Infrared Raman spectrometer

The infrared Raman apparatus addresses the issue of large spatial requirements and sample repositioning by using a shared mirror and revolving nosepiece to align optical axes, enabling efficient and compact Raman and infrared measurements.

JP7885664B2Active Publication Date: 2026-07-07SHIMADZU SEISAKUSHO LTD

Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
SHIMADZU SEISAKUSHO LTD
Filing Date
2022-11-30
Publication Date
2026-07-07

AI Technical Summary

Technical Problem

Existing Raman and infrared measurement apparatuses require a large area around the objective optical system and necessitate sample position adjustments when switching measurement modes.

Method used

An infrared Raman apparatus that allows for miniaturization of the objective optical system and eliminates the need for sample position adjustments by using a shared mirror and a revolving nosepiece to align optical axes for Raman and infrared measurements.

Benefits of technology

The apparatus achieves miniaturization and eliminates the need for sample repositioning during mode switching, enhancing operational efficiency and reducing spatial requirements.

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Patent Text Reader

Abstract

To provide an infrared Raman device that can reduce the size around an objective optical system and eliminate the need to adjust a sample position when switching measurement modes.SOLUTION: An infrared Raman device (100, 100A) can perform Raman measurement and first infrared measurement on a sample (S) by switching them. The infrared Raman device includes an objective lens for Raman measurement (41), a first observation lens for infrared measurement (42), a laser light source (11) that generates laser light (L1), a first infrared light source (12) that generates first infrared light (L2) and a mirror (30). When the Raman measurement is performed, the mirror is arranged so as to reflect the laser light to pass through the objective lens for Raman measurement, and also reflect the Raman light (L3) generated from the sample by the laser light irradiated on the sample through the objective lens for Raman measurement and passed through the objective lens for Raman measurement.SELECTED DRAWING: Figure 1A
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Description

Technical Field

[0001] This disclosure relates to an infrared Raman apparatus.

Background Art

[0002] For example, International Publication No. 2013 / 132734 (Patent Document 1) describes an apparatus that performs Raman measurement and infrared measurement on a sample by switching.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In an apparatus that performs Raman measurement and infrared measurement on a sample by switching, the area around the objective optical system may become large. Also, in an apparatus that performs Raman measurement and infrared measurement on a sample by switching, adjustment of the sample position may be necessary with the switching of the measurement mode.

[0005] This disclosure has been made in view of the problems of the prior art as described above. More specifically, this disclosure provides an infrared Raman apparatus capable of miniaturizing the area around the objective optical system and eliminating the need for adjusting the sample position with the switching of the measurement mode.

Means for Solving the Problems

[0006] The infrared Raman apparatus of this disclosure is capable of switching between Raman measurement and first infrared measurement on a sample. The infrared Raman apparatus comprises a Raman measurement objective lens, a first infrared measurement observation lens, a laser light source that generates laser light, a first infrared light source that generates first infrared light, and a mirror. When Raman measurement is performed, the mirror is positioned to reflect the laser light and allow it to pass through the Raman measurement objective lens, and to reflect the Raman light generated from the sample by the laser light that has passed through the Raman measurement objective lens and irradiated onto the sample, and which has also passed through the Raman measurement objective lens. When first infrared measurement is performed, the first infrared measurement observation lens is switched from the Raman measurement objective lens so that the optical axis of the first infrared measurement observation lens coincides with the optical axis of the Raman measurement objective lens when Raman measurement is performed. When the first infrared measurement is performed, the mirror is positioned to partially reflect the first infrared light and allow it to pass through the first observation lens for infrared measurement, and also to allow the first infrared light that has passed through the first observation lens for infrared measurement, been reflected by the sample, and passed through the first observation lens for infrared measurement again to pass through. [Effects of the Invention]

[0007] The infrared Raman apparatus of this disclosure allows for miniaturization of the objective optical system and eliminates the need to adjust the sample position when switching measurement modes. [Brief explanation of the drawing]

[0008] [Figure 1A] This is a schematic diagram of the infrared Raman spectrometer 100 used when Raman measurements are performed. [Figure 1B] This is a schematic diagram of the infrared Raman spectrometer 100 when the first infrared measurement is performed. [Figure 2] This is an enlarged schematic diagram of the area near mirror 30 when the first infrared measurement is performed. [Figure 3A] This is a schematic diagram of the first observation lens 42 for infrared measurement. [Figure 3B] This is a schematic diagram showing the passage of the first infrared light L2 through the first observation lens 42 for infrared measurement. [Figure 4A]This is a schematic diagram of the infrared Raman spectrometer 200 used when Raman measurements are performed. [Figure 4B] This is a schematic diagram of the infrared Raman spectrometer 200 used when the first infrared measurement is performed. [Figure 5] This is a schematic diagram of the infrared Raman spectrometer 100A used when the second infrared measurement is performed. [Figure 6A] This is a schematic diagram of the second observation lens 46 for infrared measurement. [Figure 6B] This is a schematic diagram showing how the second infrared light L4 passes through the second infrared measurement observation lens 46, the sample S, and the first infrared measurement observation lens 42. [Modes for carrying out the invention]

[0009] Embodiments of the present disclosure will be described with reference to the drawings. In the following drawings, the same or corresponding parts will be denoted by the same reference numerals, and redundant descriptions will not be repeated.

[0010] (First Embodiment) An infrared Raman apparatus according to the first embodiment (hereinafter referred to as "infrared Raman apparatus 100") will be described.

[0011] <Configuration of the infrared Raman spectrometer 100> The configuration of the infrared Raman spectrometer 100 is described below.

[0012] Figure 1A is a schematic diagram of the infrared Raman apparatus 100 when Raman measurement is performed, and Figure 1B is a schematic diagram of the infrared Raman apparatus 100 when the first infrared measurement is performed. As shown in Figures 1A and 1B, the infrared Raman apparatus 100 includes a laser light source 11, a first infrared light source 12, a beam splitter 21, mirrors 22, 23, 24, 30, an objective lens 41 for Raman measurement, a first observation lens 42 for infrared measurement, a revolving nosepiece 43, a stage 50, a Raman spectrometer 61, and an infrared detector 62.

[0013] The laser light source 11 generates a laser beam L1. The first infrared light source 12 generates a first infrared beam L2. The infrared Raman apparatus 100 is capable of switching between Raman measurement using the laser beam L1 and first infrared measurement using the first infrared beam L2.

[0014] The objective lens 41 for Raman measurement and the first observation lens 42 for infrared measurement are attached to the revolver 43. By rotating the revolver 43, it is possible to switch between the objective lens 41 for Raman measurement and the first observation lens 42 for infrared measurement. More specifically, when the first infrared measurement is performed, by rotating the revolver 43, the optical axis of the first observation lens 42 for infrared measurement coincides with the optical axis of the objective lens 41 for Raman measurement when Raman measurement is performed. There is a sample S on the optical axis of the objective lens 41 for Raman measurement when Raman measurement is performed and on the optical axis of the first observation lens 42 for infrared measurement when the first infrared measurement is performed. Note that the sample S is placed on the stage 50.

[0015] The laser beam L1 generated by the laser light source 11 is reflected by the beam splitter 21. The laser beam L1 reflected by the beam splitter 21 is reflected by the mirror 22. The first infrared beam L2 generated by the first infrared light source 12 is reflected by the mirror 23. The first infrared beam L2 reflected by the mirror 23 is reflected by the mirror 24.

[0016] The position of the mirror 30 is movable. The mirror 30 is, for example, an edge mirror. When Raman measurement is performed, the mirror 30 is moved to a position where it reflects all of the laser beam L1 reflected by the mirror 22. As a result, the laser beam L1 reflected by the mirror 30 passes through the objective lens 41 for Raman measurement. The laser beam L1 that has passed through the objective lens 41 for Raman measurement is focused and irradiated onto the sample S. When the laser beam L1 is irradiated, Raman light L3 is generated from the sample S.

[0017] The Raman light L3 generated from the sample S passes through the objective lens 41 for Raman measurement. The Raman light L3 that has passed through the objective lens 41 for Raman measurement and has become parallel light is all reflected by the mirror 30. The Raman light L3 reflected by the mirror 30 is reflected by the mirror 22. The Raman light L3 reflected by the mirror 22 passes through the beam splitter 21. The Raman light L3 that has passed through the beam splitter 21 is incident on the Raman spectrometer 61. Thereby, Raman measurement is performed in the Raman spectrometer 61.

[0018] When the first infrared measurement is performed, by rotating the revolver 43, the switching from the objective lens 41 for Raman measurement to the first observation lens 42 for infrared measurement is performed. Also, when the first infrared measurement is performed, the position of the mirror 30 is moved. More specifically, when the first infrared measurement is performed, the mirror 30 is moved to a position where it reflects a part of the first infrared light L2 reflected by the mirror 24. Thereby, the first infrared light L2 reflected by the mirror 30 passes through the first observation lens 42 for infrared measurement. The first infrared light L2 that has passed through the first observation lens 42 for infrared measurement is condensed and irradiated onto the sample S.

[0019] The first infrared light L2 reflected by the sample S passes through the first observation lens 42 for infrared measurement. The first infrared light L2 that has passed through the first observation lens 42 for infrared measurement and has become parallel light passes through the mirror 30. That is, the first infrared light L2 reflected by the sample S and passing through the first observation lens 42 for infrared measurement is not reflected by the mirror 30. The first infrared light L2 that has passed through the mirror 30 is incident on the infrared detector 62. Thereby, the first infrared measurement is performed in the infrared detector 62.

[0020] FIG. 2 is an enlarged schematic view in the vicinity of the mirror 30 when the first infrared measurement is performed. As shown in FIG. 2, the first infrared light L2 reflected by the mirror 24 has a first part L2a and a second part L2b. The first part L2a is reflected by the mirror 30, but the second part L2b passes through the mirror 30 without being reflected by the mirror 30. Although not shown, the second part L2b that has passed through the mirror 30 is absorbed by an appropriate method and is prevented from becoming stray light.

[0021] Figure 3A is a schematic diagram of the first infrared measurement observation lens 42. As shown in Figure 3A, the first infrared measurement observation lens 42 has an aspherical mirror 42a and spherical mirrors 42b and 42c. The spherical mirror 42b is positioned symmetrically with respect to the central position of the aspherical mirror 42a in a direction perpendicular to the optical axis of the first infrared measurement observation lens 42 (see the dotted line in Figure 3A).

[0022] The aspherical mirror 42a has a first portion 42aa and a second portion 42ab. The first portion 42aa is the portion that lies on the spherical mirror 42b side of the center position of the aspherical mirror 42a in a direction perpendicular to the optical axis of the first infrared measurement observation lens 42. The second portion 42ab is the portion that lies on the spherical mirror 42c side of the center position of the aspherical mirror 42a in a direction perpendicular to the optical axis of the first infrared measurement observation lens 42.

[0023] Figure 3B is a schematic diagram showing the passage of the first infrared light L2 through the first observation lens 42 for infrared measurement. As shown in Figure 3B, the first infrared light L2 (first portion L2a) incident on the first observation lens 42 for infrared measurement is reflected only at the first portion 42aa. The first infrared light L2 reflected at the first portion 42aa is reflected by the spherical mirror 42b and focused onto the sample S. The first infrared light L2 reflected by the sample S is sequentially reflected by the spherical mirror 42c and the second portion 42ab to become parallel light. Thus, the first infrared light L2 reflected at the second portion 42ab follows a different optical path than the first infrared light L2 incident on the first observation lens 42 for infrared measurement. Therefore, the first infrared light L2 that is reflected by the sample S and has passed through the first observation lens 42 for infrared measurement is not reflected by the mirror 30 and passes through the mirror 30.

[0024] <Effects of the Infrared Raman Spectrometer 100> The effects of the infrared Raman spectrometer 100 will be explained below in comparison with the infrared Raman spectrometer used in the comparative example (hereinafter referred to as "infrared Raman spectrometer 200").

[0025] Figure 4A is a schematic diagram of the infrared Raman apparatus 200 when Raman measurement is performed, and Figure 4B is a schematic diagram of the infrared Raman apparatus 200 when the first infrared measurement is performed. As shown in Figures 4A and 4B, the infrared Raman apparatus 200 includes a laser light source 11, a first infrared light source 12, a beam splitter 25, a mirror 26, a mirror 30, a Raman measurement objective lens 41, a first infrared measurement observation lens 42, a revolving nosepiece 44, a revolving nosepiece 45, a stage 50, a Raman spectrometer 61, and an infrared detector 62. The infrared Raman apparatus 200 can switch between performing Raman measurement and first infrared measurement.

[0026] In the infrared Raman spectrometer 200, when a Raman measurement is performed, the laser light L1 generated by the laser light source 11 is sequentially reflected by the beam splitter 25 and the mirror 26, and then passes through the Raman objective lens 41 to irradiate the sample S. In the infrared Raman spectrometer 200, when a Raman measurement is performed, the Raman light L3 generated from the sample S passes through the Raman objective lens 41, is reflected by the mirror 26, and then passes through the beam splitter 25 to be incident on the Raman spectrometer 61.

[0027] In the infrared Raman spectrometer 200, when the first infrared measurement is performed, the first infrared light L2 generated by the first infrared light source 12 is partially reflected by the mirror 30, and the first infrared light L2 reflected by the mirror 30 passes through the first observation lens 42 for infrared measurement and irradiates the sample S. In the infrared Raman spectrometer 200, when the first infrared measurement is performed, the first infrared light L2 reflected by the sample S passes sequentially through the first observation lens 42 for infrared measurement and the mirror 30 and is incident on the infrared detector 62. Thus, in the infrared Raman spectrometer 200, the mirror 30 is used only when the first infrared measurement is performed.

[0028] In the infrared Raman spectrometer 200, the Raman measurement objective lens 41 and the first infrared measurement observation lens 42 are attached to the revolving nosepiece 44 and 45, respectively. Therefore, the optical axis of the Raman measurement objective lens 41 when Raman measurement is performed does not coincide with the optical axis of the first infrared measurement observation lens 42 when the first infrared measurement is performed. For this reason, the position of the sample S needs to be adjusted when Raman measurement is performed and when the first infrared measurement is performed. In addition, in the infrared Raman spectrometer 200, the mirror 30 is used only during the first infrared measurement, and another mirror (mirror 26) is used around the objective optical system when Raman measurement is performed, which makes the area around the objective optical system larger.

[0029] On the other hand, in the infrared Raman apparatus 100, the Raman measurement objective lens 41 and the first infrared measurement observation lens 42 are mounted on a single revolving nosepiece (revolving nosepiece 43). By rotating this single revolving nosepiece, the optical axis of the first infrared measurement observation lens 42 during the first infrared measurement can be aligned with the optical axis of the Raman measurement objective lens 41 during the Raman measurement. Therefore, there is no need to adjust the position of the sample S when performing a Raman measurement and when performing a first infrared measurement. Furthermore, in the infrared Raman apparatus 100, the mirror 30 is shared between the Raman measurement and the first infrared measurement, allowing for a miniaturization of the area around the objective optical system.

[0030] (Second Embodiment) The infrared Raman spectrometer according to the second embodiment (hereinafter referred to as "infrared Raman spectrometer 100A") will be described below. Here, the differences from infrared Raman spectrometer 100 will be mainly explained, and redundant explanations will not be repeated.

[0031] <Configuration of the 100A Infrared Raman Spectrometer> The configuration of the infrared Raman spectrometer 100A is described below.

[0032] Figure 5 is a schematic diagram of the infrared Raman apparatus 100A when the second infrared measurement is performed. As shown in Figure 5, the infrared Raman apparatus 100A includes a laser light source 11, a first infrared light source 12, a beam splitter 21, mirrors 22, 23, 24, and 30, an objective lens 41 for Raman measurement, a first observation lens 42 for infrared measurement, a revolving nosepiece 43, a stage 50, a Raman spectrometer 61, and an infrared detector 62. In this respect, the configuration of the infrared Raman apparatus 100A is the same as that of the infrared Raman apparatus 100.

[0033] The infrared Raman spectrometer 100A can switch between performing Raman measurements and first infrared measurements, as well as second infrared measurements using second infrared light L4. The infrared Raman spectrometer 100A further includes a second infrared light source 13, a mirror 27, and a second observation lens 46 for infrared measurements.

[0034] The second infrared light source 13 generates second infrared light L4. The second infrared light L4 generated by the second infrared light source 13 is reflected by the mirror 27. In the infrared Raman apparatus 100A, when a second infrared measurement is performed, the revolving nosepiece 43 is rotated so that the optical axis of the first observation lens 42 for infrared measurement coincides with the optical axis of the Raman objective lens 41 when a Raman measurement is performed. When a second infrared measurement is performed, the optical axis of the second observation lens 46 for infrared measurement coincides with the optical axis of the first observation lens 42 for infrared measurement.

[0035] The second infrared light L4 reflected by mirror 27 passes through the second infrared measurement observation lens 46, is focused, and irradiates the sample S. At this time, the second infrared light L4 passes through stage 50. The second infrared light L4 that has passed through sample S passes through the first infrared measurement observation lens 42 and becomes parallel light.

[0036] Figure 6A is a schematic diagram of the second infrared measurement observation lens 46. As shown in Figure 6A, the second infrared measurement observation lens 46 has an aspherical mirror 46a and spherical mirrors 46b and 46c. The spherical mirror 46b is positioned symmetrically with respect to the central position of the aspherical mirror 46a in a direction perpendicular to the optical axis of the second infrared measurement observation lens 46 (see the dotted line in Figure 6A).

[0037] The aspherical mirror 46a has a first portion 46aa and a second portion 46ab. The first portion 46aa is the portion located on the spherical mirror 46b side of the center position of the aspherical mirror 46a in a direction perpendicular to the optical axis of the second infrared measurement observation lens 46. The second portion 46ab is the portion located on the spherical mirror 46c side of the center position of the aspherical mirror 46a in a direction perpendicular to the optical axis of the second infrared measurement observation lens 46.

[0038] Figure 6B is a schematic diagram showing the process of the second infrared light L4 passing through the second infrared measurement lens 46, the sample S, and the first infrared measurement lens 42. As shown in Figure 6B, a portion of the second infrared light L4 incident on the second infrared measurement lens 46 is reflected by the first portion 46aa and further reflected by the spherical mirror 46b. Another portion of the second infrared light L4 incident on the second infrared measurement lens 46 is reflected by the second portion 46ab and further reflected by the spherical mirror 46c. As a result, the second infrared light L4 is focused and irradiated onto the sample S. A portion of the second infrared light L4 that has passed through the sample S is sequentially reflected by the spherical mirror 42b and the first portion 42aa. Similarly, another portion of the second infrared light L4 that has passed through the sample S is sequentially reflected by the spherical mirror 42c and the second portion 42ab. As a result, the second infrared light L4 that has passed through the sample S becomes parallel light when it passes through the first observation lens 42 for infrared measurement.

[0039] As shown in Figure 5, the second infrared light L4 that has passed through the first infrared measurement observation lens 42 is incident on the infrared detector 62. As a result, the second infrared measurement is performed in the infrared detector 62. When the second infrared measurement is performed, the mirror 30 is removed from the optical path of the second infrared light L4 that has passed through the first infrared measurement observation lens 42. Therefore, the mirror 30 does not affect the second infrared light L4 that has passed through the first infrared measurement observation lens 42. In these respects, the configuration of the infrared Raman apparatus 100A differs from the configuration of the infrared Raman apparatus 100.

[0040] <Effects of the 100A Infrared Raman Spectrometer> The effects of the 100A infrared Raman spectrometer are explained below.

[0041] In the infrared Raman spectrometer 100A, the optical axis of the second observation lens 46 for infrared measurement coincides with the optical axis of the Raman objective lens 41 when Raman measurement is performed and the optical axis of the first observation lens 42 for infrared measurement when first infrared measurement is performed. Therefore, in the infrared Raman spectrometer 100A, there is no need to adjust the position of the sample S when switching from Raman measurement or first infrared measurement to second infrared measurement. Furthermore, since the infrared Raman spectrometer 100A does not require an objective optical system for second infrared observation other than the second observation lens 46 for infrared measurement, it is possible to miniaturize the area around the objective optical system even when it is possible to switch between Raman measurement and first infrared measurement and second infrared measurement using second infrared light L4.

[0042] (Note) Embodiments of this disclosure include the following configurations:

[0043] <Note 1> An infrared Raman instrument capable of switching between Raman measurement and first infrared measurement on a sample, Raman objective lens, First observation lens for infrared measurement, A laser light source that generates laser light, A first infrared light source that generates first infrared light, Equipped with a mirror, When the Raman measurement is performed, the mirror is positioned to reflect the laser light and allow it to pass through the Raman measurement objective lens, and to reflect the Raman light generated from the sample by the laser light that has passed through the Raman measurement objective lens and irradiated onto the sample, and which has also passed through the Raman measurement objective lens. When the first infrared measurement is performed, the first observation lens for infrared measurement is switched from the Raman measurement objective lens so that the optical axis of the first observation lens for infrared measurement coincides with the optical axis of the Raman measurement objective lens when the Raman measurement is performed. An infrared Raman apparatus in which, when the first infrared measurement is performed, the mirror is arranged to partially reflect the first infrared light and allow it to pass through the first observation lens for infrared measurement, and to allow the first infrared light that has passed through the first observation lens for infrared measurement, been reflected by the sample, and passed through the first observation lens for infrared measurement again to pass through.

[0044] <Note 2> Equipped with a revolver, The revolving nosepiece is fitted with the objective lens for Raman measurement and the first observation lens for infrared measurement. The infrared Raman apparatus as described in Appendix 1, wherein when the first infrared measurement is performed, the first observation lens for infrared measurement is switched from the Raman measurement objective lens by rotating the revolving nosepiece so that the optical axis of the first observation lens for infrared measurement coincides with the optical axis of the Raman measurement objective lens when the Raman measurement is performed.

[0045] <Note 3> The infrared Raman apparatus can further switch to perform a second infrared measurement on the sample. A second observation lens for infrared measurement, It further comprises a second infrared light source that generates second infrared light, The optical axis of the second observation lens for infrared measurement coincides with the optical axis of the first observation lens for infrared measurement when the first infrared measurement is performed. In the infrared Raman apparatus described in Appendix 1 or Appendix 2, when the second infrared measurement is performed, the mirror is removed from the optical path of the second infrared light that has sequentially passed through the second observation lens for infrared measurement, the sample, and the first observation lens for infrared measurement.

[0046] <Note 4> The aforementioned mirror is an edge mirror, as described in any one of Appendix 1 to Appendix 3 of the infrared Raman apparatus.

[0047] While embodiments of the present invention have been described above, various modifications of these embodiments are possible. Furthermore, the scope of the present invention is not limited to the embodiments described above. The scope of the present invention is indicated by the claims and is intended to include all modifications within the meaning and scope equivalent to the claims. [Explanation of Symbols]

[0048] 11 Laser light source, 12 First infrared light source, 13 Second infrared light source, 21 Beam splitter, 22,23,24 Mirrors, 25 Beam splitter, 26,27,30 Mirrors, 41 Objective lens for Raman measurement, 42 First observation lens for infrared measurement, 42a Aspherical mirror, 42aa First part, 42ab Second part, 42b,42c Spherical mirror, 43,44,45 Revolving nosepiece, 46 Second observation lens for infrared measurement, 46a Aspherical mirror, 46aa First part, 46ab Second part, 46b,46c Spherical mirror, 50 Stage, 61 Raman spectrometer, 62 Infrared detector, 100,100A,200 Infrared Raman apparatus, L1 Laser light, L2 First infrared light, L2a First part, L2b Second part, L3 Raman light, L4; Second infrared light, S; Sample.

Claims

1. An infrared Raman instrument capable of switching between Raman measurement and first infrared measurement on a sample, Raman objective lens, First observation lens for infrared measurement, A laser light source that generates laser light, A first infrared light source that generates first infrared light, Equipped with a mirror, When the Raman measurement is performed, the mirror is positioned to reflect the laser light and allow it to pass through the Raman measurement objective lens, and to reflect the Raman light generated from the sample by the laser light that has passed through the Raman measurement objective lens and irradiated onto the sample, and which has also passed through the Raman measurement objective lens. When the first infrared measurement is performed, the first observation lens for infrared measurement is switched from the Raman measurement objective lens so that the optical axis of the first observation lens for infrared measurement coincides with the optical axis of the Raman measurement objective lens when the Raman measurement is performed. An infrared Raman apparatus in which, when the first infrared measurement is performed, the mirror is arranged to partially reflect the first infrared light and allow it to pass through the first observation lens for infrared measurement, and to allow the first infrared light, which has passed through the first observation lens for infrared measurement, reflected by the sample, and passed through the first observation lens for infrared measurement again, to pass through.

2. Equipped with a revolver, The revolving nosepiece is fitted with the objective lens for Raman measurement and the first observation lens for infrared measurement. The infrared Raman apparatus according to claim 1, wherein when the first infrared measurement is performed, the first observation lens for infrared measurement is switched from the Raman measurement objective lens by rotating the revolving nosepiece so that the optical axis of the first observation lens for infrared measurement coincides with the optical axis of the Raman measurement objective lens when the Raman measurement is performed.

3. The infrared Raman apparatus can further switch to perform a second infrared measurement on the sample. A second observation lens for infrared measurement, It further comprises a second infrared light source that generates second infrared light, The optical axis of the second observation lens for infrared measurement coincides with the optical axis of the first observation lens for infrared measurement when the first infrared measurement is performed. The infrared Raman apparatus according to claim 1, wherein when the second infrared measurement is performed, the mirror is removed from the optical path of the second infrared light that has sequentially passed through the second observation lens for infrared measurement, the sample, and the first observation lens for infrared measurement.

4. The infrared Raman apparatus according to any one of claims 1 to 3, wherein the mirror is an edge mirror.