Deburring device and cutting device

Abstract

To effectively remove a burr generated in a kerf of a workpiece without using a large amount of high-pressure water.SOLUTION: A burr removal device 40 removes a burr in a workpiece W in which the burr is formed in a kerf cut by a cutting blade 32, and the device comprises: a chuck table 10 that holds the workpiece W on a holding surface 10a; an ultrasonic horn 41 that oscillates ultrasonic waves from a lower surface opposite to an upper surface of the workpiece W held on the holding surface 10a of the chuck table 10; a cutting water nozzle (water film forming nozzle) 34 that forms a water screen 44 on the entire upper surface of the workpiece W held on the holding surface 10a; and a control unit 80. The control unit 80 brings a lower surface of the ultrasonic horn 41 into contact with the water screen 44 formed by supplying water from the cutting water nozzle 34 and propagates an ultrasonic vibration to the water screen 44, thereby removing the burr formed in the kerf of the workpiece W.SELECTED DRAWING: Figure 4

Description

Technical Field

[0001] The present invention relates to a burr removing device for removing burrs generated in a kerf (cutting groove) of a workpiece cut by a cutting blade, and a cutting device including the burr removing device.

Background Art

[0002] For example, in the manufacturing process of semiconductor devices, the surface of a disk-shaped semiconductor wafer (hereinafter simply referred to as "wafer") is partitioned into a number of rectangular regions by cutting scheduled lines (hereinafter referred to as "streets") arranged in a grid pattern, and devices such as ICs and LSIs are formed in each rectangular region. Then, by cutting the wafer on which such a number of devices are formed along the street with a cutting blade of a cutting device called a dicing saw, a plurality of semiconductor chips are formed (see, for example, Patent Document 1).

[0003] By the way, when cutting a wafer or the like with a cutting blade of a cutting device, burrs are generated at the edges of the kerf (cutting groove) formed in the wafer. For example, in a plurality of rectangular regions partitioned by the streets of the wafer, lead wires and electrode pads of devices such as ICs are disposed across the streets. Therefore, when cutting the wafer along the street with a cutting blade, the lead wires and electrode pads are also cut, and burrs of the lead wires and electrode pads are generated at the edges of the kerf of the wafer.

[0004] Therefore, in Patent Documents 2 and 3, there has been proposed a cutting device configured to remove burrs generated at the edges of a kerf by injecting high-pressure water toward the kerf while forming the kerf during cutting of a plate-shaped workpiece with a cutting blade. According to such a cutting device, deburring can be performed simultaneously while cutting the plate-shaped workpiece.

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

[0006] However, in cutting devices that remove burrs by spraying high-pressure water toward a kerf while forming a kerf during cutting of a plate-shaped workpiece with a cutting blade, as proposed in Patent Documents 2 and 3, there is a problem that a large amount of high-pressure water is required during the cutting process.

[0007] The present invention has been made in view of the above problems, and its objective is to provide a deburring device and a cutting device equipped therewith that can effectively remove burrs generated on the kerf of a workpiece without using a large amount of high-pressure water. [Means for solving the problem]

[0008] The first invention, which achieves the above objective, is a deburring device for removing burrs formed on a kerf cut by a cutting blade, comprising: a table for holding the workpiece on a holding surface; an ultrasonic horn that emits ultrasonic waves from a lower surface facing the upper surface of the workpiece held on the holding surface; a water film forming nozzle that forms a water film covering the entire upper surface of the workpiece held on the holding surface; and a control unit. The ultrasonic horn is constructed by integrating multiple cylindrical horns arranged in a direction parallel to the holding surface. The control unit is characterized by supplying water from the water film forming nozzle, bringing the lower surface of the ultrasonic horn onto the water film formed, and transmitting ultrasonic vibrations to the water film to remove the burrs formed on the kerf of the workpiece.

[0009] Furthermore, the second invention is, A deburring device for removing burrs formed on the kerf of a workpiece cut by a cutting blade, comprising: a table for holding the workpiece on a holding surface; an ultrasonic horn that emits ultrasonic waves from a lower surface facing the upper surface of the workpiece held on the holding surface; a water film forming nozzle that forms a water film covering the entire upper surface of the workpiece held on the holding surface; and a control unit, wherein the control unit supplies water from the water film forming nozzle to form a water film, and the lower surface of the ultrasonic horn touches the water film to propagate ultrasonic vibrations to the water film, thereby removing the burrs formed on the kerf of the workpiece. A cutting device comprising: cutting means for cutting the workpiece held on the holding surface with a cutting blade; and a moving mechanism for moving the table in the cutting feed direction of the cutting blade, comprising: conveying means for loading and unloading the workpiece to and from the table; the conveying means is provided with the ultrasonic horn, and the ultrasonic horn has a lower surface that faces the upper surface of the workpiece held on the holding surface with a gap between it and the upper surface of the workpiece held on the holding surface; and a water film forming nozzle that forms a water film on the upper surface of the workpiece held on the holding surface. [Effects of the Invention]

[0010] According to the present invention, burrs generated on the kerf of a workpiece are removed by forming a water film over the entire upper surface of the workpiece, placing the lower surface of an ultrasonic horn on this water film, and transmitting ultrasonic vibrations from the ultrasonic horn to the water film. This allows for efficient, reliable, and rapid removal of burrs. Furthermore, burr removal does not require spraying high-pressure water onto the kerf of the workpiece during the cutting process, thus enabling low-cost and economical deburring without consuming large amounts of high-pressure water. [Brief explanation of the drawing]

[0011] [Figure 1] This is a perspective view of the cutting apparatus according to the present invention. [Figure 2] This is an exploded cross-sectional side view of the main part of the cutting device according to the present invention. [Figure 3] This is a cross-sectional view along line AA in Figure 2. [Figure 4] This is a fractured side view showing the state of a workpiece during cutting using the cutting device according to the present invention. [Figure 5] This is a perspective view of a cutting apparatus equipped with a burr removal device according to the present invention as a conveying means. [Figure 6] This is a cross-sectional perspective view of the main part of a cleaning means equipped with a burr removal device according to Modification 1 of the present invention. [Figure 7] Figure 6 is a partial side cross-sectional view showing the operation of the deburring device. [Figure 8] This is a cross-sectional perspective view of the main part of a cleaning means equipped with a burr removal device according to a modified example 2 of the present invention. [Figure 9] Figure 8 is a partial side cross-sectional view showing the operation of the deburring device. [Modes for carrying out the invention]

[0012] Embodiments of the present invention will be described below with reference to the accompanying drawings.

[0013] [Configuration of the cutting machine] FIG. 1 is a perspective view of a cutting device according to the present invention, FIG. 2 is an exploded broken side view of a main part of the cutting device, FIG. 3 is a sectional view taken along line A-A of FIG. 2, and FIG. 4 is a broken side view showing a state during cutting of a workpiece by the cutting device. In the following description, the directions of the arrows shown in FIG. 1 are taken as the X-axis direction (left-right direction), Y-axis direction (front-back direction), and Z-axis direction (up-down direction), respectively.

[0014] The cutting device 1 shown in FIG. 1 is a device for cutting a plate-shaped workpiece W, and includes a chuck table 10 for holding the workpiece W, a moving mechanism 20 (see FIGS. 2 and 4) for moving the chuck table 10 in the X-axis direction (cutting feed direction), a cutting means 30 for cutting the workpiece W held on the chuck table 10, a burr removing device 40 according to the present invention for removing burrs formed on the workpiece W by the cutting by the cutting means 30, first conveying means 50 and second conveying means 60 which are conveying means for holding and conveying the workpiece W to a predetermined position, and a cleaning means 70 for cleaning the workpiece W after cutting and a control unit 80 as main components.

[0015] Next, the configurations of the chuck table 10, moving mechanism 20, cutting means 30, burr removing device 40, first conveying means 50 and second conveying means 60, cleaning means 70 and control unit 80, which are the main components constituting the cutting device 1, will be sequentially described below.

[0016] (Chuck Table) As shown in Figure 1, the chuck table 10 is a rectangular plate-shaped member, and its upper surface constitutes a holding surface 10a (see Figure 2) that suction-holds the workpiece W. This chuck table 10 is movable along the longitudinal direction (X-axis direction) of the opening 2a that opens on the upper surface of the base 2, and is supported so as to be rotatable around a vertical axis. That is, as shown in Figures 2 and 4, the chuck table 10 is horizontally mounted on the upper end of a vertical rotation axis 11, and rotates horizontally when the rotation axis 11 is driven to rotate around its axis by a rotation mechanism (not shown). Furthermore, the chuck table 10, the rotation axis 11, and the rotation mechanism (not shown) can reciprocate along the X-axis direction (cutting feed direction) by the moving mechanism 20 shown in Figures 2 and 4.

[0017] Here, as shown in Figures 1 and 2, the workpiece W is a package substrate constructed by integrally attaching multiple (three in the illustrated example) rectangular block-shaped protrusions Wb along the longitudinal direction to the surface of a rectangular resin substrate Wa. The resin substrate Wa is made of, for example, a PCB substrate. The portion of the workpiece W where the multiple protrusions Wb are provided is a device region R1 for semiconductor devices, and the peripheral portion of the resin substrate Wa excluding these device regions R1 is a thin excess region R2. Each device region R1 is divided into multiple areas by a grid of multiple streets L, and a semiconductor device (not shown) is mounted in each area.

[0018] In the workpiece W configured as described above, the excess region R2 is cut off as scrap material by the cutting device 1 according to this embodiment, and each device region R1 is cut along the street L to divide it into individual chips.

[0019] Furthermore, the workpiece W is not limited to a substrate for semiconductor devices, but may also be a metal substrate for LED devices, and may be a substrate before device mounting, not just after device mounting. In addition, the material for the protrusions Wb of the workpiece W may be epoxy resin, silicone resin, etc., but any resin can be used as long as it is a material that can form protrusions Wb on a resin substrate Wa.

[0020] Incidentally, as shown in Figures 1 and 2, multiple (three in the illustrated example) recesses 10a1 are formed along the longitudinal direction of the holding surface 10a of the chuck table 10, corresponding to the multiple protrusions Wb of the workpiece W. Here, each recess 10a1 formed on the holding surface 10a of the chuck table 10 is a part that accommodates each protrusion Wb when the workpiece W is held on the holding surface 10a of the chuck table 10 with the protrusions Wb facing downwards, and has a depth that matches the height of each protrusion Wb. Furthermore, as shown in Figure 2, a support surface 10a2 is formed around the recesses 10a1 of the holding surface 10a of the chuck table 10 to support the excess region R2 formed on the periphery of the workpiece W. Note that the holding surface 10a of the chuck table 10 is connected to a suction source (not shown), such as a vacuum pump.

[0021] In this embodiment, as shown in Figures 1, 2, and 4, a rectangular frame-shaped outer wall 12 is erected vertically around the chuck table 10, enclosing it from the outside. The height of the outer wall 12 is set to be slightly higher than the height of the upper surface of the chuck table 10 when the workpiece W is held on the holding surface 10a of the chuck table 10 (see Figure 2), as shown in Figure 4. In addition, vertical slits 12a are formed in multiple locations on the outer wall 12, specifically at multiple locations corresponding to the street L of the workpiece W, as shown in Figure 2. These slits 12a are for the cutting blade 32 to pass through during the cutting process, which will be described later.

[0022] Incidentally, as shown in Figure 1, the chuck table 10 faces the opening 2a of the base 2, and the periphery of the chuck table 10 is covered by a rectangular plate-shaped cover 13. The X-axis sides (left and right) of the cover 13 over the opening 2a of the base 2 are covered by a bellows-shaped expandable cover 14 that moves and expands along with the cover 13 in the X-axis direction. Therefore, no matter what position the chuck table 10 is at on the X-axis, the opening 2a of the base 2 is always closed by the cover 13 and the expandable cover 14, thus reliably preventing foreign matter from entering the base 2 through the opening 2a.

[0023] (Moving mechanism) The moving mechanism 20 shown in Figures 2 and 4 is a mechanism that reciprocates the chuck table 10 and the workpiece W held by it in the X-axis direction (cutting feed direction) between the machining position P1 and the transfer position P2 on the base 2 shown in Figure 1. Although its configuration is not illustrated and a detailed explanation is omitted, it is composed of a well-known ball screw mechanism or the like.

[0024] (cutting means) A support base 3 is erected on the left end (-X-axis end) of the base 2, and the cutting means 30 is supported on this support base 3. The cutting means 30 is positioned above the chuck table 10 that moves to the machining position P1 at the machining position P1, and consists of a rotatable spindle 31 positioned horizontally in the Y-axis direction (front-back direction), a spindle motor (not shown) that rotates the spindle 31, and a disc-shaped cutting blade 32 attached to the tip of the spindle 31. In this embodiment, a washer blade is used as the cutting blade 32, which is made by bonding abrasive grains such as diamond with a binder material, and the upper half of this cutting blade 32 is covered by a rectangular box-shaped blade cover 33.

[0025] A portion of the cutting fluid nozzle 34 is housed inside the blade cover 33. This cutting fluid nozzle 34 sprays cutting fluid, which is a machining fluid, toward the cutting blade 32 during cutting. The tip portion 34A, which extends downward from the blade cover 33 and is then bent at a right angle in an L-shape, extends alongside the cutting blade 32 in the +X axis direction (to the right in Figure 2). Multiple slits 34a (see Figure 2) are formed in the tip portion 34A of this cutting fluid nozzle 34, opening toward the cutting blade 32. This cutting fluid nozzle 34 is connected to a water supply source (not shown).

[0026] Furthermore, as shown in Figure 1, the imaging unit 35 is supported at the lower part of the cantilevered support portion 3a of the support base 3.

[0027] The cutting means 30, configured as described above, is index-feeded in the Y-axis direction (forward and backward direction) by the index-feed means 36 shown in Figure 1, and moves up and down in the Z-axis direction (cutting direction) by a lifting means (not shown). The lifting means is configured by a well-known ball screw mechanism or the like.

[0028] (Deburring device) The deburring device 40 according to the present invention is a device for removing burrs (not shown) that occur in kerfs (cutting grooves) formed on a workpiece W by cutting the workpiece W, as described later, and comprises an ultrasonic horn 41 that emits ultrasonic waves from a lower surface facing the upper surface of a workpiece W held on a chuck table 10, a cutting water nozzle 34 that functions as a water film forming nozzle that supplies water to the workpiece W held on the chuck table 10 and forms a water film 44 (see Figure 4) on the entire upper surface of the workpiece W, and a control unit 80.

[0029] As shown in Figure 1, the ultrasonic horn 41 is incorporated inside the cantilever support portion 3a of the support base 3, and is positioned next to the cutting blade 32 in the X-axis direction (cutting feed direction), as shown in detail in Figures 2 and 4. In this embodiment, as shown in Figure 3, the ultrasonic horn 41 is constructed by integrating seven cylindrical horns 41a arranged in the X-axis direction (left-right direction parallel to the holding surface 10a of the chuck table 10). Specifically, the ultrasonic horn 41 is constructed by integrating four and three cylindrical horns 41a arranged at equal intervals with a small gap in the Y-axis direction (front-back direction) in two rows in the X-axis direction (left-right direction). Note that the ultrasonic horn 41 is not limited to the above configuration, and may be arranged in one row or in three or more rows. Furthermore, the ultrasonic horn 41 may be incorporated so as to cover the entire upper surface of the workpiece W. In addition, the ultrasonic horn 41 may be a rectangular prism instead of a cylinder.

[0030] Here, the ultrasonic horn 41 is electrically connected to the high-frequency power supply 42 and moves up and down in the Z-axis direction by the lifting mechanism 43 shown in Figures 2 and 4. The lifting mechanism 43 is composed of a well-known ball screw mechanism or the like, and the lifting mechanism 43 and the high-frequency power supply 42 are electrically connected to the control unit 80, and their drive is controlled by the control unit 80.

[0031] The control unit 80, during the cutting process of the workpiece W, supplies water from the cutting water nozzle 34, which is shared as a water film forming nozzle, to cover the entire upper surface of the workpiece W held on the chuck table 10 with water to form a water film 44. It then places the lower surface of the ultrasonic horn 41 onto this water film 44 to transmit ultrasonic vibrations to the water film 44, thereby removing burrs generated on the kerf of the workpiece W. Details of this will be described later.

[0032] (Transportation means) As shown in Figure 1, a pair of guide rails 51 extending along the Y-axis direction (front-to-back direction) are arranged parallel to each other at the +X-axis end (right end) of the base 2. These guide rails 51 are used to temporarily place and position the workpiece W before machining. Near the pair of guide rails 51, a first transport means 50 is provided to hold the workpiece W temporarily placed on the guide rails 51 and transport it to the chuck table 10. This first transport means 50 is configured to hold the workpiece W at the tip of a first transport arm 52 that is bent in an L-shape in plan view and rotates horizontally around a vertical axis 52a.

[0033] Furthermore, as shown in Figure 1, a second transport means 60 is provided on the side surface 3b of the support base 3 for holding the machined workpiece W and transporting it to the cleaning means 70. This second transport means 60 includes a second transport arm 61 that is movable in the Y-axis direction (front-to-back direction) along a guide hole 3c formed horizontally along the Y-axis direction (front-to-back direction) on the side surface 3b of the support base 3. Here, the second transport arm 61 is bent in a V-shape when viewed from above, and the workpiece W is held by a transport pad 62 attached to its tip.

[0034] (Cleaning method) The cleaning means 70 is located approximately in the center of the base 2 and includes a disc-shaped cleaning table (spinner table) 71 that holds the machined workpiece W and rotates at a predetermined speed around a vertical axis, and a cleaning water nozzle (not shown) that sprays cleaning water toward the workpiece W held on the cleaning table 71.

[0035] (Control Unit) The control unit 80 includes a CPU (Central Processing Unit) that performs calculations according to a control program, and memory such as ROM (Read Only Memory) and RAM (Random Access Memory). This control unit 80 controls a rotation mechanism (not shown) that rotates the chuck table 10 around its axis, a spindle motor (not shown) that rotates the spindle 31 of the cutting means 30, an index feed means 36, a lifting mechanism (not shown) that moves the cutting means 30 up and down, a high-frequency power supply 42 that drives the ultrasonic horn 41 of the deburring device 40, a lifting mechanism 43 (see Figures 2 and 4) that moves the ultrasonic horn 41 up and down, a drive mechanism (not shown) of the first transport means 50 and the second transport means 60, and a rotation mechanism that rotates the spinner table 71 of the cleaning means 70.

[0036] By the way, in the cutting apparatus 1 according to this embodiment, as shown in Figure 1, an operation box 4 is attached to the -Y axis end (front end) of the base 2, and an input means 5 such as a keyboard for inputting various data is provided on this operation box 4, and a monitor device 6 that displays images captured by the imaging unit 35 and cutting conditions of the workpiece W is installed on the support base 3.

[0037] [Operation of cutting equipment] Next, the operation of the cutting device 1 configured as described above will be explained.

[0038] During the cutting process of the workpiece W by the cutting device 1, the workpiece W is placed and positioned on a pair of guide rails 51 shown in Figure 1. The positioned workpiece W is then held by the first transport means 50 and transported to the chuck table 10 waiting at the transfer position P2, where the workpiece W is placed on the chuck table 10 with its surface facing downwards, as shown in Figure 2. The convex portion Wb of the workpiece W is then fitted into the recess 10a1 formed in the holding surface 10a of the chuck table 10. From this state, the holding surface 10a of the chuck table 10 is sucked by a suction source (not shown), and the workpiece W is held in place by suction on the holding surface 10a of the chuck table 10.

[0039] On the other hand, at the machining position P1 shown in Figure 1, once an image is obtained by imaging the surface of the workpiece W with the imaging unit 35, the street L to be cut is detected by pattern matching processing based on that image. Once the street L of the workpiece W is detected in this way, the position of the cutting blade 32 in the Y-axis direction (indexing direction) is determined, and the index feed means 36 aligns the position of the cutting blade 32 in the Y-axis direction with the position of the street L to be cut on the workpiece W.

[0040] Then, from the above state, the cutting blade 32 is driven to rotate at high speed and is lowered by a predetermined cutting amount by a lifting mechanism (not shown), and the chuck table 10 and the workpiece W held therein are moved in the -X axis direction by the moving mechanism 20 shown in Figures 2 and 4. In addition, cutting fluid is supplied from a water supply source (not shown) to the cutting fluid nozzle 34, and the cutting fluid is sprayed toward the cutting blade 32 from multiple slits 34a (see Figure 2) formed in the tip portion 34A of the cutting fluid nozzle 34.

[0041] Then, at the machining position P1, the workpiece W held in the chuck table 10 is cut along the street L by the cutting blade 32 while receiving cutting fluid from the cutting fluid nozzle 34. At this time, the cutting fluid sprayed from the cutting fluid nozzle 34 and used for lubrication and cooling of the cutting blade 32 accumulates in the inner part of the outer wall 12 surrounding the workpiece W, and as shown in Figure 4, a thin water film 44 is formed over the entire upper surface of the workpiece W. At this time, the ultrasonic horn 41 is lowered by the lifting mechanism 43, and as shown in Figure 4, its lower surface lands on the water film 44. When the ultrasonic horn 41 is activated by the high-frequency power supply 42, ultrasonic vibrations are transmitted to the water film 44 by the ultrasonic horn 41, and burrs generated in the kerf (cutting groove) formed in the workpiece W by cutting with the cutting blade 32 are reliably removed by the ultrasonic vibrations of the water film 44.

[0042] In this embodiment, the removal of burrs generated on the kerf of the workpiece W is performed simultaneously with the cutting process of the workpiece W, so that the burrs can be removed quickly, efficiently, and reliably. Furthermore, since the burr removal is performed using cutting fluid sprayed from the cutting fluid nozzle 34 toward the cutting blade 32, there is no need to spray high-pressure water separately toward the kerf of the workpiece W as in the conventional method. Therefore, deburring can be performed economically and at low cost without consuming a large amount of high-pressure water.

[0043] Then, once the above cutting process on the workpiece W is completed along all streets L in one direction, the chuck table 10 and the workpiece W held therein are rotated by 90° by a rotating mechanism (not shown), and cutting is similarly performed along the other street L perpendicular to the street L where cutting has been completed. When cutting along all streets L of the workpiece W is completed, multiple chips, each individually equipped with a device, are obtained.

[0044] Once the cutting process of the workpiece W by the cutting means 30 is complete, the workpiece W is held by the second transport means 60 and transported from the chuck table 10 to the cleaning means 70. The workpiece W transported to the cleaning means 70 is then placed on the cleaning table 71 and held in place by a suction source (not shown). The cleaning table 71 and the workpiece W held therein are then rotated at a predetermined speed around a vertical central axis by a rotation mechanism (not shown), and cleaning water is sprayed from a cleaning water nozzle (not shown) towards the workpiece W, thereby cleaning and removing any cutting debris adhering to the workpiece W.

[0045] In the cutting apparatus 1 according to this embodiment, cutting is performed on the workpiece W through the series of processes described above. As mentioned above, burrs that are generated in the kerf (cutting groove) formed on the workpiece W during cutting are quickly and reliably removed by ultrasonic vibration of the water film 44 formed on the entire upper surface of the workpiece W by the cutting fluid sprayed from the cutting fluid nozzle 34 toward the cutting blade 32 during cutting of the workpiece W, by ultrasonic vibration of the ultrasonic horn 41.

[0046] Incidentally, in the above embodiment, a water film 44 is formed on the entire upper surface of the workpiece W held on the chuck table 10 during cutting, and this water film 44 is ultrasonically vibrated by an ultrasonic horn 41. However, as shown in Figure 5, the ultrasonic horn 41 may be attached to the transport pad 62 of the second transport means 60, and the deburring device 40 may be configured with this ultrasonic horn 41 and a cleaning water nozzle (not shown). In this case, the cleaning water nozzle also serves as a water film forming nozzle, and a water film is formed on the entire upper surface of the workpiece W by the cleaning water sprayed from the cleaning water nozzle. With the lower surface of the ultrasonic horn 41 touching this water film, the water film can be ultrasonically vibrated by the ultrasonic horn 41, thereby removing burrs generated on the kerf of the workpiece W. Note that the cutting device 1 shown in Figure 5 is a device that holds the workpiece W1 (or W2) of the workpiece set WS1 (or WS2) shown in Figures 6 and 8 (described later) on a disc-shaped chuck table 10 and cuts the workpiece W1 (or W2).

[0047] As described above, even if the ultrasonic horn 41 is attached to the transport pad 62 of the second transport means 60, the same effect as described above can be obtained in the cleaning means 70. Hereinafter, another example in which a deburring device is provided in the cleaning means will be described below as Modification 1 and 2.

[0048] [Differential examples of deburring devices] <Example 1> Figure 6 is a broken perspective view showing a modified example 1 of the deburring device according to the present invention, and Figure 7 is a partial side cross-sectional view showing the operation of the deburring device shown in Figure 6.

[0049] The cleaning means 70A shown in Figure 6 is configured by housing a disc-shaped cleaning table (spinner table) 71 and a cleaning water nozzle 73 inside a drum-shaped cover 72 that opens at the top. The cleaning table 71 is horizontally mounted on the upper end of a rotating shaft 75 that is rotated around a vertical axis by an electric motor 74, which is the rotation drive source, and a work set WS1 or WS2 is held on its upper surface by four clamps 76. Specifically, four clamps 76 are attached to the outer circumference of the cleaning table 71 at equal angular pitches (90° pitches) in the circumferential direction, and the work set WS1 or WS2 placed on the holding surface 71a of the cleaning table 71 is fixed and held to the holding surface 71a of the spinner table 71 by the four clamps 76.

[0050] Furthermore, the cleaning nozzle 73 is attached to the tip of an arm 79 that extends horizontally from the upper end of a vertical shaft 78 that is rotated by an electric motor 77, and cleaning water is supplied to this cleaning water nozzle 73 from a cleaning water supply source (not shown).

[0051] Here, one workset WS1 is formed by attaching tape T to a disc-shaped workpiece (wafer) W1 and a ring frame F arranged around it, thereby integrating the two. The other workset WS2 is formed by attaching tape T to a rectangular workpiece W2 and a ring frame F arranged around it, thereby integrating the two. Each workpiece W1 and W2 has its surface (top surface in Figure 6) divided into numerous rectangular areas by multiple streets arranged in a grid pattern, and devices such as ICs and LSIs are formed in each rectangular area. Then, by cutting each workpiece W1 and W2, which have numerous devices formed on them, along the streets, the burrs generated on each workpiece W1 and W2 are removed by the deburring device 40A.

[0052] The deburring device 40A according to this modified example 1 includes an ultrasonic horn 41 having a lower surface that faces the upper surface of a workpiece W1 (or W2) of a workset WS1 (or WS2) held on the holding surface 71a of a washing table 71 with a gap between them, and a washing water nozzle 73 which serves as a water film forming nozzle that forms a water film 44 (see Figure 7) over the entire upper surface of the workpiece W1 (or W2) of the workset WS1 (or WS2) held on the washing table 71.

[0053] The ultrasonic horn 41 described above is composed of a single cylindrical horn 41a, which is positioned on the central axis of the holding surface 71a of the cleaning table 71 and can be moved up and down in the Z-axis direction by the lifting mechanism 90 shown in Figure 6. Here, the lifting mechanism 90 includes a slider 93 that moves up and down in the Z-axis direction along a guide rail 92 attached to a vertically erected base plate 91, and a vertical ball screw shaft 94 is screwed into and inserted through this slider 93.

[0054] The upper and lower ends of the ball screw shaft 94 are rotatably supported on the base plate 91 by bearings 95 and 96, and the upper end of the ball screw shaft 94 is connected to an electric motor 97, which is a rotational drive source.

[0055] In the lifting mechanism 90 configured as described above, when the electric motor 97 is activated and the ball screw shaft 94 rotates, the slider 93 that is screwed onto the ball screw shaft 94 moves up and down along the guide rail 92, causing the ultrasonic horn 41 to move up and down in the Z-axis direction together with the swivel arm 98 attached to the slider 93.

[0056] Furthermore, a gate-shaped swivel arm 98 is rotatably supported at one longitudinal end of the horizontally positioned slider 93. The vertical rotation shaft portion 98a of this swivel arm 98 is rotatably supported by the slider 93, and an electric motor 99, which is a rotation drive source, is attached to the lower end of the portion of the rotation shaft portion 98a that penetrates the slider 93.

[0057] Furthermore, a horizontal arm portion 98b extends horizontally from the upper end of the rotation axis portion 98a of the swivel arm 98, and a high-frequency power supply 42 for activating the ultrasonic horn 41 is installed on this horizontal arm portion 98b. A vertical portion 98c extends vertically downward from the longitudinal end of the horizontal arm portion 98b of the swivel arm 98, and the ultrasonic horn 41 is attached to the lower end of this vertical portion 98c.

[0058] In the cleaning means 70A equipped with the deburring device 40A configured as described above, the electric motor 99 is activated and the swivel arm 98 rotates horizontally around the rotation axis portion 98a, and the ultrasonic horn 41 attached to the vertical portion 98c of the swivel arm 98 is positioned on the central axis of the workpiece W1 (or W2) of the workset WS1 (or WS2) as shown in Figure 7. Then, from this state, cleaning water is sprayed from the cleaning water nozzle 73 toward the workpiece W1 (or W2), and a water film 44 is formed on the entire upper surface of the workpiece W1 (or W2) of the workset WS1 (or WS2) held by the holding surface 71a of the spinner table 71 by the cleaning water sprayed from the cleaning water nozzle 73, as shown in Figure 7. Then, from this state, the ultrasonic horn 41 is lowered by the lifting mechanism 90, and when its lower surface hits the water film 44 formed on the upper surface of the workpiece W1 (or W2), the ultrasonic horn 41 is driven by the high-frequency power supply 42, and ultrasonic vibrations are transmitted from the ultrasonic horn 41 to the water film 44, so that burrs generated on the workpiece W1 (or) W2 are reliably removed by the ultrasonic vibrations of the water film 44.

[0059] In this modified example 1, all burrs generated on the workpiece W1 (or W2) can be removed efficiently and reliably in a short time by the cleaning means 70A. Furthermore, since burr removal is performed using cleaning water sprayed from the cleaning water nozzle 73, there is no need to spray high-pressure water separately from the cleaning water towards the workpiece W1 (or W2) as in the conventional method. Therefore, deburring can be performed economically and at low cost without consuming a large amount of high-pressure water.

[0060] The cleaning of the workpiece set WS1 (or WS2) by the cleaning means 70A is performed in the same manner as in the conventional method, by rotating the cleaning table 71 and the workpiece set WS1 (or WS2) held therein at a predetermined speed while spraying cleaning water from the cleaning water nozzle 73 toward the workpiece set WS1 (or WS2).

[0061] <Modification 2> Figure 8 is a broken perspective view showing a modified example 2 of the deburring device according to the present invention, and Figure 9 is a partial side cross-sectional view showing the operation of the deburring device shown in Figure 8. In these figures, the same reference numerals are used for the same elements as those shown in Figures 6 and 7, and further explanation of them will be omitted below.

[0062] In this modified example 2, the ultrasonic horn 41 provided on the deburring device 40B is constructed by assembling and integrating multiple (10 in the illustrated example) cylindrical horns 41a arranged in a ring shape, and this ultrasonic horn 41 is located above the center of the holding surface 71a of the spinner table 71.

[0063] In the cleaning means 70B equipped with the burr removal device 40B according to this modified example 2, cleaning water is sprayed from the cleaning water nozzle 73 toward the workpiece W2 (or W1), and as shown in Figure 9, a water film 44 is formed on the entire upper surface of the workpiece W2 (or W1) of the workpiece set WS2 (or WS1) held on the holding surface 71a of the cleaning table 71 by the cleaning water sprayed from the cleaning water nozzle 73. Then, from this state, the ultrasonic horn 41 is lowered by the lifting mechanism 90, and when its lower surface hits the water film 44 formed on the upper surface of the workpiece W2 (or W1), the ultrasonic horn 41 is driven by the high-frequency power supply 42, and ultrasonic vibrations are transmitted from the ultrasonic horn 41 to the water film 44, so that burrs generated on the workpiece W2 (or W1) are reliably removed by the ultrasonic vibrations of the water film 44.

[0064] In this modified example 2, as in the modified example 1, all burrs generated on the workpiece W2 (or W1) can be removed efficiently and reliably in a short time by the cleaning means 70B. Furthermore, since the removal of burrs is performed using cleaning water sprayed from the cleaning water nozzle 73, there is no need to spray high-pressure water separately from the cleaning water onto the workpiece W2 (or W1). Therefore, deburring can be performed economically and at low cost without consuming a large amount of high-pressure water.

[0065] Furthermore, the cleaning of the workpiece set WS2 (or WS1) by the cleaning means 70B is also performed in the same manner as in the conventional method, by rotating the cleaning table 71 and the workpiece set WS2 (or WS1) held therein at a predetermined speed while spraying cleaning water from the cleaning water nozzle 73 toward the workpiece set WS2 (or WS1).

[0066] Furthermore, the present invention is not limited to the embodiments described above, and various modifications are possible within the scope of the technical idea described in the claims, specification, and drawings. [Explanation of Symbols]

[0067] 1: Cutting device, 2: Base, 2a: Opening of the base, 3: Support base, 3a: Cantilever support section 3b: Side of the support base, 3c: Guide hole, 4: Operation box, 5: Input means, 6: Monitoring device, 10: Chuck table, 10a: Holding surface, 10a1: Recess of the retaining surface, 10a2: Support surface of the retaining surface, 11: Rotation axis, 12: Exterior wall, 12a: Slit, 13: Cover, 14: Expandable cover, 20: Moving mechanism, 30: Cutting means, 31: Spindle, 32: Cutting blade, 33: Blade cover, 34: Cutting fluid nozzle (water film forming nozzle), 34A: Tip of the cutting fluid nozzle, 34a: Slit, 35: Imaging unit, 36: Index feeding mechanism, 40, 40A, 40B: Deburring device, 41: Ultrasonic horn, 41a: Cylindrical horn, 42: High-frequency power supply, 43: Lifting mechanism, 44: Water film, 50: First conveying means (conveying means), 51: Guide rail, 52: First transport arm, 52a: Axis, 60: Second transport means (transport means), 61: Second transport arm, 62: Transport pad, 70, 70A, 70B: Cleaning means, 71: Washing table, 71a: Holding surface of washing table, 72: Cover, 73: Washing water nozzle (water film forming nozzle), 74: Electric motor, 75: Rotating shaft, 76: Clamp, 77: Electric motor, 78: Shaft, 79: Arm, 80: Control unit, 90: Lifting mechanism, 91: Base plate, 92: Guide rail, 93: Slider, 94: Ball screw shaft, 95, 96: Bearings, 97: Electric motor, 98: Swivel arm, 98a: Rotation axis portion of the swivel arm, 98b: Horizontal arm portion of the swivel arm, 98c: Vertical section of the swivel arm, 99: Electric motor, F: Ring frame, L: Street, P1: Processing position, P2: Handover position R1: Device area, R2: Excess area, T: Tape, W, W1, W2: Workpiece Wa: Resin substrate, Wb: Protrusion, WS, WS1, WS2: Workset

Claims

1. A deburring device for removing burrs formed on a kerf cut by a cutting blade, The system comprises a table that holds a workpiece on a holding surface, an ultrasonic horn that emits ultrasonic waves from a lower surface facing the upper surface of the workpiece held on the holding surface, a water film forming nozzle that forms a water film covering the entire upper surface of the workpiece held on the holding surface, and a control unit. The ultrasonic horn is constructed by integrating multiple cylindrical horns arranged in a direction parallel to the holding surface. The control unit is A deburring device that removes burrs formed on the kerf of a workpiece by supplying water from a water film forming nozzle, placing the lower surface of an ultrasonic horn on the water film formed, and transmitting ultrasonic vibrations to the water film.

2. A cutting apparatus comprising a deburring device according to claim 1, a cutting means for cutting a workpiece held on the holding surface with a cutting blade, and a moving mechanism for moving the table in the cutting feed direction of the cutting blade, A cutting apparatus comprising: an ultrasonic horn having a lower surface that faces the upper surface of a workpiece held on the holding surface with a gap between them; and a water film forming nozzle that forms a water film on the upper surface of a workpiece held on the holding surface.

3. The cutting apparatus according to claim 2, wherein the ultrasonic horn is positioned lateral to the cutting blade in the cutting feed direction, and the water film forming nozzle is configured as a cutting water nozzle that supplies cutting water to the cutting blade.

4. The cutting apparatus according to claim 2, comprising a cleaning means for holding a workpiece after cutting on a cleaning table and cleaning the workpiece with cleaning water sprayed from a cleaning water nozzle, wherein the cleaning water nozzle is configured as a water film forming nozzle.

5. The cutting apparatus according to claim 2, further comprising a transport means for loading and unloading workpieces to and from the table, wherein the transport means is provided with the ultrasonic horn.

6. A deburring device for removing burrs formed on a kerf cut by a cutting blade, The system comprises a table that holds a workpiece on a holding surface, an ultrasonic horn that emits ultrasonic waves from a lower surface facing the upper surface of the workpiece held on the holding surface, a water film forming nozzle that forms a water film covering the entire upper surface of the workpiece held on the holding surface, and a control unit. The control unit is The deburring device includes a water film forming by supplying water from a water film forming nozzle, then bringing the lower surface of an ultrasonic horn onto the water film to propagate ultrasonic vibrations through the water film, thereby removing the burrs formed on the kerf of the workpiece. A cutting apparatus comprising a cutting means for cutting a workpiece held on the holding surface with a cutting blade, and a moving mechanism for moving the table in the cutting feed direction of the cutting blade, The table is equipped with a transport means for loading and unloading workpieces, and the transport means is equipped with the ultrasonic horn. A cutting apparatus comprising: an ultrasonic horn having a lower surface that faces the upper surface of a workpiece held on the holding surface with a gap between them; and a water film forming nozzle that forms a water film on the upper surface of a workpiece held on the holding surface.

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