Holding mechanism and adhesive device
A suction table with tack force and anti-slip features addresses workpiece displacement issues in semiconductor manufacturing by maintaining hold during vacuum conditions.
Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Patents
- Current Assignee / Owner
- DISCO CORP
- Filing Date
- 2021-11-30
- Publication Date
- 2026-05-29
Smart Images
Figure 0007867333000001 
Figure 0007867333000002 
Figure 0007867333000003
Abstract
Description
Technical Field
[0001] The present invention relates to a holding mechanism for holding a workpiece and an adhering device.
Background Art
[0002] For example, in the manufacturing process of semiconductor devices, a tape adhering device (see, for example, Patent Document 1 and Patent Document 2) for adhering various tapes to a semiconductor wafer is widely used.
[0003] On the other hand, a tape adhering device (see, for example, Patent Document 3) that adheres a tape to a wafer in a reduced-pressure atmosphere called a vacuum mounter is also widely used. This type of tape adhering device adheres the tape to the wafer in a reduced-pressure atmosphere and then makes the tape adhere to the wafer by the differential pressure with the atmosphere, preventing the formation of air bubbles between the wafer and the tape.
Prior Art Documents
Patent Documents
[0004]
Patent Document 1
Patent Document 2
Patent Document 3
Summary of the Invention
Problems to be Solved by the Invention
[0005] In general, an electrostatic chuck table is used to hold a wafer in a normal vacuum chamber (reduced-pressure chamber). However, the electrostatic chuck table is expensive, and the use of a suction table for sucking and holding a workpiece is eagerly desired. However, in the case of a suction table, when the inside of the chamber is depressurized, the workpiece cannot continue to be adsorbed on the surface of the suction table, and there is a problem that when the suction force disappears, the workpiece moves and deviates from the position where it was sucked and held.
[0006] This is particularly problematic when the workpiece is thinned and warped, because if the suction force is lost while the workpiece is being held by the suction table, the workpiece will move significantly.
[0007] The object of the present invention is to provide a holding mechanism and an adhesive device that can suppress workpiece displacement without using an electrostatic chuck. [Means for solving the problem]
[0010] The present invention provides a holding mechanism for holding a workpiece, comprising: a suction table having a holding surface for suction holding the workpiece; a vacuum chamber housing the suction table and capable of reducing internal pressure; and a displacement prevention means for preventing the workpiece from shifting when the inside of the vacuum chamber is reduced in pressure while the workpiece is suction-held by the suction table. The anti-slip means comprises a plurality of workpiece fixing members configured to be movable from the outside of the outer edge of the workpiece held by the suction table toward the center of the holding surface. It is characterized by doing so.
[0011] This invention Retention mechanism The holding mechanism for holding a workpiece comprises a suction table having a holding surface for suction holding the workpiece, a vacuum chamber housing the suction table and capable of reducing internal pressure, and a displacement prevention means for preventing the workpiece from shifting when the pressure inside the vacuum chamber is reduced while the workpiece is being held by the suction table, wherein at least a portion of the holding surface of the suction table is made of a member having tack force, the suction table also serves as the displacement prevention means, and a suction hole connected to a suction source is opened in the member having tack force that constitutes at least a portion of the holding surface of the suction table, and a portion of the member having tack force is positioned on the outer circumference of the suction table beyond the suction hole, The anti-slip means includes a pressing member that presses against the upper surface of the workpiece on the suction table. It is characterized by doing so.
[0012] The present invention relates to an adhesive device for adhering tape to a workpiece, comprising: a suction table having a holding surface for suction-holding a workpiece; a tape holding unit for holding a tape in a position where the tape faces the workpiece on the suction table; an adhesive roller for adhering the tape held by the tape holding unit to the workpiece on the suction table; a vacuum chamber housing the suction table and the adhesive roller, and capable of reducing internal pressure; and a displacement prevention means for preventing the workpiece from shifting when the pressure inside the vacuum chamber is reduced while the workpiece is suction-holding the suction table, wherein at least a portion of the holding surface of the suction table is composed of a member having tack force, the suction table also serves as the displacement prevention means, and a suction hole connected to a suction source is opened in the member having tack force that constitutes at least a portion of the holding surface of the suction table, and a portion of the member having tack force is positioned on the outer circumference of the suction table beyond the suction hole. Along with, The anti-slip means includes a pressing member that presses against the upper surface of the workpiece on the suction table. It is characterized by doing so. [Effects of the Invention]
[0013] This invention has the effect of suppressing workpiece displacement without using an electrostatic chuck. [Brief explanation of the drawing]
[0014] [Figure 1] Figure 1 is a schematic cross-sectional view showing an example of the configuration of an adhesive device according to Embodiment 1. [Figure 2] Figure 2 is a perspective view of a workpiece attached to tape by the attachment device shown in Figure 1. [Figure 3] Figure 3 is a schematic cross-sectional view showing the state in which the workpiece and annular frame are held by suction on the suction table of the adhesive device shown in Figure 1. [Figure 4] Figure 4 is a schematic cross-sectional view showing the state in which tape is pressed against a workpiece held by suction on the suction table of the adhesive device shown in Figure 3. [Figure 5] Figure 5 is a schematic cross-sectional view showing an example of the configuration of an adhesive device according to a modified example of Embodiment 1. [Figure 6] Figure 6 is a schematic cross-sectional view showing an example of the configuration of the adhesive device according to Embodiment 2. [Figure 7] Figure 7 is a schematic cross-sectional view showing a state in which a workpiece held by suction on the suction table of the adhesive device according to Embodiment 2 is fixed with a workpiece fixing member. [Figure 8] Figure 8 is a schematic cross-sectional view showing a state in which tape is pressed against a workpiece held by suction on the suction table of the adhesive device according to Embodiment 3. [Figure 9] Figure 9 is a schematic cross-sectional view showing the state in which the adhesive roller of the adhesive device shown in Figure 8 adheres the tape to the back surface of the workpiece. [Figure 10] Figure 10 is a schematic cross-sectional view showing a state in which a workpiece held by suction on the suction table of the adhesive device according to Embodiment 4 is pressed against the holding surface. [Modes for carrying out the invention]
[0015] A mode (embodiment) for implementing the present invention will be described in detail with reference to the drawings. The present invention is not limited by the content described in the following embodiments. Also, the constituent elements described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. Also, various omissions, substitutions, or changes in the configuration can be made without departing from the gist of the present invention.
[0016] [Embodiment 1] The sticking device according to Embodiment 1 of the present invention will be described based on the drawings. FIG. 1 is a cross-sectional view schematically showing a configuration example of the sticking device according to Embodiment 1. FIG. 2 is a perspective view of a work adhered to a tape by the sticking device shown in FIG. 1.
[0017] The sticking device 1 shown in FIG. 1 according to Embodiment 1 is a device that sticks a tape 210 to the back surface 205 of the work 200 shown in FIG. 2. The work 200 to which the tape 210 is stuck by the sticking device 1 according to Embodiment 1 is a disk-shaped semiconductor wafer, an optical device wafer, etc. having a substrate 201 such as silicon (Si), sapphire (Al2O3), gallium arsenide (GaAs), or silicon carbide (SiC).
[0018] As shown in FIG. 2, devices 204 are formed in each region of the surface 203 partitioned by a plurality of division planned lines 202 that intersect. The device 204 is, for example, an integrated circuit such as an IC (Integrated Circuit) or LSI (Large Scale Integration), an image sensor such as a CCD (Charge Coupled Device) or CMOS (Complementary Metal Oxide Semiconductor), MEMS (Micro Electro Mechanical Systems), or a memory (semiconductor memory device), etc. The work 200 has a chamfer portion 206 that is convexly curved in the outer peripheral direction over the entire circumference across the surface 203 and the back surface 205 on the back side of the surface 203.
[0019] In Embodiment 1, a disc-shaped tape 210, which is larger in diameter than the workpiece 200 and has an annular frame 211 attached to its outer edge, is attached to the back surface 205 side of the workpiece 200 and is supported within an opening inside the annular frame 211. The workpiece 200 is divided into individual devices 204 along the division line 202. In Embodiment 1, the tape 210 comprises a base layer made of a flexible and non-adhesive resin and an adhesive layer laminated on the base layer and made of a flexible and adhesive resin.
[0020] The adhesive device 1 according to Embodiment 1 is a device for attaching a disc-shaped tape 210, which has a larger diameter than the workpiece 200 and has an annular frame 211 attached to its outer edge, to the back surface 205 of the workpiece 200. As shown in Figure 1, the adhesive device 1 comprises a holding mechanism 2 and a control unit 100.
[0021] The holding mechanism 2 is a mechanism for holding the workpiece 200. The holding mechanism 2 comprises a suction table 10, an adhesive roller 20, a roller moving unit 30, a vacuum chamber 40, and a lifting unit 60 for raising and lowering the suction table 10.
[0022] The suction table 10 comprises a frame holding portion 11 having a frame holding surface 111 for suction holding the annular frame 211, and a workpiece holding portion 12 having a holding surface 141 for suction holding the workpiece 200. The frame holding portion 11 integrally comprises a disc-shaped disc portion 112 whose outer diameter is larger than the outer diameter of the workpiece 200, and an annular portion 113 that rises from the outer edge of the disc portion 112 and whose inner and outer diameters are equal to the inner and outer diameters of the annular frame 211. The upper surface of the annular portion 113 is the frame holding surface 111 for suction holding the annular frame 211. The frame holding surface 111 is formed flat along the horizontal direction. A frame suction hole 114 is opened in the frame holding surface 111.
[0023] The workpiece holding portion 12 is formed in the shape of a disc with an outer diameter slightly smaller than the outer diameter of the workpiece 200, and is arranged coaxially with the frame holding portion 11 on the disc portion 112 of the frame holding portion 11. The upper surface 121 of the workpiece holding portion 12 is formed to be flat along the horizontal direction. A tack layer 14 (corresponding to a member having tack force) made of silicone resin, silicone rubber, or fluororubber is laminated on the upper surface 121. The tack layer 14 can be made of, for example, "Flex Carrier (registered trademark)" manufactured by UMI Co., Ltd. or "Gel Base (registered trademark)" manufactured by Exceel Corporation.
[0024] The tack layer 14 adheres to the workpiece 200 with tack force when the surface 203 side of the workpiece 200 is placed on it, fixing the surface 203 of the workpiece 200 with tack force. The tack force refers to either weak tack force or strong tack force. Weak tack force is the tack force when a spherical bead is placed on the tack layer 14 as an item, and the tack layer 14 is tilted, and the angle of the tack layer 14 with respect to the horizontal direction at which the spherical bead begins to roll is 3.5 degrees. Strong tack force is the tack force that holds the spherical bead without it rolling on the tack layer 14, even when the angle of the tack layer 14 with respect to the horizontal direction at which the spherical bead begins to roll is 10 degrees.
[0025] In Embodiment 1, the surface of the tack layer 14 is a holding surface 141 that holds the workpiece 200 by suction. In Embodiment 1, the entire holding surface 141 is composed of the surface of the tack layer 14, i.e., the tack layer 14. However, the present invention is not limited to this, and it is sufficient if at least a part of the holding surface 141 is composed of the tack layer 14. In addition, in this embodiment, the holding surface 141 is positioned lower than the frame holding surface 111.
[0026] Multiple suction holes 142 are provided on the holding surface 141, penetrating the tack layer 14 and opening onto the upper surface 121 of the workpiece holding section 12. The frame suction hole 114 and the suction holes 142 are connected to a suction passage 15 provided within the frame holding section 11 and the workpiece holding section 12. The suction passage 15 is connected to a suction source 16. An on / off valve 17 is provided between the frame holding section 11 and the suction source 16 in the suction passage 15.
[0027] In the suction table 10, the surface 203 side of the workpiece 200 is placed on the holding surface 141, and the annular frame 211 with the outer edge of the tape 210 attached is placed on the frame holding surface 111. When the on / off valve 17 opens, the suction holes 114 and 142 are sucked by the suction source 16, thereby sucking and holding the workpiece 200 on the holding surface 141 and sucking and holding the annular frame 211 on the frame holding surface 111. Thus, in Embodiment 1, the frame holding part 11 is a tape holding unit that holds the tape 210 by sucking and holding the annular frame 211 with the tape 210 facing the workpiece 200 on the holding surface 141 of the workpiece holding part 12 of the suction table 10.
[0028] The adhesive roller 20 adheres the tape 210, which is attached to the annular frame 211 held by the frame holding section 11, to the workpiece 200 on the holding surface 141 of the suction table 10. The adhesive roller 20 faces the workpiece 200, which is held by the suction table 10, in a vertical direction, with the tape 210 attached to the annular frame 211, which is held by the suction table 10, in between. The adhesive roller 20 is provided so as to be movable by the roller moving unit 30 along the surface 203 of the workpiece 200 and in a direction parallel to the horizontal direction.
[0029] The adhesive roller 20 is supported by a support member 21 so as to be rotatable around an axis parallel to the horizontal direction, and is positioned above the workpiece 200 held on the suction table 10, and faces the workpiece 200 held on the suction table 10 in a vertical direction, with the tape 210 attached to the annular frame 211 which is held by suction on the suction table 10 in between. The axis of the adhesive roller 20 is parallel to the horizontal direction and perpendicular to the direction of movement by the roller moving unit 30.
[0030] The adhesive roller 20 moves along the surface 203 of the workpiece 200 as the support member 21 is moved horizontally by the roller moving unit 30. When the suction table 10 is raised by the lifting unit 60, the adhesive roller 20 presses the tape 210 attached to the annular frame 211, which is held by suction on the suction table 10, toward the workpiece 200, pressing the tape 210 against the workpiece 200 and pressing the workpiece 200 against the suction table 10.
[0031] Thus, when the suction table 10 is raised by the lifting unit 60, the adhesive roller 20 is positioned to press the tape 210 against the workpiece 200 and press the workpiece 200 against the suction table 10. Furthermore, when the suction table 10 is raised by the lifting unit 60, the adhesive roller 20 is moved along the surface 203 of the workpiece 200 by the roller moving unit 30, pressing the tape 210 against the workpiece 200 and pressing the workpiece 200 against the suction table 10, rolling along the tape 210 and adhering the tape 210 to the back surface 205 of the workpiece 200.
[0032] The roller moving unit 30 moves the adhesive roller 20 in the horizontal direction. The roller moving unit 30 moves the support member 21, which supports the adhesive roller 20 so as to be rotatable around its axis, in the horizontal direction.
[0033] The lifting unit 60 raises and lowers the suction table 10 vertically. The lifting unit 60 raises and lowers the frame holding portion 11 of the suction table 10 vertically.
[0034] The vacuum chamber 40 is a container that houses the suction table 10, the adhesive roller 20, the roller moving unit 30, and the lifting unit 60, and whose interior can be depressurized. The vacuum chamber 40 comprises an upper housing 41 and a lower housing 42 that can move between a state in which their outer edges are in contact with each other and a state in which their outer edges are separated, a vacuum source 47 connected to the lower housing 42 via an exhaust passage 45 and an on-off valve 46, and an air supply source 50 connected to the upper housing 41 via a supply passage 48 and an on-off valve 49.
[0035] Each housing 41 and 42 integrally comprises a disc portion 43 whose outer diameter is larger than that of the annular frame 211, and a cylindrical portion 44 erected from the outer edge of the disc portion 43. The outer diameters of the disc portions of housings 41 and 42 are equal. Housings 41 and 42 are arranged so that the inner openings of the cylindrical portions 44 face each other along the Z-axis direction. The upper housing 41 and the lower housing 42 are moved up and down relative to each other by a lifting unit (not shown). The upper housing 41 has a roller moving unit 30 attached to the disc portion 43. The lower housing 42 has a lifting unit 60 attached to the disc portion 43.
[0036] In the vacuum chamber 40, the upper housing 41 and the lower housing 42 are raised and lowered by a lifting unit in a direction toward each other, so that the outer edges of the cylindrical portions 44 of the housings 41 and 42 come into airtight contact with each other, isolating the interior from the outside and sealing the interior. In the vacuum chamber 40, the upper housing 41 and the lower housing 42 are raised and lowered by a lifting unit in a direction toward each other, so that the outer edges of the cylindrical portions 44 of the housings 41 and 42 come apart, allowing the workpiece 200 and the annular frame 211 to be loaded and unloaded.
[0037] The control unit 100 controls each component of the adhesive device 1 to cause the adhesive device 1 to perform an adhesive operation to adhere the tape 210 to the surface 203 of the workpiece 200. The control unit 100 is a computer capable of executing computer programs, comprising an arithmetic processing unit having a microprocessor such as a CPU (Central Processing Unit), a storage device having memory such as ROM (Read Only Memory) or RAM (Random Access Memory), and an input / output interface device.
[0038] The arithmetic processing unit of the control unit 100 executes a computer program stored in ROM on RAM to generate control signals for controlling the adhesive device 1. The arithmetic processing unit of the control unit 100 outputs the generated control signals to each component of the adhesive device 1 via the input / output interface device.
[0039] Furthermore, the control unit 100 is connected to a display unit consisting of a liquid crystal display device that displays the status of machining operations and images, and an input unit used by the operator to register machining conditions, etc. The input unit consists of at least one of the following: a touch panel provided on the display unit and a keyboard, etc.
[0040] Next, the adhesive operation of attaching tape 210 to the back surface 205 of the workpiece 200 using the adhesive device 1 with the configuration described above will be explained based on the drawings. Figure 3 is a schematic cross-sectional view showing the state in which the workpiece and annular frame are held by suction on the suction table of the adhesive device shown in Figure 1. Figure 4 is a schematic cross-sectional view showing the state in which tape is pressed against the workpiece held by suction on the suction table of the adhesive device shown in Figure 3.
[0041] The adhesive device 1 receives and stores processing conditions input from an input unit, etc., via a control unit 100. When it receives an instruction to start the adhesive operation from the input unit, etc., it starts the adhesive operation. During the adhesive operation, the adhesive device 1 controls a lifting unit (not shown) via the control unit 100 to separate the housings 41 and 42 from each other. During the adhesive operation, when the annular frame 211, with the surface side of the workpiece 200 placed on the holding surface 141 and the outer edge of the tape 210 attached to the frame holding surface 111, is placed on the adhesive device 1, it controls the lifting unit to bring the housings 41 and 42 closer together so that the outer edges of the cylindrical portions 44 of the housings 41 and 42 make airtight contact with each other, sealing the inside of the vacuum chamber 40.
[0042] During the adhesion operation, as shown in Figure 3, the adhesion device 1's control unit 100 opens the on-off valve 17, and the suction source 16 uses the suction passage 15 to draw suction through the suction holes 114 and 142, thereby suction-holding the surface side of the workpiece 200 to the holding surface 141, and suction-holding the annular frame 211 to the frame holding surface 111. At this time, the tack layer 14 fixes the workpiece 200 to the holding surface 141 by tack force. During the adhesion operation, the adhesion device 1's control unit 100 opens the on-off valve 46, and the vacuum source 47 exhausts the air inside the vacuum chamber 40 to the outside of the vacuum chamber 40 through the exhaust passage 45, thereby reducing the pressure inside the vacuum chamber 40. At this time, the pressure is also reduced between the workpiece 200 held by suction on the holding surface 141 and the tape 210.
[0043] During the adhesion operation, the adhesion device 1 controls the roller movement unit 30 to position the adhesion roller 20 above the workpiece 200 with the tape 210 in between, as shown in Figure 4, before the air pressure inside the vacuum chamber 40 falls below a predetermined air pressure (absolute air pressure). The lifting unit 60 raises the suction table 10, pressing the tape 210 against the workpiece 200 with the adhesion roller 20, and simultaneously pressing the workpiece 200 against the holding surface 141 via the tape 210 to suppress displacement of the workpiece 200. The predetermined air pressure is the air pressure inside the vacuum chamber 40 at which the suction force of the holding surface 141 that holds the workpiece 200 decreases, and the workpiece 200 will shift position relative to the holding surface 141 unless it is pressed against the holding surface 141 by some force.
[0044] Thus, in Embodiment 1, the tack layer 14 and the adhesive roller 20 of the adhesive device 1 constitute a slip prevention means 70 that prevents the workpiece 200 from shifting when the pressure inside the vacuum chamber 40 is reduced while the workpiece 200 is held by the suction table 10. In this way, the holding mechanism 2 of the adhesive device 1 is equipped with a slip prevention means 70. Also, in Embodiment 1, since the holding surface 141 is the surface of the tack layer 14, the suction table 10 also constitutes a slip prevention means 70; that is, the suction table 10 also serves as a slip prevention means 70. In Embodiment 1, in order to suppress the formation of air bubbles between the tape 210 and the workpiece 200 in the pressed area, it is preferable that the adhesive roller 20 presses down on the tape 210 just before the aforementioned predetermined pressure is reached. Also, in the present invention, the timing of the adhesive roller 20 pressing down on the tape 210 of the adhesive device 1 may be just before the predetermined pressure is reached, or it may be after the workpiece 200 is held by the holding surface 141 and before the pressure reduction is started. Furthermore, in the present invention, the adhesive device 1 may suppress the misalignment of the workpiece 200 solely by the tack force of the tack layer 14, without pressing down on the tape 210 with the adhesive roller 20.
[0045] During the adhesion operation, the adhesion device 1, after the pressure inside the vacuum chamber 40 has decreased to a vacuum state below a predetermined pressure, controls the roller movement unit 30 to move the adhesion roller 20 horizontally, thereby adhering the tape 210 to the back surface 205 of the workpiece 200. During the adhesion operation, after the adhesion device 1 has adhered the tape 210 to the back surface 205 of the workpiece 200, it closes the on-off valve 46 and opens the on-off valve 49 to supply air from the air supply source 50 to the vacuum chamber 40 through the supply passage 48, raising the pressure inside the vacuum chamber 40 to atmospheric pressure and making the tape 210 adhere tightly to the back surface 205 of the workpiece 200. In this way, the adhesion device 1 adheres the tape 210 to the back surface 205 of the workpiece 200 during the adhesion operation. Furthermore, in the present invention, the adhesive device 1 may connect an air supply source (not shown) to the holding surface 141 via an on-off valve 17 in addition to the suction source 16, and the air supply source and the suction source 16 may be selectively connected to the holding surface 141 via the on-off valve 17, so that when peeling the workpiece 200 from the holding surface 141, air from the air supply source is blown from the holding surface 141 to facilitate the peeling of the workpiece 200 from the tack layer 14 which has tack force.
[0046] The holding mechanism 2 and adhesive device 1 according to Embodiment 1 described above are equipped with a slip prevention means 70 which consists of a tack layer 14 that constitutes the holding surface 141 and an adhesive roller 20 that presses the workpiece 200 against the tack layer 14. Therefore, even if the vacuum chamber 40 is depressurized and the suction force of the suction table 10 decreases, the workpiece 200 can be held on the holding surface 141 without slippage.
[0047] As a result, the holding mechanism 2 and adhesive device 1 according to Embodiment 1 have the effect of suppressing displacement of the workpiece 200 without using an electrostatic chuck.
[0048] [Variation] A modified adhesive device according to Embodiment 1 of the present invention will be described with reference to the drawings. Figure 5 is a schematic cross-sectional view showing an example of the configuration of the adhesive device according to a modified embodiment of Embodiment 1. Note that in Figure 5, the same reference numerals are used for the same parts as in Embodiment 1, and their descriptions are omitted.
[0049] The adhesive device 1-1, a modified version of Embodiment 1, is the same as Embodiment 1 except that, as shown in Figure 5, a convex portion 122 is provided on the outer edge of the workpiece holding portion 12, extending upwards around its entire circumference, and a tack layer 14 is laminated on the convex portion 122, forming an annular holding surface 141 which is the surface of the tack layer 14 through which the suction holes 142 pass. The annular holding surface 141 of the adhesive device 1-1 of the modified version corresponds to the excess outer peripheral region of the workpiece 200 where the device 204 is not formed, and is set to a size that supports the excess outer peripheral region without supporting the device region where the device 204 is formed. In the adhesive device 1-1 of the modified version, the tack layer 14 is not formed in the region corresponding to the device region where the device 204 is formed, so that the device 204 does not come into contact with the tack layer 14, reducing the risk of contamination of the device 204, and also making it easier to peel the workpiece 200 from the holding surface 141.
[0050] The modified holding mechanism 2-1 and adhesive device 1-1, like the embodiment 1, are equipped with a slip prevention means 70 consisting of a tack layer 14 constituting the holding surface 141 and an adhesive roller 20 that presses the workpiece 200 against the tack layer 14. Therefore, even if the vacuum chamber 40 is depressurized and the suction force of the suction table 10 decreases, the workpiece 200 can be held on the holding surface 141 without slippage, thus suppressing slippage of the workpiece 200 without using an electrostatic chuck.
[0051] [Embodiment 2] An adhesive device according to Embodiment 2 of the present invention will be described with reference to the drawings. Figure 6 is a schematic cross-sectional view showing an example of the configuration of the adhesive device according to Embodiment 2. Figure 7 is a schematic cross-sectional view showing a state in which a workpiece held by suction on the suction table of the adhesive device according to Embodiment 2 is fixed with a workpiece fixing member. Note that the same reference numerals are used for the same parts as in Embodiment 1 in Figures 6 and 7, and their descriptions are omitted.
[0052] The holding mechanism 2-2 of the adhesive device 1-2 according to Embodiment 2 is the same as Embodiment 1, except that, as shown in Figure 6, the slip prevention means 70-2 has a plurality of workpiece fixing members 71 instead of the tack layer 14, a disc-shaped porous material 13 such as porous ceramics is attached to the center of the upper surface 121 of the workpiece holding part 12, and the surface of the porous material 13 is a holding surface 131 that suction-holds the workpiece 200. The workpiece fixing members 71 are configured to be movable from the outside of the outer peripheral edge of the workpiece 200 held by the suction table 10 toward the center of the holding surface 131.
[0053] The workpiece fixing member 71 is positioned on the disc portion 112 of the frame holding portion 11 of the suction table 10 and on the outer circumference side of the workpiece holding portion 12, i.e., the holding surface 131. The workpiece fixing member 71 is provided to be movable along the radial direction of the workpiece holding portion 12, i.e., the holding surface 131, by means of a moving means 72. The workpiece fixing member 71 comprises a column portion 73 erected from the disc portion 112 of the frame holding portion 11, and a fixing portion 74 provided at the upper end of the column portion 73 and facing the chamfered portion 206 of the workpiece 200 that is held by suction on the holding surface 131 of the workpiece holding portion 12. In Embodiment 1, the fixing portion 74 is formed in a circular arc shape in cross-section along the chamfered portion 206 of the workpiece 200 held by suction on the holding surface 131, such that the center in the thickness direction is located furthest to the outer circumference of the holding surface 131. In Embodiment 1, the upper end of the fixing portion 74 is positioned below the back surface 205 of the workpiece 200 which is held by suction on the holding surface 141 of the workpiece holding portion 12.
[0054] In the adhesive device 1-2 according to Embodiment 2, after the workpiece 200 is placed on the holding surface 131 and the annular frame 211 is placed on the frame holding surface 111, the control unit 100 controls the moving means 72 to move the workpiece fixing member 71 toward the workpiece 200 along the radial direction of the holding surface 141. The adhesive device 1-2 according to Embodiment 2 fixes the workpiece 200 on the holding surface 141 by sandwiching the chamfered portion 206 of the workpiece 200 on the holding surface 141 with the fixing portions 74 of the multiple workpiece fixing members 71.
[0055] Subsequently, the adhesive device 1-2 according to Embodiment 2, after the control unit 100 controls the lifting unit to seal the inside of the vacuum chamber 40, opens the on / off valve 17 as shown in Figure 7, and holds the front surface of the workpiece 200 by suction to the holding surface 141, and holds the annular frame 211 by suction to the frame holding surface 111, thereby adhering the tape 210 to the back surface 205 of the workpiece 200, similar to Embodiment 1.
[0056] The holding mechanism 2 and adhesive device 1-2 according to Embodiment 2 are equipped with a displacement prevention means 70-2 having a plurality of workpiece fixing members 71. Therefore, even if the vacuum chamber 40 is depressurized and the suction force of the suction table 10 decreases, the workpiece 200 can be held on the holding surface 131 without displacement, similar to Embodiment 1, and the displacement of the workpiece 200 can be suppressed without using an electrostatic chuck.
[0057] [Embodiment 3] An adhesive device according to Embodiment 3 of the present invention will be described with reference to the drawings. Figure 8 is a schematic cross-sectional view showing the state in which tape is pressed against a workpiece held by suction on the suction table of the adhesive device according to Embodiment 3. Figure 9 is a schematic cross-sectional view showing the state in which the adhesive roller of the adhesive device shown in Figure 8 adheres the tape to the back surface of the workpiece. Note that the same reference numerals are used for the same parts as in Embodiment 1 in Figures 8 and 9, and their descriptions are omitted.
[0058] The holding mechanism 2-3 of the adhesive device 1-3 according to Embodiment 3 is the same as Embodiment 1, except that, as shown in Figure 8, the slip prevention means 70-3 has a tape pressing member 75 instead of a tack layer 14, a disc-shaped porous material 13 such as porous ceramics is attached to the center of the upper surface 121 of the workpiece holding part 12, and the surface of the porous material 13 is a holding surface 131 that sucks and holds the workpiece 200. The tape pressing member 75 is positioned facing the center of the holding surface 131 of the disc portion 43 of the upper housing 41 of the vacuum chamber 40. The tape pressing member 75 is positioned to be able to move up and down by a lifting unit 76.
[0059] In the adhesive device 1-3 according to Embodiment 3, the control unit 100 controls the lifting unit to seal the inside of the vacuum chamber 40, then opens the on-off valve 17 to suction-hold the workpiece 200 and the annular frame 211 to the holding surfaces 131 and 111, and opens the on-off valve 46 to reduce the pressure inside the vacuum chamber 40. In the adhesive device 1-3 according to Embodiment 3, the control unit 100 controls the lifting unit 76 to lower the tape pressing member 75, as shown in Figure 8, before the air pressure inside the vacuum chamber 40 falls below a predetermined air pressure (absolute air pressure), pressing the tape 210 against the workpiece 200 with the tape pressing member 75, and pressing the workpiece 200 against the holding surface 131 via the tape 210 to suppress displacement of the workpiece 200. In this invention, it is preferable that the adhesive device 1-3 lowers the tape pressing member 75 just before the air pressure inside the vacuum chamber 40 falls below a predetermined air pressure. Furthermore, in the present invention, the adhesive device 1-3 may be lowered after suction-holding the workpiece 200, before depressurization is started, and the tape pressing member 75 may press the workpiece 200 against the holding surface 141 via the tape 210.
[0060] In the adhesion device 1-3 according to Embodiment 3, the control unit 100 controls the lifting unit 60 to raise the suction table 10, and controls the roller moving unit 30 to move the adhesion roller 20 horizontally, thereby adhering the tape 210 to the back surface 205 of the workpiece 200, similar to Embodiment 1, and closing the on-off valve 46, and then opening the on-off valve 46 to supply air from the air supply source 50 to the vacuum chamber 40 through the supply passage 48. In addition, in the adhesion device 1-3 according to Embodiment 3, when the adhesion roller 20 begins to adhere the tape 210 to the outer edge of the back surface 205 of the workpiece 200 as shown in Figure 9, the control unit 100 controls the lifting unit 76 to raise the tape pressing member 75 and move it away from the tape 210 and the like.
[0061] The holding mechanism 2-3 and adhesive device 1-3 according to Embodiment 3 are equipped with a slip prevention means 70-3 having a tape pressing member 75. Therefore, even if the vacuum chamber 40 is depressurized and the suction force of the suction table 10 decreases, the workpiece 200 can be held on the holding surface 131 without slippage, similar to Embodiment 1. This has the effect of suppressing slippage of the workpiece 200 without using an electrostatic chuck.
[0062] [Embodiment 4] An adhesive device according to Embodiment 4 of the present invention will be described with reference to the drawings. Figure 10 is a schematic cross-sectional view showing a state in which a workpiece held by suction on the suction table of the adhesive device according to Embodiment 4 is pressed against the holding surface. Note that in Figure 10, the same reference numerals are used for the same parts as in Embodiment 1, and their description is omitted.
[0063] The holding mechanism 2-4 of the adhesive device 1-4 according to Embodiment 4 is the same as Embodiment 1, except that the slip prevention means 70-4 has a pressing member 77 instead of a tack layer 14, a disc-shaped porous material 13 such as porous ceramics is attached to the center of the upper surface 121 of the workpiece holding part 12, and the surface of the porous material 13 is a holding surface 131 that suction-holds the workpiece 200. The pressing member 77 is a member that presses the back surface 205, which is the upper surface of the workpiece 200 on the holding surface 141 of the suction table 10.
[0064] The pressing member 77 of the adhesive device 1-4 according to Embodiment 4 is formed in the shape of a plate that can penetrate between the back surface 205 of the workpiece 200 on the holding surface 141 and the tape 210 before the tape 210 is applied, and is arranged to be movable horizontally by a moving means 78. In Embodiment 4, the direction of movement of the pressing member 77 intersects (orthogonal to) the direction of movement of the adhesive roller 20. When the pressing member 77 is positioned on the holding surface 131, it is preferable that at least a part of it is positioned on the center of the holding surface 131. However, in the present invention, the position of the pressing member 77 is not limited to this, and it may press any position on the workpiece 200.
[0065] In the adhesion device 1-4 according to Embodiment 4, the control unit 100 controls the lifting unit to seal the inside of the vacuum chamber 40, then opens the on-off valve 17 to suction-hold the workpiece 200 and the annular frame 211 on the holding surfaces 131 and 111, and opens the on-off valve 46 to reduce the pressure inside the vacuum chamber 40. In the adhesion device 1-4 according to Embodiment 4, before the air pressure inside the vacuum chamber 40 falls below a predetermined air pressure (absolute air pressure), the control unit 100 controls the moving means 78 as shown in Figure 10 to insert the pressing member 77 between the back surface 205 of the workpiece 200 on the holding surface 141 and the tape 210, and presses the workpiece 200 against the holding surface 141 with the pressing member 77 to suppress displacement of the workpiece 200. In addition, in the present invention, the adhesion device 1-4 may press the workpiece 200 against the holding surface 141 with the pressing member 77 after suction-holding the workpiece 200 with the suction table 10 and before starting to reduce the pressure in the vacuum chamber 40.
[0066] In the fourth embodiment, the adhesive device 1-4 controls the lifting unit 60 to raise the suction table 10 and the roller moving unit 30 to move the adhesive roller 20 horizontally, thereby adhering the tape 210 to the back surface 205 of the workpiece 200, similar to the first embodiment. After the adhesive device 1-4 has adhered the tape 210 to the back surface 205 of the workpiece 200, similar to the first embodiment, it closes the on-off valve 46 and opens the on-off valve 49 to supply air from the air supply source 50 to the vacuum chamber 40 through the supply passage 48. In the fourth embodiment, when the adhesive roller 20 begins to adhere the tape 210 to the outer edge of the back surface 205 of the workpiece 200, the control unit 100 controls the moving means 78 to move the pressing member 77 horizontally, retracting it from between the back surface 205 of the workpiece 200 and the tape 210.
[0067] The holding mechanism 2-4 and adhesive device 1-4 according to Embodiment 4 are equipped with a displacement prevention means 70-4 having a pressing member 77. Therefore, even if the vacuum chamber 40 is depressurized and the suction force of the suction table 10 decreases, the workpiece 200 can be held on the holding surface 131 without displacement, similar to Embodiment 1. This has the effect of suppressing displacement of the workpiece 200 without using an electrostatic chuck.
[0068] It should be noted that the present invention is not limited to the embodiments described above. That is, it can be implemented with various modifications without departing from the core principles of the present invention. [Explanation of Symbols]
[0069] 1,1-1,1-2,1-3,1-4 Pasting device 2,2-1,2-2,2-3,2-4 Holding mechanism 10 Suction Table 11. Frame holding section (tape holding unit) 14. Tack layer (a component with tack force) 20 Adhesive roller 40 Vacuum Chamber 70, 70-2, 70-3, 70-4 Anti-slip means 71 Workpiece fixing member 77 Pressing member 131,141 Retaining surface 200 work 205 Back side (top side) 210 Tapes
Claims
1. A holding mechanism for holding a workpiece, A suction table having a holding surface for suction and holding a workpiece, A vacuum chamber that houses the suction table and whose interior can be depressurized, The system includes a means for preventing the workpiece from shifting when the vacuum chamber is depressurized while the workpiece is held in place by the suction table, The displacement prevention means is a holding mechanism having a plurality of workpiece fixing members configured to be movable from the outside of the outer peripheral edge of the workpiece held by the suction table toward the center of the holding surface.
2. A holding mechanism for holding a workpiece, A suction table having a holding surface for suction and holding a workpiece, A vacuum chamber that houses the suction table and whose interior can be depressurized, The system includes a means for preventing the workpiece from shifting when the vacuum chamber is depressurized while the workpiece is held in place by the suction table, At least a portion of the holding surface of the suction table is made of a member having tack force, and the suction table also serves as the means to prevent slippage. A tack-force member constituting at least a portion of the holding surface of the suction table has a suction hole connected to a suction source, and a portion of the tack-force member is positioned on the outer circumference of the suction table beyond the suction hole, The displacement prevention means is a holding mechanism having a pressing member that presses against the upper surface of the workpiece on the suction table.
3. An adhesive device for attaching tape to a workpiece, A suction table having a holding surface for suction and holding a workpiece, A tape holding unit that holds the tape with the tape facing the workpiece on the suction table, An adhesive roller for attaching the tape held by the tape holding unit to the workpiece on the suction table, A vacuum chamber that houses the suction table and the adhesive roller and whose interior can be depressurized, The system includes a means for preventing the workpiece from shifting when the vacuum chamber is depressurized while the workpiece is held in place by the suction table, At least a portion of the holding surface of the suction table is made of a member having tack force, and the suction table also serves as the means to prevent slippage. A tack-force member constituting at least a portion of the holding surface of the suction table has a suction hole connected to a suction source, and a portion of the tack-force member is positioned on the outer circumference of the suction table beyond the suction hole, The anti-slip means is an adhesive device having a pressing member that presses against the upper surface of a workpiece on the suction table.