Ceramic sintered body and plasma generation electrode

Abstract

To provide a technique for improving durability to thermal stress in a ceramic sintered compact.SOLUTION: A ceramic sintered body of the present invention comprises: a first specific element selected from five or six elements selected from titanium (Ti), vanadium (V), zirconium (Zr), niobium (Nb), molybdenum (Mo), hafnium (Hf), tantalum (Ta), and tungsten (W); a second specific element selected from one element selected from yttrium (Y) and aluminum (Al); and carbon (C). The total of the first specific element, the second specific element, and the carbon element is 98 at% or more. The ceramic sintered body has multiple types of structures with different compositions, and one of the multiple types of structures has a solid solution containing at least three or more elements from the first specific element.SELECTED DRAWING: Figure 5

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