Fluid supply module

Abstract

Fluid flow control devices are important components for delivering process fluids to semiconductor manufacturing. Such fluid flow control devices are formed using a variety of fluid flow components, including fluid flow components that mix fluid flows. Fluid flow components that mix flows utilize a mixing element configured to receive two or more process fluid streams via a fluid inlet, mix the fluid flows within the mixing element, and deliver the mixed fluid to an outlet of a downstream fluid flow component or device for controlling fluid flow rate.

Description

Technical Field

[0001] [Cross - Reference to Related Applications] This application claims the benefit of U.S. Provisional Patent Application No. 63 / 304,171, filed on January 28, 2022, and the entire disclosure of the U.S. Provisional Patent Application is incorporated herein by reference in its entirety.

Background Art

[0002] Fluid control is one of the important technologies in semiconductor chip manufacturing. Devices for controlling the flow of fluids are important for supplying the flow of process fluids for semiconductor manufacturing and other industrial processes. Such devices are used to measure and accurately control the flow of fluids for various applications. This control depends on devices designed for improving packaging density and functional performance.

[0003] As chip manufacturing technology improves, component sizes are getting smaller, and the packaging requirements for devices that control flow are becoming more stringent. The improvement of functional performance and the reduction of space requirements are the driving forces for improvements in all aspects of flow control devices. There is a need for improved methods and devices to enhance the functional performance of flow control devices.

Summary of the Invention

[0004] This technology is directed to a fluid supply module including a flow control device. This flow control device includes a flow component including a mixing element that mixes two or more types of fluids and supplies the resulting mixed fluid to a process chamber. The flow control device can incorporate a number of fluid flow components to perform a wide range of control functions other than mixing. When mixing is required, it is desirable to achieve as complete a mixing as possible to ensure that the supplied fluid mixture is homogeneous and behaves in a predictable manner. Such devices are used in a wide range of processes such as semiconductor chip manufacturing and solar panel manufacturing.

[0005] In one embodiment, the present invention is an article processing system. The system includes a first fluid supply unit configured to supply a first process fluid, a second fluid supply unit configured to supply a second process fluid, a process chamber configured to process articles, and a fluid supply module. The fluid supply module includes a first fluid inlet fluidically coupled to the first fluid supply unit, a second fluid inlet fluidically coupled to the second fluid supply unit, an outlet fluidically coupled to the process chamber, fluid passages extending from the first and second fluid inlets to the outlets, and a first flow component. The first flow component has a component body, a first port, a second port, and a third port. The first, second, and third ports are formed in the component body, the first flow path extends from the first port to a joint, the second flow path extends from the second port to a joint, and the third flow path extends from the joint to the third port. The first, second, and third flow paths each form part of the fluid passage. The first flow component further has a mixing element, which is located at the joint of the first flow component. The mixing element has a first fluid inlet, a second fluid inlet, and a fluid outlet, the first fluid inlet being fluidically coupled to a first port, the second fluid inlet being fluidically coupled to a second port, and the fluid outlet being fluidically coupled to a third port.

[0006] In another embodiment, the present invention is a fluid flow component. The fluid flow component has a component body, a first port, a second port, and a third port. Each of the first, second, and third ports is formed in the component body. The first flow path extends from the first port to a joint. The second flow path extends from the second port to a joint. The third flow path extends from the joint to a third port. A mixing element is located at the joint. The mixing element has a first fluid inlet fluidically coupled to the first port, a second fluid inlet fluidically coupled to the second port, and a fluid outlet fluidically coupled to the third port.

[0007] In yet another embodiment, the present invention is a mixing element. The mixing element has a tubular body extending along the longitudinal axis of the mixing element from an open end to a closed end. The tubular body has an outer surface and an inner surface. The mixing element further includes a first fluid inlet formed through the tubular body from the outer surface to the inner surface, and a second fluid inlet formed through the tubular body from the outer surface to the inner surface. A fluid outlet is formed by the open end of the tubular body.

[0008] In another embodiment, the present invention is a method for mixing process fluids. A first fluid supply unit is configured to supply a first process fluid, and a second fluid supply unit is configured to supply a second process fluid. The first and second process fluids flow into a mixing element of a first flow component. The first and second process fluids flow through first and second fluid inlets formed in the tubular body of the mixing element. The first and second fluid inlets extend along first and second inlet axes perpendicular to the longitudinal axis of the mixing element. The first and second process fluids are mixed within the tubular body of the mixing element to form a fluid mixture. The fluid mixture flows through an open end of the tubular body, which forms the outlet of the mixing element.

[0009] Further areas of application of this technology will become apparent from the detailed description provided below. Please understand that the detailed description and specific examples, while illustrating preferred implementations, are for illustrative purposes only and are not intended to limit the scope of this technology. [Brief explanation of the drawing]

[0010] The inventions disclosed herein will be better understood from the detailed description and accompanying drawings.

[0011] [Figure 1] Figure 1 is a schematic diagram of a system for manufacturing semiconductor equipment using one or more flow control devices.

[0012] [Figure 2]FIG. 2 is a perspective view of a fluid supply module including a plurality of flow control devices that can be used in the process of FIG. 1.

[0013] [Figure 3] FIG. 3 is a perspective view of a flow component that can be used in the fluid supply module of FIG. 2.

[0014] [Figure 4] FIG. 4 is an exploded perspective view of the flow component of FIG. 3.

[0015] [Figure 5] FIG. 5 is a cross-sectional view of the flow component of FIG. 3 taken along line 5-5.

[0016] [Figure 6] FIG. 6 is a perspective view of a mixing element that can be used in the flow component of FIG. 3.

[0017] [Figure 7] FIG. 7 is a rear perspective view of the mixing element of FIG. 6.

[0018] [Figure 8] FIG. 8 is a left side view of the mixing element of FIG. 6.

[0019] [Figure 9] FIG. 9 is a cross-sectional view of the mixing element taken along line 9-9 of FIG. 7.

[0020] [Figure 10] FIG. 10 is a perspective view of another embodiment of a mixing element that can be used in the flow component of FIG. 3.

[0021] [Figure 11] FIG. 11 is a rear perspective view of the mixing element of FIG. 10.

[0022] [Figure 12]Figure 12 is a left side view of the mixing element shown in Figure 10.

[0023] [Figure 13] Figure 13 is a cross-sectional view of the mixing element taken along line 13-13 in Figure 11.

[0024] [Figure 14] Figure 14 is a perspective view of another embodiment of a mixing element that may be used in the flow component of Figure 3.

[0025] [Figure 15] Figure 15 is a rear perspective view of the mixing element shown in Figure 14.

[0026] [Figure 16] Figure 16 is a left side view of the mixing element shown in Figure 14.

[0027] [Figure 17] Figure 17 is a cross-sectional view of the mixing element taken along line 17-17 in Figure 15.

[0028] [Figure 18] Figure 18 is a perspective view of another embodiment of a mixing element that may be used in the flow component of Figure 3.

[0029] [Figure 19] Figure 19 is a rear perspective view of the mixing element shown in Figure 18.

[0030] [Figure 20] Figure 20 is a left side view of the mixing element shown in Figure 18.

[0031] [Figure 21] Figure 21 is a cross-sectional view of the mixing element taken along line 21-21 in Figure 19.

[0032] [Figure 22]Figure 22 is a perspective view of another embodiment of a mixing element that may be used in the flow component of Figure 3.

[0033] [Figure 23] Figure 23 is a rear perspective view of the mixing element shown in Figure 22.

[0034] [Figure 24] Figure 24 is a left side view of the mixing element shown in Figure 22.

[0035] [Figure 25] Figure 25 is a cross-sectional view of the mixing element taken along line 25-25 in Figure 23.

[0036] [Figure 26] Figure 26 is a perspective view of another embodiment of a mixing element that may be used in the flow component of Figure 3.

[0037] [Figure 27] Figure 27 is a rear perspective view of the mixing element shown in Figure 26.

[0038] [Figure 28] Figure 28 is a left side view of the mixing element shown in Figure 26.

[0039] [Figure 29] Figure 29 is a cross-sectional view of the mixing element taken along line 29-29 in Figure 28.

[0040] [Figure 30] Figure 30 is a perspective view of another embodiment of a mixing element that may be used in the flow component of Figure 3.

[0041] [Figure 31] Figure 31 is a rear perspective view of the mixing element shown in Figure 30.

[0042] [Figure 32]Figure 32 is a left side view of the mixing element shown in Figure 30.

[0043] [Figure 33] Figure 33 is a cross-sectional view of the mixing element taken along line 33-33 in Figure 31.

[0044] [Figure 34] Figure 34 is an exploded perspective view of another embodiment of a flow component that may be used in the fluid supply module of Figure 2.

[0045] [Figure 35] Figure 35 is a cross-sectional view of the flow component in Figure 34 in the first state.

[0046] [Figure 36] Figure 36 is a cross-sectional view of the flow component in Figure 34 in the second state.

[0047] [Figure 37] Figure 37 is an exploded perspective view of another embodiment of a flow component that may be used in the fluid supply module of Figure 2.

[0048] [Figure 38] Figure 38 is a cross-sectional view of the flow component shown in Figure 37.

[0049] [Figure 39A] Figure 39A is a detailed view of region 39A shown in Figure 38, where the flow component is in the first state.

[0050] [Figure 39B] Figure 39B is a detailed view of region 39A shown in Figure 38, where the flow component is in the second state.

[0051] All drawings are schematic and not necessarily to scale. Features indicated by numbers in one drawing but not in another are considered the same feature unless otherwise noted in this book. [Modes for carrying out the invention]

[0052] The description of exemplary embodiments relating to the principles of the present invention is intended to be read in conjunction with the accompanying drawings, which should be considered as part of the entire description. In the description of embodiments of the invention disclosed herein, references to orientation and direction are intended solely for explanatory convenience and are not intended in any way to limit the invention. Relative terms such as “down,” “up,” “horizontal,” “vertical,” “up,” “down,” “up,” “down,” “left,” “right,” “top,” and “bottom,” along with their derived terms (e.g., “horizontally,” “downward,” “upwards,” etc.), should be understood to refer to directions as described or shown in the illustrated drawings. These relative terms are for explanatory convenience only and do not require that the device be made or operated in a particular orientation unless explicitly stated so. Terms such as “attached,” “fixed,” “connected,” “linked,” “interconnected,” and similar terms refer to relationships in which structures are fixed or attached to one another, directly or indirectly through intermediate structures, including movable or rigid attachments or relationships, unless otherwise explicitly stated. Furthermore, the features and advantages of the present invention will be described with reference to preferred embodiments. It is therefore clear that the present invention should not be limited to such preferred embodiments that describe possible non-limiting combinations of features existing alone or in combination with other features, and the scope of the present invention is defined by the claims appended herein.

[0053] This invention is directed towards mixing elements and associated flow components used in fluid supply modules and systems. Semiconductor manufacturing is one of the industries that demands high performance in fluid flow control. As semiconductor manufacturing technology advances, customers have come to recognize the need for flow control devices with improved functionality and performance. Therefore, fluid mixing must be performed efficiently for a wide range of flows and with high homogeneity in the resulting fluid mixture. This invention enables superior fluid mixing in semiconductor and similar processes.

[0054] Figure 1 is a schematic diagram of an exemplary processing system 1000. The processing system 1000 can utilize multiple flow control devices 100 that are fluidically coupled to the processing chamber 1300. The multiple flow control devices 100 are used to supply one or more different process fluids to the processing chamber 1300. The fluids are supplied by multiple fluid supply devices 1010. As shown, two or more fluid supply devices 1010 can be connected to one flow control device 100. Collectively, the flow control devices 100 belong to a fluid supply module 1400. Optionally, one or more fluid supply modules 1400 may be used in the processing system 1000. The multiple flow control devices 100 are connected to the processing chamber 1300 by an outlet manifold 400. Articles such as semiconductors and integrated circuits may be processed within the processing chamber 1300.

[0055] Valves 1100 isolate each of the flow control devices 100 from the processing chamber 1300, allowing for selective connection or isolation of each of the flow control devices 100 from the processing chamber 1300, facilitating a wide variety of different processing steps. The processing chamber 1300 may include applicators for dispensing process fluids supplied by the multiple flow control devices 100, enabling selective or diffusive distribution of the fluids supplied by the multiple flow control devices 100. Optionally, the processing chamber 1300 may be a vacuum chamber or a tank or solution bath for immersing articles in the fluids supplied by the multiple flow control devices 100. The fluid supply line is formed by a flow path from each fluid supply device to the processing chamber 1300.

[0056] Furthermore, the processing system 1000 may further include a vacuum source or drain 1200 isolated from the processing chamber 1300 by a valve 1100 to allow for the discharge of process fluid or to facilitate purging one or more flow control devices 100. This allows for maintenance, switching of process fluids within the same flow control device 100, or other operations. Optionally, the drain 1200 may be a liquid drain configured to remove liquid from the processing chamber 1300. Alternatively, the drain 1200 may be a vacuum source for removing gas. Optionally, the flow control device 100 may be a mass flow controller, flow splitter, flow combiner, or any other device that controls the flow rate of process fluid within the processing system. Furthermore, the valve 1100 may be incorporated into the flow control device 100 as desired. The processing chamber 1300 may house semiconductor wafers for processing, among other items.

[0057] Processes that may be performed in processing system 1000 may include wet cleaning, photolithography, ion implantation, dry etching, atomic layer etching, wet etching, plasma ashing, rapid thermal annealing, furnace annealing, thermal oxidation, chemical vapor deposition, atomic layer deposition, physical vapor deposition, molecular beam epitaxy, laser lift-off, electrochemical deposition, chemical mechanical polishing, wafer testing, electroplating, or other processes utilizing gases or liquids.

[0058] Figure 2 shows an exemplary fluid supply module 1400 comprising a plurality of flow control devices 100. The fluid supply module 1400 comprises a support structure 1402. The support structure 1402 may be called a base substrate or base plate, and is generally a flat plate or sheet on which one or more flow control devices 100 are mounted. In this embodiment, a plurality of flow control devices 100 are mounted on the support structure. Each of the plurality of flow control devices 100 is modularly designed and comprises a number of individual fluid flow components 110, 120 which are respectively directly or indirectly mounted to the support structure 1402. The support structure 1402 has a top surface 1403 on which the flow control devices 100 are mounted.

[0059] The fluid flow components 110 and 120 include active flow components 120 and passive flow components 110. Passive flow components 110 do not change the fluid flow rate and simply connect one active component to another, or connect an active component to an inlet or outlet. Active flow components 120 change the fluid flow rate, monitor the fluid condition, or perform functions beyond simple fluid transport. Active flow components 120 may include temperature sensors, pressure transducers, mass flow controllers, valves, etc. Further components may be both active and passive depending on their current application in the flow control device 100. For example, a temperature sensor may function as a passive fluid flow component that transmits fluid from one active fluid flow component 120 to another, and may not actually be used for temperature measurement. Thus, a vast number of variations of fluid flow components 110 and 120 are possible, and these fluid flow components 110 and 120 can be used to assemble a wide range of flow control devices 100.

[0060] The fluid supply module 1400 has a plurality of inlets 102 that receive fluid from the fluid supply device 1010 described above. The fluid supply module also has at least one outlet 104 that supplies fluid to the processing chamber 1300. Each flow control device 100 may have one inlet 102 and one outlet 104, or it may have a plurality of inlets 102 or a plurality of outlets 104. Thus, the fluid may flow through a plurality of inlets 102 and be supplied through a single outlet 104, or it may flow through a single inlet 102 and be supplied through a plurality of outlets 104. The same fluid may be supplied to a plurality of inlets 102, or different fluids may be supplied to each inlet 102. The same inlet 102 or outlet 104 may be shared by a plurality of flow control devices 100, or each flow control device 100 may have one or more dedicated inlets 102 and outlets 104.

[0061] Looking at Figures 3 to 5, the fluid flow component 130 is illustrated. In this embodiment, the fluid flow component 130 is a fluid mixer intended to mix two or more fluids and output the fluid mixture. As shown, the fluid flow component 130 is a passive component, but in other configurations it may be configured as an active component that can actively change the fluid flow rate. The fluid flow component 130 has a component body 132, which has a top surface 133, a bottom surface 134, a front surface 135, a rear surface 136, a left surface 137, and a right surface 138. As shown, the rear surface 136 is not flat and has projections extending from adjacent portions of the rear surface 136.

[0062] The top surface 133 of the component body 132 includes a first port 141, a second port 142, and a third port 143. The first and second ports 141 and 142 are configured to receive fluid, while the third port 143 is configured to output fluid. However, in some embodiments, different first, second, and third ports 141, 142, and 143 may function as inlets and outlets. Furthermore, it is conceivable that there be three or more ports to facilitate the combination of two or more fluids or the division into one or more fluids. Each of the ports 141, 142, and 143 has a seal cavity configured to receive a seal for facilitating connection with other components. The component body 132 further includes a plurality of fastener passages 145 to facilitate attachment of the component body 132 to the support structure 1402. Furthermore, the fastener passages 145 can facilitate the attachment of other flow components 110 and 120 to the component body 132. The fastener passage 145 may be a through hole, a threaded hole, or formed in any way that allows for mounting.

[0063] The bottom surface 134 of the component body 132 is configured to physically contact the top surface 1403 of the support structure 1402 when the fluid flow component 130 is attached to the support structure 1402. However, in other embodiments, if the fluid flow component 130 is attached to another fluid flow component 110, 120 and these fluid flow components 110, 120 are directly coupled to the support structure 1402, the top surface 1403 may face the top surface 133.

[0064] The front 135 and left 137 collectively provide a plurality of assembly ports 147. Each assembly port 147 includes a retaining component 148 that provides a fluid-sealing seal to the assembly port 147 and holds any parts attached to the assembly port 147. For example, Figure 4 shows an exploded view of the retaining component 148 removed from the component body 132. A mixing element 200 held by the retaining component 148 is also shown.

[0065] Figure 5 shows a cross-section of the assembled fluid flow component 130. The fluid flow component 130 has first, second, and third flow channels 151, 152, and 153 extending from first, second, and third ports 141, 142, and 143 to the joint 155. The mixing element 200 is located at the joint 155. Thus, fluid can flow from the first port 141 through the first flow channel 151 to the joint 155. Fluid can also flow from the second port 142 through the second flow channel 152 to the joint 155. Fluid can flow from the joint 155 through the third flow channel 153 to the third port 143. The first, second, and third flow channels 151, 152, and 153 merge at the joint 155 to form a T-shape.

[0066] More specifically, the first channel 151 has a first conduit 156, which is immediately adjacent to the joint 155. The second channel 152 has a second conduit 157, which is immediately adjacent to the joint 155. The third channel 153 has a third conduit 158, which is immediately adjacent to the joint 155. The first and second conduits 156 and 157 of the first and second channels 151 and 152 are on the same line, but the third conduit 158 ​​of the third channel 153 is perpendicular to the first and second conduits 156 and 157 of the first and second channels 151 and 152. Thus, the fluid flows along the first and second channels 151 and 152 and merges at the joint 155. Next, the fluid proceeds perpendicularly from the joint 155 through the third conduit 158 ​​of the third flow path 153, and from both the first and second conduits 156 and 157 of the first and second flow paths 151 and 152.

[0067] Check valves 157 are positioned in the first and second flow paths 151 and 152 to prevent backflow of the fluid supplied to the first and second ports 141 and 142. However, check valves 157 may be omitted or different components may be used in place of check valves 157, depending on the specific application of the fluid flow component 130. Each of the check valves 157 is mounted via an assembly port 147 and held by a retaining component 148. To enable the retention of the check valves 157 and the mixing element 200, the retaining component 148 may have threads, and the assembly port 147 may have corresponding threads. Alternatively, other known retaining means may be used as desired.

[0068] The assembly port 147 located on the left side 137 of the component body 132 does not have a component inserted into it, but instead contains a seal 159 to prevent leakage. The seal 159 has no purpose other than sealing the assembly port 147. However, it is possible to utilize one or more assembly ports 147 to allow for additional fluid connections. As shown, each of the mixing element 200, the check valve 157, and the seal 159 engages with an annular rib 149 within the assembly port 147. This annular rib 149 ensures that a seal is achieved and provides axial restraint to the mixing element 200, the check valve 157, and the seal 159. Thus, the annular rib 149 and the corresponding annular groove 150 ensure that the components are properly held within the assembly port 147 and sealed to prevent fluid leakage.

[0069] Referring to Figures 6 to 9, the mixing element 200 is illustrated in more detail. The mixing element 200 has a flange 202 and a tubular body 204. The tubular body 204 extends along the longitudinal axis AA from a closed end 206 to an open end 208. The tubular body 204 further comprises an outer surface 210 and an inner surface 212. Each of the outer surface 210 and the inner surface 212 extends from the closed end 206 to the open end 208. The inner surface 212 has a constant diameter along the longitudinal axis AA. In some embodiments, the diameter of the inner surface 212 may vary. The outer surface 210 of the tubular body 204 has a first sealing surface 214 adjacent to the closed end 206 and a second sealing surface 218 adjacent to the open end 208. The first and second sealing surfaces 214, 218 may have different diameters or the same diameter.

[0070] The groove surface 216 extends between the first and second sealing surfaces 214, 218. The groove surface 216 may have a diameter smaller than the diameters of the first and second sealing surfaces 214, 218. The groove surface 216 does not need to have a constant diameter and may have variation in diameter with respect to the longitudinal axis. In some embodiments, the groove surface 216 may have portions that have the same diameter as either the first or second sealing surfaces 214, 218. In yet other embodiments, the groove surface 216 may be omitted entirely.

[0071] The mixing element 200 comprises a first fluid inlet 220, a second fluid inlet 230, and a fluid outlet 240. The first and second fluid inlets 220 and 230 are formed by penetrating the tubular body 204 from the outer surface 210 to the inner surface 212. More specifically, the first and second fluid inlets 220 and 230 are formed in the grooved surface 216 of the outer surface 210. The fluid outlet 240 is formed by an open end 208. Thus, the fluid flows through the first and second fluid inlets 220 and 230, along the inside of the tubular body 204, and exits through the fluid outlet 240.

[0072] The first and second fluid inlets 220, 230 are formed as slots extending along the first and second inlet axes BB, CC. The slots are elongated in the direction parallel to the longitudinal axis AA, with the length in the direction parallel to the longitudinal axis AA being greater than the height in the direction perpendicular to the longitudinal axis AA. The slots are formed to have first and second inlet surfaces 221, 231. The first and second inlet surfaces 221, 231 have a constant profile extending through the tubular body 204 along the first and second inlet axes BB, CC. Thus, the profiles of the first and second inlet surfaces 221, 231 are constant as they extend along the first and second inlet axes BB, CC. The first and second fluid inlets 220, 230 have the same profile. In other embodiments, the profiles of the first and second fluid inlets 220, 230 do not have to be identical. Alternatively, the first and second fluid inlets 220, 230 may have different profiles to optimize mixing for different fluids at different flow rates or other factors.

[0073] The first and second inlet axes BB and CC are positioned spaced away from the longitudinal axis AA so as not to intersect it. The first and second inlet axes BB and CC are parallel to each other and perpendicular to the longitudinal axis AA. However, the first and second inlet axes BB and CC are located on opposite sides of the longitudinal axis AA. Therefore, the first and second inlet axes BB and CC are perpendicular to the longitudinal axis AA but do not intersect it. In other embodiments, the first and second inlet axes BB and CC are not parallel to each other. In yet another embodiment, the first and second inlet axes BB and CC may not be perpendicular to the longitudinal axis AA. In these embodiments, the first and second inlet axes BB and CC are perpendicular to the longitudinal axis AA and may not be parallel to each other. In these embodiments, it is also possible that the first and second inlet axes BB and CC are not perpendicular to the longitudinal axis AA but are parallel to each other.

[0074] The first and second fluid inlets 220, 230 have first and second inlet surfaces 221, 231, as described above. In this embodiment, the first and second fluid inlets 220, 230 are identical and rotationally symmetric with respect to the longitudinal axis AA. The first and second fluid inlets 220, 230 extend along the longitudinal axis AA to less than half the length of the groove surface 216 and have a height smaller than their width along the longitudinal axis. As is best seen in Figure 9, the upper surface 222 of the first inlet surface 221 joins the inner surface 212. More specifically, the upper surface 222 of the first inlet surface 221 merges with the inner surface 212 at a contact point 223. The upper surface 222 of the first inlet surface 221 is tangential to the inner surface 212, and the two surfaces merge at the contact point 223. In other words, when the upper surface 222 of the first entrance surface 221 is joined to the inner surface 212, there is no discontinuity between the upper surface 222 of the first entrance surface 221 and the inner surface 212.

[0075] The second inlet surface 231 also has an upper surface 232 that joins tangentially to the inner surface 212 and has a corresponding contact. The first inlet surface 221 also has a bottom surface 224, an open end surface 225, and a closed end surface 226. Similarly, the second inlet surface 231 has an upper surface 232, a bottom surface 234, an open end surface 235, and a closed end surface 236. The flange 202 of the mixing element 200 further comprises a flange groove 252 and a flange surface 254. The flange groove 252 is formed in the flange surface 254 to enable assembly of the mixing element 200 with the assembly port 147 and to provide an effective seal of the assembly port 147. More specifically, the flange groove 252 is configured to receive annular ribs 149 within each assembly port 147.

[0076] Referring to Figures 10-13, another embodiment of the mixing element 300 is described. The mixing element 300 is similar to the mixing element 200 except for the following features. The mixing element 300 has a flange 302 and a tubular body 304. The tubular body 304 extends along the longitudinal axis AA from a closed end 306 to an open end 308. The tubular body 304 further comprises an outer surface 310 and an inner surface 312. The outer surface 310 and the inner surface 312 each extend from a closed end 306 to an open end 308. The inner surface 312 has a constant diameter along the longitudinal axis AA. In some embodiments, the diameter of the inner surface 312 may vary. The outer surface 310 of the tubular body 304 has a first sealing surface 314 adjacent to the closed end 306 and a second sealing surface 318 adjacent to the open end 308. The first and second sealing surfaces 314 and 318 may have different diameters or the same diameter.

[0077] The groove surface 316 extends between the first and second sealing surfaces 314, 318. The groove surface 316 may have a diameter smaller than the diameters of the first and second sealing surfaces 318. The groove surface 316 does not need to have a constant diameter and may have variation in diameter with respect to the longitudinal axis. In some embodiments, the groove surface 316 may have portions with the same diameter as one of the first or second sealing surfaces 314, 318. In yet other embodiments, the groove surface 316 may be omitted entirely.

[0078] The mixing element 300 comprises a first fluid inlet 320, a second fluid inlet 330, and a fluid outlet 340. The first and second fluid inlets 320 and 330 are formed by penetrating the tubular body 304 from the outer surface 310 to the inner surface 312. More specifically, the first and second fluid inlets 320 and 330 are formed in the grooved surface 316 of the outer surface 310. The fluid outlet 340 is formed by an open end 308. Thus, the fluid flows through the first and second fluid inlets 320 and 330, along the inside of the tubular body 304, and exits through the fluid outlet 340.

[0079] The first and second fluid inlets 320, 330 are formed as slots extending along the first and second inlet axes BB, CC. The slots are elongated in the direction parallel to the longitudinal axis AA and have a length greater in the direction parallel to the longitudinal axis AA than in the height perpendicular to the longitudinal axis AA. The slots are formed to have first and second inlet surfaces 321, 331. The first and second inlet surfaces 321, 331 have a constant profile that extends through the tubular body 304 along the first and second inlet axes BB, CC. Thus, the profiles of the first and second inlet surfaces 321, 331 are constant and extend along the first and second inlet axes BB, CC. The first and second fluid inlets 320, 330 have the same profile. In other embodiments, the profiles of the first and second fluid inlets 320, 330 do not have to be identical. Alternatively, the first and second fluid inlets 320, 330 may have different profiles to optimize mixing for different fluids at different flow rates or for other factors.

[0080] The first and second inlet axes BB and CC are positioned spaced away from the longitudinal axis AA so as not to intersect it. The first and second inlet axes BB and CC are parallel to each other and perpendicular to the longitudinal axis AA. However, the first and second inlet axes BB and CC are located on opposite sides of the longitudinal axis AA. Therefore, the first and second inlet axes BB and CC are perpendicular to the longitudinal axis AA but do not intersect it. In other embodiments, the first and second inlet axes BB and CC are not parallel to each other. In yet another embodiment, the first and second inlet axes BB and CC may not be perpendicular to the longitudinal axis AA. In these embodiments, the first and second inlet axes BB and CC are perpendicular to the longitudinal axis AA and may not be parallel to each other. In these embodiments, it is also possible that the first and second inlet axes BB and CC are not perpendicular to the longitudinal axis AA but are parallel to each other.

[0081] The first and second fluid inlets 320, 330 have first and second inlet surfaces 321, 331, as described above. In this embodiment, the first and second fluid inlets 320, 330 are identical and rotationally symmetric with respect to the longitudinal axis AA. The first and second fluid inlets 320, 330 extend along the longitudinal axis AA to more than half the length of the groove surface 316 and have a height less than the width along the longitudinal axis. The upper surface 322 of the first inlet surface 321 joins the inner surface 312. More specifically, the upper surface 322 of the first inlet surface 321 merges with the inner surface 312 at a contact point 323. The upper surface 322 of the first inlet surface 321 is in contact with the inner surface 312, and the two surfaces merge at a contact point 323. In other words, between the upper surface 322 and the inner surface 312 of the first entrance surface 321, there is no discontinuity surface because the upper surface 322 joins with the inner surface 312.

[0082] The second inlet surface 331 also has an upper surface 332 that joins tangentially to the inner surface 312 and has a corresponding contact. The first inlet surface 321 also has a bottom surface 324, an open end surface 325, and a closed end surface 326. Similarly, the second inlet surface 331 has an upper surface 332, a bottom surface 334, an open end surface 335, and a closed end surface 336. The flange 302 of the mixing element 300 further comprises a flange groove 352 and a flange surface 354. The flange groove 352 is formed in the flange surface 354 to enable assembly of the mixing element 300 with the assembly port 147 and to provide an effective seal of the assembly port 147. More specifically, the flange groove 352 is configured to receive annular ribs 149 within each assembly port 147.

[0083] Referring to Figures 14 to 17, another embodiment of the mixing element 400 is described. The mixing element 400 is similar to the mixing element 200, except for the following features. The mixing element 400 has a flange 402 and a tubular body 404. The tubular body 404 extends along the longitudinal axis AA from a closed end 406 to an open end 408. The tubular body 404 further comprises an outer surface 410 and an inner surface 412. The outer surface 410 and the inner surface 412 each extend from a closed end 406 to an open end 408. The inner surface 412 has a constant diameter along the longitudinal axis AA. In some embodiments, the diameter of the inner surface 412 may vary. The outer surface 410 of the tubular body 404 has a first sealing surface 414 adjacent to the closed end 406 and a second sealing surface 418 adjacent to the open end 408. The first and second sealing surfaces 414 and 418 may have different diameters or the same diameter.

[0084] The groove surface 416 extends between the first and second sealing surfaces 414, 418. The groove surface 416 may have a diameter smaller than the diameters of the first and second sealing surfaces 414, 418. The groove surface 416 does not need to have a constant diameter and may vary in diameter with respect to the longitudinal axis. In some embodiments, the groove surface 416 may have portions with the same diameter as one of the first or second sealing surfaces 414, 418. In yet another embodiment, the groove surface 416 may be omitted entirely.

[0085] The mixing element 400 comprises a first fluid inlet 420, a second fluid inlet 430, and a fluid outlet 440. The first and second fluid inlets 420 and 430 are formed by penetrating the tubular body 404 from the outer surface 410 to the inner surface 412. More specifically, the first and second fluid inlets 420 and 430 are formed in the grooved surface 416 of the outer surface 410. The fluid outlet 440 is formed by an open end 408. Thus, the fluid flows through the first and second fluid inlets 420 and 430, along the inside of the tubular body 404, and exits through the fluid outlet 440.

[0086] The first and second fluid inlets 420, 430 are formed as slots extending along the first and second inlet axes BB, CC. The slots are elongated in the direction parallel to the longitudinal axis AA and have a length greater in the direction parallel to the longitudinal axis AA than in the height perpendicular to the longitudinal axis AA. The slots are formed to have first and second inlet surfaces 421, 431. The first and second inlet surfaces 421, 431 have a constant profile extending through the tubular body 404 along the first and second inlet axes BB, CC. Thus, the profiles of the first and second inlet surfaces 421, 431 are constant as they extend along the first and second inlet axes BB, CC. The first and second fluid inlets 420, 430 have the same profile. In other embodiments, the profiles of the first and second fluid inlets 420, 430 do not have to be the same. Alternatively, the first and second fluid inlets 420, 430 may have different profiles to optimize mixing for different fluids at different flow rates or for other factors.

[0087] The first and second inlet axes BB, CC are positioned spaced away from the longitudinal axis AA so as not to intersect it. The first and second inlet axes BB, CC are parallel to each other and perpendicular to the longitudinal axis AA. However, the first and second inlet axes BB, CC are located on opposite sides of the longitudinal axis AA. Therefore, the first and second inlet axes BB, CC are perpendicular to the longitudinal axis AA but do not intersect it. In other embodiments, the first and second inlet axes BB, CC are not parallel to each other. In yet another embodiment, the first and second inlet axes BB, CC may not be perpendicular to the longitudinal axis AA. In these embodiments, the first and second inlet axes BB, CC are perpendicular to the longitudinal axis AA and may not be parallel to each other. In these embodiments, it is also possible that the first and second inlet axes BB, CC are not perpendicular to the longitudinal axis AA but are parallel to each other.

[0088] The first and second fluid inlets 420, 430 have first and second inlet surfaces 421, 431, as described above. In this embodiment, the first and second fluid inlets 420, 430 are identical and rotationally symmetric with respect to the longitudinal axis AA. The first and second fluid inlets 420, 430 extend over the entire length of the groove surface 416 along the longitudinal axis AA and have a height smaller than the width along the longitudinal axis. The upper surface 422 of the first inlet surface 421 joins with the inner surface 412. More specifically, the upper surface 422 of the first inlet surface 421 contacts the inner surface 412 at a contact point 423. The upper surface 422 of the first inlet surface 421 contacts the inner surface 412 and the two surfaces join at a contact point 423. In other words, between the upper surface 422 and the inner surface 412 of the first entrance surface 421, the upper surface 422 is joined to the inner surface 412, and there is no discontinuity surface.

[0089] The second inlet surface 431 also has an upper surface 432 that joins tangentially to the inner surface 412 and has a corresponding contact. The first inlet surface 421 also has a bottom surface 424, an open end surface 425, and a closed end surface 426. Similarly, the second inlet surface 431 has an upper surface 432, a bottom surface 434, an open end surface 435, and a closed end surface 436. The flange 402 of the mixing element 400 further comprises a flange groove 452 and a flange surface 454. The flange groove 452 is formed in the flange surface 454 to enable assembly of the mixing element 400 with the assembly port 147 and to provide an effective seal of the assembly port 147. More specifically, the flange groove 452 is configured to receive annular ribs 149 within each assembly port 147.

[0090] Referring to Figures 18 to 21, another embodiment of the mixing element 500 is described. The mixing element 500 is similar to the mixing element 200, except for the following features. The mixing element 500 has a flange 502 and a tubular body 504. The tubular body 504 extends along the longitudinal axis AA from a closed end 506 to an open end 508. The tubular body 504 further comprises an outer surface 510 and an inner surface 512. The outer surface 510 and the inner surface 512 each extend from the closed end 506 to the open end 508. The inner surface 512 has a constant diameter along the longitudinal axis AA. In some embodiments, the diameter of the inner surface 512 may vary. The outer surface 510 of the tubular body 504 has a first sealing surface 514 adjacent to the closed end 506 and a second sealing surface 518 adjacent to the open end 508. The first and second sealing surfaces 514 and 518 may have different diameters or the same diameter.

[0091] The grooved surface 516 extends between the first and second sealing surfaces 514, 518. The grooved surface 516 may have a diameter smaller than the diameters of the first and second sealing surfaces 514, 518. The grooved surface 516 does not need to have a constant diameter and may vary in diameter with respect to the longitudinal axis. In some embodiments, the grooved surface 516 may have portions having the same diameter as either the first or second sealing surfaces 514, 518. In yet other embodiments, the grooved surface 516 may be omitted entirely.

[0092] The mixing element 500 includes a first fluid inlet 520, a second fluid inlet 530, and a fluid outlet 540. The first and second fluid inlets 520 and 530 are formed by penetrating the tubular body 504 from the outer surface 510 to the inner surface 512. More specifically, the first and second fluid inlets 520 and 530 are formed in the grooved surface 516 of the outer surface 510. The fluid outlet 540 is formed by an open end 508. Thus, the fluid flows through the first and second fluid inlets 520 and 530, along the inside of the tubular body 504, and exits through the fluid outlet 540.

[0093] The first and second fluid inlets 520 and 530 are each formed as rows of holes 522 and 532 extending along the first and second inlet axes BB and CC, respectively. The rows of holes 522 and 532 are arranged in a single line parallel to the longitudinal axis AA. Each of the holes 522 of the first fluid inlet 520 has a different diameter and is offset from each other circumferentially such that the circumference 523 of each hole 522 is tangent to axis DD, which is parallel to the longitudinal axis AA. Each of the holes 532 of the second fluid inlet 530 has a different diameter and is offset from each other circumferentially such that the circumference 533 of each hole 532 is tangent to axis EE.

[0094] The holes 522, 532 have first and second inlet surfaces 521, 531 extending from the inner surface 512 to the outer surface 510 of the tubular body 504. The first and second inlet surfaces 521, 531 have a constant profile extending through the tubular body 504 along the first and second inlet axes BB, CC. Thus, the profiles of the first and second inlet surfaces 521, 531 are constant and extend along the first and second inlet axes BB, CC. The first and second fluid inlets 520, 530 have the same profile, including the diameter and arrangement of the holes 522, 532. In other embodiments, the profiles of the first and second fluid inlets 520, 530 do not have to be identical. Instead, the first and second fluid inlets 520, 530 may have different profiles to optimize mixing for different fluids at different flow rates or for other factors.

[0095] The first and second inlet axes BB, CC are positioned spaced away from the longitudinal axis AA so as not to intersect it. The first and second inlet axes BB, CC are parallel to each other and perpendicular to the longitudinal axis AA. However, the first and second inlet axes BB, CC are located on opposite sides of the longitudinal axis AA. Therefore, the first and second inlet axes BB, CC are perpendicular to the longitudinal axis AA but do not intersect it. In other embodiments, the first and second inlet axes BB, CC are not parallel to each other. In yet another embodiment, the first and second inlet axes BB, CC may not be perpendicular to the longitudinal axis AA. In these embodiments, the first and second inlet axes BB, CC are perpendicular to the longitudinal axis AA and may not be parallel to each other. In these embodiments, it is also possible that the first and second inlet axes BB, CC are not perpendicular to the longitudinal axis AA but are parallel to each other.

[0096] The first and second fluid inlets 520, 530 have first and second inlet surfaces 521, 531, as described above. In this embodiment, the first and second fluid inlets 520, 530 are identical and rotationally symmetric with respect to the longitudinal axis AA. The first and second fluid inlets 520, 530 extend along the longitudinal axis AA for most of the length of the groove surface 516. A portion of the first inlet surface 521 of each hole 522 joins the inner surface 512. More specifically, a portion of the first inlet surface 521 joins the inner surface 512 at a contact point 523. Thus, a portion of the first inlet surface 521 is in contact with the inner surface 512, and the two surfaces meet at the contact point 523. In other words, there is no discontinuity between a portion of the first inlet surface 521 and the inner surface 512, since a portion of it joins the inner surface 512.

[0097] The second inlet surface 531 also has a portion that joins tangentially with the inner surface 512 and has a corresponding contact point. The flange 502 of the mixing element 500 further comprises a flange groove 552 and a flange surface 554. The flange groove 552 is formed in the flange surface 554 to enable assembly of the mixing element 500 with the assembly port 147 and to provide an effective seal of the assembly port 147. More specifically, the flange groove 552 is configured to receive annular ribs 149 within each assembly port 147.

[0098] Referring to Figures 22 to 25, another embodiment of the mixing element 600 is described. The mixing element 600 is similar to the mixing element 200, except for the following features. The mixing element 600 has a flange 602 and a tubular body 604. The tubular body 604 extends along the longitudinal axis AA from a closed end 606 to an open end 608. The tubular body 604 further comprises an outer surface 610 and an inner surface 612. Each of the outer surface 610 and the inner surface 612 extends from the closed end 606 to the open end 608. The inner surface 612 has a constant diameter along the longitudinal axis AA. In some embodiments, the diameter of the inner surface 612 may vary. The outer surface 610 of the tubular body 604 has a first sealing surface 614 adjacent to the closed end 606 and a second sealing surface 618 adjacent to the open end 608. The first and second sealing surfaces 614 and 618 may have different diameters or the same diameter.

[0099] The groove surface 616 extends between the first and second sealing surfaces 614 and 618. The groove surface 616 may have a diameter smaller than the diameters of the first and second sealing surfaces 614 and 618. The groove surface 616 does not need to have a constant diameter and may have variation in diameter with respect to the longitudinal axis. In this embodiment, the groove surface 616 comprises a plurality of grooves 617 arranged along the groove surface 616 between the first and second sealing surfaces 614 and 618. As can be seen from the figure, the grooves 617 have a semicircular shape, and the space between the grooves 617 has a constant diameter. The space between the grooves 617 has the same diameter as the first sealing surface 614, but may be any desired diameter.

[0100] The mixing element 600 comprises a first fluid inlet 620, a second fluid inlet 630, and a fluid outlet 640. The first and second fluid inlets 620 and 630 are formed by penetrating the tubular body 604 from the outer surface 610 to the inner surface 612. More specifically, the first and second fluid inlets 620 and 630 are formed as a plurality of holes located in the grooves 617 of the groove surface 616. The fluid outlet 640 is formed by an open end 608. Thus, the fluid flows through the first and second fluid inlets 620 and 630, along the inside of the tubular body 604, and exits through the fluid outlet 640.

[0101] The first and second fluid inlets 620 and 630 are each formed as rows of holes 622 and 632, respectively. One row of holes 622 in the first fluid inlet 620 extends along the first inlet axis BB, and the other row of holes 622 in the first fluid inlet 620 extends along an axis rotationally symmetric with respect to the first inlet axis BB. Similarly, one row of holes 632 in the second fluid inlet 630 extends along the second inlet axis CC, and the other row of holes 632 in the second fluid inlet 630 extends along an axis rotationally symmetric with respect to the second inlet axis CC. The rows of holes 622 and 632 are arranged in a row parallel to the longitudinal axis AA. Each of the holes 622 and 632 in the first and second fluid inlets 620 and 630 has an equal diameter. In other embodiments, the holes 622 and 632 may have different diameters, and the rows may be unequally spaced with respect to the longitudinal axis AA. In yet another embodiment, the hole 622 of the first fluid inlet 620 may be different from the hole 632 of the second fluid inlet 630.

[0102] The holes 622, 632 have first and second inlet surfaces 621, 631 extending from the inner surface 612 to the outer surface 610 of the tubular body 604. The first and second inlet surfaces 621, 631 have a constant profile extending through the tubular body 604 from the outer surface 610 to the inner surface 612. Thus, the profiles of the first and second inlet surfaces 621, 631 are constant extending through the tubular body 604. The first and second fluid inlets 620, 630 have the same profile, including the diameter and arrangement of the holes 622, 632. In other embodiments, the profiles of the first and second fluid inlets 620, 630 do not have to be identical. Instead, the first and second fluid inlets 620, 630 may have different profiles to optimize mixing for different fluids at different flow rates or for other factors. In other embodiments, the holes 622 and 632 do not have to be located within the groove 617, but they may overlap with the groove 617. The holes 622 and 632 are arranged at equal intervals along the longitudinal axis AA, but in other embodiments, they may be at unequal intervals.

[0103] The first and second inlet axes BB and CC are positioned spaced away from the longitudinal axis AA so as not to intersect it. The first and second inlet axes BB and CC are parallel to each other and perpendicular to the longitudinal axis AA. However, the first and second inlet axes BB and CC are located on opposite sides of the longitudinal axis AA. Therefore, the first and second inlet axes BB and CC are perpendicular to the longitudinal axis AA but do not intersect it. In other embodiments, the first and second inlet axes BB and CC are not parallel to each other. In yet another embodiment, the first and second inlet axes BB and CC may not be perpendicular to the longitudinal axis AA. In these embodiments, the first and second inlet axes BB and CC are perpendicular to the longitudinal axis AA and may not be parallel to each other. In these embodiments, the first and second inlet axes BB and CC may not be perpendicular to the longitudinal axis AA but may be parallel to each other.

[0104] The first and second fluid inlets 620, 630 have first and second inlet surfaces 621, 631, as described above. In this embodiment, the first and second fluid inlets 620, 630 are identical and rotationally symmetric with respect to the longitudinal axis AA. The first and second fluid inlets 620, 630 extend over substantially the entire length of the groove surface 616 along the longitudinal axis AA. The flange 602 of the mixing element 600 further comprises a flange groove 652 and a flange surface 654. The flange groove 652 is formed in the flange surface 654 to enable assembly of the mixing element 600 with the assembly port 147 and to provide an effective seal of the assembly port 147. More specifically, the flange groove 652 is configured to receive annular ribs 149 within each assembly port 147.

[0105] Referring to Figures 26-29, another embodiment of the mixing element 700 is described. The mixing element 700 is similar to the mixing element 200, except for the following features. The mixing element 700 has a flange 702 and a tubular body 704. The tubular body 704 extends along the longitudinal axis AA from a closed end 706 to an open end 708. The tubular body 704 further comprises an outer surface 710 and an inner surface 712. Each of the outer surface 710 and the inner surface 712 extends from the closed end 706 to the open end 708. The inner surface 712 has a non-constant diameter along the longitudinal axis AA. In other words, the inner surface 712 has a varying diameter. The inner surface 712 has a first diameter D1 and a second diameter D2, where the first diameter D1 is greater than the second diameter D2. In other embodiments, the inner surface 712 may have two or more different diameters, may vary continuously in at least part, or may have any other desired internal shape. The outer surface 710 of the tubular body 704 has a first sealing surface 714 adjacent to the closed end 706 and a second sealing surface 718 adjacent to the open end 708. The first and second sealing surfaces 714, 718 may have different diameters or the same diameter.

[0106] The grooved surface 716 extends between the first and second sealing surfaces 714, 718. The grooved surface 716 may have a diameter smaller than the diameters of the first and second sealing surfaces 714, 718. The grooved surface 716 does not need to have a constant diameter and may vary in diameter with respect to the longitudinal axis. In some embodiments, the grooved surface 716 may have portions that have the same diameter as either the first or second sealing surfaces 714, 718. In yet another embodiment, the grooved surface 716 may be omitted entirely.

[0107] The mixing element 700 comprises a first fluid inlet 720, a second fluid inlet 730, and a fluid outlet 740. The first and second fluid inlets 720 and 730 are formed penetrating the tubular body 704 from the outer surface 710 to the inner surface 712. More specifically, the first and second fluid inlets 720 and 730 are formed in the grooved surface 716 of the outer surface 710. The fluid outlet 740 is formed by an open end 708. Thus, the fluid flows through the first and second fluid inlets 720 and 730, along the inside of the tubular body 704, and exits through the fluid outlet 740.

[0108] The first and second fluid inlets 720 and 730 are each formed as rows of holes 722 and 732 extending along the first and second inlet axes BB and CC, respectively. The rows of holes 722 and 732 are arranged in a single line parallel to the longitudinal axis AA. Each of the holes 722 of the first fluid inlet 720 has a different diameter and is offset from each other circumferentially such that the circumferential surface 723 of each hole 722 is tangent to axis DD, which is parallel to the longitudinal axis AA. Each of the holes 732 of the second fluid inlet 730 has a different diameter and is offset from each other circumferentially such that the circumference 733 of each hole 732 is tangent to axis EE.

[0109] The holes 722, 732 have first and second inlet surfaces 721, 731 extending from the inner surface 712 to the outer surface 710 of the tubular body 704. The first and second inlet surfaces 721, 731 have a constant profile extending through the tubular body 704 along the first and second inlet axes BB, CC. Thus, the profiles of the first and second inlet surfaces 721, 731 are constant extending along the first and second inlet axes BB, CC. The first and second fluid inlets 720, 730 have the same profile, including the diameter and arrangement of the holes 722, 732. In other embodiments, the profiles of the first and second fluid inlets 720, 730 do not have to be identical. Instead, the first and second fluid inlets 720, 730 may have different profiles to optimize mixing for different fluids at different flow rates or for other factors.

[0110] The first and second inlet axes BB and CC are positioned spaced away from the longitudinal axis AA so as not to intersect it. The first and second inlet axes BB and CC are parallel to each other and perpendicular to the longitudinal axis AA. However, the first and second inlet axes BB and CC are located on opposite sides of the longitudinal axis AA. Therefore, the first and second inlet axes BB and CC are perpendicular to the longitudinal axis AA but do not intersect it. In other embodiments, the first and second inlet axes BB and CC are not parallel to each other. In yet another embodiment, the first and second inlet axes BB and CC may not be perpendicular to the longitudinal axis AA. In these embodiments, the first and second inlet axes BB and CC are perpendicular to the longitudinal axis AA and may not be parallel to each other. In these embodiments, it is also possible that the first and second inlet axes BB and CC are not perpendicular to the longitudinal axis AA but are parallel to each other.

[0111] The first and second fluid inlets 720, 730 have first and second inlet surfaces 721, 731, as described above. In this embodiment, the first and second fluid inlets 720, 730 are identical and rotationally symmetric with respect to the longitudinal axis AA. The first and second fluid inlets 720, 730 extend along the longitudinal axis AA over substantially the entire length of the groove surface 716. A portion of the first inlet surface 721 of each hole 722 joins the inner surface 712. More specifically, a portion of the first inlet surface 721 joins the inner surface 712 at a contact point 723. Thus, a portion of the first inlet surface 721 is in contact with the inner surface 712, and the two surfaces join at the contact point 723. In other words, there is no discontinuity between a portion of the first inlet surface 721 and the inner surface 712, since that portion joins the inner surface 712.

[0112] The second inlet surface 731 also has a portion that tangentially connects with the inner surface 712 and has a corresponding contact. The flange 702 of the mixing element 700 further comprises a flange groove 752 and a flange surface 754. The flange groove 752 is formed in the flange surface 754 to enable assembly of the mixing element 700 with the assembly port 147 and to provide an effective seal of the assembly port 147. More specifically, the flange groove 752 is configured to receive annular ribs 149 within each assembly port 147.

[0113] Referring to Figures 30 to 33, another embodiment of the mixing element 800 is described. The mixing element 800 is similar to the mixing element 200, except for the following features. The mixing element 800 has a flange 802 and a tubular body 804. The tubular body 804 extends along the longitudinal axis AA from a closed end 806 to an open end 808. The tubular body 804 further comprises an outer surface 810 and an inner surface 812. Each of the outer surface 810 and the inner surface 812 extends from the closed end 806 to the open end 808. The inner surface 812 has a non-constant diameter along the longitudinal axis AA. In other words, the inner surface 812 has a varying diameter. The inner surface 812 has a plurality of grooves 817, each groove 817 having a first diameter D1. Between the grooves 817, the inner surface 812 has a second diameter D2, and the first diameter D1 is greater than the second diameter D2. In other embodiments, the inner surface 812 may have two or more different diameters, may vary continuously in at least part, or may have any other desired internal shape. The outer surface 810 of the tubular body 804 has a first sealing surface 814 adjacent to the closed end 806 and a second sealing surface 818 adjacent to the open end 808. The first and second sealing surfaces 814, 818 may have different diameters or the same diameter.

[0114] The grooved surface 816 extends between the first and second sealing surfaces 814, 818. The grooved surface 816 may have a diameter smaller than the diameters of the first and second sealing surfaces 814, 818. The grooved surface 816 does not need to have a constant diameter and may have variation in diameter with respect to the longitudinal axis. In some embodiments, the grooved surface 816 may have portions with the same diameter as one of the first or second sealing surfaces 814, 818. In yet another embodiment, the grooved surface 816 may be omitted entirely.

[0115] The mixing element 800 comprises a first fluid inlet 820, a second fluid inlet 830, and a fluid outlet 840. The first and second fluid inlets 820 and 830 are formed by penetrating the tubular body 804 from the outer surface 810 to the inner surface 812. More specifically, the first and second fluid inlets 820 and 830 are formed in the grooved surface 816 of the outer surface 810. The fluid outlet 840 is formed by an open end 808. Thus, the fluid flows through the first and second fluid inlets 820 and 830, along the inside of the tubular body 804, and exits through the fluid outlet 840.

[0116] The first and second fluid inlets 820 and 830 are each formed as rows of holes 822 and 832 extending along the first and second inlet axes BB and CC, respectively. The rows of holes 822 and 832 are arranged in a single line parallel to the longitudinal axis AA. Each of the holes 822 in the first fluid inlet 820 has the same diameter. Each of the holes 832 in the second fluid inlet 830 has the same diameter. Each of the holes 822 and 832 aligns with one of the grooves 817 on the inner surface 812. In other embodiments, the holes 822 and 832 may be offset from the grooves 817.

[0117] The holes 822, 832 have first and second inlet surfaces 821, 831 extending from the inner surface 812 to the outer surface 810 of the tubular body 804. The first and second inlet surfaces 821, 831 have a constant profile extending through the tubular body 804 along the first and second inlet axes BB, CC. Thus, the profiles of the first and second inlet surfaces 821, 831 are constant and extend along the first and second inlet axes BB, CC. The first and second fluid inlets 820, 830 have the same profile, including the diameter and arrangement of the holes 822, 832. In other embodiments, the profiles of the first and second fluid inlets 820, 830 do not have to be identical. Instead, the first and second fluid inlets 820, 830 may have different profiles to optimize mixing for different fluids at different flow rates or for other factors.

[0118] The first and second inlet axes BB and CC are positioned spaced away from the longitudinal axis AA so as not to intersect it. The first and second inlet axes BB and CC are parallel to each other and perpendicular to the longitudinal axis AA. However, the first and second inlet axes BB and CC are located on opposite sides of the longitudinal axis AA. Therefore, the first and second inlet axes BB and CC are perpendicular to the longitudinal axis AA but do not intersect it. In other embodiments, the first and second inlet axes BB and CC are not parallel to each other. In yet another embodiment, the first and second inlet axes BB and CC may not be perpendicular to the longitudinal axis AA. In these embodiments, the first and second inlet axes BB and CC are perpendicular to the longitudinal axis AA and may not be parallel to each other. In these embodiments, it is also possible that the first and second inlet axes BB and CC are not perpendicular to the longitudinal axis AA but are parallel to each other.

[0119] The first and second fluid inlets 820, 830 have first and second inlet surfaces 821, 831, as described above. In this embodiment, the first and second fluid inlets 820, 830 are identical and rotationally symmetric with respect to the longitudinal axis AA. The first and second fluid inlets 820, 830 extend along the longitudinal axis AA over substantially the entire length of the groove surface 816. A portion of the first inlet surface 821 of each hole 822 joins the inner surface 812. More specifically, a portion of the first inlet surface 821 contacts the inner surface 812 at a contact point. Thus, a portion of the first inlet surface 821 contacts the inner surface 812, and the two surfaces join at a contact point. In other words, there is no discontinuity between the portion of the first inlet surface 821 and the inner surface 812, as that portion joins the inner surface 812.

[0120] The second inlet surface 831 also has a portion that connects tangentially with the inner surface 812 and has a corresponding contact. The flange 802 of the mixing element 800 is formed on the flange surface 854 to enable assembly of the mixing element 800 with the assembly port 147 and to provide an effective seal of the assembly port 147. More specifically, the flange groove 852 is configured to receive annular ribs 149 within each assembly port 147.

[0121] Turning to Figures 34 to 36, another embodiment of the fluid flow component 900 is illustrated. The fluid flow component 900 is similar to the fluid flow component 130 described above. The fluid flow component 900 has a component body 932, which has a top surface 933, a bottom surface 934, a front surface 935, a rear surface 936, a left surface 937, and a right surface 938. As shown, the rear surface 936 is not flat, but instead has projections extending from adjacent portions of the rear surface 936.

[0122] The top surface 933 of the component body 932 includes a first port 941, a second port 942, and a third port 943. The first and second ports 941 and 942 are configured to receive fluid, while the third port 943 is configured to discharge fluid. However, in some embodiments, different versions of the first, second, and third ports 941, 942, and 943 may function as inlets and outlets. Furthermore, it is conceivable that there may be three or more ports to facilitate the combination of two or more fluids, or the division of one or more fluids. Each of the ports 941, 942, and 943 includes a seal cavity configured to receive a seal for facilitating connection with other components. The component body 932 further includes a plurality of fastener passages 945 to facilitate mounting the component body 932 to the support structure 1402. Furthermore, the fastener passages 945 can facilitate the mounting of other flow components 110, 120 to the component body 932. The fastener passage 945 may be a through hole, a threaded hole, or formed in any way that allows for mounting.

[0123] The bottom surface 934 of the component body 932 is configured to physically contact the top surface 1403 of the support structure 1402 when the fluid flow component 930 is attached to the support structure 1402. However, in other embodiments, if the fluid flow component 930 is attached to another fluid flow component 110, 120 and this fluid flow component 110, 120 is directly coupled to the support structure 1402, the top surface 1403 may face the top surface 933.

[0124] The front 935 and left 937 collectively provide a plurality of assembly ports 947. Each of the assembly ports 947 is secured by a retaining component, such as a retaining component 148. The retaining component provides a fluid-tight seal to the assembly port 947 and holds any components installed in the assembly port 947. Figure 34 shows a mixing element 980, a flow control element 990, and a bias element 970. The mixing element 980 is secured to the assembly port 947 by a retaining component. The mixing element 980 is housed within the flow control element 990, and the bias element 970 engages with the flow control element 990.

[0125] Figure 35 shows a cross-section of the assembled fluid flow component 900. The fluid flow component 900 has a third flow path 953 extending from a third port 143 to a joint 955. The mixing element 980 is located at the joint 955. Thus, fluid can flow from the joint 955 through the third flow path 953 to the third port 143. As shown, the flow control element 990 is in a first state. In the first state, the flow control element 990 partially obstructs the fluid inlet 981 of the mixing element 980. This results in improved mixing at low flow rates. The bias element 970 maintains the flow control element 990 in the first state. In the first state, the flow control element 990 biases the mixing element 980 axially and acts as a slide valve that covers the fluid inlet 981 of the mixing element 980. The open end 982 of the mixing element 980 is in contact with the seating surface 992 of the flow control element 990, limiting the volume of fluid that can flow through the fluid inlet 981.

[0126] Figure 36 shows a cross-section of the fluid flow component 900 in the second state. In the second state, the flow control element 990 is moved axially such that the open end 982 of the mixing element 980 no longer contacts the seat surface 992 of the flow control element 990. This compresses the bias element 970, reducing the blockage of the fluid inlet 981 and allowing an increased flow rate through the fluid inlet 981. This increased flow rate is achieved by the increased flow. The flow control element 990 is forced into the second state by the increased pressure drop resulting from the higher flow rate supplied to the fluid flow component 900. This increased pressure drop passing through the flow control element 990 and the mixing element 980 presses the flow control element 990 against the bias element 970, causing the fluid inlet 981 to open.

[0127] Turning to Figures 37 to 39B, yet another embodiment of the fluid flow component 1500 is disclosed. The fluid flow component 1500 is an active component that can actively change the fluid flow rate via an external control input. The fluid flow component 1500 has a component body 1532, which has a top surface 1533, a bottom surface 1534, a front surface 1535, a rear surface 1536, a left surface 1537, and a right surface 1538. As can be seen from the figures, the rear surface 1536 is not flat, but instead has projections extending from adjacent portions of the rear surface 1536.

[0128] The component body 1532 further comprises a plurality of fastener passages 1545 to facilitate attachment of the component body 1532 to the support structure 1402. In addition, the fastener passages 1545 can facilitate attachment of the flow components 110, 120 to the component body 1532. The fastener passages 1545 may be through holes, threaded holes, or formed in any way that allows attachment.

[0129] The bottom surface 1534 of the component body 1532 is configured to physically contact the top surface 1403 of the support structure 1402 when the fluid flow component 1530 is attached to the support structure 1402. However, in other embodiments, if the fluid flow component 1530 is attached to another fluid flow component 110, 120 and these fluid flow components 110, 120 are directly coupled to the support structure 1402, the top surface 1403 may face the top surface 1533.

[0130] The front 1535 and left 1537 collectively provide a plurality of assembly ports 1547. The assembly ports 1547 may be closed by retaining components 1548. The retaining components 1548 help ensure a fluid-tight seal of the assembly ports 1547 and hold any parts installed in the assembly ports 1547. The fluid flow component 1500 also comprises a mixing element 1580, a flow control element 1590, an actuator 1570, and an adapter 1560. The mixing element 1580 is first inserted into the assembly port 1547, and then the flow control element 1590 is inserted into the second end 1583 of the mixing element 1580. As a result of the flow control element 1590 capping the second end 1583 of the mixing element 1580, the second end 1583 of the mixing element 1580 is closed. The first end 1582 is open and forms the fluid outlet of the mixing element 1580. A fluid inlet 1581 is formed between the first and second ends 1582 and 1583 through a mixing element 1580.

[0131] The flow control element 1590 is fixed to the assembly port 1547 by an adapter 1560, and the actuator 1570 is coupled to the adapter 1560. The actuator 1570 may be a solenoid, a linear actuator, or other device that moves in response to a control input. This control input can be applied via pneumatic or fluid pressure, electricity, or other known means. In one example, the actuator 1570 may be a linear actuator, and the actuator rod 1571 is configured to engage with an actuator receptacle 1591 in the flow control element 1590. The flow control element 1590 is configured to selectively close the fluid inlet 1581 as a result of the force applied to the actuator receptacle 1591 by the actuator rod 1571.

[0132] Figure 38 shows a cross-section of the assembled fluid flow component 1500. Figures 39A and 39B show detailed views of the fluid flow component 1500 in first and second states. In the first state, the flow control element 1590 does not obstruct the fluid inlet 1581 as shown. The actuator rod 1571 is coupled to the actuator receptacle 1591 to allow the movement of the piston 1593 along the inner surface 1584 of the mixing element 1580. The piston 1593 is coupled to the outer ring 1595 via a diaphragm 1592. The diaphragm 1592 allows the linear motion of the piston 1593, while the outer ring 1595 is fixed within the assembly port 1547.

[0133] In the first state, the piston 1593 is retracted by the actuator rod 1571. The fluid inlet 1581 is unobstructed. The fluid inlet 1581 allows fluid flow and mixing to occur, as described above. When the fluid flow rate requirement is reduced, improved mixing can be achieved by partially blocking the fluid inlet 1581. Thus, in the second state, the piston 1593 is translated axially within the inner surface 1584 of the mixing element 1580, thereby blocking the fluid inlet 1581.

[0134] A method for mixing process fluids is disclosed. In this mixing method, a first fluid supply unit is configured to supply a first process fluid. A second fluid supply unit is configured to supply a second process fluid. The first process fluid flows through a fluid channel to a mixing element located at the joint of a first flow component. The second process fluid also flows through a fluid channel to the mixing element of the first flow component. The first and second process fluids flow through first and second fluid inlets formed in the tubular body of the mixing element. The first and second process fluids flow through first and second inlet axes perpendicular to the longitudinal axis of the mixing element. As the first and second process fluids pass along the tubular body, they mix to form a fluid mixture. The fluid mixture then flows through an open end of the tubular body, which forms the outlet of the mixing element.

[0135] Optionally, the fluid inlet may be selectively blocked based on parameters such as fluid flow rate to promote improved mixing. The first and second process fluids may or may not be different.

[0136] Although the present invention has been described in relation to specific examples, including currently preferred embodiments for carrying out the invention, those skilled in the art will understand that there are many variations and substitutions of the above-described systems and techniques. It should be understood that other embodiments may be utilized and that structural and functional modifications may be made without departing from the scope of the invention. Therefore, the idea and scope of the invention should be interpreted broadly, as described in the appended claims.

Claims

1. A first fluid supply unit configured to supply a first process fluid; A second fluid supply unit configured to supply a second process fluid; A process chamber configured for processing articles; Equipped with a fluid supply module; The aforementioned fluid supply module is A first module inlet fluidically coupled to the first fluid supply unit, A second module inlet is fluidically coupled to the second fluid supply unit, An outlet fluidly coupled to the process chamber, Fluid passages extending from the first and second module inlets to the outlets, Having a first flow component, The first flow component is, The main component and A first port, a second port, and a third port, each of which is formed in the component body, wherein a first flow path extends from the first port to the joint, a second flow path extends from the second port to the joint, and a third flow path extends from the joint to the third port, and the first, second, and third flow paths each form a part of the fluid path, A mixing element, wherein the mixing element is located at the joint of the first flow component, and the mixing element has a first fluid inlet, a second fluid inlet, and a fluid outlet, the first fluid inlet being fluidically coupled to the first port, the second fluid inlet being fluidically coupled to the second port, and the fluid outlet being fluidically coupled to the third port. The mixing element comprises a tubular body, the tubular body extending along the longitudinal axis of the mixing element from an open end to a closed end, The mixing element is provided with a flange at the closed end. Material processing system.

2. The tubular body comprises an inner surface and an outer surface, Both the inner surface and the outer surface extend from the open end to the closed end. The system according to claim 1.

3. The first and second fluid inlets of the mixing element extend from the outer surface to the inner surface, The system according to claim 2.

4. The open end of the tubular body forms the fluid outlet of the mixing element. The system according to claim 2.

5. The outer surface comprises a first sealing surface adjacent to the closed end, a second sealing surface adjacent to the open end, and a grooved surface extending from the first sealing surface to the second sealing surface. The first fluid inlet and the second fluid inlet of the mixing element are formed in the groove surface. The system according to claim 2.

6. The first fluid inlet of the mixing element extends along the first inlet axis, and the first inlet axis is perpendicular to the longitudinal axis, The first inlet axis does not intersect the longitudinal axis. The system according to claim 2.

7. The first fluid inlet of the mixing element has a first inlet surface, the first inlet surface extends from the outer surface to the inner surface, The first inlet surface is joined to the inner surface at a contact point, and the first inlet surface is tangential to the inner surface at the contact point. The system according to claim 2.

8. The first flow component comprises a first assembly port, the mixing element, and a retaining component incorporated into the first assembly port. The system according to claim 1.

9. The first assembly port of the first flow component is provided with an annular rib, and the mixing element is provided with a flange at its closed end, the flange being configured to receive the annular rib of the first flow component. The system according to claim 8.

10. It is a mixed element: A tubular body extending from an open end to a closed end along the longitudinal axis of the mixing element, wherein the tubular body has an outer surface and an inner surface; A first fluid inlet is formed through the tubular body from the outer surface to the inner surface; A second fluid inlet is formed through the tubular body from the outer surface to the inner surface; The tubular body comprises a fluid outlet formed by the open end; The outer surface comprises a first sealing surface adjacent to the closed end, a second sealing surface adjacent to the open end, and a grooved surface extending from the first sealing surface to the second sealing surface. The first fluid inlet and the second fluid inlet are formed in the groove surface. Mixing element.

11. Both the inner surface and the outer surface extend from the open end to the closed end. The mixing element according to claim 10.

12. The first fluid inlet extends along the first inlet axis, and the first inlet axis is perpendicular to the longitudinal axis. The first inlet shaft is positioned at a distance from the longitudinal shaft. The mixing element according to claim 10.

13. The first inlet axis does not intersect the longitudinal axis. The mixing element according to claim 12.

14. The second fluid inlet extends along the second inlet axis, which is parallel to the first inlet axis and perpendicular to the longitudinal axis. The second inlet axis does not intersect the longitudinal axis. The mixing element according to claim 12.

15. The first fluid inlet has a first inlet surface, and the first inlet surface extends from the outer surface to the inner surface. The mixing element according to claim 10.

16. The first fluid inlet is provided with a slot, the slot extending along the longitudinal axis, The mixing element according to claim 10.

17. The first fluid inlet is provided with a plurality of holes, Each of the aforementioned multiple holes has a diameter, and the diameters of each of the aforementioned multiple holes are different. The diameters of the plurality of holes decrease as the distance from the closed end of the tubular body increases along the longitudinal axis. The mixing element according to claim 10.

18. a) A step of providing a first fluid supply unit configured to supply a first process fluid and a second fluid supply unit configured to supply a second process fluid; b) A step of flowing the first process fluid into the mixing element of the first flow component, and the second process fluid into the mixing element of the first flow component; c) a step of passing the first process fluid through a first fluid inlet formed in the tubular body of the mixing element, wherein the first fluid inlet extends along a first inlet axis perpendicular to the longitudinal axis of the mixing element; d) a step of passing the second process fluid through a second fluid inlet formed in the tubular body of the mixing element, wherein the second fluid inlet extends along a second inlet axis perpendicular to the longitudinal axis; e) A step of mixing the first and second process fluids within the tubular body of the mixing element to form a fluid mixture; f) a step of flowing a fluid mixture through an open end of the tubular body, the open end of which forms the outlet of the mixing element; The mixing element has a tubular body that extends along its longitudinal axis from an open end to a closed end and has an outer surface and an inner surface. The outer surface comprises a first sealing surface adjacent to the closed end, a second sealing surface adjacent to the open end, and a grooved surface extending from the first sealing surface to the second sealing surface. The first fluid inlet and the second fluid inlet are formed in the groove surface. A method for mixing process fluids.

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