Substrate processing equipment
The substrate processing apparatus achieves improved exhaust efficiency and reduced footprint by using a dual-container design with shared maintenance and optimized exhaust box placement, enhancing productivity and gas flow management.
Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Patents
- Current Assignee / Owner
- TOKYO ELECTRON LTD
- Filing Date
- 2023-12-20
- Publication Date
- 2026-07-07
Smart Images
Figure 0007886106000001 
Figure 0007886106000002 
Figure 0007886106000003
Abstract
Description
Technical Field
[0001] This disclosure relates to a substrate processing apparatus.
Background Art
[0002] In a batch-type substrate processing apparatus, a technique is known in which two processing containers are arranged adjacent to each other in one apparatus, and a common maintenance area is provided between utility boxes installed on the back side thereof (see, for example, Patent Document 1).
Prior Art Documents
Patent Documents
[0003]
Patent Document 1
Summary of the Invention
Problems to be Solved by the Invention
[0004] This disclosure provides a technique capable of improving exhaust efficiency while reducing the footprint.
Means for Solving the Problems
[0005] A substrate processing apparatus according to an aspect of this disclosure includes a processing module having a first side wall and a second side wall spaced apart in a first horizontal direction, a transfer module disposed adjacent to the first side wall for transferring a substrate to the processing module, and a first exhaust box and a second exhaust box disposed adjacent to the second side wall. The processing module has a first processing container and a second processing container adjacent to each other in a second horizontal direction orthogonal to the first horizontal direction. A first exhaust pipe for exhausting the inside of the first processing container is accommodated in the first exhaust box, and a second exhaust pipe for exhausting the inside of the second processing container is accommodated in the second exhaust box. The first exhaust box and the second exhaust box are disposed adjacent to each other in the second horizontal direction. The second side wall has a non-inclined portion and a pair of inclined portions that are provided on either side of the non-inclined portion in the second horizontal direction and inclined toward the first side wall as they move away from the non-inclined portion in the second horizontal direction, the first exhaust box and the second exhaust box are adjacent to the non-inclined portion, a first maintenance opening for maintaining the first processing container is provided on one of the pair of inclined portions, and a second maintenance opening for maintaining the second processing container is provided on the other of the pair of inclined portions. .
Effects of the Invention
[0006] According to this disclosure, it is possible to improve exhaust efficiency while reducing the footprint. [Brief explanation of the drawing]
[0007] [Figure 1] This is a plan view showing a substrate processing apparatus according to the first embodiment. [Figure 2] This is a cross-sectional view taken along the line II-II in Figure 1. [Figure 3] This is a cross-sectional view taken along the line III-III in Figure 1. [Figure 4] This is a cross-sectional view taken along the line IV-IV in Figure 1. [Figure 5] This is a plan view showing a substrate processing apparatus according to the second embodiment. [Figure 6] This is a plan view showing a substrate processing apparatus according to the third embodiment. [Figure 7] This is a plan view showing a substrate processing apparatus according to the fourth embodiment. [Figure 8] This is a plan view showing a substrate processing apparatus according to the fifth embodiment. [Modes for carrying out the invention]
[0008] Hereinafter, exemplary embodiments of the present disclosure, not limited to those described herein, will be described with reference to the attached drawings. In all attached drawings, identical or corresponding members or parts are denoted by the same or corresponding reference numerals, and redundant descriptions are omitted. In this specification, the X-axis, Y-axis, and Z-axis directions are mutually orthogonal directions. The X-axis and Y-axis directions are horizontal directions, and the Z-axis direction is vertical direction. The X-axis direction is an example of a first horizontal direction, and the Y-axis direction is an example of a second horizontal direction.
[0009] [First Embodiment] Referring to Figures 1 to 4, the substrate processing apparatus 1A according to the first embodiment will be described. Figure 1 is a plan view showing the substrate processing apparatus 1A according to the first embodiment. Figure 2 is a cross-sectional view taken along the line II-II in Figure 1. Figure 3 is a cross-sectional view taken along the line III-III in Figure 1. Figure 3(a) shows the position when the first boat 33 is being loaded into and out of the processing module 3. Figure 3(b) shows the position when the first processing container 31 is being loaded into and out of the processing module 3. Figure 4 is a cross-sectional view taken along the line IV-IV in Figure 1.
[0010] The substrate processing apparatus 1A comprises a transport module 2, a processing module 3, an exhaust unit 4, and a gas supply unit 5.
[0011] The transport module 2 is positioned adjacent to the first side wall 3a of the processing module 3. The transport module 2 transports the substrate W to the processing module 3. The transport module 2 includes a load port 21, a stocker 22, and a substrate transfer device 23.
[0012] The load port 21 is located on the negative side of the X-axis of the transport module 2. Multiple load ports 21 (e.g., two) are arranged along the Y-axis. However, the number of load ports 21 is not particularly limited. Cassettes C are placed on the load ports 21. Cassette C contains multiple (e.g., 25) substrates W. Cassette C is loaded into and out of the load port 21. Cassette C holds each substrate W horizontally. Cassette C is, for example, a FOUP (Front Opening Unified Pod).
[0013] Multiple stockers 22 are arranged along the Z-axis on the negative X-axis side of the transport module 2 (for example, two). Multiple stockers 22 are also arranged along the Z-axis on the positive X-axis side of the transport module 2 (for example, two). Multiple stockers 22 may also be arranged along the Y-axis. However, the number of stockers 22 is not particularly limited. The stockers 22 temporarily store cassette C.
[0014] The substrate transfer device 23 transfers the substrate W between the cassette C placed on the load port 21 and the first port 33 and the second port 34. The substrate transfer device 23, for example, transfers a plurality of substrates W simultaneously. For example, the substrate transfer device 23 takes out the substrate W before being processed from the cassette C placed on the load port 21 and transfers it to the first port 33 and the second port 34. For example, the substrate transfer device 23 takes out the substrate W after being processed from the first port 33 and the second port 34 and transfers it to the cassette C placed on the load port 21.
[0015] The transfer module 2 may have a cassette transfer device that transfers the cassette C between the load port 21 and the stocker 22. The transfer module 2 may have a loader for delivering the substrate between the substrate transfer device 23 separately from the load port 21.
[0016] The processing module 3 has a processing chamber A1 and a transfer chamber A2. The processing chamber A1 and the transfer chamber A2 are adjacent in the Z-axis direction. The transfer chamber A2 is located on the negative side of the Z-axis direction of the processing chamber A1. The processing module 3 has a first side wall 3a and a second side wall 3b. The first side wall 3a is located on the negative side of the X-axis direction of the processing module 3. The second side wall 3b is located on the positive side of the X-axis direction of the processing module 3. The first side wall 3a and the second side wall 3b are separated in the X-axis direction. The first side wall 3a and the second side wall 3b each extend from the end on the negative side of the Y-axis direction to the end on the positive side of the Y-axis direction of the processing module 3. The first side wall 3a and the second side wall 3b each extend from the lower end of the transfer chamber A2 to the upper end of the processing chamber A1.
[0017] The processing module 3 has a first processing container 31, a second processing container 32, a first port 33, a second port 34, a first drive mechanism 35, a second drive mechanism 36, a maintenance door 37, and a clean unit 38.
[0018] The first processing container 31 and the second processing container 32 are arranged in the processing chamber A1. The first processing container 31 and the second processing container 32 are arranged between the first side wall 3a and the second side wall 3b in the X-axis direction. The first processing container 31 and the second processing container 32 are arranged adjacent to each other in the Y-axis direction.
[0019] The first processing container 31 is heated by a heater (not shown). The first processing container 31 is configured to be able to accommodate a first boat 33 holding a substrate W. Inside the first processing container 31, a processing gas is supplied from the gas supply unit 5. The processing gas is selected according to the type of processing. The processing gas supplied into the first processing container 31 is discharged by the exhaust unit 4. Inside the first processing container 31, a desired processing is performed on the substrate W held by the first boat 33 by the processing gas supplied from the gas supply unit 5. The second processing container 32 may have the same configuration as the first processing container 31.
[0020] The first boat 33 holds a plurality of substrates W in a shelf shape along the Z-axis direction. The first boat 33 is movable between a delivery position (the position shown in FIG. 2), a processing position, and a loading / unloading position (the position shown in FIG. 3(a)). The delivery position is a position below the first processing container 31. The delivery position may be directly below the first processing container 31. The processing position is a position accommodated inside the first processing container 31 and is a position above the delivery position. The processing position may be directly above the delivery position. The loading / unloading position is a position on the negative side of the Z-axis direction of the processing module 3 and at the center in the Y-axis direction of the processing module 3. The loading / unloading position may be shifted to the positive side in the X-axis direction from the delivery position. In this case, it is easy to load and unload the first boat 33 with respect to the processing module 3.
[0021] For example, when the first boat 33 transfers the substrate W to and from the substrate transfer device 23, it moves to the delivery position. For example, when the first boat 33 performs a desired processing on the substrate W, it moves to the processing position. For example, when the first boat 33 is carried out of the processing module 3 for maintenance, it moves to the loading / unloading position.
[0022] The second boat 34 holds multiple substrates W in a shelf-like manner along the Z-axis. The second boat 34 is movable between a transfer position, a processing position (the position shown in Figures 3(a) and 3(b)), and an loading / unloading position. The transfer position is located below the second processing container 32. The transfer position may be directly below the second processing container 32. The processing position is located within the second processing container 32 and is above the transfer position. The processing position may be directly above the transfer position. The loading / unloading position is located on the negative side of the Z-axis of the processing module 3 and in the center of the Y-axis of the processing module 3. The loading / unloading position may be located on the positive side of the X-axis of the processing module 3. In this case, it is easier to load and unload the second boat 34 relative to the processing module 3. The loading / unloading position of the second boat 34 may be the same as the loading / unloading position of the first boat 33.
[0023] For example, the second boat 34 moves to the transfer position when transferring the substrate W to and from the substrate transfer device 23. For example, the second boat 34 moves to the processing position when performing a desired process on the substrate W. For example, the second boat 34 moves to the loading / unloading position when being unloaded from the processing module 3 for maintenance.
[0024] The first drive mechanism 35 is configured to move the first boat 33 at least between the handover position and the processing position. The first drive mechanism 35 may include a boat elevator. The first drive mechanism 35 may be configured to move the first boat 33 between the handover position, the processing position and the loading / unloading position.
[0025] The second drive mechanism 36 is configured to move the second boat 34 at least between the handover position and the processing position. The second drive mechanism 36 may include a boat elevator. The second drive mechanism 36 may be configured to move the second boat 34 between the handover position, the processing position and the loading / unloading position.
[0026] A maintenance opening 3c is provided in the second side wall 3b. The maintenance opening 3c is located on the negative side of the second side wall 3b in the Z-axis direction. The maintenance opening 3c is located at the same height as the transport chamber A2. The maintenance opening 3c includes an intermediate position between the first processing container 31 and the second processing container 32 in the Y-axis direction. The maintenance opening 3c is located between the first exhaust box 41a and the second exhaust box 42a in the Y-axis direction. The maintenance opening 3c is an opening for maintaining the processing module 3. The maintenance opening 3c is a common opening used when loading and unloading the first processing container 31, the second processing container 32, the first boat 33, and the second boat 34 into and out of the processing module 3. Therefore, the maintenance opening 3c is sized to allow the first processing container 31, the second processing container 32, the first boat 33, and the second boat 34 to pass through.
[0027] For example, the maintenance opening 3c is used when removing the first processing container 31 (second processing container 32) from inside the processing module 3 for replacement due to damage to the first processing container 31 (second processing container 32) or for cleaning the first processing container 31 (second processing container 32). For example, the maintenance opening 3c is used when removing the first boat 33 (second boat 34) from inside the processing module 3 for replacement due to damage to the first boat 33 (second boat 34) or for cleaning the first boat 33 (second boat 34).
[0028] The maintenance door 37 opens and closes the maintenance opening 3c by rotating horizontally. The maintenance door 37 has a hinge 37a and a door body 37b. The hinge 37a connects the second side wall 3b and the door body 37b. The hinge 37a is provided, for example, on the negative side in the Y-axis direction. The door body 37b may be able to rotate horizontally relative to the second side wall 3b via the hinge 37a. When the door body 37b is opened, the first processing container 31, the second processing container 32, the first boat 33, and the second boat 34 can be loaded and unloaded through the maintenance opening 3c. In Figure 1, the door body 37b in the open state is shown by a solid line, the door body 37b in the closed state is shown by a dashed line, and the trajectory of the tip of the door body 37b when it is opened and closed is shown by a dotted line.
[0029] The clean unit 38 is attached to the door body 37b. The clean unit 38 is configured to circulate clean air within the transport chamber A2. The clean air is, for example, an inert gas. The clean air supplied into the transport chamber A2 is exhausted from the transport chamber A2 by an exhaust unit (not shown) installed on the first side wall 3a facing the clean unit 38, and then resupplied into the transport chamber A2 from the clean unit 38.
[0030] The exhaust unit 4 includes a first exhaust box 41a, a first exhaust pipe 41b, a first pressure control valve 41c, a second exhaust box 42a, a second exhaust pipe 42b, and a second pressure control valve 42c.
[0031] The first exhaust box 41a is positioned adjacent to the second side wall 3b on the positive Y-axis side of the processing module 3. The first exhaust pipe 41b connects the exhaust port 31a of the first processing vessel 31 to a vacuum pump (not shown). The portion of the first exhaust pipe 41b between one end and the other is housed inside the first exhaust box 41a. The first pressure control valve 41c is installed inside the first exhaust box 41a. The first pressure control valve 41c is interposed in the middle of the first exhaust pipe 41b. The first pressure control valve 41c controls the pressure inside the first processing vessel 31 to a desired pressure.
[0032] The second exhaust box 42a is positioned adjacent to the second side wall 3b on the negative side of the processing module 3 in the Y-axis direction. The second exhaust box 42a is positioned at a distance from the first exhaust box 41a in the Y-axis direction. The first exhaust box 41a and the second exhaust box 42a may be positioned symmetrically with respect to a virtual line L that is equidistant from the center of the first processing container 31 and the center of the second processing container 32. The area between the first exhaust box 41a and the second exhaust box 42a becomes a maintenance area where the maintenance opening 3c is exposed. The second exhaust pipe 42b connects the exhaust port 32a of the second processing container 32 to a vacuum pump (not shown). The portion of the second exhaust pipe 42b between one end and the other is housed inside the second exhaust box 42a. The second pressure control valve 42c is provided inside the second exhaust box 42a. The second pressure control valve 42c is interposed in the middle of the second exhaust pipe 42b. The second pressure control valve 42c controls the pressure inside the second processing container 32 to a desired pressure.
[0033] The gas supply unit 5 includes a first supply box 51a, a first supply unit 51b, first supply piping 51c, 51d, and first supply valves 51e, 51f.
[0034] The first supply box 51a is positioned adjacent to the first exhaust box 41a on the positive X-axis side. The first supply unit 51b is housed inside the first supply box 51a. The first supply pipes 51c and 51d connect the first supply unit 51b to a nozzle (not shown) that supplies processing gas into the first processing container 31, respectively. A first supply valve 51e is interposed in the first supply pipe 51c. A first supply valve 51f is interposed in the first supply pipe 51d. Mass flow controllers (not shown) may be interposed in the first supply pipes 51c and 51d. The first supply unit 51b supplies processing gas into the first processing container 31 via the first supply pipes 51c and 51d.
[0035] The gas supply unit 5 includes a second supply box 52a, a second supply unit (not shown), a second supply piping (not shown), and a second supply valve (not shown).
[0036] The second supply box 52a is positioned adjacent to the second exhaust box 42a on the positive side in the X-axis direction. The second supply unit, second supply piping, and second supply valve may have the same configuration as the first supply unit 51b, first supply piping 51c, 51d, and first supply valves 51e, 51f.
[0037] As described above, the substrate processing apparatus 1A comprises a processing module 3 having a first side wall 3a and a second side wall 3b separated in the X-axis direction, and a transport module 2 arranged adjacent to the first side wall 3a for transporting substrates W to the processing module 3. The processing module 3 has a first processing container 31 and a second processing container 32 adjacent in the Y-axis direction. The second side wall 3b is provided with a common maintenance opening 3c for maintaining the first processing container 31 and the second processing container 32. In this case, the opening width of the maintenance opening 3c can be narrowed to about half the sum of the opening widths of the two maintenance openings when separate maintenance openings are provided for the first processing container 31 and the second processing container 32. This makes it possible to arrange the first exhaust box 41a and the second exhaust box 42a adjacent to the processing module 3 while increasing the width (length in the Y-axis direction) of the first exhaust box 41a and the second exhaust box 42a. Therefore, the first exhaust pipe 41b and the second exhaust pipe 42b can be positioned near the first processing container 31 and the second processing container 32, respectively, while increasing the diameter of the first exhaust pipe 41b and the second exhaust pipe 42b. As a result, the footprint of the substrate processing device 1A can be reduced while improving exhaust efficiency.
[0038] For example, when forming a film on a substrate W by atomic layer deposition (ALD), improving the exhaust efficiency shortens the exhaust time, thus improving productivity.
[0039] For example, when forming a film on the surface of a substrate W with a pattern formed on its surface, the improved exhaust efficiency allows for processing using a large flow rate of processing gas, thus suppressing the occurrence of the loading effect regardless of the shape of the pattern.
[0040] [Second Embodiment] Referring to Figure 5, the substrate processing apparatus 1B according to the second embodiment will be described. Figure 5 is a plan view showing the substrate processing apparatus 1B according to the second embodiment.
[0041] The substrate processing apparatus 1B differs from the substrate processing apparatus 1A in that the second side wall 3b has a pair of second inclined portions 3f and 3g arranged in a V-shape such that when viewed from the Z-axis direction, it has a second apex 3h that protrudes toward the first side wall 3a. The following explanation will focus on the differences from the substrate processing apparatus 1A.
[0042] As shown in Figure 5, the second side wall 3b has a pair of second non-inclined portions 3d and 3e and a pair of second inclined portions 3f and 3g.
[0043] The pair of second non-inclined sections 3d and 3e are arranged with a gap between them in the Y-axis direction. The second non-inclined section 3d and the second non-inclined section 3e may be arranged symmetrically with respect to a virtual line L that is equidistant from the center of the first processing container 31 and the center of the second processing container 32. The first exhaust box 41a is arranged adjacent to the second non-inclined section 3d. The second exhaust box 42a is arranged adjacent to the second non-inclined section 3e.
[0044] The pair of second inclined sections 3f and 3g are positioned between the second non-inclined section 3d and the second non-inclined section 3e in the Y-axis direction. The pair of second inclined sections 3f and 3g are arranged in a V-shape such that, when viewed from the Z-axis direction, they have a second apex 3h that is convex toward the first side wall 3a. The second apex 3h is located between the first processing container 31 and the second processing container 32 in the Y-axis direction. The second inclined sections 3f and 3g may be positioned symmetrically with respect to a virtual line L that is equidistant from the center of the first processing container 31 and the center of the second processing container 32. The angle of the second apex 3h is, for example, 90° or more.
[0045] The maintenance opening 3c is provided continuously from one second inclined section 3f to the other second inclined section 3g. When viewed from the Z-axis direction, the maintenance opening 3c is provided across the entirety of the pair of second inclined sections 3f and 3g. In this case, the opening width of the maintenance opening 3c is wide, making it easier to load and unload the first processing container 31, the second processing container 32, the first boat 33, and the second boat 34 into and out of the processing module 3 when performing maintenance on the processing module 3. However, the maintenance opening 3c may be provided only in a portion of the pair of second inclined sections 3f and 3g when viewed from the Z-axis direction.
[0046] The maintenance door 37 opens and closes the maintenance opening 3c by rotating horizontally. The maintenance door 37 has a first hinge 37c, a first door body 37d, a second hinge 37e, and a second door body 37f. The first hinge 37c connects the second side wall 3b and the first door body 37d. The first hinge 37c is provided, for example, at the boundary between the second non-inclined portion 3e and the second inclined portion 3g. The first door body 37d may be horizontally rotatable relative to the second side wall 3b via the first hinge 37c. The second hinge 37e connects the first door body 37d and the second door body 37f. The second door body 37f may be horizontally rotatable relative to the first door body 37d via the second hinge 37e. When the first door body 37d and the second door body 37f are opened, the first processing container 31, the second processing container 32, the first boat 33, and the second boat 34 can be loaded and unloaded through the maintenance opening 3c. In Figure 5, the first door body 37d and the second door body 37f in the open state are shown by solid lines, and the first door body 37d and the second door body 37f in the closed state are shown by dashed lines.
[0047] As described above, the substrate processing apparatus 1B has a pair of second inclined portions 3f and 3g arranged in a V-shape, such that the second side wall 3b has a second apex 3h that protrudes toward the first side wall 3a when viewed from the Z-axis direction. In this case, the length occupied by the maintenance opening 3c in the width direction (Y-axis direction) of the substrate processing apparatus 1B is reduced without changing the opening width of the maintenance opening 3c. This makes it possible to reduce the width of the substrate processing apparatus 1B.
[0048] [Third Embodiment] Referring to Figure 6, the substrate processing apparatus 1C according to the third embodiment will be described. Figure 6 is a plan view showing the substrate processing apparatus 1C according to the third embodiment.
[0049] The substrate processing apparatus 1C differs from the substrate processing apparatus 1B in that each of the pair of second inclined sections 3f and 3g is provided with a separate maintenance opening (first maintenance opening 3c1, second maintenance opening 3c2). The following explanation will focus on the differences from the substrate processing apparatus 1B.
[0050] As shown in Figure 6, the second side wall 3b has a pair of second non-inclined portions 3d and 3e and a pair of second inclined portions 3f and 3g.
[0051] The pair of second inclined portions 3f and 3g are positioned between the second non-inclined portion 3d and the second non-inclined portion 3e in the Y-axis direction. The pair of second inclined portions 3f and 3g are arranged in a V-shape such that, when viewed from the Z-axis direction, they have a second apex 3h that is convex toward the first side wall 3a. The second apex 3h is located between the first processing container 31 and the second processing container 32 in the Y-axis direction. The second inclined portions 3f and 3g may be positioned symmetrically with respect to a virtual line L that is equidistant from the center of the first processing container 31 and the center of the second processing container 32.
[0052] A first maintenance opening 3c1 is provided in the second inclined section 3f. A second maintenance opening 3c2 is provided in the second inclined section 3g. The first maintenance opening 3c1 and the second maintenance opening 3c2 are each located at the same height as the transport chamber A2. The first maintenance opening 3c1 and the second maintenance opening 3c2 are located between the first exhaust box 41a and the second exhaust box 42a in the Y-axis direction. The first maintenance opening 3c1 and the second maintenance opening 3c2 are openings for maintaining the processing module 3. The first maintenance opening 3c1 is used when loading and unloading the first processing container 31 and the first boat 33 into and out of the processing module 3. The second maintenance opening 3c2 is used when loading and unloading the second processing container 32 and the second boat 34 into and out of the processing module 3. The first processing container 31 and the first boat 33 are loaded and unloaded, for example, along a direction perpendicular to the second inclined section 3f (first maintenance opening 3c1). The second processing container 32 and the second boat 34 are brought in and out, for example, along a direction perpendicular to the second inclined section 3g (second maintenance opening 3c2). The direction in which the first processing container 31 and the first boat 33 are brought in and out may intersect with the direction in which the second processing container 32 and the second boat 34 are brought in and out. The first maintenance opening 3c1 is provided with a first maintenance door 371. The second maintenance opening 3c2 is provided with a second maintenance door 372.
[0053] The first maintenance door 371 opens and closes the first maintenance opening 3c1 by rotating horizontally. The first maintenance door 371 has a first hinge 371a and a first door body 371b. The first hinge 371a connects the second side wall 3b and the first door body 371b. The first hinge 371a is provided, for example, at the boundary between the second non-inclined section 3d and the second inclined section 3f. The first door body 371b may be horizontally rotatable relative to the second side wall 3b via the first hinge 371a. When the first door body 371b is opened, the first processing container 31 and the first boat 33 can be loaded and unloaded through the first maintenance opening 3c1. In Figure 6, the first door body 371b in the open state is shown by a solid line, the first door body 371b in the closed state is shown by a dashed line, and the trajectory of the tip of the first door body 371b when it is opened and closed is shown by a dotted line.
[0054] The second maintenance door 372 opens and closes the second maintenance opening 3c2 by rotating horizontally. The second maintenance door 372 has a second hinge 372a and a second door body 372b. The second hinge 372a connects the second side wall 3b and the second door body 372b. The second hinge 372a is provided, for example, at the boundary between the second non-inclined portion 3e and the second inclined portion 3g. The second door body 372b may be horizontally rotatable relative to the second side wall 3b via the second hinge 372a. When the second door body 372b is opened, the second processing container 32 and the second boat 34 can be loaded and unloaded through the second maintenance opening 3c2. The rotation trajectory of the second door body 372b may overlap with the rotation trajectory of the first door body 371b when viewed from the Z-axis direction. In Figure 6, the open second door body 372b is shown by a solid line, the closed second door body 372b is shown by a dashed line, and the trajectory of the tip of the second door body 372b when it is opened and closed is shown by a dotted line.
[0055] The processing module 3 may have a partition wall 3i that separates the first processing container 31 and the second processing container 32. A clean unit 38 may be provided in the partition wall 3i.
[0056] As described above, the substrate processing apparatus 1C has a pair of second inclined portions 3f and 3g arranged in a V-shape, such that the second side wall 3b has a second apex 3h that protrudes toward the first side wall 3a when viewed from the Z-axis direction. In this case, the length occupied by each maintenance opening in the width direction (Y-axis direction) of the substrate processing apparatus 1C is reduced without changing the opening width of each maintenance opening (first maintenance opening 3c1, second maintenance opening 3c2). This makes it possible to reduce the width of the substrate processing apparatus 1C.
[0057] [Fourth Embodiment] Referring to Figure 7, the substrate processing apparatus 1D according to the fourth embodiment will be described. Figure 7 is a plan view showing the substrate processing apparatus 1D according to the fourth embodiment.
[0058] The substrate processing apparatus 1D differs from the substrate processing apparatus 1C in that the first side wall 3a has a pair of first inclined portions 3l and 3m arranged in a V-shape such that, when viewed from the Z-axis direction, it has a first apex 3n that protrudes toward the second side wall 3b. The following explanation will focus on the differences from the substrate processing apparatus 1C.
[0059] As shown in Figure 7, the first side wall 3a has a pair of first non-inclined portions 3j, 3k and a pair of first inclined portions 3l, 3m.
[0060] The pair of first non-inclined sections 3j and 3k are arranged with an interval between them in the Y-axis direction. The first non-inclined section 3j and the first non-inclined section 3k may be arranged symmetrically with respect to a virtual line L that is equidistant from the center of the first processing container 31 and the center of the second processing container 32.
[0061] A pair of first inclined sections 3l and 3m are positioned between a first non-inclined section 3j and a first non-inclined section 3k in the Y-axis direction. The pair of first inclined sections 3l and 3m are arranged in a V-shape such that, when viewed from the Z-axis direction, they have a first apex 3n that is convex toward the second side wall 3b. The first apex 3n is located between the first processing container 31 and the second processing container 32 in the Y-axis direction. The first inclined sections 3l and 3m may be positioned symmetrically with respect to a virtual line L that is equidistant from the center of the first processing container 31 and the center of the second processing container 32. The angle of the first apex 3n is, for example, 90° or more.
[0062] As described above, the substrate processing apparatus 1D has a pair of first inclined portions 3l and 3m arranged in a V-shape, such that the first side wall 3a has a first apex 3n that protrudes toward the second side wall 3b when viewed from the Z-axis direction. In this case, the space in which the substrate transfer device 23 can move is expanded. For this reason, even if the width of the substrate processing apparatus 1D is narrow and the space in which the substrate transfer device 23 can move in the Y-axis direction is narrow, the substrate transfer device 23 can access each boat (first boat 33, second boat 34) from near the center in the Y-axis direction. In addition, the distance that the substrate transfer device 23 moves in the Y-axis direction when transferring a substrate W to a boat located opposite the cassette C placed on the load port 21 is shortened, thus reducing the transport time of the substrate W.
[0063] [Fifth Embodiment] Referring to Figure 8, the substrate processing apparatus 1E according to the fifth embodiment will be described. Figure 8 is a plan view showing the substrate processing apparatus 1E according to the fifth embodiment.
[0064] The substrate processing apparatus 1E differs from the substrate processing apparatus 1D in that it shares a maintenance area with the adjacent substrate processing apparatus 1F. The following explanation will focus on the differences from the substrate processing apparatus 1D. The substrate processing apparatus 1F may have the same configuration as the substrate processing apparatus 1E.
[0065] As shown in Figure 8, the second side wall 3b has a second non-inclined portion 3o, a second inclined portion 3p, and a second inclined portion 3q.
[0066] The second non-inclined section 3o is provided at an intermediate position of the second side wall 3b in the Y-axis direction. The first exhaust box 41a and the second exhaust box 42a are arranged adjacent to each other in the second non-inclined section 3o. The first exhaust box 41a and the second exhaust box 42a are arranged adjacent to each other in the Y-axis direction.
[0067] The second inclined portion 3p is located on the positive side of the Y-axis direction of the second non-inclined portion 3o. The second inclined portion 3p is inclined on the negative side of the X-axis direction as it moves away from the second non-inclined portion 3o. The second inclined portion 3q is located on the negative side of the Y-axis direction of the second non-inclined portion 3o. The second inclined portion 3q is inclined on the negative side of the X-axis direction as it moves away from the second non-inclined portion 3o.
[0068] A first maintenance opening 3c1 is provided in the second inclined section 3p. A second maintenance opening 3c2 is provided in the second inclined section 3q. The first maintenance opening 3c1 and the second maintenance opening 3c2 are each located at the same height as the transport chamber A2. The first maintenance opening 3c1 and the second maintenance opening 3c2 are openings for maintaining the processing module 3. The first maintenance opening 3c1 is used when loading and unloading the first processing container 31 and the first boat 33 into and out of the processing module 3. The second maintenance opening 3c2 is used when loading and unloading the second processing container 32 and the second boat 34 into and out of the processing module 3. A first maintenance door 371 is provided in the first maintenance opening 3c1. A second maintenance door 372 is provided in the second maintenance opening 3c2.
[0069] The second maintenance opening 3c2 of the substrate processing apparatus 1E and the first maintenance opening 3c1 of the substrate processing apparatus 1F are located between the second exhaust box 42a of the substrate processing apparatus 1E and the first exhaust box 41a of the substrate processing apparatus 1F in the Y-axis direction. In other words, the exhaust unit 4 and the gas supply unit 5 are not installed between the second maintenance opening 3c2 of the substrate processing apparatus 1E and the first maintenance opening 3c1 of the substrate processing apparatus 1F. In this case, the area between the second exhaust box 42a of the substrate processing apparatus 1E and the first exhaust box 41a of the substrate processing apparatus 1F becomes a shared maintenance area where the second maintenance opening 3c2 of the substrate processing apparatus 1E and the first maintenance opening 3c1 of the substrate processing apparatus 1F are exposed.
[0070] The first maintenance door 371 opens and closes the first maintenance opening 3c1 by rotating horizontally. The first maintenance door 371 has a first hinge 371a and a first door body 371b. The first hinge 371a connects the second side wall 3b and the first door body 371b. The first hinge 371a is provided, for example, at the boundary between the second non-inclined portion 3o and the second inclined portion 3p. The first door body 371b may be horizontally rotatable relative to the second side wall 3b via the first hinge 371a. When the first door body 371b is opened, the first processing container 31 and the first boat 33 can be loaded and unloaded through the first maintenance opening 3c1. In Figure 8, the first door body 371b in the open state is shown by a solid line, the first door body 371b in the closed state is shown by a dashed line, and the trajectory of the tip of the first door body 371b when it is opened and closed is shown by a dotted line.
[0071] The second maintenance door 372 opens and closes the second maintenance opening 3c2 by rotating horizontally. The second maintenance door 372 has a second hinge 372a and a second door body 372b. The second hinge 372a connects the second side wall 3b and the second door body 372b. The second hinge 372a is provided, for example, at the boundary between the second non-inclined section 3o and the second inclined section 3q. The second door body 372b may be horizontally rotatable relative to the second side wall 3b via the second hinge 372a. When the second door body 372b is opened, the second processing container 32 and the second boat 34 can be loaded and unloaded through the second maintenance opening 3c2. In Figure 8, the second door body 372b in the open state is shown by a solid line, the second door body 372b in the closed state is shown by a dashed line, and the trajectory of the tip of the second door body 372b when it is opened and closed is shown by a dotted line.
[0072] When viewed from the Z-axis direction, the rotational trajectory of the first door body 371b of the substrate processing apparatus 1F and the rotational trajectory of the second door body 372b of the substrate processing apparatus 1E may overlap.
[0073] As described above, in the substrate processing apparatus 1E, each of the pair of second inclined portions 3p and 3q inclins toward the first side wall 3a as it moves away from the intermediate position in the Y-axis direction of the second side wall 3b. In this case, without changing the opening width of each maintenance opening (first maintenance opening 3c1, second maintenance opening 3c2), the length occupied by each maintenance opening in the width direction of the substrate processing apparatus 1E is reduced. This makes it possible to reduce the width of the substrate processing apparatus 1E. Furthermore, the exhaust unit 4 and the gas supply unit 5 are not installed between the second maintenance opening 3c2 of the substrate processing apparatus 1E and the first maintenance opening 3c1 of the substrate processing apparatus 1F. In this case, the maintenance area can be shared between the substrate processing apparatus 1E and the substrate processing apparatus 1F which is arranged adjacent to the substrate processing apparatus 1E. In this way, the two substrate processing apparatuses 1E and 1F, which are arranged adjacent to each other, form a maintenance area with the same width (length in the Y-axis direction) as the maintenance areas of the substrate processing apparatus 1C and the substrate processing apparatus 1D.
[0074] The embodiments disclosed herein should be considered in all respects to be illustrative and not restrictive. The above embodiments may be omitted, replaced, or modified in various ways without departing from the scope and spirit of the appended claims. [Explanation of Symbols]
[0075] 1A Substrate Processing Equipment 2 Transport Modules 3 Processing Modules 3a 1st side wall 3b 2nd side wall 3c Maintenance opening 31 First processing container 32 Second Processing Container
Claims
1. A processing module having a first side wall and a second side wall separated in the first horizontal direction, A transport module is positioned adjacent to the first side wall and transports a substrate to the processing module, A first exhaust box and a second exhaust box are arranged adjacent to the second side wall, Equipped with, The processing module has a first processing container and a second processing container adjacent to each other in a second horizontal direction perpendicular to the first horizontal direction, The first exhaust box houses a first exhaust pipe for exhausting the contents of the first processing container. The second exhaust box houses a second exhaust pipe for exhausting the contents of the second processing container. The first exhaust box and the second exhaust box are arranged adjacent to each other in the second horizontal direction. The second side wall is, Non-sloping section and A pair of inclined portions are provided on either side of the non-inclined portion in the second horizontal direction, and inclined toward the first side wall as they move away from the non-inclined portion in the second horizontal direction, It has, The first exhaust box and the second exhaust box are adjacent to the non-inclined portion, A first maintenance opening for maintaining the first processing container is provided in one of the pair of inclined sections. A second maintenance opening for maintaining the second processing container is provided on the other of the pair of inclined sections. Circuit board processing equipment.
2. The non-inclined portion is provided including an intermediate position of the second side wall in the second horizontal direction, The substrate processing apparatus according to claim 1.
3. The substrate processing apparatus is arranged adjacent to a second substrate processing apparatus having the same configuration as the said substrate processing apparatus in the second horizontal direction, and shares a maintenance area with the second substrate processing apparatus. The substrate processing apparatus according to claim 1 or 2.
4. The aforementioned processing module is A first maintenance door that opens and closes the first maintenance opening by rotating horizontally, A second maintenance door that opens and closes the second maintenance opening by rotating horizontally, It has, The substrate processing apparatus is located on the side of the first maintenance door of the second substrate processing apparatus. When viewed from a vertical direction, the rotational trajectory of the second maintenance door of the substrate processing apparatus and the rotational trajectory of the first maintenance door of the second substrate processing apparatus overlap. The substrate processing apparatus according to claim 3.