Method for confirming the edge position of a glass substrate

JP7871637B2Active Publication Date: 2026-06-09NIPPON ELECTRIC GLASS CO LTD
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Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
NIPPON ELECTRIC GLASS CO LTD
Filing Date
2022-07-13
Publication Date
2026-06-09

AI Technical Summary

Benefits of technology

【0026】 本発明の効果として、以下に示すような効果を奏する。即ち、本発明に係るガラス基板の端面位置確認方法によれば、位置決めピンに切欠き部を当接させた状態で位置決めされた円盤形状のガラス基板において、当該切欠き部における、ガラス基板の厚み方向に対向する一対の角部に面取り加工が施されている場合であっても、切欠き部の端面の位置を正確に確認することができる。

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Abstract

To provide an end face position confirmation method of a glass substrate that confirms a position of an end face of a notch in a disk-shaped glass substrate that is positioned with the notch in contact with a positioning pin, and can accurately confirm the position of the end face of the notch even when a pair of corners facing each other in a thickness direction of the glass substrate in the notch are chamfered.SOLUTION: A notch Ga is illuminated by an illumination device 30 located above a glass substrate G and on the center side of the glass substrate G with respect to a positioning pin 20, and the notch Ga is imaged by an imaging device 40 located directly above the notch Ga.SELECTED DRAWING: Figure 1
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Claims

1. A method for confirming the position of the end face of a glass substrate, in which a disc-shaped glass substrate has a notch at its periphery, is used to confirm the position of the end face of the notch. The pair of corners in the notch that face each other in the thickness direction of the glass substrate are chamfered. With the notched portion in contact with the positioning pin, the glass substrate is placed in the predetermined position. The notch is illuminated by a lighting device located above the glass substrate and on the center side of the glass substrate relative to the positioning pin, The notch is imaged by an imaging device located directly above the notch. A method for confirming the edge position of a glass substrate, characterized by the features described herein.

2. In the aforementioned lighting device, The angle of light irradiation on the acute side with respect to the plane of the glass substrate is between 10° and 80°. A method for confirming the end face position of a glass substrate according to claim 1, characterized in that

3. The imaging device focuses on the upper corner of the notch. A method for confirming the end face position of a glass substrate according to claim 1 or claim 2, characterized in that

4. The lighting device irradiates light toward the lower corner of the notch. A method for confirming the end face position of a glass substrate according to claim 1 or claim 2, characterized in that

5. The aforementioned lighting device is composed of surface-emitting LED lighting. A method for confirming the end face position of a glass substrate according to claim 1 or claim 2, characterized in that

6. In the aforementioned lighting device, The angle of light irradiation on the acute side with respect to the plane of the glass substrate is 30° or more and 60° or less. A method for confirming the end face position of a glass substrate according to claim 1 or claim 2, characterized in that

7. The aforementioned glass substrate is The silicon wafer is stacked on the upper surface and placed in the predetermined position. A method for confirming the end face position of a glass substrate according to claim 1 or claim 2, characterized in that