Control interface for mask detection assembly

Abstract

To provide a control interface of a mask sensing assembly.SOLUTION: A control interface of a mask sensing assembly comprises a mask-like sensing module 10 and a housing 12. The mask-like sensing module has a sensor and a storage unit. The sensor senses environment information in a simulating lithography process and generates a sensing signal to be stored in the storage unit. The housing is for disposing the mask-type sensing module and has a housing processor, a plurality of control buttons and indicators. The control buttons are manipulated to generate a predetermined command, and the command is transmitted to the mask-like sensing module in a wireless way to execute the command. After the command is executed, the mask-like sensing module generates and transmits a status signal to the housing processor, and causes the indicators to display specific information based on the status signal.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a semiconductor manufacturing process, and particularly to a control interface for controlling a mask detection assembly and transferring data.

Background Art

[0002] Conventionally, in the current semiconductor manufacturing process, the lithography process is one of the essential and important processes. Specifically, the lithography process is a technique for transferring a circuit pattern on a mask to a wafer by irradiating a photoresist on the wafer with a light source of a specific wavelength after the light source passes through the mask, causing a chemical change in the photoresist.

[0003] As can be seen from the above, the mask plays a very important role in the lithography process. Generally, the mask is a thin sheet made of quartz glass, on which a circuit pattern formed by combining a specific metal plating film (for example, chromium metal) in a certain arrangement is coated. However, like the wafer, the mask is a precise and fragile vehicle, and the potential problem is that due to the fragile material and structural strength of the mask itself, the structure of the mask may be affected by any vibration or inclination occurring during the transportation process or the lithography process of the mask. On the other hand, the mask itself and the metal plating film thereon also cause phenomena such as deterioration, deformation or embrittlement due to the ambient temperature and humidity, and all the above-mentioned problems affect the operation of the mask. And when a problem occurs with the mask, the wafer manufactured with the mask is also affected and becomes unusable, and ultimately, the semiconductor manufacturer may suffer immeasurable losses.

[0004] The inventor's previous invention, U.S. Patent Application No. 18 / 413,773, discloses a control interface for a mask detection assembly that can detect abnormalities in the work environment or work machinery by simulating the mask transport and manufacturing processes offline and detecting relevant environmental information. While this invention provides a solution for detecting environmental information in a lithography process, there is still room for improvement in the control method and data transfer portion of the detection assembly. [Overview of the project]

[0005] The main objective of this invention is to provide a control interface for a mask detection assembly, and to provide a solution for controlling a mask detection assembly and transferring data.

[0006] To achieve the above-mentioned objectives, the control interface of the mask detection assembly according to the present invention includes a mask shape detection module and a housing. The mask-type detection module has a body that has the same external dimensions as the mask actually used, and the body houses a sensor, power supply, processor, memory, wireless charging receiver, and first transceiver. The sensor detects environmental information during the simulation process of the lithography process of the body and generates a detection signal based on the detected environmental information. The processor stores the detection signal in the memory. The power supply provides the necessary power to the sensor, processor, memory, and first transceiver. The wireless charging receiver is electrically connected to the power supply. The first transceiver receives or transmits signals wirelessly. The enclosure has a loading area for arranging the mask-type detection module. The enclosure also houses an enclosure-side processor, an enclosure-side power supply, a wireless charging transmitter, and an enclosure-side transceiver. The enclosure-side power supply provides the power necessary for wireless charging of the wireless charging transmitter, and when the mask-type detection module is placed in the loading area, the wireless charging transmitter responds to the wireless charging receiver, transferring a power signal to charge the power supply. The enclosure further has an interface area. The interface area is equipped with multiple control buttons and multiple indicators. The enclosure-side processor is electrically connected to the control buttons and receives or processes commands generated when the control buttons are operated. It executes the commands by transmitting them to the mask-type detection module's processor via the enclosure-side transceiver and the first transceiver. After the commands are executed, the mask-type detection module's processor generates a status signal and transmits it to the enclosure-side processor via the first transceiver and the enclosure-side transceiver, instructing the indicators to display specific information based on the status signal. [Brief explanation of the drawing]

[0007] [Figure 1] This is an exploded view of one preferred embodiment of the present invention. [Figure 2] This is a block diagram of one preferred embodiment of the present invention. [Figure 3] This is a front view of the interface area of ​​one preferred embodiment of the present invention. [Modes for carrying out the invention]

[0008] As shown in Figures 1 to 3, a mask detection assembly according to one preferred embodiment of the present invention includes a mask shape detection module 10, a housing 12, and a terminal device 14.

[0009] The mask-type detection module 10 has a main body 16 that has the same external shape and form as the mask actually used, and is equipped with a sensor 18, a power supply 20, a processor 22, a storage device 24, a wireless charging receiver 26, a first transceiver 28, and a second transceiver 30, and each module forms a predetermined electrical connection via a circuit on a circuit board (not shown). The sensor 18 is for detecting environmental information, including temperature, humidity, vibration, tilt angle, etc., during the simulation process of the lithography process of the main body 16, and generating a detection signal based on this information. The processor 22 is electrically connected to the sensor 18 and commands the sensor 18 to start or stop detecting environmental information and storing the detection signal in the storage device 24. The power supply 20 provides the necessary power to each module. The wireless charging receiver 26 is electrically connected to the power supply 20 and can charge the power supply 20. The first and second transceivers 28 and 30 are electrically connected to the processor 22, respectively, and receive or transmit signals wirelessly (e.g., Wi-Fi®, Bluetooth®, Zigbee®, far-infrared, RF signals, etc.).

[0010] The housing 12 has a base 32 and a top cover 34. The top surface of the base 32 is provided with a loading area 35 and an interface area 36. The loading area 35 is provided with four support columns 38 for arranging the mask-type detection module 10. The interface area 36 is equipped with a plurality of control buttons 39 and a display 47. Inside the base 32 are a housing-side processor 62, a housing-side power supply, a wireless charging transmitter 64, and a housing-side transceiver 66. Each module forms a predetermined electrical connection via the circuits of the circuit board. In this embodiment, the housing-side power supply includes a built-in battery 68 that provides the necessary power for the above modules, and a power cable 70 for connecting to an external power supply 72 (city power or storage battery). After the power cable 70 is connected to the external power supply 72, the built-in battery 68 can be charged and the wireless charging transmitter 64 can be provided with the power necessary for wireless charging. The wireless charging transmitter 64 is located below the loading area 35, and when the mask-type detection module 10 is placed on the support column 38 of the loading area 35, the wireless charging transmitter 64 corresponds to the wireless charging receiver 26 to wirelessly transmit a power signal. The wireless charging transmitter 64 and wireless charging receiver 26 are conventional modules that can transfer power in a contactless manner, and their detailed structure is omitted here. The housing-side processor 62 is electrically connected to the housing-side transceiver 66 and transmits a specific signal to the mask-type detection module 10 via the housing-side transceiver 66 and the first transceiver 28, or receives a signal transmitted from the mask-type detection module 10. In this embodiment, the housing-side transceiver 66 and the first transceiver 28 transmit signals using RF signals.

[0011] The control button 39 is electrically connected to the chassis-side processor 62 and, when operated, transmits a predetermined command to the chassis-side processor 62. The command is then transmitted to the mask-type detection module 10 via the chassis-side transceiver 66 and the first transceiver 28, causing the processor 22 of the mask-type detection module 10 to execute the corresponding operation. After the command is executed, the processor 22 of the mask-type detection module 10 generates a status signal based on this, which is then transmitted to the chassis-side processor 62 via the first transceiver 28 and the chassis-side transceiver 66. The chassis-side processor 62 then controls the display 47 to display specific information. In this embodiment, the control button 39 includes a sensor on / off button 40, a status check button 42, a detection start button 44, and a detection stop button 46. In this embodiment, the indicator 47 is a plurality of LED lamps and includes a housing-side power indicator 48, an external power connection indicator 50, a housing-side fault indicator 52, a detection indicator 54, a signal connection indicator 56, a wireless charging indicator 58, and a detection module fault indicator 60.

[0012] In this embodiment, the terminal device 14 is a computer, such as a desktop calculator, notebook computer, tablet computer, or smartphone, and has a terminal device-side transceiver 74 that connects to the second transceiver 30 of the mask-type detection module 10, and receives or transmits information wirelessly (for example, Wi-Fi®, Bluetooth®, Zigbee®, far-infrared, RF signal, etc.). In this embodiment, the terminal device-side transceiver 74 and the second transceiver 30 transmit information using Bluetooth®. The terminal device 14 generates a command, transmits it to the mask-type detection module 10 via the terminal device-side transceiver 74 and the second transceiver 30, causes the processor 22 to read the detection signal stored in the storage device 24, and then sends the detection signal back to the terminal device 14 via the second transceiver 30 and the terminal device-side transceiver 74 for processing and analysis. In another embodiment, the terminal device transceiver 74 and the second transceiver 30 are two-stage ports (e.g., USB ports) and are connected to the mask-type detection module 10 and the terminal device 14 using a transmission line (not shown).

[0013] With the above structure, the user can operate the device wirelessly via the wireless transceiver between the housing 12 and the mask-type detection module 10 by operating the control button 39 on the housing 12, without affecting the detection process in any way. The control contents of the control button 39 are as follows.

[0014] 1. Press any one of the control buttons 40, 42, 44, or 46: The enclosure 12 starts up and enters standby mode.

[0015] 2. Briefly press the sensor on / off button 40: The mask-shaped detection module 10 is activated and enters standby mode.

[0016] 3. Press and hold the sensor on / off button 40: Shut down the mask-shaped detection module 10.

[0017] 4. Detection start button 44: After the mask-shaped detection module 10 starts detecting environmental information and generates a detection signal based on it, the detection signal is stored in the storage device 24.

[0018] 5. Detection stop button 46: Stops the detection of the mask-shaped detection module 10.

[0019] 6. Status inspection button 42: Inspects the current status of the mask-shaped detection module 10, the housing 12, and the terminal device 14.

[0020] When the mask detection assembly of this embodiment executes each instruction, the display 47 displays the currently executed program. The meaning represented by each display 47 is as shown below.

[0021] 1. Housing side power indicator 48: The housing 12 has been activated.

[0022] 2. External power connection indicator 50: The power cable 70 is connected to the external power supply 72.

[0023] 3. Housing side fault indicator 52 is constantly lit: The housing 12 has failed.

[0024] 4. Housing side fault indicator 52 is flashing: The housing 12 has low power.

[0025] 5. Detection indicator 54: The sensor 18 of the mask-shaped detection module 10 is detecting environmental information.

[0026] 6. Signal connection indicator 56 is constantly lit: The terminal device side transceiver 74 of the terminal device 14 and the second transceiver 30 of the mask-shaped detection module 10 are connected.

[0027] 7. Signal connection indicator 56 is flashing: The mask-shaped detection module 10 is transmitting a detection signal to the terminal device 14.

[0028] 8. Wireless charging indicator 58: The power supply 20 of the mask-shaped detection module 10 is being wirelessly charged.

[0029] 9. Detection module fault indicator 60 is constantly lit: The mask-type detection module 10 has malfunctioned.

[0030] 10. Detection module fault indicator 60 is flashing: The mask-type detection module 10 has low power.

[0031] With the above structure, the user can control the mask shape detection module 10 wirelessly by operating the control buttons 39 on the housing 12, and obtain the current status by observing each display 47. Furthermore, commands can be sent to the terminal device 14 to download the detection signals from the mask shape detection module 10, which are then processed and analyzed by the terminal device 14. This allows the user to understand the mask status throughout the entire lithography process. [Explanation of Symbols]

[0032] 10 Mask-shaped detection module 12 cabinets 14 Terminal devices 16 Main unit 18 sensors 20 Power supply 22 processors 24 Storage device 26 Wireless Charging Receivers 28. First transceiver 30. Second transceiver 32 bases 34 Top Cover 35 Loading Area 36 Interface area 38 Pillar 39 control buttons 40 Sensor On / Off Button 42 Status Check Button 44 Start detection button 46 Stop detection button 47 Display 48. Power indicator on the enclosure side 50 External power supply connection indicator 52. Fault indicator on the enclosure side 54 Detection indicator 56 Signal Connection Indicator 58 Wireless charging indicator 60 Detection Module Fault Indicator 62 Chassis-side processor 64 Wireless Charging Transmitters 66. Transceiver on the enclosure side 68 internal battery 70 Power Cables 72 External power supply 74 Terminal device side transceiver

Claims

1. It includes a mask-type detection module and a housing, The mask-type detection module has a body whose external shape is the same as that of a mask actually used, and the body houses a sensor, a power supply, a processor, a memory device, a wireless charging receiver, and a first transceiver, the sensor is for detecting environmental information during the simulation process of the lithography process of the body and generating a detection signal based on the detected environmental information, the processor stores the detection signal in the memory device, the power supply provides the necessary power for the sensor, the processor, the memory device, and the first transceiver, the wireless charging receiver is electrically connected to the power supply, and the first transceiver receives or transmits signals wirelessly. The enclosure has a loading area for arranging the mask-type detection module, and the enclosure further houses an enclosure-side processor, an enclosure-side power supply, a wireless charging transmitter, and an enclosure-side transceiver. The enclosure-side power supply provides the power necessary for wireless charging of the wireless charging transmitter, and when the mask-type detection module is placed in the loading area, the wireless charging transmitter corresponds to the wireless charging receiver, transferring a power signal to charge the power supply. The enclosure further has an interface area, the interface area is equipped with a plurality of control buttons and a plurality of indicators, the enclosure-side processor is electrically connected to the control buttons and receives or processes commands generated when the control buttons are operated, and executes the commands by transmitting them to the processor of the mask-type detection module via the enclosure-side transceiver and the first transceiver, and after the commands are executed, the processor of the mask-type detection module generates a status signal and transmits it to the enclosure-side processor via the first transceiver and the enclosure-side transceiver, and commands the indicators to display specific information based on the status signal, the control interface of the mask detection assembly.

2. Furthermore, it includes a terminal device having a terminal device-side transceiver, The control interface for the mask detection assembly according to claim 1, wherein the mask detection module has a second transceiver connected to the terminal device side transceiver, the terminal device generates commands and transmits them to the mask detection module via the terminal device side transceiver and the second transceiver, the processor reads the detection signal stored in the memory device and sends the detection signal back to the terminal device via the second transceiver and the terminal device side transceiver for processing and analysis.

3. The control interface of the mask detection assembly according to claim 2, wherein the second transceiver in the mask detection module and the terminal device side transceiver of the terminal device are connected wirelessly.

4. The control interface for the mask detection assembly according to claim 1, wherein the first transceiver in the mask-type detection module and the housing-side transceiver of the housing are connected wirelessly.

5. The control interface for the mask detection assembly according to claim 1, wherein the control button includes a sensor on / off button, and a short press of the sensor on / off button can command the mask type detection module to activate and enter a standby state, and a long press of the sensor on / off button can command the mask type detection module to shut down.

6. The control interface for the mask detection assembly according to claim 1, wherein the control buttons include a detection start button and a detection stop button, and when the detection start button is operated, a command can be issued to the sensor of the mask-type detection module to start detecting the environmental information, and when the detection stop button is operated, a command can be issued to the sensor of the mask-type detection module to stop detecting.

7. The control interface for the mask detection assembly according to claim 1, wherein the control button includes a status check button, and when the status check button is operated, the housing and the mask type detection module are instructed to check their current state and to display the state of the housing and the mask type detection module on the display.

8. The control interface for the mask detection assembly according to claim 1, wherein the environmental information detected by the sensor includes at least one of temperature, humidity, vibration, and tilt angle.

9. The control interface for the mask detection assembly according to claim 1, wherein the housing-side power supply includes a built-in battery and a power cable, the built-in battery providing the necessary power for the housing-side processor, the housing-side transceiver and the indicator, and the power cable being connected to an external power supply to charge the built-in battery and provide power for wireless charging of the wireless charging transmitter.

10. The control interface for the mask detection assembly according to claim 1, wherein the housing has a base and a top cover, and the top surface of the base is provided with the loading area and the interface area.

Images