Circuit board storage container

The integrated structure of the substrate storage container addresses unstable fixation and detection issues by ensuring stable positioning and secure attachment to external devices, improving detection accuracy and drying performance.

JP7886812B2Active Publication Date: 2026-07-08SHIN ETSU POLYMER CO LTD

Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
SHIN ETSU POLYMER CO LTD
Filing Date
2022-12-14
Publication Date
2026-07-08

AI Technical Summary

Technical Problem

Existing substrate storage containers face issues with unstable fixation to external devices due to dimensional tolerances, leading to potential misalignment of components like center clamps and detection pads, which affect secure attachment and detection accuracy.

Method used

A substrate storage container with a structurally integrated base, fixing part, and detection part formed as a single molded product, ensuring stable positioning and secure attachment to external devices through a through-hole mechanism and detection via paired detection bodies.

Benefits of technology

The integrated structure stabilizes the positional relationship between the fixing and detection parts, enabling secure attachment and improved detection accuracy while reducing the risk of detachment and enhancing drying performance.

✦ Generated by Eureka AI based on patent content.

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Patent Text Reader

Abstract

To provide a substrate housing container that can be stably fixed to an external device.SOLUTION: A substrate housing container has a container body having a bottom plate that defines a housing space for housing substrates, and a structure 6 that is an integrally molded product provided on the container body, and the structure 6 has a base 61 that is bonded to the bottom plate, a fixing portion 62 that fixes the substrate housing container to an external device, and a detection section 63.SELECTED DRAWING: Figure 3
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Description

Technical Field

[0003]

[0001] This disclosure relates to a substrate storage container.

Background Art

[0002] A substrate storage container for storing substrates such as semiconductor wafers is known. For example, Patent Document 1 describes a wafer transfer container including a container body and a bottom plate provided on the bottom surface of the container body.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] When the door of such a substrate storage container is opened and closed, it may be fixed to an external device. Therefore, a clamp structure (center clamp) for fixing the substrate storage container to the external device may be provided at the bottom of the substrate storage container. Further, a detection pad for detecting the substrate storage container may be provided at the bottom of the substrate storage container. By fitting a component having the function of the center clamp and a component provided with the detection pad to a component provided at the bottom of the container body, these functions can be added to the substrate storage container.

[0005] Due to dimensional tolerances of each component, etc., a clearance may occur between the fitted components. Since there is a possibility that the center clamp cannot be accurately positioned due to this clearance, it is desired that the substrate storage container be more stably fixed to the external device.

[0006] This disclosure describes a substrate storage container that can be stably fixed to an external device. [Means for solving the problem]

[0007] A substrate storage container relating to one aspect of this disclosure comprises a container body having a bottom plate that defines a storage space for storing substrates, and a structural element which is an integrally molded product provided on the container body. The structural element comprises a base that is joined to the bottom plate, a fixing part that fixes the substrate storage container to an external device, and a detection part for the external device to detect the substrate storage container.

[0008] In this circuit board storage container, the structure is formed as a single molded product and comprises a base that is joined to the bottom plate, a fixing part that secures the circuit board storage container to an external device, and a detection part for the external device to detect the circuit board storage container. Since the structure is a single molded product, the relative positional relationship between the base and the detection part, and the relative positional relationship between the base and the fixing part can be fixed. Therefore, compared to a case where the base, detection part, and fixing part are formed by two or more parts that engage with each other, the positions of the detection part and the fixing part can be stabilized. As a result, the circuit board storage container can be stably fixed to the external device.

[0009] In some embodiments, the base may have a first surface embedded in the bottom plate and a second surface opposite to the first surface. The fixing portion may be a plate-shaped member facing the second surface in a first direction intersecting the second surface, and may have a first end and a second end, which are both ends in a second direction intersecting the first direction. The structure may further include a first wall portion provided on the base and supporting the fixing portion at the first end, and a second wall portion provided on the base and supporting the fixing portion at the second end. The fixing portion may be provided with a through hole that penetrates the fixing portion in the first direction. In this case, a space is formed between the fixing portion and the base. For example, if the external device is equipped with a fastener having a shaft portion that moves back and forth in a first direction and a claw extending from the tip of the shaft portion in a direction intersecting the first direction, the claw can be hooked onto the fixing portion by inserting the fastener through the through hole and moving the shaft portion in a direction that pulls it out of the through hole while the claw is positioned in the space. This makes it possible to stably fix the substrate storage container to the external device.

[0010] In some embodiments, the detection unit may include a first detection body and a second detection body provided so as to sandwich the fixed portion in a third direction intersecting the first and second directions. In this configuration, the external device can detect that a substrate storage container has been placed on the external device by detecting the first detection body and the second detection body.

[0011] In some embodiments, the structure may further include a connecting plate that connects the first detection body and the second detection body and is supported by the first wall. The connecting plate may extend from the first end so as to move away from the second end in a second direction. The first wall may be provided with a hole that penetrates the first wall in a second direction. With this configuration, a space is formed surrounded by the first detection body, the second detection body, the connecting plate, the base, and the first wall. The provision of a hole that penetrates the first wall improves the ventilation of the space. Therefore, when the substrate storage container is cleaned, the possibility of water remaining in the space can be reduced. As a result, the drying performance of the substrate storage container can be improved.

[0012] In some embodiments, the first surface may be provided with a first recess extending from the first surface toward the second surface. The second surface may be provided with a second recess extending from the second surface toward the first surface. When the container body is resin-molded with the structure placed in a mold used for resin molding the container body, molten resin material may enter the first and second recesses when the base of the structure and the bottom plate of the container body are joined together. If the resin material solidifies in this state to form the container body, the container body will include portions that fill the first and second recesses. Therefore, when a force is applied to the structure that pushes it toward the container body, even if the joint between the base and the bottom plate is insufficient, the structure will come into contact with the portion that fills the first recess, thus restricting the movement of the structure. Similarly, when a force is applied to the structure that pulls it away from the container body, even if the joint between the base and the bottom plate is insufficient, the structure will come into contact with the portion that fills the second recess, thus restricting the movement of the structure. Therefore, the possibility of the structure detaching from the container body can be reduced.

[0013] In some embodiments, the first recess may be a groove that crosses the first surface. The second recess may be provided along the periphery of the base. In this case, since the shapes of the first and second recesses are simple, the structure of the mold used to manufacture the structure can be simplified. [Effects of the Invention]

[0014] According to this disclosure, the substrate housing container can be stably fixed to an external device. [Brief explanation of the drawing]

[0015] [Figure 1] Figure 1 is an exploded perspective view of a substrate storage container according to one embodiment. [Figure 2] Figure 2 is a bottom view of the substrate housing container shown in Figure 1. [Figure 3] Figure 3 is a perspective view of the structure shown in Figure 2. [Figure 4]Figure 4 is a front view of the structure shown in Figure 2. [Figure 5] Figure 5 is a rear view of the structure shown in Figure 2. [Figure 6] Figure 6 is a side view of the structure shown in Figure 2. [Modes for carrying out the invention]

[0016] Embodiments of this disclosure will be described in detail below with reference to the drawings. In the description of the drawings, the same elements are denoted by the same reference numerals, and redundant descriptions are omitted. Each figure shows an XYZ coordinate system. The Y-axis direction (second direction) intersects (in this case, orthogonal to) the X-axis direction (third direction) and the Z-axis direction (first direction). The Z-axis direction intersects (in this case, orthogonal to) the X-axis direction and the Y-axis direction. As an example, the X-axis direction is the left-right direction (width direction), the Y-axis direction is the front-back direction (depth direction), and the Z-axis direction is the up-down direction (height direction). For convenience of explanation, the terms "front," "back," "up," "down," "left," and "right" are used, but the directions are not limited to these.

[0017] A substrate storage container according to one embodiment will be described with reference to Figure 1. Figure 1 is an exploded perspective view of a substrate storage container according to one embodiment. The substrate storage container 1 shown in Figure 1 is a container for storing multiple substrates. The substrate storage container 1 is, for example, called an FOSB (Front Opening Shipping Box) and is used for transporting substrates between factories. The substrate storage container 1 is constructed, for example, with reference to SEMI (Semiconductor Equipment and Materials International) standards. An example of a substrate is a semiconductor wafer. The substrate has a disc shape with, for example, a diameter of 300 mm and a thickness of 775 μm. The number of substrates that can be stored in the substrate storage container 1 is arbitrarily determined, for example, 25.

[0018] The substrate storage container 1 includes a container body 2, a lid 3, and a pair of support members 4.

[0019] The container body 2 is a front-open type container with an opening 2a provided on the front (front side). The container body 2 houses a plurality of substrates. Specifically, the container body 2 houses the plurality of substrates in a vertically arranged state. The substrates are inserted into and removed from the container body 2 through the opening 2a.

[0020] The container body 2 includes a top plate 21, a bottom plate 22, a pair of side walls 23, a rear wall 24, and a frame body 25. The top plate 21, the bottom plate 22, the pair of side walls 23, and the rear wall 24 define a storage space 20 for housing a plurality of substrates. The bottom plate 22 has a bottom surface 22a (see FIG. 2) facing the outside of the container body 2. The frame body 25 is a rectangular frame body provided across the front end of the top plate 21, the front end of the bottom plate 22, and the front ends of the pair of side walls 23. The frame body 25 defines the opening 2a. The frame body 25 is formed by bending with a step so as to spread outward, and the surface of the step portion functions as a sealing surface where a sealing member such as a gasket contacts.

[0021] The lid body 3 is a member for closing the opening 2a of the container body 2. The lid body 3 is detachably attached to the frame body 25. The lid body 3 hermetically closes the opening 2a of the container body 2 through a sealing member such as a gasket. The lid body 3 includes a lid main body 31 and a locking mechanism 32.

[0022] The lid main body 31 is the main body portion of the lid body 3. The lid main body 31 is a rectangular plate material. A keyhole 31h is provided on the front surface of the lid main body 31. A key (not shown) is inserted into the keyhole 31h. The locking mechanism 32 locks or unlocks the lid body 3 when the key inserted into the keyhole 31h is operated. The locking mechanism 32 includes a latch (not shown). In a state where the lid body 3 closes the opening 2a of the container body 2, the lid body 3 is locked by the latch being inserted into a locking hole (not shown) provided in the frame body 25 by operating the key. In a state where the lid body 3 is locked, the lid body 3 is unlocked by the latch being pulled out of the locking hole by operating the key.

[0023] Examples of materials for the container body 2 and lid 3 include thermoplastic resins such as polycarbonate, cycloolefin polymer, and liquid crystal polymer. Conductive materials, various antistatic materials, and ultraviolet absorbers may be added to these thermoplastic resins as appropriate. Examples of conductive materials include conductive carbon, conductive fibers, metal fibers, and conductive polymers.

[0024] The pair of support members 4 are components that support the substrate. Each support member 4 is provided on the inner surface of the side wall 23 and protrudes from the inner surface of the side wall 23 into the housing space 20. Each support member 4 is provided with a plurality of grooves extending in the front-rear direction. The plurality of grooves may have a shape that is recessed toward the side wall 23. The plurality of grooves are arranged side by side in the vertical direction. The substrate is supported by inserting both ends of the substrate in the left-right direction into grooves located at the same height on the pair of support members 4. Each support member 4 may be integrally formed with the container body 2 by insert molding, or it may be assembled to the container body 2 in an assembly type. Examples of constituent materials for each support member 4 include thermoplastic resins such as polycarbonate, cycloolefin polymer, liquid crystal polymer, polybutylene terephthalate, and polyether ether ketone.

[0025] Next, with reference to Figure 2, the members provided at the bottom of the container body 2 will be described. Figure 2 is a bottom view of the substrate storage container shown in Figure 1. As shown in Figure 2, the substrate storage container 1 further includes a positioning member 5 and a structure 6.

[0026] The positioning member 5 is a member used by an external device such as a load port to position the substrate storage container 1 (container body 2). The positioning member 5 is provided on the bottom plate 22 so as to protrude downward from the bottom surface 22a. The positioning member 5 has a V-shaped surface that is recessed in a V-shape toward (upward) the bottom plate 22. The V-shaped surface may be subjected to a surface treatment to improve wear resistance and sliding properties as needed. In this embodiment, the substrate storage container 1 includes three positioning members 5. Each positioning member 5 may be integrally formed with the container body 2 by insert molding, or it may be assembled to the container body 2 in an assembly type. Examples of constituent materials for each positioning member 5 include thermoplastic resins such as polycarbonate, cycloolefin polymer, liquid crystal polymer, polybutylene terephthalate, and polyether ether ketone.

[0027] Structure 6 is a component for adding various functions to the substrate storage container 1. Structure 6 is an integrally molded product and is provided on the container body 2. Structure 6 is manufactured, for example, by resin molding (injection molding). Structure 6 is integrally formed on the container body 2 by insert molding. Examples of constituent materials for structure 6 include thermoplastic resins such as polycarbonate, cycloolefin polymer, liquid crystal polymer, polybutylene terephthalate, and polyether ether ketone.

[0028] Next, the structure 6 will be described in detail with further reference to Figures 3 to 6. Figure 3 is a perspective view of the structure shown in Figure 2. Figure 4 is a front view of the structure shown in Figure 2. Figure 5 is a rear view of the structure shown in Figure 2. Figure 6 is a side view of the structure shown in Figure 2. As shown in Figures 3 to 6, the structure 6 includes a base 61, a fixing part 62, a detection part 63, a support part 64, and a connecting plate 65. The structure 6 has a symmetrical shape.

[0029] The base portion 61 is a plate-like part that is joined to the bottom plate 22. The center of the rear end of the base portion 61 in the left-right direction is recessed in a rectangular shape toward the front. The base portion 61 has a surface 61a (first surface) and a surface 61b (second surface). Surface 61a is the surface that is embedded in the bottom plate 22. Surface 61b is the surface opposite to surface 61a. Surfaces 61a and 61b intersect (in this case, perpendicular to) the vertical direction.

[0030] A recess 61c (first recess) is provided in surface 61a. The recess 61c is recessed from surface 61a toward surface 61b. In this embodiment, surface 61a is provided with two recesses 61c, each recess 61c being a groove that traverses surface 61a in the left-right direction. The two recesses 61c are arranged side by side in the front-rear direction. The cross-section of each recess 61c intersecting the left-right direction has a rectangular shape. Each recess 61c is filled with resin that constitutes the base plate 22.

[0031] A recess 61d (second recess) is provided on surface 61b. The recess 61d is recessed from surface 61b toward surface 61a. The recess 61d is not provided on the back side of the area on surface 61a where the recess 61c is provided. In other words, the area on surface 61b where the recess 61d is provided is located in a different position from the area on surface 61a where the recess 61c is provided in plan view. In this embodiment, four recesses 61d are provided on surface 61b, and each recess 61d is provided along the periphery of the base portion 61. Specifically, the four recesses 61d are provided at each of the four corners of the base portion 61. Each recess 61d has an L-shape in plan view. Each recess 61d is filled with the resin that constitutes the bottom plate 22. In other words, the four corners of the base portion 61 are embedded in the bottom plate 22.

[0032] The fixing portion 62 is the part for fixing the substrate storage container 1 to an external device. The fixing portion 62 is positioned spaced apart from the base portion 61 in the vertical direction. The fixing portion 62 has a plate-like shape facing the surface 61b (base portion 61) in the vertical direction. In plan view, the outer shape of the fixing portion 62 is rectangular. The fixing portion 62 is positioned substantially parallel to the base portion 61. The fixing portion 62 has a front end 62a (first end) and a rear end 62b (second end), which are the ends of the fixing portion 62 in the front-rear direction. The fixing portion 62 is provided with a through hole 62c that penetrates the fixing portion 62 in the vertical direction. The through hole 62c is an elongated hole extending in the front-rear direction. As shown in Figure 6, a space V is provided between the fixing portion 62 and the base portion 61.

[0033] The detection unit 63 is the part for an external device to detect the substrate housing container 1. The detection unit 63 includes a pair of detection bodies 63a (first detection body, second detection body). Each detection body 63a has a rectangular plate shape that extends in the front-rear direction. The pair of detection bodies 63a are arranged so as to sandwich the fixing part 62 in the left-right direction. The length of each detection body 63a in the front-rear direction is longer than the length of the fixing part 62 in the front-rear direction. Specifically, each detection body 63a extends in the front-rear direction from in front of the front end 62a to behind the rear end 62b.

[0034] Each sensing element 63a has a sensing surface 63b. The sensing surface 63b is the surface facing downwards when the structure 6 is joined to the bottom plate 22. The sensing surface 63b is substantially parallel to the upper surface of the fixing part 62 (the surface facing surface 61b). The sensing surface 63b functions as a sensing pad that is detected by an external device.

[0035] The detection body 63a has two edges in the left-right direction, and an inner edge 63c and an outer edge 63d that extend in the front-back direction. The inner edge 63c is closer to the fixing portion 62 than the outer edge 63d in the left-right direction.

[0036] The support portion 64 is the part that supports the fixing portion 62 and the detection portion 63. The support portion 64 includes a wall portion 64a (first wall portion), a wall portion 64b (second wall portion), a pair of side wall portions 64c, and a pair of side wall portions 64d. The wall portions 64a and 64b are provided on the base portion 61 so as to sandwich the fixing portion 62 in the front-rear direction. The wall portions 64a and 64b face each other in the front-rear direction and are arranged substantially parallel to each other.

[0037] The wall portion 64a supports the fixing portion 62 at its front end 62a. The wall portion 64a is erected on the surface 61b and has a rectangular plate shape extending in the left-right direction. In the left-right direction, the wall portion 64a extends from the outer edge 63d of the right detection body 63a to the outer edge 63d of the left detection body 63a. In the up-down direction, the wall portion 64a extends from the surface 61b to the front end 62a.

[0038] As shown in Figure 4, the wall portion 64a is provided with holes 64e and 64f. Holes 64e and 64f penetrate the wall portion 64a in the front-to-back direction. Hole 64e is provided on the edge of the wall portion 64a in the vertical direction, specifically on the edge (upper edge) that is in contact with the base portion 61. In this embodiment, the wall portion 64a is provided with three holes 64e. The three holes 64e are arranged in the left-to-right direction. Hole 64e is provided in the center of each region obtained by dividing the wall portion 64a into three equal parts in the left-to-right direction.

[0039] The holes 64f are provided on the edge of the wall portion 64a in the vertical direction, specifically on the edge (lower edge) that is in contact with the detection body 63a. In this embodiment, the wall portion 64a is provided with two holes 64f. The two holes 64f are provided at both ends of the wall portion 64a in the left-right direction. In other words, the holes 64f are located at the corners defined by the side wall portion 64c and the detection body 63a. The two holes 64f are provided so as to sandwich the connecting plate 65 in the left-right direction.

[0040] The wall portion 64b supports the fixing portion 62 at its rear end 62b. The wall portion 64b is erected on the surface 61b and has a rectangular plate shape extending in the left-right direction. In the left-right direction, the wall portion 64b extends from the inner edge 63c of the right detection body 63a to the inner edge 63c of the left detection body 63a. In the up-down direction, the wall portion 64b extends from the surface 61b to the rear end 62b. The wall portion 64b does not have any holes that penetrate it in the front-rear direction.

[0041] As shown in Figure 5, the wall portion 64b is composed of a first portion 64g and a pair of second portions 64h. The first portion 64g is located in the center in the left-right direction. The first portion 64g is connected to the rear end 62b and extends along the entire length of the rear end 62b in the left-right direction. In other words, the length of the first portion 64g in the left-right direction is substantially equal to the length of the fixing portion 62 in the left-right direction. The first portion 64g protrudes downward from the fixing portion 62. The first portion 64g has a sensing surface 64j. The sensing surface 64j is located at the tip of the first portion 64g and faces downward. The sensing surface 64j and the pair of sensing surfaces 63b are located on the same plane. The sensing surface 64j, like the sensing surface 63b, functions as a sensing pad that is detected by an external device.

[0042] A pair of second portions 64h are provided so as to sandwich the first portion 64g in the left-right direction, and extend away from each other from both ends of the first portion 64g in the left-right direction. The length of each second portion 64h in the vertical direction is shorter than the length of the first portion 64g in the vertical direction, and each second portion 64h extends in the vertical direction from the surface 61b to the fixing portion 62.

[0043] Each side wall portion 64c is erected on the surface 61b and has a rectangular plate-like shape extending in the front-rear direction. A pair of side wall portions 64c face each other in the left-right direction and are arranged substantially parallel to each other. The pair of side wall portions 64c are connected to both ends of the wall portion 64a in the left-right direction. Specifically, the right side wall portion 64c is connected to the right end of the wall portion 64a and extends forward from the right end of the wall portion 64a to the front end of the right-side detection body 63a. The left side wall portion 64c is connected to the left end of the wall portion 64a and extends forward from the left end of the wall portion 64a to the front end of the left-side detection body 63a. Each side wall portion 64c extends from the surface 61b to the detection body 63a in the vertical direction and is connected to the outer edge 63d of the detection body 63a. The wall portion 64a and the pair of side wall portions 64c form a U-shape in plan view.

[0044] Each side wall portion 64d is erected on the surface 61b and has a rectangular plate shape extending in the front-rear direction. A pair of side wall portions 64d face each other in the left-right direction. The pair of side wall portions 64d are inclined to move away from each other in the vertical direction as they move from the base portion 61 toward the detection body 63a. The pair of side wall portions 64d are connected to both ends of the wall portion 64b in the left-right direction. Specifically, the right side wall portion 64d is connected to the right end of the wall portion 64b and extends from the right end of the wall portion 64b toward the rear end of the right detection body 63a. The left side wall portion 64d is connected to the left end of the wall portion 64b and extends from the left end of the wall portion 64b toward the rear end of the left detection body 63a. Each side wall portion 64d extends from the surface 61b toward the detection body 63a in the vertical direction and is connected to the inner edge 63c of the detection body 63a. The wall portion 64b and the pair of side wall portions 64d form a U-shape in plan view.

[0045] The support portion 64 supports the detection portion 63 by supporting the portion of the detection body 63a that extends forward of the front end 62a of the fixed portion 62 with the side wall portion 64c, and supporting the portion of the detection body 63a that extends backward of the rear end 62b of the fixed portion 62 with the side wall portion 64d.

[0046] The connecting plate 65 is a plate-shaped portion that connects the pair of detection bodies 63a. The connecting plate 65 also functions as a front retainer that fixes the substrate housing container 1 to an external device. The connecting plate 65 has a rectangular shape in plan view and extends in the left-right direction. The rear end of the connecting plate 65 is connected to the lower end of the wall portion 64a, and the connecting plate 65 is supported by the wall portion 64a. The connecting plate 65 is connected to the front end 62a and extends from the front end 62a in the opposite direction (forward) to the rear end 62b in the front-rear direction. In the left-right direction, the connecting plate 65 extends from near the right end to near the left end of the wall portion 64a.

[0047] The left and right ends of the connecting plate 65 are connected to the surfaces (top surfaces) of the pair of detection bodies 63a that are opposite to the detection surfaces 63b. The connecting plate 65 has a pair of ends 65a, which are the ends of the connecting plate 65 in the left-right direction. The ends 65a are spaced apart from the side wall portion 64c in the left-right direction. When viewed from the front, a hole 64f is located between the end 65a and the side wall portion 64c. In the vertical direction, the length in the left-right direction of the portion where the detection body 63a and the connecting plate 65 overlap is substantially the same as the length (thickness) of the detection body 63a (or connecting plate 65) in the vertical direction.

[0048] Next, the method for manufacturing the substrate housing container 1 will be explained. First, the structure 6 is fabricated. The structure 6 is fabricated by resin molding (injection molding). Specifically, a fixed mold is combined with a front sliding structure, sliding structures on both sides, and a movable mold. Molten resin material is injected into the cavity space, and the structure 6 is fabricated by cooling and solidifying the resin material.

[0049] The fixed type has a shape corresponding to the shape of the surface 61a of the base 61. The movable type is movable in the vertical direction relative to the fixed type. The movable type has a shape corresponding to the part of the structure 6 that does not overlap with other parts when viewed from below (the part where no undercut shape occurs). For example, the space enclosed by the wall 64b, the pair of side wall 64d and the base 61 does not have an undercut shape, so it is formed by the movable type. The front sliding structure is a sliding structure for forming the space enclosed by the wall 64a, the pair of side wall 64c, the connecting plate 65 and the base 61. The lateral sliding structure is a sliding structure for forming the space sandwiched between the detection body 63a and the base 61, and space V.

[0050] Next, a pair of support members 4, a positioning member 5, and a structural element 6 are placed in a mold used for resin molding (injection molding) of the container body 2. Then, with the pair of support members 4, the positioning member 5, and the structural element 6 in place in the mold, molten resin material is injected into the cavity space within the mold. The container body 2 is then formed as the resin material cools and solidifies. Thus, the substrate storage container 1 is manufactured.

[0051] In the substrate storage container 1 described above, since the structure 6 is a single molded product, the relative positional relationship between the base 61 and the detection unit 63, and the relative positional relationship between the base 61 and the fixing unit 62 can be fixed. Therefore, compared to the case where the base, detection unit, and fixing unit are composed of two or more parts that engage with each other, the positions of the detection unit 63 and the fixing unit 62 can be stabilized. As a result, the substrate storage container 1 can be stably fixed to an external device.

[0052] Since the structure 6 is a single molded product, the number of parts can be reduced compared to cases where the structure is composed of two or more interlocking parts, thereby reducing the burden of managing the number of parts. In the substrate storage container 1, the structure 6 and the container body 2 are integrally formed by insert molding. As a result, the manufacturing of the substrate storage container 1 can be simplified.

[0053] Since the fixing portion 62 is positioned spaced apart from the base portion 61 in the vertical direction, a space V is formed between the fixing portion 62 and the base portion 61. The fixing portion 62 is provided with a through hole 62c. For example, if the external device is equipped with a fastener having a shaft portion that moves back and forth in the vertical direction and a claw that extends from the tip of the shaft portion in a direction intersecting the vertical direction, the fastener can be inserted through the through hole 62c, and with the claw positioned in the space, the shaft portion can be moved in a direction that pulls it out of the through hole 62c, thereby hooking the claw onto the fixing portion 62. This makes it possible to stably fix the substrate storage container 1 to the external device.

[0054] The external device can detect that the substrate storage container 1 has been placed on the external device by detecting a pair of detection elements 63a.

[0055] Since holes 64e and 64f are provided in the wall portion 64a, the ventilation of the space enclosed by the pair of detection bodies 63a and connecting plate 65, the base portion 61, the wall portion 64a, and the pair of side wall portions 64c is improved. Therefore, when the substrate storage container 1 is cleaned, the possibility of water remaining in the space is reduced. As a result, the drying performance of the substrate storage container 1 can be improved.

[0056] A recess 61c is provided on surface 61a, and a recess 61d is provided on surface 61b. When the container body 2 is resin-molded with the structure 6 placed in a mold used to resin-mold the container body 2, and the base 61 and bottom plate 22 are joined together, molten resin material may enter the recesses 61c and 61d. If the resin material solidifies in this state and the container body is molded, the container body 2 will include portions that fill the recesses 61c and 61d. Therefore, when a force is applied to the structure 6 that pushes it toward the container body 2, even if the joint between the base 61 and the bottom plate 22 is insufficient, the structure 6 will come into contact with the portion that fills the recess 61c, thus restricting the movement of the structure 6. Similarly, when a force is applied to the structure 6 that pulls it away from the container body 2, even if the joint between the base 61 and the bottom plate 22 is insufficient, the structure 6 will come into contact with the portion that fills the recess 61d, thus restricting the movement of the structure 6. Therefore, the possibility of the structure 6 detaching from the container body 2 can be reduced.

[0057] The recess 61c is a groove that crosses the surface 61a, and the recess 61d is provided along the periphery of the base 61. Since the shapes of the recesses 61c and 61d are simple and they are provided in positions that do not overlap with other parts of the structure 6 in the vertical direction, the structure of the mold used to manufacture the structure 6 can be simplified.

[0058] The pair of side wall portions 64d are inclined to move away from each other in the vertical direction as they move from the base portion 61 toward the sensing body 63a. Therefore, the opposing surfaces of the pair of side wall portions 64d function as a draft angle, allowing the structure 6 to be easily removed from the mold (movable mold) when it is manufactured.

[0059] The substrate storage container relating to this disclosure is not limited to the embodiments described above.

[0060] The number, shape, and arrangement of the recesses 61c are not limited to the above embodiment, as long as the resin material can enter during the resin molding of the container body 2. For example, the recesses 61c may extend in a direction different from the left-right direction. The recesses 61c do not have to traverse the surface 61a. The recesses 61c do not have to be grooves.

[0061] The number, shape, and arrangement of the recesses 61d are not limited to the above embodiment, as long as the resin material can enter during the resin molding of the container body 2. For example, the recesses 61d may be provided on the periphery of the base 61 at a position different from the corner of the surface 61b. The recesses 61d do not have to be provided on the periphery of the base 61, and may be provided inside the periphery of the base 61.

[0062] Surface 61a does not necessarily have to have a recess 61c, and surface 61b does not necessarily have to have a recess 61d.

[0063] The number of holes 64e provided in the wall portion 64a is not limited to three. There may be one hole 64e, two holes 64e, or four or more holes 64e. Similarly, the wall portion 64a may have only one hole 64f, or three or more holes 64f. The holes 64e and 64f do not necessarily have to be provided on both edges of the wall portion 64a in the vertical direction.

[0064] The wall portion 64a does not necessarily have to have a hole 64e, nor does it necessarily have to have a hole 64f.

[0065] The structure 6 does not necessarily have to include the connecting plate 65. The pair of side wall portions 64c does not necessarily have to be provided, and the pair of side wall portions 64d does not necessarily have to be provided. [Explanation of Symbols]

[0066] 1... Circuit board storage container, 2... Container body, 6... Structure, 20... Storage space, 22... Bottom plate, 61... Base, 61a... Surface (first surface), 61b... Surface (second surface), 61c... Recess (first recess), 61d... Recess (second recess), 62... Fixing part, 62a... Front end (first end), 62b... Rear end (second end), 62c... Through hole, 63... Detection part, 63a... Detection body (first detection body, second detection body), 64a... Wall part (first wall part), 64b... Wall part (second wall part), 64e... Hole, 64f... Hole, 65... Connecting plate.

Claims

1. A circuit board storage container, A container body having a bottom plate that defines a storage space for housing circuit boards, A structure which is an integrally molded product provided on the container body, Equipped with, The aforementioned structure is The base portion is joined to the bottom plate, The aforementioned substrate housing container includes a fixing part for fixing it to an external device, The external device includes a detection unit for detecting the substrate housing container, Equipped with, The detection unit is a substrate storage container having a first detection body and a second detection body arranged in a direction along the bottom surface of the bottom plate and positioned to sandwich the fixing part.

2. The base portion has a first surface embedded in the bottom plate and a second surface opposite to the first surface. The fixing portion is a plate-shaped member facing the second surface in a first direction intersecting the second surface, and has a first end and a second end which are both ends in the second direction intersecting the first direction. The aforementioned structure is A first wall portion is provided on the base and supports the fixing portion at the first end, The base is provided with a second wall portion that supports the fixing portion at the second end, The substrate storage container according to claim 1, wherein the fixing portion is provided with a through hole that penetrates the fixing portion in the first direction.

3. The substrate storage container according to claim 2, wherein the direction along the bottom surface of the bottom plate is a third direction that intersects the first direction and the second direction.

4. The structure further comprises a connecting plate that connects the first detection body and the second detection body and is supported by the first wall, The connecting plate extends from the first end so as to move away from the second end in the second direction, The substrate storage container according to claim 3, wherein the first wall portion is provided with a hole that penetrates the first wall portion in the second direction.

5. The first surface is provided with a first recess that extends from the first surface toward the second surface, The substrate storage container according to any one of claims 2 to 4, wherein the second surface is provided with a second recess that extends from the second surface toward the first surface.

6. The first recess is a groove that crosses the first surface, The substrate storage container according to claim 5, wherein the second recess is provided along the periphery of the base.