Cleaning nozzle

Abstract

To provide a washing nozzle easily securing cleanliness after washing.SOLUTION: A washing nozzle 21 is attached to an opening part for washing, with a washing liquid, the inner wall surface of a hollow object to be washed on the upper part of which an opening part is provided, and includes: a fixation part attached to the opening part of the object to be washed; and a hollow nozzle body part extending downward from the fixation part. The nozzle body part is provided with a plurality of through holes, the washing liquid is supplied to the nozzle body part inserted into the inner part of the object to be washed via the opening part, and the washing liquid is discharged through the through holes. The lower end part of the nozzle body part is provided with a projecting part projecting downward to be formed into a conical shape or a polygonal-pyramidal shape.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] This invention relates to a cleaning nozzle. [Background technology]

[0002] Conventionally, cleaning nozzles have been used to clean the inner wall surface of hollow objects to be cleaned, such as tanks with an opening at the top. Among these types of cleaning nozzles, those configured to discharge cleaning liquid over a wide area in order to remove more of the target material adhering to the object to be cleaned are known. Known cleaning nozzles include fixed cleaning nozzles in which the head portion from which the cleaning liquid is discharged is fixedly positioned on the nozzle body and the head portion does not rotate relative to the nozzle body, and rotary cleaning nozzles in which the head portion of the nozzle body rotates while discharging the cleaning liquid. For example, Patent Document 1 below discloses a rotary cleaning nozzle in which the nozzle body is composed of a plurality of members including a liquid supply shaft and a rotating body rotatably attached to the tip of the liquid supply shaft, and the cleaning liquid supplied to the nozzle body is discharged from the rotating body. [Prior art documents] [Patent Documents]

[0003] [Patent Document 1] Patent No. 6926137 [Overview of the Initiative] [Problems that the invention aims to solve]

[0004] While methods have been considered to improve the cleanliness of containers after cleaning using cleaning nozzles, sufficient consideration has not been given to improving the cleanliness of the cleaning nozzle itself. If substances to be removed adhere to the outer surface of the cleaning nozzle after cleaning, these adhered substances may fall off and impair the cleanliness of the container. Therefore, the present invention aims to provide a cleaning nozzle that makes it easier to ensure cleanliness after cleaning. [Means for solving the problem]

[0005] In order to solve the above problems, the present invention aims to solve the above problems. A cleaning nozzle, which is attached to the opening at the top of a hollow object to be cleaned, for cleaning the inner wall surface of the opening with a cleaning solution, A fixing part attached to the opening of the object to be cleaned, It has a hollow nozzle body portion extending downward from the fixed portion, Multiple through holes are provided in the nozzle body. The cleaning liquid is supplied to the nozzle body inserted into the object to be cleaned through the opening, and the cleaning liquid is discharged through the through hole. The present invention provides a cleaning nozzle having a conical or polygonal pyramidal projection at the lower end of the nozzle body that protrudes downward. [Effects of the Invention]

[0006] According to the present invention, a cleaning nozzle can be provided that makes it easier to ensure cleanliness after cleaning. [Brief explanation of the drawing]

[0007] [Figure 1] Figure 1 is a schematic front view showing the usage of the cleaning nozzle in the reaction vessel. [Figure 2] Figure 2 is a schematic cross-sectional view showing the longitudinal section of the cleaning nozzle. [Figure 3] Figure 3 is a schematic cross-sectional view showing the longitudinal section of the head portion of the cleaning nozzle. [Figure 4] Figure 4 is a schematic enlarged view showing the connection between the fixing part of the cleaning nozzle and the nozzle body. [Figure 5A] Figure 5A is a schematic enlarged view showing the joined state of the components that make up the nozzle body of the cleaning nozzle. [Figure 5B] Figure 5B is a schematic enlarged view showing the joined state of the components that make up the nozzle body of the cleaning nozzle. [Figure 6]FIG. 6 is a schematic front view showing the head portion of the cleaning nozzle. [Figure 7] FIG. 7 is a schematic front view showing the head portion of the cleaning nozzle of another aspect. [Figure 8A] FIG. 8A is a schematic front view showing the cleaning nozzle of another aspect. [Figure 8B] FIG. 8B is a schematic front view showing the cleaning nozzle of another aspect. [Figure 9] FIG. 9 is a schematic front view showing the head portion of the cleaning nozzle.

MODE FOR CARRYING OUT THE INVENTION

[0008] Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following, the case where the object to be cleaned cleaned by the cleaning nozzle of the present embodiment is the reaction tank in the reaction apparatus will be taken as an example to describe the embodiments of the present invention. The reaction tank of the present embodiment is a container with a cleaning function having a function of cleaning the inside.

[0009] FIG. 1 shows the reaction apparatus 1 in the present embodiment. The reaction apparatus 1 includes a reaction tank 10 which is the container with the cleaning function. The reaction tank 10 includes a container body (hereinafter also referred to as "tank body 100") having a hollow shape and an internal space capable of accommodating the object to be processed. The reaction tank 10 further has a nozzle portion (hereinafter also referred to as "container nozzle 110") extending in a cylindrical shape upward from the tank body 100. The container nozzle 110 constitutes an opening at the upper part of the reaction tank 10 and opens upward.

[0010] The internal space of the tank body 100 is in communication with the internal space of the container nozzle 110. The reaction tank 10 of this embodiment has a plurality of container nozzles 110 and is equipped with a plurality of openings at the top. In the reaction tank 10 of this embodiment, the internal space of the tank body 100 is in communication with the internal space of each of the plurality of container nozzles 110. In other words, the internal space of one of the plurality of container nozzles 110 is in communication with the internal space of another container nozzle 110 via the internal space of the tank body 100 (hereinafter also referred to as the "first space 100c").

[0011] In this embodiment, the reaction apparatus 1 is equipped with a cleaning device 20 for cleaning the inner wall surface 100w of the tank body 100 with a cleaning solution. The cleaning device 20 is equipped to spray the cleaning solution not only on the tank body 100 but also on the inner wall surface 110w of the container nozzle 110, etc.

[0012] In this embodiment, the reaction apparatus 1 further includes a stirring device 30 for stirring the material to be processed inside the tank body 100. The cleaning device 20 is provided in the reaction apparatus 1 so that the stirring device 30 can also be cleaned.

[0013] In this embodiment, the reaction apparatus 1 performs chemical treatment on a liquid or granular material to be treated contained in the first space 100c. The reaction vessel 10, which is a container with a cleaning function in this embodiment, can be used as equipment and / or ancillary equipment for a chemical process that changes the chemical substances or compounds contained in the material to be treated in some way. The substances supplied to the reaction vessel 10 to change the chemical substances or compounds may be not only other chemical substances or compounds that can react with the chemical substance or compound to be changed, but also at least one of, for example, thermal energy, light energy, electrical energy, magnetic energy, and kinetic energy.

[0014] In the chemical process in the reaction vessel 10, one or more other chemical substances or compounds may be supplied to the material to be treated, along with one or more of the above-mentioned energies. When the reaction vessel 10 of this embodiment is used as equipment and / or ancillary equipment for a chemical process, the material to be treated may consist only of chemical substances or compounds, or it may include a solvent or dispersion medium capable of dissolving the chemical substances or compounds.

[0015] The material to be processed may be food or beverages containing the chemical substance or compound to be altered as one component, or it may be an organic composition (plastic composition, rubber composition, pharmaceutical, etc.) or inorganic composition (glass composition, metal composition, ceramic composition, etc.) containing the chemical substance or compound as one component. The reaction vessel 10 of this embodiment is used, for example, in equipment and / or ancillary facilities in fields such as pharmaceutical manufacturing, food manufacturing, and semiconductor manufacturing. The reaction vessel 10 may be used not only in a reaction apparatus in which a chemical reaction is applied to the material to be processed, but also in an apparatus that performs processing other than chemical reactions. The reaction vessel 10 may be used in a processing apparatus (mixing apparatus, stirring apparatus, filtering apparatus, drying apparatus, etc.) in which physical processing such as mixing, stirring, filtering, and drying is performed. That is, in the chemical process carried out in the reaction vessel 10, both chemical reactions and physical processing may be performed, or only one of them may be performed.

[0016] The tank body 100 in this embodiment is vertical. The tank body 100 comprises a bottom wall portion 102 which is circular in plan view, a circumferential side wall portion 103 which extends upward in a cylindrical shape from the outer peripheral edge of the bottom wall portion 102, and a top wall portion 104 which is circular in plan view and is positioned opposite the bottom wall portion 102 in the vertical direction and closes the upper end of the circumferential side wall portion 103.

[0017] In this embodiment, the central axis Cx0 of the tank body 100 extends vertically through the center of the cylindrical circumferential wall portion 103. The tank body 100 is positioned in the reaction apparatus 1 such that the orientation of the central axis Cx0 is vertical.

[0018] The reaction tank 10 of this embodiment has three container nozzles 110 that extend upward in a cylindrical shape from three openings provided in the ceiling wall 104. The three container nozzles 110 are arranged side by side from one end to the other in the left-right direction of the ceiling wall 104. The first container nozzle 110 (hereinafter also referred to as "first container nozzle 110a"), located on the right side in the front view of Figure 1, is fitted with the cleaning device 20. The second container nozzle 110 (hereinafter also referred to as "second container nozzle 110b"), located in the center, is fitted with the stirring device 30. The third container nozzle 110 (hereinafter also referred to as "third container nozzle 110c"), located on the left side in the front view of Figure 1, is fitted with a lid that can be opened and closed and has a viewing window (glass window).

[0019] The reaction vessel 10 of this embodiment has three container nozzles 110 as described above. The internal space of the reaction vessel 10 is composed of a first space 100c, which is the internal space of the vessel body 100; a second space 110ac, which is the internal space of the first container nozzle 110a; a third space 110bc, which is the internal space of the second container nozzle 110b; and a fourth space 110cc, which is the internal space of the third container nozzle 110c. The second space 110ac, the third space 110bc, and the fourth space 110cc are each connected to the first space 100c so as to extend upward in a cylindrical shape from the upper end of the first space 100c.

[0020] The first space 100c is defined by the inner wall surface of the tank body 100. In other words, the inner wall surface of the tank body 100 is an exposed surface that is exposed to the first space 100c. The reaction tank 10 in this embodiment may be made of metal such as stainless steel. The reaction tank 10 may be a glass-lined product in which a glass lining is applied to the inside of a metal base material in order to be suitably used for the various processes described above. The glass-lined product may have a coating of fluororesin or the like applied to the glass covering the base material. That is, the inner wall surface 100w of the tank body 100 and the inner wall surface 110w of the container nozzle 110 that are exposed to the first space 100c and the second space 110ac may be a metal surface, a glass surface, or a resin surface.

[0021] Each of the three container nozzles 110 extending upward from the tank body 100 is provided with a cylindrical portion extending upward from the opening in the ceiling wall portion 104 and a flange portion extending radially outward from the upper end of the cylindrical portion. The flange portion is located at the upper end of the container nozzle 110 and defines the opening edge at the upper end of the container nozzle 110.

[0022] The opening in the ceiling wall portion 104 at the lower end of the first container nozzle 110a is located inside the outer peripheral edge of the ceiling wall portion 104 (the upper edge of the circumferential side wall portion 103). Therefore, the position of the inner wall surface 110w of the first container nozzle 110a in the radial direction of the tank body 100 is closer to the central axis Cx0 than the inner wall surface of the circumferential side wall portion 103 of the tank body 100. Similarly, the third container nozzle 110c is located inside the outer peripheral edge of the ceiling wall portion 104 (the upper edge of the circumferential side wall portion 103), and its inner wall surface is located closer to the central axis Cx0 than the circumferential side wall portion 103.

[0023] The ceiling wall portion 104 of this embodiment is dome-shaped and bulges upward. Therefore, the central part of the ceiling wall portion 104 is higher in the vertical direction than the outer periphery. Consequently, the lower edge of the first container nozzle 110a is located lower than the lower edge of the second container nozzle 110b, which is located in the central part. Furthermore, the lower edge of the first container nozzle 110a has different vertical positions on the radially outer and inner (center side of the tank) sides of the tank body 100, with the radially outer side being lower. More specifically, the lower edge of the first container nozzle 110a slopes downward as it moves radially outward from the tank body 100. This downward slope of the lower edge from the central part to the outer periphery of the ceiling wall portion 104 applies not only to the first container nozzle 110a but also to the third container nozzle 110c.

[0024] In this embodiment, the ceiling wall portion 104 is provided so as to slope downward radially outward from the first container nozzle 110a and the third container nozzle 110c. At least a portion of the cleaning liquid that flows down the inner wall surface 110w of the first container nozzle 110a and the third container nozzle 110c is supplied to the circumferential wall portion 103 via the ceiling wall portion 104 and is used to clean the circumferential wall portion 103 as well.

[0025] The first container nozzle 110a is positioned such that the direction in which the central axis (hereinafter also referred to as "first nozzle central axis Cx1") passing through the center of its cylindrical portion (hereinafter also referred to as "first nozzle cylindrical portion 110a1") extends is vertical. Therefore, the flange portion of the first container nozzle 110a (hereinafter also referred to as "first nozzle flange portion 110a2") is provided to extend horizontally in this embodiment.

[0026] The cylindrical portion of the second container nozzle 110b (hereinafter also referred to as "second nozzle cylindrical portion 110b1") has a central axis (hereinafter also referred to as "second nozzle central axis Cx2") that extends vertically, similar to the first nozzle cylindrical portion 110a1. Therefore, the flange portion of the second container nozzle 110b (hereinafter also referred to as "second nozzle flange portion 110b2") is also provided at the upper end of the flange portion so as to extend horizontally, similar to the first nozzle flange portion 110a2. In this embodiment, the second container nozzle 110b is provided in the reaction vessel 10 such that the second nozzle central axis Cx2 aligns with the central axis Cx0 of the vessel body 100 on a straight line.

[0027] As described above, the first container nozzle 110a and the second container nozzle 110b are erected vertically, while the third container nozzle 110c is provided to extend diagonally upward. More specifically, the central axis (hereinafter also referred to as "third nozzle central axis Cx3") passing through the center of the cylindrical portion of the third container nozzle 110c (hereinafter also referred to as "third nozzle cylindrical portion 110c1") has an inclination (for example, 5 to 45 degrees) with respect to the vertical direction in this embodiment. Therefore, the flange portion of the third container nozzle 110c (hereinafter also referred to as "third nozzle flange portion 110c2") is arranged with an inclination in the horizontal direction. The third container nozzle 110c is provided so that its central axis (third nozzle central axis Cx3) moves away from the central axis Cx0 of the tank body 100 as it extends upward, and is erected so as to be inclined outward.

[0028] In the reaction tank 10 of this embodiment, for example, the reaction treatment of the material to be treated is carried out in a batch manner. In the reaction apparatus 1 of this embodiment, the inner wall surface of the reaction tank 10 and other surfaces are exposed surfaces that are exposed to the internal space. If any foreign matter is attached to the equipment having such exposed surfaces, there is a risk that the foreign matter may be mixed into the material to be treated. Also, after treatment, some of the material to be treated may remain attached to the exposed surfaces. This attached material to be treated may become foreign matter in the next batch. Therefore, in this embodiment, a cleaning device 20 is provided on the first container nozzle 110a to prevent problems caused by foreign matter before or after treatment.

[0029] In the reaction tank 10 of this embodiment, the stirring device 30 is attached to the second container nozzle 110b. A stirring blade 31 for stirring the contents of the tank is inserted through the second container nozzle 110b. The stirring blade 31 has a stirring shaft 31a that extends downward through the center of the second nozzle cylindrical portion 110b1, and a stirring member 31b attached to the lower end of the stirring shaft 31a. The stirring shaft 31a is rotatable around its axis, and the stirring member 31b is fixed to the stirring shaft 31a so that it can rotate together with the stirring shaft 31a. In this embodiment, the stirring shaft 31a and the stirring member 31b can also be subject to cleaning by the cleaning device 20.

[0030] The cleaning device 20 attached to the first container nozzle 110a includes a cleaning nozzle 21 for performing cleaning with a cleaning solution on the inner wall surface of the tank body 100 that defines the first space 100c and the inner wall surface of the container nozzle 110 that defines the second space 110ac, and a liquid supply pipe 22 for supplying the cleaning solution to the cleaning nozzle 21 under pressure.

[0031] As shown in Figures 1 and 2, the cleaning nozzle 21 comprises a fixing portion 211 attached to the upper end of the first container nozzle 110a, and a hollow nozzle body portion 212 extending downward from the fixing portion 211. In the cleaning device 20 of this embodiment, the liquid supply pipe 22 is connected to the fixing portion 211 of the cleaning nozzle 21. The cleaning device 20 of this embodiment is configured such that the cleaning liquid supplied from the liquid supply pipe 22 flows through the fixing portion 211 and through the inside of the nozzle body portion 212, and is supplied to the tip of the nozzle body portion 212.

[0032] The fixing portion 211 has an area in an axial view along the first nozzle central axis Cx1 that is larger than the upper opening area of ​​the first container nozzle 110a, and is fixed to the first container nozzle 110a so as to close the opening. Therefore, the wall surface defining the second space 110ac includes not only the inner wall surface 110a1s of the first nozzle cylindrical portion 110a1 of the first container nozzle 110a, but also the wall surface of the fixing portion 211, etc.

[0033] The fixed portion 211 of this embodiment includes a tubular connecting portion 2111 that penetrates the fixed portion 211 and extends the flow path of the cleaning liquid through the liquid supply pipe 22 to the reaction tank 10. The nozzle body portion 212, together with the connecting portion 2111, constitutes the flow path of the cleaning liquid and is provided to extend the flow path downward from the fixed portion 211.

[0034] In this embodiment, the nozzle body portion 212 extends downward from the fixed portion 211 through the second space portion 110ac, with its lower end located in the first space portion 100c. The nozzle body portion 212 may be arranged to extend vertically, or it may extend downward at an angle to the vertical. The nozzle body portion 212 has a hollow head portion 2122 that forms the lower end, and a pipe portion 2121 that extends cylindrically toward the head portion 2122 through the second space portion 110ac. As shown in Figure 3, the head portion 2122 is provided with a plurality of through holes TH that connect the internal space of the head portion 2122 to the external space (first space portion 100c). The head portion 2122 constitutes the end of the flow path for the cleaning liquid that flows through the fixed portion 211 and the pipe portion 2121. The head portion 2122 is provided such that when cleaning fluid is supplied at a predetermined pressure, the cleaning fluid is forcefully discharged from the through-hole TH, forming a streaky flow (straight flow) of cleaning fluid that passes through the internal space of the tank body 100 and extends to a specific position on the inner wall surface 100w.

[0035] In this embodiment, the nozzle body 212 has a first direction which is the direction of insertion into the tank body 100, and this first direction is vertical. The cleaning nozzle 21 in this embodiment has a central axis C21 which is parallel to the first direction and passes through the center of the cleaning nozzle 21. The cleaning nozzle 21 has a longitudinal direction XL along the central axis C21 and a radial direction XD perpendicular to the central axis C21.

[0036] In this embodiment, the cleaning nozzle 21 is mounted on the first container nozzle 110a such that its central axis C21 aligns with the first nozzle central axis Cx1 on a straight line. Therefore, the cleaning nozzle 21 is positioned such that the head portion 2122 is located at the lower end, and the lower edge of the head portion 2122 is the lowest end of the cleaning nozzle 21.

[0037] In this embodiment, the cleaning nozzle 21 is configured such that when the cleaning liquid discharged from the through hole TH is directly supplied to the outer surface of the nozzle body 212, or bounces off a wall or the like defining the second space 110ac and is supplied to the outer surface of the nozzle body 212, the cleaning liquid can flow down along the outer surface of the nozzle body 212. In this embodiment, the cleaning nozzle 21 is configured such that at least a portion of the cleaning liquid supplied to the outer surface of the nozzle body 212 in this manner can fall from the lower edge of the nozzle body 212 without ever leaving the outer surface of the nozzle body 212. In this embodiment, the cleaning nozzle 21 can clean itself during cleaning even if there is an object to be treated adhering to its outer surface before cleaning begins, exhibiting high self-cleaning performance.

[0038] In this embodiment, the cleaning nozzle 21 is designed to have enhanced self-cleaning properties by not forming steps or recesses on the outside of the nozzle body 212, as will be described in detail later. In this embodiment, it is advantageous for achieving high self-cleaning properties if surfaces perpendicular or acute to the central axis C21 of the cleaning nozzle 21, which extends vertically, are not formed on the outer surface of the nozzle body 212. Therefore, in this embodiment, the outer surface of the nozzle body 212 of the cleaning nozzle 21 has a continuous surface from the pipe portion 2121 to the lower end surface of the head portion 2122, where the normal extending towards the space is oriented away from the central axis C21 of the cleaning nozzle 21. Such a cleaning nozzle 21 will be described below with specific examples.

[0039] The cleaning nozzle 21 of this embodiment is a fixed cleaning nozzle, in which the pipe portion 2121 joined to the fixed portion 211 is positioned so as to be fixed relative to the fixed portion 211, and the position of the head portion 2122 relative to the pipe portion 2121 is also fixed. Therefore, in the cleaning nozzle 21 of this embodiment, the position of the through hole TH provided in the head portion 2122 is fixed relative to the pipe portion 2121. The cleaning nozzle 21 of this embodiment is used for cleaning with the position of the through hole TH fixed inside the reaction tank 10. In addition, the cleaning nozzle 21 of this embodiment is used with the direction of discharge of the cleaning liquid through the through hole TH fixed.

[0040] As will be described later, the cleaning nozzle 21 of this embodiment may be a rotary cleaning nozzle. That is, the cleaning nozzle 21 of this embodiment may be a rotary cleaning nozzle in which the head portion 2122 rotates around the central axis of the pipe portion 2121.

[0041] As described above, the position of the lower edge 110ae of the first container nozzle 110a, on which the cleaning nozzle 21 is located, differs between the radially inner and outer sides of the tank body 100. Of the lower edge of the first container nozzle 110a, the part that is furthest inward in the radial direction of the tank body 100 is at the highest position, while the part that is furthest outward in the radial direction is at the lowest position. That is, the lower edge 110ae of the first container nozzle 110a has a height difference and has an uppermost part 110ae1 that is located at the highest point in the vertical direction and a lowermost part 110ae2 that is located at the lowest point. The head portion 2122 may be located partly or entirely below the uppermost part 110ae1 of the first container nozzle 110a, or below the lowermost part 110ae2.

[0042] In this embodiment, the cleaning nozzle 21 is provided with the through-hole TH not only in the head portion 2122 but also in the pipe portion 2121. That is, the cleaning nozzle 21 in this embodiment is configured to allow the cleaning liquid supplied to the nozzle body portion 212 through the fixing portion 211 to be discharged not only from the head portion 2122 but also from the pipe portion 2121.

[0043] The fixing portion 211 of this embodiment has a disc-shaped flange portion whose plate surface is parallel to the radial direction XD. The fixing portion 211 closes the upper opening of the first container nozzle 110a such that the lower surface of the flange portion is exposed to the second space portion 110ac. Therefore, the cleaning nozzle 21 of this embodiment is configured so that a portion of the cleaning liquid can be sprayed onto the outer surface of the nozzle body portion 212 by supplying the cleaning liquid to the fixing portion 211.

[0044] To describe the fixing portion 211 in detail, the fixing portion 211 of this embodiment has multiple flange portions, namely a first flange portion 2112 and a second flange portion 2113. The first flange portion 2112 and the second flange portion 2113 are arranged such that the central axis C21 of the cleaning nozzle 21 passes through their respective centers, and are spaced apart in the longitudinal direction XL. The fixing portion 211 is provided with a connecting portion 2111 between the first flange portion 2112, which is positioned above, and the second flange portion 2113, which is positioned below, so as to connect their centers together.

[0045] The second flange portion 2113 has a larger diameter than the upper opening of the first container nozzle 110a and is fixed to the first container nozzle 110a so as to close the opening of the first container nozzle 110a from the outside (top). More specifically, the second flange portion 2113 in the fixing portion 211 of this embodiment corresponds to the outer diameter of the first nozzle flange portion 110a2 of the first container nozzle 110a. In this embodiment, the second flange portion 2113 and the first container nozzle 110a are flange-jointed. In this embodiment, a gasket material may be interposed between the second flange portion 2113 and the flange portion (first nozzle flange portion 110a2) of the first container nozzle 110a.

[0046] The connecting portion 2111, the first flange portion 2112, and the second flange portion 2113 each have a through hole that penetrates through their center in the longitudinal direction XL, and these through holes are connected in the longitudinal direction to form a flow path for the cleaning fluid at the base end side (upstream side) of the cleaning nozzle 21. The first flange portion 2112 is located above the second flange portion 2113 and is disc-shaped with a smaller diameter than the second flange portion 2113. The connecting portion 2111 is cylindrical with an outer diameter smaller than that of the first flange portion 2112. In other words, the fixing portion 211 of this embodiment has a bobbin shape with two flange portions extending radially XD (outward) from both ends of a tubular connecting portion 2111 that extends in the longitudinal direction XL.

[0047] The fixing portion 211 of this embodiment is composed of a composite member comprising a base body 211a, which is a metal member, and a cover material 211b, which is a resin member. Each of the base body 211a and the cover material 211b has a bobbin shape with a cylindrical tubular portion and two flange portions extending outward from both ends of the tubular portion. In the connecting portion 2111, the tubular portion 211a1 of the base body 211a and the tubular portion 211b1 of the cover material 211b form a double-tube structure with the cover material 211b positioned on the inside. In the first flange portion 2112 and the second flange portion 2113, the flange portions 211b2 and 211b3 of the cover material 211b cover the flange portions 211a2 and 211a3 of the base body 211a from the outside (upstream and downstream sides).

[0048] The substrate 211a can be made of a metal with excellent corrosion resistance, such as stainless steel, nickel-based alloy, or titanium alloy. The cover material 211b can be made of a resin composition containing resins such as fluororesins such as polytetrafluoroethylene (PTFE), polychlorotrifluoroethylene (PCTFE), tetrafluoroethylene-perfluoroalkoxy ether copolymer (PFA), tetrafluoroethylene-hexafluoropropylene copolymer (FEP), ethylene-tetrafluoroethylene copolymer (ETFE), and ethylene-chlorotrifluoroethylene copolymer (ECTFE); silicone resins; polyamide resins such as polyamide 6, polyamide 66, polyamide 610, and polyamide 612; and polyolefin resins such as polypropylene.

[0049] In particular, when the cover material is composed of a fluororesin composition containing fluororesin such as PTFE, it is preferable not only because it has excellent chemical resistance and heat resistance, but also because it can reduce surface free energy and is less likely to cause deposits on the substrate 211a. The resin composition may also contain inorganic fillers such as calcium carbonate, talc, titania, zirconia, alumina, silica, carbon black, and short fibers (cellulose, polyamide, polyetheretherketone, cotton, hemp, metal fibers, etc.).

[0050] At the base end (upper side) of the fixing portion 211, the tubular portion 211b1 of the cover material 211b protrudes further towards the base than the tubular portion 211a1 and flange portion 211a2 of the base body 211a. The flange portion 211b2 of the cover material 211b, which extends outward from this protruding portion, covers the flange portion 211a2 of the base body 211a from the base end side. Similarly, at the tip end of the fixing portion 211, the tubular portion 211b1 of the cover material 211b protrudes further towards the tip (lower side) than the tubular portion 211a1 and flange portion 211a3 of the base body 211a. Furthermore, the flange portion 211b3 of the cover material 211b, which extends outward from this protruding portion, covers the flange portion 211a3 of the base body 211a from the tip side.

[0051] At the base end of the fixing portion 211, the flange portion 211a2 of the base body 211a is larger in diameter than the flange portion 211b2 of the cover material 211b, and the flange portion 211a2 of the base body 211a extends radially outward more than the flange portion of the cover material 211b. The outer edge of the first flange portion 2112 is defined by the flange portion 211a2 of the base body 211a.

[0052] Similar to the base end, the tip side of the fixing portion 211 has a flange portion 211a3 of the base body 211a that is larger in diameter than the flange portion 211b3 of the cover material 211b, and the flange portion 211a3 of the base body 211a extends radially outward beyond the flange portion 211b3 of the cover material 211b. The outer edge of the second flange portion 2113 is also defined by the flange portion 211a3 of the base body 211a, just as on the base end. The surface of the flange portion 211a3 constitutes the lower surface of the fixing portion 211 that is exposed to the second space 110ac.

[0053] The thickness of the flange portion 211a3 in the longitudinal direction XL (vertical direction) of the nozzle body portion 212 may increase towards the radially inward direction. That is, the lower surface of the fixing portion 211 may be an inclined surface that slopes downward toward the center. In this case, it is possible to prevent the cleaning liquid adhering to the lower surface of the fixing portion 211 from simply falling off, and to guide the cleaning liquid toward the radially center side and supply it to the upper end of the nozzle body portion 212. In other words, in such a case, the cleaning liquid supplied to the fixing portion 211 can be effectively used not only for cleaning the fixing portion 211 but also for cleaning the nozzle body portion 212.

[0054] The tip end of the fixing portion 211 is provided with a main body mounting portion 2114, which extends the tubular portion 211b1 of the cover material 211b toward the tip end. The main body mounting portion 2114 is made of the same resin as the cover material 211b and is integrated with the tubular portion 211b1 and the flange portions 211b2 and 211b3. In other words, the main body mounting portion 2114 is made up of a part of a single component (resin molded product) that makes up the tubular portion 211b1 and the flange portions 211b2 and 211b3.

[0055] The main body mounting portion 2114 is cylindrical with a larger inner diameter than the tubular portion 211b1. The main body mounting portion 2114 is used to join the nozzle main body portion 212 and the fixing portion 211. While the inner wall surface of the tubular portion 211b1 of the cover material 211b is a smooth surface, the inner wall surface of the main body mounting portion 2114 is threaded in a spiral pattern, with threads and grooves alternating from the base end to the tip end.

[0056] The pipe portion 2121 of the nozzle body portion 212 is attached to the body mounting portion 2114 at its base end. The pipe portion 2121 is cylindrical and has an inner diameter common to that of the tubular portion 211b1 of the cover material 211b. The pipe portion 2121 has threads on the outside of its base end so that it can be screwed into the body mounting portion 2114.

[0057] The pipe portion 2121 has different outer diameters on the side of the fixed portion 211 and the side of the head portion 2122. The fixed portion 211 has a larger diameter portion than the head portion 2122, and the head portion 2122 has a smaller diameter portion than the large diameter portion. The smaller diameter portion is connected to the head portion 2122, and a tapered portion is provided at the connection point between the smaller diameter portion and the large diameter portion to eliminate the step caused by the difference in outer diameter.

[0058] In this embodiment, the cleaning nozzle 21 itself can be cleaned by forcefully directing the cleaning liquid released from the through-hole TH onto the tank body 100 and the first container nozzle 110a, causing the cleaning liquid to bounce back and spray onto the fixing part 211 and the pipe part 2121. The discharge of cleaning liquid for self-cleaning of the cleaning nozzle 21 may be at a reduced flow rate (reduced discharge pressure), and it may be as if the cleaning liquid is simply flowing down the surface of the nozzle body part 212 from the through-hole TH.

[0059] In order to ensure cleanliness of the cleaning nozzle 21 after self-cleaning, it is preferable not to provide any steps or uneven surfaces on the nozzle body 212 where deposits tend to remain. Therefore, in this embodiment, the pipe portion 2121 is designed so that when the outer diameter is measured along the length direction XL until it reaches the head portion 2122, there is no abrupt change in outer diameter.

[0060] Right-angle corners where vertical and horizontal planes intersect are more prone to deposit accumulation than corners where the outer surfaces intersect at obtuse angles. Furthermore, even at corners where the outer surfaces intersect at right angles, if the horizontal plane extending radially outward from the corner is upward, the cleaning action of the cleaning solution is relatively effective. However, in areas where the horizontal plane is formed downward, the cleaning solution has difficulty reaching the horizontal plane, making it difficult to clean thoroughly. Therefore, the cleaning nozzle 21 of this embodiment is provided with a gentle taper at the point where the diameter narrows to prevent the formation of the latter type of horizontal plane. In addition, the cleaning nozzle 21 of this embodiment may be provided with a taper at the point where the diameter widens to prevent the formation of the former type of horizontal plane.

[0061] In this embodiment, the nozzle body 212 is fixed only to the main body mounting portion 2114 at the base end (upper side). The nozzle body 212 is mounted in the reaction tank 10 in a cantilevered state, with the base end being the fixed end and the tip end (lower side) being the free end. The main body mounting portion 2114 has a certain thickness up to the tip in order to firmly support the nozzle body 212. Therefore, the end face of the tip end of the main body mounting portion 2114 widens in the radial direction XD. The shape of the end face when viewed from the tip end to the base end in the direction of the central axis C21 is annular (donut-shaped). Furthermore, in this embodiment, when the cleaning nozzle 21 is simply attached to the main body mounting portion 2114, when it moves towards the tip along the outer circumferential surface of the main body mounting portion 2114, it has a step where it drops down one step towards the central axis C21 side once it exceeds the edge of the main body mounting portion 2114.

[0062] In the cleaning nozzle 21 of this embodiment, as shown in Figure 4, welding material F is used to build up the outer circumferential surface of the member constituting the nozzle body 212 on the lower side (tip side) so that a large step does not occur between the main body mounting portion 2114 and the nozzle body portion 212. The nozzle body portion 212 is made of resin, similar to the cover material 211b of the fixing portion 211. Since loosening may occur if the main body mounting portion 2114 and the nozzle body portion 212 are fixed by screwing alone, they may be screwed together and then further fixed with welding material or the like. In this embodiment, welding is performed so that the welding material F is heat-fused to the end face of the main body mounting portion 2114 and the outer circumferential surface of the member constituting the nozzle body portion 212 at the corner where the end face of the main body mounting portion 2114 and the outer circumferential surface of the member constituting the nozzle body portion 212 intersect.

[0063] The welding material can include a material that has high affinity with the constituent materials of the nozzle body 212 and the cover material 211b. If the components constituting the nozzle body 212 and the cover material 211b are made of a resin composition containing PTFE, it is preferable that the welding material F contains PFA. If the fixing part 211 and the nozzle body 212 are made entirely of metal, the welding material F can be a brazing material commonly used in electric welding or arc welding. Welding may also be performed by thermal spraying or other methods. The welding in this embodiment may be a method that does not use brazing material. The welding material constituting the connection part may be a material in which a part of either one or both of the two members to be joined has melted and solidified.

[0064] The welding material does not need to consist of only one type of composition; it may consist of multiple types. For example, if the welding material is composed of a resin composition, at the corner where the end face of the main body mounting portion 2114 and the outer circumferential surface of the member constituting the nozzle body portion 212 intersect, welding may be performed with a first resin composition that can exhibit high adhesive strength to each surface, and then a second resin composition suitable for the surface properties required for the nozzle body portion 212 may be welded onto the first resin composition. The same applies when the main body mounting portion 2114 and the nozzle body portion 212 are made of metal and the welding material is composed of a metal composition. In such cases, for example, the corner may be arc-welded with a first metal composition, and then the second metal composition may be thermally sprayed onto the arc-welded first metal composition. Furthermore, the welding material composed of multiple compositions may be composed of different compositions; for example, only the corner may be arc-welded with a metal composition, and then build-up welding with a resin composition may be performed on top of the arc-welded metal composition. The ability to use multiple types of welding material to fill the step difference between members is also the same when it is between different members. Furthermore, if there are multiple steps where welding is to be performed, the welding material used to fill one step may be the same as or different from the welding material used to fill the other steps.

[0065] As mentioned above, if the corners (steps) are left as they are without filling them with welding material F, powders, granules, liquids, etc. tend to accumulate. Therefore, build-up welding performed to fill the steps with welding material F is effective in reducing the accumulation of accumulated material. In this case, as shown in Figure 4, the diameter RF of the edge at the base end of the welding material F may be matched with the diameter RM of the edge at the tip end of the main body mounting portion 2114 to eliminate the step. For example, the outer surface of the welding material F may be tapered by gradually reducing its diameter toward the tip end, and reaching the outer surface of the member screwed into the main body mounting portion 2114 while gradually decreasing its diameter. By doing so, no step is formed at the joint between the fixing portion 211 and the nozzle body portion 212, and the outer surface becomes smoothly continuous from the main body mounting portion 2114 beyond the welding material F toward the tip end, further suppressing the accumulation of material in the cleaning nozzle 21.

[0066] To form a portion with such a shape using welding material F, the welding itself may be performed in that manner, or the excess welding material may be removed after welding with a build-up amount greater than the final finish.

[0067] In this embodiment, the nozzle body portion 212 is a joint of multiple resin members. In this embodiment, the nozzle body portion 212 consists of a pipe portion 2121 and a head portion 2122, each composed of multiple resin members. In this embodiment, similar to the method of joining the main body mounting portion 2114 and the nozzle body portion 212, screws and welding can be used in combination to join the members constituting the nozzle body portion 212.

[0068] As shown in Figure 2, the nozzle body 212 in this embodiment is composed of four members arranged from the base end to the tip end, and comprises, in order from the base end, a base member B1, a first intermediate member M1, a second intermediate member M2, and a tip member T1. The base member B1 is a member that is screwed and welded to the main body mounting portion 2114. The base member B1 and the first intermediate member M1 each constitute a part of the pipe portion 2121, and the second intermediate member M2 is positioned at the connection portion between the pipe portion 2121 and the head portion 2122 and constitutes a part of both. More specifically, the second intermediate member M2 in this embodiment constitutes the tip portion of the pipe portion 2121 and also constitutes approximately half of the base end portion of the head portion 2122. The tip member T1 constitutes approximately half of the tip portion of the head portion 2122.

[0069] The base member B1 and the first intermediate member M1 are cylindrical in shape with a constant outer and inner diameter along their entire length. They are joined together so that their outer diameters are equal and they appear to form a single pipe. The base end side of the second intermediate member M2 is cylindrical with a smaller outer diameter than the base member B1 and the first intermediate member M1. On the other hand, the inner diameter of the base end side of the second intermediate member M2 is the same as that of the base member B1 and the first intermediate member M1. In other words, in this embodiment, the area of ​​the flow path for the cleaning fluid (the cross-sectional area when the internal space is cut by a plane perpendicular to the length direction XL) of the pipe section 2121 is constant all the way to the head section 2122. On the other hand, on the outer circumferential surface side of the pipe section 2121, as shown in Figures 5A and 5B, a step is formed between the first intermediate member M1 and the second intermediate member M2 at the joint between them, with the side of the second intermediate member M2 being smaller in diameter than the side of the first intermediate member M1.

[0070] In this embodiment, similar to the joint between the main body mounting portion 2114 and the nozzle main body portion 212, the end face of the first intermediate member M1 is also annular parallel to the radial direction XD, and welding is performed such that the welding material F is heat-fused to each member at the corner where the end face and the outer circumferential surface of the second intermediate member M2 intersect. The build-up of the welding material F is performed so as to reach the corner (outer corner) where the outer circumferential surface and the end face of the first intermediate member M1 intersect. The build-up of the welding material F is performed so as to gradually decrease in height towards the tip. In this embodiment, the outer circumferential surface of the connection portion made of welding material F gradually decreases in diameter toward the tip and reaches the outer circumferential surface of the second intermediate member M2, and the outer circumferential surface of the connection portion tapers and decreases in diameter toward the tip. In this way, in the cleaning nozzle 21 of this embodiment, the step difference between the first intermediate member M1 and the second intermediate member M2 is eliminated by the welding material F.

[0071] As described above, if a step difference occurs at the joint between the upstream and downstream members due to a difference in outer diameter, the step difference can be eliminated by filling the space created downstream of the end face of the upstream member with welding material. The filler used to fill this space and eliminate the step difference is not limited to welding material F, but may also be a molded product that has been pre-formed. That is, the connection part may be made of a molded product or the like. The molded product may be, for example, a ring-shaped molded product in which a thickness corresponding to the step difference is provided on the side that abuts the end face of the higher step member, and the thickness gradually decreases as it moves away from the end face. That is, the filler may be a ring-shaped molded product whose cross-sectional shape in a plane perpendicular to the circumferential direction is a right triangle. The ring-shaped molded product may be divisible in the circumferential direction. That is, it may be composed of a plurality of segmented pieces that can be connected in a ring shape. Such a molded product can be attached to the second intermediate member M2 after it has been joined to the first intermediate member M1, making the formation of the joint easier.

[0072] In this embodiment, the welding is performed so as not to reach the head portion 2122. That is, the connection portion is formed to provide a distance between the tip edge and the head portion 2122.

[0073] The head portion 2122 is located at the very tip of the cleaning nozzle 21. The head portion 2122 is hollow and has an internal space that communicates with the internal space of the pipe portion 2121, and in this embodiment, it has a larger diameter than the pipe portion 2121. Therefore, in this embodiment, the tip of the second intermediate member M2 is hemispherical cup-shaped, and the tip is cup-shaped and opens toward the tip side. That is, the second intermediate member M2 has a structure in which an introduction pipe M21 for introducing cleaning fluid into the head portion 2122 and a receiving cup M22 for receiving cleaning fluid from the introduction pipe M21 are integrated, and the overall shape is an inverted funnel shape. The cup-shaped portion on the tip side of the second intermediate member M2 (hereinafter also referred to as "upstream cup portion 2122a") opens toward the tip side, while the portion made up of the tip member T1 (hereinafter referred to as "downstream cup portion 2122b") is conical cup-shaped and opens toward the base end side.

[0074] The opening diameter at the tip of the second intermediate member M2 corresponds to the outer diameter of the tip member T1, and the second intermediate member M2 and the tip member T1 are joined by inserting a portion of the base end of the tip member T1 into the second intermediate member M2. That is, at the joint between the tip member T1 and the second intermediate member M2, the tip member T1 and the second intermediate member M2 overlap radially, with the second intermediate member M2 on the outside and the tip member T1 on the inside. Therefore, in this embodiment, a step is also formed at the joint between the tip member T1 and the second intermediate member M2.

[0075] In this embodiment, the end face of the tip side of the second intermediate member M2 is also annular and parallel to the radial direction XD, and as shown in Figures 3 and 6, welding is performed such that the welding material F is heat-fused to the corner where the end face and the outer circumferential surface of the tip member T1 intersect. In the cleaning nozzle 21 of this embodiment, similar to the joint between the first intermediate member M1 and the second intermediate member M2, the step difference that occurs between the outer circumferential surface of the second intermediate member M2 and the outer circumferential surface of the tip member T1 is eliminated by filling it with the welding material F.

[0076] In this embodiment, the cleaning nozzle 21 is provided with a conical or polygonal pyramidal projection 212t at the lower end of the nozzle body 212, so that the lowest part of the cleaning nozzle 21 is the part that protrudes downward. In this embodiment, the projection 212t is made up of the tip member T1.

[0077] The shape of the projection 212t is conical or pyramidal, as described above. Therefore, the cross-sectional shape of the projection 212t on the horizontal plane intersecting the upper edge of the projection 212t is circular or polygonal. The cross-sectional shape does not have to be a perfect circle; it may be an ellipse. The polygon may be a regular polygon or a polygon other than a regular polygon.

[0078] For conical and polygonal pyramidal shapes, the cross-sectional size is 100 mm. 2 It can be formed in the manner described above. The size of the cross-section of the conical or polygonal pyramidal shape is 200 mm.2 It may be greater than or equal to 300mm 2 It may be greater than or equal to 400mm 2 It may be greater than or equal to 500mm 2 The size may be greater than or equal to 10,000 mm. 2 The following is possible: The area of ​​the cross-section is 7500 mm². 2 The following are also acceptable, and 5000mm 2 The following is also acceptable.

[0079] The shape of the projection 212t may be a right circular cone, an oblique cone, a right polygonal pyramid, or an oblique polygonal pyramid. The tip (lower end) shape of the projection 212t may be sharp or chamfered. The chamfer may be an R chamfer or a C chamfer. That is, the outer surface 212ta of the projection 212t may include a tapered surface 212ta1 which is the side surface of a cone or polygonal pyramid, and a lower end surface 212ta2 which extends inward from the lower end edge of the tapered surface 212ta1. The lower end surface 212ta2 may be a flat surface or a curved surface that is convex downward.

[0080] The cleaning nozzle 21 of this embodiment has a projection 212t having a lower end surface 212ta2. The projection 212t of this embodiment constitutes a part of the head portion 2122 and forms the lower end of the head portion 2122. The cleaning nozzle 21 of this embodiment does not have horizontal planes perpendicular to the central axis C21 or planes at an acute angle to the central axis C21 on its outer surface from the pipe portion 2121 to the lower end surface 212ta2, and is composed only of planes whose normal direction is away from the central axis C21. A plane at an acute angle to the central axis C21 becomes an inward-facing plane with a vector in the radial direction XD when the normal vector is decomposed into the length direction XL (central axis direction) and the radial direction XD. The flow of cleaning fluid tends to stagnate on such inward-facing planes and horizontal planes. A surface whose normal vector is away from the central axis C21 is an outward-facing surface with a vector component directed outward in the radial direction XD, and the flow of cleaning fluid on this outward-facing surface is better than that on an inward-facing surface or a horizontal surface. In this embodiment, this outward-facing surface is continuously provided in the entire vertical section from the upper end to the lower end surface 212ta2 of the pipe section 2121. In addition, in this embodiment, the lower surface of the fixing section 211 (the lower surface of the flange section 211b3 of the cover material 211b) is also provided with a taper that slopes downward inward in the radial direction XD, and its shape has a normal direction that is away from the central axis C21. Furthermore, in this embodiment, a taper is also provided at the joint between the main body mounting section 2114 and the pipe section 2121, so that the entire outer surface of the cleaning nozzle 21, including the fixing section 211, is an outward-facing surface. As a result, the cleaning nozzle 21 of this embodiment exhibits good self-cleaning properties when cleaning the reaction tank 10.

[0081] The cleaning nozzle 21 of this embodiment has a through hole TH drilled in the protruding portion 212t. Therefore, the cleaning nozzle 21 of this embodiment exhibits good cleaning performance even on the lower part of the tank body 100. In the cleaning nozzle 21 of this embodiment, the distance from the intersection point of the perpendicular line drawn from the through hole TH located at the lowest end to the central axis of the nozzle body 212 and the central axis, to the lowest end of the nozzle body 212 may be less than or equal to the distance from the intersection point to the through hole TH, and is preferably shorter than the distance from the intersection point to the through hole TH. This makes the head portion 2122 compact.

[0082] In this embodiment, the cleaning nozzle 21 may be provided such that when the protrusion 212t is viewed from the direction perpendicular to the central axis C21 of the cleaning nozzle 21 (lateral direction) that minimizes the area of ​​the protrusion 212t, the angle of the tip portion (lower end portion) is 170 degrees or less. This angle may be 160 degrees or less, 150 degrees or less, or 140 degrees or less. This angle can be, for example, 80 degrees or more. This angle may be 90 degrees or more, 100 degrees or more, 110 degrees or more, or 120 degrees or more.

[0083] In this embodiment, when the protruding portion 212t of the cleaning nozzle 21 is conical in shape, the protruding portion 212t may be provided such that the apex angle (indicated as "θt" in Figure 3) at the lower end is 170 degrees or less. The apex angle θt may be 160 degrees or less, 150 degrees or less, or 140 degrees or less. The apex angle θt can be, for example, 80 degrees or more. The apex angle θt may be 90 degrees or more, 100 degrees or more, 110 degrees or more, or 120 degrees or more. The apex angle of the protruding portion 212t is preferably 120 degrees or more and 170 degrees or less. The apex angle of the protruding portion 212t is preferably 120 degrees or more and 170 degrees or less.

[0084] The protrusion 212t in this embodiment is preferably configured to satisfy at least one of the following (a1) to (a4). (a1) The tapered surface 212ta1 has a shape that allows the cleaning fluid to flow along it and wrap around to the lower end surface 212ta2. (a2) The cleaning fluid that flows along the tapered surface 212ta1 wraps around to the lower end surface 212ta2 and reaches the center of the lower end surface. (a3) The shape satisfies the relationship "x≦y" when the distance from the outer peripheral edge of the lower end surface 212ta2 to the center of the lower end surface 212ta2 is "x", and the length of the area (length from the outer peripheral edge) that wets the lower end surface 212ta2 before the cleaning liquid that has traveled along the tapered surface 212ta1 and flowed around to the lower end surface 212ta2 falls is "y". (a4) The cleaning liquid that flows along the tapered surface 212ta1 has a shape that allows it to cover the entire lower end surface 212ta2 before falling.

[0085] Whether the above conditions (a1) to (a4) are met can be confirmed by flowing cleaning solution from the upper end of the tapered surface 212ta1 using a dropper or the like. For example, a polyethylene dropper with a bellows at the end and a suction capacity of about 10 ml can be used as the dropper. Whether the above conditions (a1) to (a4) are met can be confirmed by, for example, taking a picture of the flow of cleaning solution with a high-speed camera and examining the resulting image. When the operation of continuously flowing about 10 ml of cleaning solution at multiple locations in the circumferential direction is performed, it is preferable that at least one of the above conditions (a1) to (a4) is met at least at one location, more preferably at a majority of locations, and even more preferably at all locations. It is particularly preferable that any of the above conditions (a1) to (a4) are met when the protrusion 212t is supplied with cleaning solution drop by drop from the upper end of the tapered surface 212ta1.

[0086] Whether the above conditions (a1) to (a4) are met can be checked by adjusting the cleaning solution to the actual temperature at which it will be used. However, since cleaning solutions generally spread more easily on solid surfaces than water, it is also acceptable to use deionized water at room temperature (for example, 23°C) as a substitute for checking.

[0087] In this embodiment, as the cleaning liquid, mere water (e.g., ion-exchanged water), an aqueous cleaning agent containing a surfactant or the like (such as an aqueous citric acid solution, an aqueous phosphoric acid solution, an aqueous alcohol solution, alkaline electrolyzed water, an alkaline aqueous solution, etc.), an organic solvent, or the like can be used.

[0088] The cleaning nozzle 21 of this embodiment has a through-hole TH that opens to the tapered surface 212ta1 and also has a through-hole TH that opens to the lower end surface 212ta2. Although the through-hole TH in this embodiment can form a straight flow, some of the cleaning liquid may become small droplets and scatter around. In the cleaning nozzle 21 of this embodiment having the through-hole TH on the lower end surface 212ta2, such droplets are likely to adhere to the lower end surface 212ta2. Further, when the supply of the cleaning liquid is stopped and the pressure of the cleaning liquid in the head portion 2122 decreases, the cleaning liquid dripping from the through-hole TH provided on the lower end surface 212ta2 is likely to drip while wetting and spreading around the through-hole TH. Therefore, the cleaning nozzle 21 of this embodiment is more likely to attach minute droplets to the lower end surface 212ta2 than the droplets that come around from the tapered surface 212ta1. The cleaning liquid that has come around from the tapered surface 212ta1 is likely to be transmitted to the central portion of the lower end surface along the lower end surface by taking in these minute droplets. Thus, the cleaning nozzle of this embodiment is more likely to be guided to the central portion by the minute droplets adhering to the lower end surface 212ta2 with the cleaning liquid that has come around from the tapered surface 212ta1.

[0089] In a conventional cleaning nozzle in which the lower end surface of the nozzle body portion is a horizontal surface with a large area, after cleaning with the cleaning liquid, it is easy for an object to be processed or the like to remain on the lower end surface, and washing omission is likely to occur. However, since the cleaning nozzle 21 of this embodiment has the above structure, high self-cleaning performance can be exhibited.

[0090] In the nozzle body portion 212, the smaller the area of the lower end surface 212ta2, the less washing omission by the cleaning liquid. The specific area of the lower end surface 212ta2 can be, for example, 100 mm 2 or less. The area of the lower end surface 212ta2 can be 90 mm 2The following may also be included: 80mm 2 The following are also acceptable: 70mm 2 The following may also be included: 60mm 2 The following is also acceptable.

[0091] If the head is spherical, the lower end surface of the nozzle body will be a convex surface that protrudes downward, and the lower end of the nozzle body will taper downward, resulting in a lower end surface that is effectively 0 mm. 2 This is the case. However, if the outer surface is spherical, as it approaches the lowest point, the circumscribing surface becomes closer to a horizontal plane, which could cause the cleaning liquid flowing along the outer surface to fall before reaching the lowest point. On the other hand, in the head portion 2122 of this embodiment, the lower end is conical, making it easier for the cleaning liquid to reach the lowest point. This function is the same even if the lower end is not conical but polygonal pyramidal.

[0092] The head portion 2122 of this embodiment, for example, has a cylindrical portion extending cylindrically in the direction of flow (up and down) in the middle of the flow direction (up and down) of the cleaning fluid, and the diameter of the cylindrical portion is larger than the diameter of the pipe portion 2121 at the part connected to the head portion 2122, and has an upward reducing diameter portion that decreases in diameter from the upper end of the cylindrical portion toward the pipe portion 2121, and a downward reducing diameter portion that decreases in diameter from the lower end of the cylindrical portion toward the lower end of the nozzle body portion 212, the downward reducing diameter portion being the protruding portion 212t, and the upward reducing diameter portion may be reduced in a hemispherical shape as illustrated in the figure, or it may be reduced in a conical or polygonal pyramidal shape, or it may be reduced in diameter so as to connect the upper end of the cylindrical portion and the lower end of the pipe portion 2121 in a horizontal plane. In this embodiment, the head portion 2122 can be provided with through holes TH in the upward-reducing diameter portion, the cylindrical portion, and the downward-reducing diameter portion. By providing through holes TH in the upward-reducing diameter portion and the downward-reducing diameter portion, it becomes possible to discharge cleaning fluid over a wide area.

[0093] The head portion 2122 illustrated in the figure is joined at the middle of the flow direction (up and down) of the cleaning fluid, but the cylindrical portion may be made of, for example, a seamless pipe. The upward-reducing diameter portion, the cylindrical portion, and the downward-reducing diameter portion may be separate components or may be a single molded body. When the head portion 2122 is made of metal, a molded body without seams between the upward-reducing diameter portion and the cylindrical portion, or between the cylindrical portion and the downward-reducing diameter portion, can be produced by using molding methods such as casting or spinning. When the head portion 2122 is made of resin, a molded body without seams between the upward-reducing diameter portion and the cylindrical portion, or between the cylindrical portion and the downward-reducing diameter portion, can be produced by blow molding or transfer molding. The head portion 2122 in this embodiment may be made of such a molded body. When the upward-reducing diameter portion, the cylindrical portion, and the downward-reducing diameter portion are separate components, methods such as screwing or welding can be used to join them to each other.

[0094] In this embodiment, the projection 212t has an area of ​​100 mm² in the range where the elevation angle of the circumscribing surface with respect to the horizontal plane is 10 degrees or less. 2 Preferably, the area is 90 mm². 2 The following may also be included: 80mm 2 The following are also acceptable: 70mm 2 The following may also be included: 60mm 2 The following is also acceptable: The area is 50 mm². 2 The following are also acceptable: 40mm 2 The following may also be included: 30mm 2 The following is also acceptable: 20mm 2 The following may also be included: 10mm 2 It may also be less than or equal to, effectively 0mm 2 That's fine.

[0095] In this embodiment, it is more preferable that the area in the range where the elevation angle is 15 degrees or less is less than or equal to the area described above, even more preferable that the area in the range where the elevation angle is 20 degrees or less is less than or equal to the area described above, particularly preferable that the area in the range where the elevation angle is 25 degrees or less is less than or equal to the area described above, and especially preferable that the area in the range where the elevation angle is 30 degrees or less is less than or equal to the area described above.

[0096] In this embodiment, it is preferable that not only the protruding portion 212t, but also all the outer surfaces of the nozzle body portion 212 have a small area where the circumstantial surface is below the elevation angle described above. When the area where the elevation angle is below the predetermined value is below the predetermined value over the entire nozzle body portion 212, the cleaning liquid can more easily reach the lower end surface 212ta2 when it is supplied to the upper end of the nozzle body portion 212. The supply of cleaning liquid to the outer surface of the nozzle body portion 212 can be carried out, for example, by causing the cleaning liquid released from the through hole TH to bounce off the tank body 100 or the first container nozzle 110a.

[0097] In this embodiment, the cleaning device 20 is configured such that a flange portion provided on the liquid supply pipe 22 and a first flange portion 2112 on the fixing portion 211 are detachably joined by a flange joint, and cleaning fluid is supplied from the liquid supply pipe 22 to the through hole of the first flange portion 2112.

[0098] The cleaning nozzle 21 has a flow path formed to allow the cleaning liquid supplied from the liquid supply pipe 22 to flow in the following order: through the connecting portion 2111 of the fixed portion 211, through the pipe portion 2121 of the nozzle body portion 212, and through the head portion 2122.

[0099] At least some of the multiple through holes TH in the nozzle body portion 212 of this embodiment are provided in the head portion 2122. The through hole TH provided at the lowest surface of the tip member T1 also functions as a drain. The through hole TH can be provided not only in the tip member T1 but also in the cup-shaped portion on the tip side of the second intermediate member M2 (upstream cup portion 2122a). By providing through holes TH in the upstream cup portion 2122a as well as in the portion composed of the tip member T1 (downstream cup portion 2122b), the cleaning fluid can be supplied over a wide area. For this reason, as in this embodiment, it is preferable to make the outer diameter of the pipe portion 2121 in the portion composed of the second intermediate member M2 smaller than that of the base end member B1 and the first intermediate member M1, thereby securing a wider area in the upstream cup portion 2122a where through holes TH can be provided.

[0100] In order to secure a wider area in the upstream cup portion 2122a where through holes TH can be provided, it is conceivable to reduce the diameter of the entire pipe portion 2121. However, since the nozzle body portion 212 in this embodiment is cantilevered only at the base end, if the pipe portion 2121 is thin, it may not be able to exert sufficient strength and may be prone to bending. Furthermore, a thicker pipe portion 2121 is preferable in order to transmit the pressure of the cleaning fluid to the head portion 2122. Therefore, it is preferable that the outer diameter of the portion of the pipe portion 2121 connected to the head portion 2122 is smaller than that of the portion upstream (base end). In other words, it is preferable that the nozzle body portion 2122 has a large diameter portion with a relatively large outer diameter and a small diameter portion with a smaller diameter compared to the large diameter portion, with the portion connected to the head portion 2122 being the small diameter portion and the large diameter portion being located upstream (base end) of the small diameter portion. Furthermore, in this embodiment, the minimum diameter of the first intermediate member M1 is larger than the minimum diameter of the second intermediate member M2. As a result, the nozzle body portion 212 is less likely to bend in this embodiment. Note that the minimum diameter of the second intermediate member M2 and the minimum diameter of the first intermediate member M1 may be equal, or the minimum diameter of the second intermediate member M2 may be larger than the minimum diameter of the first intermediate member M1.

[0101] In the head portion 2122 of this embodiment, a portion of the base end of the tip member T1 is inserted into the second intermediate member M2 to join these members together. However, as shown in Figure 7, the opening of the tip member T1 facing upward may be made large enough to receive the tip of the second intermediate member M2, and the tip member T1 may be on the outside and the second intermediate member M2 on the inside, so that they overlap at the joint. In this case as well, a wider area can be secured in the upstream cup portion 2122a where a through hole TH can be provided. Furthermore, in this case as well, the step formed at the joint between the tip member T1 and the second intermediate member M2 can be eliminated with welding material F.

[0102] The welding to eliminate the step between the outer surface of the second intermediate member M2 and the outer surface of the tip member T1 can be performed in the same manner as the welding to eliminate the step between the first intermediate member M1 and the second intermediate member M2. The welding between the first intermediate member M1 and the second intermediate member M2 can be performed so as to reach the corner between the end face and the outer surface of the first intermediate member M1, so that the height in the radial direction XD is the same as the position of the outer surface of the first intermediate member M1, and so that it covers the entire end face of the first intermediate member M1. The welding between the outer surface of the second intermediate member M2 and the tip member T1 can be performed so as to reach the corner where the end face and the outer surface of the second intermediate member M2 intersect, so that the height in the radial direction XD is the same as the position of the outer surface of the second intermediate member M2, and so that it covers the entire end face of the second intermediate member M2.

[0103] As shown in Figure 7, when the tip member T1 is on the higher step side, the outer circumferential surface of the connection part is designed to taper in diameter from the higher step side to the lower step side (towards the base end). In other words, in this case, the outer circumferential surface of the connection part becomes an enlarged portion that expands in diameter towards the tip side.

[0104] The first intermediate member M1 has a chamfered outer corner at the tip where it is joined to the second intermediate member M2, and its outer surface tapers in diameter just before the edge at the tip. The welding is performed so as to extend this tapered outer surface toward the tip.

[0105] As described above, the nozzle body portion 212 of this embodiment is provided with a first intermediate portion made of the first intermediate member M1, a second intermediate portion made of the second intermediate member M2, and a first connecting portion (hereinafter also referred to as the "first connecting portion") made of welding material that is in contact with the first intermediate portion and the second intermediate portion. Furthermore, the nozzle body portion 212 of this embodiment is provided with a base end portion made of a base end member B1 and a tip end portion made of a tip member T1.

[0106] The first connecting portion is tapered in diameter so that the diameter of its outer surface decreases as it approaches the tip in the longitudinal direction XL. Furthermore, the tip edge of the first connecting portion is in contact with the second intermediate member M2 without any substantial step.

[0107] Whether a step exists in the first connection part or other parts of the nozzle body 212 can be confirmed, for example, by measuring the height from the central axis C21 of the first connection part (height in the radial direction XD) at two points separated by a small distance (e.g., 0.5 mm) in the longitudinal direction XL, and checking that the difference in height is 0.5 mm or less. The difference in height in the radial direction XD may be, for example, 0.4 mm or less, 0.3 mm or less, 0.2 mm or less, or 0.1 mm or less. The difference in height in the radial direction XD can be measured, for example, using a non-contact (e.g., laser) external shape measuring instrument.

[0108] In this embodiment, the outer circumferential surface of the nozzle body portion 212 is an exposed surface that is exposed to the internal space of the reaction vessel 10. The outer circumferential surface of the nozzle body portion 212 that is exposed to the internal space includes a base end region AB1 formed by the outer circumferential surface of the base end member B1, a first intermediate region AM1 formed by the outer circumferential surface of the first intermediate portion, a second intermediate region AM2 formed by the outer circumferential surface of the second intermediate portion, and a first connection region AC1 formed by the outer circumferential surface of the first connection portion. In this embodiment, the outer circumferential surface of the nozzle body portion 212 further includes a tip region AT1 formed by the outer circumferential surface of the tip member T1. In addition, in this embodiment, a second connection portion (second connection portion) is provided between the second intermediate member M2 and the tip member T1, and the second connection region AC2, which is the outer circumferential surface of the second connection portion, is included in the outer circumferential surface of the nozzle body portion 212. At the downstream edge of the first intermediate region AM1, the first intermediate region AM1 and the first connection region AC1 are continuous, and the second intermediate region AM2 is provided downstream of the first connection region AC1.

[0109] Furthermore, the first connection region AC1, which is the outer circumferential surface of the first connection portion in this embodiment, is tapered and has a reduced diameter, and there is no step across the entire section from the base edge to the tip edge. Also, there is no step between the first connection region AC1 and the second intermediate region AM2 downstream of it. Therefore, in the nozzle body portion 212 of this embodiment, even though the first intermediate member M1 and the second intermediate member M2 are joined together, no step is formed at the connection portion, making it difficult for the workpiece or cleaning liquid to accumulate and reducing the likelihood of problems caused by foreign matter.

[0110] In this embodiment, the cleaning fluid can flow continuously along the outer circumferential surface of the nozzle body 212 from the first intermediate region AM1 through the first connection region AC1 to the second intermediate region AM2. In this embodiment, the first connection portion is provided so as to be continuous with the edge of the first intermediate member M1, and the outer circumferential surface of the first connection portion is a reduced diameter portion. That is, in this embodiment, a reduced diameter portion whose outer diameter changes in the longitudinal direction is provided so as to be continuous with the edge of the first intermediate region AM1, and the cleaning fluid can flow continuously between the first intermediate region AM1 and the reduced diameter portion. The same continuous flow of the cleaning fluid can be achieved even if an enlarged diameter portion is provided so as to be continuous with the edge of the first intermediate region AM1. In this embodiment, since the cleaning fluid can flow continuously in the longitudinal direction XL over multiple regions on the outer circumferential surface of the nozzle body 212, the workpiece and cleaning fluid are less likely to remain at the boundaries between adjacent regions (boundaries between members), and problems caused by foreign matter are less likely to occur.

[0111] The nozzle body 212 may have multiple diameter-reducing sections and multiple diameter-expanding sections. For example, a first diameter-reducing section may be provided continuously at the edge of the first intermediate region AM1, and a second diameter-reducing section may be provided downstream of the first diameter-reducing section. The second diameter-reducing section may be provided in the first connection region AC1, like the first diameter-reducing section, or it may be provided in the second intermediate region AM2. When multiple diameter-reducing sections are provided in the first connection region AC1 at a distance from each other in the length direction XL, the section between the upstream first diameter-reducing section and the downstream second diameter-reducing section can be a constant diameter section, for example, where the distance from the central axis Cx is constant in the length direction XL. That is, the first connection region AC1 may be formed such that the diameter changes in steps in the length direction XL, with diameter-reducing sections and constant diameter sections arranged alternately. Even in such cases, the cleaning fluid that has flowed from the first intermediate region AM1 to the first connection region AC1 can flow to the second intermediate region AM2, making it difficult for the workpiece or cleaning fluid to remain, thus reducing the likelihood of problems caused by foreign matter.

[0112] In this embodiment, the step difference is eliminated by the welding material F at the joint between the second intermediate member M2 and the tip member T1, so the same effect as described above is also exhibited at the joint between the second intermediate member M2 and the tip member T1. That is, in this embodiment, the second connection region AC2, which is the outer peripheral surface of the second connection portion between the second intermediate member M2 and the tip member T1, is provided to be continuous with the tip-side edge of the second intermediate region AM2, and since no step difference is formed at the boundary between the second connection region AC2 and the second intermediate region AM2, problems caused by foreign matter are less likely to occur.

[0113] In the nozzle body portion 212 illustrated in Figure 5A, a diameter-reducing portion is provided in the tip of the first intermediate region AM1 and the connection region, where the outer diameter decreases toward the downstream side. The diameter-reducing portion may also be provided in the second intermediate region AM2. Preferably, the diameter-reducing portion is provided in at least one of the second intermediate region AM2 and the connection region. In this embodiment, instead of a diameter-reducing portion where the outer diameter decreases toward the downstream side, an expanding portion where the outer diameter increases toward the downstream side may be provided. In the nozzle body portion 212 of this embodiment, it is preferable that at least one of a diameter-reducing portion where the outer diameter decreases toward the downstream side and an expanding portion where the outer diameter increases toward the downstream side is provided in at least one of the second intermediate region AM2 and the connection region.

[0114] The reduced diameter and expanded diameter sections may have a large change in the degree of reduction or expansion, resulting in a curved contour when viewed from a direction perpendicular to the central axis C21, but it is preferable that they be straight. In this embodiment, it is preferable that the reduced diameter section is tapered with a constant change in outer diameter. In this embodiment, it is preferable that the expanded diameter section is tapered with a constant change in outer diameter. When measuring the dimensional change from the central axis C21 to the outer circumferential surface while moving the measurement point in the length direction XL, it is preferable that the dimensional change in the reduced diameter section and expanded diameter section is somewhat gradual. The cleaning nozzle 21 is provided with the tapered reduced diameter section, and it is preferable that the distance at which the outer circumferential surface approaches the center of the nozzle body in the reduced diameter section (L2 in Figure 5B) is shorter than the length of the reduced diameter section in the direction of flow of the cleaning liquid (L1 in Figure 5B) (L1 > L2). The cleaning nozzle 21 is provided with a tapered, enlarged diameter portion, and it is preferable that the distance from the center of the nozzle body to the outer surface of the enlarged diameter portion is shorter than the length of the enlarged diameter portion in the direction of flow of the cleaning liquid.

[0115] The length of the reduced diameter section (L1) and the length of the expanded diameter section can be, for example, 0.5 mm or more. The length may be 1 mm or more, 1.5 mm or more, or 2 mm or more. The length may be, for example, 25 mm or less. The length may be 20 mm or less, or 15 mm or less.

[0116] The angle (θd, θe) that the reduced-diameter portion and the expanded-diameter portion make with the central axis C21 on a plane passing through the central axis C21 is preferably less than 80°, less than 75°, less than 60°, and more preferably less than 45°. The angle (θd, θe) may be 40° or less, or 35° or less. The angle (θd, θe) that the reduced-diameter portion and the expanded-diameter portion make with the central axis C21 on a plane passing through the central axis C21 is preferably 15° or more. The angle (θd, θe) may be 30° or more, or 45° or more. If the cleaning nozzle 21 has a reduced-diameter portion and an expanded-diameter portion, the angle θd of the reduced-diameter portion and the angle θe of the expanded-diameter portion may be the same or different. Furthermore, if the cleaning nozzle 21 has multiple diameter-reducing sections, the angle (θd1) of one of the diameter-reducing sections and the angle (θd2) of another diameter-reducing section may be the same or different. If the cleaning nozzle 21 has multiple diameter-expanding sections, the angles of one of the diameter-expanding sections and another diameter-expanding section may be the same or different.

[0117] If the pipe portion 2121 or the head portion 2122 is made of a fluororesin such as PTFE, the cleaning solution does not easily spread and tends to quickly fall off their surfaces. In this regard, the pipe portion 2121 and the head portion 2122 may be formed from a fluororesin composition that includes an inorganic filler along with the fluororesin such as PTFE. By including an inorganic filler in the resin composition that makes up the pipe portion 2121 and the head portion 2122, microscopic irregularities are easily formed on the surface, and an improvement in the wetting and spreading of the cleaning solution can be expected.

[0118] In the reduced diameter section, the cleaning liquid flowing from above the reduced diameter section tends to fall downward without running along the surface of the reduced diameter section. Therefore, the surface roughness of the reduced diameter section (the surface roughness of the portion formed by the weld material) may be rougher than the surface roughness of the outer circumferential surfaces of the members constituting the pipe section 2121 and the head section 2122. The surface roughness of the reduced diameter section and the surface roughness of the constituent members can be compared by comparing their arithmetic mean roughness (Ra). Surface roughness can be determined by the arithmetic mean of measurements taken at several randomly selected locations (for example, five locations). The arithmetic mean roughness (Ra) of the reduced diameter section may be 1.5 times or more, 2 times or more, or 3 times or more than the arithmetic mean roughness (Ra) of the member surface. However, since excessively rough surfaces tend to accumulate deposits, it is preferable that the arithmetic mean roughness (Ra) of the reduced diameter section be 25 μm or less. The arithmetic mean roughness (Ra) of the reduced diameter portion may be 12.5 μm or less, 6.3 μm or less, 3.2 μm or less, or 1.6 μm or less. The arithmetic mean roughness (Ra) can be measured according to JIS B0601 (cutoff 0.8 mm).

[0119] In this embodiment, the cleaning nozzle 21 has a pipe section 2121 that narrows in diameter as it approaches the head section 2122, resulting in a smaller connection area between the head section 2122 and the pipe section 2121. This makes it easier to provide a through-hole TH in the upstream cup section 2122a. Therefore, it is easy to spray the cleaning liquid ejected from the through-hole TH directly onto the pipe section 2121 or to reflect it off the wall of the reaction tank 10 and let it fall back onto itself. In other words, the cleaning nozzle 21 of this embodiment is designed to allow the discharged cleaning liquid to be sprayed onto the fixed section 211 and the nozzle body section 212, washing away the surface of these parts, thus exhibiting excellent self-cleaning properties.

[0120] To enhance self-cleaning performance, in this embodiment, the through-hole TH from which the cleaning liquid is discharged may be provided in the base member B1 or the first intermediate member M1. Since the base member B1 and the first intermediate member M1 are located close to the inner wall surface of the first container nozzle 110a of the reaction tank 10, providing through-holes in them is expected to provide high self-cleaning performance due to the splashback of the cleaning liquid.

[0121] The multiple through-holes TH may include a first through-hole TH1 that discharges cleaning liquid toward the wall surface defining the first space 100c, and a second through-hole TH2 that discharges cleaning liquid toward the wall surface defining the second space 110ac. The nozzle body 212 is preferably configured such that the cleaning liquid supplied to its interior is discharged from the multiple through-holes TH, the cleaning liquid discharged from the second through-hole TH2 is supplied to the outer surface of the nozzle body 212, and at least a portion of the cleaning liquid that flows down the outer surface drips from the lowest end of the head 2122. Furthermore, the first through-hole TH1 may also be arranged so that at least a portion of the discharged cleaning liquid is supplied to the outer surface of the nozzle body 212, and at least a portion of the discharged cleaning liquid may be arranged to drip from the lowest end of the head 2122.

[0122] The first through-hole TH1 and the second through-hole TH2 can each have a cleaning fluid discharge pattern such as straight, fan-shaped, hollow cone, or full cone. In the straight-line type, the cleaning fluid may be rod-shaped, plate-shaped, or cylindrical. When discharging the same amount of cleaning fluid, the impact force on the mating member to which the cleaning fluid is supplied is usually in the order of strongest to weakest: straight, fan-shaped, hollow cone, and full cone. The cleaning fluid discharge patterns of the first through-hole TH1 and the second through-hole TH2 can be appropriately selected according to the purpose. Furthermore, when the cleaning nozzle 21 is provided with multiple first through-holes TH1, the cleaning fluid discharge patterns of one first through-hole TH1 and other first through-holes TH1 may be the same or different. The same applies when the cleaning nozzle 21 is provided with multiple second through-holes TH2; the cleaning fluid discharge patterns of one second through-hole TH2 and other second through-holes TH2 may be the same or different.

[0123] The discharge of cleaning fluid from the second through-hole TH2 may be highly linear, or it may be less linear, such that the cleaning fluid spreads out in a cone shape. The second through-hole TH2 may have less linearity than the first through-hole TH1. When the second through-hole TH2 is linear, almost the entire amount of cleaning fluid discharged from the second through-hole TH2 can be supplied to the wall surface defining the second space 110ac, such as the inner wall surface 110w of the container nozzle or the lower surface of the fixing part 211, making it easier to secure a sufficient amount of cleaning fluid as the amount of cleaning fluid that flows along the outer surface of the nozzle body 212 (the amount of cleaning fluid available for self-cleaning).

[0124] The cleaning liquid, which is discharged from the second through-hole and supplied to the outer surface of the nozzle body 212 by splashing or the like, and which flows down the outer surface, is at least partially dripped from the lowest end of the nozzle body 212.

[0125] Whether or not the cleaning solution drips from the lowest end of the nozzle body 212 can be confirmed by positioning the nozzle body 212 so that its central axis C21 is vertical, supplying, for example, 10 mL of cleaning solution to the outer surface of the nozzle body 212 (for example, the outer surface immediately adjacent to the fixing part 211) using a dropper or the like, allowing the cleaning solution to flow down the outer surface of the nozzle body 212, and visually observing whether at least a portion of the cleaning solution drips from the lowest end. If room temperature (23°C) water (ion-exchanged water) is used as the cleaning solution, and at least a portion of the water reaches the lower end of the head part 2122 when the water is allowed to flow down by gravity alone, then the cleaning nozzle 21 can exhibit a higher level of self-cleaning performance.

[0126] In this embodiment, a portion of the outer surface of the pipe portion 2121 in the nozzle body portion 212 is a surface that faces the inner wall surface of the first nozzle cylindrical portion 110a1 (hereinafter also referred to as the "container nozzle facing surface"). That is, a portion of the outer surface of the pipe portion 2121 is a container nozzle facing surface where a virtual line segment extended in the normal direction intersects the inner wall surface of the first nozzle cylindrical portion 110a1. In this embodiment, a portion of the base region AB1 formed by the outer peripheral surface of the base end member B1 is the container nozzle facing surface. In this embodiment, a second through hole TH2 is drilled in the container nozzle facing surface.

[0127] Since the pipe portion 2121, which is provided on the base end side of the nozzle body portion 212, is located close to the first container nozzle 110a, the provision of a second through-hole TH2 in the pipe portion 2121 allows for high cleaning performance against the first container nozzle 110a. Furthermore, by providing the second through-hole TH2 on the surface facing the container nozzle, the cleaning liquid can be supplied to the inner wall surface 110a1s of the first container nozzle 110a with high impact force, and the amount of splashback of the cleaning liquid can also be increased.

[0128] The pipe portion 2121 may be provided with a plurality of through holes TH. When the pipe portion 2121 is provided with a plurality of through holes TH, the vertical positions of one through hole TH and the other through holes TH may be the same or different. Also, the circumferential positions of one through hole TH and the other through holes TH may be the same or different. That is, when the pipe portion 2121 is provided with a plurality of through holes TH, the through holes TH may be arranged in the circumferential direction, which is the direction that revolves around the central axis C21 of the nozzle body portion 212, or they may be arranged in the longitudinal direction XL of the nozzle body portion 212, or they may be arranged in a spiral shape toward the tip of the nozzle body portion 212, or they may be arranged randomly.

[0129] The pipe portion 2121 may be provided with only one of the first through-holes TH1 and the second through-holes TH2, or with both. The same applies to the head portion 2122, which may be provided with only one of the first through-holes TH1 and the second through-holes TH2, or with both. When both through-holes TH are provided in the head portion 2122, it is usually configured such that there are more first through-holes TH1 than second through-holes TH2.

[0130] When a plurality of second through holes TH2 are provided in the pipe portion 2121, it is preferable that one of the plurality of second through holes TH2 and another second through hole TH2 are provided such that the imaginary line segments extending in the direction of discharge of the cleaning liquid do not intersect in the second space portion 110ac. It is preferable that one of the plurality of second through holes TH2 and another second through hole TH2 are located at different positions in the circumferential direction. It is preferable that one of the plurality of second through holes TH2 and another second through hole TH2 are located at different positions in the longitudinal direction XL.

[0131] The second through-hole TH2 may have a discharge direction for the cleaning liquid (the direction of penetration of the second through-hole TH2) that is in the radial direction XD of the nozzle body 212. The discharge direction of the cleaning liquid from the second through-hole TH2 may be inclined at an angle in the vertical direction with respect to the radial direction XD, or it may be inclined at an angle in the left-right direction, or it may be inclined in both the vertical and left-right directions. That is, if a plane perpendicular to the normal of the inner wall surface 110a1s of the first container nozzle 110a is taken as the reference plane, and the point where a virtual line segment drawn in the direction of penetration of the second through-hole TH2 intersects the inner wall surface 110a1s of the first container nozzle 110a is taken as the cleaning liquid arrival point, then the orientation of the virtual line segment with respect to the reference plane at the cleaning liquid arrival point (the direction of incidence of the cleaning liquid) does not have to be vertical, and may be in an inclined direction with respect to the vertical.

[0132] When the through-hole TH provided in the pipe section 2121 is angled upward or downward, the angle (elevation or depression angle with respect to the horizontal plane) may be, for example, 10° or more, 15° or more, 20° or more, or 25° or more. The elevation or depression angle may also be, for example, 45° or less, 40° or less, or 35° or less.

[0133] When the through-hole TH provided in the pipe section 2121 is tilted to the left or right, the angle (angle with respect to the radial direction XD when viewed in the direction of the central axis C21) may be, for example, 10° or more, 15° or more, 20° or more, or 25° or more. The angle may also be, for example, 45° or less, 40° or less, or 35° or less.

[0134] When the cleaning liquid released from the second through-hole TH2 contacts the inner wall surface 110a1s of the first container nozzle 110a at an oblique angle, the cleaning liquid moves more easily along the inner wall surface 110a1s, making it easier to clean the inner wall surface 110a1s over a wide area. If the second through-hole TH2 is tilted in the left-right direction, the cleaning liquid will flow down while swirling along the inner wall surface 110a1s of the first container nozzle 110a, starting from the point where the cleaning liquid arrives, making it easier to extend the cleaning effect over a wide area.

[0135] Inclining the through-hole TH in the pipe section 2121 with respect to the radial direction XD is also advantageous for the through-hole TH in the head section. It is necessary for the cleaning fluid to reach a long distance from the first through-hole TH1 formed in the head section 2122. If the through-hole TH in the pipe section 2121 is formed with an inclination compared to forming it in the thickness direction of the pipe section 2121 (radial direction XD of the nozzle body section 212), the through-hole becomes longer, and the resistance to the passage of the cleaning fluid increases. In that case, the pressure drop of the cleaning fluid as it passes through the pipe section 2121 is suppressed, and the pressure of the cleaning fluid in the head section 2122 can be increased.

[0136] One of the through-holes TH provided in the pipe section 2121 or the head section 2122 may be provided facing the stirring shaft 31a. There may be multiple through-holes TH that supply cleaning fluid to the stirring shaft 31a. Multiple through-holes TH may be arranged in the longitudinal direction (vertical direction) of the stirring shaft 31a. By releasing cleaning fluid from multiple through-holes TH arranged in this way and supplying cleaning fluid to multiple locations on the stirring shaft 31a, the stirring shaft 31a can be thoroughly cleaned.

[0137] The through-holes TH provided toward the stirring shaft 31a may be of the straight-line type as described above, or they may be of the fan-shaped, hollow-cone, or full-cone type cleaning liquid type. When through-holes TH that spread the cleaning liquid in a fan shape are provided in the pipe section 2121 or the head section 2122, it is preferable to arrange them so that the direction in which the cleaning liquid spreads is in the longitudinal direction of the stirring shaft 31a. In that case, the cleaning liquid discharged from one through-hole TH is more easily supplied to the stirring shaft 31a, and the supply point of the cleaning liquid becomes a band-shaped area extending in the longitudinal direction of the stirring shaft 31a, so that a wide area of ​​the stirring shaft 31a can be cleaned with one through-hole TH. Multiple through-holes TH that discharge the cleaning liquid in a fan shape toward the stirring shaft 31a may be provided in the nozzle body section 212, in which case they may be arranged in a line along the longitudinal direction of the nozzle body section 212.

[0138] One of the through-holes TH provided in the pipe section 2121 or the head section 2122 may be positioned toward the inner wall surface of the second container nozzle 110b or the third container nozzle 110c. The third container nozzle 110c, which is far from the first container nozzle 110a on which the cleaning nozzle 21 is located, is tilted so as it extends upward, it moves away from the first container nozzle 110a. In other words, the third container nozzle 110c is tilted to facilitate the reception of cleaning fluid and is positioned to easily perform cleaning with respect to the viewing window (glass window).

[0139] The second through-holes TH2 provided in the pipe section 2121 may be multiple, and these multiple second through-holes TH2 may include second through-holes TH2 whose through-direction is radial XD and second through-holes TH2 whose through-direction is inclined with respect to radial XD.

[0140] The second through-hole TH2 may be provided in the head portion 2122. In this embodiment, the cleaning nozzle 21 has a smaller diameter pipe portion 2121 directly in front of the head portion 2122, making it easier to provide the second through-hole TH2 in relation to the head portion 2122. The second through-hole TH2 provided in the head portion 2122 may be formed toward the inner wall surface 110a1s of the first container nozzle 110a, or it may be formed toward the second flange portion 2113 of the fixing portion 211 that defines the upper edge of the second space portion 110ac.

[0141] When a second through-hole TH2 is provided in the head portion 2122, the second through-hole TH2 may be positioned so that the imaginary line segment extending in the direction of penetration does not intersect with the imaginary line segment extending from the through-hole TH provided in the pipe portion 2121. In this case, it is advantageous in generating a strong impact force in the cleaning liquid discharged from the second through-hole TH2. Alternatively, the second through-hole TH2 provided in the head portion 2122 may be positioned so that the discharged cleaning liquid collides with the cleaning liquid discharged from the through-hole TH provided in the pipe portion 2121. In this case, much of the cleaning liquid scattered by the collision can be directed onto the nozzle body portion 212.

[0142] When cleaning the reaction vessel 10 with the cleaning nozzle 21, the pressure of the cleaning liquid released from the through-hole TH provided in the pipe section 2121 may be reduced so that the cleaning liquid does not completely detach from the pipe section 2121 and fly out into the air, and some or all of the cleaning liquid released from the pipe section 2121 may drip down from the opening of the through-hole and flow down the surface of the pipe section 2121 and the head section 2122. In other words, when cleaning, a cleaning method may be implemented in which the cleaning device 20 is operated in multiple modes, including a high-pressure mode in which a relatively high-pressure cleaning liquid is supplied from the liquid supply pipe 22 in order to prioritize the cleaning of the reaction vessel 10, and a low-pressure mode in which the cleaning liquid is supplied from the liquid supply pipe 22 at a pressure lower than that of the high-pressure mode.

[0143] In this low-pressure mode, as described above, the discharge pressure is adjusted so that at least a portion of the cleaning fluid discharged from the through-hole TH in the pipe section 2121 of the cleaning nozzle does not completely detach from the pipe section 2121 and fly out into the air. The high-pressure mode and the low-pressure mode may each be performed multiple times in a single cleaning process.

[0144] As described above, the cleaning nozzle of this embodiment not only prevents liquids and powders from accumulating, but also has excellent self-cleaning properties, making it easier to ensure cleanliness after cleaning the object to be cleaned. Furthermore, because the cleaning nozzle 21 of this embodiment has excellent self-cleaning properties, it is not necessary to remove the cleaning device 20 when processing the object to be treated using the reaction tank 10 after cleaning, thereby reducing the effort required for processing the object to be treated.

[0145] As described above, this embodiment exhibits excellent self-cleaning properties for the cleaning nozzle 21. Therefore, in this embodiment, cleanliness of the reaction vessel 10 after cleaning is easily ensured. In this embodiment, examples are given in which the outer surface (connection region) of the first and second connection parts, which are made of welded material, narrows or widens towards the tip. In this embodiment, the connection region may be formed such that the area from the first intermediate region AM1 through the connection region (first connection region AC1) to the edge of the second intermediate region AM2 is flush, as shown in Figures 8A and 8B. In this case as well, the area between the first intermediate region AM1, the connection region (first connection region AC1), and the second intermediate region AM2 can be made continuous without steps or other differences, so liquids and powders are less likely to remain, and self-cleaning properties are excellent.

[0146] In this embodiment, the reaction vessel 10 is illustrated as described above, but the reaction vessel may have a different configuration from the one illustrated above. Also, the object to be cleaned using the cleaning nozzle does not have to be a reaction vessel. In the above, a fixed cleaning nozzle is illustrated as the cleaning nozzle, but the cleaning nozzle in this embodiment may be a rotary cleaning nozzle having a rotating body as shown in Figure 9.

[0147] The cleaning nozzle 21 illustrated in Figure 9 is similar to the fixed cleaning nozzle illustrated above in that the nozzle body 212 comprises a pipe portion 2121 extending downward from the fixed portion 211 and a head portion 2122 provided below the pipe portion 2121, and that the cleaning fluid supplied to the head portion 2122 through the pipe portion 2121 is discharged from a through hole TH provided in the head portion 2122. It is also similar to the fixed cleaning nozzle illustrated above in that the relative position of the pipe portion 2121 to the fixed portion 211 is fixed. On the other hand, the rotary cleaning nozzle illustrated in Figure 9 is configured such that the head portion 2122 rotates around the central axis of the pipe portion 2121, and the lower end of the nozzle body 212 supports the head portion 2122 from below. Furthermore, the fact that a protrusion 212t is provided at the lower end of the nozzle body portion 212 is the same for the cleaning nozzle 21 illustrated in Figure 9 as for the fixed cleaning nozzle 21 illustrated in Figures 2 and 3.

[0148] The cleaning nozzle 21 illustrated in Figure 9 uses two hollow rotating bodies P1 and P2 as components of the head portion 2122. The two rotating bodies P1 and P2 have a shape that resembles a sphere divided into two halves vertically in the external appearance of the cleaning nozzle 21. The first rotating body P1 on the upstream side (upper side) and the second rotating body P2 on the downstream side (lower side) rotate in different directions.

[0149] When viewed from a direction along the central axis C21 of the cleaning nozzle 21, the first rotating body P1 and the second rotating body P2 are configured such that one rotates clockwise around the central axis C21, and the other rotates counterclockwise around the central axis C21.

[0150] The first rotating body P1 and the second rotating body P2 each have through holes TH whose direction of penetration is inclined vertically with respect to the radial direction, and through holes TH whose direction of penetration is inclined horizontally with respect to the radial direction. The through holes whose direction of penetration is inclined horizontally with respect to the radial direction (hereinafter also referred to as "horizontally inclined holes THY") have a larger diameter than the through holes inclined vertically (hereinafter also referred to as "vertically inclined holes THT").

[0151] The first rotating body P1 and the second rotating body P2 each have multiple lateral inclined holes THY. The direction in which the lateral inclined holes THY in the first rotating body P1 are inclined is uniformly to either the left or the right. The direction in which the lateral inclined holes THY in the second rotating body P2 are also uniformly inclined to either the left or the right. However, the direction of inclination of the lateral inclined holes THY in the first rotating body P1 and the lateral inclined holes THY in the second rotating body P2 are opposite to each other. The rotary cleaning nozzle illustrated here utilizes the reaction force when the cleaning fluid is discharged from the lateral inclined holes THY so that the two rotating bodies P1 and P2 move in opposite directions.

[0152] Each of the first rotating body P1 and the second rotating body P2 has a plurality of vertical inclined holes THT. The plurality of vertical inclined holes THT are arranged vertically in each of the first rotating body P1 and the second rotating body P2. The uppermost vertical inclined hole THT in the first rotating body P1 is located at the upper end of the first rotating body P1, and the lowermost vertical inclined hole THT in the first rotating body P1 is located at the lower end of the first rotating body P1. The same applies to the vertical inclined holes THT in the second rotating body P2.

[0153] In this cleaning nozzle 21, when the pressure of the cleaning fluid decreases, the rotating bodies P1 and P2 slow down their rotation speed, and much of the cleaning fluid released from the through hole TH flows down the surface of the rotating bodies P1 and P2. The cleaning fluid that flows from the surface of the second rotating body P2 onto the tapered surface 212ta1 of the protrusion 212t then flows around to the lower end surface 212ta2 and drips down. Therefore, the cleaning nozzle 21 of this embodiment exhibits good self-cleaning performance even though it is a rotating type. The specific shape of the protrusion 212t for improving self-cleaning performance is the same as that described for the fixed cleaning nozzle.

[0154] In this embodiment, the cleaning nozzle 21 has a through hole TH in the pipe section 2121. If the pipe section does not have a through hole, when the supply of cleaning fluid stops, a negative pressure may be created inside the pipe section when the cleaning fluid is discharged from the through hole in the head section, which may prevent the cleaning fluid from being discharged smoothly. On the other hand, in this embodiment, the cleaning nozzle 21 allows the cleaning fluid to be discharged smoothly from the through hole TH in the head section 2122. The fact that the cleaning fluid inside can be easily discharged from the through hole TH when the supply of cleaning fluid stops, enabling good self-cleaning, is common to both fixed and rotary cleaning nozzles. Furthermore, the hydrostatic pressure from the cleaning fluid accumulated in the pipe section 2121 can be applied to the rotating bodies P1 and P2, preventing them from suddenly stopping. In that case, the circumferential travel distance from when the supply of cleaning fluid stops until the rotating bodies P1 and P2 stop is increased, allowing the cleaning fluid discharged from the through hole TH to be supplied to the tapered surface 212ta1 over a wide area.

[0155] In this embodiment, by making the horizontally inclined hole THY a through-hole TH with high straight-line propagation of the cleaning fluid, and the vertically inclined hole THT a through-hole TH with lower straight-line propagation (more prone to spreading) than the horizontally inclined hole THY, it is possible to directly apply the cleaning fluid released from the vertically inclined hole THT to the protruding portion 212t even when the cleaning fluid is being supplied as usual. In such a case, even higher self-cleaning performance can be expected.

[0156] As described above, various modifications can be made to the cleaning nozzle to improve self-cleaning performance. For example, the rotary cleaning nozzle described above is merely a limited example of the cleaning nozzle 21 in this embodiment. When the cleaning nozzle is a rotary cleaning nozzle, it may have two rotating bodies that rotate in the same direction, or it may have only one rotating body that rotates in only one direction. The rotary cleaning nozzle may be a two-dimensional rotary nozzle or a three-dimensional rotary nozzle. Furthermore, although the above example illustrates a configuration in which the cleaning nozzle 21 is attached to a first container nozzle 10a that extends vertically, the cleaning nozzle 21 may also be provided on a third container nozzle 10c that extends diagonally upward with respect to the vertical direction, and the nozzle body portion 212 may be arranged to extend diagonally downward from the fixing portion 211. Such configurations are also within the scope intended by the present invention. Moreover, cases in which the cleaning nozzle 21 is provided on both the first container nozzle 10a and the third container nozzle 10c are also within the scope intended by the present invention. In other words, the present invention is not limited in any way to the above examples.

[0157] As stated above, this specification includes the following disclosures. (1) A cleaning nozzle, which is attached to the opening at the top of a hollow object to be cleaned, for cleaning the inner wall surface of the opening with a cleaning solution, A fixing part attached to the opening of the object to be cleaned, It has a hollow nozzle body portion extending downward from the fixed portion, Multiple through holes are provided in the nozzle body. The cleaning liquid is supplied to the nozzle body inserted into the object to be cleaned through the opening, and the cleaning liquid is discharged through the through hole. A cleaning nozzle having a conical or polygonal pyramidal projection that protrudes downward from the lower end of the nozzle body.

[0158] (2) The cleaning nozzle according to (1), wherein the through hole is provided in the protruding portion.

[0159] (3) The nozzle body portion is A pipe section extending downward from the aforementioned fixed section, It has a head portion provided at the lower end of the pipe portion, The head portion is provided with the through hole, The head portion is fixed to the pipe portion, The cleaning nozzle according to (1) or (2), which is a fixed cleaning nozzle used for cleaning by fixing the position of the through hole inside the object to be cleaned.

[0160] (4) The nozzle body portion is It has a pipe section extending downward from the fixed section and a head section provided below the pipe section, The lower end supports the head portion from below and is fixed to the pipe portion. A cleaning nozzle according to any one of (1) to (3), wherein the head portion is provided with the through hole, and the head portion rotates around the central axis of the pipe portion.

[0161] (5) The cleaning nozzle according to any one of (1) to (4), wherein the projection has a conical shape with a vertex angle of 120 degrees or more and 170 degrees or less at its lower end.

[0162] (6) A cleaning nozzle according to any one of (1) to (5), wherein the distance from the intersection of a perpendicular line drawn from the through-hole located at the lowest end toward the central axis of the nozzle body and the central axis, to the lowest end of the nozzle body, is shorter than the distance from the intersection to the through-hole. [Explanation of Symbols]

[0163] 10: Reaction vessel, 100: Vessel body, 100c: First space, 102: Bottom wall, 103: Peripheral side wall, 104: Ceiling wall, 110a: First container nozzle, 110a1: First nozzle cylindrical part, 110a2: First nozzle flange part, 110ac: Second space, 110a1s: Inner wall surface (of the first container nozzle), 110b: Second container nozzle, 110c: Third container nozzle, 20: Washing device, 21: Washing nozzle, 22: Liquid supply pipe 211: Fixed part, 211a: Base, 211b: Cover material 212: Nozzle body, 212t: Protruding part, 212ta1: Tapered surface, 212ta2: Lower end surface, 2121: Pipe part, 2122: Head part 30: Stirring device, 31: Stirring blade, 31a: Stirring shaft, 31b: Stirring member, AB1: proximal region, AC1: First connection area (connection area), AM1: 1st intermediate area (1st area) AM2: 2nd intermediate area (2nd area) AT1: Advanced Region B1: Base member Cx0: (The central axis of the tank body) Cx1: Central axis (of the first container nozzle) Cx2: (The central axis of the second container nozzle) Cx3: (The central axis of the third container nozzle) C21: (The central axis of the nozzle body) F: Welding material T1: Tip member TH: through hole, TH1: first through hole, TH2: second through hole, XD: Radial direction XL: Length direction θt: vertical angle

Claims

1. A cleaning nozzle, which is attached to the opening at the top of a hollow object to be cleaned, for cleaning the inner wall surface of the opening with a cleaning solution, A fixing part attached to the opening of the object to be cleaned, It has a hollow nozzle body portion extending downward from the fixed portion, Multiple through holes are provided in the nozzle body. The cleaning liquid is supplied to the nozzle body inserted into the object to be cleaned through the opening, and the cleaning liquid is discharged through the through hole. The lower end of the nozzle body is provided with a cone-shaped or polygonal pyramidal projection that protrudes downward. The nozzle body portion is A pipe section extending downward from the aforementioned fixed section, It has a head portion located below the pipe portion, The aforementioned protrusion constitutes the lower end of the head portion, Multiple through holes opening on the surface of the head portion, A cleaning nozzle having a plurality of through holes opening on the surface of the pipe portion.

2. The cleaning nozzle according to claim 1, wherein the outer surface of the protruding portion is a tapered surface, and the through hole opening to the tapered surface is provided.

3. The head portion is fixed to the pipe portion, The cleaning nozzle according to claim 1 or 2, which is a fixed cleaning nozzle used for cleaning by fixing the position of the through hole inside the object to be cleaned.

4. The cleaning nozzle according to claim 1 or 2, wherein the head portion rotates around the central axis of the pipe portion.

5. The cleaning nozzle according to claim 1 or 2, wherein the protruding portion has a conical shape with a apex angle of 120 degrees or more and 170 degrees or less at its lower end.

6. The cleaning nozzle according to claim 1 or 2, wherein the distance from the intersection of a perpendicular line drawn from the through-hole located at the lowest end toward the central axis of the nozzle body and the central axis, to the lowest end of the nozzle body, is shorter than the distance from the intersection to the through-hole.

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