Chamber apparatus and method for manufacturing electronic devices

JP7865945B2Active Publication Date: 2026-05-26GIGAPHOTON INC
View PDF 8 Cites 0 Cited by

Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
GIGAPHOTON INC
Filing Date
2022-01-27
Publication Date
2026-05-26

Smart Images

  • Figure 0007865945000001
    Figure 0007865945000001
  • Figure 0007865945000002
    Figure 0007865945000002
  • Figure 0007865945000003
    Figure 0007865945000003
Patent Text Reader

Abstract

A chamber device (CH) is provided with an inside housing (50) that includes a passage port through which light generated by excitation of a laser gas in an interior space passes; and an outside housing (70) that surrounds at least part of the inside housing (50) from sides in the traveling direction of the light. The chamber device (CH) is provided with a partition wall (80) disposed between the inside housing (50) and the outside housing (70) and secured to the inside housing (50) and the outside housing (70).
Need to check novelty before this filing date? Find Prior Art