Fluid control device and heater

Abstract

[Problem] To provide a fluid control device which is capable of independently performing temperature control for an integrated gas line and temperature control for supply pipes, and with which pipe configuration is easily switched. [Solution] This fluid control device 1 comprises: an integrated gas line 10 including a plurality of flow passage blocks 11 which are arranged in series and form a flow passage, and a plurality of fluid control apparatuses 12 disposed on the flow passage blocks; a supply pipe 20 which is disposed below the flow passage blocks 11 and causes a fluid to flow; and a branch pipe 30 which branches from the supply pipe 20 and supplies the fluid to the integrated gas line, the fluid control device including first heaters 40 disposed on both side surfaces of the flow passage block 11, a heat transfer block 50 which transfers heat to the supply pipe 20, second heaters 60 which are disposed on both side surfaces of the heat transfer block and heat the heat transfer block 50, and a heat insulating plate 70 which is disposed between the flow passage block 11 and the heat transfer block 50 and hinders heat transfer.

Description

Technical Field

[0001] The present invention relates to a fluid control device for supplying a process gas or the like to a semiconductor manufacturing apparatus, and a heater for heating the fluid control device.

Background Art

[0002] In a semiconductor manufacturing process, a plurality of types of gases such as a process gas and a purge gas are supplied to a processing chamber to perform processes such as film formation and etching. In order to measure such a gas and supply it to the processing chamber, an integrated gas line in which a plurality of fluid devices such as a mass flow control device and an on-off valve are arranged on a joint block arranged in a vertical row is provided, for example, for each type of process gas. A gas box in which a plurality of integrated gas lines corresponding to a plurality of types of gases handled by one processing chamber are arranged in parallel inside is provided, and in a semiconductor manufacturing apparatus having a plurality of processing chambers, the gas box is provided for each processing chamber.

[0003] Supply pipes (also called cross pipes) for supplying various types of gases pass through a plurality of gas boxes in order, for example, branch (one-drop) in each gas box, and supply the gas to the integrated gas line of the corresponding gas type. This supply pipe is arranged, for example, below the integrated gas line in the gas box so as to extend in the direction of the integrated gas line, and branches upward to supply the gas to the integrated gas line.

[0004] Such an integrated gas line may handle a gas that is easily liquefied at normal temperature. In order to maintain the gas in a vaporized state without re-liquefying such a gas, the entire integrated gas line is heated by a heater and temperature-controlled. For example, in Patent Document 1, heater portions are provided on both sides along the longitudinal direction of an integrated gas line having a plurality of fluid control devices, and are fixed with heater clips. Furthermore, in Patent Document 2, both sides of each flow path block constituting the integrated gas line are individually sandwiched with tape heaters (plate-shaped heaters) and fixed with biasing members. Furthermore, in Patent Document 3, heaters are placed on both sides of multiple passage blocks equipped with fluid control equipment to heat these passage blocks, and the piping passed beneath them is also heated via a piping heating member (heat transfer member). Furthermore, Patent Document 4 (JP 2016-205553) describes a heat-insulating cover for covering a gas line composed of multiple fluid control devices connected to a joint. [Prior art documents] [Patent Documents]

[0005] [Patent Document 1] Japanese Patent Publication No. 2020-159445 [Patent Document 2] Japanese Patent Application Publication No. 11-294615 [Patent Document 3] Patent No. 5753831 [Patent Document 4] Japanese Patent Publication No. 2016-205553 [Overview of the Initiative] [Problems that the invention aims to solve]

[0006] As described above, in fluid control devices consisting of integrated gas lines and supply piping, either a method of heating only the integrated gas line or a method of heating the integrated gas line and supply piping together is used. However, in semiconductor manufacturing equipment with multiple processing chambers, the gases handled may differ depending on the processing chamber, and some processing chambers may not handle certain gases. In such cases, the corresponding gas box may not have an integrated gas line corresponding to that gas, and only supply piping (connecting piping) may be provided. In such cases, there was a problem that the supply piping could not be heated because there was no heater. Furthermore, when the integrated gas line and supply piping were heated together, there was a problem that the integrated gas line could not be heated sufficiently.

[0007] Furthermore, when modifications are made to semiconductor manufacturing equipment due to changes in specifications, such as switching from one integrated gas line to another, or switching from a configuration including an integrated gas line and supply piping to a configuration without an integrated gas line and only supply piping, there was a problem that the configuration change was complicated, especially with integrated gas lines equipped with heaters.

[0008] One of the objectives of the present invention is to solve these problems by providing a fluid control device that can independently control the temperature of an integrated gas line and the temperature of a supply pipe (connecting pipe), and that has a heater function while allowing for easy switching of the piping configuration, as well as a heater for heating this fluid control device. [Means for solving the problem]

[0009] To solve the above problems, the fluid control device of the present invention includes an integrated gas line comprising a plurality of flow path blocks arranged in series to form a flow path and a plurality of fluid control devices arranged on the plurality of flow path blocks, a supply pipe arranged below the flow path blocks so as to extend in the direction of arrangement of the flow path blocks and for carrying fluid, and a branch pipe that branches off from the supply pipe and supplies the fluid to the integrated gas line, The device includes first heaters positioned on both sides of the flow channel block, a heat transfer block having a prism shape with a substantially U-shaped cross-section, enclosing the supply pipe and transferring heat to the supply pipe, second heaters positioned on both sides of the heat transfer block to heat the heat transfer block, and a first insulating plate positioned between the flow channel block and the heat transfer block to prevent heat transfer between the flow channel block and the heat transfer block.

[0010] In the fluid control device described above, a configuration that further includes a second insulating plate positioned below the heat transfer block and preventing heat transfer from the lower surface of the heat transfer block is preferably adopted.

[0011] The first and second heat insulating plates can preferably be made of fluororesin.

[0012] Preferably, the first heater and the second heater are constructed by bonding a stainless steel plate, a silicone rubber heater, and a silicone sponge together from the flow path block or the heat transfer block side.

[0013] A configuration further comprising a first temperature sensor for measuring the temperature of the flow path block or the fluid control device, and a second temperature sensor for measuring the temperature of the heat transfer block, can be preferably adopted.

[0014] Preferably, the branch piping can be configured to branch either upstream or downstream of the arrangement of flow path blocks in the supply piping.

[0015] The plurality of flow path blocks include a first flow path block, which is a rectangular parallelepiped having two ports on its upper surface and a V-shaped flow path formed inside that connects the two ports, and a second flow path block, which is a rectangular parallelepiped having ports on its upper and lower surfaces at positions offset laterally from each other and an oblique flow path formed inside that connects the two ports. The configuration may also include one or more stages of the second flow channel blocks arranged on top of a plurality of the first flow channel blocks, and the fluid control equipment being placed on top of the second flow channel blocks.

[0016] The heater of the present invention is a heater arranged on both sides of the flow path blocks and heating the flow path blocks in a fluid control device including a plurality of flow path blocks arranged in series to form a flow path and a plurality of fluid control devices arranged on the plurality of flow path blocks. The aforementioned flow path block is constructed by bonding together a stainless steel plate, a silicone rubber heater, and a silicone sponge. [Effects of the Invention]

[0017] According to the fluid control device of the present invention, the integrated gas line can be independently heated by the first heater, and the supply pipe can be independently heated by the second heater. Therefore, even with a configuration that only includes the supply pipe, heating is possible. Whether both the integrated gas line and the supply pipe (crossing pipe) are heated, or they are heated at different temperatures, the integrated gas line can be sufficiently heated. In addition, since the integrated gas line and the supply pipe are structured in a two-layer configuration and connected by a branch pipe, simply by attaching and detaching the upper integrated gas line with the heaters attached, switching from one integrated gas line to another, or easily switching from a configuration including the integrated gas line and the supply pipe to a configuration without the integrated gas line and only the supply pipe can be achieved, easily corresponding to changes in the specifications of the semiconductor manufacturing apparatus.

[0018] In addition, according to the heater of the present invention, since a stainless steel plate with high thermal conductivity is used on the inner layer side, the heat from the heating wire in the rubber heater can be homogenized to uniformly heat the flow path block and the heat transfer block. Also, since the outer silicon sponge has heat insulation properties, the heat of the heater is not released to the outside, reducing the influence on the outside and contributing to energy savings. Moreover, since the outer silicon sponge also has elasticity, it is easy to fix with a heater fixture (such as a heater clip).

Brief Description of the Drawings

[0019] [Figure 1] Perspective view showing the fluid control device of the present invention. [Figure 2] Overall perspective view of the fluid control device in FIG. 1 with the heater removed. [Figure 3] Exploded perspective view of the fluid control device in FIG. 1. [Figure 4A] Longitudinal sectional view of the fluid control device in FIG. 1. [Figure 4B] Enlarged view of part A in FIG. 4A. [Figure 5] Enlarged longitudinal sectional view of the right end of FIG. 4A. [Figure 6] Cross-sectional view taken along line A-A in FIG. 5. [Figure 7] Cross-sectional view schematically showing the cross-sectional structure of the heater. [Figure 8] Figure 6 shows a cross-sectional view AA when the fluid control devices are arranged in two rows. [Figure 9] Heater fixing device for the integrated gas line. [Figure 10] Heater fixing device for the supply piping. [Figure 11] Heater fixing rod on the supply piping side. [Modes for carrying out the invention]

[0020] Embodiments of the present invention will be described below with reference to the drawings. In the description, similar elements will be denoted by the same reference numerals, and redundant explanations will be omitted as appropriate. Figure 1 is a perspective view of the fluid control device 1 according to this embodiment, Figure 2 is a perspective view showing the device of Figure 1 with the heater removed, Figure 3 is a perspective view showing the device of Figure 1 with the heater removed, and Figure 4A is a longitudinal cross-sectional view showing the device of Figure 1. The fluid control device 1 of the present invention is generally arranged in parallel in multiple units within a gas box, each controlling a predetermined gas. As shown in Figure 3, each fluid control device 1 includes an integrated gas line 10, a supply pipe (connecting pipe) 20, a branch pipe 30, a first heater 40, a heat transfer block 50, a second heater 60, a first heat insulating plate 70, and a second heat insulating plate 80.

[0021] As shown in Figure 4A, the integrated gas line 10 includes a plurality of flow path blocks 11 arranged in series to form a flow path, and a plurality of fluid control devices 12A to 12E placed on them. The flow channel block 11 (also called the first flow channel block) is a rectangular block made of stainless steel, with two ports on its upper surface and a V-shaped flow channel formed inside that connects them. However, in the central part of the integrated gas line 10, as shown in an enlarged view in Figure 4B, two more flow path blocks 11A (also called second flow path blocks) are arranged on top of the row of flow path blocks 11, and two fluid control devices 12A are arranged on top of them. Each flow path block 11A has ports on its upper and lower surfaces that are offset laterally from each other, and an oblique flow path is formed inside that connects them. Each flow path block 11B is connected to a part of the lower surface of each of the two fluid control devices 12A arranged on top of the flow path block 11A, and has one port on its lower surface in addition to the two ports on its upper surface, forming a Y-shaped flow path inside. This raised structure secures space for a joint structure to connect the bypass piping 13, which will be described later, to the lower side of the upper flow path block 11B, so that the position of the bypass piping 13 can be raised, reducing interference with the lower first insulation plate 70 and heat transfer block 50 and improving the modularity of the integrated gas line 10. Furthermore, even when bypass piping 13 is provided, the flow path block 11 rows may consist of only one raised section or a structure with only the flow path block 11 without any raising, depending on the connection method. However, in this invention, the arrangement of the flow path blocks 11, 11A, and 11B is not limited to this, and any arrangement in series is acceptable.

[0022] The fluid control devices 12A to 12D are devices that control fluid, each having a rectangular parallelepiped body on its underside and two ports on its bottom surface. As shown in Figure 4A, with some exceptions, the fluid control devices 12A to 12D are arranged and screwed together so as to straddle adjacent flow path blocks 11, 11A, or 11B, and each port on the bottom surface of the body communicates with a port on the upper surface of the flow path block 11, 11A, or 11B. The fluid control devices 12A are an on / off valve, 12B is a mass flow controller, 12C is a through block, 12D is a pressure regulator, and 12E is a pressure sensor. However, in this invention, the fluid control devices are not limited to these and various types can be used. For example, 12C may be a filter instead of a through block. In this embodiment, a bypass pipe 13 is provided from a port on the bottom surface of the fluid control device (pressure sensor) 12D to a port on the bottom surface of the flow path block 11B (see Figure 4B). As a result, the fluid introduced from the branch pipe 30 to the fluid control device 12A at the far right of the drawing and passing through the fluid control devices 12C to 12E is introduced to the flow path block 11B via the bypass pipe 13, where it branches into two flow paths. One flows to the right in the drawing, passing through the fluid control devices 12A and 12B and being output from the output pipe 14, while the other flows to the left in the drawing, passing through the fluid control devices 12A and 12B and being output from the second output pipe 15. To avoid interference with this bypass pipe 13, slit-shaped openings 71 and 51 (see Figure 3) are provided in the first heat insulating plate 70 and the heat transfer block 50, which will be described later.

[0023] The supply pipe 20, also called a connecting pipe, is a pipe that carries fluid and is positioned below the flow path block 11, extending in the direction of the arrangement of the flow path block 11, as shown in Figure 4A. This supply pipe 20 constitutes part of a piping system that, for example, passes sequentially through multiple gas boxes from a gas supply source, branches (single drop) within each gas box, and supplies gas to the integrated gas line of the corresponding gas type.

[0024] The branch pipe 30 is a pipe that branches off from the supply pipe 20 and supplies fluid to the integrated gas line 10. In this embodiment, it branches off upstream of the row of flow path blocks 11 in the supply pipe 20 and is connected to the port on the bottom surface of the fluid control device (on / off valve) 12A via a connecting plate 31 (see Figure 3). However, it is not limited to this configuration, and it may also branch off downstream of the row of flow path blocks in the supply pipe 20. By providing a branch pipe 30 on the upstream or downstream side of the flow path block row in the supply pipe 20, the integrated gas line 10 can be easily attached to and detached from the supply pipe 20.

[0025] The first heater 40 is a heater that is positioned on both sides of the flow path block 11 and heats the flow path block 11. As shown in Figures 1 and 3, the external shape is divided into three sections on each side to cover the sides of each flow path block 11, 11A, and 11B, and the lower sides of each fluid control device 12A to 12E. It consists of three heater segments 40L1 to 40L3 on the left and three heater segments 40R1 to 40R3 on the right, aligned with the direction of flow in the supply piping. The high protruding portions of the left heater segments 40R2 and 40R3 and the right heater segments 40L2 and 40L3 cover the output pipes 14 and 15. Power supply cables 42 extend from each heater segment 40L1 to 40R3, and connectors 43 are attached to the ends of the cables.

[0026] As schematically shown in Figure 7, the cross-sectional structure of each heater segment 40L1 to 40R3 is constructed by bonding a stainless steel plate 40a, a silicone rubber heater 40b, and a silicone sponge 40c together from the flow path block 11 side. The silicone rubber heater 40b is formed by sandwiching a heating element between sheets of silicone rubber on both sides, and generates heat when electricity is passed through the heating element. Silicone sponge 40c is a foamed silicone rubber material, a sponge-like sheet containing numerous air bubbles. This configuration allows the stainless steel plate, with its high thermal conductivity, to evenly distribute the heat from the heating element in the silicone rubber heater 40b, thereby uniformly heating the flow channel block 11. Furthermore, the outer layer of silicone sponge 40c has insulating properties, preventing heat from the heater from escaping to the outside, thus reducing external impact and contributing to energy savings.

[0027] Each heater segment 40L1 to 40R3 of the first heater 40 is fixed to the flow path block by being sandwiched from both the left and right sides by a heater fixing device 45 consisting of a clip-shaped leaf spring as shown in Figure 9, as shown in Figure 6. The outer layer of silicone sponge 40c for each heater segment 40L1 to 40R3 is also elastic, making it easy to fix with the heater fixing device 45.

[0028] The first insulating plate 70 is positioned between the flow channel block 11 and the heat transfer block 50, which will be described later, and is a plate that prevents heat transfer between the flow channel block 11 and the heat transfer block 50. The first insulation plate 70 is divided into three insulation plate segments 70A to 70C, as shown in Figure 3, in order to cover the entire length of the flow path block 11 rows. The insulation plate segment 70B is provided with a slit-shaped opening 71 to avoid interference with the bypass piping 13. In this embodiment, the material of the first insulating plate is a fluororesin, specifically PTFE such as Teflon (registered trademark). A fluororesin plate has both insulating and heat-resistant properties, making it suitable for handling high-temperature fluids. Furthermore, slits 72 extending in the longitudinal direction are provided near both sides in the width direction of the insulation plate segments 70A to 70C, allowing the second heater fixing device 65, which will be described later, to be inserted. The insulation plate segments 70A to 70C shown in Figure 3 are for the heater fixing structure shown in Figure 8, which will be described later, and therefore only have slits 72 on one side in the width direction. However, the heater fixing structure shown in Figure 6 has slits 72 on both sides in the width direction.

[0029] As shown in Figures 3 and 6, the heat transfer block 50 has a rectangular prism shape with a roughly U-shaped cross-section, encloses the supply pipe 20, and is a block that transfers heat to the supply pipe 20. In this embodiment, the heat transfer block 50 is made of aluminum, which has high thermal conductivity, and in order to enhance heat transfer between it and the supply pipe 20, the inner surface is formed as a curved surface that follows the outer circumference of the supply pipe 20. The heat transfer block 50 is divided into three block segments 50A to 50C, as shown in Figure 3, in order to cover the entire length of the flow path block 11 rows. Block segment 50B is provided with a slit-shaped opening 51 to avoid interference with the bypass piping 13.

[0030] The second heater 60 is a heater that is positioned on both sides of the heat transfer block 50 and heats the heat transfer block 50. As shown in Figures 1 and 3, the external shape is divided into three sections on each side to cover the entire length of the heat transfer block 50, and consists of three heater segments 60L1 to 60L3 on the left side and three heater segments 60R1 to 60R3 on the right side, aligned with the direction of flow in the supply piping. Similar to the first heater 40, power supply cables 62 extend from each heater segment 60L1 to 60R3, and connectors 63 are attached to their ends.

[0031] The cross-sectional structure of the second heater 60 is similar to that of the first heater, as schematically shown in Figure 7, and is constructed by bonding a stainless steel plate 60a, a silicone rubber heater 60b, and a silicone sponge 60c from the heat transfer block 50 side.

[0032] Each heater segment 60L1 to 60R3 of the second heater 60 is fixed to the heat transfer block 50 by inserting the second heater fixing device 65 shown in Figure 10 into the slit 72 (see Figure 3) of the first insulation plate 70, as shown in the cross-sectional view of Figure 6. The outer layer silicone sponge 60c of each heater segment 60L1 to 60R3 is elastic, making it easy to fix with the heater fixing device 65. The front end of heater segment 60L1 and the rear end of heater segment 60R3 are covered with a cover 67 (see Figure 1) for heat retention.

[0033] Figure 8 is a cross-sectional view AA showing the case where the fluid control device 1 is arranged in two rows in Figure 6. In this example, the space between adjacent fluid control devices 1 is narrow, and there is no space to insert a second heater fixing device 65 to secure the second heater 60. Therefore, instead, a heater fixing rod 66 made of Teflon® is inserted between the fluid control devices 1 to secure the inner second heater 60. The longitudinal position into which the heater fixing rod 66 is inserted is approximately opposite to the position of the outer second heater fixing device 65.

[0034] The second insulating plate 80 is positioned below the heat transfer block 50 and is a plate that prevents heat transfer from the lower surface of the heat transfer block 50. The second insulating plate 80 also covers the entire length of the 11 rows of flow path blocks and is divided into three insulating plate segments 80A to 80C, as shown in Figure 3. The material of the second insulation plate 80 is the same as that of the first insulation plate 70, and in this embodiment, it is a fluororesin, specifically PTFE such as Teflon (registered trademark). This configuration prevents heat from the insulation plate from being released to the outside, reducing the impact on the environment and contributing to energy conservation.

[0035] As shown in Figure 1, the fluid control device 1 of this embodiment further includes a first temperature sensor 91 and a second temperature sensor 92. The first temperature sensor 91 is a thermocouple that measures the temperature of the flow path block 11 and the fluid control devices 12A to 12E, and the second temperature sensor 92 is a thermostat that measures the temperature of the heat transfer block. The outputs of the first temperature sensor 91 and the second temperature sensor 92 can be input to a control means (not shown) via a known interface, so that the control means can monitor the temperature of the flow path block 11 or the fluid control device 12 and the temperature of the heat transfer block 50, and can control the first heater 40 and the second heater 60 so that these temperatures reach a set temperature, respectively.

[0036] According to this embodiment, the integrated gas line 10 can be heated independently by the first heater 40, and the supply piping (connecting piping) 20 can be heated independently by the second heater 60. Therefore, heating is possible even with only the supply piping 20, and even when both the integrated gas line and the supply piping 20 are heated, the integrated gas line 10 can be sufficiently heated. Furthermore, by using a two-layer structure consisting of an integrated gas line 10 and a supply pipe 20, and connecting them with a branch pipe 30, it is possible to easily switch from one integrated gas line 10 to another, or from a configuration including both the integrated gas line 10 and the supply pipe 20 to a configuration with only the supply pipe 20, simply by attaching or detaching the upper integrated gas line 10 while the heaters 40 and 60 are installed on each, thus easily accommodating changes in the specifications of semiconductor manufacturing equipment.

[0037] Furthermore, according to the first and second heaters 40 and 60 of this embodiment, since a stainless steel plate with high thermal conductivity is used on the inner layer side, the heat from the heating element in the silicone rubber heaters 40b and 60b can be made uniform, allowing the flow path block 11 and heat transfer block 50 to be heated uniformly. In addition, since the outer layer silicone sponges 40c and 60c have heat insulating properties, the heat from the silicone rubber heaters 40b and 60b is not released to the outside, reducing the impact on the outside and contributing to energy saving. Also, since the outer layer silicone sponges 40c and 60c are elastic, they can be easily fixed with the heater fixing devices 45 and 65.

[0038] Although embodiments of the present invention have been described in detail above, the present invention is not limited to these specific embodiments, and various modifications and changes are possible within the scope of the gist of the present invention as described in the claims.

[0039] For example, in the above embodiment, a second insulating plate 80 is provided to prevent heat transfer from the lower surface of the heat transfer block 50. However, if the temperature setting is low and heat dissipation to the outside is not a problem, it is not necessarily required to provide this plate.

[0040] Furthermore, although fluororesin plates were used as the first insulation plate 70 and the second insulation plate 80, plates of other materials may be used as long as they have good heat insulation and heat resistance.

[0041] Furthermore, although the first heater 40 and the second heater 60 have the three-layer structure described above, other configurations are also acceptable in the fluid control device of the present invention, as long as they provide temperature controllability and heat retention.

[0042] Furthermore, although a first temperature sensor 91 and a second temperature sensor 92 are provided in this embodiment, if precise temperature control is not required, for example, these sensors may be omitted and the heater power may simply be controlled.

[0043] Furthermore, in this embodiment, the branch pipe 30 branches upstream of the flow path block 11 rows in the supply pipe 20, but it may also be branched downstream, or in the central part if the structure is such that it can be easily separated. [Explanation of symbols]

[0044] 1: Fluid control device 10: Integrated gas lines 11: Flow channel block (first flow channel block) 11A: Flow channel block (second flow channel block) 11B: Flow channel block 12: Fluid control equipment 12A-12E: Fluid control equipment 13: Bypass piping 14: First output piping 15: Second output piping 20: Supply piping 30: Branch piping 31: Connecting plate 40: First heater 40L1-40R3: Heater segment 40a: Stainless steel plate 40b: Silicone rubber heater 40c: Silicone sponge 42: Power supply cable 43: Connector 45: Heater fixing device 50: Heat transfer block 50A-50C: Block segment 51: Opening 60: Second heater 60L1-60R1: Heater segment 60a: Stainless steel plate 60b: Silicone rubber heater 60c: Silicone sponge 62: Power supply cable 63: Connector 65: Second heater fixing device 66: Heater fixing rod 67: Cover 70: First insulation plate 70A-70C: Insulated plate segment 71: Opening 72: Slit 80: Second insulation plate 80A-80C: Insulated plate segment 91: First temperature sensor 92: Second temperature sensor

Claims

1. A fluid control device comprising: a plurality of flow path blocks arranged in series to form a flow path and a plurality of fluid control devices arranged on the plurality of flow path blocks, a supply pipe arranged below the flow path blocks so as to extend in the direction of the arrangement of the flow path blocks and for carrying fluid, and a branch pipe that branches off from the supply pipe and supplies the fluid to the integrated gas line, The first heaters are arranged on both sides of the flow path block, A heat transfer block having a roughly U-shaped cross-section, enclosing the supply pipe and transferring heat to the supply pipe, A second heater is positioned on both sides of the heat transfer block to heat the heat transfer block, A fluid control device comprising a first insulating plate disposed between the flow channel block and the heat transfer block, which obstructs heat transfer between the flow channel block and the heat transfer block.

2. The fluid control device according to claim 1, further comprising a second insulating plate disposed below the heat transfer block and preventing heat transfer from the lower surface of the heat transfer block.

3. The fluid control device according to claim 2, wherein the first heat insulating plate and the second heat insulating plate are fluororesin plates.

4. The fluid control device according to claim 1, wherein the first heater and the second heater are constructed by bonding a stainless steel plate, a silicone rubber heater, and a silicone sponge together from the flow path block or the heat transfer block side.

5. The fluid control device according to claim 1, further comprising a first temperature sensor for measuring the temperature of the flow path block or the fluid control device, and a second temperature sensor for measuring the temperature of the heat transfer block.

6. The fluid control device according to claim 1, wherein the branch pipe branches off on the upstream or downstream side of the row of flow path blocks in the supply pipe.

7. The plurality of flow path blocks include a first flow path block, which is a rectangular parallelepiped having two ports on its upper surface and a V-shaped flow path formed inside that connects the two ports, and a second flow path block, which is a rectangular parallelepiped having ports on its upper and lower surfaces at positions offset laterally from each other and an oblique flow path formed inside that connects the two ports. The fluid control device according to claim 1, wherein one or more second flow channel blocks are arranged on a plurality of the first flow channel blocks arranged in a row, and the fluid control device is arranged on the second flow channel blocks.

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