Composite substrate and method for manufacturing the same

The composite substrate with modified layers formed by laser irradiation addresses performance degradation and cost issues in existing designs, ensuring effective charge trapping and reducing manufacturing expenses.

JP7874248B1Active Publication Date: 2026-06-15NGK CORP
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Patent Information

Application Number
JP2026513236
Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
Priority Date
2024-12-12
Filing Date
2025-07-02
Publication Date
2026-06-15
Estimated Expiration
2045-07-02

AI Technical Summary

Technical Problem

Existing composite substrates with charge trapping layers suffer performance degradation when a piezoelectric layer is added, and the use of chemical vapor deposition (CVD) methods for forming these layers is costly due to the need for special safety equipment and reactive gases.

Method used

A composite substrate design with a crystalline support substrate, a first modified layer with amorphous and crystalline structures, and an active layer, where the modified layers are formed using laser irradiation after the active layer is applied, maintaining charge trapping performance and reducing manufacturing costs.

Benefits of technology

The proposed composite substrate maintains high performance for high-frequency and harmonic applications while being cost-effective, avoiding the need for expensive safety equipment and reactive gases.

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Abstract

The present invention provides a composite substrate that can maintain charge trapping performance, contribute to high performance when used in devices for high-frequency and / or harmonic applications, and can be manufactured at low cost. The composite substrate according to an embodiment of the present invention comprises, in this order, a crystalline support substrate, a first modified layer, a second modified layer, and an active layer. The second modified layer contains an amorphous structure of the same elements as those constituting the support substrate. The first modified layer contains the same elements as those constituting the support substrate. The regularity of the atomic arrangement in the first modified layer and the regularity of the atomic arrangement in the second modified layer are different from each other.
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