Device

Abstract

To provide a device that enables an operator to easily and efficiently confirm operation of an arbitrary mechanism.SOLUTION: The device is provided with a mechanism, a display with a touch panel that can be used in inputting a command to actuate the mechanism, and a control unit that controls the mechanism and the display with a touch panel. When the display with a touch panel is used so that the command to actuate the mechanism is inputted, the control unit makes the display with a touch panel display a selection screen for an actuation-delay time, and when the display with a touch panel displaying the selection screen is used so that the actuation-delay time is selected, the control unit actuates the mechanism in accordance with the command after the actuation-delay time elapses.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] The present invention relates to an apparatus having a mechanism such as a processing apparatus for processing a workpiece such as a semiconductor wafer.

Background Art

[0002] In a manufacturing factory of device chips incorporated in electronic devices and the like, plate-like workpieces typified by semiconductor wafers and resin package substrates are processed by various processing apparatuses. A plurality of processing apparatuses are arranged in a factory or the like, and the workpiece is sequentially processed by each processing apparatus. Thus, a wide variety of apparatuses are arranged and used in the manufacturing factory of device chips.

[0003] The apparatuses placed in a factory or the like include, for example, a cutting apparatus that cuts a workpiece with an annular cutting blade (see, for example, Patent Document 1), a laser processing apparatus that processes a workpiece with a laser beam, a polishing apparatus that polishes a workpiece with a polishing pad, and a grinding apparatus that grinds a workpiece with a grinding wheel. In addition, in a factory or the like, apparatuses such as a cleaning apparatus that cleans a workpiece, an ultraviolet irradiation apparatus that irradiates a workpiece with ultraviolet rays, and an inspection apparatus that inspects a workpiece may also be used.

[0004] Each apparatus includes, for example, a holding table that holds a workpiece, a processing unit that processes the workpiece held on the holding table, and a processing feed unit that relatively feeds the holding table and the processing unit. Each apparatus thus includes a wide variety of mechanisms, and achieves a predetermined purpose by operating each mechanism appropriately.

[0005] Furthermore, each processing device incorporates a control unit consisting of a computer (microcomputer, personal computer, etc.), which controls each component of the processing device. The control unit has a storage unit consisting of an HDD, SSD, or flash memory that can store various types of information. The storage unit stores various information such as the OS that operates the control unit, programs that cause each component to perform predetermined operations, and processing conditions that are used depending on the type of workpiece and the purpose of processing.

[0006] Here, a device is known that has a touch panel display that combines the functions of an input unit used for inputting commands and a display unit capable of displaying various information (see Patent Document 1). Maintenance work is performed periodically on the device, and at this time the operator of the device inputs commands to operate each mechanism to the control unit using the touch panel display. Then, the operator adjusts each mechanism while checking the operating pattern. [Prior art documents] [Patent Documents]

[0007] [Patent Document 1] Japanese Patent Publication No. 2003-158094 [Overview of the Initiative] [Problems that the invention aims to solve]

[0008] Generally, touch-panel displays are located on the front of the device housing. Therefore, when an operator uses the touch-panel display to operate a predetermined mechanism and confirm its operation, the operator may not be able to see the mechanism depending on its installation location. In this case, two operators are required: one to input commands into the touch-panel display and another to visually confirm the mechanism's operation, which is inefficient.

[0009] This invention has been made in view of the aforementioned problems, and its objective is to provide a device that allows an operator to easily and efficiently verify the operation of any mechanism. [Means for solving the problem]

[0010] According to one aspect of the present invention, an apparatus comprising a mechanism, a touch panel display usable for inputting commands to operate the mechanism, and a control unit for controlling the mechanism and the touch panel display, wherein the control unit is controlled when the touch panel display is used to input commands to operate the mechanism. Afterwards, before activating the mechanism The present invention provides a device characterized in that a screen for selecting the operating delay time is displayed on the touch panel display, and when the operating delay time is selected using the touch panel display that displays the selection screen, the device operates the mechanism in accordance with the command after the operating delay time has elapsed.

[0011] Preferably, if the control unit detects operation of the touch panel display after the operation delay time has been selected but before the operation delay time has elapsed, it will not activate the mechanism even after the operation delay time has elapsed.

[0012] Preferably, the method for selecting the operation delay time in the touch panel display that displays the selection screen is swipe input or flick input.

[0013] Preferably, the control unit further includes a notification unit, which, after the operation delay time has been selected, causes the notification unit to notify the remaining time until the operation delay time has elapsed.

[0014] More preferably, the notification unit can notify the remaining time by sound or light.

[0015] Alternatively, preferably, the control unit displays the remaining time until the operation delay time has elapsed on the touch panel display after the operation delay time has been selected. [Effects of the Invention]

[0016] An apparatus comprising a mechanism according to one aspect of the present invention comprises a mechanism, a touch panel display, and a control unit. When a command to operate the mechanism is input to the control unit, it displays a screen for selecting the operation delay time on the touch panel display. Once the operation delay time is selected, the control unit operates the mechanism according to the command after the operation delay time has elapsed.

[0017] In this case, the operator using the device can move to a position where they can visually inspect the mechanism after inputting the command and before the activation delay time has elapsed. Therefore, when the mechanism operates according to the command, the operator can visually inspect the mechanism and confirm its operation. In particular, since the operator can select the activation delay time considering the time required for movement, it is possible to easily confirm the operation of the mechanism regardless of its position.

[0018] Therefore, according to one aspect of the present invention, a device is provided that allows an operator to easily and efficiently verify the operation of any mechanism. [Brief explanation of the drawing]

[0019] [Figure 1] This is a schematic perspective view of the processing equipment. [Figure 2] Figure 2(A) is a schematic plan view of a touch panel display that shows the command input screen, and Figure 2(B) is a schematic plan view of a touch panel display that shows the operation delay time selection screen. [Figure 3] Figures 3(A), 3(B), 3(C), and 3(D) are schematic plan views of a touch panel display that shows the remaining time until the operation delay time has elapsed. [Figure 4] Figures 4(A), 4(B), 4(C), and 4(D) are schematic side views showing an alarm lamp that indicates the remaining time until the activation delay time has elapsed. [Figure 5]FIG. 5(A) is a graph showing an example of the relationship between the pitch of the sound emitted by the buzzer and time, and FIG. 5(B) is a graph showing another example of the relationship between the pitch of the sound emitted by the buzzer and time.

BEST MODE FOR CARRYING OUT THE INVENTION

[0020] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. The apparatus according to the present embodiment includes a mechanism and a display with a touch panel. For example, the apparatus according to the present embodiment is a processing apparatus that processes a workpiece such as a semiconductor wafer. Hereinafter, the present embodiment will be described by taking the case where the apparatus according to the present embodiment is a processing apparatus as an example.

[0021] FIG. 1 is a perspective view schematically showing a processing apparatus 2 which is an example of the apparatus according to the present embodiment. The workpiece is, for example, a wafer formed of a material such as Si (silicon), SiC (silicon carbide), GaN (gallium nitride), GaAs (gallium arsenide), or other semiconductors. Alternatively, the workpiece is a substantially disk-shaped substrate or the like made of a material such as sapphire, glass, or quartz.

[0022] A plurality of division planned lines intersecting each other are set on the surface of the workpiece. Devices such as ICs (Integrated Circuits) and LSIs (Large Scale Integrations) are formed in each region partitioned by the division planned lines. When the workpiece is thinned by grinding from the back side, the grinding surface is polished to be flattened, and the workpiece is divided along the division planned lines, individual device chips can be formed. However, the workpiece is not limited thereto.

[0023] Processing device 2 is, for example, a cutting device that cuts and divides a workpiece along a planned division line using a cutting blade. Alternatively, it is a laser processing device that laser-processes and divides a workpiece along a planned division line. Furthermore, processing device 2 may also be a grinding device that grinds the workpiece, or a polishing device that polishes the workpiece. Moreover, processing device 2 is not limited to these, and may be other processing devices, and may process workpieces other than semiconductor wafers. The following explanation will use the case where processing device 2 is a cutting device as an example.

[0024] The processing apparatus 2 comprises a base 4 that supports each component and a housing 6 that covers each component supported by the base 4. A cassette support base 8 is provided on one corner of the base 4 that is not covered by the housing 6. A cassette for holding multiple workpieces is mounted on the upper surface of the cassette support base 8.

[0025] A touch panel display 10 is provided on the outer surface of the processing device 2. The touch panel display 10 displays various information and operation screens. The operator can input various commands to the processing device 2 by touching a predetermined position on the touch panel display 10 that displays the screen. In other words, the touch panel display 10 functions as an input unit (input interface) used for inputting various commands, and also functions as a display unit that displays various information.

[0026] The inside of the housing 6 of the processing device 2 is a processing chamber 12. The processing device 2 cuts the workpiece in the processing chamber 12. The processing chamber 12 houses a chuck table 14 that can hold the workpiece by suction. The chuck table 14 moves in the processing feed direction (X-axis direction) by a processing feed unit (X-axis movement mechanism) not shown. The chuck table 14 is also connected to a rotational drive source (not shown), such as a motor, and rotates around a rotation axis that is roughly parallel to the Z-axis direction (vertical direction).

[0027] The machining feed unit may move the machining unit 16, described later, either in place of the chuck table 14 or together with the chuck table 14. In other words, the machining feed unit moves the chuck table 14 and the machining unit 16 relative to each other.

[0028] The upper surface 14a of the chuck table 14 is a holding surface for suction holding of the workpiece. The upper surface 14a of the chuck table 14 is formed to be approximately parallel to the X-axis and Y-axis directions and is connected to a suction source (not shown), such as an ejector, via a suction passage (not shown) provided inside the chuck table 14.

[0029] Inside the machining chamber 12 is a machining unit 16 that processes (cuts) a workpiece held by a chuck table 14. The machining unit 16 is supported by a lifting unit (Z-axis movement mechanism) and an indexing feed unit (Y-axis movement mechanism), which are not shown, and is movable in the vertical direction (Z-axis direction) and the indexing feed direction (Y-axis direction).

[0030] The machining unit 16 has a spindle positioned above the chuck table 14, parallel to the upper surface 14a of the chuck table 14. The spindle is arranged along the Y-axis. The machining unit 16 further includes a rotational drive source (not shown) consisting of a motor or the like connected to the base end of the spindle, and a machining tool (cutting blade) 20 mounted on the tip of the spindle.

[0031] When cutting a workpiece with the processing device 2, first, the workpiece is removed from the cassette placed on the cassette support base 8, placed on the upper surface 14a of the chuck table 14, and the chuck table 14 holds the workpiece in place by suction. Then, the chuck table 14 is rotated to align the orientation of the planned division line of the workpiece with the processing feed direction (X-axis direction). In addition, the height of the processing unit 16 is adjusted and the processing tool (cutting blade) 20 is rotated at high speed.

[0032] Next, the chuck table 14 is moved along the machining feed direction, and the machining tool 20 is driven into the workpiece along the planned division line to cut the workpiece. Then, the machining unit 16 is moved along the indexing feed direction (Y-axis direction), and the workpiece is successively cut along the other planned division lines.

[0033] After cutting the workpiece along all the planned division lines in one direction, the chuck table 14 is rotated to similarly cut along the planned division lines in the other direction. When the workpiece has been cut along all the planned division lines set on it, the cutting process in the processing device 2 is completed.

[0034] The processing apparatus 2 may also include a cleaning unit (not shown) for cleaning the processed workpiece. The cleaning unit comprises a spinner table for rotatably holding the workpiece and a spray unit for spraying cleaning water onto the workpiece held on the spinner table. The processed workpiece is cleaned in the cleaning unit and then discharged from the processing apparatus 2.

[0035] As explained above, the processing apparatus 2 is equipped with numerous mechanisms, including an X-axis movement mechanism, a Y-axis movement mechanism, a Z-axis movement mechanism, a rotational drive source for rotating the chuck table 14, and a rotational drive source for rotating the spindle. Here, a mechanism is a system in which mechanical parts move in relation to each other, causing specific mechanical parts to perform actions such as movement or rotation. By operating each mechanism as planned, the processing apparatus 2 stably processes a large number of workpieces.

[0036] Furthermore, the processing device 2 is equipped with a notification unit that emits an alarm or the like to notify the operator when any abnormality occurs or when an event occurs that should be reported to the operator. For example, the processing device 2 is equipped with an alarm lamp 32 as a notification unit, which has multiple lamps. The alarm lamp (stacked signal lamp) 32 has multiple lamps, each capable of emitting light of a different color, such as green, yellow, red, white, orange, and blue. The alarm lamp 32 then notifies the operator of various information by illuminating lamps of a specific color.

[0037] Furthermore, the processing apparatus 2 may have a touch panel display 10 that displays information such as alarm information. In other words, the touch panel display 10 may function as a notification unit. In addition, the processing apparatus 2 may be equipped with a sound generating unit 11 such as a buzzer or speaker, which can notify alarm information and the like by sound. However, the notification unit equipped in the processing apparatus (device) 2 is not limited to these.

[0038] The processing apparatus 2 includes a control unit 22 that controls each component, such as each mechanism, to perform processing of the workpiece. The control unit 22 is connected to each component. The control unit 22 is composed of a computer that includes, for example, a processing unit such as a CPU (Central Processing Unit), a main memory such as DRAM (Dynamic Random Access Memory), and an auxiliary storage device such as flash memory. The functions of the control unit 22 are realized by operating the processing unit and other components according to the software stored in the auxiliary storage device.

[0039] The control unit 22 has a storage unit 24 that can store various types of information. The storage unit 24 stores various types of information, such as the OS for operating the control unit 22, programs for performing predetermined operations on each component, and processing conditions that can be used depending on the type of workpiece and the purpose of processing.

[0040] Furthermore, the control unit 22 includes a display control unit 26 that controls the display of the touch panel display 10, a notification control unit 28 that controls notification units such as alarm lamps 32, and a mechanism control unit 30 that controls various mechanisms. The control unit 22 advances the processing of the workpiece by the processing device 2 in predetermined operations.

[0041] As the workpiece is repeatedly processed by the processing device 2, various consumables need to be replaced and various mechanisms need to be inspected. Therefore, periodic maintenance work is performed on the processing device 2. During this time, the operator of the processing device 2 uses the touch panel display 10 to input commands to the control unit 22 to operate each mechanism. Then, the operator checks the operation of each mechanism and adjusts it accordingly.

[0042] Generally, the touch panel display 10 is located on the front of the housing 6. Therefore, when an operator uses the touch panel display 10 to operate a predetermined mechanism and check the operation of that mechanism, the operator may not be able to see the mechanism depending on its installation location. In particular, mechanisms that can only be seen from the back of the processing device 2 or mechanisms inside the processing chamber 12 are difficult for the operator operating the touch panel display 10 to see.

[0043] Therefore, confirming the operation of all mechanisms in the processing device 2 requires two operators: one operator to input commands into the touch panel display 10, and another operator to visually inspect the mechanisms and confirm their operation, which is inefficient.

[0044] Therefore, in the processing apparatus (device) 2 according to this embodiment, the operator who inputs commands using the touch panel display 10 can easily and efficiently verify the operation of any mechanism. The following description of the processing apparatus (device) 2 according to this embodiment will focus on the configuration that contributes to verifying the operation of the mechanism.

[0045] In the processing apparatus 2 according to this embodiment, when an operator inputs a command to the control unit 22 to activate a mechanism to be verified using the touch panel display 10, the operator can further input the operation delay time until the mechanism actually activates. The control unit 22 then measures the elapsed time since the input of the operation delay time was completed and activates the mechanism according to the command after this operation delay time has elapsed. This allows the operator to move to a position where they can see the mechanism before the operation delay time has elapsed.

[0046] Let me explain in more detail. Figure 2(A) is a schematic plan view showing an example of an operation screen 34 displayed on the touch panel display 10. During maintenance of the processing device 2, etc., the operator inputs a predetermined command to the control unit 22 through the operation screen 34 in order to confirm whether a predetermined mechanism is performing a predetermined operation. To this end, the display control unit 26 of the control unit 22 controls the touch panel display 10 to display the operation screen 34.

[0047] The operation screen 34 includes multiple operation buttons (keys) 36. Each operation button 36 is assigned a command to cause a predetermined mechanism to perform a predetermined action. When the touch panel of the touch panel display 10 detects that an operator has touched any of the operation buttons 36, the control unit 22 detects that a command has been input.

[0048] Furthermore, when a command to operate a mechanism to be verified using the touch panel display 10 is input to the control unit 22 of the processing apparatus 2 according to this embodiment, the control unit 22 displays a screen for selecting the operation delay time on the touch panel display 10. Figure 2(B) is a schematic plan view showing an example of the operation delay time selection screen 38 on the touch panel display 10.

[0049] The method for inputting the operation delay time will now be explained. Figure 2(B) schematically shows an operator's finger 40 in contact with a touch panel display 10. When the operator touches an operation button 36 corresponding to a desired command and continues to hold the contact, the operation delay time selection screen 38 is displayed on the touch panel display 10. The operation delay time selection screen 38 is, for example, a screen in which the delay time setting buttons (keys) 42 and 44 are superimposed on the operation screen 34 shown in Figure 2(A).

[0050] The delay time setting buttons 42 and 44 displayed on the selection screen 38 correspond to one of several options that are candidates for the operating delay time. In the example shown in Figure 2(B), the delay time setting button 42 corresponds to a command to set the operating delay time to 10 seconds, and the delay time setting button 44 corresponds to a command to set the operating delay time to 5 seconds. The operating delay time selection screen 38 may also display other delay time setting buttons, and the input operating delay time is not limited to 5 seconds and 10 seconds.

[0051] For example, on the operation delay time selection screen 38, delay time setting buttons 42 and 44 are arranged around the position where the finger 40 is in contact with the touch panel display 10. The operator then slides their finger 40 toward the desired delay time setting button 42 or 44. In this case, the control unit 22, which monitors the contact position of the finger 40 on the touch panel display 10, determines which delay time setting button 42 or 44 has been selected based on the direction in which the finger 40 is sliding. This type of input method is called swipe input.

[0052] Alternatively, the operator may select the desired delay time by quickly swiping their finger 40 toward the desired delay time setting buttons 42 and 44. This input method is called flick input. In this case, the delay time setting buttons 42 and 44 do not need to be displayed on the touch panel display 10. If a specific delay time is assigned to each direction of the finger 40's swipe, an operator who knows this assignment can select the desired delay time even if the delay time setting buttons 42 and 44 are not displayed.

[0053] While methods for selecting the operating delay time have been described for swipe input and flick input, the methods for selecting the operating delay time are not limited to these. The operating delay time may also be selected by using the touch panel display 10 in other ways.

[0054] In addition, in the processing apparatus 2 according to this embodiment, the operator may select the operation delay time in other ways using the touch panel display 10. For example, if the operator's finger 40 touches a specific operation button 36 on the operation screen 34 for a predetermined time or longer, the display control unit 26 may display an operation delay time selection screen (not shown) on the touch panel display 10, which includes a numeric keypad that can be used to input the operation delay time.

[0055] More specifically, this selection screen should include a display field for showing the entered operating delay time, and an execution button that starts measuring the elapsed time and causes the predetermined mechanism to perform a predetermined action after the entered operating delay time has elapsed. In this case, the operator completes the selection of the operating delay time by entering the desired time using the numeric keypad displayed on the selection screen and touching the execution button.

[0056] By these methods, the touch panel display 10 that displays the selection screen 38 is used to select the operation delay time. The memory unit 24 of the control unit 22 stores the operation delay time selected by the operator. After the operator has selected the operation delay time, the control unit 22 measures the elapsed time. After the operation delay time stored in the memory unit 24 has elapsed, the control unit 22 operates the predetermined mechanism according to the previously input command.

[0057] In this case, after inputting a command to activate a predetermined mechanism to the control unit 22 using the touch panel display 10, the operator can move to a position where they can verify the operation of the mechanism. Therefore, the operator can independently verify the operation of the mechanism directly and evaluate its operating characteristics. In other words, in the processing apparatus (device) 2 according to this embodiment, the operator can easily and efficiently verify the operation of any mechanism.

[0058] In the processing apparatus 2 according to this embodiment, the control unit 22 may display the remaining time until the operation delay time has elapsed on the touch panel display 10 after the operation delay time has been selected. Figures 3(A) to 3(D) are schematic plan views showing the touch panel display 10 that displays the remaining time of the operation delay time on screens 46a, 46b, 46c, and 46d, respectively.

[0059] For example, when time measurement has started and the remaining operating delay time is 5 seconds, the display control unit 26 displays a display screen 46a on the touch panel display 10, which includes a remaining time display 48a indicating the remaining operating delay time of 5 seconds, as shown in Figure 3(A). An operator who sees this remaining time display 48a can realize that the remaining operating delay time is 5 seconds.

[0060] Furthermore, when the remaining operating delay time reaches 4 seconds, the display control unit 26 displays a display screen 46b on the touch panel display 10, which includes a remaining time display 48b indicating the remaining operating delay time of 4 seconds, as shown in Figure 3(B). Upon seeing this remaining time display 48b, the operator realizes that the remaining operating delay time is 4 seconds. In addition, the operator can realize that the control unit 22 is measuring the time as the countdown progresses.

[0061] In this way, the remaining time displayed on the touch panel display 10 decreases as time passes. When the remaining operating delay time becomes 1 second, a display screen 46c including a remaining time display 48c indicating that the remaining operating delay time is 1 second is displayed on the touch panel display 10. An operator who sees the remaining time display 48c indicating that the remaining operating delay time is 1 second may realize that their movement has been delayed.

[0062] Finally, when the operation delay time has elapsed, the mechanism control unit 30 of the control unit 22 causes the predetermined mechanism to perform a predetermined operation. At this time, the touch panel display 10 displays a display screen 46d that includes a remaining time display 48d indicating that the remaining operation delay time has reached 0 seconds.

[0063] Normally, the operator focuses on a predetermined mechanism when this display screen 46d is shown on the touch panel display 10. Therefore, it is not expected that the operator will look at the display screen 46d. However, it is conceivable that the operator might look at the display screen 46d for some reason, such as an incorrect command being entered. In this case, the operator will realize that the operation delay time has elapsed and the predetermined mechanism has performed the predetermined action.

[0064] In this embodiment of the processing apparatus 2, the control unit 22 may inform the operator of the remaining operating delay time by another method. That is, the control unit 22 may inform the operator of the remaining operating delay time without using the touch panel display 10.

[0065] For example, in the processing apparatus 2 according to this embodiment, the control unit 22 may cause the notification unit to notify the remaining time until the operation delay time has elapsed after the operation delay time has been selected. In this case, for example, the notification control unit 28 of the control unit 22 controls a notification unit such as an alarm lamp 32 to notify the operator of the remaining time.

[0066] Figures 4(A) to 4(D) are schematic side views of alarm lamps 32 that indicate the remaining time of the operation delay. Each alarm lamp 32 in each figure comprises four lamps 50a, 50b, 50c, and 50d. The notification control unit 28 controls the alarm lamps 32 to sequentially illuminate each lamp 50a, 50b, 50c, and 50d, thereby notifying the operator of the remaining time of the operation delay. In each figure, the illuminated lamps 50a, 50b, 50c, and 50d are hatched.

[0067] For example, the notification control unit 28 of the control unit 22 illuminates the bottom lamp 50a as shown in Figure 4(A) when the remaining operating delay time is 3 seconds or more. Then, when the remaining operating delay time is 2 seconds, it illuminates the second lamp from the bottom 50b as shown in Figure 4(B). Furthermore, when the remaining operating delay time is 1 second, it illuminates the third lamp from the bottom 50c as shown in Figure 4(C). Therefore, an operator who observes the alarm lamp 32 can determine the remaining operating delay time.

[0068] Then, when the operating delay time has elapsed and the remaining time is 0 seconds, the mechanism control unit 30 causes the predetermined mechanism to perform a predetermined operation, and the notification control unit 28 controls the alarm lamp 32 to light up the uppermost lamp 50d. In this way, the control unit 22 notifies the operator that the operating delay time has elapsed. Thus, in the processing apparatus 2 according to this embodiment, the alarm lamp 32, which functions as a notification unit, can notify the remaining operating delay time with light.

[0069] Furthermore, in the processing apparatus 2 according to this embodiment, the notification control unit 28 of the control unit 22 may have another notification unit notify the remaining time until the operation delay time has elapsed after the operation delay time has been selected. For example, if the processing apparatus 2 is equipped with a sound generating unit 11 such as a buzzer or speaker as a notification unit, the notification control unit 28 may use this sound generating unit 11 to notify the remaining time until the operation delay time has elapsed by sound.

[0070] For example, the notification control unit 28 notifies the remaining time of the operation delay by generating a specific sound from the buzzer every second. Figure 5(A) is a graph showing an example of the relationship between the remaining time of the operation delay and the pitch of the sound emitted by the buzzer. In this graph, the horizontal axis represents the passage of time, and the vertical axis represents the pitch of the sound emitted by the buzzer.

[0071] For example, the notification control unit 28 of the control unit 22 generates a sound of pitch P1 three times when the remaining time of the operation delay is 3 seconds, generates a sound of pitch P1 twice when the remaining time is 2 seconds, and generates a sound of pitch P1 once when the remaining time is 1 second. Then, when the operation delay has elapsed and the remaining time is 0 seconds, it generates a sound of pitch P2, which is different from pitch P1, on the buzzer for a relatively long period of time. This allows the operator to understand the remaining time of the operation delay simply by listening to the sound emitted by the buzzer.

[0072] Figure 5(B) is a graph illustrating another example of the relationship between the remaining operating delay time and the pitch of the sound emitted by the buzzer. In this graph as well, the horizontal axis represents the passage of time, and the vertical axis represents the pitch of the sound emitted by the buzzer.

[0073] For example, the notification control unit 28 of the control unit 22 generates a sound of pitch P1 when the remaining time of the operation delay is 3 seconds, a sound of pitch P2 when the remaining time is 2 seconds, and a sound of pitch P3 when the remaining time is 1 second. Then, when the operation delay has elapsed and the remaining time is 0 seconds, it generates a sound of pitch P4 on the buzzer. Here, P1, P2, P3, and P4 are all different from each other. As a result, the operator can determine the remaining time of the operation delay simply by listening to the sound generated by the buzzer.

[0074] Furthermore, if the processing device 2 is equipped with a speaker, the notification control unit 28 of the control unit 22 may have the speaker announce the remaining operating delay time by generating a pre-recorded human voice or a generated machine voice. For example, the speaker may be made to count down until the remaining time reaches zero. This makes it extremely easy for the operator to grasp the remaining operating delay time.

[0075] Incidentally, after the operator inputs a command to activate a specific mechanism into the control unit 22 and selects an activation delay time, the operator may notice an error in the input command before the activation delay time has elapsed. Therefore, in the processing apparatus 2 according to this embodiment, it may be possible to accept the operator canceling the command until the activation delay time has elapsed.

[0076] For example, the operator cancels a command to the control unit 22 using the touch panel display 10. If the control unit 22 detects an operation on the touch panel display 10 after the operation delay time has been selected but before the operation delay time has elapsed, it will not activate the mechanism even after the operation delay time has elapsed.

[0077] For example, when measuring the elapsed time after an operation delay time has been selected, a stop operation button (key) may be displayed on the touch panel display 10. In this case, an operator who wants to cancel a command will perform the command cancellation operation to the control unit 22 by touching this stop operation button.

[0078] Furthermore, when measuring the elapsed time after the operation delay time has been selected, the stop operation button does not need to be displayed on the touch panel display 10. For example, if the operator's contact with the touch panel display 10 is detected during the measurement of the elapsed time, the control unit 22 may detect a command cancellation operation. In this case, the operator can easily and quickly cancel the command without having to consider where to touch the touch panel display 10.

[0079] In either case, if the control unit 22 detects a command cancellation operation, it may immediately interrupt the measurement of the elapsed time after the operation delay time has been selected. Then, to enable command re-input, the display control unit 26 of the control unit 22 may display the operation screen 34 (see Figure 2(A)) again on the touch panel display 10.

[0080] As described above, in the processing apparatus (device) 2 according to this embodiment, when an operator inputs a command to perform a predetermined operation on a predetermined mechanism using the touch panel display 10, the control unit 22 activates the mechanism after an operation delay time has elapsed. Therefore, during the time until this operation delay time has elapsed, the operator can move to a position where they can easily check the operation of the mechanism. Thus, the operator can easily and efficiently check the operation of any mechanism.

[0081] It should be noted that the present invention is not limited to the embodiments described above and can be implemented with various modifications. For example, the above embodiments mainly described a case in which a mechanism that is not visible to the operator using the touch panel display 10 is activated after an operating delay time has elapsed. In other words, the example described was a case in which an operator who is paying attention to a mechanism whose operating mode is to be confirmed cannot operate the touch panel display 10. However, one aspect of the present invention is not limited to this.

[0082] In a processing apparatus (device) 2 according to one aspect of the present invention, the control unit 22 may activate not only mechanisms that are not visible to the operator using the touch panel display 10, but also mechanisms that are visible to the operator, after the operation delay time has elapsed. If the command input by the operator to the control unit 22 is a command to cause a specific mechanism to perform a minute movement, the operator may not be able to properly perform the operation check unless they concentrate on checking the operation of that mechanism. Therefore, mechanisms that are visible to the operator may also be activated after the operation delay time has elapsed.

[0083] Furthermore, although the above embodiment described a case in which the control unit 22 accepts the selection of an operation delay time when a command to activate a specific mechanism is input to the touch panel display 10, the present invention is not limited to this. That is, the control unit 22 may activate the mechanism immediately when it receives the input of a command to activate the mechanism.

[0084] For example, if two or more operators are engaged in maintenance work on the processing device (device) 2, the roles can be divided between an operator who inputs commands on the touch panel display 10 and an operator who confirms the operation of the mechanism that is activated by the command. In this case, since there is no need to select an operation delay time, the control unit 22 may immediately operate the mechanism according to the command without accepting the selection of an operation delay time.

[0085] In other words, the control unit 22 may operate in a flow that does not accept the selection of the operating delay time, and the operator may input a command to the control unit 22 to operate in such a flow. In other words, the control unit 22 may disable the function that accepts the selection of the operating delay time.

[0086] Alternatively, when the operation screen 34 shown in Figure 2(A) is displayed on the touch panel display 10, if the operator simply touches a specific operation button (key) 36 and immediately releases their finger 40, the selection of the operation delay time may be omitted and the mechanism may be activated immediately. In addition, when a flick input or swipe input is made, the control unit 22 may accept this input as a selection of the operation delay time. In this case, the control unit 22 can accept both an operation to activate the mechanism immediately and an operation to activate the mechanism after the operation delay time has elapsed.

[0087] Therefore, even when there are frequent switching between situations where the mechanism needs to be activated after a delay period has elapsed following command input, and situations where the mechanism needs to be activated immediately, the operation of the control unit 22 is simple.

[0088] Furthermore, although the above embodiment was described using a processing device 2 for processing a workpiece as an example, the apparatus according to one aspect of the present invention is not limited to this. In other words, the apparatus according to one aspect of the present invention does not have to be a processing device for processing a workpiece.

[0089] Furthermore, the structures, methods, etc., of the embodiments and modifications described above can be modified as appropriate, as long as they do not deviate from the scope of the present invention. [Explanation of Symbols]

[0090] 2 Processing equipment 4 bases 6 cabinets 8 Cassette Support Stands 10 Touchscreen displays 11. Sound generation unit 12 Processing room 14 Chuck Table 14a Top side 16 Processing Units 20 Processing tools 22 Control Unit 24 Memory section 26 Display Control Unit 28. Notification Control Unit 30 Mechanism Control Unit 32 Alarm lamp 34 Operation screen 36 operation buttons 38 Selection screen 40 fingers 42, 44 Delay time setting button 46a,46b,46c,46d Display screen 48a,48b,48c,48d Remaining time display 50a, 50b, 50c, 50d lamps

Claims

1. The mechanism, A touch panel display that can be used to input commands to operate the mechanism, A device comprising the mechanism and a control unit for controlling the touch panel display, The control unit is, After a command to operate the mechanism is input using the touch panel display, and before the mechanism is activated, a screen for selecting the operation delay time is displayed on the touch panel display. The apparatus is characterized in that, when the operation delay time is selected using the touch panel display that displays the selection screen, the mechanism is activated in accordance with the command after the operation delay time has elapsed.

2. The apparatus according to claim 1, characterized in that if the control unit detects operation of the touch panel display after the operation delay time has been selected but before the operation delay time has elapsed, it will not activate the mechanism even after the operation delay time has elapsed.

3. The apparatus according to claim 1 or 2, characterized in that the method for selecting the operation delay time in the touch panel display that displays the selection screen is swipe input or flick input.

4. Equipped with an additional notification unit, The apparatus according to claim 1 or 2, characterized in that the control unit causes the notification unit to notify the remaining time until the operation delay time has elapsed after the operation delay time has been selected.

5. The apparatus according to claim 4, characterized in that the notification unit can notify the remaining time by sound or light.

6. The apparatus according to claim 1 or 2, characterized in that the control unit displays the remaining time until the operation delay time has elapsed on the touch panel display after the operation delay time has been selected.

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