Suction device and conveying system

Abstract

To provide a suction device for correcting positional deviation of a workpiece and a workpiece holder during workpiece conveyance to an optimum position.SOLUTION: A suction device having a holder capable of sucking a workpiece, comprises: a moving unit that moves the holder; and a control unit that controls the moving unit; wherein the control unit causes the moving unit to move the holder to a first position, a second position separated from the first position by a predetermined distance in a first direction, and a third position separated from the first position by a predetermined distance in a second direction different from the first direction, measures suction force for sucking the workpiece at the first position, the second position, and the third position, obtains an amount of correction from the measured suction force, and moves the holder to a new first position corrected on the basis of the amount of correction.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to an adsorption device and a transport system.

Background Art

[0002] Generally, in a production line for processing industrial products, a semiconductor exposure apparatus, etc., for holding a workpiece (object), for example, as described in Patent Document 1, a holder that adsorbs and holds the workpiece on an elastic body pad is used. This holder holds the workpiece on the holder by generating an adsorption force between the elastic pad and the workpiece by making the space between the elastic pad and the workpiece into a vacuum (a pressure lower than normal atmospheric pressure). The workpiece is transported to a lens transport container by an NC robot or the like, the lens transport container is moved to a lens transfer position, and the workpiece set in the lens transport container is adsorbed and held by the holder.

[0003] Also, in Patent Document 2, it is disclosed that the adsorption force is measured, and when the adsorption force is small, the adsorption pad is displaced by a predetermined displacement amount.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0005] When holding the workpiece by the adsorption force between the elastic pad and the workpiece as in Patent Document 1 above, if the workpiece cannot be held at an appropriate position, an adsorption error of the lens occurs. When an adsorption error occurs, waste of the workpiece and a decrease in operation due to recovery occur, increasing the production cost.

[0006] Patent Document 2 describes a method that detects the direction of displacement, repeatedly displaces a predetermined amount in one direction, and rewrites the transfer position when a position for suction is reached. However, it is unclear where the acquired suction-possible position lies within the transportable position range, and repeated displacement is required until a position for suction is reached, leading to a decrease in efficiency.

[0007] The present invention provides a suction device and a transport system that can correct the misalignment of a workpiece in a short amount of time. [Means for solving the problem]

[0008] The present invention relates to a suction device having a holder capable of adsorbing a workpiece, comprising a moving unit for moving the holder and a control unit for controlling the moving unit, wherein the control unit moves the holder by the moving unit to a first position, a second position a predetermined distance away from the first position in a first direction, and a third position a predetermined distance away from the first position in a second direction different from the first direction, measures the suction force for adsorbing the workpiece at the first position, the second position, and the third position, determines a correction amount from the measured suction force, and moves the holder to a new first position corrected based on the correction amount.

[0009] The present invention relates to a transport system for transporting a workpiece from a hand to a holder, comprising a moving unit for moving the hand and a control unit for controlling the moving unit, wherein the control unit moves the hand by the moving unit to a first position, a second position a predetermined distance away from the first position in a first direction, and a third position a predetermined distance away from the first position in a second direction different from the first direction, measures the suction force of the holder at the first position, the second position, and the third position, determines a correction amount from the measured suction force, and moves the hand to a new first position corrected based on the correction amount. [Effects of the Invention]

[0010] According to the present invention, it is possible to provide a suction device and a transport system that can correct the positional misalignment of a workpiece in a short time. [Brief explanation of the drawing]

[0011] [Figure 1] A schematic diagram showing the first embodiment of the present invention. [Figure 2] A schematic diagram showing the first embodiment of the present invention. [Figure 3] Flowchart in the first embodiment of the present invention [Figure 4] A schematic diagram showing a second embodiment of the present invention. [Figure 5] A schematic diagram showing the first embodiment of the second embodiment of the present invention. [Figure 6] Flowchart in the second embodiment of the present invention [Figure 7] Figure showing the workpiece suction position in the second embodiment of the present invention. [Modes for carrying out the invention]

[0012] Embodiments of the present invention will be described below with reference to the accompanying drawings. However, the following embodiments and examples are merely illustrative examples of preferred configurations of the present invention, and the scope of the present invention is not limited to those configurations.

[0013] (First embodiment) Figure 1 shows a schematic diagram illustrating the first embodiment of the present invention. Based on Figure 1, a schematic diagram illustrating the first embodiment of the present invention is shown. Based on Figure 1, the configuration and arrangement of the adsorption device of the present invention will be described.

[0014] The adsorption device 100 of this embodiment includes an adsorption pad 20 and a holder 21 on which the adsorption pad 20 is mounted. Furthermore, the holder 21 has an adsorption hole 22, and includes a vacuum pressure source 40 connected to the adsorption hole 22 by a pneumatic pipe 42, and a measuring unit 30 that measures the pressure in the adsorption hole 22 or the pneumatic pipe 42 as the adsorption force PM. A comparison unit 31 that compares the measured adsorption force PM with a threshold PS may also be included.

[0015] Further, the suction device 100 has a moving part (not shown) that moves the holder 21 in the vertical direction Z (the up-down direction in the figure) and the horizontal directions X / Y (the left-right / front-back direction in the figure). And it has a control part 50 that controls the vacuum pressure source 40, the measurement part 30, and the moving part (not shown). The comparison part 31 may be included in the control part 50. The moving part may be a robot such as a vertical articulated robot or a horizontal articulated robot.

[0016] The workpiece 110 is conveyed onto the workpiece mounting table 60 by, for example, a robot.

[0017] Drive the moving part (not shown) and measure the suction force PM at the first position T0 (X0, Y0, Z0) which is the reference position. Then, compare the measured suction force PM with the threshold value PS in the comparison part 31. When the suction force is greater than or equal to the threshold value PS, the conveyance of the workpiece 110 is completed.

[0018] The control part 50 is provided which compares the suction force PM at the first position T0 (X0, Y0, Z0) which is the reference position of the suction pad 10 with the suction force threshold value PS in the comparison part 31, and performs control to obtain a new teaching position T1 when the suction force is smaller than the suction force threshold value PS.

[0019] The workpiece 110 is supplied to the workpiece mounting table 60 from a previous process (not shown). The workpiece 110 requires a surface to be adsorbed by the suction pad 20, but the other shapes may be arbitrary shapes. For example, it may be a lens.

[0020] The workpiece mounting table 60 can be appropriately selected according to the size, shape, and material of the workpiece 110. For holding the workpiece 110 on the workpiece mounting table 60, it is also possible to select methods such as clamp hand holding or electromagnetic chuck holding.

[0021] Here, we show an example in which the pressure inside the adsorption holes 22 or the pneumatic piping 42 is detected by the measuring unit 30 as the adsorption force PM. However, the adsorption force PM is not limited to the pressure inside the adsorption holes 22 or the pneumatic piping 42. For example, it may be replaced with the flow rate value during adsorption.

[0022] Furthermore, the suction force PM can be replaced by installing, for example, a strain gauge between the suction pad 20 and the work holder 21, so that the pressure can be measured directly at the suction pad 20.

[0023] (Workpiece suction) Figure 2 shows a state in which the workpiece 110, transported from the previous process (not shown), is placed on the workpiece mounting table 60, shifted horizontally in the X direction relative to the holder 21. When the holder 21 is moved to the first position, which is the reference position (for example, T0 (X0, Y0, Z0)), a gap Δh is created between the workpiece 110 and the suction pad 20 of the holder 21. With the gap Δh created, the vacuum pressure source 40 is operated to create negative pressure inside the pneumatic piping 42 and generate suction force. At this time, because the workpiece was placed on the workpiece mounting table 30, shifted horizontally in the X direction, a leak occurs in the suction hole 22 communicating with the suction pad 20, and the suction force PM inside the pneumatic piping 42 decreases.

[0024] If the suction pressure PM detected by the measurement unit 30 is less than the threshold PS, the control unit 50 switches to a teaching mode that automatically sets a new position.

[0025] Figure 3 is a flowchart showing the method for obtaining the center position of the workpiece suction range in this embodiment. A predetermined displacement amount Δd is set in the control unit 50 in advance.

[0026] When switching to teaching mode, the negative pressure suction from the vacuum pressure source 40 is released, and the holder 21 is moved to a retracted position (e.g., TT(X0,Y0,Z10), not shown) by the moving part (not shown) (S1).

[0027] Then, the holder 21 is moved by a moving part (not shown) to a second position (X0+Δd,Y0,Z0) which is shifted by a predetermined length (shift amount) Δd in the +X direction relative to the first position T0 (X0,Y0,Z0), which is the reference position (S2).

[0028] Pressure is supplied to the suction pad 20 from the vacuum pressure source 40 through the pneumatic piping 42, suction hole 22, and holder 21, and the suction force PM is measured in the measuring unit 30 (S3). The measured suction force PM, along with the position of the holder 21 (second position), is recorded in the recording unit 51 in the control unit 50 (S4).

[0029] The moving part (not shown) moves the holder 21 to a retracted position (for example, TT(X0,Y0,Z10), not shown) (S5). Then, the moving part (not shown) moves to a third position (X0,Y0+Δd,Z0) which is shifted by a predetermined length (shift amount) Δd in a direction different from the X direction, for example in the Y direction, relative to the first position T0(X0,Y0,Z0), which is the reference position (S6).

[0030] Pressure is supplied to the suction pad 20 from the vacuum pressure source 40 through the pneumatic piping 42, suction hole 22, and holder 21, and the suction force PM is measured in the measuring unit 30 (S7). The measured suction force PM, along with the position of the holder 21 (third position), is recorded in the recording unit 51 in the control unit 50 (S8).

[0031] The recording unit 50 stores data that allows for the estimation of workpiece displacement from the values ​​of the suction force PM at the first, second, and third positions. The correction amount (X1, Y1, Z1), which is the estimated workpiece displacement, is then calculated (S9), and the first position, which is the reference position of the holder 21, is corrected (T0(X0-X1, Y0-Y1, Z0-Z1)) based on the correction amount. The corrected position is then set as the new first position (T0(X0-X1, Y0-Y1, Z0-Z1)), which is the new reference position (S10). Finally, the teaching mode is terminated.

[0032] Once teaching mode is complete, the moving part automatically moves to a new reference position, a new first position (T0(X0-X1,Y0-Y1,Z0-Z1)), allowing for adjustment to the optimal workpiece suction position.

[0033] In this embodiment, in teaching mode, the holder 21 is automatically moved to a new first position (T0(X0-X1,Y0-Y1,Z0-Z1)) by a moving part (not shown), which is a new reference position. However, depending on the operation of the device 100, it is also possible to insert a manual confirmation sequence or the like before changing to a new first position (T0(X0-X1,Y0-Y1,Z0-Z1)), which is a new reference position.

[0034] In this embodiment, the second position was moved a predetermined length (distance) away from the first position in the X direction, and the third position was moved a predetermined length (distance) away from the first position in the Y direction. However, the direction of movement is not limited to the X and Y directions.

[0035] Depending on the relationship with the preceding process of workpiece 110 and the environment, the moving part (not shown) may be configured with, for example, a 6-axis articulated robot, a SCARA robot, a parallel link robot, etc.

[0036] The workpiece may be a glass blank or a lens. Because the suction device of this embodiment allows for proper suction at the correct position, it can be brought into proper contact with the polishing pad or grinding tool, enabling the manufacture of high-precision lenses. Furthermore, the workpiece can be any part; by processing a part held in the correct position by the suction device of this embodiment, high-precision machining can be performed, enabling the manufacture of high-precision articles. Additionally, by assembling parts held in the correct position by the suction device of this embodiment, suction errors can be reduced, improving the operating rate. Moreover, it becomes possible to manufacture articles with improved assembly accuracy.

[0037] (Second Embodiment) Figure 4 shows a schematic diagram of a transport system as a second embodiment of the present invention. Based on Figure 4, the configuration and arrangement of the transport system of the present invention will be described. Components having the same function as in the first embodiment are denoted by the same reference numerals as in the first embodiment, and their details may be omitted.

[0038] The first embodiment shows an example in which the suction device has a movable part. The second embodiment shows an example of an embodiment in which the workpiece mounting table has a movable part in the first embodiment, and the suction device and workpiece mounting table together constitute a transport system.

[0039] The transport system 200 includes a suction pad 10 for holding the workpiece 110 and a hand 12 that mounts the suction pad 10. Furthermore, the hand 12 has suction holes 11 and a vacuum pressure source 40 connected to the suction holes 11 by pneumatic piping 41. It also has a transport stage (moving unit) 13 that transports the hand 12 in the vertical Z direction (up and down direction in the figure) and the horizontal X / Y direction (left and right / front and back direction in the figure). The moving unit may be a robot, such as a vertical articulated robot or a horizontal articulated robot.

[0040] On the opposite side of the transport stage 13, there is a suction pad 20 positioned opposite the suction pad 10, and a holder 21 that mounts the suction pad 20. Furthermore, the holder 21 has suction holes 22, a vacuum pressure source 40 connected to the suction holes 22 by pneumatic piping 42, and a measuring unit 30 that measures the pressure in the suction holes 22 or pneumatic piping 42 as the suction force PM. A comparison unit 31 that compares the measured suction force PM with a threshold PS may also be included.

[0041] The transport system 200 compares the suction force PM at the first position T20 (X0, Y0, Z0), which is the reference position of the hand 12, with the threshold PS using the comparison unit 30. If the suction force is greater than or equal to the threshold PS, the suction force of the suction holes 11 is released to the atmosphere by the switching valve 43, the workpiece 110 is transferred to the holder 21, and the transport stage 13 is retracted to complete the transport of the workpiece 110.

[0042] Here, the suction force PM at the first position T20 (X0, Y0, Z0), which is the reference position of the suction pad 10, is compared with the threshold PS by the comparison unit 31. If the PM is smaller than the threshold PS, the control unit 50 performs control to acquire a new reference position.

[0043] The workpiece 110 is supplied in a state where positional variations have been suppressed in advance from the previous process (not shown). The workpiece 110 requires a surface to be held in place by the suction pads 10 and 20, but other shapes can be arbitrary.

[0044] In this embodiment, the workpiece 110 is held during transport by the suction force generated via the suction pad 10, but this does not limit the form in which the workpiece 110 is transported. It can be appropriately selected according to the size, shape, and material of the workpiece 110. For example, it is also possible to select methods such as clamp hand holding or electromagnetic chuck holding. In this case, the shape of the workpiece 110 on the suction pad 10 side is not limited to a flat surface, and is not limited as long as it can be held by the selected method.

[0045] Here, the adsorption force PM is detected by the measurement unit 30, and in this example, the adsorption force PM is calculated from the adsorption pressure. Furthermore, the detection content by the measurement unit 30 necessary for calculating the adsorption force PM is not limited to the adsorption pressure. For example, it may be replaced with the flow rate value during adsorption.

[0046] Furthermore, the suction force can be replaced by installing, for example, a strain gauge between the suction pad 20 and the work holder 21, so that the pressure can be measured directly at the suction pad 20.

[0047] (Workpiece transport status) In the transport system 200 of this embodiment, the workpiece 110, which has been positioned in the previous process (not shown), is picked up and continuously transported to the holder 21.

[0048] FIG. 5 shows a state where the work 110 is displaced in the horizontal direction X relative to the holder 21 when the work 110 is moved to the first position T20(X0, Y0, Z0) which is the reference position on the transfer stage 13. Here, the vertical direction Z does not necessarily coincide with the gravitational direction. The work 110 moves to the first position T20(X0, Y0, Z0) which is the reference position with respect to the holder 21, and a gap Δh occurs between the work 110 and the suction pad 20 of the holder 21. When a vacuum pressure is supplied into the pneumatic pipe 42 by the switching valve 44 in the state where the gap Δh has occurred, a leak occurs in the suction hole 22 communicating with the suction pad 20, and the suction force PM inside the pneumatic pipe 42 decreases.

[0049] The suction force PM is detected by the measuring unit 30, compared with the threshold value PS in the comparison unit 31, and when it is smaller than the threshold value PS, the transfer stage 13 is retracted once, and the mode is switched to the teaching mode for automatically setting a new position.

[0050] (Work delivery sequence) FIG. 6 is a flowchart showing a method for obtaining the center position of the work suction range of the present embodiment. A predetermined length (displacement amount) Δd and the number of repetitions N0 are set in the control unit 50 in advance.

[0051] When switching to the teaching mode, the transfer stage 13 retracts to the retracted position (not shown, arbitrary position) (S1). The transfer stage 13 is moved to a position (X0 + Δd * N1, Y0, Z0) shifted by a predetermined length (displacement amount) Δd in the +X direction with respect to the first position T20(X0, Y0, Z0) which is the reference position. Here, the initial value of N1 is set to 1. The switching valve 44 is switched, and pressure is supplied from the vacuum pressure source 40 to the suction pad 20 through the pneumatic pipe 42, the suction hole 22, and the holder 21, and the suction force PM is measured by the measuring unit 30 (S3). The suction force PM is compared with the preset threshold value PS, and the feasibility of suction is recorded together with the current coordinates of the transfer stage 13 in the recording unit 51 in the control unit 50 (S4). The preset number of repetitions N0 is compared with the number of executions N1 of the sequences S1 to S4. If N1 < N0, N1 is incremented and the process returns to sequence S1 again (S5, S6). If N1 = N0, the process moves to the next sequence.

[0052] The transfer stage 13 retracts to a retracted position (not shown, arbitrary position) (S7), and this time, with respect to the first position T20(X0, Y0, Z0) which is the reference position, the transfer stage 13 is moved to a position (X0 - Δd * N2, Y0, Z0) shifted by the shift amount Δd in the -X direction. Here, the initial value of N2 is set to 1.

[0053] The switching valve 44 is switched, and pressure is supplied from the vacuum pressure source 40 to the suction pad 20 through the pneumatic pipe 42, the suction holes 22, and the holder 21, and the suction force PM is measured by the measuring unit 30 (S9). The suction force PM is compared with a preset threshold value PS, and whether suction is possible or not is recorded together with the current coordinates of the transfer stage 13 in the recording unit 51 in the control unit 50 (S10). The preset number of repetitions N0 is compared with the number of executions N2 of the sequences S7 to S11. If N2 < N0, N2 is incremented and the process returns to sequence S7 again (S11, S12). If N2 = N0, the process moves to the next sequence.

[0054] Let the maximum value of the X coordinate of the adsorption possible range recorded in the recording unit 51 in the sequences S1 to S12 be Xmax, and the minimum value be Xmin (S13).

[0055] [[ID=第十五]]For the Y direction as well, the same sequence is executed (S14 to S25), and the maximum value of the Y coordinate of the adsorption possible range is set as Ymax, and the minimum value is set as Ymin (S26).

[0056] At this point, if the adsorption possible range cannot be detected within the set shift amount Δd and the number of repetitions N0, a warning is issued because maintenance is required due to damage of components etc. (S27).

[0057] The center value Xave = (Xmax + Xmin) / 2 of the X coordinate of the adsorption possible range is obtained from the maximum value Xmax and the minimum value Xmin of the X coordinate of the adsorption possible range. Also, the center value Yave = (Ymax + Ymin) / 2 of the Y coordinate of the adsorption possible range is obtained from the maximum value Ymax and the minimum value Ymin of the Y coordinate of the adsorption possible range (S28).

[0058] Substitute Xave=X1 and Yave=Y1 into the new first position T21(X1,Y1,Z0) (S29).

[0059] Once the teaching mode is complete, the transport stage 13 automatically moves to a new teaching position T21 (X1, Y1, Z0), allowing for repositioning to the optimal workpiece transport position.

[0060] The sequence (S1 to S29) described above detects the adsorption range in the X and Y directions, but it is possible to extend this to the Z direction as well. To extend in the Z-axis direction, the sequence (S1 to S13) in the X-axis direction is inserted after (S26), replacing it with the Z-axis direction.

[0061] Although the method for determining a new teaching position in this embodiment was described as being determined by moving the hand 12, it is also possible to determine a new teaching position in the same way in the configuration of the first embodiment, where the holder 21 is moved.

[0062] In this embodiment, when the system switches to teaching mode, the transport stage 13 automatically moves to a new first position T21 (X1, Y1, Z0). However, depending on the operation of the device 100, it is also possible to insert a manual confirmation sequence or the like before changing to the new first position T21 (X1, Y1, Z1).

[0063] Furthermore, the direction of movement in the sequence is not limited to a Cartesian coordinate system.

[0064] Depending on the relationship with the preceding process of the workpiece 110 and the environment, the hand 12 may be configured as, for example, a 6-axis articulated robot, a SCARA robot, a parallel link robot, etc.

[0065] Figure 7 is a coordinate diagram when the sequence in Figure 6 is executed. The displacement amount Δd and the number of repetitions N0, which are set in the control unit 50 in advance, can be set arbitrarily. Alternatively, they can be set individually for the positive and negative directions of the X axis and the Y axis.

[0066] The workpiece may be a glass blank or a lens. Because the transport system of this embodiment allows the workpiece to be held in the correct position, it can be brought into proper contact with the polishing pad or grinding tool, enabling the manufacture of high-precision lenses.

[0067] Furthermore, the workpiece can be any part, and by processing the part held in the correct position by suction using the transport system of this embodiment, high-precision processing can be performed, making it possible to manufacture high-precision products. In addition, by assembling the parts held in the correct position by suction using the transport system of this embodiment, suction errors can be reduced, making it possible to improve the operating rate. Moreover, it becomes possible to manufacture products with improved assembly accuracy.

[0068] The disclosures herein include the following configurations I to XII.

[0069] [Structure 1] A suction device having a holder capable of suctioning a workpiece, A moving part for moving the holder, It includes a control unit that controls the moving part, The control unit, The moving part moves the holder to a first position, a second position a predetermined length away from the first position in a first direction, and a third position a predetermined length away from the first position in a second direction different from the first direction. The suction force that attracts the workpiece at the first position, the second position, and the third position is measured. An adsorption device characterized by determining a correction amount from the measured adsorption force and moving the holder to a new first position corrected based on the correction amount.

[0070] [Configuration 2] The suction device according to configuration 1, characterized in that the moving part is a vertical articulated robot.

[0071] [Structure 3] The suction device according to configuration 1, characterized in that the moving part is a horizontal articulated robot.

[0072] [Configuration 4] A transfer system for transporting a workpiece from a hand to a holder, A moving part for moving the aforementioned hand, It includes a control unit that controls the moving part, The control unit, The moving part moves the hand to a first position, a second position a predetermined length away from the first position in a first direction, and a third position a predetermined length away from the first position in a second direction different from the first direction. The suction force of the holder is measured at the first position, the second position, and the third position. A conveying system characterized by determining a correction amount from the measured suction force and moving the hand to a new first position corrected based on the correction amount.

[0073] [Configuration 5] The transport system according to configuration four, characterized in that the second position is determined by measuring the suction force of the holder at a plurality of positions located a predetermined length away from the first position in the first direction, and starting from the position where the suction force is less than a threshold.

[0074] [Configuration 6] The transport system according to configuration four or five, characterized in that the third position is determined by measuring the suction force of the holder at a plurality of positions located a predetermined length away from the first position in the second direction, and starting from the position where the suction force is less than a threshold.

[0075] [Configuration 7] The transport system according to any one of configurations four to six, characterized in that the moving part is a vertical articulated robot.

[0076] [Configuration 8] The transport system according to any one of configurations four to six, characterized in that the moving part is a horizontal articulated robot.

[0077] [Configuration 9] A method for manufacturing a lens, characterized by manufacturing a lens by polishing or grinding a workpiece held in the holder by a suction device described in any one of configurations 1 to 3.

[0078] [Configuration 10] A method for manufacturing an article, characterized by manufacturing an article by processing or assembling a workpiece held in the holder by a suction device described in any one of configurations 1 to 3.

[0079] [Configuration 11] A method for manufacturing a lens, characterized by manufacturing a lens by polishing or grinding a workpiece held in the holder by a transport system described in any of configurations four to eight.

[0080] [Configuration 12] A method for manufacturing an article, characterized by manufacturing an article by processing or assembling a workpiece held in the holder by a transport system described in any of configurations four to eight. [Industrial applicability]

[0081] This invention enables improved operational efficiency in a device that transports workpieces using suction force, without the need to add sensors or mechanisms. This leads to increased productivity, resulting in significant industrial and scientific benefits. [Explanation of Symbols]

[0082] 100 devices 110 Work 10 suction pads 11 Adsorption hole 12 Hands 13 Conveyor Stages 20 suction pads 21 Holder 22 Adsorption hole 50 Control Unit

Claims

1. A suction device having a holder capable of suctioning a workpiece, A moving part for moving the holder, It includes a control unit that controls the moving part, The control unit, The moving part moves the holder to a first position, a second position a predetermined length away from the first position in a first direction, and a third position a predetermined length away from the first position in a second direction different from the first direction. The suction force that attracts the workpiece at the first position, the second position, and the third position is measured, An adsorption device characterized by moving the holder to a position in which the first position has been corrected in the first direction and the second direction based on a correction amount obtained from the adsorption force measured in each of the above directions.

2. The suction device according to claim 1, characterized in that the moving part is a vertical articulated robot.

3. The suction device according to claim 1, characterized in that the moving part is a horizontal articulated robot.

4. A transfer system for transporting a workpiece from a hand to a holder, A moving part for moving the aforementioned hand, It includes a control unit that controls the moving part, The control unit, The moving part moves the hand to a first position, a second position a predetermined length away from the first position in a first direction, and a third position a predetermined length away from the first position in a second direction different from the first direction. The suction force of the holder at the first position, the second position, and the third position is measured, A conveying system characterized by moving the hand to a position in the first direction and the second direction that has been corrected based on a correction amount obtained from the respective measured suction forces.

5. The transport system according to claim 4, characterized in that the moving unit is a vertical articulated robot.

6. The transport system according to claim 4, characterized in that the moving unit is a horizontal articulated robot.

7. A method for manufacturing a lens, characterized by manufacturing a lens by polishing or grinding a workpiece held in the holder by the suction device described in claim 1.

8. A method for manufacturing an article, characterized by manufacturing an article by processing or assembling a workpiece held in the holder by the suction device described in claim 1.

9. A method for manufacturing a lens, characterized by manufacturing a lens by polishing or grinding a workpiece held in the holder by the transport system described in claim 4.

10. A method for manufacturing an article, characterized by manufacturing an article by processing or assembling a workpiece held in the holder by the transport system described in claim 4.

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