Dry vacuum pump

JP7873248B2Active Publication Date: 2026-06-11PFEIFFER VACUUM SAS

Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
PFEIFFER VACUUM SAS
Filing Date
2022-02-03
Publication Date
2026-06-11

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    Figure 0007873248000003
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Abstract

To improve the sealing performance of a stator of a dry vacuum pump having a half-shell structure. [Solution] The present invention relates to a dry vacuum pump (1), wherein a first half shell (3) has at least one seal groove (16) provided in a joining surface (10) of the half shells (3, 4) that accommodates a side rail (14b) of a first seal (14), and the bottom of the seal groove (16) has at least one joining interface (17) that opens between the half shells (3, 4) having a "saddle" shape to form a smooth transition for the first seal (14).
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Claims

[Claim 1] - A stator (2) having at least first and second complementary half-shells (3, 4) and first and second end pieces (5, 6), - Two rotor shafts that rotate in at least one intake / exhaust stage (T1-T6), - A dry vacuum pump (1) having a first seal (14), The half shells (3, 4) and the end pieces (5, 6) are coupled to each other to form at least one intake / exhaust chamber of the intake / exhaust stage (T1-T6), The first seal (14) is - The first and second annular ends (14a) are inserted between each of the aforementioned end pieces (5, 6) and the aforementioned half shells (3, 4), - The annular end (14a) is connected to two side rails (14b) which are inserted between the half shells (3, 4), A dry vacuum pump (1) characterized in that the first half shell (3) has at least one seal groove (16) provided in the joint surface (10) of the half shells (3, 4) that accommodate the side rail (14b) of the first seal (14), and the bottom of the seal groove (16) has at least one joint interface (17) that opens between the half shells (3, 4) which have the shape of a "hyperbolic paraboloid" to form a smooth transition for the first seal (14). [Claim 2] The dry vacuum pump (1) according to claim 1, wherein the second half shell (4) has at least one joining interface (18) that opens out from the half shells (3, 4) and faces the joining interface (17) of the first half shell (3), and the joining interface (18) is rounded in shape to form a smooth transition for the first seal (14). [Claim 3] The dry vacuum pump (1) according to claim 2, characterized in that the radius of curvature (R2) of the rounded joint interface (18) is 2 mm or more. [Claim 4] The dry vacuum pump (1) according to claim 2 or 3, characterized in that the radius of curvature (R2) of the rounded joint interface (18) is 5 mm or less. [Claim 5] The dry vacuum pump (1) according to any one of claims 1 to 4, characterized in that the half shells (3, 4) each have at least one half recess (13) formed to cooperate with the nose (12) of the end piece (5, 6), and at least one of the bonding interfaces (17, 18) is open to the half recess (13). [Claim 6] The dry vacuum pump (1) according to any one of claims 2 to 5, characterized in that the two rounded joint interfaces (18) are realized by machining the half recess (13) of the second half shell (4) and continuous contour milling. [Claim 7] The dry vacuum pump (1) according to any one of claims 1 to 6, characterized in that the two saddle-shaped joining interfaces (17) are realized by machining a seal groove (16) and continuous contour milling. [Claim 8] The dry vacuum pump (1) according to any one of claims 1 to 7, characterized in that the radius of curvature (R1) of the cross-section of the saddle-shaped bonding interface (17) is 2 mm or more. [Claim 9] The dry vacuum pump (1) according to any one of claims 1 to 8, characterized in that the radius of curvature (R1) of the cross-section of the saddle-shaped bonding interface (17) is 5 mm or less. [Claim 10] The dry vacuum pump (1) has at least one second seal (15), and the second seal (15) is - First and second annular ends (15a) inserted between each of the end pieces (5, 6) and the half shells (3, 4), - comprising two side rails (15b) connecting the annular end (15a), The dry vacuum pump (1) according to any one of claims 1 to 9, wherein the side rail (15b) is inserted between the half shells (3, 4), and the first seal (14) is positioned inside the second seal (15) such that the first seal (14) and at least one of the second seals (15) form at least two continuous seal barriers for gas. [Claim 11] The dry vacuum pump (1) according to any one of claims 1 to 10 is characterized in that it has a heating device (11) which heats the stator (2) to a temperature higher than 150°C. [Claim 12] The dry vacuum pump (1) according to any one of claims 1 to 11, characterized in that the half shells (3, 4) of the stator (2) form at least two intake and exhaust stages (T1-T6) that are mounted in series between the intake orifice (7) and the exhaust orifice (8) of the dry vacuum pump (1).