Electrostatic chuck, substrate fixing device, paste

JP7882040B2Active Publication Date: 2026-06-30SHINKO ELECTRIC IND CO LTD
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Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
SHINKO ELECTRIC IND CO LTD
Filing Date
2022-08-02
Publication Date
2026-06-30

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Abstract

To provide an electrostatic chuck that uses a material in place of tungsten for an electrostatic electrode and has high adhesion between a base and the electrostatic electrode.SOLUTION: An electrostatic chuck includes a base, and an electrostatic electrode built into the base, and the base is made of ceramics, and the electrostatic electrode has TixOy (atomic ratio y / x of less than 1.7) as a main component, which is an oxide of titanium.SELECTED DRAWING: Figure 6
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