Modular material handling robot platform

Abstract

To provide a structural platform inside a vacuum chamber.SOLUTION: A robot control system includes a vacuum chamber, a robot operating inside the vacuum chamber, and an external controller for receiving communications from a host controller, and the vacuum chamber includes a first base plate having a linear drive component, a power coupling component, and a plurality of transport guides. The first base plate combines with a second base plate to implement a structural platform inside the vacuum chamber. The robot includes a robot driving portion that moves inside the vacuum chamber along a transport guide, and an arm that is movable together with the robot driving portion. Communications received at an external controller from a host controller is cooperated with an internal controller to provide closed-loop control for the robot.SELECTED DRAWING: Figure 25A

Description

Technical Field

[0001] Exemplary and non-limiting embodiments generally relate to a substrate transfer assembly. Brief description of the prior art

[0002] Robots for transferring substrates are known. Linear drive systems for the transfer of substrate transfer robots as described in US Patent Application Publication Nos. 2016 / 0229296, 2013 / 0071218, 2015 / 0214086, and 2017 / 0028546 (which are hereby incorporated by reference in their entirety) are also known. Summary

[0003] The following summary is intended to be merely exemplary. This summary is not intended to limit the claims. The present application discloses a robot control system as follows. The robot control system includes a vacuum chamber, a robot operating within the vacuum chamber, and an external controller configured to receive communication from a host controller, The vacuum chamber has a first base plate, and is configured to have at least one of a linear drive component and a power coupling component connected to an upper surface of the first base plate, and a plurality of transfer guides provided on the upper surface of the first base plate. The first base plate has at least one alignment function configured to align an end of the first base plate with an end of a second base plate. The first base plate is configured to provide a structural platform within the vacuum chamber in combination with the second base plate, The robot includes a robot drive unit and at least one arm. The robot drive unit has at least one motor and is configured to move within the vacuum chamber along the plurality of transfer guides. The at least one arm has a connecting portion connected to the robot drive unit and is configured to be movable together with the robot drive unit, The communication received by the host controller in the external controller is configured to work in conjunction with the internal controller to provide closed-loop control to the robot.

[0004] The present invention also discloses a robot control system comprising a vacuum chamber, a robot operating within the vacuum chamber, an external controller configured to receive communications from a host controller, and a first optical communication module located on the wall of the vacuum chamber. The vacuum chamber is configured to have a first base plate, at least one linear drive component and a power coupling component connected to the upper surface of the first base plate, and a plurality of transport guides provided on the upper surface of the first base plate, wherein the first base plate has at least one alignment function configured to align the end of the first base plate with the end of the second base plate, and the first base plate, in combination with the second base plate, is configured to provide a structural platform within the vacuum chamber. The robot comprises a robot drive unit and at least one arm, the robot drive unit having at least one motor and configured to move within the vacuum chamber along the plurality of transport guides, and the at least one arm having a coupling portion connected to the robot drive unit and configured to move together with the robot drive unit. The at least one motor has at least one motor amplifier, and the robot drive unit is configured to move within the vacuum chamber along the plurality of transport guides. The external controller comprises a master controller and an input / output module. The robot control system further includes a second optical communication module positioned on the wall surface of the robot drive unit, which establishes an optical communication link between the external controller and the first optical communication module. The optical communication link is configured to receive at least one optical signal from the first optical communication module and to transmit and receive data even when the distance changes. The communication received by the external controller from the host controller is configured to provide closed-loop control to the robot in conjunction with the data received from the optical communication link.

[0005] The present invention also discloses the following method: This method includes: preparing a vacuum chamber; preparing a robot to operate within the vacuum chamber; receiving communications from a host controller with an external controller; and establishing an optical communication link between a first optical communication module located on the wall of the vacuum chamber and a second optical communication module located on the wall of the robot drive unit; The vacuum chamber is configured to have a first base plate, at least one linear drive component and a power coupling component connected to the upper surface of the first base plate, and a plurality of transport guides provided on the upper surface of the first base plate, wherein the first base plate has at least one alignment function configured to align the end of the first base plate with the end of the second base plate, and the first base plate, in combination with the second base plate, is configured to provide a structural platform within the vacuum chamber. The robot comprises a robot drive unit and at least one arm, the robot drive unit having at least one motor and configured to move within the vacuum chamber along the plurality of transport guides, and the at least one arm having a coupling portion connected to the robot drive unit and configured to move together with the robot drive unit. The at least one motor has at least one motor amplifier, and the robot drive unit is configured to move within the vacuum chamber along the plurality of transport guides. The external controller comprises a master controller and an input / output module. The optical communication link is configured to receive at least one optical signal from the first optical communication module and to transmit and receive data even when the distance changes. The communication received by the external controller from the host controller is configured to provide closed-loop control to the robot in conjunction with the data received from the optical communication link.

[0006] The present invention also discloses the following apparatus, comprising a first base plate and a plurality of rails located above the first base plate. The first base plate is configured such that at least one linear drive component and / or at least one power coupling component is connected to the upper side of the first base plate. The first base plate is configured to be placed inside a vacuum chamber. The end of the first base plate includes at least one alignment mechanism configured to align the end with the end of a second base plate. The first base plate, in combination with the second base plate, is configured to provide a structural platform inside the vacuum chamber for a robotic drive unit to move along the plurality of rails inside the vacuum chamber. The present invention also discloses a method comprising connecting a first baseplate assembly into a vacuum chamber and connecting a second baseplate assembly into the vacuum chamber. The first baseplate assembly comprises a first baseplate and a first set of rails located above the first baseplate. The second baseplate assembly comprises a second baseplate. The ends of the second baseplate are connected to the ends of the first baseplate. The first baseplate assembly comprises at least one alignment mechanism configured to align the ends of the first baseplate with the ends of the second baseplate. The first baseplate, in combination with the second baseplate, is configured to provide a structural platform within the vacuum chamber for a robotic drive unit to move within the vacuum chamber along the first set of rails. The present invention also discloses the following method, which includes providing a first base plate, providing a plurality of rails on the upper side of the first base plate, providing at least one alignment mechanism at the end of the first base plate configured to align the end with the end of a second base plate, and connecting at least one of the following to the upper side of the first base plate: a power coupling component configured to transmit power to another power coupling component of a robot drive unit, the power transmission being inductive, and a linear motor component configured to provide a magnetic field for moving the robot drive unit along the plurality of rails. The first base plate is configured to be connected to the second base plate within the vacuum chamber to provide a structural platform within the vacuum chamber for the robot drive unit to move within the vacuum chamber along the first plurality of rails. [Brief explanation of the drawing]

[0007] The aforementioned embodiments and other features will be described in the following description along with the attached drawings.

[0008] [Figure 1] It is a schematic top view of a substrate processing apparatus including features as described in this specification.

[0009] [Figure 2] It is a perspective view of the substrate transfer device of the substrate processing apparatus shown in FIG. 1.

[0010] [Figure 3] It is a perspective view of the substrate transfer device shown in FIG. 2.

[0011] [Figure 4] It is a view from the end of the perspective view of the substrate transfer device shown in FIGS. 2 and 3, shown inside the transfer chamber of the substrate processing apparatus.

[0012] [Figure 5] It is a side view of the robot of the substrate transfer device shown in FIGS. 1 to 4. <0​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​

[0019] [Figure 11] Figure 10 shows a view from the edge of the substrate transport device inside the transport chamber.

[0020] [Figure 12] Figures 10 and 11 show a perspective view of the magnetic drive unit and one of the driven members of the linear motor.

[0021] [Figure 13] Figure 12 is a perspective view of the magnetic drive unit.

[0022] [Figure 14] This is a perspective view of a power module used in conjunction with the devices shown in Figures 10 and 11.

[0023] [Figure 14A] Figure 14 is a perspective view showing the relative layout of multiple power modules.

[0024] [Figure 15] This figure shows power coupling using the power modules shown in Figures 14 and 14A.

[0025] [Figure 16] Figure 15 is an isometric view of the coupling of one exemplary embodiment.

[0026] [Figure 17] Figures 10 and 11 are schematic diagrams showing some of the components of the optical communication system.

[0027] [Figure 18] This is a perspective view of the substrate transport device on the bottom wall of the transport chamber.

[0028] [Figure 18A] This is a perspective view of an alternative embodiment of the substrate transport device on the bottom wall of the transport chamber.

[0029] [Figure 19] This is a schematic top view of a substrate processing apparatus having the features described herein.

[0030] [Figure 20A] This is a schematic side view of a material handling robot platform including the features described herein.

[0031] [Figure 20B] Figure 20A is a view from the edge of the platform.

[0032] [Figure 20C] Figures 20A and 20B are top-down views of the platform.

[0033] [Figure 20D] Figures 20A to 20C show a partial perspective view of one end of the platform base plate assembly.

[0034] [Figure 20E] This is a partial perspective view of a rail or magnetic levitation guide integrally formed on a base plate assembly.

[0035] [Figure 20F] This is a partial cross-sectional view of one of the base plate assemblies, showing part of the opening and sealing portion.

[0036] [Figure 21A] This is a schematic side view of a cross-section of a material handling robot platform and a chamber including the features described herein.

[0037] [Figure 21B] Figure 21A is a cross-sectional view of the platform.

[0038] [Figure 21C]Figures 21A and 21B show upper cross-sectional views of the platform.

[0039] [Figure 22A] This is a schematic side view of a cross-section of a material handling robot platform and a chamber including the features described herein.

[0040] [Figure 22B] Figure 22A is a cross-sectional view of the platform.

[0041] [Figure 22C] Figures 22A and 22B show upper cross-sectional views of the platform.

[0042] [Figure 23A] This is a schematic side view of a cross-section of a material handling robot platform and a chamber including the features described herein.

[0043] [Figure 23B] Figure 23A is a cross-sectional view of the platform.

[0044] [Figure 23C] Figures 23A and 23B show upper cross-sectional views of the platform.

[0045] [Figure 24] This diagram illustrates the use of multiple sensors to explain the transition between a linear magnetic levitation orbit / guide and a magnetic levitation gap sensor target.

[0046] [Figure 25] This figure shows exemplary embodiments illustrating examples of linear robot control systems. [Figure 26] This figure shows exemplary embodiments illustrating examples of linear robot control systems. [Figure 27] This figure shows exemplary embodiments illustrating examples of linear robot control systems. [Figure 28] This figure shows exemplary embodiments illustrating examples of linear robot control systems. [Figure 29] This figure shows exemplary embodiments illustrating examples of linear robot control systems. [Figure 30] This figure shows exemplary embodiments illustrating examples of linear robot control systems. Detailed description of the embodiment

[0047] Referring to Figure 1, a schematic plan view of apparatus 10 incorporating the features of an exemplary embodiment is shown. While the features will be described with reference to the exemplary embodiment shown in the drawings, it will be understood that these features can be implemented in various alternative forms of the embodiment. Furthermore, any preferred size, shape, or type of elements or materials may be used.

[0048] In this example, apparatus 10 is a substrate processing apparatus. The substrate processing apparatus 10 generally comprises a substrate transport device 12 (also referred to as a linear vacuum robot), a plurality of substrate processing chambers 14, a transport chamber 15, an apparatus front-end module (EFEM) 16, and a substrate cassette elevator 18. The transport chamber 15 may be maintained as, for example, a vacuum chamber or an inert gas chamber. The transport device 12 is located within the chamber 15 and is configured to transport substrates 20, such as semiconductor wafers or flat panel displays, between, for example, chambers 14, 15 and a stationary transport chamber or load lock 22. The EFEM 16 is configured to transport the substrates 20 between the substrate cassette elevator 18 and the stationary transport chamber 22. In this example, the EFEM has a robot 24 with SCARA arms. The robot 24 is configured to move linearly within the EFEM as indicated by arrow A. However, any preferred type of EFEM may be provided. Apparatus 10 has a controller 50. The controller 50 comprises at least one processor 52 and at least one memory 54 containing computer program code 56. The controller 50 is configured to control the operation of various devices and robots of the apparatus 10.

[0049] Referring further to Figures 2 to 4, perspective views and end views of the substrate transport device 12 are shown. In this example, the substrate transport device 12 comprises a robot 26, a robot housing 28, and a linear drive system 30. Figures 2 and 3 show the substrate transport device 12 on the bottom wall of the transport chamber 15, with the side and top walls of the transport chamber 15 not shown. Figure 4 shows the substrate transport device 12 on the bottom wall or floor of the transport chamber 15, with only the top wall of the transport chamber 15 not shown. The robot 26 is connected to the robot housing 28, which is movable relative to the chamber 15 by the linear drive system 30. The linear drive system 30 includes a guide 32 on the floor of the transport chamber 15 and a track or trolley 33 on the outer bottom side of the housing. With respect to a magnetic levitation linear drive system, the track can be separated from the guide 32 by a gap maintained by magnetism / electromagnetism. With respect to a non-magnetic levitation linear drive system, the guide may include rails on which the track rests. In alternative examples, the guide may be a magnetic levitation transport guide or track. In one example, the track 33 may have wheels mounted on the bottom of the housing, thereby traveling on the rail 32. The linear drive system 30 is configured to move the robot housing 28, thereby moving the substrate transport device 12 in a straight line along the rail 32 within the transport chamber 15, as indicated by arrow B in Figure 1. In an alternative embodiment, the robot 26 may be mounted on an open slide or platform instead of a housing, and the open slide or platform may have a track that travels on the rail / guide 32. In another alternative example, the guide and track may be provided on the side walls of the chamber 15, in addition to, or instead of, the floor of the chamber 15.

[0050] Referring further to Figures 5-7, the robot 26 generally comprises a robot drive unit 34 and a robot arm assembly 36 connected to the robot drive unit 34. The robot 26 shown in Figures 5-7 is merely one example of a robot having multiple end effectors for moving a substrate, and should not be taken as limiting. Any suitable type of robot, robot drive unit, and robot arm may be provided. In this example, the robot arm assembly 36 has a two-arm configuration. Each of the arms 36a and 36b of the robot arm assembly 36 has an arm link, pulley, band, and substrate support end effector 38 driven by coaxial drive shafts 40a, 40b, and 40c of the robot drive unit 34. In an alternative example, the drive unit may include multiple drive shafts that are not coaxially arranged with respect to each other. The robot drive unit 34 includes motors 42a, 42b, and 42c for each drive shaft, a vertical drive system 44 including motor 46, and various position encoders / sensors 48a, 48b, and 48c for motor 42 and / or drive shaft 40 and the vertical drive system 44.

[0051] The robot 26 is mounted in the robot housing 28 such that almost the entire robot 26, excluding the robot arm assembly 36, is located within the robot housing 28. This is best illustrated, for example, in Figures 3 and 4. Specifically, the robot arm assembly 36 is located outside the housing 28, close to the upper side of the housing 28, and the drive shafts 40a, 40b, and 40c extend from the remainder of the drive unit 34 located inside the housing 28 through an opening 58 (see Figure 3) inside the upper side of the robot housing 28. A seal 60 (see Figure 3) is provided in the opening 58 to seal the opening 58, allowing the drive shafts 40a, 40b, and 40c to rotate axially and move vertically when driven by the vertical drive system 44. According to this type of embodiment, the area inside the housing 28 may have a different environment from the area inside the chamber 15. For example, the area inside the housing may simply be an atmospheric air environment, while the area inside the chamber 15 (outside the housing 28) may be a vacuum environment or an inert gas environment.

[0052] nested environment

[0053] Figure 8 schematically shows a "nested" configuration that may be used in one example. The robot housing 28 can provide a sealed robot housing for the robot drive unit 34, except for a small portion of the drive shaft that extends through the opening 58. More specifically, all of the motors 42, 44, all of the sensors 48, all of the electrical wiring, and most of the drive shaft 40 (see Figure 7) are sealed within the robot housing 28. All of the active electrical hardware of the robot drive unit 34, including the sensors and motors, can be isolated from the environment outside the robot housing 28 in region 17 of the transport chamber 15 and held within the sealed robot housing 28 in region 29 as shown in Figure 8. Region 17 can be maintained as an isolated environment within the transport chamber 15, isolated from the external atmospheric environment 13. Thus, environment 29 is nested within environment 17, and environment 17 isolates environment 29 from the external atmospheric environment 13 (normal air 13 outside the chamber 15). Environment 29 may be a vacuum environment, but does not need to be a vacuum environment even if environment 17 is a vacuum environment. The fact that the environment 29 inside the robot housing 28 does not need to be a vacuum environment can help prevent the release of vapor gases from components inside the robot housing 28. This nesting of environments (region 29 is nested inside region 17) is particularly applicable to a robot housing 28 that can move within the transport chamber 15 without hindering or being interfered with linear relative movement along the length of the transport chamber 15.

[0054] Referring further to Figure 9, in this example the apparatus 10 includes a linear drive system 30, a power coupling system 62, a data communication coupling system 64, and a heat transfer coupling system 66. The power coupling system 62 may be used to supply power to components within the housing 28. The data communication coupling system 64 may be used to transmit data signals to components within the housing 28 (and / or to components within the arm, through the housing), and / or to transmit data signals from components within the housing 28 to a data processor outside the chamber 15 (and / or from components within the arm, through the housing). The heat transfer coupling system 66 may be used to transfer heat from components within the housing 28 to outside the chamber 15. In alternative exemplary embodiments, the power coupling system 62 and the data communication coupling system 64 may be combined at least partially to reduce the number of components within the area 17 of the chamber 15. In some embodiments, an apparatus may be provided that does not include all of the systems described above.

[0055] In the illustrated example, all of these systems 30, 62, 64, and 66 can be configured so as not to interfere with or disrupt the nested environment shown in Figure 8. In other words, it is preferable that these systems 30, 62, 64, and 66 are constructed such that when all four systems 30, 62, 64, and 66 are operating, the environment inside the housing 28 is isolated from the environment inside the chamber 15.

[0056] Linear motor

[0057] Referring further to Figures 10 and 11, the linear drive system 30 generally comprises a linear motor 70. The linear motor 70 is an electric motor whose stator and rotor are, in principle, "non-rotating". Therefore, instead of generating torque (rotation), it generates a linear force along its length. An example of this is disclosed in U.S. Patent Publication 2015 / 0214086, which is incorporated herein by reference in its entirety. The figure shows a linear motor located beneath the housing 28. However, in alternative embodiments, one or more components of the linear drive unit may not be located beneath the housing 28. For example, the components of the linear motor and / or the linear drive system 30 may be located on the sides of the housing 28 and the chamber 15.

[0058] In an exemplary embodiment, the linear drive system 30 may include a magnetic levitation system utilizing a non-contact magnetic support induction subsystem. Referring also to Figures 12 and 13, the linear motor 70 in the illustrated example utilizes a modular design including a fixed magnetic drive unit 72 and a driven member 76. In this example, the drive unit 72 has a substantially U-shape. The substantially U-shape forms a slot 73, and electromagnets 74 are provided facing each other on the top and bottom sides of the slot 73. As best shown in Figure 10, the drive unit 72 is mounted in alignment and fixedly on the bottom wall of the chamber 15, and the driven member 76 is mounted on the outside of the bottom side of the robot housing 28. In an alternative example, the drive unit 72 may be mounted on the robot housing 28, and the rail 76 may be fixedly mounted on the transport chamber 15.

[0059] A shield may be provided around the linear rail. See also Figure 10A, the transfer chamber 15 houses a robot having a linear rail 32 and a track 30. The linear rail and track may be partially or completely enclosed within the shield 31. The purpose of the shield is to reduce or eliminate the upward movement of undesirable particulate or contaminating material from the rail or track into the transfer chamber while allowing the robot to move in the direction of the rail. Furthermore, the shield, which may be a single part or an assembly of parts, prevents the movement of material, particles, or wafer fragments from the transfer chamber into the operating area of ​​the linear rail. This contributes to preventing contamination / clogging of the linear rail mechanism.

[0060] The transfer chamber may further include a vent 16 and a pump port 17, the vent positioned substantially above the chamber 15 and the pump port positioned below or inside the shielding area of ​​the shield 31. Such an arrangement further prevents the movement of contaminants from the shielding area into the transfer chamber. If the vent is operational, molecules from the vent will move toward the pump port, carrying any airborne contaminants in the process. Even if the vent is closed, operating the pump will draw any contaminants from the chamber into the shielding area.

[0061] As best shown in Figure 12, the driven member 76 extends into the slot of the U-shaped drive unit 72. Thus, the drive unit 72 can autonomously utilize the same rail 76 extending from the bottom of the robot housing 28. In alternative embodiments, the guide rails may be provided and arranged in fewer or more places in other configurations, for example, on the side walls of the chamber 15. As described above, the modular linear drive system may utilize a non-contact magnetic drive forcer subsystem. This subsystem may include one or more linear motor modules and one or more position feedback modules. Using the above example, the housing 28 can move linearly within the chamber 15, as shown by arrow B in Figure 1, without the need to run any wiring inside the housing 28. The linear motor 70 is entirely outside the housing 28 and therefore does not increase the risk of interference between the two regions 17 and 29. Furthermore, since the driven member 76 does not come into contact with any of the drive units 72, and the driving of the driven member is simply magnetically controlled, the risk of contaminants from the driven member 76 and the drive units 72 in region 17 is reduced. Power supply to the drive units 72 can be controlled by the controller 50 shown in Figure 1. The drive unit 72 or a portion of the drive unit 72 can be energized to generate a magnetic field to move the driven member 76 in the linear direction B (e.g., acceleration and deceleration), and to appropriately magnetically fix the housing 28 in a fixed position in front of the chambers 14 and 22.

[0062] Each linear motor module may have a fixed passive magnetic stainless steel portion. The fixed passive magnetic stainless steel portion may have a toothed portion that interacts with the corresponding primary forcer. The passive portion may or may not have a magnet. Multiple supports may autonomously utilize the same secondary forcer. Each linear motor module may have a primary forcer coupled to a support. Here, the primary forcer may have three-phase wiring and a permanent magnet. In an alternative embodiment, the permanent magnet may be provided as part of the driven member to counteract gravity and dynamic loads. In an alternative embodiment, the permanent magnet may be provided as part of one or more magnetic bearings to counteract gravity and dynamic loads. An example of possible primary and secondary forcer topologies is the Siemens 1FN6 design. In an alternative embodiment, any suitable forcer may be provided. The permanent magnet of the forcer may be provided as a component that facilitates both efficient thrust generation (coupled to wiring) and payload cancellation so that the magnetic bearing minimizes power consumption during normal operation. Here, the attractive force between the forceer and the corresponding passive rail can be set to a nominal gap such that this force cancels out the force due to gravity, resulting in minimum power consumption. Furthermore, the setting point of the gap can be changed so that the gap is adjusted so that the attractive force cancels out the force due to gravity as the payload changes. As a result, minimum power consumption is achieved in accordance with the change in payload. For example, the gap of the left forceer can be changed independently of that of the right forceer. To generate thrust to the support for the fixed passive magnetic stainless steel secondary forceers, a voltage can be selectively applied to the magnetic coil of the primary forceer by an advanced control subsystem. Each fixed passive magnetic stainless steel secondary forceer can be mounted with its teeth facing vertically downward. This allows the attractive force of the permanent magnet of the primary forceer to cancel out the weight of the support and the payload, minimizing the number of DC components that need to be applied by the vertical coil of the non-contact magnetic support induction subsystem.

[0063] Power coupling system

[0064] Referring further to Figure 14, in this exemplary embodiment, the power coupling system 62 is configured to use magnetic induction resonance effects to send power to the substrate transport device 12 for use with components within the housing 28. The power coupling system 62 generally comprises a power coupling or module 78 on the inner bottom wall of the transport chamber 15 and a power coupling or module 80 on the outer bottom side of the robot housing 28. As best shown in Figures 14A, 4, 10, and 11, a plurality of primary modules 78 may be arranged in alignment on the bottom wall of the transport chamber 15, and secondary modules 80 may be arranged on top of a row of primary modules 78 mounted on the outer bottom side of the housing 28. An example of inductive power transfer in the substrate transport device is disclosed in U.S. Patent Publication US2016 / 0229296, which is incorporated herein by reference in whole. The power coupling may be combined with a communication device.

[0065] Referring to Figure 15, a block diagram representation of an exemplary embodiment of the power coupling system 62 is shown. As shown, the power coupling system 62 may include an alternating current (AC) power source 82, power coupling between at least one primary module 78 and at least one secondary module 80, and an optional rectifier circuit 84. AC power 86 is supplied to the primary module 78, which provides power to the secondary module 80 through a gap 88, and the secondary module 80 provides AC power 90 to the rectifier circuit 84. The secondary module 80 moves with the robot housing 28 while the primary module 78 is stationary. However, in alternative examples, the primary and secondary modules may be configured to move relative to each other, including translation, rotation, or a combination of the two. The primary and secondary modules may be a primary or secondary core, or a primary or secondary rail. In alternative embodiments, any suitable combination or shape may be provided. For example, wires from module 80 may extend through a sealed opening in the housing 28 and supply power to, for example, the robot's motors 42 and / or controllers (e.g., servo motor controllers), and / or communication equipment and / or sensors within the housing 28, or subsequently to devices in or on the robot arm assembly 36. In an alternative embodiment, two or more modules 80 may be provided, and may be located on one or more sides of the housing 28. Since the modules 78, 80 do not come into contact with each other, the risk of contamination within the chamber 15 is reduced when module 80 moves relative to module 78.

[0066] Referring here to Figure 16, an isometric view of an alternative embodiment of an example of power coupling 62a is shown. As best shown in Figure 14, the primary module(s) 78 may consist of a primary core or rail 94 and a primary winding or coil 96. These may be supplied, for example, by an AC power source 82 and configured such that an AC current through the primary winding 96 generates an AC magnetic flux in the primary core or rail 94. The primary core or rail 94 may feature an extension 98 along the direction of the relative motion B between the primary module 78 and the secondary module 80. The secondary module 80 may consist of a secondary core or rail 100 and a secondary winding or coil 102 configured such that the AC magnetic flux in the secondary core or rail 100 induces a voltage in the secondary winding 102. The secondary core or rail 100 may move along an extension 98 of the primary core or rail 94 as part of the secondary module, and may be positioned so that magnetic flux can pass between the primary core or rail and the extension 98 of the secondary core or rail at a shoe portion that crosses the gap 104 between the primary core or rail and the extension 98 of the secondary core or rail 100. The output of the secondary winding 102 can be used directly as an AC power source, or, if DC power is required, the secondary winding can power a rectifier circuit 84 (e.g., inside the housing 28), which can function as a DC power source 92 as shown in Figure 15. The primary winding 96 and the secondary winding 102 may feature substantially the same number of turns so that the amplitude of the output voltage of the secondary winding is substantially equal to the amplitude of the voltage supplied by the AC power source 82. If a higher output voltage is required, the number of turns of the secondary winding 102 may be greater than the number of turns of the primary winding 96. Conversely, if the required output voltage is lower, the number of turns of the secondary winding 102 may be less than the number of turns of the primary winding 96. The primary core 94 and the secondary core 100 may be C-shaped, E-shaped, or feature any preferred shape that enables inductive coupling between the primary module 78 and the secondary module 80, as schematically shown in Figure 16. The extension 98 of the primary core 94 may be linear to accommodate linear motion between the primary module 78 and the secondary module 80, or curved to accommodate curved or rotational motion.The primary core 94, extension 98, and secondary core 100 may be manufactured from soft magnetic materials, such as silicon steel, soft magnetic composite materials, another material suitable for guiding magnetic flux, or a combination of such materials. A laminated structure may be utilized. Here, the primary and secondary modules may be considered as induction sections where the windings are coils. All electrical wiring of the secondary module 80 may be located inside the robot housing 28 so that the wiring is not located within area 17. All electrical wiring of the primary module 78 may be located outside the transport chamber 15 so that the wiring is not located within area 17.

[0067] Data transfer integration system

[0068] In this example, the data communication coupling system 64 includes an optical communication system 106 comprising a first member 108 and a second member 110, as best shown in Figures 10, 11, and 17. The first member 108 is connected to the outer bottom side of the robot housing 28. In an alternative example, the first member 108 may be located inside the housing having an optical window penetrating the housing, or it may be located on a side of the housing other than the bottom. The second member 110 is connected to the side wall of the transport chamber 15. The second member 110 may be located outside the region 17, and the transport chamber 15 may still have a window for the two members 108, 110 to communicate optically with each other. In another example, the second member 110 may be located inside the chamber 15.

[0069] Two components 108 and 110 can use one or more laser beams or other optical signals 112 to send and receive data signals over the changing distance between the housing 28 and the chamber 15 as the housing moves within the chamber 15. The data signals can then be sent and received to components within the robot housing 28 for purposes such as controlling the robot 26 and / or the linear drive system 30, and transmitting data from sensors of the substrate transport device 12 to the controller 50. All wiring (electrical and / or optical) from the first component 108 can be located inside the robot housing 28 so that no wiring is located within area 17. All wiring (electrical and / or optical) from the second component 110 can be located outside the transport chamber 15 so that no wiring is located within area 17. This reduces the risk of contamination within area 17, such as gas emissions from these wires. This communication system can be combined with a power supply.

[0070] Heat transfer coupling system

[0071] As described above, the apparatus 10 may further include a heat transfer coupling system 66. The heat transfer coupling system 66 may be used to provide thermal management for the components of the substrate transport device 12 within the robot housing 28 so as to transfer heat from inside the robot housing 28 to outside the transport chamber 15. This may be particularly important when the region 17 is a vacuum environment with low heat transfer capacity. The moving robot housing 28 functions to house all of the advanced control subsystems that move with the substrate transport device 12. The moving robot housing 28 further functions to support a robot transport arm that works in cooperation with a moving support to transport one or more substrates between multiple positions. Since there are active components coupled to the moving robot housing 28, such as a motor 42, heat generated by the active components can be dissipated by the thermal management subsystem. In the case of a moving support in a vacuum, heat can be dissipated by radiation or conduction through a medium, such as through a gas, or by coupling a bellows to the moving support and circulating a gas or liquid coolant through a coolant. In the case of cooling by radiation alone (or a combination of radiation and convection), the allowable temperature difference between all or part of the moving parts and the chamber may be specified, for example, 50 degrees Celsius. In the illustrated exemplary embodiment, non-contact interleaved fin-like structures 120, 122 (see Figures 2 to 4, 10, and 11) can be used to maximize the opposing surface area. High emissivity coatings can also be used to maximize heat transfer related to surface area. Examples of suitable coatings include aluminum oxide, aluminum nitride, or any suitable high emissivity coating. In alternative embodiments, any suitable surface or coating may be provided. In the case of a moving support in a gaseous or inert environment, heat can be dissipated by radiation, convection, or both. Because there are active components coupled to the moving support 28, power and communication can be sent to the moving support subsystem with a power coupling system 62 and a communication coupling system 64, as described in the above example. Power and communication can be sent wirelessly to the moving support subsystem by inductive coupling, a service loop, or a combination of these methods, as described in the above example.

[0072] The active components coupled to the support may be potted with vacuum-compatible potting or epoxy, sealed within the housing 28, or a combination of both. An example of a suitable mobile support thermal sink subsystem is disclosed in Hosek M. and Hofmeister C. (Film filed September 14, 2012, U.S. Patent Application No. 13 / 618,117, U.S. Patent Publication No. 2013 / 0071218, title “Low Variability Robot”), which is incorporated herein by reference in its entirety. However, because a robot housing 28 is used, the amount of potting or epoxy used may be reduced or not used at all.

[0073] Alternative examples

[0074] Referring further to Figure 18, an alternative exemplary embodiment is shown. This embodiment is similar to those shown in Figures 2 to 4, but with a reduced form factor. The linear motor is enclosed, and shielded linear bearings and a protected optical link are present. In some situations, heat transfer fins may not be necessary. Referring further to Figure 18A, another alternative exemplary embodiment is shown. This embodiment is similar to those shown in Figure 18, but in this example, the housing 28 does not include heat transfer fins. In this type of embodiment, wall cooling, such as flowing a coolant through the chamber walls, may be provided to the walls of the housing 28 and / or the vacuum chamber walls when there are no cooling fins. However, such a cooling system may be used in combination with fins. Figure 18A shows an example of a cooling tube 15a in the wall of chamber 15'.

[0075] In some embodiments, robot cooling can be facilitated by cooling the vacuum chamber walls. Heat can be transferred from the robot drive unit to the vacuum chamber walls by radiation, convection, or a combination thereof. Regardless of the heat transfer mechanism from the robot drive unit to the vacuum chamber, the amount and rate of heat transferred can be increased by cooling the chamber walls. Cooling of the chamber walls can be achieved by several different methods or combinations thereof. In one exemplary embodiment, cooling can be achieved by integrating a cooling path of vents directly or indirectly onto the vacuum chamber walls. A reduction in the vacuum wall temperature can be achieved by using a continuous or intermittent flow of a working fluid, which may be a liquid, gas, or a combination of the two, such that the working fluid has an initial inlet temperature lower than the vacuum chamber wall temperature. This facilitates the cooling of the robot drive unit. In an alternative embodiment, the surface of the vacuum chamber may be cooled using thermoelectric cooling tiles, where heat is dissipated at a higher temperature on the hotter side of the thermoelectric tile, thus enabling more effective cooling.

[0076] Further reference to Figure 19 shows an alternative exemplary embodiment. In this example, the system is used between two cluster tools 150a and 150b. Chamber 15 has load locks 152 at both ends coupled to tools 150a and 150b. The robot housing 28 and the mounted robot 26 are movable as indicated by arrow B to transport substrates between tool robots 154a and 154b. The robot may also be used in a vacuum EFEM as shown in Figure 1.

[0077] Features

[0078] One of the features described herein is the ability of the robot housing 28 to function as a cart that moves linearly within the transport chamber 15, which carries all the components necessary for the substrate transport device 12, with the only physical contact with the transport chamber 15 being on the rails 32. However, if a magnetic levitation system is used, even contact with the rails 32 may not be necessary.

[0079] Another feature described herein is that substantially all components of the substrate transport device 12, except for the robot arm assembly 36 and the upper part of the robot drive shaft, can be isolated within the robot housing 28 in region 29. Region 29 may have a non-vacuum atmosphere, even if region 17 is a vacuum. This means that the robot 26 may not be a vacuum-compatible robot (a non-vacuum compatible robot). In the case of a non-vacuum compatible robot, gas emission is not a critical element in its design and manufacture. Therefore, non-vacuum compatible robots do not need to provide a low or zero gas emission design and are less expensive than vacuum-compatible robots. The robot housing 28 may also have a window for optical communication so that component 108 can be located entirely inside the robot housing 28. Power coupling 80 can also be located entirely inside the robot housing 28, by having a magnetically transparent section in part of the robot housing 28 so that two power couplings 78, 80 can function properly by induction. The transport chamber 15 may be equipped with a linear encoder 156, as shown in Figure 10, to detect the linear position of the robot housing 28 on the rail 32. All communication with components inside and / or on the robot housing 28 may be conducted optically, wirelessly, or via power coupling, so as to avoid the need for communication wires or optical wires to cross area 17.

[0080] As described herein, the robot drive unit 34 can be sealed by a sealed robot housing 28. Thus, the transport chamber 15 requires only rails 32 for the substrate transport device 12 to move along, and there is no other direct physical contact by the transport chamber 15 with the robot housing 28 or the substrate transport device 12. Even in the non-magnetic levitation embodiment, a gap or distance can always be provided between the transport chamber 15 and the substrate transport device 12 at all other points except the rails 32. Such non-contact reduces contamination of the area 17 by the substrate transport device 12.

[0081] Modular platform

[0082] Features described herein can be used to provide a material handling platform having a modular, laterally moving vacuum environment robot. The modular system allows for scalability and eliminates the need for the manufacture and transport of excessively large components. Modular features can be used in conjunction with one or more of the features described above, or in entirely different systems.

[0083] An exemplary embodiment of the material handling robot platform 200 includes features as described herein, schematically shown in Figures 20A to 20D. As shown in these figures, the platform 200 may consist of a robot drive unit 202 having a robot arm 36 and a controller 50, and one or more base plate assemblies (modules) 204. As an example, Figures 20A to 20C show three base plate assemblies 204. However, more or fewer than three base plate assemblies 204 may be provided. The controller 50 includes at least one processor 52 and at least one memory 54 containing computer program code 56. The controller 50 is configured to control the operation of various devices and robots of the apparatus 200. The robot drive unit 202 may include the above-described features, including a linear drive system 30 and a robot drive unit 34. However, other types of drives may be used as alternatives. Any suitable robot arm assembly may also be provided.

[0084] The baseplate assemblies 204 may be identical or have different characteristics. Each baseplate assembly 204 may include a baseplate 206 and various modules 208 that can facilitate the lateral movement of the robot drive unit 202 along each baseplate assembly 204. For example, these modules 208 may include rails (e.g., for mechanical linear bearings or magnetic bearings), power transmission configurations (e.g., service loops, arms, contactless power coupling modules, etc.), communication configurations (e.g., service loops, arms, wireless high-frequency modules, optical communication modules, communication via contactless power coupling, etc.), linear electric motors (e.g., magnetic tracks, stator segments, etc.), and linear position encoders (e.g., scales for optical, magnetic, inductive, or capacitive position encoder reading heads, etc.). The modules may be included as a whole on an individual baseplate assembly 204. Alternatively, the modules may be installed so as to span two or more adjacent baseplates.

[0085] The transport chamber 15 may be provided with a linear encoder 156, as shown in Figure 10, to detect the linear position of the robot housing 28 on the rail 32. The linear position encoder may have one continuous position trajectory or multiple inline position trajectories and may use multiple reading heads. Any communication with components inside and / or on the robot housing 28 may be done via optical, wireless, or power coupling, so that communication electrical wires or optical wires do not need to cross the area 17. For example, sensors may include position encoders such as optical, magnetic, inductive, or capacitive position encoders, laser interferometers, or any other suitable device capable of measuring the position of the robot drive unit along a desired lateral motion direction, such as relative to the chamber 15. Measurements from these position sensors may be used to control the position of the robot drive unit along a desired lateral motion direction of the robot using forces generated by the linear actuator. To accommodate a modular design of the vacuum chamber (i.e., a vacuum chamber consisting of multiple parts), additional encoder reading heads for the linear actuation system and / or additional position sensors for the magnetic support system may be utilized to enable smooth transitions between individual parts of the vacuum chamber. Specifically, in the case of mechanical linear bearings, the fixed rail may extend slightly beyond the base plate 206. This allows for smooth transitions in the case of a rectangular arrangement of linear tracks. This feature is unnecessary in other arrangements, such as triangles.

[0086] The base plate assemblies 204 may be configured to be placed adjacent to one another. This arrangement allows the robot drive unit 202 to move laterally from one base plate assembly 204 to another, as indicated by arrow B. For this purpose, each base plate assembly 204 may be characterized by having an alignment feature 210, as shown, for example, in Figure 20D. This allows two adjacent base plate assemblies 204 to be aligned vertically and laterally at a joint 211, enabling a smooth transition of the robot drive unit 202 between the two adjacent base plate assemblies 204. As an example, the alignment feature 210 may be formed by a precise mating surface of a suitable shape, or by a system of pins and cylindrical and / or elliptical holes.

[0087] The base plate assembly 204 may further include a sealing mechanism 212 that, when installed in a vacuum chamber, can facilitate the sealing joint at joint 211. For example, the sealing mechanism 212 may include sealing elements such as polished sealing surfaces, coated sealing surfaces, grooves for sealing elements, and / or O-rings.

[0088] The base plate assembly 204 may further include a mechanical connection mechanism 214 between the base plate assembly 204 and the vacuum chamber, such as holes, threaded studs, threaded fasteners, or clamps. The mechanical connection mechanism 214 and the base plate 206 itself may be configured such that various modules 204 that can facilitate the lateral movement of the robot drive unit 202 can be directly aligned with corresponding modules on adjacent base plate assemblies 204.

[0089] Referring further to Figure 20E, the base plate 206 may include metal with rails 32 integrally formed. Alternatively, the rails may be formed separately and then connected to the upper 207 of the base plate 206. In this example, module 208 is mounted to the upper 207 of the base plate 206. The module may include, for example, a plurality of magnetic drive units 72 and a plurality of power couplings 78 aligned along the longitudinal length of the base plate 206. As shown in Figure 20F, the base plate 206 may include openings 209, 211 that pass through between the upper 207 and the bottom 213. Electrical wires 215, 217 from modules 72, 78 may reach the controller 50 or other power / controller through the openings 209, 211. To seal the openings 209, 211, sealing portions 219, 221 may be provided over the openings 209, 211.

[0090] As shown in Figures 21A to 21C, multiple base plate assemblies 204 can be integrated within the vacuum chamber 220. In the example shown in Figures 21A to 21C, three base plate assemblies 204 are used. As shown, the vacuum chamber 220 may include one or more lateral ribs 222 to provide structural strength. The chamber may further be fitted with one or more lids 224. A feature of the present invention is that the above-described design of the base plate assemblies 204 allows the base plate assemblies to be installed from above the chamber, as indicated by arrow C. This allows each base plate assembly to directly face another base plate assembly without interference from the lateral ribs 222. Thus, as indicated by arrow B, interference-free lateral movement of the robot drive unit 202 along the entire length of the vacuum chamber 220 is facilitated.

[0091] In this embodiment, the base plate 206 has ledges 223 on opposing sides and on the bottom sides at both ends (see, for example, Figures 20F and 20A). As best shown in Figure 21A, the frame of the vacuum chamber has a number of openings passing through its bottom. The base plate 206 is positioned at these openings to close them and forms at least a portion of the bottom wall of the vacuum chamber. The ledges 223 can be placed on the bottom of the vacuum chamber frame with the sealing portion 225 (see Figure 20F) forming a seal at the joint.

[0092] To further avoid the creation and transport of excessively large components, the vacuum chamber may be divided into sections 240, as shown in Figures 22A to 22C. In the example in Figures 22A to 22C, three sections 240 are shown. One or more lids 224 may be fitted to the sections of the chamber. Each section 240 may utilize one or more base plate assemblies 204 installed as described above with respect to Figures 21A to 21C. The sections 240 may include connecting and sealing mechanisms 242 at the joints of the sections 240, for example, 212 in Figure 20D. Sealing mechanisms may also be used in other areas, such as each end of the chamber. This allows one section 240 to be attached to the next section 240, with the space between them sealed around the entire inner opening area. In this example, the area is square or rectangular, as shown in the shape in Figure 22B. As an example, flanges with fasteners or clamps may be used for mechanical connections. Various sealing elements, such as polished sealing surfaces, coated sealing surfaces, grooves for sealing elements, and / or O-rings, may be used to achieve proper sealing. These are merely some examples and should not be taken as limiting.

[0093] When the X-axis motion range for a linear vacuum robot is extremely wide, it becomes difficult to construct position trajectories for position sensors that are part of the aforementioned linear actuator system. To overcome this limitation, a method using two position sensors to create split position trajectories is disclosed here. Referring to Figure 24, when the robot drive unit traverses in the X direction, both position sensors RH1 and RH2 generate valid position data shifted by a gap length F in all cases except when one or the other of sensors RH1 or RH2 targets a transition between the ends of two position trajectories E1 and E2. Note that the gap or transition N is N. The disclosed solution overcomes the period during which the data from one sensor is invalid by switching to the other sensor. Since sensors RH1 and RH2 are physically offset from each other in terms of the length of the guide / trajectories E1 and E2, at least one of sensors RH1 and RH2 reports a valid position. The position of the transition N between trajectories E1 and E2 is a design value and is known in advance, and the controller 2406 makes a decision about switching between sensors RH1 and RH2 based on the known position of the transition N. In other embodiments, algorithms may be implemented to use, integrate, or combine data from sensors RH1 and RH2 to achieve a gradual or smooth data transition when switching between active sensors. During the period when data from both sensors is active, the data from both may be combined or integrated in various ways to improve accuracy, resolution, reliability, or noise reduction.

[0094] Furthermore, if the X-axis motion range for a magnetically levitated robot is extremely wide, it becomes difficult to construct a smooth, continuous surface that the gap sensor targets. Referring to Figure 31, there are two vertical sensors P and Q targeting targets T1 and T2. At position L, there is an interruption / transition of targets T1 and T2. Gap measurements from either sensor are valid as long as the sensor is not moving through position L. When the gap sensor is moving through L, the controller 2406 makes a decision based on the X-axis motion positions from sensors RH1 and RH2. The algorithm described above is executed on the controller 2406 to use gap data from P or Q.

[0095] An exemplary embodiment provides a device comprising a first base plate and a plurality of rails or transport guides located above the first base plate. The first base plate is configured such that at least one linear drive component and / or at least one power coupling component is connected to the upper side of the first base plate. The first base plate is configured to be placed inside a vacuum chamber. The ends of the first base plate include at least one alignment mechanism configured to align the ends with the ends of a second base plate. The first base plate, in combination with the second base plate, is configured to provide a structural platform inside the vacuum chamber for a robotic drive unit to move within the vacuum chamber along the plurality of rails or transport guides.

[0096] The at least one alignment mechanism may be configured to align the plurality of rails or transport guides with the rails or transport guides of the second base plate. The at least one alignment mechanism may include at least one projection extending from the end of the first base plate and at least one recess extending into the end of the first base plate. The end of the first base plate may include at least one mechanical connection mechanism protruding from the end of the first base plate, the at least one mechanical connection mechanism may be configured to be mechanically attached to the second base plate by at least one fastener. The first base plate may be configured to be mechanically attached directly to the vacuum chamber at the bottom of the vacuum chamber. The first base plate may be configured to form at least a portion of the bottom wall of the vacuum chamber. The first base plate may close an opening through the bottom of the vacuum chamber. The first base plate may include first ledges on two opposing sides thereof, the first ledges may be configured to rest on the opposing sides of the vacuum chamber and on a shelf formed by the vacuum chamber. The first base plate may have second ledges at both ends thereof, the second ledges may extend laterally through the vacuum chamber and be configured to rest on the shelf formed by the vacuum chamber. The first base plate has a plurality of openings through it, the openings of which electrical wires are configured to extend through the first base plate from the bottom side of the first base plate to the top side of the first base plate, and the device may further include a sealing portion configured to seal the openings with the wires. The apparatus may further include the vacuum chamber, which includes a plurality of main sections configured to be attached to one another in an end-to-end configuration to form an elongated frame to which the first base plate is connected, the main sections having opposing side walls and a bottom wall, and at least one lid section may be configured to be detachably attached to the upper side of the opposing side walls.The apparatus may further comprise the at least one linear drive component connected to the upper side of the first base plate, the at least one linear drive component configured to provide a magnetic field for moving the robot drive unit along the plurality of rails or transport guides. The apparatus may further comprise the power coupling component configured to transmit power to another power coupling component of the robot drive unit, the power transmission of which may be by induction.

[0097] Exemplary methods may be provided, including connecting a first baseplate assembly into a vacuum chamber and connecting a second baseplate assembly into the vacuum chamber. The first baseplate assembly includes a first baseplate and a first set of rails or transport guides located above the first baseplate. The second baseplate assembly includes a second baseplate. The ends of the second baseplate are connected to the ends of the first baseplate. The first baseplate assembly includes at least one alignment mechanism configured to align the ends of the first baseplate with the ends of the second baseplate. The first baseplate, in combination with the second baseplate, is configured to provide a structural platform within the vacuum chamber for a robotic drive unit to move within the vacuum chamber along the first set of rails or transport guides.

[0098] The second baseplate assembly includes a second plurality of rails or transport guides above the second baseplate, and connecting the second baseplate assembly into the vacuum chamber may include aligning the second plurality of rails or transport guides with the first plurality of rails or transport guides in the at least one alignment mechanism. Connecting the first baseplate assembly into the vacuum chamber may include the first baseplate forming at least a portion of the bottom wall of the vacuum chamber. The first baseplate may close an opening through the bottom of the vacuum chamber. Connecting the first baseplate assembly into the vacuum chamber may include the first baseplate having a first ledge on its two opposing sides, the first ledge may rest on the opposing sides of the vacuum chamber on a shelf formed by the vacuum chamber. Connecting the first base plate assembly into the vacuum chamber includes the first base plate having second ledges at both ends thereof, the second ledges extending laterally through the vacuum chamber and resting on a shelf formed by the vacuum chamber.

[0099] Exemplary methods may be provided. The method includes providing a first base plate; providing a plurality of rails or transport guides on the upper side of the first base plate; providing at least one alignment mechanism at the end of the first base plate configured to align the end with the end of a second base plate; and connecting at least one of a power coupling component and a linear motor component configured to provide a magnetic field for moving the robot drive along the plurality of rails or transport guides, the power coupling component being configured to transmit power to another power coupling component of the robot drive, the power transmission being inductive. The first base plate is configured to be connected to the second base plate within the vacuum chamber to provide a structural platform within the vacuum chamber for the robot drive to move within the vacuum chamber along the first plurality of rails or transport guides.

[0100] Exemplary embodiments may be provided in the apparatus, comprising means for connecting a first baseplate assembly into a vacuum chamber and means for connecting a second baseplate assembly into the vacuum chamber. The first baseplate assembly includes a first baseplate and a plurality of rails or transport guides above the first baseplate. The second baseplate assembly includes a second baseplate. The ends of the second baseplate are connected to the ends of the first baseplate. The first baseplate assembly includes at least one alignment mechanism configured to align the ends of the first baseplate with the ends of the second baseplate. The first baseplate, in combination with the second baseplate, is configured to provide a structural platform within the vacuum chamber for a robotic drive unit to move within the vacuum chamber along the first plurality of rails or transport guides.

[0101] An additional means to suppress the creation and transport of excessively large components is to eliminate the base plate 204 shown in Figures 20 and 21. Figures 23A to 23C show an example of an embodiment in which the base plate is an integral part of the chamber 241. The chamber may be a single piece or a divided piece as shown in Figure 23A. All features and components necessary to facilitate the lateral movement of the robot drive unit 202, such as rails or transport guides (e.g., for mechanical linear bearings or magnetic bearings), power transmission configurations (e.g., service loops, arms, contactless power coupling modules, etc.), communication configurations (e.g., service loops, arms, radio frequency modules, optical communication modules, communication via contactless power coupling, etc.), linear electric motors (e.g., magnetic tracks, stator segments, etc.) and linear position encoders (e.g., scales for optical, magnetic, inductive or capacitive position encoder reading heads, etc.), may be mounted directly on the floor (or walls) of the chamber 241. The chamber portion 241 may have connection and sealing mechanisms 242 at the joints of the portion 241. The sealing mechanism may also be used in other areas, such as at the ends of the chamber. This allows one part 241 to be attached to the next part 241, with the space between them sealed around the entire inner opening region. In this example, the region is square or rectangular, as shown in the shape in Figure 23B. As an example, a flange with a fastener or clamp may be used for mechanical connection. Various sealing elements such as polished sealing surfaces, coated sealing surfaces, grooves for sealing elements, and / or O-rings may be used to achieve proper sealing. These are merely some examples and should not be taken as limiting.

[0102] Linear vacuum robot control system architecture

[0103] Figure 25 shows a block diagram of an exemplary embodiment of a linear robot control system.

[0104] The master controller may perform functions such as user interface, communication with the host controller (e.g., using serial or Ethernet communication), configuration data management, higher-order motion planning (i.e., sequence of robot movements), trajectory generation (calculation of motion profiles for each movement on each motion axis), position control for all motion axes, and an Adaptive Placement System (APS). An example of an Adaptive Placement System is described in U.S. Patent No. 10,058,996, which is incorporated herein by reference in its entirety.

[0105] The master controller may receive various commands from the host controller, including configuration, requests, and action commands (for example, commands to perform pick or place operations), and may return reports to the host controller indicating the completion of the commands and other information.

[0106] The master controller may receive, via a high-speed network, the position of all motion axes (periodically from the motor amplifier), the status of digital and analog inputs (from the I / O module and, where applicable, from the motor amplifier), and the timing of digital input changes (from the I / O module and, where applicable, from the motor amplifier). The master controller may also transmit, via a high-speed network, information for setting the commanded current (periodically to the motor amplifier) ​​and digital and analog outputs (to the I / O module and, where applicable, to the motor amplifier) ​​for each motion axis. Whether a rail-based linear system or a magnetic levitation linear system, the control system may involve the use of an optical communication link or other wireless communication link. For example, as shown in Figure 25, the system may comprise two optical communication modules, each having a viewport in the vacuum chamber wall and the robot drive unit wall. Thus, an optical communication link may be provided between the external controller and the robot drive unit (which may include closed-loop control as described above).

[0107] The I / O module may read digital and analog inputs (which may include inputs from APS sensors) and configure digital and analog outputs. The I / O module may read information configuring digital and analog outputs (from the master controller) via a high-speed network and may transmit the status of digital and analog inputs (to the master controller) and the timing of digital input changes (further to the master controller) via a high-speed network.

[0108] Each motor amplifier may perform functions such as executing motor rectification algorithms, executing current control loops, reading digital and analog inputs, and setting digital and analog outputs. Each motor amplifier may periodically read position(s) measured from position encoder(s) and set output voltages for motor(s) control. Each motor amplifier may receive information from the master controller via a high-speed network to set commanded current(s) and digital and analog outputs for (periodically) supported motion(s). Each motor amplifier may transmit to the master controller via a high-speed network the measured position(s) of (periodically) supported motion(s), the status of digital and analog inputs, and, where applicable, the timing of digital input changes.

[0109] A high-speed network (e.g., EtherCAT) may facilitate communication between the master controller, I / O modules, and motor amplifiers. Outbound traffic (i.e., traffic from the master controller to the I / O modules and motor amplifiers) may include commanded currents for each motion axis (transmitted periodically from the master controller to the motor amplifiers) and information for setting digital and analog outputs (transmitted from the master controller to the I / O modules and, where applicable, to the motor amplifiers). Inbound traffic (i.e., traffic from the I / O modules and motor amplifiers to the master controller) may include measured positions (from the motor amplifiers), the status of digital and analog inputs (from the I / O modules and, where applicable, from the motor amplifiers), and the timing of digital input changes (from the I / O modules and, where applicable, from the motor amplifiers).

[0110] When Adaptive Placement System (APS) functionality is required, the APS sensor(s) may be routed directly or via an I / O connection board to one or more inputs of an I / O module. The purpose of any I / O connection board is to reduce the number of inputs routed to the I / O module.

[0111] Figure 26 shows a block diagram of another exemplary embodiment of a linear robot control system. In this exemplary embodiment, the master controller may be located within the robot drive unit, as opposed to being part of an external controller.

[0112] In the exemplary embodiment shown in Figure 26, the master controller may communicate with the motor amplifier via a high-speed network, substantially similar to the embodiments described above. However, a different means of communication may be used for communication between the master controller and the I / O module. For example, a separate communication network (e.g., Ethernet) may be used. As schematically shown in Figure 26, the same communication network may also be used for communication with the host controller, in which case the network router may be conveniently integrated into an external controller board. Alternatively, separate means of communication may be used for communication between the host controller and the master controller, and further for communication between the master controller and the I / O module. These two communication channels may be implemented via the same physical medium (e.g., serial communication over Ethernet), or they may use different physical mediums.

[0113] Communication between the master controller and the I / O module may enable synchronization of clocks running on the two devices, or may characterize another mechanism for appropriately determining the timing of digital input changes on the I / O module for APS calculation purposes (for example, where the offset between the two clocks is periodically identified and can be applied when digital input changes occur).

[0114] In yet another exemplary embodiment, high-speed communication over bidirectional optical beams may be routed through power coupling. Power coupling may use the same set of coils for power transmission or an additional set of coils for data transmission. An exemplary embodiment equivalent to that in Figure 25 is schematically shown in Figure 27, and an exemplary embodiment equivalent to that in Figure 26 is schematically shown in Figure 28.

[0115] Block diagrams of additional exemplary embodiments of a linear robot control system with control of a magnetic support system (magnetic levitation) are shown in Figures 29 and 30.

[0116] The magnetic levitation controller may perform position control of the robot drive unit (e.g., control of the five degrees of freedom associated with the lateral position, vertical position, pitch angle, roll angle, and yaw angle of the robot drive unit) and operate current control loops for each actuator of the magnetic support system. In this process, the magnetic levitation controller may periodically read the positions measured from position sensors of the magnetic support system (e.g., two horizontal sensors and three vertical sensors) and set the output voltages for the force actuators of the magnetic support system (e.g., two pairs of horizontal actuators and three pairs of vertical actuators). The magnetic levitation controller may also receive various commands from a master controller via a high-speed network, including commands for lift-off, commands to maintain a given position (which may be conveniently represented as a gap between the robot drive unit and the guide of the magnetic support system), and commands to land the robot drive unit. Alternatively, the magnetic levitation controller may receive a stream of commanded positions from the master controller (e.g., in the form of periodically transmitted data frames).

[0117] Another alternative is that a master control may perform position control of the robot drive unit via the magnetic support system. In this process, the master controller may periodically receive position data measured from sensors of the magnetic support system via a high-speed network from the magnetic levitation controller, and may periodically transmit commanded currents for each force actuator of the magnetic support system to the magnetic levitation controller via the high-speed network. In this configuration, the magnetic levitation controller may still operate current control loops for each actuator of the magnetic support system.

[0118] To accommodate a modular design of the vacuum chamber (i.e., a vacuum chamber consisting of multiple parts), additional encoder reading heads for the linear actuation system and / or additional position sensors for the magnetic support system may be utilized to enable smooth transitions between individual parts of the vacuum chamber. This is illustrated schematically in Figures 29 and 30.

[0119] All of the embodiments described above may include additional features that have been omitted from the drawings for brevity. For example, an external controller may include a teaching pendant, an e-stop, an interlock, a safety circuit configuration (including solid components and electromechanical contactors), and a support for an energy storage unit (e.g., a battery and / or capacitor). Similarly, an on-board controller may feature a safety circuit configuration (including solid components and electromechanical contactors), a back EMF regeneration system, and an energy storage unit (e.g., a battery and / or capacitor).

[0120] In the exemplary embodiments described above with respect to Figures 25 to 28, three rotational axes (T1, T2, and T3) are shown, but any number of rotational axes may be used, or no rotational axes may be used at all. Similarly, in the exemplary embodiments described above with respect to Figures 25 to 28, one z-axis is shown, but any number of z-axis may be used, or no z-axis may be used at all.

[0121] It should be understood that the above description is for illustrative purposes only. Various alternatives and modifications can be devised by those skilled in the art. For example, the features described in each dependent claim can be combined with each other in any preferred combination(s). Furthermore, features of the different embodiments described above can be selectively combined to form new embodiments. Therefore, the above description is intended to cover all such alternatives, modifications, and variations that fall within the scope of the appended claims.

Claims

1. A robot control system, Vacuum chamber and; A robot operating within the aforementioned vacuum chamber; An external controller configured to receive commands from the host controller to perform pick or place operations; Equipped with, The vacuum chamber is configured to have a first base plate and at least one linear drive component and power coupling component connected to the upper surface of the first base plate, and a plurality of transport guides provided on the upper surface of the first base plate, wherein the first base plate has at least one alignment function configured to align the end of the first base plate with the end of the second base plate, and the first base plate, in combination with the second base plate, is configured to provide a structural platform within the vacuum chamber; The aforementioned robot, A robotic drive unit having at least one motor and configured to move within the vacuum chamber along the plurality of transport guides; At least one arm having a connecting portion connected to the robot drive unit and configured to be movable together with the robot drive unit; Equipped with, The external controller is connected to at least one motor amplifier of the robot drive unit and is configured to cooperate with the internal controller of the robot drive unit to provide closed-loop control to the robot. Robot control system.

2. The robot control system according to claim 1, wherein the closed-loop control includes an optical communication link between the vacuum chamber, the robot drive unit, and the external controller.

3. The robot control system according to claim 1, wherein the closed-loop control includes a wired connection from the external controller to the robot.

4. The aforementioned external controller is Input / output module, The input / output module and the master controller that communicates with the host controller, The robot control system according to claim 1, comprising:

5. The robot control system according to claim 4, wherein at least one digital or analog input is received by the input / output module from at least one sensor, and at least one digital or analog output is provided to the master controller.

6. The robot control system according to claim 4, wherein the master controller is configured to receive at least one position of at least one motion axis from the at least one motor.

7. The robot control system according to claim 1, wherein the at least one motor has the at least one motor amplifier.

8. The at least one motor amplifier is Execution of the motor commutation algorithm; Execution of a current control loop; Digital input and at least one read from an analog input; A setting of at least one digital output and one analog output; The robot control system according to claim 7, which performs at least one of the following.

9. A robot control system, Vacuum chamber and; A robot operating within the aforementioned vacuum chamber; An external controller configured to receive commands from the host controller to perform pick or place operations; A first optical communication module positioned on the wall of the vacuum chamber; Equipped with, The vacuum chamber is configured to have a first base plate and at least one linear drive component and power coupling component connected to the upper surface of the first base plate, and a plurality of transport guides provided on the upper surface of the first base plate, wherein the first base plate has at least one alignment function configured to align the end of the first base plate with the end of the second base plate, and the first base plate, in combination with the second base plate, is configured to provide a structural platform within the vacuum chamber; The aforementioned robot, A robot drive unit having at least one motor; At least one arm having a connecting portion connected to the robot drive unit and configured to be movable together with the robot drive unit; The robot drive unit is configured to move within the vacuum chamber along the plurality of transport guides, wherein at least one motor has at least one motor amplifier; The aforementioned external controller is Master controller and Input / output module, Equipped with, The robot control system further comprises a second optical communication module positioned on the wall surface of the robot drive unit and establishing an optical communication link between the external controller and the first optical communication module; The optical communication link is configured to receive at least one optical signal from the first optical communication module and to transmit and receive data even when the distance changes. The master controller is configured to provide closed-loop control to the robot in cooperation with the internal controller of the robot drive unit, which is connected to the at least one motor amplifier. Robot control system.

10. The robot control system according to claim 9, further comprising at least one placement sensor connected to the input / output module.

11. The robot control system according to claim 10, wherein the input / output module is configured to read digital inputs and analog inputs from at least one placement sensor and to provide digital outputs and analog outputs to the master controller.

12. The robot control system according to claim 9, wherein the master controller is connected to the robot drive unit via a wired network.

13. The robot control system according to claim 12, wherein the wired network is configured to enable communication between the master controller, the input / output module, and the at least one motor amplifier.

14. The robot control system according to claim 9, wherein the master controller is configured to receive at least one position of at least one motion axis from at least one motor amplifier.

15. The at least one motor amplifier is Execution of the motor commutation algorithm; Execution of a current control loop; Digital input and at least one read from an analog input; A setting of at least one digital output and one analog output; A robot control system according to claim 14, which performs at least one of the following.

16. It is a method, To prepare the vacuum chamber; To prepare a robot that operates within the aforementioned vacuum chamber; The external controller receives commands from the host controller to perform pick or place operations; Includes, The vacuum chamber is configured to have a first base plate and at least one linear drive component and power coupling component connected to the upper surface of the first base plate, and a plurality of transport guides provided on the upper surface of the first base plate, wherein the first base plate has at least one alignment function configured to align the end of the first base plate with the end of the second base plate, and the first base plate, in combination with the second base plate, is configured to provide a structural platform within the vacuum chamber; The aforementioned robot, A robot drive unit having at least one motor; At least one arm having a connecting portion connected to the robot drive unit and configured to be movable together with the robot drive unit; The robot drive unit is configured to move within the vacuum chamber along the plurality of transport guides, wherein at least one motor has at least one motor amplifier; The aforementioned external controller is Master controller and Input / output module, Equipped with, The method further includes establishing an optical communication link between a first optical communication module located on the wall of the vacuum chamber and a second optical communication module located on the wall of the robot drive unit. The optical communication link is configured to receive at least one optical signal from the first optical communication module and to transmit and receive data even when the distance changes. The master controller is configured to provide closed-loop control to the robot in cooperation with the internal controller of the robot drive unit, which is connected to the at least one motor amplifier. method.

17. The input / output module reads digital and analog inputs from at least one placement sensor, To provide the master controller with digital and analog outputs, The method according to claim 16, further comprising:

18. The at least one motor amplifier, Execute the motor commutation algorithm; Executing a current control loop; To read at least one digital input and one analog input; Setting at least one digital output and one analog output; The method according to claim 16, which performs at least one of the following.

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