Angular velocity detection element and angular velocity sensor

By employing asymmetrical groove depths in the drive and detection vibration arms, the angular velocity detection element achieves improved sensitivity and accuracy in angular velocity detection.

JP7877958B2Active Publication Date: 2026-06-23SEIKO EPSON CORP
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Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
SEIKO EPSON CORP
Filing Date
2022-08-29
Publication Date
2026-06-23

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Abstract

To provide an angular velocity detecting element and an angular velocity sensor that easily increase the sensitivity of detecting an angular velocity.SOLUTION: An angular velocity detecting element has drive vibration arms that are bent and vibrated according to drive signals to be applied, and detection vibration arms that are bent and vibrated according to an angular velocity to be applied. The drive vibration arms and the detection vibration arms each have a bottomed groove part along an extension direction. When the thickness of the drive vibration arms is defined as t1 and the depth of the groove parts of the drive vibration arms as d1, and when the thickness of the detection vibration arms is defined as t2 and the depth of the groove parts of the detection vibration arms as d2, d2 / t2>d1 / t1 is satisfied.SELECTED DRAWING: Figure 3
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