Wafer container and wafer support

Abstract

In this wafer container, each of cell rings that constitute a container body comprises: an outer frame; a support portion that protrudes inward from the outer frame; a first guide member and a second guide member that are provided in the outer frame and are disposed opposite each other in a first direction; and a pair of third guide members that are provided in the outer frame and are disposed opposite each other in a second direction. The container body includes a first flow path that guides an inactive gas in an upper direction, a horizontal flow path that guides the inactive gas in a horizontal direction, and a second flow path that guides the inactive gas in a lower direction. In the container body, the pair of third guide members regulate the inactive gas in the horizontal flow path from deviating in the second direction.

Description

Technical Field

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[0001] The present disclosure relates to a wafer container for storing wafers and a wafer support which is a component of the wafer container.

Background Art

[0002] Conventionally, wafer containers for storing wafers are known. WO 2014 / 107818 discloses a wafer container formed by stacking a plurality of wafer supports. In the wafer container, a plurality of wafers are stored in a state where they face each other in the vertical direction with a gap therebetween. In order to maintain the cleanliness of the wafers, an inert gas such as nitrogen gas is flowed into the wafer container. The inert gas flows through the gap between the wafers from one end to the other end of the wafer support (cell).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In a conventional container, a part of the inert gas tends to deviate from the gap between the wafers to the region around the wafer periphery while flowing from one end to the other end of the cell. As a result, the concentration of the inert gas becomes insufficient, and there is a risk that the oxygen concentration near the wafer becomes high.

[0005] The present disclosure describes a wafer container and a wafer support capable of keeping the oxygen concentration near the wafer low.

Means for Solving the Problems

[0006] A wafer container according to one aspect of the present disclosure is formed by a plurality of wafer supports stacked in the vertical direction and comprises a container body for housing a wafer, a top plate provided on the container body, and a bottom plate provided below the container body and having an inlet hole for inert gas. Each wafer support includes an outer frame forming the side surface of the container body, a support portion protruding inward from the outer frame for supporting the wafer, a first guide member and a second guide member provided within the outer frame and arranged opposite each other in a first direction perpendicular to the vertical direction, and a pair of third guide members provided within the outer frame and arranged opposite each other in a second direction perpendicular to both the vertical direction and the first direction. The container body has a first channel formed by the first guide member for guiding the inert gas from the inlet hole upward, a horizontal channel for guiding the inert gas from the first channel horizontally, and a second channel formed by the second guide member for guiding the inert gas from the horizontal channel downward. In the container body, the pair of third guide members restrict the inert gas in the horizontal channel from escaping in the second direction.

[0007] In this wafer container, when the inert gas flows through the horizontal channel, the third guide member restricts the inert gas from escaping in the second direction. Therefore, the concentration of the inert gas near the wafer is maintained. As a result, the oxygen concentration near the wafer can be kept low.

[0008] In a stacked wafer support structure, a first gap is formed between the lower first guide member and the upper first guide member, and a second gap may be formed between the lower second guide member and the upper second guide member. Inert gas flows into a horizontal channel through the first gap, and the inert gas that has flowed through the horizontal channel escapes through the second gap. The third guide member restricts escape in the second direction, and the first and second gaps create a flow in the first direction and a flow that spreads throughout the entire space between the wafers.

[0009] In two wafer supports stacked vertically, a third gap may be formed between the lower third guide member and the upper third guide member. The third gap may be smaller than both the first gap and the second gap. In this case, the inert gas flowing in through the first gap is less likely to flow out through the pair of third gaps located on both sides in the second direction, but is more likely to flow out through the second gap. Therefore, a more suitable flow of inert gas is created in the horizontal flow path.

[0010] The pair of third guide members may include a pair of inner edges that, when viewed from above, extend along the outer edge of the wafer supported by the support. In this case, the inert gas can be reliably introduced to the outer edge of the wafer, and the leakage of the inert gas in the second direction can be reliably prevented.

[0011] The pair of third guide members may include a pair of inner edges that, when viewed from above, extend along the outer edge of the wafer supported by the support. In a container body in which multiple wafer supports are stacked, the aggregate of the pair of inner edges may form a restricting wall that restricts the leakage of inert gas in a second direction within the horizontal flow path. In this case, the inert gas can be reliably introduced to the outer edge of the wafer, and leakage of the inert gas in the second direction is reliably prevented. The restricting wall formed in the container body guides or retains the inert gas in a region for maintaining the cleanliness of the wafer.

[0012] Another aspect of the present disclosure is a wafer support for supporting a wafer, comprising: an outer frame formed to enclose the wafer; a plurality of support portions projecting inward from the outer frame to support the wafer; a first guide member and a second guide member provided within the outer frame and arranged opposite each other in a first direction perpendicular to the vertical direction; and a pair of third guide members provided within the outer frame and arranged opposite each other in a second direction perpendicular to both the vertical direction and the first direction. When the wafer supports are stacked, a first channel is formed by the first frame member and the first guide member of the outer frame, and a second channel is formed by the second frame member and the second guide member of the outer frame. Support portions are provided between the first guide member and the second guide member and the pair of third guide members.

[0013] Multiple wafer supports can be prepared and stacked vertically to form the container body. The wafer is supported by the support section. A third guide member can also restrict the escape of the inert gas in the second direction. Therefore, the concentration of the inert gas near the wafer is maintained while the wafer is stored in the container body. As a result, the oxygen concentration near the wafer can be kept low.

[0014] The first guide member and the pair of the second guide member and the third guide member may have a circular shape that surrounds the outer edge of the wafer supported by the support when viewed from above. In this case, in the container body formed by stacking wafer supports, the inert gas is guided or held only in the region for maintaining the cleanliness of the wafer. [Effects of the Invention]

[0015] According to some aspects of this disclosure, the oxygen concentration near the wafer W can be kept low. [Brief explanation of the drawing]

[0016] [Figure 1] Figure 1 is a schematic side view showing a wafer storage system according to one embodiment of the present disclosure. [Figure 2] Figure 2 is a schematic perspective view showing a wafer container according to one embodiment of the present disclosure. [Figure 3] Figure 3 is a perspective view showing the container body in Figure 2. [Figure 4] Figure 4 is a perspective view showing one of the wafer supports in Figure 3. [Figure 5] Figure 5 is a plan view of the wafer support. [Figure 6] Figure 6 is a magnified plan view showing the area around the third guide member in the wafer support. [Figure 7] Figure 7 is an exploded perspective view showing the main body, top plate, and bottom plate of the wafer container. [Figure 8] Figure 8 is a diagram illustrating the flow channels formed in the container body. [Figure 9] FIG. 9 is a cross-sectional view of the first guide member and the second guide member. [Figure 10] FIG. 10 is a cross-sectional view taken along the line X-X of FIG. 2. [Figure 11] FIG. 11 is a cross-sectional view of a pair of third guide members. [Figure 12] FIG. 12 is a diagram showing the analysis result of the oxygen concentration (distribution) in the wafer container of the present disclosure. [Figure 13] FIG. 13 is a diagram showing the analysis result of the oxygen concentration (distribution) in a conventional wafer container.

MODE FOR CARRYING OUT THE INVENTION

[0017] Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the description of the drawings, the same reference numerals are given to the same elements, and redundant descriptions are omitted.

[0018] As shown in FIG. 1, the wafer storage system 1 includes a wafer transfer device 100, a stocker 2, a crane 3, a port 4, and a system control unit 9. In the following description, the term "upper" corresponds to the upper direction in the vertical direction, and the term "lower" corresponds to the lower direction in the vertical direction. The X direction is one horizontal direction, the Y direction is another horizontal direction orthogonal to the X direction, and the Z direction is the vertical direction (up and down direction).

[0019] The stocker 2 is a device for storing wafer containers 5. The stocker 2 has a plurality of shelves 2a arranged in the X and Z directions on which wafer containers 5 are placed. The stocker 2 is provided in multiple rows (here, two rows) facing each other in the Y direction. In the illustrated example, one stocker 2 is provided, for example, above the ring opener 120 of the wafer transfer device 100. The crane 3 is a transport device for transporting wafer containers 5. The crane 3 transfers wafer containers 5 between the shelves 2a and the ring opener 120. The crane 3 is positioned in the area between the opposing stockers 2. The crane 3 moves on a travel rail (not shown) arranged along the X direction on the floor surface. The crane 3 has a guide rail 3a extending in the Z direction and a loading platform 3b that can be raised and lowered along the guide rail 3a.

[0020] The wafer transfer device 100 transfers a disc-shaped wafer, which is the material for a semiconductor device, to the wafer container 5. The wafer transfer device 100 includes a wafer handling robot 110 and a ring opener 120. Port 4 is the part where a FOUP (Front Opening Unified Pod) 8 is transferred between a transport vehicle or an operator and the wafer storage system 1. The transport vehicle travels along a track installed on the ceiling of the semiconductor factory and transports the FOUP 8. The transport vehicle is an overhead-traveling unmanned transport vehicle configured to be able to transfer the FOUP 8. The transport vehicle is also referred to as a trolley (transport trolley), overhead-traveling vehicle (overhead transport vehicle), or simply a vehicle. It is also possible for an operator to bring in a FOUP 8 and load it into the wafer storage system 1, and for an operator to receive a FOUP 8 that has been unloaded from the wafer storage system 1. The FOUP 8 is placed on Port 4 by transport by the transport vehicle or an operator. The FOUP 8 has a box-shaped housing with an opening and a lid that covers the opening. The lid is removable from the housing. FOUP8 accommodates one or more wafers.

[0021] The system control unit 9, which controls each operation of the wafer storage system 1, is an electronic control unit consisting of a CPU (Central Processing Unit), ROM (Read Only Memory), and RAM (Random Access Memory), etc. The system control unit 9 may be configured as software control, for example, where a program stored in ROM is loaded onto RAM and executed by the CPU, or as an implementation of hardware control through a combination of electronic circuits, etc. Furthermore, the system control unit 9 may be a single device, or multiple devices may be connected via a communication network such as the Internet or an intranet to logically construct a single system control unit 9.

[0022] In the wafer storage system 1, the process of transferring wafers from the wafer container 5 stored in the stocker 2 to the FOUP 8 is performed. For example, an empty FOUP 8 is placed on the port 4 by a transport vehicle or an operator. The crane 3 moves the wafer container 5 from the shelf 2a of the stocker 2 to the ring opener 120. The ring opener 120 opens the wafer container 5, making it possible to remove the wafer from the wafer container 5, while simultaneously opening the lid of the FOUP 8. The wafer handling robot 110 removes the wafer from the wafer container 5 and stores the wafer inside the FOUP 8. After storing a predetermined number of wafers inside the FOUP 8, the lid of the FOUP 8 is closed. This completes the transfer of wafers from the wafer container 5 to the FOUP 8. Note that the transfer of wafers from the FOUP 8 to the wafer container 5 can be achieved by performing the above process in reverse order. The wafer storage system 1 can automatically perform the transfer of wafers from the wafer container 5 and the FOUP 8.

[0023] The wafer container 5 is a container used by the wafer transfer device 100 to transfer wafers. As shown in Figures 2 to 5, the wafer container 5 has a plurality of cell rings (wafer supports) 40 for holding (supporting) the wafer W. The cell rings 40 are, for example, molded products made of resin. The wafer W is, for example, disc-shaped. However, the wafer W does not have to be disc-shaped. The wafer W may have a shape in which a part of the disc is missing (for example, a flat-shaped notch cut along a straight line corresponding to a chord, or a notch-shaped notch in which a part of the periphery is cut in a triangular shape). The wafer W has at least an arc portion. The center of the wafer W is determined with respect to the arc portion.

[0024] Each cell ring 40 is provided with, for example, holes 48 and projections 49 at its corners (see Figure 5). One cell ring 40 is stacked on top of another cell ring 40, rotated 180 degrees relative to that cell ring 40. At this time, the projections 49 of one cell ring 40 are inserted into the holes 48 of the other cell ring 40, thereby positioning the multiple cell rings 40. As shown in Figure 3, the multiple cell rings 40 have the same external shape and are stacked tightly in the vertical direction. The multiple cell rings 40 form a container body 10 for housing the wafer W. The stacked structure of the multiple cell rings 40 and the opening and closing mechanism of the wafer container 5 by the ring opener 120 can be implemented by known structures, mechanisms and / or methods, for example, as disclosed in International Publication No. 2021 / 044791.

[0025] As shown in Figures 2 and 7, the wafer container 5 comprises a plurality of cell rings 40 stacked vertically with almost no gaps to form a laminate, a top plate 20 provided on top of the laminate of the plurality of cell rings 40, and a bottom plate 30 provided below the laminate of the plurality of cell rings 40. "Vertical direction" and "stacking direction" have the same meaning. The plurality of cell rings 40 form the container body 10 for housing the wafer W. The plurality of cell rings 40 are stacked with adjacent outer frames 41 in the vertical direction in contact with each other in order to make the container body 10 as airtight as possible. More specifically, the outer frame 41 includes a bulging frame portion 42 in the shape of a rounded rectangle that is slightly smaller than the outer edge of the outer frame 41. In adjacent outer frames 41 in the vertical direction, the inner ends of the bulging frame portion 42 in the radial direction are in contact with each other. The top plate 20 and the bottom plate 30 are, for example, plate-shaped members. The bottom plate 30 is placed on the shelf 2a of the stocker 2. Multiple stacked cell rings 40 are pressed down, for example, by the weight of the top plate 20. The wafer container 5 is placed horizontally on a shelf 2a, for example. A first direction D1 and a second direction D2 are defined for the wafer container 5 (details below). For example, the first direction D1 may coincide with the Y direction and the second direction D2 may coincide with the X direction. Alternatively, the first direction D1 may coincide with the X direction and the second direction D2 may coincide with the Y direction. The wafer container 5 is placed on the shelf 2a such that the nozzle installed on the shelf 2a coincides with the position of the inlet hole 31 of the wafer container 5. There are various variations in the arrangement of the nozzles, and accordingly, the orientation of the wafer container 5 may also change.

[0026] Next, the structure of the cell ring 40 will be described in detail with reference to Figures 4 and 5. As shown in Figures 4 and 5, each cell ring 40 comprises a rectangular outer frame 41. The outer frame 41 is, for example, rectangular or square in shape. A wafer W is placed and supported within the outer frame 41. In this specification, a central axis L is defined that passes through the center of the wafer W supported by the outer frame 41. The central axis L passes through the center of the wafer W and is perpendicular to the wafer W. In the wafer container 5, the direction of the central axis L is equal to the Z direction, i.e., the up and down direction. The outer frame 41 includes first frame members 45 and second frame members 46 spaced apart in a first direction D1 perpendicular to the central axis L and positioned at both ends of the first direction D1, and a pair of third frame members 47 spaced apart in a second direction D2 perpendicular to both the central axis L and the first direction D1 and positioned at both ends of the second direction D2. A rectangular outer frame 41 is formed by a first frame member 45 and a second frame member 46 extending in parallel, and a pair of third frame members 47 extending in parallel. When a container body 10 is formed by stacking multiple cell rings 40, the outer frame 41 forms the four sides of the container body 10.

[0027] Each cell ring 40 includes a plurality (e.g., four) of support portions 43 that project inward from the outer frame 41 and support the wafer W. The support portions 43 project, for example, above the outer frame 41 and hold the wafer W above the outer frame 41. The plurality of support portions 43 are arranged to be located on a virtual circumference equal to the diameter of the wafer W, and the wafer W is placed on the horizontal tip pieces of the support portions 43. In addition, the cell rings 40 may be designed such that the positions of the support portions 43, 43 provided in a certain part of the circumferential direction are slightly offset in the circumferential direction in two cell rings 40 that are adjacent in the vertical direction (see Figure 3).

[0028] Each cell ring 40 includes a first guide member 51 and a second guide member 52 provided within the outer frame 41 and arranged opposite each other in a first direction D1. The first guide member 51 is provided in a range corresponding to the first frame member 45 and the ends of the pair of third frame members 47 (the corners closer to the first frame member 45), and protrudes inward from the outer frame 41. The second guide member 52 is provided in a range corresponding to the second frame member 46 and the ends of the pair of third frame members 47 (the corners closer to the second frame member 46), and protrudes inward from the outer frame 41. The first frame member 45 and the second frame member 46 may be formed to bulge slightly upward and inward from, for example, the outermost edge of the outer frame 41 (see also Figure 9). The first guide member 51 and the second guide member 52 may extend horizontally to a height similar to that of the first frame member 45 and the second frame member 46.

[0029] The first guide member 51 and the second guide member 52 may be line-symmetric with respect to the central axis L. The first guide member 51 and the second guide member 52 may be plane-symmetric with respect to a plane that includes the central axis L and is parallel to the second direction D2. The cell rings 40 are stacked after being rotated 180 degrees as described above. Because the outer frame 41 is symmetrical, the cell ring 40 shown in Figure 5 and the cell ring 40 rotated 180 degrees around the central axis L have roughly the same shape. However, the shapes of the outer edges of adjacent cell rings 40 in the vertical direction do not completely overlap. Also, the position of the projection 49 of the lower cell ring 40 and the position of the hole 48 of the upper cell ring 40 coincide. In this specification, regardless of the orientation of the cell ring 40, the guide member located on the side of the first flow path P1 (described later) of the container body 10 is called the first guide member 51, and the guide member located on the side of the second flow path P2 of the container body 10 is called the second guide member 52.

[0030] The first guide member 51 includes a first arc-shaped portion 51a extending along the outer edge of the wafer W supported by the support portion 43, a pair of first end support portions 51b extending inward from the corner between the first frame member 45 and a pair of third frame members 47 to support both ends of the first arc-shaped portion 51a, and a first central support portion 51c provided in the center of the first frame member 45 to support the central part of the first arc-shaped portion 51a. The area in which the first arc-shaped portion 51a is provided may be 90 degrees or more as a central angle around the central axis L.

[0031] The second guide member 52 includes a second arc-shaped portion 52a extending along the outer edge of the wafer W supported by the support portion 43, a pair of second end support portions 52b extending inward from the corner between the second frame member 46 and a pair of third frame members 47 to support both ends of the second arc-shaped portion 52a, and a second central support portion 52c provided in the center of the second frame member 46 to support the central part of the second arc-shaped portion 52a. The area in which the second central support portion 52c is provided may be 90 degrees or more as a central angle around the central axis L.

[0032] These first guide members 51 and second guide members 52 form a flow path for inert gas in the container body 10. The flow path configuration of the container body 10 will be described in more detail with reference to Figures 7 and 8. As shown in Figure 7, the bottom plate 30 has an inlet hole 31 that penetrates the bottom plate 30 in the vertical direction. In a plan view, the inlet hole 31 is located close to the second frame member 46 of the outer frame 41. Also, on the upper surface of the bottom plate 30 (the inner surface facing the inside of the container body 10), a circular inlet flow path recess 32 is formed to allow the flow of inert gas. The bottom plate 30 is provided with a circular resin chamber 35 that covers the inlet flow path recess 32. Two openings 36 are formed in a part of the cylindrical portion that hangs down from the disc portion. The bottom plate 30 has two openings 33 and two gas introduction spaces 34 formed at positions corresponding to the two openings 36. Through these openings 36, 33 and gas introduction space 34, the inert gas introduction flow F0 (see Figure 8) is guided to the first flow path P1 and becomes an upward flow F1. The configuration of the bottom plate 30 is not limited to the above configuration. The bottom plate 30 introduces inert gas from an external pipe or the like through an inlet hole 31 and flows the inert gas into the introduction flow path recess 32. In the container body 10, the first guide member 51 is located on the opposite side from the inlet hole 31 in the first direction D1. Figure 8 shows the inert gas introduction flow F0 flowing horizontally in the introduction flow path recess 32.

[0033] When multiple cell rings 40 are stacked to form the container body 10, a first channel P1 is formed by the first guide member 51 and the first frame member 45 (see also Figure 9). The first channel P1 can be described as a space formed by a collection of multiple first openings 51e between the first frame member 45 and the first guide member 51. The first channel P1 guides the inert gas from the inlet hole 31 upward. In addition, a horizontal channel PH is formed between two wafers W supported by any two cell rings 40 in the containment space S of the container body 10 (see Figure 3). The horizontal channel PH guides the inert gas from the first channel P1 in a horizontal direction. When multiple cell rings 40 are stacked to form the container body 10, a second channel P2 is formed by the second guide member 52 and the second frame member 46 (see also Figure 9). The second channel P2 can be described as a space formed by a collection of multiple second openings 52e between the second frame member 46 and the second guide member 52. The second channel P2 guides the inert gas downward from the horizontal channel PH. Figure 8 shows the upward flow of inert gas F1 in the first channel P1, the horizontal flow of inert gas FH in the horizontal channel PH, and the downward flow of inert gas F2 in the second channel P2.

[0034] The structure (gap) connecting the first channel P1 and the horizontal channel PH is formed by the vertically adjacent first guide members 51. The structure (gap) connecting the horizontal channel PH and the second channel P2 is formed by the vertically adjacent second guide members 52. These connecting structures will be explained with reference to Figure 9. Figure 9 is a cross-sectional view showing the first frame member 45, the second frame member 46, the first guide member 51, and the second guide member 52. As shown in Figure 9, in the two cell rings 40 stacked vertically, a first gap C1 in the vertical direction is formed between the lower first guide member 51 and the upper first guide member 51. That is, a first gap C1 is formed between the vertically aligned first arc-shaped portions 51a (first inner edges). Also, a second gap C2 in the vertical direction is formed between the lower second guide member 52 and the upper second guide member 52. In other words, a second gap C2 is formed between the vertically aligned second arc-shaped portions 52a (first inner edges). Here, for example, the second gap C2 is equal to the first gap C1. In the container body 10, the first inner edges 45a of two adjacent first frame members 45, the second inner edges 46a of two adjacent second frame members 46, and the third inner edges 47a of two adjacent third frame members 47 (see Figure 11) are in linear contact (line contact) in the vertical direction, thereby ensuring a certain degree of airtightness (sealing) in the container body 10. The first inner edges 45a, the second inner edges 46a, and the third inner edges 47a are part of the rectangular frame-shaped bulging frame portion 42. On the other hand, the first guide member 51 and the second guide member 52 have a first gap C1 and a second gap C2, respectively.

[0035] Next, with reference to Figures 4-8, 10, and 11, the measures to prevent the rise in oxygen concentration provided in the wafer container 5 will be described. As shown in Figures 4 and 5, each cell ring 40 includes a pair of third guide members 53 provided within the outer frame 41 and arranged opposite each other in the second direction D2. As shown in Figures 5 and 6, the third guide members 53 are provided in a range corresponding only to a portion of the third frame member 47, including the central part, and protrude inward from the outer frame 41. The third frame member 47 may be formed to bulge slightly upward and inward from the outermost edge of the outer frame 41, for example (see also Figure 11). The third guide members 53 may extend horizontally to a height similar to that of the third frame member 47.

[0036] The pair of third guide members 53 may be symmetric with respect to the central axis L. The pair of third guide members 53 may be symmetric with respect to a plane that includes the central axis L and is parallel to the first direction D1.

[0037] Each third guide member 53 includes a third arc-shaped portion 53a extending along the outer edge of the wafer W supported by the support portion 43, a pair of third end support portions 53b extending inward from the third frame member 47 to the outer frame 41 to support both ends of the third arc-shaped portion 53a, and a third central support portion 53c provided in the central part of the third frame member 47 to support the central part of the third arc-shaped portion 53a.

[0038] The third guide member 53 includes a third arc-shaped portion 53a (third inner edge) that extends along the outer edge of the wafer W supported by the support portion 43 when viewed from the direction of the central axis L. The support portion 43 is positioned between the first guide member 51 and the second guide member 52 and the pair of third guide members 53. The first guide member 51 and the second guide member 52 and the pair of third guide members 53 form a circular shape that surrounds the outer edge of the wafer W supported by the support portion 43 when viewed from the direction of the central axis L. More specifically, the first arc-shaped portion 51a and the second arc-shaped portion 52a and the pair of third arc-shaped portions 53a form a circular shape that surrounds the outer edge of the wafer W supported by the support portion 43 when viewed from the direction of the central axis L. In this specification, the phrase "when viewed from the direction of the central axis L" has the same meaning as "when viewed from above (in the vertical direction)".

[0039] As shown in Figure 6, the area in which the third guide member 53 is provided is an angle θ as the central angle around the central axis L. The angle θ may be, for example, 60 degrees or less, or 45 degrees or less. The range of the angle θ may be determined considering the arrangement of the support parts 43. The third guide member 53 is positioned to avoid the pair of support parts 43 provided on one third frame member 47. Also, when viewed in terms of the length in the first direction D1, the area in which the third guide member 53 is provided is limited to a length La, which is a part of the total length L1 of the outer frame 41 in the first direction D1. The ratio of length La to length L1 may be 60% or less, or 50% (half) or less.

[0040] As shown in Figures 7, 8, and 10, when a container body 10 is formed by stacking multiple cell rings 40, a pair of flow-restricting spaces P3 are formed by a pair of third guide members 53. The flow-restricting space P3 can be described as a space formed by a collection of multiple third openings 53e between the third frame member 47 and the third guide member 53. As shown in Figure 11, in two cell rings 40 stacked vertically, a third gap C3 in the vertical direction is formed between the lower third guide member 53 and the upper third guide member 53. The third gap C3 is provided to prevent the outer frame 41 from lifting up while ensuring contact between the outer frame 41s in the bulging frame portion 42 (specifically, contact between the first inner ends 45a, the second inner ends 46a, and the third inner ends 47a). That is, the third gap C3 is formed between the vertically aligned third arc-shaped portions 53a (third inner edges). This third gap C3 is smaller than the first gap C1 in the first guide member 51 and smaller than the second gap C2 in the second guide member 52. The ratio of the third gap C3 to the first gap C1 may be 50% (half) or less. Also, the ratio of the third gap C3 to the second gap C2 may be 50% (half) or less. Therefore, the inert gas flowing through the horizontal channel PH is less likely to enter the third gap C3. In the container body 10, the aggregate of the third arc-shaped portion 53a forms a restricting wall surface 19 that restricts the deviation of the inert gas in the horizontal channel PH in the second direction D2. On the other hand, the aggregate of the first arc-shaped portion 51a forms an inflow wall surface 11 that allows the inert gas to flow into the horizontal channel PH. The aggregate of the second arc-shaped portion 52a forms an outflow wall surface 12 that allows the inert gas to flow out from the horizontal channel PH.

[0041] As explained above, in the wafer container 5, the container body 10 is restricted from the inert gas in the horizontal flow channel PH departing in the second direction D2 by a pair of third guide members 53. In the wafer container 5 shown in Figure 10, the inert gas flowing through the horizontal flow channel PH tends to flow in the direction perpendicular to or across the plane of the paper, but deviation of the inert gas in the left-right direction (deviation into the flow restriction space P3) is unlikely to occur.

[0042] In the wafer container 5 of this embodiment, when the inert gas flows through the horizontal channel PH, the third guide member 53 restricts the inert gas from diverting in the second direction D2. Therefore, the concentration of the inert gas near the wafer W is maintained. As a result, the oxygen concentration near the wafer W can be kept low.

[0043] In the wafer container 5, inert gas flows into the horizontal flow path PH through the first gap C1, and the inert gas that has flowed through the horizontal flow path PH flows out through the second gap C2. The third guide member 53 restricts deviation in the second direction D2, and the first gap C1 and second gap C2 create a flow toward the first direction D1 and a flow that spreads throughout the entire space between the wafers W.

[0044] The third gap C3 in the third guide member 53 is smaller than both the first gap C1 and the second gap C2. The inert gas flowing in through the first gap C1 is less likely to escape from the pair of third gaps C3 located on both sides of the second direction D2, and is more likely to flow out through the second gap C2. Therefore, a more suitable flow of inert gas is created in the horizontal flow path PH.

[0045] The pair of third guide members 53 include a pair of third arc-shaped portions 53a that extend along the outer edge of the wafer W when viewed from the direction of the central axis L. Therefore, the inert gas can be reliably introduced to the outer edge of the wafer W, and the leakage of the inert gas in the second direction D2 is reliably prevented.

[0046] Furthermore, the aggregate of the pair of third arc-shaped portions 53a forms a restricting wall surface 19 that restricts the leakage of inert gas in the horizontal flow channel PH in the second direction D2. Thus, inert gas can be reliably introduced to the outer edge of the wafer W, and leakage of inert gas in the second direction D2 is reliably prevented. The restricting wall surface 19 formed on the container body 10 guides or retains the inert gas only in the region necessary to maintain the cleanliness of the wafer W.

[0047] In this embodiment, multiple cell rings 40 can be prepared and stacked vertically to form a container body 10. The support portion 43 supports the wafer W. The third guide member 53 can also restrict the inert gas from escaping in the second direction D2. Therefore, while the wafer W is stored in the container body 10, the concentration of the inert gas near the wafer W is maintained. As a result, the oxygen concentration near the wafer W can be kept low.

[0048] The first guide member 51, the second guide member 52, and the pair of third guide members 53 form a circular shape that surrounds the outer edge of the wafer W when viewed from the direction of the central axis L. Therefore, in the container body 10, which is made up of stacked cell rings 40, the inert gas is guided or held only in the region necessary to maintain the cleanliness of the wafer W.

[0049] Figure 12 shows the results of an analysis of the oxygen concentration (distribution) inside the wafer container 5 of this disclosure. Figure 13 shows the results of an analysis of the oxygen concentration (distribution) inside a conventional wafer container 200. In this analysis, a simulation was performed in which an inert gas was flowed inside both containers in an atmosphere in which oxygen was present. As shown in Figures 12 and 13, in the wafer container 5, the low oxygen concentration region is expanded by the installation of the third guide member 53. On the other hand, in the wafer container 200, which does not have the third guide member 53, the low oxygen concentration region is narrowed. This is thought to be due to the deviation (diffusion) of the inert gas in the second direction D2.

[0050] Although embodiments of the present disclosure have been described above, the present invention is not limited to the above embodiments. For example, the shapes and sizes of the first guide member 51, the second guide member 52, and the third guide member 53 can be changed as appropriate. The position of the inlet hole 31 in the bottom plate 30 can also be changed. The number of stacked cell rings 40 is not particularly limited. [Explanation of Symbols]

[0051] 5...wafer container, 10...container body, 11...inlet wall, 12...outlet wall, 19...regulating wall, 20...top plate, 30...bottom plate, 31...inlet hole, 40...cell ring (wafer support), 41...outer frame, 43...support part, 45...first frame member, 46...second frame member, 47...third frame member, 51...first guide member, 52...second guide member, 53...third guide member, 53a...third arc-shaped part (third inner edge), C1...first gap, C2...second gap, C3...third gap, D1...first direction, D2...second direction, L...central axis, P1...first flow path, P2...second flow path, P3...flow regulating space, PH...horizontal flow path, W...wafer.

Claims

1. A container body for housing wafers is formed by multiple wafer supports stacked in the vertical direction, A top plate provided on the container body, The container comprises a bottom plate provided below the main body of the container, having an inlet hole for inert gas formed therein, Each of the wafer supports is The outer frame forming the side surface of the container body, A support portion that protrudes inward from the outer frame and supports the wafer, A first guide member and a second guide member are provided within the outer frame and are arranged opposite each other in a first direction perpendicular to the vertical direction, It includes a pair of third guide members provided within the outer frame and arranged opposite to each other in a second direction perpendicular to both the vertical direction and the first direction, The container body is A first flow path formed by the first guide member, which guides the inert gas from the inlet hole upward, A horizontal channel for guiding the inert gas from the first channel horizontally, It has a second channel formed by the second guide member, which guides the inert gas from the horizontal channel downward, In the container body, the pair of third guide members restrict the inert gas in the horizontal flow path from escaping in the second direction. In the two wafer supports stacked in the vertical direction, a first gap is formed between the lower first guide member and the upper first guide member, and a second gap is formed between the lower second guide member and the upper second guide member. In the two wafer supports stacked in the vertical direction, a third gap is formed between the lower third guide member and the upper third guide member, A wafer container in which the third gap is smaller than the first gap and smaller than the second gap.

2. The wafer container according to claim 1, wherein the pair of third guide members include a pair of inner edges that, when viewed from above, extend along the outer peripheral edge of the wafer supported by the support portion.

3. The pair of third guide members, when viewed from above, include a pair of inner edges that extend along the outer peripheral edge of the wafer supported by the support portion, The wafer container according to claim 1 or 2, wherein in the container body in which the plurality of wafer supports are stacked, the pair of inner edge aggregates form a restricting wall surface that restricts the leakage of the inert gas in the horizontal channel in the second direction.

4. A wafer support that supports a wafer, An outer frame formed to surround the wafer, A plurality of support parts that protrude inward from the outer frame and support the wafer, A first guide member and a second guide member are provided within the outer frame and are arranged opposite each other in a first direction perpendicular to the vertical direction, It includes a pair of third guide members provided within the outer frame and arranged opposite to each other in a second direction perpendicular to both the vertical direction and the first direction, When the wafer supports are stacked, a first channel is formed by the first frame member of the outer frame and the first guide member, and a second channel is formed by the second frame member of the outer frame and the second guide member. The support portion is positioned between the first guide member and the second guide member and the pair of third guide members. In the two wafer supports stacked in the vertical direction, a first gap is formed between the lower first guide member and the upper first guide member, and a second gap is formed between the lower second guide member and the upper second guide member. In the two wafer supports stacked in the vertical direction, a third gap is formed between the lower third guide member and the upper third guide member, The wafer support wherein the third gap is smaller than the first gap and smaller than the second gap.

5. The wafer support according to claim 4, wherein the first guide member, the second guide member, and the pair of third guide members have a circular shape that surrounds the outer edge of the wafer supported by the support portion when viewed from above.

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