverts) from the first level (e.g., low level) to the second level (high level) at time t2, which is later than time t1.

[0185] In the case of example EXP3, which has a lower illuminance than example EXP2, the output of comparator 221 flips (inverts) from the first level (e.g., low level) to the second level (high level) at time t3, which is later than time t2.

[0186] Thus, in the first comparison process CMPR1, the comparator 221 outputs a first comparison result signal SCMP1 corresponding to a time based on the amount of overflow charge from the photodiode PD1 to the floating diffusion FD1 during a predetermined period of the storage period PI.

[0187] More specifically, the comparator 221 is capable of performing a comparison in the first comparison process CMPR1 between the optical level from a signal level corresponding to a predetermined threshold of the photodiode PD1 at the maximum sampling time when overflow charge begins to overflow from the photodiode PD1 to the output node, the floating diffusion FD1, to the signal level obtained at the minimum sampling time.

[0188] As mentioned above, the photo conversion operation in TTS (timestamp)-ADC mode is performed during the storage period PI, accompanied by light-to-time conversion.

[0189] As shown in Figure 13, under very bright light, immediately after the reset activation period, the output state of comparator 221 inverts from a first level (e.g., low level) to a second level (high level), and its light level corresponds to the saturation signal (well capacitance) described in the following time.

[0190] ((FD saturation amount × storage time) / sampling period) + PD saturation amount For example, FD saturation: 8Ke @ 150uV / e ~ FD capacity 1.1fF, minimum sampling time: 15nsec, storage time: 3msec: Let's assume that this is the case.

[0191] In this timestamp ADC operating mode (or TTS-ADC mode), as described above, it is possible to cover optical levels from a signal level corresponding to a predetermined threshold of photodiode PD1 at the maximum sampling time when overflow charge begins to spill from photodiode PD1 to the output node, floating diffusion FD1, to a signal level obtained at the minimum sampling time.

[0192] Figure 14 is a diagram illustrating the first comparison process CMPR1 of the comparator 221 according to this embodiment, and is a diagram illustrating other examples of reference voltage patterns.

[0193] The reference voltage VREF may be a ramp waveform (signal) RAMP that is varied with a predetermined slope as shown in (1) in Figure 14, or a fixed voltage DC as shown in (2) in Figure 14, or a logarithmic voltage signal as shown in (3) in Figure 14, or an exponential voltage signal as shown in (4) in Figure 14.

[0194] Figure 15 shows the state of optical time conversion when various reference voltages VREF are input to the comparator according to this embodiment.

[0195] In Figure 15, the horizontal axis represents the sampling time, and the vertical axis represents the estimated signal in the overflow signal. The overflow signal here is estimated under the condition that the transfer transistor TG1-Tr is in a conducting state and no charge is accumulated in the photodiode PD1 (non-overflow).

[0196] Figure 15 shows the sampling time at which comparator 221 inverts, corresponding to the overflow charge (signal) due to the properties (suitability) of the light being applied.

[0197] Figure 15 shows the inverted sampling times for various fixed reference voltages DC1, DC2, DC3 and ramp reference voltage VRAMP. A linear reference ramp is used here.

[0198] After the TTS=ADC mode operation, which performs the first comparison process CMPR1 for the saturated overflow charge described above, is completed, the floating diffusion FD1 and comparator 221 are reset, and then the system transitions to the PD-ADC mode (HCG mode) operation, which performs the second comparison process CMPR2 for the unsaturated charge, and further, to the FD-ADC mode (LCG mode) operation, which performs, for example, a third comparison process CMPR3 for the saturated charge.

[0199] Figure 16 shows the optical response coverage related to the first and second comparison processes in a digital pixel according to the first embodiment of the present invention.

[0200] In Figure 16, A shows the signal (AD conversion transfer curve) under timestamp ADC (TTS-ADC) mode operation, and B shows the signal (AD conversion transfer curve) under HCG mode under linear ADC (PD-ADC) mode operation.

[0201] Figure 17 shows the optical response coverage (optical conversion plot) related to the first comparison process, the second comparison process, and the third comparison process in a digital pixel according to the first embodiment of the present invention.

[0202] In Figure 17, A shows the signal (AD conversion transfer curve) under timestamp ADC (TTS-ADC) mode operation, B shows the signal (AD conversion transfer curve) under HCG mode under linear ADC (PD-ADC) mode operation, and C shows the signal (AD conversion transfer curve) under LCG mode under linear ADC (FD-ADC) mode operation.

[0203] In Figure 17, the horizontal axis represents light intensity, and the vertical axis represents the total amount of electrons Qp converted by light.

[0204] Figures 18(A) and (B) are potential diagrams of the signal charges of LCG and HCG.

[0205] As shown in Figure 16, the optical response coverage associated with the first and second comparison processes in a digital pixel is such that the timestamp ADC (TTS-ADC) mode can have an optical response to very bright light, while the linear ADC (PD-ADC) mode can have an optical response from dark levels. For example, a dynamic range performance of 120 dB can be achieved.

[0206] For example, as mentioned above, the saturation signal in the optical conversion range corresponds to 900 Ke.

[0207] The linear ADC (PD-ADC) mode is a normal readout mode operation with the ADC applied, and can cover noise levels from 2e to 8Ke, which corresponds to the saturation of the photodiode PD1 and floating diffusion FD1.

[0208] The coverage in linear ADC (PD-ADC) mode can be extended to 30Ke with additional switches and capacitors.

[0209] In this case, not only is it possible to acquire images from low to high light levels, but the dynamic range in a single exposure can be expanded, global readout can be achieved without pixel distortion, and pixel-by-pixel ADC conversion such as random access becomes possible, ensuring linearity at high light levels.

[0210] However, in this case, there is a concern about signal-to-noise ratio degradation due to insufficient resolution of the digital signal.

[0211] In contrast, the optical response coverage (optical conversion plot) related to the first, second, and third comparison processes in a digital pixel, as shown in Figure 17, involves the interposition of the signal (AD conversion transfer curve) C from the LCG mode of the linear ADC (FD-ADC) operation between the signal (AD conversion transfer curve) A from the timestamp ADC mode operation and the signal (AD conversion transfer curve) B from the HCG mode of the linear ADC (PD-ADC) mode operation.

[0212] Furthermore, the signal (AD conversion transfer curve) B from the HCG mode in linear ADC (PD-ADC) mode operation and the signal (AD conversion transfer curve) C from the LCG mode in linear ADC (FD-ADC) mode operation overlap in the mode transition region (MOR).

[0213] As a result, it becomes possible to acquire images from low to high light levels, expand the dynamic range in a single exposure, achieve global readout without pixel distortion, and enable pixel-by-pixel ADC conversion such as random access. This ensures linearity at both low and high light levels, and improves the signal-to-noise ratio degradation caused by insufficient resolution in the digital signal.

[0214] Here, we will further consider the optical response coverage (optical conversion plot) related to the first, second, and third comparison processes in digital pixels.

[0215] Figure 19 is a diagram showing the photoresponse coverage (photoconversion plot) related to the first comparison process, the second comparison process, and the third comparison process in a digital pixel according to the first embodiment of the present invention, and is a diagram showing the relationship between light intensity and the total amount Qp of photoconverted electrons.

[0216] Figure 20 is a diagram showing the optical response coverage (optical conversion plot) related to the first comparison process, the second comparison process, and the third comparison process in a digital pixel according to the first embodiment of the present invention, and is a diagram showing the relationship between light intensity and ADC code.

[0217] Figure 21 is a diagram showing the optical response coverage (optical conversion plot) related to the first comparison process, the second comparison process, and the third comparison process in a digital pixel according to the first embodiment of the present invention, and is a diagram showing the relationship between light intensity and memory code.

[0218] Figure 22 is a diagram showing the optical response coverage (optical conversion plot) related to the first comparison process, the second comparison process, and the third comparison process in a digital pixel according to the first embodiment of the present invention, and is a diagram showing the relationship between light intensity and SNR.

[0219] As shown in Figures 19 to 22, the optical response coverage (optical conversion plot) related to the first comparison process, the second comparison process, and the third comparison process in a digital pixel is such that, as shown in Figure 19, the signal (AD conversion transfer curve) C from the LCG mode of the linear ADC (FD-ADC) operation is interposed between the signal (AD conversion transfer curve) A from the timestamp ADC mode operation and the signal (AD conversion transfer curve) B from the HCG mode of the linear ADC (PD-ADC) mode operation.

[0220] Furthermore, the characteristic curves relating the signal (AD conversion transfer curve) B in HCG mode during linear ADC (PD-ADC) mode operation to the total charge amount Qp, ADC code, memory code, and SNR also overlap in the mode transition region (MOR).

[0221] This makes it possible to ensure good linearity at both low and high light levels.

[0222] Figure 23 is a diagram illustrating the configuration and function of the memory unit and memory control unit according to this first embodiment.

[0223] As shown in Figures 3 and 23, the memory unit 230 includes a first memory (Mem1) 231 and a second memory (Mem2) 232.

[0224] The first memory 231 stores the first comparison result signal SCMP1, the second comparison result signal SCMP2, and the third comparison result signal SCMP3 from the comparator 221 as n bits of digital data under the control of the memory control unit 240.

[0225] The second memory 232 stores status information of the operating mode under the control of the memory control unit 240.

[0226] The second memory 232 stores, for example, status information "0" when in HCG mode (PD-ADC mode), status information "2" when in LCG mode (FD-ADC mode), and status information "1" when in TTS mode (TTS-ADC mode).

[0227] Figure 24 shows an example of status information of operating modes stored in the second memory 232 corresponding to various light intensity levels according to the first embodiment of this invention.

[0228] In the example shown in Figure 24, the response time is 100 Ke / lux, the charge amount Qpd of the photodiode PD1 is 2 Ke, the charge amount Qfd of the floating diffusion FD1 is 62 Ke, the Tint (storage time) / Tsample (sample time) is 400 μs / 1.56 μs, and the bit depth of the first memory 231 is 8 bits.

[0229] In HCG mode, when the status information "0" is stored in the second memory 232, the light level is low. In this case, the light intensity range [lux] is lower than -5e2, the charge amount Qpd of the photodiode PD1 is lower than 2Ke, the charge amount Qfd of the floating diffusion FD1 is 0, and the total maximum charge amount Qmax is 2Ke. The second comparison result signal SCMP2 from the comparator 221 is stored in the first memory 231 as n bits of digital data corresponding to "0-255".

[0230] In LCG mode, when status information "2" is stored in the second memory 232, the light level is medium. In this case, the light intensity range [lux] is in the range of -5e2 to 1.6e4, the charge amount Qpd of the photodiode PD1 is greater than 2Ke, the charge amount Qfd of the floating diffusion FD1 is less than 62Ke, and the total maximum charge amount Qmax is less than 62Ke. The third comparison result signal SCMP3 from the comparator 221 is stored in the first memory 231 as n bits of digital data corresponding to "0-255".

[0231] In TTS mode, when status information "1" is stored in the second memory 232, the light level is high. In this case, the light intensity range [lux] is in the range of 1.6e4 to 4e6, the charge amount Qpd of the photodiode PD1 is greater than 2Ke, the charge amount Qfd of the floating diffusion FD1 is less than 62Ke, and the total maximum charge amount Qmax is less than 15872Ke. The first memory 231 stores the first comparison result signal SCMP1 from the comparator 221 as n bits of digital data corresponding to "0-255".

[0232] The memory control unit 240 includes a write control unit (write controller: WC) 241 for writing to the memory unit 230.

[0233] The write control unit 241 monitors whether the output of the comparator 221 has inverted to level "1" or remains at level "0". As long as the state of the comparator 221 is not 0, the first memory 231 and the second memory 232 are enabled for writing.

[0234] The memory control unit 240 controls whether or not to write data corresponding to the second comparison result signal SCMP2 from the second comparison process CMPR2 to the memory unit 230, depending on the state of the first comparison result signal SCMP1 from the first comparison process CMPR1.

[0235] Furthermore, the memory control unit 240 controls whether or not to write data corresponding to the third comparison result signal SCMP3 from the third comparison process CMPR3 to the memory unit 230, depending on the state of the first comparison result signals SCMP1 and SCMP2 from the first comparison process CMPR1 and the second comparison process CMPR2.

[0236] Figure 25 shows an example of the configuration of the first memory and output circuit of the memory unit according to the first embodiment of the present invention.

[0237] In the comparator 221, the first comparison result signal SCMP1, obtained by the first comparison process CMPR1, digitizes the voltage signal corresponding to the overflow charge of the floating diffusion FD1; the second comparison result signal SCMP2, obtained by the second comparison process CMPR2, digitizes the stored charge of the photodiode PD1; and the third comparison result signal SCMP3, obtained by the third comparison process CMPR3, digitizes the added charge of the stored charge of the photodiode PD1 and the charge stored in the charge storage unit 212. These signals are associated and stored as digital data in the n-bit memory 231.

[0238] The first memory 231, which can sample and hold n bits of data from the memory unit 230, is composed of SRAM, DRAM, etc., and is supplied with, for example, a digitally converted signal, corresponds to a photoconversion code, and can be read out by the external I / O buffer 41 of the output circuit 40 around the pixel array.

[0239] The first memory 231 is controlled by the output signal S241 of the memory control unit 240 to determine whether or not to perform memory access, specifically writing (overwriting), according to the state (level in this embodiment) of the comparison result signal of the comparator 221.

[0240] The first memory 231 is disabled from writing (overwriting) when a signal S241 corresponding to the first comparison result signal SCMP1 from the first comparison process CMPR1 is supplied at a first level (low level), and is permitted from writing (overwriting) when it is supplied at a second level (high level).

[0241] Furthermore, the memory control unit 240 controls whether or not to write data corresponding to the third comparison result signal from the third comparison process to the first memory 231, depending on the state of the first and second comparison result signals from the first and second comparison processes.

[0242] The memory control unit 240 allows the first memory 231 to write (overwrite) data corresponding to the third comparison result signal SCMP3 from the third comparison process CMPR3 to the first memory 231 if, during the second comparison processing period PCMPR2, the level of the second comparison result signal SCMP2 from the second comparison processing CMPR2 remains at the second level (high level).

[0243] In this first embodiment, as shown in Figure 11, in the case of TTS mode (TTS-ADC mode) and LCG mode (FD-ADC mode), writing to the first memory 231 is disabled when the signal swing is greater than 500mV.

[0244] Furthermore, in HCG mode (PD-ADC mode), if the signal swing is less than 400mV, writing to the first memory 231 is disabled. (Read mode sequence in the memory control unit and memory unit) Figure 26 is a flowchart illustrating the read mode sequence in the memory control unit and memory unit of a solid-state imaging device according to the first embodiment of the present invention.

[0245] First, the read mode is set to TTS mode (ST1), and the first comparison process CMPR1 is performed. Consequently, the first memory 231 and the second memory 232 are reset (ST11, ST21).

[0246] Then, in the memory control unit 240, it is determined whether the output of the comparator 221 has flipped (inverted) from the first level (low level: L) to the second level (high level: H) in the first comparison process CMPR1 (ST2).

[0247] In step ST2, when it is determined that the output of comparator 221 has flipped from L level to H level, the first comparison process CMPR1 digitizes the voltage signal corresponding to the overflow charge of floating diffusion FD1, and this first comparison result signal SCMP1 is written to the first memory 231 as an ADC code, which is a digital code (ST12). Then, the write enable signal is locked (ST31).

[0248] In step ST2, if it is determined that the output of comparator 221 has not flipped from L level to H level, the readout state is updated from TTS mode to HCG mode, the reference voltage VREF of the ramp waveform is reset (ST3), and the status information of the second memory 232 is updated from "2" indicating TTS mode to "0" indicating HCG mode (ST22).

[0249] In this way, when the read mode switches from TTS mode to HCG mode (ST4), the second comparison process CMPR2 is performed. Consequently, the first memory 231 is reset (ST13).

[0250] Then, in the memory control unit 240, it is determined whether or not the output of the comparator 221 has flipped (inverted) from the first level (low level) to the second level (high level) in the second comparison process CMPR2 (ST5).

[0251] In step ST5, when it is determined that the output of comparator 221 has flipped from L level to H level, the second comparison process CMPR2 digitizes the voltage signal corresponding to the accumulated charge of photodiode PD1, and this second comparison result signal SCMP2 is written to the first memory 231 as digital data ADC code (ST14). Then, the write enable signal is locked (ST32).

[0252] In step ST5, if it is determined that the output of comparator 221 has not flipped from the L level to the H level, the read state is updated from the HCG mode to the LCG mode, the reference voltage VREF of the ramp-like waveform is reset (ST6), and the status information in the second memory 232 is updated from "1" indicating the HCG mode to "1" indicating the LCG mode. (ST23).

[0253] In this way, when the read mode switches from the HCG mode to the LCG mode (ST7), the third comparison process CMPR3 is performed. Along with this, the first memory 231 is reset (ST15).

[0254] Then, in the memory control unit 240, it is determined whether or not the output of comparator 221 has flipped (reversed) from the second level (high level) to the first level (low level) in the third comparison process CMPR3 (ST8).

[0255] In step ST8, if it is determined that the output of comparator 221 has flipped from the H level to the L level, the third comparison result signal SCMP3 obtained by digitizing the voltage signal corresponding to the accumulated charge of the photodiode PD1 and the added charge accumulated in the charge accumulation unit 212 in the third comparison process CMPR3 is written as the ADC code of digital data into the first memory 231 (ST16). Then, the write enable (write enable) signal is locked (ST33).

[0256] FIG. 27 is a flowchart for explaining the operation sequence in the memory section of the solid-state imaging device according to the first embodiment of the present invention.

[0257] When writing the ADC code, which is digital data with a bit depth of p, into the first memory 231 (ST41), it is determined whether or not the output of comparator 221 has flipped for each mode (ST42).

[0258] In step ST42, if it is determined that the output of comparator 221 has flipped, the first memory 231 is put into a write-disable state (ST43).

[0259] In step ST42, if it is determined that the output of comparator 221 is not flipped, a write operation is performed for the bit depth, provided that the memory is locked (ST44~ST46).

[0260] Then, n code sequences are executed (ST47, ST48), and the process transitions to the next mode. (Frame readout sequence) Figure 28 shows an example of a frame readout sequence in a solid-state imaging device 10 according to the first embodiment of the present invention.

[0261] Here, we will describe an example of a frame readout method in the solid-state imaging device 10.

[0262] In Figure 28, TTS indicates the processing period in TTS mode, which is a timestamp ADC; H indicates the processing period in HCG mode; and L indicates the processing period in LCG mode.

[0263] As described above, the overflow charge is accumulated in the floating diffusion FD1 during the accumulation period PI. The timestamp ADC mode, TTS mode, operates during the accumulation time PI.

[0264] In practice, TTS mode operates during the accumulation period PI until the floating diffusion FD1 is reset.

[0265] When the TTS mode operation ends, the system transitions to the HCG mode of the linear ADC mode (PD-ADC mode), reads the reset signal (VRST) of the floating diffusion FD1, and converts it so that the digital signal is stored in the memory unit 230.

[0266] Furthermore, after the storage period PI ends, in linear ADC mode, the signal (VSIG) corresponding to the stored charge of the photodiode PD1 is read and converted into a digital signal to be stored in the memory unit 230.

[0267] More specifically, during the first comparison processing period PCMPR1, a voltage signal VSL is output corresponding to the overflow charge that spilled from the photodiode PD1, which is a photoelectric conversion element, to the floating diffusion FD1, which is an output node, during the storage period PI.

[0268] Furthermore, during the second comparison processing period PCMP2, a voltage signal VSL corresponding to the accumulated charge of the photodiode PD1, which was transferred to the floating diffusion node FD1 as an output node during the transfer period PT after the storage period PI, is output.

[0269] During the second comparison processing period PCMPR2, the readout reset signal (signal voltage) (VRST) and the readout signal (signal voltage) (VSIG) as pixel signals are output to the AD conversion unit 220.

[0270] Furthermore, during the third comparison processing period PCMP3, a voltage signal VSL is output corresponding to the combined charge (added charge) of the accumulated charge of the photodiode PD1 transferred to the floating diffusion FD1 as an output node during the transfer period PT after the storage period PI, and the accumulated charge stored in the storage unit 212.

[0271] During the third comparison processing period PCMPR3, the readout reset signal (signal voltage) (VRST) and the readout signal (signal voltage) (VSIG) as pixel signals are output to the AD conversion unit 220.

[0272] The read frame is executed by reading digital signal data from the memory node and sent outside the solid-state imaging device 10 (image sensor) through, for example, the IO buffer 41 (Fig. 25) of the output circuit 40, which has such a MIPI data format. This operation can be globally executed for the entire pixel (picture element) array.

[0273] Also, in the pixel section 20, by resetting the photodiode PD1 using the reset transistor RST1-Tr and the transfer transistor TG1-Tr for all pixels simultaneously, the exposure is started for all pixels simultaneously and in parallel. Also, after a predetermined exposure period (accumulation period PI) ends, by sampling the output signal from the photoelectric conversion readout section 210 using the transfer transistor TG1-Tr in the AD conversion section 220 and the memory section 230, the exposure is ended for all pixels simultaneously and in parallel. Thereby, a complete shutter operation is electronically realized. (Configuration and Function of Memory Control Unit 240) The solid-state imaging device 10 of this embodiment further has a memory control unit 240 that controls access to the memory section 230 according to the state (level in this embodiment) of the comparison result signal of the comparator 221.

[0274] The memory control unit 240 controls whether to write data corresponding to the second comparison result signal SCMP2 by the second comparison process CMPR2 to the memory section 230 according to the state (output level) of the first comparison result signal SCMP1 by the first comparison process CMPR1.

[0275] Specifically, during the first comparison processing period PCMPR1, when the level of the first comparison result signal SCMP1 by the first comparison process CMPR1 changes from the first level (for example, low level) to the second level (high level), the memory control unit 240 prohibits writing data corresponding to the second comparison result signal SCMP2 by the second comparison process CMPR2 to the memory section 230.

[0276] On the other hand, if the level of the first comparison result signal SCMP1 from the first comparison process CMPR1 remains at the first level (low level) during the first comparison processing period PCMPR1, the memory control unit 240 allows the writing of data corresponding to the second comparison result signal SCMP2 from the second comparison process CMPR2 to the memory unit 230.

[0277] Furthermore, the memory control unit 240 controls whether or not to write data corresponding to the third comparison result signal SCMP3 from the third comparison process CMPR3 to the first memory 231, depending on the state of the first comparison result signals SCMP1 and SCMP2 from the first comparison process CMPR1 and the second comparison process CMPR2.

[0278] If, during the second comparison processing period PCMPR2, the level of the second comparison result signal SCMP2 from the second comparison processing CMPR2 remains at the second level (high level), the memory control unit 240 allows the writing (overwriting) of data corresponding to the third comparison result signal SCMP3 from the third comparison processing CMPR3 to the first memory 231.

[0279] The reason for including the memory control unit 240 is described below.

[0280] In timestamp ADC mode, if the level of the first comparison result signal SCMP1, produced by the first comparison process CMPR1, changes from a first level (e.g., low level) to a second level (high level) during the first comparison processing period PCMPR1, it means the following:

[0281] In other words, in this case, very high-intensity light is shone on the photodiode PD1, and the photoelectrically converted charge overflows from the photodiode PD1 into the floating diffusion FD1 as an overflow charge, meaning that a subsequent linear ADC mode (PD-ADC mode) readout signal is not necessary.

[0282] Therefore, in this case, the memory control unit 240 prohibits writing (overwriting) the data corresponding to the second comparison result signal SCMP2 from the second comparison process CMPR2 to the memory unit 230.

[0283] On the other hand, in timestamp ADC mode, if the level of the first comparison result signal SCMP1 produced by the first comparison process CMPR1 does not change from the first level (e.g., low level) to the second level (high level) during the first comparison processing period PCMPR1, it means the following:

[0284] In other words, in this case, the photodiode PD1 is irradiated with light of normal illumination ranging from dim to medium brightness, and the probability of the photoelectrically converted charge overflowing from the photodiode PD1 to the floating diffusion FD1 as overflow charge is extremely low, which means that a subsequent linear ADC mode (PD-ADC mode) readout signal is necessary.

[0285] Therefore, in this case, the memory control unit 240 allows the writing (overwriting) of data corresponding to the second comparison result signal SCMP2 obtained by the second comparison process CMPR2 to the memory unit 230.

[0286] Similarly, in linear ADC mode (PD-ADC mode), if the level of the second comparison result signal SCMP2 produced by the second comparison process CMPR2 does not change from the first level (e.g., low level) to the second level (high level) during the second comparison processing period PCMPR2, it means the following:

[0287] In other words, in this case, since the photodiode PD1 is irradiated with light ranging from dim to medium brightness, and the probability of the photoelectrically converted charge overflowing from the photodiode PD1 to the floating diffusion FD1 as overflow charge is low, it means that a subsequent LCG mode (FD-ADC mode) readout signal is necessary.

[0288] Therefore, in this case, the memory control unit 240 allows the writing (overwriting) of data corresponding to the third comparison result signal SCMP3 from the third comparison process CMPR3 to the memory unit 230.

[0289] Figure 29 is a diagram illustrating an example of the configuration of the main part of the memory control unit 240 according to the first embodiment of the present invention.

[0290] Figure 30 is a timing chart illustrating the operation of the memory control unit when the comparator output is inverted in timestamp ADC mode.

[0291] Figure 31 is a timing chart illustrating the operation of the memory control unit when the comparator output does not invert in timestamp ADC mode.

[0292] The memory control unit 240 in Figure 29 is configured to include a flag bit memory cell (Flag) 242 and a NOR circuit 243 as a gate circuit.

[0293] The flag bit memory cell 242 is supplied with a flag sampling signal FLGSAMP and a first comparison result signal SCMP1 from a first comparison process CMPR1.

[0294] When the flag sampling signal FLGSAMP is supplied after the end of the first comparison processing period PCMPR1, the flag bit memory cell 242 sets the signal SA to the second level (high level) and outputs it to the NOR circuit 243 if the level of the first comparison result signal SCMP1 from the first comparison processing CMPR1 has changed from the first level (low level) to the second level (high level).

[0295] When the flag sampling signal FLGSAMP is supplied after the end of the first comparison processing period PCMPR1, the flag bit memory cell 242 outputs signal SA to the NOR circuit 243, setting it to the first level (low level) if the level of the first comparison result signal SCMP1 from the first comparison processing CMPR1 has not changed from the first level (low level) to the second level (high level).

[0296] The NOR circuit 243 is supplied with the output signal SA from the flag bit memory cell 242 and the first comparison result signal SCMP1 from the first comparison process CMPR1.

[0297] The NOR circuit 243, when the level of the first comparison result signal SCMP1 obtained by the first comparison process CMPR1 has changed from the first level (low level) to the second level (high level), sets the signal SB to the first level (low level) and outputs it to the memory section 230, thereby prohibiting writing (overwriting).

[0298] The NOR circuit 243, when the level of the first comparison result signal SCMP1 from the first comparison process CMPR1 has not changed from the first level (low level) to the second level (high level), sets the signal SB to the second level (high level) and outputs it to the memory section 230, thereby allowing writing (overwriting).

[0299] Since the flag bit memory cell 242 is part of the ADC memory 231, it has no layout overhead and is area-efficient.

[0300] Furthermore, since the NOR circuit 243 can be constructed with a minimum size of 4 transistors (4T), the overhead in terms of area is minimized.

[0301] Furthermore, by providing this memory control unit 240, only one ADC memory is needed, even though a two-stage comparison process is performed.

[0302] In the memory control unit 240, as shown in Figure 30, when the flag sampling signal FLGSAMP is supplied after the end of the first comparison processing period PCMPR1, if the level of the first comparison result signal SCMP1 from the first comparison processing CMPR1 changes from the first level (low level) to the second level (high level), the output signal SA of the flag bit memory cell 242 is input to the NOR circuit 243 at the second level (high level). In response, the signal SB from the NOR circuit 243 is set to the first level (low level) and output to the memory unit 230, and writing (overwriting) is prohibited.

[0303] In the memory control unit 240, as shown in Figure 31, when the flag sampling signal FLGSAMP is supplied after the end of the first comparison processing period PCMPR1, if the level of the first comparison result signal SCMP1 from the first comparison processing CMPR1 remains at the first level (low level) and does not change, the output signal SA of the flag bit memory cell 242 is input to the NOR circuit 243 at the first level (low level). In response, the signal SB from the NOR circuit 243 is set to the second level (high-low level) and output to the memory unit 230, allowing writing (overwriting).

[0304] Furthermore, the flag bit memory cell 242 and the NOR circuit 243 are reset to their initial state by the clear signal FLGCLR after the end of the second comparison processing period PCMPR2 in linear ADC mode (PD-ADC mode).

[0305] The vertical scanning circuit 30 drives the photoelectric conversion readout unit 210 of the digital pixels 200 through row scanning control lines in the shutter row and readout row, in accordance with the control of the timing control circuit 50.

[0306] The vertical scanning circuit 30 supplies reference voltages VREF1, VREF2, and VREF3 to the comparator 221 of each digital pixel 200, according to the control of the timing control circuit 50, and are set according to the first comparison process CMPR1, the second comparison process CMPR2, and the third comparison process CMPR3.

[0307] Furthermore, the vertical scanning circuit 30 outputs row selection signals for the row addresses of the read row for reading the signal and the shutter row for resetting the charge accumulated in the photodiode PD, according to the address signal.

[0308] The output circuit 40 includes an I / O buffer 41, which is arranged to correspond to the memory output of each digital pixel 200 of the pixel unit 20, as shown in Figure 25, for example, and outputs the digital data read from each digital pixel 200 to the outside.

[0309] The timing control circuit 50 generates timing signals necessary for signal processing of the pixel unit 20, the vertical scanning circuit 30, the output circuit 40, and other components.

[0310] In this first embodiment, the readout unit 60 controls the readout of pixel signals from the digital pixels 200, for example, when in global shutter mode.

[0311] The readout unit 60 can specify two limit levels CLV1 and CLV2 to the output voltage control unit 213 using a control bias signal CBS, in accordance with two operating states in each operating mode: the timestamp (TTS) mode, the HCG mode during the second comparison processing period PCMPR2, and the LCG mode, for example, the operating state during the reset level sampling period and the operating state during the signal level sampling period.

[0312] The readout unit 60 can also be controlled to selectively connect (junction) the floating diffusion FD1, which serves as an output node, to the storage capacitor CS1, which stores the charge of the floating diffusion FD1 via the storage transistor CG1-Tr, according to the signal illumination level. (Stacked structure of solid-state imaging device 10) Next, the stacked structure of the solid-state imaging device 10 according to this first embodiment will be described.

[0313] Figures 32(A) and (B) are schematic diagrams illustrating the stacked structure of the solid-state imaging device 10 according to this first embodiment.

[0314] Figure 33 is a simplified cross-sectional view illustrating the stacked structure of the solid-state imaging device 10 according to this first embodiment.

[0315] The solid-state imaging device 10 according to this first embodiment has a laminated structure of a first substrate (upper substrate) 110 and a second substrate (lower substrate) 120.

[0316] The solid-state imaging device 10 is formed, for example, as an imaging device with a laminated structure that is bonded together at the wafer level and then cut out by dicing.

[0317] In this example, the structure is made up of a first substrate 110 and a second substrate 120 stacked on top of each other.

[0318] On the first substrate 110, a photoelectric conversion readout section 210 for each digital pixel 200 of the pixel section 20 is formed, centered on its central portion.

[0319] A photodiode PD is formed on the first surface 111 of the first substrate 110, which is the incident side of the light L, and a microlens MCL or color filter is formed on the light incident side.

[0320] On the second side of the first substrate 110, the following transistors are formed: transfer transistor TG1-Tr, reset transistor RST1-Tr, storage transistor CG1-Tr, first source follower transistor SF1-Tr, second source follower transistor SF2-Tr, current transistor IC1-Tr, and enable transistor EN1-Tr. Thus, in this first embodiment, the first substrate 110 basically has a matrix of photoelectric conversion readout units 210 for the digital pixels 200.

[0321] On the second substrate 120, the AD conversion unit 220, memory unit 230, and memory control unit 240 for each digital pixel 200 are formed in a matrix.

[0322] Furthermore, a vertical scanning circuit 30, an output circuit 40, and a timing control circuit 50 may also be formed on the second substrate 120.

[0323] In such a stacked structure, the readout node ND2 of each photoelectric conversion readout unit 210 on the first substrate 110 and the inverting input terminal (-) of the comparator 221 of each digital pixel 200 on the second substrate 120 are electrically connected using signal lines LSGN1, microbumps BMP, vias (die-to-die vias), etc., as shown in Figure 3, for example.

[0324] Furthermore, in this embodiment, the readout node ND2 of each photoelectric conversion readout unit 210 on the first substrate 110 and the inverting input terminal (-) of the comparator 221 of each digital pixel 200 on the second substrate 120 are AC coupled by a coupling capacitor C221. (Readout operation of the solid-state imaging device 10) The characteristic configurations and functions of each part of the solid-state imaging device 10 have been described above.

[0325] Next, the readout operation of the pixel signals of the digital pixels 200 of the solid-state imaging device 10 according to this first embodiment will be described in detail.

[0326] Figure 34 is a timing chart illustrating the readout operation of the solid-state imaging device according to this first embodiment in a predetermined shutter mode.

[0327] Figures 35(A) to (G) are diagrams illustrating the operation sequence and potential transitions, primarily in the pixel section, to explain the readout operation in a predetermined shutter mode of the solid-state imaging apparatus according to this first embodiment.

[0328] Figures 36(A) to (H) show the operation sequence and potential transitions, including unsaturated and saturated photodiodes, during the readout operation, mainly in the pixel section, in a predetermined shutter mode of the solid-state imaging apparatus according to the first embodiment.

[0329] Figures 36(A) to (D) show the potential transitions in the unsaturated state, and Figures 36(E) to (H) show the potential transitions in the saturated state.

[0330] First, to initiate the read operation, a global reset is performed to reset the photodiode PD1 and floating diffusion FD1 of each digital pixel 200, as shown in Figures 34 and 35(A).

[0331] During a global reset, the reset transistor RST1-Tr, the transfer transistor TG1-Tr, and the storage transistor CG1-Tr are held in a conductive state for a predetermined period of time for all pixels simultaneously, and the photodiode PD1 and floating diffusion FD1 are reset.

[0332] Next, as shown in Figures 34 and 35(B), the storage transistor CG1-Tr is held in a non-conductive state for a predetermined period of time, and a global reset and reset sampling are performed.

[0333] Then, as shown in Figures 34 and 35(C), the reset transistor RST1-Tr and the transfer transistor TG1-Tr are switched to a non-conductive state and the storage transistor CG1-Tr is switched to a conductive state for all pixels simultaneously, and exposure, i.e., charge storage, is started for all pixels simultaneously in parallel.

[0334] Then, as shown in Figures 34 and 35(C), the timestamp (TTS) ADC mode operation for overflow charge is initiated.

[0335] Overflow charge is accumulated in floating diffusion FD1 during the accumulation period PI. The timestamp (TTS) ADC mode operates during the accumulation time PI, specifically during the accumulation period PI until floating diffusion FD1 is reset.

[0336] In timestamp (TTS) ADC mode, the photoelectric conversion readout unit 210 outputs a voltage signal VSL1 corresponding to the overflow charge that spilled from the photodiode PD1 to the floating diffusion FD1, which acts as an output node, during the storage period PI, corresponding to the first comparison processing period PCMP1 of the AD conversion unit 220.

[0337] In this case, the output signal level of the pixel signal (voltage signal) of the output buffer unit 211 is controlled (clamped) by the output voltage control unit 213 to a first limit level CLV1 or a second limit level CLV2, depending on the operating state, for example, the signal level LS of the read reset signal and the read signal according to the operating state during the reset level sampling period PSRST and the signal level sampling period PSILT.

[0338] For example, in the output voltage control unit 213, when the assumed conditions for the occurrence of pre-determined vignetting are met and the noise during reset readout correlates with the noise in the incident light, the output signal level LS is controlled (clamped) to a first limiting level CLV1 corresponding to the minimum pixel signal level.

[0339] Furthermore, in the output voltage control unit 213, for example, if the photodiode PD1 is in an overflow state, the output signal level LS is controlled (clamped) to a second limiting level CLV2 corresponding to the maximum pixel signal level so that the output signal level does not exceed the allowable input range of the rated input voltage of the input terminal (negative input terminal) of the comparator, which is the next stage circuit, when the signal is read out.

[0340] Then, the comparator 221 of the AD conversion unit 220 performs a first comparison process CMPR1. Under the control of the readout unit 60, the comparator 221 outputs a digitized first comparison result signal SCMP1 for the voltage signal VSL1 corresponding to the overflow charge that spilled from the photodiode PD1 to the output node, the floating fusion FD1, during the storage period PI until the floating diffusion FD1 is reset, and the digital data corresponding to the first comparison result signal SCMP1 is stored in the memory 231 of the memory unit 230.

[0341] Next, as shown in Figures 34 and 35(D), the operation of the timestamp (TTS) ADC mode for overflow charge ends, and the system transitions to linear ADC mode (HCG mode), entering the reset period PR2 of the floating diffusion FD1.

[0342] During the reset period PR2, the reset transistor RST1-Tr is kept in a conductive state for a predetermined period, and the floating diffusion FD1 is reset. The signal (VRST) at the time of the reset of the floating diffusion FD1 is read out and stored as a digital signal in the memory 231 of the memory unit 230.

[0343] Then, the reset transistor RST1-Tr is switched to a non-conductive state. In this case, the accumulation period PI continues.

[0344] Next, as shown in Figures 34 and 35(E), the storage period PI ends and the process transitions to the transfer period PT.

[0345] During the transfer period PT, the transfer transistor TG1-Tr is kept in a conductive state for a predetermined period, and the accumulated charge of the photodiode PD1 is transferred to the floating diffusion FD1.

[0346] In linear (Lin) ADC mode, the photoelectric conversion readout unit 210 outputs a voltage signal VSL2 corresponding to the accumulated charge transferred from the photodiode PD1 to the floating diffusion FD1, which acts as an output node, after the accumulation period PI has ended, corresponding to the second comparison processing period PCMP2 of the AD conversion unit 220.

[0347] At this time, the system is in HCG mode, and the storage transistor CG1-Tr is held in a non-conductive state.

[0348] In this case as well, the output signal level of the pixel signal (voltage signal) of the output buffer unit 211 is controlled (clamped) by the output voltage control unit 213 to a first limiting level CLV1 or a second limiting level CLV2, depending on the operating state, for example, the signal level LS of the read reset signal and the read signal according to the operating state during the reset level sampling period PSRST and the signal level sampling period PSILT.

[0349] For example, in the output voltage control unit 213, when the assumed conditions for the occurrence of pre-determined vignetting are met and the noise during reset readout correlates with the noise in the incident light, the output signal level LS is controlled (clamped) to a first limiting level CLV1 corresponding to the minimum pixel signal level.

[0350] Furthermore, in the output voltage control unit 213, for example, the photodiode PD1 is not in a charge overflow state, and during signal readout, the output signal level LS is controlled (clamped) to a second limiting level CLV2 corresponding to the maximum pixel signal level so that the output signal level does not exceed the allowable input range of the rated input voltage of the input terminal (negative input terminal) of the comparator, which is the next stage circuit.

[0351] Then, a second comparison process, CMPR2, is performed in the comparator 221 of the AD conversion unit 220. Under the control of the readout unit 60, after the storage period PI, the comparator 221 outputs a digitized second comparison result signal SCMP2 for the voltage signal VSL2 corresponding to the stored charge transferred from the photodiode PD1 to the floating fusion FD1, which is the output node. Digital data corresponding to the second comparison result signal SCMP2 is then stored in the memory 231 of the memory unit 230.

[0352] During the above processing, the memory control unit 240 controls whether or not to write data corresponding to the second comparison result signal SCMP2 from the second comparison process CMPR2 to the memory unit 230, according to the state (output level) of the first comparison result signal SCMP1 from the first comparison process CMPR1.

[0353] Specifically, in the memory control unit 240, if the level of the first comparison result signal SCMP1 produced by the first comparison process CMPR1 changes from a first level (for example, a low level) to a second level (a high level) during the first comparison processing period PCMPR1, the writing of data corresponding to the second comparison result signal SCMP2 produced by the second comparison process CMPR2 to the memory unit 230 is prohibited.

[0354] On the other hand, in the memory control unit 240, if the level of the first comparison result signal SCMP1 from the first comparison process CMPR1 remains at the first level (low level) during the first comparison processing period CMPR1, writing data corresponding to the second comparison result signal SCMP2 from the second comparison process CMPR2 to the memory unit 230 is permitted.

[0355] Next, as shown in Figures 34 and 35(F), the storage transistor CG1-Tr is held in a conductive state, and the transfer transistor TG1-Tr is held in a conductive state for a predetermined period of time, and a voltage signal VSL3 corresponding to the sum of the stored charge transferred from the photodiode PD1 to the floating diffusion FD1 and the stored charge transferred from the storage capacitor CS1 to the floating diffusion FD1 is output.

[0356] At this time, the system is in LCG mode, and the storage transistor CG1-Tr is held in a conductive state.

[0357] In this case, the output signal level of the pixel signal (voltage signal) of the output buffer unit 211 is controlled (clamped) to a second limiting level CLV2 throughout the operating state, for example, during the reset level sampling period PSRST and the signal level sampling period PSILT.

[0358] For example, in the output voltage control unit 213, the output signal level LS is controlled (clamped) to a second limiting level CLV2 corresponding to the maximum pixel signal level, so that, for example, the photodiode PD1 is not in an overflow state and, during signal readout, the output signal level does not exceed the allowable input range of the rated input voltage of the input terminal (negative input terminal) of the comparator, which is the next stage circuit.

[0359] Then, a third comparison process, CMPR3, is performed in the comparator 221 of the AD conversion unit 220. Under the control of the readout unit 60, after the storage period PI, the comparator 221 outputs a digitized third comparison result signal SCMP3 for the voltage signal VSL3 corresponding to the sum of the stored charge transferred from the photodiode PD1 to the output node, the floating fusion FD1, and the stored charge transferred from the storage capacitor CS1 to the floating diffusion FD1. Digital data corresponding to the third comparison result signal SCMP3 is stored in the memory 231 of the memory unit 230.

[0360] Next, as shown in Figures 34 and 35(G), the system transitions to the reset period PR2 of the floating diffusion FD1.

[0361] During the reset period PR2, the reset transistor RST1-Tr is kept in a conductive state for a predetermined period, and the floating diffusion FD1 is reset. The signal (VRST) at the time of the reset of the floating diffusion FD1 is read out and stored as a digital signal in the memory 231 of the memory unit 230.

[0362] Then, the reset transistor RST1-Tr is switched to a non-conductive state.

[0363] The memory control unit 240 controls whether or not to write data corresponding to the third comparison result signal from the third comparison process to the first memory 231, depending on the state of the first and second comparison result signals from the first and second comparison processes.

[0364] Specifically, if the level of the second comparison result signal SCMP2 produced by the second comparison process CMPR2 remains at the second level (high level) during the second comparison processing period PCMPR2, the memory control unit 240 allows the writing (overwriting) of data corresponding to the third comparison result signal SCMP3 produced by the third comparison process CMPR3 to the first memory 231.

[0365] The signals read into the memory unit 230 are executed by reading digital signal data from the memory node and sent to the outside of the solid-state imaging device 10 (image sensor) via, for example, the I / O buffer 41 of the output circuit 40, which has such MIPI data format. This operation is performed globally for the entire pixel array.

[0366] As described above, according to this first embodiment, the solid-state imaging device 10 is configured as, for example, a stacked CMOS image sensor, which includes a photoelectric conversion readout unit 210, an AD conversion unit 220, and a memory unit 230 as digital pixels in the pixel unit 20 and has a global shutter operation function.

[0367] In the solid-state imaging device 10 according to this first embodiment, each digital pixel 200 has an AD conversion function, and the AD conversion unit 220 has a comparator 221 that performs a comparison process that compares the voltage signal read out by the photoelectric conversion readout unit 210 with a reference voltage and outputs a digitized comparison result signal.

[0368] Then, under the control of the readout unit 60, the comparator 221 performs the following: a first comparison process CMPR1 which outputs a digitized first comparison result signal SCMP1 for a voltage signal corresponding to the overflow charge that spilled from the photodiode PD1 to the output node (floating diffusion) FD1 during the storage period; a second comparison process CMPR2 which outputs a digitized second comparison result signal SCMP2 for a voltage signal corresponding to the stored charge of the photodiode PD1 transferred to the floating node FD1 (output node) during the transfer period after the storage period; and a third comparison process CMPR3 which outputs a digitized third comparison result signal SCMP3 for a voltage signal corresponding to the sum of the stored charge of the photodiode PD1 transferred to the output node and the stored charge of the charge storage unit 212 during the transfer period after the storage period.

[0369] The solid-state imaging device 10 has an output voltage control unit 213 that controls the output signal level of the pixel signal (voltage signal) of the output buffer unit 211 to a limit level according to the operating state, for example, during the reset level sampling period and during the signal level sampling period, for example, the signal levels of the read reset signal and the read signal.

[0370] For example, the output voltage control unit 213 controls the output signal level to at least the minimum pixel signal level when a predetermined assumed condition (in this embodiment, the condition under which vignetting occurs) is met and the output signal level fluctuates during reset readout.

[0371] Furthermore, the output voltage control unit 213 controls the output signal level to at least the maximum pixel signal level so that, for example, when the photoelectric conversion element is in a charge overflow state and the signal is read out, the output signal level does not exceed the allowable input range of the rated input voltage of the input terminal (negative input terminal) of the comparator, which is the next stage circuit.

[0372] Furthermore, the solid-state imaging device 10 has a memory control unit 240 that controls access to the memory unit according to the state (level in this embodiment) of the comparison result signal of the comparator 221.

[0373] Then, the memory control unit 240 controls whether or not to write data corresponding to the second comparison result signal SCMP2 from the second comparison process CMPR2 to the memory unit 230, according to the state (output level) of the first comparison result signal SCMP1 from the first comparison process CMPR1.

[0374] Specifically, during the first comparison processing period PSMPR1, if the level of the first comparison result signal SCMP1 from the first comparison processing CMPR1 changes from a first level (for example, a low level) to a second level (a high level), the memory control unit 240 prohibits writing data corresponding to the second comparison result signal SCMP2 from the second comparison processing CMPR2 to the memory unit 230.

[0375] On the other hand, if the level of the first comparison result signal SCMP1 from the first comparison process CMPR1 remains at the first level (low level) during the first comparison processing period CMPR1, the memory control unit 240 allows the writing of data corresponding to the second comparison result signal SCMP2 from the second comparison process CMPR2 to the memory unit 230.

[0376] Furthermore, the memory control unit 240 controls whether or not to write data corresponding to the third comparison result signal from the third comparison process to the first memory 231, depending on the state of the first and second comparison result signals from the first and second comparison processes.

[0377] Specifically, if the level of the second comparison result signal SCMP2 from the second comparison process CMPR2 remains at the second level (high level) during the second comparison processing period PCMPR2, the memory control unit 240 allows the writing (overwriting) of data corresponding to the third comparison result signal SCMP3 from the third comparison process CMPR3 to the first memory 231.

[0378] Therefore, according to the solid-state imaging device 10 of this first embodiment, the generation of false signals can be suppressed by controlling the output signal level of the output buffer unit 211 by the output voltage control unit 213, thereby preventing deterioration of image quality and enabling stable operation.

[0379] Furthermore, according to the solid-state imaging device 10 of this first embodiment, since the charge overflowing from the photodiode during the storage period is utilized in real time, it is possible to achieve a wide dynamic range and a high frame rate, and moreover, efficient access to the memory is possible.

[0380] Furthermore, according to the present invention, it is possible to substantially achieve a wide dynamic range and a high frame rate, to efficiently access memory, to reduce noise, to maximize the effective pixel area, and to maximize the value per unit cost.

[0381] Furthermore, the solid-state imaging device 10 of this first embodiment can prevent a decrease in layout area efficiency while preventing the complexity of the configuration.

[0382] Furthermore, the solid-state imaging device 10 according to this first embodiment has a laminated structure of a first substrate (upper substrate) 110 and a second substrate (lower substrate) 120.

[0383] Therefore, in this first embodiment, by forming the first substrate 110 side basically with only NMOS elements and by maximizing the effective pixel area with a pixel array, the value per unit cost can be maximized. (Second embodiment) Figure 37 is a diagram illustrating a solid-state imaging device according to a second embodiment of the present invention, and shows an example of the selection process between timestamp ADC mode operation and linear ADC mode operation.

[0384] The solid-state imaging device 10A according to this second embodiment differs from the solid-state imaging device 10 according to the first embodiment described above in the following ways.

[0385] In the solid-state imaging device 10 according to the first embodiment, timestamp (TTS) ADC mode operation and linear (Lin) ADC mode operation are performed sequentially.

[0386] In contrast, the solid-state imaging device 10A according to this second embodiment can selectively perform timestamp (TTS) ADC mode operation and linear (Lin) ADC mode operation depending on the illuminance.

[0387] In the example shown in Figure 28, under normal illumination conditions (ST51), the timestamp ADC mode operation and the linear ADC mode operation are performed sequentially (ST52). In this case, in linear ADC mode, the HCG mode and LCG mode operations are performed (ST53, ST54). In the case of extremely high illuminance (ST51, ST55), rather than normal illuminance, there is a high probability that charge will overflow from photodiode PD1 to floating diffusion FD1, therefore only timestamp ADC mode operation is performed (ST56). In the case of extremely low illuminance (ST51, ST55, ST57), which is neither normal nor very high illuminance, the probability of charge overflowing from photodiode PD1 to floating diffusion FD1 is extremely low, so only linear ADC mode operation is performed (ST58).

[0388] According to this second embodiment, not only can the same effects as those of the first embodiment described above be obtained, but it is also possible to speed up the read process and reduce power consumption. (Third embodiment) Figure 38 shows an example of the pixel configuration of a solid-state imaging device according to a third embodiment of the present invention.

[0389] The solid-state imaging device 10B according to this third embodiment differs from the solid-state imaging device 10 according to the first embodiment described above in the following ways.

[0390] In the solid-state imaging device 10B according to this third embodiment, a second enable transistor EN2-Tr, which serves as a second enable element, is connected in series with a second source follower transistor SF2-Tr between the power line vdd and the readout node ND2 in the output voltage control unit 213.

[0391] According to this third embodiment, not only can the same effects as those of the first embodiment described above be obtained, but the first source follower circuit of the output buffer unit 211 and the second source follower circuit of the output voltage control unit 213 can be driven and controlled individually. (Fourth embodiment) Figure 39 shows an example of the pixel configuration of a solid-state imaging device according to a fourth embodiment of the present invention.

[0392] The solid-state imaging device 10C according to this fourth embodiment differs from the solid-state imaging device 10 according to the first embodiment described above in the following ways.

[0393] In the solid-state imaging device 10C according to this third embodiment, the current transistor IC1-Tr, which serves as a current source, is located on the input side of the AD conversion unit 220 on the second substrate 120 side, rather than on the first substrate 110 side.

[0394] According to this fourth embodiment, the same effects as those of the first embodiment described above can be obtained.

[0395] The solid-state imaging devices 10, 10A, 10B, and 10C described above can be applied as imaging devices to electronic devices such as digital cameras, video cameras, mobile devices, surveillance cameras, and medical endoscope cameras.

[0396] Figure 40 shows a camera system to which a solid-state imaging device according to an embodiment of the present invention is applied. This is a diagram showing an example of the configuration of an electronic device.

[0397] As shown in Figure 40, the electronic device 300 has a CMOS image sensor 310 to which the solid-state imaging devices 10, 10A, 10B, and 10C according to this embodiment can be applied.

[0398] Furthermore, the electronic device 300 has an optical system (lens, etc.) 320 that guides incident light into the pixel area of ​​the CMOS image sensor 310 (to form an image of the subject).

[0399] The electronic device 300 has a signal processing circuit (PRC) 330 that processes the output signal of the CMOS image sensor 310.

[0400] The signal processing circuit 330 performs predetermined signal processing on the output signal of the CMOS image sensor 310.

[0401] The image signal processed by the signal processing circuit 330 can be displayed as a video on a monitor such as a liquid crystal display, output to a printer, or directly recorded on a recording medium such as a memory card, among other possibilities.

[0402] As described above, by incorporating the aforementioned solid-state imaging devices 10, 10A, 10B, and 10C as the CMOS image sensor 310, it becomes possible to provide a high-performance, compact, and low-cost camera system.

[0403] Furthermore, it can be used in applications where camera installation requirements have constraints such as mounting size, number of connectable cables, cable length, and installation height, such as surveillance cameras and medical endoscope cameras. [Explanation of Symbols]

[0404] 10, 10A, 10B, 10C... Solid-state imaging device, 20... Pixel section, PD1... Photodiode, TG1-Tr... Transfer transistor, RST1-Tr... Reset transistor, CG1-Tr... Accumulation transistor, SF1-Tr... First source follower transistor, SF2-Tr... Second source follower transistor, IC1-Tr... Current transistor, FD1... Floating diffusion, CS1... Accumulation capacitor, 200... Digital pixel, 210... Photoconverter Readout section, 211...Output buffer section, 212...Charge storage section, 213...Output voltage control section, 220...AD conversion section, 221...Comparator, 222...Counter, 230...Memory section, 231...First memory, 232...Second memory, 240...Memory control section, 30...Vertical scanning circuit, 40...Output circuit, 50...Timing control circuit, 60...Readout section, 300...Electronic equipment, 310...CMOS image sensor, 320...Optical system, 330...Signal processing circuit (PRC).

Claims

1. A pixel section in which pixels including a photoelectric conversion readout section that performs photoelectric conversion are arranged, It has a reading unit that reads pixel signals from the pixels of the pixel unit in accordance with the operating state, The photoelectric conversion readout unit of the aforementioned pixel is A photoelectric conversion element that stores the charge generated by photoelectric conversion during the storage period, A transfer element capable of transferring the charge accumulated in the photoelectric conversion element during the transfer period after the accumulation period, An output node through which the charge accumulated in the photoelectric conversion element is transferred, A reset element that resets the output node to a predetermined potential during the reset period, An output buffer unit that converts the charge of the output node into a voltage signal corresponding to the amount of charge, and outputs the converted voltage signal as a pixel signal, The output voltage control unit includes a clamp circuit that controls the output signal level of the pixel signal of the output buffer unit to a control level that is a limit level according to the operating state, The clamping circuit is arranged for each pixel. During the storage period, the overflow charge is readable, and it is capable of handling very strong optical signals and is capable of digital conversion. The clamp circuit can be applied even to signals outside the storage period, and it can be applied to photoelectric conversion functions with multiple operating modes depending on the illuminance. The aforementioned pixel is The comparator includes a comparator that performs a comparison process, comparing a pixel signal, which is a voltage signal from the output buffer unit whose output level is controlled by the output voltage control unit, with a reference voltage, and outputs a digitized comparison result signal. The comparator, under the control of the reading unit, A first comparison process that outputs a digitized first comparison result signal of the voltage signal corresponding to the overflow charge that spilled from the photoelectric conversion element to the output node during the storage period, via the output voltage control unit, A second comparison process that outputs a digitized second comparison result signal for the voltage signal, which corresponds to the accumulated charge of the photoelectric conversion element transferred to the output node during the transfer period after the accumulation period, via the output voltage control unit, It is possible to perform a third comparison process that outputs a digitized third comparison result signal for the voltage signal, which corresponds to the sum of the accumulated charge of the photoelectric conversion element and the accumulated charge of the charge storage unit transferred to the output node during the transfer period after the storage period, via the output voltage control unit. Solid-state imaging device.

2. The aforementioned reading unit, The pixel signal is read from the pixel of the pixel unit in accordance with the multiple operating states of the operating mode. The output voltage control unit is The limit level can be set to correspond to multiple operating states of the operating mode, and the output signal level of the pixel signal of the output buffer is controlled to the limit level according to the operating state. The solid-state imaging apparatus according to claim 1.

3. The aforementioned pixel signal is Includes read / reset signals and read / receive signals adapted to the operating state, The output voltage control unit is When reading the reset signal, the output signal level can be controlled to at least the minimum pixel signal level. During signal readout, the output signal level can be controlled to at least the maximum pixel signal level. The solid-state imaging apparatus according to claim 2.

4. The output voltage control unit is When the pre-defined conditions are met and the noise during reset readout correlates with the noise in the incident light, the output signal level is controlled to at least the minimum pixel signal level. The solid-state imaging apparatus according to claim 3.

5. The output voltage control unit is During signal readout, the output signal level is controlled to at least the maximum pixel signal level so that the output signal level does not exceed the allowable input range of the rated input voltage of the next stage circuit. The solid-state imaging apparatus according to claim 3 or 4.

6. The photoelectric conversion readout unit of the aforementioned pixel is The aforementioned floating diffusion as an output node, The system includes a reset element that resets the floating diffusion to a predetermined potential during the reset period, The output buffer section is, It includes a first source follower element that converts the charge of the floating diffusion into a voltage signal corresponding to the amount of charge, and outputs the converted signal as a pixel output signal from the readout node, The output voltage control unit is The source is connected to the read node of the output buffer section, a control bias signal is supplied to the gate, and the system includes a second source follower element that causes the signal level of the pixel signal output from the read node to follow the level of the control bias signal. A solid-state imaging apparatus according to any one of claims 1 to 5,

7. The output voltage control unit is The gates of the second source follower elements are each supplied with the control bias signals corresponding to the readout signal level to be output. The solid-state imaging apparatus according to claim 6.

8. The output voltage control unit is During the first comparison process and the second comparison process, when the reset signal is read out, a control bias signal is supplied to control the output signal level to the minimum pixel signal level. During the remaining period, including the storage period for the first and second comparison processes, and during the third comparison process period, a control bias signal is supplied to control the output signal level to the maximum pixel signal level. The solid-state imaging apparatus according to claim 1.

9. The aforementioned photoelectric conversion readout unit is Includes at least a charge storage unit capable of storing overflow charge that spills from the photoelectric conversion element to the output node. The solid-state imaging apparatus according to claim 8.

10. The charge storage unit is A storage transistor connected to the aforementioned output node, Includes a storage capacitance element that stores the charge of the output node via the storage transistor, The aforementioned output node is The voltage signal corresponding to the accumulated charge of the photoelectric conversion element transferred to the output node during the transfer period after the accumulation period, and, During the third comparison processing period, the voltage signal corresponding to the overflow charge that has spilled from at least the photoelectric conversion element to the output node is output. The solid-state imaging device according to claim 9.

11. The aforementioned reading unit, In the case of normal illuminance, the system is controlled to perform the first comparison process, the second comparison process, and the third comparison process. If the illuminance is higher than normal, the system controls the system to perform the first comparison process. If the illuminance is lower than normal, the system will control the system to perform the second comparison process described above. A solid-state imaging apparatus according to any one of claims 1 to 10.

12. The aforementioned comparator is The pixel signal, which is the voltage signal from the output buffer unit, is supplied to the negative first input terminal. The reference voltage is supplied to the positive second input terminal. A coupling capacitor is connected to the voltage signal supply line to the first input terminal. A solid-state imaging apparatus according to any one of claims 1 to 11.

13. The aforementioned comparator is A reset switch is connected between the output terminal and the first input terminal. A load capacitor is connected to the output terminal side. The solid-state imaging apparatus according to claim 12.

14. The output voltage control unit is The minimum signal input level of the comparator is suppressed to 0V or higher. The solid-state imaging apparatus according to claim 12 or 13.

15. A pixel section in which pixels including a photoelectric conversion readout section that performs photoelectric conversion are arranged, It has a reading unit that reads pixel signals from the pixels of the pixel unit, The photoelectric conversion readout unit of the aforementioned pixel is A photoelectric conversion element that stores the charge generated by photoelectric conversion during the storage period, A transfer element capable of transferring the charge accumulated in the photoelectric conversion element during the transfer period after the accumulation period, An output node through which the charge accumulated in the photoelectric conversion element is transferred, A reset element that resets the output node to a predetermined potential during the reset period, The output buffer unit includes a unit that converts the charge of the output node into a voltage signal corresponding to the amount of charge, and outputs the converted voltage signal as a pixel signal. The output voltage control unit includes a clamp circuit that controls the output signal level of the pixel signal of the output buffer unit to a limit level according to the operating state, The aforementioned pixel is The system includes a comparator that performs a comparison process, comparing a pixel signal, which is a voltage signal from the output buffer unit whose output level is controlled by the output voltage control unit, with a reference voltage, and outputting a digitized comparison result signal. A method for driving a solid-state imaging device, In response to the operating state, the output buffer section of the photoelectric conversion readout unit of the pixel outputs a voltage signal corresponding to the amount of charge as the pixel signal. The output signal level of the pixel signal in the output buffer is controlled to a limit level according to the operating state. The clamping circuit is placed at each pixel, The overflow charge is readable during the storage period, and it is capable of handling very strong optical signals and is digitally responsive. The clamp circuit can be applied even to signals outside the storage period, and it can be applied to photoelectric conversion functions with multiple operating modes depending on the illuminance. In the comparator, under the control of the reading unit, A first comparison process that outputs a digitized first comparison result signal of the voltage signal corresponding to the overflow charge that spilled from the photoelectric conversion element to the output node during the storage period, via the output voltage control unit, A second comparison process that outputs a digitized second comparison result signal for the voltage signal, which corresponds to the accumulated charge of the photoelectric conversion element transferred to the output node during the transfer period after the accumulation period, via the output voltage control unit, A third comparison process is performed, which outputs a digitized third comparison result signal for the voltage signal transmitted via the output voltage control unit, corresponding to the sum of the accumulated charge of the photoelectric conversion element and the accumulated charge of the charge storage unit transferred to the output node during the transfer period after the storage period. A method for driving a solid-state imaging device.

16. Solid-state imaging device, The solid-state imaging device has an optical system for forming an image of a subject, The solid-state imaging device is A pixel section in which pixels including a photoelectric conversion readout section that performs photoelectric conversion are arranged, It has a reading unit that reads pixel signals from the pixels of the pixel unit in accordance with the operating state, The photoelectric conversion readout unit of the aforementioned pixel is A photoelectric conversion element that stores the charge generated by photoelectric conversion during the storage period, A transfer element capable of transferring the charge accumulated in the photoelectric conversion element during the transfer period after the accumulation period, An output node through which the charge accumulated in the photoelectric conversion element is transferred, A reset element that resets the output node to a predetermined potential during the reset period, An output buffer unit that converts the charge of the output node into a voltage signal corresponding to the amount of charge, and outputs the converted voltage signal as a pixel signal, The output voltage control unit includes a clamp circuit that controls the output signal level of the pixel signal of the output buffer unit to a limit level according to the operating state, The clamping circuit is arranged for each pixel. During the storage period, the overflow charge is readable, and it is capable of handling very strong optical signals and is capable of digital conversion. The clamp circuit can be applied even to signals outside the storage period, and it can be applied to photoelectric conversion functions with multiple operating modes depending on the illuminance. The aforementioned pixel is The comparator includes a comparator that performs a comparison process, comparing a pixel signal, which is a voltage signal from the output buffer unit whose output level is controlled by the output voltage control unit, with a reference voltage, and outputs a digitized comparison result signal. The comparator, under the control of the reading unit, A first comparison process that outputs a digitized first comparison result signal of the voltage signal corresponding to the overflow charge that spilled from the photoelectric conversion element to the output node during the storage period, via the output voltage control unit, A second comparison process that outputs a digitized second comparison result signal for the voltage signal, which corresponds to the accumulated charge of the photoelectric conversion element transferred to the output node during the transfer period after the accumulation period, via the output voltage control unit, It is possible to perform a third comparison process that outputs a digitized third comparison result signal for the voltage signal, which corresponds to the sum of the accumulated charge of the photoelectric conversion element and the accumulated charge of the charge storage unit transferred to the output node during the transfer period after the storage period, via the output voltage control unit. electronic equipment.

Images