Observation device and method for observing workpieces

Abstract

To provide an observation device enabling detailed observation of a recess formed in a workpiece.SOLUTION: An observation device for observing a workpiece having a recess at a center part and having an annular reinforcement part surrounding the recess on an outer peripheral part, includes: a chuck table having a holding surface for holding the workpiece; and an imaging unit including an objective lens for imaging the workpiece held on the holding surface. The imaging unit images a lateral wall of the recess from a center side of the workpiece beyond the lateral wall, in a state that an optical axis of the objective lens is arranged so as to be inclined relative to a direction perpendicular to the holding surface.SELECTED DRAWING: Figure 5

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