Expansion device

Abstract

To provide an extension device which safely cuts a film in a simple configuration.CONSTITUTION: A lifting stage 16 for pushing up and extending a dicing tape has an upper plate part 42 for covering an upper side of a peripheral wall part 41, and forms a predetermined clearance 45 between the upper plate part and the peripheral wall part. A first cutter holder 61 and a second cutter holder 62 each including a cutter 59 are mounted at diagonal positions of a built-in inner gear member 64, and a first projection 72 energizing the first cutter holder inward and a second projection 74 energizing the second cutter holder inward are provided at predetermined positions on an inner peripheral surface of the peripheral wall part. Each cutter holder is energized toward the outside by coil springs 70 and 73 and is in contact with the inner peripheral surface of the peripheral wall part in a section where the corresponding projection is not present, and a blade part 60 of the cutter protrudes outside, is rotated in a circumferential direction and cuts the dicing tape. When each cutter holder is opposed to the corresponding projection, the cutter is stored in the lifting stage and is lifted in this state.SELECTED DRAWING: Figure 8

Description

Technical Field

[0001] The present invention relates to an expansion device that divides a wafer into a plurality of chips by expanding a film to which a diced wafer is attached.

Background Art

[0002] After a semiconductor wafer on which a predetermined electric circuit has been formed through a film forming process is cut into individual chips in a dicing process, in order to prevent damage due to interference between chips and to smoothly perform pickup, a dicing tape on which the wafer is placed is uniformly expanded (expanded) in the X-Y direction (plane direction), and is divided into each chip with a predetermined interval.

[0003] This film expansion is performed, for example, by preparing a diced wafer attached to a dicing tape having adhesiveness and expandability with its outer peripheral portion fixed by a dicing frame which is an annular frame body, fixing the dicing frame on an elevating stage, and raising the elevating stage. When the dicing frame is fixed at a predetermined position, the height positions of the upper surfaces of the dicing frame and the elevating stage are made substantially the same, and the wafer attached to the dicing tape is configured to face the upper surface of the elevating stage. Thereby, when the elevating stage rises, the upper surface of the elevating stage lifts the contact portion of the dicing tape, and the dicing tape whose outer peripheral portion is fixed by the dicing frame is stretched and expanded, and accordingly, the interval between the individual chips attached to the dicing tape also expands.

[0004] With this film expansion, a film portion that is non-contact with the upper surface of the elevating stage extends in a skirt shape from the outer periphery of the upper surface toward the lower dicing frame and becomes an unnecessary portion, and thus is cut at an appropriate timing after expansion. As an expansion device having a cutting function for cutting this unnecessary dicing tape, for example, there is a device disclosed in Patent Document 1.

[0005] The apparatus disclosed in Patent Document 1 has a cutter at the tip of an arm that extends diagonally upward and outward below the lifting stage, and by rotating the arm, the cutter that extends diagonally upward cuts the dicing tape at a predetermined position. [Prior art documents] [Patent Documents]

[0006] [Patent Document 1] Utility Model Registration No. 3168329 Gazette [Overview of the Initiative] [Problems that the invention aims to solve]

[0007] Because the cutter is located outside the lifting stage, there is a risk of injury if fingers or other body parts accidentally touch it. In particular, it is dangerous as fingers may be cut if they are placed in the cutter while it is rotating. Also, because the dicing tape is cut by rotating a single arm that extends diagonally upward, the force applied to the dicing tape during cutting may be uneven, and it may not be possible to cut cleanly all the way around. Furthermore, because the direction of the cutter is changed and it is moved from the standby position to the cutting position by driving an air cylinder, there is a risk that cutting may not be possible due to cylinder malfunction or that the cutter may be moved to the cutting position unintentionally.

[0008] The problems described above are presented as independent issues, and the present invention is not necessarily required to solve all of them; it is sufficient if at least one problem is solved. Furthermore, the invention intends to obtain rights for the configuration that solves this problem independently through divisional applications, amendments, etc. [Means for solving the problem]

[0009] To solve the above-mentioned problems, the expansion device of the present invention comprises (1) a lifting stage that can be raised and lowered to push up and expand a film to which a diced wafer is attached, thereby dividing the wafer into a plurality of chips; an inner ring that can be detachably attached to the upper end of the lifting stage; and an outer ring that fits with the film between the outer circumference of the inner ring when it reaches a predetermined position as the lifting stage rises. The lifting stage comprises a cylindrical body with an open top and an upper plate portion positioned at a predetermined distance above the body. The device includes a cutter mechanism that rotates the cutter in a circumferential direction along the side surface of the body in a horizontal plane with at least the blade portion of the cutter protruding outward from the gap formed between the upper edge of the body and the upper plate portion. The device is configured to be able to house the cutter inside the body in areas where the film is not cut.

[0010] The film expanded on the lifting stage is held in place by an inner ring and an outer ring at the upper end of the lifting stage. The portion of the film outside of this held portion becomes unnecessary and extends downward along the circumferential surface of the main body. In this invention, a cutter that protrudes from the gap formed between the upper plate portion and the upper end circle of the main body and rotates in a horizontal plane can cleanly cut the area near the portion held by the inner ring and outer ring. By bringing the height positions of the lower surface of the upper plate portion and the lower surface of the outer ring closer together, more of the unnecessary portion can be cut. Furthermore, the cutter can be stored inside the main body, at least in areas where the film is not being cut, thus preventing workers from accidentally touching the cutter, for example, when the lifting stage is moving up and down or in the lowered position where cutting is not performed. In this embodiment, the main body is composed of two members, a circumferential wall portion 41 and a lower plate portion 43, but it may be composed of one member or a combination of three or more members.

[0011] (2) The cutter has two pieces, and it is preferable that the two cutters be positioned on opposite sides of the rotating circle in the radial direction. In this way, when the film is cut using two cutters diagonally, the load on the film is applied diagonally, the cutting process becomes stable, and the film is cut cleanly.

[0012] (3) A first projection and a second projection are provided on radially opposite sides of the inner circumferential surface of the main body, and the first projection and the second projection are arranged at different heights. When moving through a section without the first projection and the second projection, the blade portion of the cutter protrudes to the outside of the main body. In the cutter unit equipped with one of the cutters, the cutter is housed inside the main body in contact with the first projection and protrudes to the outside without contacting the second projection. In the cutter unit equipped with the other cutter, the cutter is housed inside the main body in contact with the second projection and protrudes to the outside without contacting the first projection. In this way, two cutters can be housed inside the main body at different positions in the circumferential direction with a simple configuration, and the film can be reliably cut around the circumference with the two cutters. In this embodiment, the first projection and the second projection correspond to the first projection 72 and the second projection 74, respectively, but it is not limited to attaching a separate component from the main body as in the embodiment, and they may be formed integrally with the main body.

[0013] (4) The device comprises an internal gear member configured to rotate within the main body, a drive mechanism for rotating the internal gear member, and a cutter holder mounted on the upper surface of the internal gear member so as to be movable along the radial direction, wherein the cutter holder rotates as the internal gear member rotates, causing the cutter to rotate and cut the film. This configuration allows the cutter to rotate in a horizontal plane and can be compactly housed within the lifting stage.

[0014] (5) The cutter holder is mounted on the internal gear member so as to be movable back and forth along the radial direction, and the internal gear member is equipped with an elastic body that biases the cutter holder forward, and when the cutter holder comes into contact with a projection provided on the inner circumferential surface of the main body, it moves backward while elastically deforming the elastic body so that the cutter is housed inside the main body, and when moving through a section without the projection, it is biased forward by the elastic restoring force of the elastic body so that the blade portion of the cutter can protrude outside the main body. With this configuration, the cutter can be rotated in a horizontal plane and moved in and out of the lifting stage, and can be compactly housed inside the lifting stage with a simple configuration.

[0015] (6) A cutter protection ring is positioned at a predetermined location above the lifting stage when it is in the lowered position, so that when the lifting stage rises and reaches the position where the film is expanded, the cutter protection ring is positioned outside the gap, and the cutter protection ring can hide the blade of the cutter. In this way, even during the film cutting process, the blade of the cutter is hidden by the cutter protection ring, so that accidental contact of fingers or other objects with the cutter can be suppressed as much as possible. Safety is improved as the cutter is not exposed when stored or when in operation.

[0016] (7) A ring holder for holding the outer ring is positioned above the cutter protection ring, and the lifting stage equipped with the inner ring rises, the inner ring enters the outer ring held by the ring holder, the inner ring and the outer ring sandwich the film, and the gap is configured to face the ring holder. In this way, the outer ring can be automatically attached as the lifting stage rises, and the configuration is simplified by having the mechanism for attaching the outer ring hold the cutter protection ring.

[0017] In addition, the configurations shown in (1) to (7) described above can be combined as appropriate, and on the premise of the combined configuration, the components described in the embodiments and the drawings may be combined.

Advantages of the Invention

[0018] According to the present invention, for example, it is possible to prevent the blade portion of the cutter from touching a finger or the like, and it becomes an expansion device with high safety.

Brief Description of the Drawings

[0019] [Figure 1] It is a diagram showing a preferred embodiment of the expansion device according to the present invention. [Figure 2] It is a perspective view showing a part thereof. [Figure 3] It is a front view thereof. [Figure 4] It is a plan view thereof. [Figure 5] It is a front view showing a partial cross section while omitting the operation portion. [Figure 6] It is a plan view omitting the operation portion. [Figure 7] It is a diagram showing a lifting stage, a lifting mechanism, and a cutter mechanism. [Figure 8] (a) is a plan view showing a state in which the upper plate portion of the lifting stage in FIG. 7 is removed, and (b) is a diagram in which the upper plate portion is added to the a-a' cross-sectional view thereof. [Figure 9] (a) is a diagram showing a state in which the cutter rotated 270 degrees counterclockwise from the state shown in FIG. 8(a) is in the standby position, and (b) is a diagram in which the upper plate portion is added to the b-b' cross-sectional view thereof. [Figure 10] (a) is a diagram showing a state in which the cutter rotated 90 degrees counterclockwise from the state shown in FIG. 8(a) is in the operating position, and (b) is a diagram in which the upper plate portion is added to the c-c' cross-sectional view thereof. [Figure 11] (a) is a cross-sectional view showing a ring holder and a cutter protection ring, (b) is a front view showing an outer ring holding mechanism in a state where the clamp plate is opened, and (c) is a left side view thereof. [Figure 12]This is a diagram illustrating the function of the expansion device. [Modes for carrying out the invention]

[0020] Preferred embodiments of the present invention will be described in detail below with reference to the drawings. However, the present invention is not to be construed as being limited thereto, and various changes, modifications, and improvements can be made based on the knowledge of those skilled in the art, without departing from the scope of the invention.

[0021] As schematically shown in Figure 12, the expansion device 11 of this embodiment has an inner ring 1 attached to the outer circumference of the upper surface of the lifting stage 16, and a dicing tape 3 attached to the dicing frame 2 is set on the lifting stage 16 (see Figure 12(a)). The dicing frame 2 is fixed by a predetermined restraining mechanism, and when the lifting stage 16 rises, the dicing tape 3 in contact with the upper surface of the lifting stage 16 is biased upward and expands evenly outward (see Figure 12(b)). Diced wafers 4 are attached to the dicing tape 3, and as the dicing tape 3 expands, the diced wafers 4 can be divided into chips 4a at uniform intervals. Furthermore, the expanded dicing tape 3 comes to cover the upper surface and sides of the lifting stage 16, and by fitting the outer ring 5 onto the outer circumference of the upper surface of the lifting stage 16 from the outside of the dicing tape 3, the expanded dicing tape 3 is sandwiched and fixed by the inner ring 1 and the outer ring 5.

[0022] To ensure a relatively strong fit between the inner ring 1 and the outer ring 5, the outer diameter of the inner ring 1 and the inner diameter of the outer ring 5 are made to be approximately the same. Both the inner ring 1 and the outer ring 5 are made of a stretchable synthetic resin or the like. The dicing tape 3 is a stretchable tape used to protect and fix the semiconductor wafer during the dicing process and to hold it until the pickup process.

[0023] Furthermore, the expansion device 11 of this embodiment includes a cutter mechanism for cutting off the unnecessary portion of the dicing tape 3 sandwiched between the inner ring 1 and the outer ring 5, as will be described later. This cutter mechanism allows the cutting of the dicing tape 3 immediately outside the portion held by the inner ring 1 and the outer ring 5, so that, as shown in Figure 12(c), the periphery of the dicing tape 3 from which the unnecessary film portion has been removed is held by the inner ring 1 and the outer ring 5. In this held state, the dicing tape 3 can be removed from the lifting stage 16 and moved.

[0024] As shown in Figures 1 and later, the expansion device 11 of this embodiment includes a main body case 12, a dicing frame retaining member 13 that is openably connected to the upper surface of the main body case 12, an outer ring holding mechanism 15 that is openably connected to the dicing frame retaining member 13, a lifting stage 16 housed in the main body case 12, a lifting mechanism 14 for raising and lowering the lifting stage 16, and an operating unit 17 for giving various commands to the device.

[0025] The main case 12 is a roughly rectangular box-shaped body, and its top surface is divided into two sections, front and back, with a horizontal top surface 12a that occupies a large area and an inclined surface 12b that slopes downward toward the front from the front edge of the top surface 12a. The operating section 17 is located on the inclined surface 12b. In this embodiment, the operating section 17 includes a touch panel 17a for various settings and various instructions during operation, a power switch 17b, a pause switch 17c, and an emergency stop switch 17d.

[0026] A circular opening 19 is formed in the top surface 12a, and a cylindrical side wall portion 21 is positioned to open vertically into the opening 19. The outer diameter of the side wall portion 21 is approximately equal to the inner diameter of the opening 19, and the lower end of the side wall portion 21 is inserted into the opening 19, while the upper end protrudes outside the main body case 12. As a result, the side wall portion 21 is positioned to extend upward along the inner periphery of the opening 19 in the top surface 12a of the main body case 12.

[0027] A lower clamp 22 is positioned at the upper end of the side wall portion 21 to support the lower surface of the dicing frame 2. The lower clamp 22 is disc-shaped and has an opening 23 that penetrates vertically through its central portion. The outer diameter of the lower clamp 22 is approximately equal to the outer diameter of the side wall portion 21. An endless groove 22b extending in the circumferential direction is formed on the inner peripheral edge side of the upper surface 22a of the lower clamp 22, and an O-ring 24 is fitted into this groove 22b. When set in the groove 22b, the upper end of the O-ring 24 protrudes above the upper surface 22a of the lower clamp 22. Furthermore, the position of this groove 22b and, consequently, the O-ring 24 is such that when the dicing frame 2 is set on the lower clamp 22, the dicing frame 2 covers the O-ring 24.

[0028] The lifting stage 16 is installed so that it can be exposed through the opening 23 of the lower clamp 22. The upper surface 16a of the lifting stage 16, which moves up and down by the lifting mechanism 14, is at the same height as the upper surface 22a of the lower clamp 22 when in the lowered position, and is positioned above the upper surface 22a when in the raised position.

[0029] Furthermore, the top surface 12a is provided with first bearing portions 26 at two locations on the left and right sides of the rear end, which rotatably support the dicing frame retaining member 13, and a fixing member 27 for fixing the dicing frame retaining member 13 is provided on the front end side of the top surface 12a. The fixing member 27 has a substantially cylindrical body, and an elongated slit extending in the left-right direction is provided on the top surface of the body.

[0030] The dicing frame retaining member 13 comprises a frame 28 that is roughly U-shaped in plan view, and an upper clamp 30 attached to the inside of the frame 28. Both end portions 28a of the roughly U-shaped frame 28 are supported by a first bearing portion 26 so as to be able to rotate in forward and reverse directions within a predetermined angular range. Near the middle of the frame 28, that is, on the outer surface (front) of the front portion 28b opposite to the end portions 28a connected to the first bearing portion 26, there is a locking member 31 that is inserted into a fixing member 27 and locks the dicing frame retaining member 13. The locking member 31 comprises a roughly rectangular parallelepiped block 31a, a rod 31b that passes through the block 31a vertically and is mounted so as to be able to move up and down and rotate, a flat plate-shaped stopper member 31c attached to the lower end of the rod 31b, and a clamp lever 31d attached to the upper end of the rod 31b. The system is configured such that, in response to the operation of the clamp lever 31d, the rod 31b and, consequently the stopper member 31c move up and down relative to the block 31a, or the rod 31b and, consequently the stopper member 31c rotate around the axis of the rod 31b.

[0031] The stopper member 31c is formed such that the length of the long side of its horizontal cross-sectional shape is shorter than the length of the long side of the slit provided on the top surface of the fixing member 27, and longer than the length of the short side of the slit, and the length of the short side of the horizontal cross-sectional shape of the stopper member 31c is shorter than the length of the long side of the slit provided on the top surface of the fixing member 27.

[0032] As described above, the dicing frame retaining member 13 rotates in forward and reverse directions around the first bearing portion 26 as the center of rotation, and is configured to transition between a first inclined open position in which the front portion 28b, shown by the dashed line in Figure 3, is raised, and a second position in which the front portion 28b is lowered from the first position and the member is closed to cover the top surface portion 12a of the main body case 12, shown by the solid line. Furthermore, when transitioning from the first position to the second position, the stopper member 31c moves downward with its long side and the long side of the slit provided in the fixing member 27 being approximately parallel. When in the second position, the stopper member 31c enters the slit and reaches the fixing member 27. In the second position, the stopper member 31c is rotated approximately 90 degrees by operating the clamp lever 31d, so that the directions of the stopper member 31c and the long side of the slit become perpendicular, preventing the stopper member 31c from detaching from the fixing member 27, and the dicing frame retaining member 13 is locked in the second position.

[0033] The upper clamp 30 has a circular opening 30a in the center and is made of a flat plate with an outer shape that is approximately octagonal. A ring-shaped receiving member 32 made of a flat plate is attached to the inner peripheral edge of the lower surface 30b. This receiving member 32 is positioned opposite the O-ring 24 attached to the lower clamp 22. When the dicing frame retaining member 13 is in the second position, the receiving member 32 contacts the O-ring 24 and biases it downward. As a result, the O-ring 24 is elastically deformed and compressed. Therefore, when the dicing frame 2 is set on the lower clamp 22 and the dicing frame retaining member 13 is in the second position, the dicing frame 2 is held in place by the receiving member 32 and the O-ring 24 from above and below with a predetermined pressure.

[0034] The outer ring holding mechanism 15 includes a base plate 34 attached to the upper surface 30c of the upper clamp 30 via a height adjustment mechanism 33, a clamp plate 36 attached to the rear end of the base plate 34 via a hinge plate 35 so as to be openable and closable, and a ring holder 37 attached to the lower surface of the clamp plate 36. The base plate 34 is a plate-shaped member having a circular opening 34a in the center, and the inner diameter of the opening 34a is larger than the outer diameter of the lifting stage 16. When the lifting stage 16 is raised, the upper part of the lifting stage 16 passes through the opening 34a of the base plate 34, and the upper surface 16a is positioned above the base plate 34.

[0035] The clamp plate 36 has a rectangular shape with both front ends cut off, and rotates in forward and reverse directions within a predetermined angular range around the rear end edge to which the hinge plate 35 is connected, taking on a first inclined position with the front side upright and a second horizontal position with the front side tilted down. The clamp plate 36 has a circular opening 36b in the center.

[0036] The ring holder 37 is a roughly disc-shaped structure with an opening 37a in the center, and has a groove 37c extending along the inner circumference of the lower surface 37b of the ring holder 37 on the side of the opening 37a. The inner diameter of the upper surface 37d of the opening 37a is approximately equal to the inner diameter of the outer ring 5, and the inner diameter of the lower surface 37b, which is lowered by the groove 37c, is approximately equal to the outer diameter of the outer ring 5. The outer ring 5 is configured to be detachably mounted in the groove 37c. Furthermore, the ring holder 37 is connected to the lower surface 36a of the clamp plate 36 via a plurality of connecting rods 38 and integrated with it. As a result, when the clamp plate 36 is opened and closed, the ring holder 37 also moves together, and when the clamp plate 36 takes the second position, the ring holder 37 also becomes horizontal, and the upper end portion of the lifting stage 16, which has reached the raised position, enters the opening 37a of the ring holder 37. More specifically, the upper surface 16a of the lifting stage 16 is almost flush with the upper surface of the outer ring 5 set in the ring holder 37, the upper end of the lifting stage 16 is inserted into the outer ring 5 and attached to the upper end of the lifting stage 16, and the inner ring 1 and outer ring 5 fit together.

[0037] Furthermore, in this embodiment, a cutter protection ring 40 is attached to the lower surface of the ring holder 37. The cutter protection ring 40 protects the cutter of the cutter mechanism 10, and its details will be described later.

[0038] As shown in Figure 7, the lifting stage 16 comprises a cylindrical peripheral wall portion 41 that opens at the top and bottom, an upper plate portion 42 positioned to cover the upper opening of the peripheral wall portion 41, and a lower plate portion 43 attached to the lower end of the peripheral wall portion 41. In this embodiment, the peripheral wall portion 41 and the lower plate portion 43 constitute a cylindrical body with an open top, but it may also be composed of a single part, for example. The lower plate portion 43 is fixed using screws 44 while in contact with the lower end surface of the peripheral wall portion 41. The upper plate portion 42 is supported by, for example, a support column rising from the lower plate portion 43, and is configured to form a predetermined gap 45 between the upper end surface of the peripheral wall portion 41 and the lower surface of the upper plate portion 42. The upper surface of the upper plate portion 42 constitutes the upper surface 16a of the lifting stage 16. The outer circumference of the upper surface of the upper plate portion 42 is a lower step portion 42a, and the inner ring 1 can be attached to this lower step portion 42a. The outer diameter of the inner ring 1 is equal to the outer diameter of the lower surface of the peripheral wall portion 41 and the upper plate portion 42. When the inner ring 1 is mounted on the lower step portion 42a, the outer surface of the inner ring 1 is substantially flush with the outer surfaces of the upper plate portion 42 and the peripheral wall portion 41. Furthermore, a ring-shaped heater 39 and a temperature sensor are provided in the center of the lower surface of the upper plate portion 42, providing a function to heat the upper plate portion 42 to a set temperature.

[0039] The lifting mechanism 14 for raising and lowering the lifting stage 16 has the following configuration: Multiple support columns 48 are erected at predetermined positions on the outer circumference of the upper surface of the base plate 47, and a support plate 49 is connected to the upper side of the support columns 48. The support plate 49 is positioned parallel to the base plate 47. The base plate 47 is fixed to the bottom surface inside the main body case 12, so that when the bottom surface of the main body case 12 is horizontal, the support plate 49 is also fixed horizontally.

[0040] A screw shaft 50 is positioned upright and rotatable at the center of the upper surface of the base plate 47. Bearings 51 are attached above and below the support plate 49 at the upper end portion 50a of the screw shaft 50, so that the screw shaft 50 can rotate smoothly. As a result, the screw shaft 50 is rotatably supported by the base plate 47 at its lower end, and the screw shaft 50 is configured to rotate around its axis while remaining in an upright position. The tip of the upper end portion 50a of the screw shaft 50 protrudes above the support plate 49, and a pulley 53 is connected to this tip. This pulley 53 rotates by receiving the rotational output of a first drive motor (not shown) via a timing belt.

[0041] Furthermore, a nut 55 is attached to the threaded portion 50b of the screw shaft 50. This nut 55 is fixed to the movable plate 56 and integrated with it. The lower ends of several guide rods 57 are attached to the movable plate 56, and the upper ends of these guide rods 57 are fixed to the lower plate portion 43 of the lifting stage 16. In addition, each of these guide rods 57 is inserted into a cylindrical bush 58 attached to a predetermined position on the support plate 49, and is configured to be able to move up and down relative to the bush 58.

[0042] As a result, when the screw shaft 50 rotates in forward and reverse directions in response to the rotational output of the first drive motor, the rotation of the nut 55 is suppressed by the movable plate 56 supported by multiple guide rods 57, and the nut 55 moves up and down in accordance with the forward and reverse rotation. Therefore, the movable plate 56 and thus the guide rods 57 move up and down, and the lifting stage 16 moves up and down accordingly.

[0043] The cutter mechanism 10 for cutting off the unnecessary portion of the dicing tape 3 is mounted within the lifting stage 16. As shown in Figures 7 and 8, the cutter mechanism 10 of this embodiment cuts the dicing tape 3 facing the blade portion 60 by rotating the cutter 59 in a circular direction within a horizontal plane, with the blade portion 60 of the cutter 59 protruding outward from a gap 45 formed between the upper end surface of the peripheral wall portion 41 and the lower surface of the upper plate portion 42. In this embodiment, two cutters 59 are used and are positioned 180 degrees apart in the circumferential direction, i.e., on both sides in the radial direction. Each cutter 59 is attached to a first cutter holder 61 and a second cutter holder 62, respectively. These first cutter holders 61 and second cutter holders 62 are attached to predetermined positions on the upper surface of a flattened internal gear member 64 and rotate together with the internal gear member 64. The predetermined position is on the radially opposite side of the internal gear member 64, and is a position where the blade portion 60 of the cutter 59 can protrude outward from the outer peripheral edge of the internal gear member 64.

[0044] The internal gear member 64 is positioned to rotate in a horizontal plane while maintaining a horizontal position inside the lifting stage 16. The outer diameter of the internal gear member 64 is slightly shorter than the inner diameter of the lifting stage 16, i.e., the peripheral wall portion 41, and it is mounted so that the center of the internal gear member 64 and the center of the peripheral wall portion 41 coincide in the vertical direction. That is, a V-bearing 66 is rotatably attached to a predetermined position on the lower surface of the internal gear member 64 using a fixing screw 65. Three or more V-bearings 66 are provided on the circumference of a circle with the same radius from the center of the internal gear member 64, and each V-bearing 66 is preferably arranged at equal angular intervals in the circumferential direction. For example, if three are provided, they are arranged at 120-degree intervals. On the other hand, an endless guide rail 67 extending in the circumferential direction is integrally formed on the inner circumferential surface of the peripheral wall portion 41. The longitudinal cross-section of the guide rail 67 may be, for example, an isosceles triangle. The internal gear member 64 is then set so that the V-bearings 66 mesh with the guide rail 67. As a result, when the internal gear member 64 rotates, the V bearing 66 is guided by the guide rail 67 and moves in the circumferential direction of the peripheral wall portion 41, guiding the rotation of the internal gear member 64 in a stable position.

[0045] Furthermore, one of the multiple support columns 48 is cylindrical with openings at the top and bottom, and a rotating shaft 80 is inserted into this cylindrical support column 48, with the upper and lower ends of the rotating shaft 80 positioned to protrude from the top and bottom of the support column 48, respectively. A spur gear 82 that meshes with teeth 64a formed on the inner circumferential surface of the internal gear member 64 is connected to the upper end of the rotating shaft 80. The output terminal of a gear mechanism 83 is connected to the lower end of the rotating shaft 80, and a second drive motor 85 is connected to the input terminal of the gear mechanism 83. As a result, when the second drive motor 85 rotates, the rotating shaft 80 and thus the spur gear 82 rotate, and the internal gear member 64 rotates accordingly.

[0046] The first cutter holder 61 and the second cutter holder 62 are mounted on the internal gear member 64 so as to be able to move back and forth in the radial direction, and can transition between an operating position where they are moved forward, i.e., outward, and a standby position where they are moved backward, i.e., inward (towards the center). In the operating position, the tip of the blade portion 60 of the cutter 59 is located outside the peripheral wall portion 41, and in the standby position, the cutter 59 is housed within the lifting stage 16. The specific configuration for performing such operations is as follows.

[0047] The first cutter holder 61 comprises a flat body 61a. The front edge of this body 61a has an inclined side that extends toward the front center, with the center in the left-right direction protruding furthest forward. A cutter 59 is attached to the center of the front upper surface of the body 61a using a screw 68. The blade portion 60 of the cutter 59 protrudes forward and outward from the front end of the body 61a.

[0048] Furthermore, the main body 61a is provided with two guide holes 61b that penetrate in the thickness direction (vertical direction). These two guide holes 61b are formed to be parallel to each other and extend in the front-rear direction. Guide pins 69 fastened to the internal gear member 64 are inserted into these guide holes 61b, and the guide pins 69 are configured to move relative to each other along the guide holes 61b. As a result, the main body 61a is irremovably attached to the internal gear member 64 by the guide pins 69 and moves back and forth along the guide holes 61b.

[0049] A groove 61c extending in the left-right direction is provided on the rear surface of the main body 61a, and both left and right ends of the groove 61c are configured to open to the side surface of the main body 61a. A coil spring 70 is inserted into this groove 61c, and both ends 70a of the coil spring 70 are fixed to fixing screws 71 fastened to the internal gear member 64. The coil spring 70 is set in a stretched state, and the coil spring 70 acts to constantly bias the first cutter holder 61 forward, that is, outward from the internal gear member 64, by its elastic restoring force.

[0050] Furthermore, the first cutter holder 61 has a first protruding portion 61d that projects forward from the upper part of the front surface of the main body 61a. On the other hand, a recess 41a extending in the circumferential direction is provided on the inner circumferential surface of the peripheral wall portion 41. The bottom surface of this recess 41a is configured to be at the same level as or lower than the bottom surface of the main body 61a of the first cutter holder 61 attached to the internal gear member 64.

[0051] By providing this recess 41a, the upper edge of the peripheral wall portion 41 becomes thinner, and as shown in Figures 8, 10, etc., when the first protruding portion 61d of the first cutter holder 61 is in contact with the inner circumferential surface of the upper edge of the peripheral wall portion 41 where the recess 41a is provided, the blade portion 60 of the cutter 59 protrudes to the outside of the lifting stage 16.

[0052] Furthermore, a first projection 72 is fixed to a predetermined position on the inner circumferential surface on the upper edge side of the peripheral wall portion 41, which has a recess 41a. This first projection 72 is located above the recess 41a and opposite the first protruding portion 61d. As a result, as shown in Figure 9, when the first cutter holder 61 reaches the mounting position of the first projection 72, the first protruding portion 61d contacts the first projection 72, biasing the main body 61a toward the rear, i.e., toward the center of the internal gear member 64, causing it to move backward to the standby position, and the cutter 59 is stored inside the lifting stage 16.

[0053] Similar to the first cutter holder 61, the second cutter holder 62 has a flat body 62a. The front edge of this body 62a has an inclined side that extends toward the front center, with the center in the left-right direction protruding furthest forward. The cutter 59 is attached to the center of the front upper surface of the body 62a using a screw 68. The blade portion 60 of the cutter 59 protrudes forward and outward from the front end of the body 62a.

[0054] Furthermore, the main body 62a is provided with two guide holes 62b that penetrate in the thickness direction (vertical direction). These two guide holes 62b are formed to be parallel to each other and extend in the front-rear direction. Guide pins 69 fastened to the internal gear member 64 are inserted into these guide holes 62b, and the guide pins 69 are configured to move relative to each other along the guide holes 62b. As a result, the main body 62a is irremovably attached to the internal gear member 64 by the guide pins 69 and moves back and forth along the guide holes 62b.

[0055] A groove 62c extending in the left-right direction is provided on the rear surface of the main body 62a, and both left and right ends of the groove 62c are configured to open to the side surface of the main body 62a. A coil spring 73 is inserted into this groove 62c, and both ends 73a of the coil spring 73 are fixed to fixing screws 71 fastened to the internal gear member 64. The coil spring 73 is set in a stretched state, and the coil spring 73 acts by its elastic restoring force to constantly bias the second cutter holder 62 forward, that is, outward from the internal gear member 64. As a result, as shown in Figures 8, 10, etc., when the second protruding portion 62d of the second cutter holder 62 is in contact with the inner circumferential surface on the upper edge side of the peripheral wall portion 41 with the recess 41a, the blade portion 60 of the cutter 59 protrudes outward from the lifting stage 16.

[0056] Furthermore, the second cutter holder 62 has a second protruding portion 62d that projects forward from the lower part of the front surface of the main body 62a. In addition, a second projection 74 is fixed at a predetermined position on the inner surface of the upper edge side of the peripheral wall portion 41, which has a recess 41a. This second projection 74 is located below the recess 41a and opposite to the second protruding portion 62d. As a result, as shown in Figure 9, when the second cutter holder 62 reaches the mounting position of the second projection 74, the second protruding portion 62d contacts the second projection 74, biasing the main body 62a backward, i.e., toward the center of the internal gear member 64, causing it to move backward to the standby position, and the cutter 59 is stored in the lifting stage 16.

[0057] Furthermore, the mounting positions of the first projection 72 and the second projection 74 are on opposite sides in the radial direction, and their vertical heights do not overlap. The first protruding portion 61d is positioned so that it can contact the first projection 72 but not the second projection 74. Similarly, the second protruding portion 62d is positioned so that it can contact the second projection 74 but not the first projection 72 (see Figure 10, etc.).

[0058] As a result, for example, when the internal gear member 64 rotates 360 degrees, the cutter 59 attached to the first cutter holder 61 is biased by the first projection 72 when the first cutter holder 61 reaches the mounting position of the first projection 72, as described above, and the first protruding portion 61d is biased, causing the cutter 59 to be housed in the lifting stage 16 (see Figure 9). In sections where the first projection 72 is not provided, the first protruding portion 61d is biased by the elastic restoring force of the coil spring 70, causing it to contact the inner surface of the peripheral wall portion 41, and the blade portion 60 of the cutter 59 protrudes to the outside of the lifting stage 16 (see Figure 8). Furthermore, when the first cutter holder 61 reaches the mounting position of the second projection 74, the first protruding portion 61d is at a different height from the second projection 74 and does not contact it, but instead contacts the inner surface of the peripheral wall portion 41, causing the blade portion 60 of the cutter 59 to protrude to the outside of the lifting stage 16 (see Figure 10). In this manner, the blade portion 60 of the cutter 59 attached to the first cutter holder 61 enters the lifting stage 16 at the position where the first projection 72 is provided each time it rotates, while the blade portion 60 protrudes outward for almost the entire circumference. Similarly, the cutter 59 attached to the second cutter holder 62 enters the lifting stage 16 at the position where the second projection 74 is provided each time it rotates, while the blade portion 60 protrudes outward for almost the entire circumference.

[0059] Furthermore, in this embodiment, for example, focusing on the cutter 59 mounted on the first cutter holder 61, when it reaches the position of the first projection 72, the cutter 59 is stored within the lifting stage 16 and cannot cut the dicing tape 3. However, even when the second cutter holder 62 passes through the area where the first projection 72 is located, the blade portion 60 of the cutter 59 remains protruding outside the lifting stage 16, and the dicing tape 3 in that area can be cut. Similarly, in the area where the second projection 74 is located, the cutter 59 of the first cutter holder 61 can cut. It is preferable that the height positions of the cutter 59 mounted on the first cutter holder 61 and the cutter 59 mounted on the second cutter holder 62 be the same, but they may be offset.

[0060] Furthermore, a micro-photosensor 76 is positioned on the lower plate portion 43 of the lifting stage 16 at an intermediate point between the first projection 72 and the second projection 74, that is, at a position rotated 90 degrees in the circumferential direction, on the side where the spur gear 82 is provided. On the other hand, a sensor plate 75 is attached to a predetermined position on the lower surface of the internal gear member 64. In this embodiment, this predetermined position is directly below the first cutter holder 61. Therefore, when the internal gear member 64 rotates counterclockwise in a plan view, when the first cutter holder 61 rotates 90 degrees after passing the first projection 72, the sensor plate 75 faces the micro-photosensor 76, as shown in Figures 7 and 8, and the micro-photosensor 76 detects the sensor plate 75.

[0061] In this embodiment, the control unit of the second drive motor 85 controls the output of the second drive motor 85 to stop at the timing when the internal gear member 64 rotates 270 degrees after receiving a detection signal from the micro photosensor 76. As a result, the first cutter holder 61 stops rotating when it reaches the mounting position of the first projection 72, and the second cutter holder 62 stops rotating when it reaches the mounting position of the second projection 74. The first cutter holder 61 and the second cutter holder 62 are then in a standby position and the cutter 59 is stored inside the lifting stage 16. This prevents the blade portion 60 of the stopped cutter 59 from protruding outside the lifting stage 16, for example, from being injured by accidentally touching the blade portion 60, or from the lifting stage 16 moving up and down with the blade portion 60 of the cutter 59 protruding outwards, causing the cutter 59 to come into contact with other equipment or components and resulting in damage to the cutter 59 or the equipment or components.

[0062] Furthermore, since the lifting stage 16 is raised and lowered with the cutter 59 stored inside the lifting stage 16, the lifting stage 16 rises in the stored state, allowing the dicing tape 3 to be expanded. Therefore, the blade 60 of the cutter 59 does not come into contact with the dicing tape 3 while it is being expanded, so the dicing tape 3 does not come into contact with the blade 60 and move away, nor does the blade 60 of the cutter 59 accidentally touch the hands or fingers of an operator during the lifting and lowering process and cause injury.

[0063] On the other hand, the process of the cutter 59 (blade portion 60) protruding outside the lifting stage 16 to cut the dicing tape 3 is performed when the lifting stage 16 is in the raised position, the upper end portion of the lifting stage 16 enters the ring holder 37, and the dicing tape 3 is sandwiched between the outer ring 5 and the inner ring 1. At this time, the blade portion 60 of the cutter 59 that protrudes to the outside is located below the ring holder 37. In this embodiment, a cutter protection ring 40 is provided on the lower side of the ring holder 37, which prevents people or objects from accidentally touching the cutter 59 during the cutting process.

[0064] In other words, as shown in an enlarged view in Figure 11, the inner diameter of the cutter protection ring 40 is approximately equal to the outer diameter of the groove 37c formed in the ring holder 37. Furthermore, the inner circumferential surface 40a of the cutter protection ring 40 is provided with an endless groove 40b extending in the circumferential direction. This groove 40b is positioned opposite the gap 45 in the lifting stage 16 when it is in the raised position, and the blade portion 60 of the cutter 59 that protrudes to the outside of the lifting stage 16 is configured to enter the groove 40b. As a result, when the blade portion 60 of the cutter 59 protrudes to the outside of the lifting stage 16 and cuts the dicing tape 3, the blade portion 60 is hidden by the cutter protection ring 40, and even if a worker accidentally inserts their fingers into the space formed between the upper clamp 30 and the base plate 34, their fingers will not come into contact with the blade portion 60, thus ensuring safety.

[0065] Furthermore, since the space formed between the upper clamp 30 and the base plate 34 is narrow and it is unlikely that an operator would intentionally insert their fingers into it, the cutter protection ring 40 is not necessarily required. However, providing it as in this embodiment is preferable because it enhances safety.

[0066] In the above-described embodiment, a first projection 72 or a second projection 74 is provided, and the first cutter holder 61 or the second cutter holder 62 mechanically houses the cutter 59 inside the lifting stage 16 in the installation area of ​​the corresponding projection, creating a section where the dicing tape 3 is not cut. However, the present invention is not limited to this, and it is preferable to configure the cutter 59 housed inside the lifting stage 16 so that the blade portion 60 protrudes outside the lifting stage 16 at the same position (without rotation as in this embodiment), or to allow the cutter 59 to move around the entire 360-degree circumference with the blade portion 60 protruding outside. In this way, excess film can be cut by simply placing one cutter. Even in a configuration where the entire circumference can be cut with one cutter, it is preferable to place two cutters on opposite sides in the radial direction. By placing two cutters on opposite sides in the radial direction, the dicing tape 3 can be cut with even biasing force.

[0067] While various aspects of the present invention have been described above using embodiments, it should be noted that these embodiments and descriptions are not intended to limit the scope of the present invention, but rather to aid in understanding it. The scope of the present invention is not limited to the configurations and manufacturing methods explicitly described in the specification, but also includes combinations of the various aspects of the present invention disclosed herein. Although the configurations for which patent protection is sought are specified in the appended claims, it should be noted that even configurations not currently specified in the claims may be claimed in the future. [Explanation of Symbols]

[0068] 1: Inner ring 2: Dicing Frame 3: Dicing Tape 4: Wafer 4a: Chip 5: Outer ring 10: Cutter mechanism 11: Expansion device 12: Main unit case 13: Dicing frame retaining member 14: Lifting mechanism 15: Outer ring retention mechanism 16: Elevating Stage 17:Operation section 22: Lower clamp 30: Upper clamp 40: Cutter protection ring 41: Peripheral wall part 42: Upper plate section 43: Lower plate part 45: Gap 59: Cutter 60:Blade 61: First cutter holder 62: Second cutter holder 64: Internal gear component 70: Coil spring 72: 1st protrusion 73: Coil spring 74:Second protrusion

Claims

1. A lifting and lowering stage that pushes up and expands a film to which a diced wafer is attached, thereby dividing the wafer into multiple chips, An inner ring that can be detachably attached to the upper end of the aforementioned lifting stage, An outer ring is provided that fits onto the outer circumference of the inner ring, which has reached a predetermined position due to the raising of the lifting stage, with the film in between. The lifting stage comprises a cylindrical body with an open top and an upper plate positioned above the body at a predetermined distance. The cutter mechanism is provided to rotate the cutter in a circumferential direction along the side surface of the main body in a horizontal plane, with at least the blade portion of the cutter protruding outward from the gap formed between the upper edge of the main body and the upper plate portion. The aforementioned cutter has two pieces. The two cutters rotate within the same horizontal plane, and each has a region in the circumferential direction of their rotation that cannot cut the film, and the portion of the film in the region that one cutter cannot cut is cut by the other cutter. In areas where the film cannot be cut, the cutter is housed within the main body so that the blade portion does not protrude to the outside. The cutter is configured to stop in an area where the film cannot be cut.

2. The expansion device according to claim 1, wherein the two cutters are arranged on opposite sides in the radial direction of the rotating circle.

3. A lifting and lowering stage that pushes up and expands a film to which a diced wafer is attached, thereby dividing the wafer into multiple chips, An inner ring that can be detachably attached to the upper end of the aforementioned lifting stage, An outer ring is provided that fits onto the outer circumference of the inner ring, which has reached a predetermined position due to the raising of the lifting stage, with the film in between. The lifting stage comprises a cylindrical body with an open top and an upper plate positioned above the body at a predetermined distance. The cutter mechanism is provided to rotate the cutter in a circumferential direction along the side surface of the main body in a horizontal plane, with at least the blade portion of the cutter protruding outward from the gap formed between the upper edge of the main body and the upper plate portion. At least in areas where the film is not cut, the cutter is configured to be housed within the main body. The aforementioned cutter has two pieces. The two cutters are positioned on opposite sides of the rotating circle in the radial direction. A first projection and a second projection are provided on the radially opposite sides of the inner circumferential surface of the main body. The first projection and the second projection are arranged at different heights. When moving through the section without the first projection and the second projection, the blade portion of the cutter protrudes to the outside of the main body. One of the cutter units equipped with the cutter is configured such that the cutter is housed within the main body in contact with the first projection, and protrudes outward without contact with the second projection. The other cutter unit, which includes the cutter, is configured such that the cutter is housed inside the main body in contact with the second projection, and protrudes to the outside without contact with the first projection.

4. A lifting and lowering stage that pushes up and expands a film to which a diced wafer is attached, thereby dividing the wafer into multiple chips, An inner ring that can be detachably attached to the upper end of the aforementioned lifting stage, An outer ring is provided that fits onto the outer circumference of the inner ring, which has reached a predetermined position due to the raising of the lifting stage, with the film in between. The lifting stage comprises a cylindrical body with an open top and an upper plate positioned above the body at a predetermined distance. The cutter mechanism is provided to rotate the cutter in a circumferential direction along the side surface of the main body in a horizontal plane, with at least the blade portion of the cutter protruding outward from the gap formed between the upper edge of the main body and the upper plate portion. At least in areas where the film is not cut, the cutter is configured to be housed within the main body. An internal gear member configured to rotate within the main body, A drive mechanism for rotating the internal gear member, The internal gear member is equipped with a cutter holder that is mounted on the upper surface of the internal gear member so as to be movable along the radial direction, An expansion device in which the cutter holder rotates as the internal gear member rotates, causing the cutter to rotate and move to cut the film.

5. The cutter holder is mounted on the internal gear member so as to be movable back and forth along the radial direction. The internal gear member includes an elastic body that biases the cutter holder forward, The extension device according to claim 4, wherein the cutter holder is configured such that when it comes into contact with a projection provided on the inner circumferential surface of the main body, it moves backward while elastically deforming the elastic body so that the cutter is housed inside the main body, and when it moves through a section without the projection, it is biased forward by the elastic restoring force of the elastic body so that the blade portion of the cutter can protrude to the outside of the main body.

6. A lifting and lowering stage that pushes up and expands a film to which a diced wafer is attached, thereby dividing the wafer into multiple chips, An inner ring that can be detachably attached to the upper end of the aforementioned lifting stage, An outer ring is provided that fits onto the outer circumference of the inner ring, which has reached a predetermined position due to the raising of the lifting stage, with the film in between. The lifting stage comprises a cylindrical body with an open top and an upper plate positioned above the body at a predetermined distance. The cutter mechanism is provided to rotate the cutter in a circumferential direction along the side surface of the main body in a horizontal plane, with at least the blade portion of the cutter protruding outward from the gap formed between the upper edge of the main body and the upper plate portion. At least in areas where the film is not cut, the cutter is configured to be housed within the main body. A cutter protection ring is placed at a predetermined position above the lifting stage when it is in the lowered position. An expansion device configured such that when the lifting stage rises to a position in which the film is expanded, the cutter protection ring is positioned outside the gap, and the cutter protection ring can conceal the blade portion of the cutter.

7. A ring holder for holding the outer ring is positioned above the cutter protection ring. The expansion device according to claim 6, wherein the lifting stage equipped with the inner ring is raised, the inner ring enters the outer ring held by the ring holder, the inner ring and the outer ring sandwich the film, and the gap is configured to face the ring holder.

Images