Substrate processing equipment

Abstract

To provide a substrate processing apparatus that makes it possible to equalize a load applied to the pressurized object.SOLUTION: A substrate processing apparatus 10 has a lower jig plate 46 on which a substrate 2, the object to be pressurized, is placed, a plurality of columnar members 50 supporting the lower jig plate 46, and a column 53 for heat dissipation that is in direct or indirect contact with the lower jig plate 46 and has higher heat dissipation than the plurality of columnar members 50.SELECTED DRAWING: Figure 8

Description

Technical Field

[0005] ,

[0001] The present invention relates to a substrate processing apparatus for processing a substrate on which a plurality of elements are arranged, for example. <00**********>

Background Art

[0002] In the technology of forming an element array composed of a plurality of elements on a substrate, in order to improve the strength and stability of the mechanical bonding between the plurality of elements and the substrate, a substrate processing apparatus is used to perform a process of pressing a plurality of elements against a substrate on which the plurality of elements are arranged with a flat plate (for example, Patent Document 1).

[0003] As a substrate processing apparatus for executing this type of process, for example, a substrate processing apparatus having a lower jig plate on which a pressurization object (a substrate on which a plurality of elements are arranged) is arranged and an upper jig plate for pressurizing the pressurization object arranged on the lower jig plate is used. By pressurizing the substrate on which the plurality of elements are arranged with the upper jig plate on the lower jig plate, a load is applied to the substrate, and accordingly, the plurality of elements can be pressed against the substrate.

[0004] In recent years, the size (height) of the elements arranged on the substrate has been miniaturized to about several μm. If the parallelism and flatness of the surface of the lower jig plate or the upper jig plate vary by about several tens of μm, it becomes difficult to apply a uniform load to the plurality of elements on the substrate by the upper jig plate, and there is a risk of bonding failure between the plurality of elements and the substrate.

[0005] Further, when the substrate is pressurized with the upper jig plate, thermal deformation occurs in the lower jig plate or the like due to the heating of the upper jig plate or the lower jig plate, making it difficult to apply a uniform load to the substrate. Therefore, even if the parallelism and flatness of the surface of the upper jig plate or the lower jig plate can be ensured to a certain extent in the no-load state, there is a risk of bonding failure between the plurality of elements and the substrate due to the thermal deformation of the lower jig plate during substrate pressurization.

Prior Art Documents

[0006] [Patent Document 1] Japanese Patent Publication No. 2010-232234 [Overview of the project] [Problems that the invention aims to solve]

[0007] This invention has been made in view of the above circumstances, and its purpose is to provide a substrate processing apparatus that makes it possible to make the load applied to the object being pressed uniform. [Means for solving the problem]

[0008] To achieve the above objective, the substrate processing apparatus according to the present invention is A lower jig plate on which the object to be pressed is placed, Multiple columnar members supporting the lower jig plate, The device has a heat dissipation column that directly or indirectly contacts the lower jig plate and has higher heat dissipation capabilities than the plurality of columnar members.

[0009] The substrate processing apparatus according to the present invention has a plurality of columnar members that support a lower jig plate. With the lower jig plate supported by the plurality of columnar members, by applying pressure to an object to be pressed placed on the lower jig plate, the in-plane distribution of deflection generated in the lower jig plate can be adjusted according to the shape, material, or arrangement of the plurality of columnar members, and the in-plane distribution of the load applied to the object to be pressed can be adjusted to be uniform.

[0010] Furthermore, the substrate processing apparatus according to the present invention has heat dissipation columns that directly or indirectly contact the lower jig plate and have higher heat dissipation capabilities than multiple columnar members. When the lower jig plate is heated, heat is dissipated from the lower jig plate through the columnar members at the positions where the columnar members are arranged. On the other hand, at positions where, for example, the columnar members are not arranged, by directly or indirectly contacting the heat dissipation columns with the lower jig plate, it is possible to dissipate heat from the lower jig plate through the heat dissipation columns without affecting the magnitude of the support force applied to the lower jig plate from the columnar members. As a result, temperature differences in the lower jig plate are less likely to occur between positions where the columnar members are arranged and positions where they are not, and variations in surface accuracy (e.g., flatness and smoothness) at each position of the lower jig plate due to thermal deformation of the lower jig plate are less likely to occur. Therefore, a uniform load can be applied to the object to be pressed placed on the lower jig plate.

[0011] Preferably, the heat dissipation columns consist of multiple columns, and the multiple heat dissipation columns are arranged according to the in-plane temperature distribution of the lower jig plate. For example, in positions where multiple columnar members are densely arranged, or in positions where columnar members with a large cross-sectional area are arranged, heat dissipation through these columnar members is promoted, and the temperature of the lower jig plate tends to be relatively lower. Therefore, by arranging heat dissipation columns in positions where these columnar members are not arranged, i.e., in positions where the temperature of the lower jig plate is relatively higher, it is possible to effectively prevent temperature differences from occurring at various positions on the lower jig plate.

[0012] Preferably, the heat dissipation column has a column body and a cover portion that covers the surface of the column body and is made of a material with a higher thermal conductivity than the column body. By bringing the cover portion into contact with the lower jig plate, the heat from the lower jig plate can be effectively dissipated to the outside via the heat dissipation column.

[0013] Preferably, the cover portion is attached to the top of the column body portion via an elastic member. In this configuration, the cover portion is provided with cushioning properties by the elastic member. Therefore, when the lower jig plate is supported by multiple columnar members and deflection occurs in the lower jig plate, the elastic member deforms elastically in accordance with the deflection, and the height position of the cover portion changes in the direction of deformation. This makes it possible to adjust the in-plane distribution of deflection occurring in the lower jig plate by the multiple columnar members, while promoting heat dissipation from the lower jig plate via the heat dissipation column.

[0014] Preferably, the heat dissipation column is provided at a position where the load applied to the lower jig plate is relatively large. If, for example, a support member with a relatively small cross-sectional area is placed at a position where the load applied to the lower jig plate is relatively large in order to reduce the load, the amount of heat dissipated will be less compared to a position where the load applied to the lower jig plate is relatively small, and a temperature difference may occur on the lower jig plate. Therefore, by providing a heat dissipation column at a position where the load applied to the lower jig plate is relatively large, heat dissipation through the heat dissipation column can be promoted, and a temperature difference on the lower jig plate can be effectively prevented.

[0015] Preferably, the structure has an installation section on which multiple columnar members and the heat dissipation column are installed. With this configuration, the positioning of the multiple columnar members is made easier, displacement of the multiple columnar members is prevented, and the lower jig plate can be supported by the multiple columnar members in a stable state. In addition, the positioning of the heat dissipation column is made easier, displacement of the heat dissipation column is prevented, and the heat dissipation column can be brought into stable contact with the lower jig plate. [Brief explanation of the drawing]

[0016] [Figure 1A] Figure 1A is a perspective view of a substrate processing apparatus according to one embodiment of the present invention. [Figure 1B] Figure 1B is a side view of the substrate processing apparatus shown in Figure 1A. [Figure 2]FIG. 2 is a view showing a substrate to be pressurized by the substrate processing apparatus shown in FIG. 1A. [Figure 3A] FIG. 3A is an enlarged side view of the substrate pressurizing unit of the substrate processing apparatus shown in FIG. 1A. [Figure 3B] FIG. 3B is an enlarged side view showing a state when deflection is generated in the lower jig plate of the substrate pressurizing unit shown in FIG. 3A. [Figure 4] FIG. 4 is a cross-sectional view taken along line IV-IV of the substrate pressurizing unit shown in FIG. 3A. [Figure 5A] FIG. 5A is a view showing the in-plane distribution of the load applied to the pressure-sensitive paper when the lower jig plate is not supported by a plurality of columnar members. [Figure 5B] FIG. 5B is a view showing the in-plane distribution of the load applied to the pressure-sensitive paper when the lower jig plate is supported by a plurality of columnar members. [Figure 6A] FIG. 6A is an enlarged side view showing a modified example of the support member shown in FIG. 3A. [Figure 6B] FIG. 6B is an enlarged side view showing another modified example of the support member shown in FIG. 3A. [Figure 7A] FIG. 7A is a view showing another arrangement example of a plurality of columnar members. [Figure 7B] FIG. 7B is a view showing the in-plane distribution of the load applied to the substrate or the lower jig plate when a plurality of columnar members are arranged in the arrangement shown in FIG. 7A. [[ID=2�]] [Figure 8] FIG. 8 is a cross-sectional view when a heat dissipation column is arranged in addition to a plurality of columnar members under the lower jig plate. [Figure 9] FIG. 9 is an enlarged cross-sectional view showing the configuration of the heat dissipation column shown in FIG. 8. [Figure 10A] FIG. 10A is a cross-sectional view showing a modified example of the fixing mode of the heat dissipation column shown in FIG. 8. [[ID=**********]] [[ID=**********]] [Figure 10B] FIG. 10B is a cross-sectional view showing a modified example of the fixing mode of the heat dissipation column shown in FIG. 10A. [Figure 10C] FIG. 10C is a cross-sectional view showing a modified example of the fixing mode of the heat dissipation column shown in FIG. 10B. [Figure 11A] FIG. 11A is a view showing an arrangement example of the heat dissipation column shown in FIG. 8. [Figure 11B] Figure 11B shows another example of the arrangement of the heat dissipation columns shown in Figure 8. [Modes for carrying out the invention]

[0017] The present invention will be described below based on the embodiments shown in the drawings.

[0018] As shown in Figure 1A, the substrate processing apparatus 10 according to one embodiment of the present invention is a device for forming an element array 4 (Figure 2) consisting of a plurality of elements 4a, 4b, 4c on a substrate 2. The apparatus aims to improve the strength and stability of the mechanical bonding between the plurality of elements 4a, 4b, 4c and the substrate 2 by pressing the plurality of elements 4a, 4b, 4c onto the substrate 2 using predetermined means. In other words, the substrate processing apparatus 10 functions as a pressurizing unit (pressurizing device) when forming the element array 4 on the substrate 2.

[0019] The material of substrate 2 is, for example, glass epoxy material. However, the material of substrate 2 is not limited to this, and for example, it may be composed of SiO2 or Al2O3 as a glass substrate, or as a flexible substrate, it may be composed of polyimide, polyamide, polypropylene, polyetheretherketone, urethane, silicone, polyethylene terephthalate, polyethylene naphthalate or other elastomers, or even glass wool.

[0020] A conductive bonding material (not shown) is pre-formed on the surface of the substrate 2. This conductive bonding material electrically and mechanically connects the substrate 2 to elements 4a, 4b, and 4c by means of anisotropic conductive particle connection or bump pressure connection, and is cured by heating. Examples of conductive bonding materials include ACF, ACP, NCF, or NCP. The thickness of the conductive bonding material is preferably 1.0 to 10000 μm.

[0021] The substrate 2 has wiring formed in a predetermined pattern, and the electrodes of elements 4a, 4b, and 4c can be connected to this wiring via a conductive bonding material.

[0022] Elements 4a, 4b, and 4c are arranged in an array on the substrate 2. An array arrangement means that elements 4a, 4b, and 4c are arranged in multiple rows and multiple columns according to a predetermined pattern, and the spacing in the row direction and column direction may be the same or different.

[0023] Elements 4a, 4b, and 4c are arranged as RGB pixels on a display substrate for a display, and also as backlight emitters on an illumination substrate. Element 4a is a red light element, element 4b is a green light-emitting element, and element 4c is a blue light-emitting element. However, the elements placed on substrate 2 are not limited to these elements.

[0024] In this embodiment, elements 4a, 4b, and 4c are micro-light-emitting elements (micro-LED elements), and their size (width × depth) is, for example, 5 μm × 5 μm to 50 μm × 50 μm. The thickness (height) of elements 4a to 4c is, for example, 50 μm or less.

[0025] The substrate processing apparatus 10 includes a frame 20, a load generating unit 30, and a substrate pressing unit 40. In the drawing, the X-axis corresponds to the width direction of the frame 20, the Y-axis corresponds to the depth direction of the frame 20, and the Z-axis corresponds to the height direction of the frame 20.

[0026] The frame 20 is made of a housing made of, for example, metal, and has an upper frame 21, a movable pressurizing part 22, a lower frame 23, a guide bush 24, and a guide shaft 25. The lower frame 23 constitutes the base portion (table) of the frame 20 and has a predetermined height. In the illustrated example, a hollow section is formed inside the lower frame 23, but the shape of the lower frame 23 is not limited to this, and the inside of the lower frame 23 may be solid.

[0027] The lower ends of four guide shafts 25 are fixed (inserted) into the four corners of the lower part 23 of the frame. Each of these guide shafts 25 has a predetermined length and is positioned upright in the Z-axis direction. The lower end of each guide shaft 25 is fixed to the lower part 23 of the frame, and the upper end of each guide shaft 25 is fixed to the upper part 21 of the frame. The guide shafts 25 pass through the four corners of the movable pressurizing section 22, which is positioned between the upper part 21 and the lower part 23 of the frame. These guide shafts 25 serve to support the upper part 21 of the frame and to support the movable pressurizing section 22 so that it can slide up and down along the Z-axis direction.

[0028] The movable pressurizing section 22 is made of a rectangular plate (rigid body) and is located between the lower part 23 and the upper part 21 of the frame. The movable pressurizing section 22 is configured to slide freely in the vertical direction along four guide shafts 25 by receiving a load from the load generating section 30. As shown in Figure 1B, the movable pressurizing section 22 contacts the upper surface of the substrate pressurizing section 40 and applies pressure to it, thereby applying a load of approximately 0 to 100 kN to the substrate pressurizing section 40. It is preferable that the movable pressurizing section 22 contacts the substrate pressurizing section 40 parallel to it, and its parallelism A is preferably 1 μm ≤ A < 2 μm.

[0029] As shown in Figure 1A, four through holes 220 are formed at each of the four corners of the movable pressurizing section 22, and four guide shafts 25 are inserted into each of these through holes 220. Four guide bushes 24 are fixed to the lower surface (the surface on the negative Z-axis side) of the movable pressurizing section 22 at positions corresponding to the four through holes 220. The guide bushes 24 have the function of improving the sliding of the movable pressurizing section 22 (reducing friction with the guide shafts 25) when the movable pressurizing section 22 moves in the vertical direction, and also have the function of easily positioning the guide shafts 25 with respect to the axis of the through holes 220.

[0030] The upper part of the frame 21 constitutes the ceiling portion of the frame 20. The upper ends of four guide shafts 25 are fixed (inserted) to the four corners of the underside of the upper part of the frame 21. A load generating unit 30 is fixed to the center of the upper part of the frame 21. The load generating unit 30 is composed of devices such as a pressurizing cylinder, servo press, motor, or actuator, and plays the role of applying a load to the movable pressurizing unit 22. In order to prevent the drawings from becoming complicated, the detailed configuration of the movable pressurizing unit 22 is omitted from the illustration, and only a part of its configuration is shown.

[0031] The load generating unit 30 applies a load to the movable pressurizing unit 23 by applying pressure to the central region 221 of the movable pressurizing unit 22 with a press head (not shown). As a result, the movable pressurizing unit 22 moves downward and pressurizes the substrate pressurizing unit 40, making it possible to apply a load to the object to be pressed (the substrate 2 on which multiple elements 4a, 4b, and 4c are arranged) in the substrate pressurizing unit 40.

[0032] As shown in Figure 3A, the substrate pressing section 40 includes an upper stage 41, a lower stage 42, an upper mounting section 43, an upper jig plate 44, a support member 45, and a lower jig plate 46. The upper stage 41 is provided on the lower surface of the movable pressing section 22, and the lower stage 42 is provided on the upper surface of the lower part of the frame 23. The thickness of the upper stage 41 and the lower stage 42 is greater than the thickness of the substrate 2. The upper stage 41 and the lower stage 42 have the same shape, and their respective X-axis widths are greater than the respective X-axis widths of the upper mounting section 43 and the support member 45. Note that the shapes of the upper stage 41 and the lower stage 42 are not limited to the shapes shown and may be changed as appropriate.

[0033] The upper stage 41 is preferably made of a flat plate-shaped body (rigid body) and is composed of a material with relatively high surface accuracy (e.g., flatness and smoothness). For example, the surface accuracy of the upper surface of the upper stage 41 is preferably better than the surface accuracy of the lower surface of the movable pressurizing part 22, and it is preferable that the surface has fewer irregularities (is smooth) and a smaller inclination with respect to the horizontal plane (is flat) than the surface accuracy of the upper stage 41.

[0034] In this way, by fixing the upper stage 41, which has excellent surface accuracy, to the lower surface of the movable pressurizing section 22, when the upper mounting section 43 is fixed to the lower surface of the upper stage 41, it becomes possible to position the upper mounting section 43 or the upper jig plate 44 mounted thereon in a stable state without tilting it with respect to the horizontal plane.

[0035] The lower stage 42 is preferably made of a flat plate-shaped body (rigid body) and is composed of a material with relatively high surface accuracy (e.g., flatness and smoothness). For example, the surface accuracy of the upper surface of the lower stage 42 is preferably better than the surface accuracy of the upper surface of the lower part of the frame 23, and it is preferable that the surface has fewer irregularities (is smooth) and a smaller inclination with respect to the horizontal plane (is flat).

[0036] In this way, by fixing the lower stage 42, which has excellent surface accuracy, to the upper surface of the lower frame 23, when the support member 45 is fixed to the upper surface of the lower stage 42, it becomes possible to position the support member 45 or the lower jig plate 46 supported by it in a stable state without tilting it with respect to the horizontal plane.

[0037] The upper mounting section 43 has a flat, plate-like appearance and is fixed to the lower surface of the upper stage 41. The upper jig plate 44 is mounted on the upper mounting section 43. The upper mounting section 43 serves to support the upper jig plate 44.

[0038] The upper jig plate 44 is made of a flat plate (rigid body) and is fixed (mounted) on the lower surface of the upper mounting section 43. The upper jig plate 44 has the function of pressurizing the substrate 2 placed on the lower jig plate 46. The upper jig plate 44 has a built-in heating function (e.g., a heater), and when the upper jig plate 44 pressurizes the substrate 2, it is possible to heat the substrate 2 with the upper jig plate 44. For example, when a conductive bonding material is used to connect multiple elements 4a, 4b, 4c to the substrate 2, heating the substrate 2 makes it possible to connect the multiple elements 4a, 4b, 4c to the substrate 2 well, and makes it possible to increase the bonding force between the substrate 2 and the multiple elements 4a, 4b, 4c placed on it.

[0039] The upper jig plate 44 is preferably made of a material with relatively high surface accuracy. The surface accuracy of the lower surface of the upper jig plate 44 is preferably better than, for example, the surface accuracy of the lower surface of the upper stage 41, and is preferably smoother (less uneven) and flatter (less inclined with respect to the horizontal plane) than the surface accuracy of the lower surface. The surface roughness Ra of the surface (especially the lower surface) of the upper jig plate 44 is preferably Ra ≤ 1 μm.

[0040] In this way, by improving the surface accuracy of the upper jig plate 44, when the substrate 2 placed on the lower jig plate 46 is pressed down on the lower surface of the upper jig plate 44, the unevenness of the load applied to the substrate 2 is reduced, and a uniform load can be applied to the multiple elements 4a, 4b, and 4c on the substrate 2.

[0041] The lower jig plate 46 is made of a flat plate-shaped body (rigid body) and is supported by a support member 45. The lower jig plate 46 has a shape substantially identical to that of the upper jig plate 44 and is positioned opposite to the upper jig plate 44. The substrate 2, which is the object to be pressed, can be placed on the lower jig plate 46. Similar to the upper jig plate 44, the lower jig plate 46 has a built-in heating function (e.g., a heater), so that when the substrate 2 is pressed by the upper jig plate 44, the substrate 2 can be heated by the lower jig plate 46 (and the upper jig plate 44).

[0042] The lower jig plate 46 is preferably made of a material with relatively high surface accuracy. The surface accuracy of the upper surface of the lower jig plate 46 is preferably better than, for example, the surface accuracy of the upper surface of the lower stage 42, and it is preferable that it has fewer irregularities (is smooth) and a smaller inclination with respect to the horizontal plane (is flat) than the surface accuracy of the lower jig plate 46.

[0043] The surface roughness Ra of the lower jig plate 46 (especially the upper surface) is preferably Ra ≤ 1 μm, similar to the surface roughness Ra of the upper jig plate 46. Furthermore, the parallelism A between the lower jig plate 46 and the upper jig plate 44 is preferably A ≤ 1 μm.

[0044] In this way, by improving the surface accuracy of the lower jig plate 46, when the substrate 2 placed on the lower jig plate 46 is pressed against the lower surface of the upper jig plate 44, the lower surface of the upper jig plate 44 and the substrate 2 become parallel (closely in contact), and the effect of improving the uniformity of the load distribution applied to the substrate 2 as described above can be obtained.

[0045] Even if a certain degree of surface accuracy can be ensured for the upper jig plate 44 and the lower jig plate 46, when the substrate 2 is pressed with the upper jig plate 44, the lower jig plate 46 will inevitably bend to some extent, and due to reasons such as poor contact (adhesion) between the lower jig plate 46 and the upper jig plate 44, it becomes difficult to apply a uniform load to the substrate 2 (or the multiple elements 4a, 4b, 4c placed on the substrate 2), which may cause variations in the bonding state between the substrate 2 and the multiple elements 4a, 4b, 4c.

[0046] In other words, the substrate 2 has regions where the load decreases when a small surface pressure is applied, and regions where the load increases when a large surface pressure is applied, resulting in an uneven load distribution on the substrate 2. Therefore, in the substrate processing apparatus 10 of this embodiment, the support member 45 is equipped with means to eliminate this uneven load distribution on the substrate 2 when pressurized. The details of the support member 45 will be described below.

[0047] The support member 45 is fixed to the upper surface of the lower stage 42 and supports the lower jig plate 46. In other words, in this embodiment, the lower jig plate 46 is positioned on the lower stage 42 via the support member 45. The support member 45 is configured to adjust for fluctuations in the amount of load on the substrate 2 due to the deflection of the lower jig plate 46, and provides a support force to the lower jig plate 46 according to the in-plane distribution of the load applied to the lower jig plate 46.

[0048] For example, in the lower jig plate 46, the closer to the center, the more the lower jig plate 46 will bend into a concave shape, becoming convex downwards. This reduces the surface pressure applied to that position, and consequently, the load on the lower jig plate 46 becomes relatively smaller. In positions where the load on the lower jig plate 46 is relatively small, the support member 45 provides a relatively large support force to the lower jig plate 46. As a result, the lower jig plate 46 becomes less likely to bend near its center, making it possible to increase the load applied to the lower jig plate 46. Consequently, it becomes possible to increase the load applied to the substrate 2 placed on the lower jig plate 46 at that position.

[0049] Furthermore, the further away from the center of the lower jig plate 46, the greater the surface pressure applied to that position, and the greater the load applied to that position. In such positions where the load applied to the lower jig plate 46 is relatively large, the support member 45 provides a small support force to the lower jig plate 46. As a result, the lower jig plate 46 becomes more flexible at positions far from the center of the lower jig plate 46, making it possible to reduce the load applied to the lower jig plate 46. Consequently, it becomes possible to reduce the load applied to the substrate 2 placed on the lower jig plate 46 at those positions.

[0050] In this way, the support member 45 adjusts the deflection of the lower jig plate 46 so that the load applied to each position of the lower jig plate 46 is balanced, thereby making the load applied to the substrate 2 uniform. The following describes specific means by which the support member 45 applies a support force to the lower jig plate 46 according to the in-plane distribution of the load on the lower jig plate 46.

[0051] The support member 45 has an assembly 500 of multiple columnar members 50 and an installation section 52 on which the multiple columnar members 50 and the heat dissipation column 53 (Figure 8) are installed. Each of the multiple columnar members 50 is cylindrical in shape and plays a role in supporting the lower jig plate 46. The shape of each columnar member 50 is not limited to this and may be triangular prism, square prism, other polygonal prism, cone, triangular pyramid, or other polygonal pyramid. In addition, each columnar member 50 may have a hollow shape.

[0052] It is preferable that the multiple columnar members 50 are made of rigid bodies that can be elastically deformed. As shown in Figure 4, the multiple columnar members 50 are arranged in an orderly manner in the installation section 52, for example, in a 7x7 matrix, and are arranged at predetermined intervals in the X-axis and Y-axis directions. In the illustrated example, the distance between the centers of the multiple columnar members 50 is substantially the same, and the multiple columnar members 50 are arranged at equal intervals, but the intervals between each columnar member 50 do not necessarily have to be the same. Also, when viewed from above, the multiple columnar members 50 are evenly distributed from one end to the other in the X-axis and Y-axis directions of the installation section 52, but they may be concentrated in a part of the installation section 52.

[0053] Furthermore, the multiple columnar members 50 may be randomly arranged on the installation section 52, or they may be arranged concentrically. The arrangement of the multiple columnar members 50 is appropriately determined according to the in-plane distribution of the load applied to the lower jig plate 46. In addition to the multiple columnar members 50, a heat dissipation column 53, which will be described later, is also installed on the installation section 52, but to prevent the drawing from becoming too complex, its illustration is omitted in Figure 4.

[0054] In this embodiment, the cross-sectional areas (cross-sectional areas of the planes parallel to the XY plane) of the multiple columnar members 50 are not all the same. Rather, the multiple columnar members 50 are composed of columnar members 50 with relatively large cross-sectional areas (columnar member 50a), columnar members 50 with relatively small cross-sectional areas (columnar member 50c), and columnar members 50 with intermediate cross-sectional areas (columnar member 50b). In other words, the multiple columnar members 50 are formed from multiple members with different shapes.

[0055] Multiple columnar members 50a are positioned where the load applied to the lower jig plate 46 is relatively small, and multiple columnar members 50b and 50c are positioned where the load applied to the lower jig plate 46 is relatively large. In other words, the multiple columnar members 50a, 50b, and 50c are positioned according to the in-plane distribution of the load applied to the lower jig plate 46.

[0056] In the illustrated example, multiple columnar members 50a are arranged in a 5x5 matrix on the installation section 52. Hereafter, the central columnar member 50a of the collection of multiple columnar members 50a may be specifically referred to as columnar member 50a1. Columnar member 50a1 is positioned approximately in the center of the lower jig plate 46 (directly below the pressurizing shaft provided by the load generating section 30). The pressurizing shaft may consist of a single shaft or multiple shafts.

[0057] Multiple columnar members 50b and multiple columnar members 50c are arranged on the outside of the assembly of multiple columnar members 50a (on the outermost periphery of the assembly 500), surrounding it. On the outermost periphery of the assembly 500, four columnar members 50c are arranged at each of the four corners, and four more columnar members 50c are arranged between each of the four columnar members 50c. In addition, two columnar members 50b are arranged in pairs between each of the columnar members 50c. The arrangement of the multiple columnar members 50a, 50b, and 50c shown in Figure 4 is just one example, and these arrangements may be changed as appropriate.

[0058] When the width (diameter) of columnar member 50a is Da, the width (diameter) of columnar member 50b is Db, and the width (diameter) of columnar member 50c is Dc, Da > Db > Dc. The diameters Da, Db, and Dc are preferably 10 to 20 mm. Furthermore, the ratio Da / Dc of the diameter Da of the columnar member 50a with the largest diameter to the diameter Dc of the columnar member 50c with the smallest diameter is preferably 2 / 1 to 1.5 / 1. By setting the diameter (thickness) range of each columnar member 50a, 50b, and 50c to such a range, it becomes possible to appropriately deflect each columnar member 50a, 50b, and 50c according to the magnitude or in-plane distribution of the load applied to the lower jig plate 46.

[0059] Furthermore, among the multiple columnar members 50a, the diameter of columnar member 50a1 may be made larger than that of the other columnar members 50a, making it less prone to bending than the other columnar members 50a.

[0060] The distance between the centers (pitch) P between each columnar member 50 is preferably 20 to 50 mm, and more preferably 20 to 25 mm. By setting the distance L between the centers of each columnar member 50 to this range, it becomes possible to evenly support each position of the lower jig plate 46 with each columnar member 50a, 50b, 50c, and to support the lower jig plate 46 with an appropriate support force. In this embodiment, at a position where multiple columnar members 50a, 50b, 50c are arranged, it is possible to locally apply support force to the lower jig plate 46 from multiple columnar members 50a, 50b, 50c.

[0061] The length L of the multiple columnar members 50 is preferably 20 to 50 mm, and more preferably 20 to 25 mm. The length L of the multiple columnar members 50 may be approximately the same as the height of the lower jig plate 46.

[0062] When the cross-sectional area of ​​columnar member 50a is Sa, the cross-sectional area of ​​columnar member 50b is Sb, and the cross-sectional area of ​​columnar member 50c is Sc, then Sa > Sb > Sc. The cross-sectional area Sa of columnar member 50a, which is positioned where the load applied to the lower jig plate 46 is relatively small, is larger than the cross-sectional areas Sb and Sc of columnar members 50b and 50c, which are positioned where the load applied to the lower jig plate 46 is relatively large.

[0063] Therefore, when the lower jig plate 46 is supported by multiple columnar members 50a, 50b, and 50c, the pressure on the substrate 2 by the upper jig plate 44 (Figure 3A) applies a load to the lower jig plate 46 (Figure 3A), and consequently, a load is applied to the multiple columnar members 50a, 50b, and 50c. As a result, a relatively small amount of strain (compressive strain in the negative Z-axis direction) occurs in columnar member 50a, while a relatively large amount of strain (compressive strain in the negative Z-axis direction) occurs in columnar members 50b and 50c. Thus, in this embodiment, when columnar members 50a, 50b, and 50c are subjected to a load, it is possible to generate strain in the columnar members 50a, 50b, and 50c in amounts corresponding to their cross-sectional areas Sa, Sb, and Sc.

[0064] The columnar members 50a, 50b, and 50c are expandable and contractible along their extension direction by generating a strain corresponding to their cross-sectional area when subjected to a constant load. The timing at which the columnar members 50a, 50b, and 50c generate strain when subjected to a load is roughly synchronized with the timing at which the lower jig plate 46 receives a load from the upper jig plate 44, or the timing at which the upper jig plate 44 receives a load from the movable pressurizing part 22, or the timing at which the movable pressurizing part 22 receives a load from the load generating part 30. In an unloaded state where no load is applied to the columnar members 50a, 50b, and 50c, the columnar members 50a, 50b, and 50c release their strain and return to their original state.

[0065] In this embodiment, the amount of strain in the columnar member 50a, which is positioned where the load applied to the lower jig plate 46 is relatively small, is smaller than the amount of strain in the columnar members 50b and 50c, which are positioned where the load applied to the lower jig plate 46 is relatively large. That is, a gradient of strain is formed in the multiple columnar members 50 according to the in-plane distribution of the load applied to the lower jig plate 46, with the columnar members 50 positioned near the center of the lower jig plate 46 having less strain and the columnar members 50 positioned near the outer circumference of the lower jig plate 46 having more strain.

[0066] By supporting the lower jig plate 46 with a columnar member 50a that has a relatively small amount of strain at a position where the load applied to the lower jig plate 46 is relatively small, a relatively large supporting force is applied from the columnar member 50a to the lower jig plate 46, making the lower jig plate 46 less prone to deflection, and making it possible to adjust the deflection that occurs in the lower jig plate 46 to a small amount of deflection corresponding to the amount of strain of the columnar member 50a. In other words, in the vicinity of the center of the lower jig plate 46, which would otherwise bend into a concave shape, the deflection becomes relatively small as shown in Figure 3B. As a result, it is possible to increase the load applied to the lower jig plate 46 and increase the load on the substrate 2 placed on the lower jig plate 46.

[0067] Furthermore, by supporting the lower jig plate 46 with columnar members 50b and 50c, which have a relatively large amount of strain, at positions where the load applied to the lower jig plate 46 is relatively large, a relatively small support force is applied to the lower jig plate 46 from the columnar members 50b and 50c, making the lower jig plate 46 more flexible. This allows the amount of deflection generated in the lower jig plate 46 to be adjusted to a large amount of deflection corresponding to the amount of strain in the columnar members 50b and 50c. In other words, as shown in Figure 3B, a relatively large deflection occurs near the outer circumference of the lower jig plate 46, where no deflection would occur without any measures. As a result, the load applied to the lower jig plate 46 is reduced, and the load on the substrate 2 placed on the lower jig plate 46 is reduced.

[0068] Figure 5A shows the load distribution applied to the pressure-sensitive paper 6 placed on the lower jig plate 46 when the lower jig plate 46 (Figure 3A) is mounted on a flat plate-shaped member (the member corresponding to the upper mounting portion 43) without using the support member 45 in this embodiment (i.e., a figure showing a comparative example). Figure 5B shows the load distribution applied to the pressure-sensitive paper 6 placed on the lower jig plate 46 when the lower jig plate 46 is supported by the support member 45 in this embodiment (i.e., a figure showing an example). In Figures 5A and 5B, the load distribution applied to the pressure-sensitive paper 6 corresponds to the load distribution applied to the substrate 2. In these drawings, the parts shown in dark colors indicate that a relatively large load is applied, and the parts shown in light colors indicate that a relatively small load is applied.

[0069] As shown in Figure 5A, in the comparative example, the load applied to the pressure-sensitive paper 6 becomes relatively smaller as you approach the center of the pressure-sensitive paper 6, while the load applied to the pressure-sensitive paper 6 becomes relatively larger as you approach the outer edge of the pressure-sensitive paper 6. In other words, in the comparative example, a relatively large deflection occurs near the center of the lower jig plate 46, while a relatively small deflection occurs near the outer edge of the lower jig plate 46.

[0070] On the other hand, as shown in Figure 5B, in this embodiment, the load applied to the pressure-sensitive paper 6 is uniform at each position of the pressure-sensitive paper 6. In this embodiment, as shown in Figure 3B, by bending the lower jig plate 46 so that the load applied to each position of the lower jig plate 46 is balanced, the in-plane distribution of the load applied to the lower jig plate 46 can be adjusted to be uniform, as shown in Figure 5B, and the load applied to the substrate 2 placed on the lower jig plate 46 can be made uniform.

[0071] In the example shown in Figure 4, an adjustment is made to the in-plane distribution of the load applied to the lower jig plate 46 based on the difference in the amount of strain of multiple columnar members 50a, 50b, and 50c having different cross-sectional areas. However, the method for making such an adjustment is not limited to this.

[0072] For example, the support member 45 may adjust the in-plane distribution of the load applied to the lower jig plate 46 based on the difference in the amount of strain of the multiple columnar members 50, which are determined by the Young's modulus of each member, when subjected to a constant load. In the example shown in Figure 6A, the multiple columnar members 50a', 50b', and 50c' are each composed of members with different Young's modulus (mechanical strength) or hardness.

[0073] More specifically, a columnar member 50a' with a relatively large Young's modulus is positioned near the center of the lower jig plate 46, where the load applied to the lower jig plate 46 is relatively small. A columnar member 50c' with a relatively small Young's modulus is positioned near the outer periphery of the lower jig plate 46, where the load applied to the lower jig plate 46 is relatively large. Furthermore, a columnar member 50b' with a relatively medium Young's modulus is positioned between the center and outer periphery of the lower jig plate 46, where the load applied to the lower jig plate 46 is relatively moderate. In other words, the Young's modulus of each columnar member 50a', 50b', and 50c' corresponds to the in-plane distribution of the load applied to the lower jig plate 46, and a gradient is formed in the Young's modulus of each columnar member 50 such that it decreases as it moves away from the center of the lower jig plate 46. Note that the cross-sectional area and shape of each columnar member 50a', 50b', and 50c' are all identical.

[0074] In this case, with the lower jig plate 46 supported by multiple columnar members 50a', 50b', and 50c', the pressure on the substrate 2 by the upper jig plate 44 applies a load to the lower jig plate 46, and consequently, a load is applied to the multiple columnar members 50a', 50b', and 50c'. As a result, strains corresponding to their Young's modulus occur in the multiple columnar members 50a', 50b', and 50c', and a deflection corresponding to these strains occurs in the lower jig plate 46.

[0075] In other words, as a result of relatively small strain occurring in the columnar member 50a', relatively small deflection occurs near the center of the lower jig plate 46. Also, as a result of relatively large strain occurring in the columnar member 50c', relatively large deflection occurs near the outer circumference of the lower jig plate 46. Furthermore, as a result of relatively moderate strain occurring in the columnar member 50b', relatively moderate deflection occurs at a position between the center and the outer circumference of the lower jig plate 46.

[0076] In this way, by correlating the amount of strain of the multiple columnar members 50a', 50b', and 50c' with the in-plane distribution of the load applied to the lower jig plate 46, and generating a deflection in the lower jig plate 46 corresponding to the amount of strain, the lower jig plate 46 can be deflected so that the load applied to each position of the lower jig plate 46 is balanced (see Figure 3B), thereby making the load applied to the substrate 2 uniform.

[0077] The Young's modulus E of the multiple columnar members 50 is preferably 100 GPa to 500 GPa. Furthermore, the ratio Emax / Emin of the Young's modulus Emax of the columnar member 50a' with the largest Young's modulus E to the Young's modulus Emin of the columnar member 50c' with the smallest Young's modulus E is preferably 2 / 1 to 4 / 1. By setting the Young's modulus range of each columnar member 50a', 50b', and 50c' to this range, it becomes possible to appropriately deflect each columnar member 50a', 50b', and 50c' according to the in-plane distribution of the load applied to the lower jig plate 46. Note that the support member 45 may also include other columnar members 50 having different Young's moduli from the columnar members 50a', 50b', and 50c'.

[0078] As a material having the Young's modulus described above, it is preferable that the multiple columnar members 50 be made of materials such as copper carbon, silicon nitride, or silicon carbide.

[0079] Furthermore, for example, the support member 45 may adjust the in-plane distribution of the load applied to the lower jig plate 46 by varying the lengths of the multiple columnar members 50. In the example shown in Figure 6B, the multiple columnar members 50a”, 50b”, 50c”, are each composed of members of different lengths, and the distribution is formed at the height of the upper ends of the multiple columnar members 50a”, 50b”, 50c”.

[0080] More specifically, a columnar member 50a'' with a relatively long length is positioned near the center of the lower jig plate 46 where the load applied to the lower jig plate 46 is relatively small. A columnar member 50c'' with a relatively short length is positioned near the outer circumference of the lower jig plate 46 where the load applied to the lower jig plate 46 is relatively large. Furthermore, a columnar member 50b'' with a relatively medium length is positioned between the center and outer circumference of the lower jig plate 46 where the load applied to the lower jig plate 46 is relatively medium. In other words, the lengths of each columnar member 50a'', 50b'', and 50c'' correspond to the in-plane distribution of the load applied to the lower jig plate 46, and a gradient is formed in the length of each columnar member 50 (height position of the upper end) such that it decreases as it moves away from the center of the lower jig plate 46. Note that the cross-sectional area and Young's modulus of each columnar member 50a'', 50b'', and 50c'' are all the same.

[0081] In this case, with the lower jig plate 46 supported by multiple columnar members 50a, 50b, and 50c, the pressure applied to the substrate 2 by the upper jig plate 44 applies a load to the lower jig plate 46, and consequently, a load is applied to the multiple columnar members 50a, 50b, and 50c, causing the multiple lower jig plates 46 to deflect in proportion to the lengths of the multiple columnar members 50a, 50b, and 50c.

[0082] In other words, relatively small deflection occurs near the center of the lower jig plate 46 where the columnar member 50a” is placed. Relatively large deflection occurs near the outer circumference of the lower jig plate 46 where the columnar member 50c” is placed. Relatively moderate deflection occurs at a position between the center and the outer circumference of the lower jig plate 46 where the columnar member 50b” is placed. In this way, by placing multiple columnar members 50a”, 50b”, and 50c” of different lengths according to the in-plane distribution of the load applied to the lower jig plate 46, and generating deflection of a corresponding amount in the lower jig plate 46, the lower jig plate 46 can be deflected so that the load applied to each position of the lower jig plate 46 is balanced (see Figure 3B), and the load applied to the substrate 2 can be made uniform. Note that the support member 45 may also include other columnar members 50 having different lengths from the columnar members 50a”, 50b”, and 50c”.

[0083] Furthermore, when adjusting the deflection of the lower jig plate 46, it is easier and more accurate to adjust the material (Young's modulus) or diameter (cross-sectional area) of the multiple columnar members 50 compared to adjusting the height of the multiple columnar members 50.

[0084] The arrangement of the multiple columnar members 50 is not limited to the example shown in Figure 4; for example, the multiple columnar members 50 may be arranged as shown in Figure 7A. In the example shown in Figure 7A, nine columnar members 50d are arranged in a matrix of 3 rows and 3 columns in the central region 520 of the installation section 52, indicated by the dotted line. In addition, multiple columnar members 50e are locally arranged outside the central region 520 of the installation section 52. The multiple columnar members 50d and 50e are arranged to extend radially from the center of the installation section 52. In the central region 520 of the installation section 52, the multiple columnar members 50d are arranged at a relatively high density, while outside the central region 520 of the installation section 52, the multiple columnar members 50e are arranged at a relatively low density.

[0085] In other words, in the example shown in Figure 7A, a relatively large number of columnar members 50d are densely arranged in the position where the load applied to the lower jig plate 46 (Figure 1B) is relatively small (central region 520) compared to the position where the load applied to the lower jig plate 46 is relatively large (outside the central region 520).

[0086] Figure 7B shows the results of a CAE (Computer-Aided Engineering) analysis of the distribution of deflection occurring in the lower jig plate 46 when it is supported by multiple columnar members 50d, 50e as shown in Figure 7A. In these figures, the areas shown in dark colors represent relatively large deflections, and the areas shown in light colors represent relatively small deflections.

[0087] As shown in Figure 7B, the central region 460 of the lower jig plate 46, which corresponds to the central region 520 of the installation section 52, is supported by a relatively large number of columnar members 50d. Therefore, in the central region 460, the lower jig plate 46 is given a relatively large support force from multiple columnar members 50d, making it less likely for the lower jig plate 46 to deflect. In other words, the deflection that occurs in the lower jig plate 46 in the central region 460 is adjusted to a small amount of deflection corresponding to the density (number) of multiple columnar members 50d. As a result of relatively small deflection occurring in the central region 460, the load applied to the lower jig plate 46 increases.

[0088] On the other hand, the area outside the central region 460 of the lower jig plate 46 is supported by a relatively small number of columnar members 50e. Therefore, in this area, the lower jig plate 46 is subjected to a relatively small support force from multiple columnar members 50e, making it easier for the lower jig plate 46 to deflect. In other words, the deflection that occurs in the lower jig plate 46 in the area outside the central region 460 is adjusted to a large amount of deflection corresponding to the density (number) of multiple columnar members 50e. As a result of the relatively large deflection occurring in this area, the load applied to the lower jig plate 46 is reduced.

[0089] In particular, in the lateral region 461 of the lower jig plate 46 that is not supported by the columnar member 50e, deflection of the lower jig plate 46 is especially likely to occur, and the amount of deflection of the lower jig plate 46 is particularly large compared to other regions.

[0090] In this way, by arranging multiple columnar members 50d, 50e according to the in-plane distribution of the load applied to the lower jig plate 46, the deflection of the lower jig plate 46 can be adjusted so that the load applied to each position of the lower jig plate 46 is balanced according to the arrangement of the multiple columnar members 50d, 50e, thereby making the load applied to the substrate 2 placed on the lower jig plate 46 uniform.

[0091] The arrangement in which the multiple columnar members 50 are installed in the installation section 52, as shown in Figure 4 or Figure 7A, is determined appropriately according to the in-plane distribution of the load applied to the lower jig plate 46. Note that the multiple columnar members 50 may also be installed in the installation section 52 in arrangements other than those shown in Figure 4 or Figure 7A.

[0092] Furthermore, these installation configurations, as described above, assume that when the lower jig plate 46 is not supported by the support member 45, relatively larger deflection occurs in the lower jig plate 46 closer to its center, and relatively smaller deflection occurs closer to its outer circumference. However, conversely, when the lower jig plate 46 is not supported by the support member 45, relatively smaller deflection occurs in the lower jig plate 46 closer to its center, and relatively larger deflection occurs closer to its outer circumference. In this case, the in-plane distribution of the load applied to the lower jig plate 46 will be roughly the opposite of the in-plane load distribution shown in Figure 5A, with the load applied near the center of the lower jig plate 46 becoming relatively larger, while the load applied near the outer circumference of the lower jig plate 46 becomes relatively smaller.

[0093] In such cases, the material (Young's modulus), shape, and arrangement of the multiple columnar members 50 placed in the installation section 52 should be appropriately selected so that the columnar members 50 placed near the center of the lower jig plate 46 experience greater distortion, while the columnar members 50 placed near the outer circumference of the lower jig plate 46 experience less distortion. For example, the columnar members 50 placed near the center of the lower jig plate 46 should have a smaller Young's modulus or a smaller diameter, while the columnar members 50 placed near the outer circumference of the lower jig plate 46 should have a larger Young's modulus or a larger diameter.

[0094] When the lower jig plate 46 is supported by multiple columnar members 50 having such strain characteristics, the lower jig plate 46 becomes more flexible near its center, making it possible to reduce the load applied to the lower jig plate 46. As a result, it becomes possible to reduce the load applied to the substrate 2 placed on the lower jig plate 46 at that location.

[0095] Furthermore, near the outer circumference of the lower jig plate 46, the lower jig plate 46 becomes less prone to bending, making it possible to increase the load applied to the lower jig plate 46. As a result, it becomes possible to increase the load applied to the substrate 2 placed on the lower jig plate 46 at that position.

[0096] As shown in Figure 3A, the mounting section 52 is made of a plate having a substantially flat shape and has the function of supporting the multiple columnar members 50 so that the multiple columnar members 50 are held in an upright position. In addition to the multiple columnar members 50, the mounting section 52 also has the function of supporting the heat dissipation column 53 (Figure 8). The mounting section 52 has multiple mounting holes (not shown) for installing the multiple columnar members 50, etc. The lower ends of the multiple columnar members 50 can be inserted into the multiple mounting holes and fixed in place. The number of multiple mounting holes may be equal to the number of multiple columnar members 50, or it may be more than the number of multiple columnar members 50. Each of the multiple columnar members 50 may be fixed to the mounting section 52 (mounting holes) with a connecting member such as a bolt, or it may be fixed to the mounting section 52 (mounting holes) with a connecting member such as an adhesive.

[0097] Note that installation holes are not required for the installation section 52. For example, multiple columnar members 50 may be fixed to the surface of the installation section 52, which has a planar shape (flat shape), using connecting members or linking members. Alternatively, the multiple columnar members 50 may simply be in contact with the surface of the installation section 52. Of the multiple columnar members 50 shown in Figure 4, it is preferable that the central columnar member 50a1 is fixed to the installation section 52 with a connecting member or adhesive member or the like.

[0098] Furthermore, it is preferable that the columnar member 50a1 is fixed to the lower surface of the lower jig plate 46 by a connecting member or adhesive member. As shown in Figure 8, by fixing only the columnar member 50a1 of the multiple columnar members 50 to the lower surface of the lower jig plate 46 via a connecting member 54, the deflection of the lower jig plate 46 can be reduced in the central part of the lower jig plate 46, and the load applied to the lower jig plate 46 can be relatively increased. In the example shown in Figure 8, the columnar member 50a1 is fixed to both the lower jig plate 46 and the installation part 52 via a connecting member 55. The connecting member 55 is composed of various fasteners such as bolts and pins.

[0099] When the substrate 2 is pressed with the upper jig plate 44 (Figure 3A), thermal deformation occurs in the lower jig plate 46 and other parts as the upper jig plate 44 and lower jig plate 46 heat up, which in the conventional technology made it difficult to apply a uniform load to the substrate 2. Therefore, in the substrate processing apparatus 10 of this embodiment, in order to prevent such problems, as shown in Figure 8, multiple heat dissipation columns 53, which have higher heat dissipation capabilities than multiple columnar members 50, are directly in contact with the lower jig plate 46. The details of the heat dissipation columns 53 will be described below.

[0100] Multiple heat dissipation columns 53 are provided at positions where the load applied to the lower jig plate 46 is relatively large. That is, as described above, in this embodiment, as shown in Figure 4, columnar members 50b and 50c with relatively small cross-sectional areas are arranged on the outer periphery of the lower jig plate 46 where the load applied to the lower jig plate 46 is large, in order to reduce the load, while columnar members 50a with relatively large cross-sectional areas are arranged on the central part of the lower jig plate 46 where the load applied to the lower jig plate 46 is relatively small, in order to increase the load. Alternatively, as shown in Figure 7A, a relatively small number of columnar members 50e are arranged on the outer periphery of the lower jig plate 46 where the load applied to the lower jig plate 46 is large, in order to reduce the load, while a relatively large number of columnar members 50d are arranged on the central part of the lower jig plate 46 where the load applied to the lower jig plate 46 is relatively small, in order to increase the load.

[0101] Thus, when multiple columnar members 50d are densely arranged in the center of the lower jig plate 46, or when a columnar member 50a with a large cross-sectional area is arranged, heat dissipation is promoted in the center of the lower jig plate 46 via these columnar members 50, and the temperature of the lower jig plate 46 tends to be lower in the center compared to the outer periphery of the lower jig plate 46. In addition, in the example shown in Figure 7A, there is an area on the outer periphery of the lower jig plate 46 where no columnar members 50d are arranged, and the temperature of the lower jig plate 46 tends to be relatively higher in this area. Therefore, without any countermeasures, the temperature of the center of the lower jig plate 46 will be lower than the temperature of the outer periphery of the lower jig plate 46, and a temperature difference may occur between the center and the outer periphery of the lower jig plate 46.

[0102] Therefore, in this embodiment, in order to reduce the temperature difference between the central part and the outer periphery of the lower jig plate 46, a plurality of heat dissipation columns 53 are installed in the installation section 52 according to the in-plane temperature distribution of the lower jig plate 46. More specifically, the plurality of heat dissipation columns 53 are arranged in positions where the temperature of the lower jig plate 46 is relatively high (the outer periphery of the lower jig plate 46 where the load applied to the lower jig plate 46 is large). This promotes heat dissipation through the plurality of heat dissipation columns 53 at the outer periphery of the lower jig plate 46, thereby reducing the temperature of the outer periphery of the lower jig plate 46. As a result, the temperature of the central part and the outer periphery of the lower jig plate 46 becomes balanced, and a temperature difference between the central part and the outer periphery of the lower jig plate 46 can be prevented.

[0103] In this way, the heat dissipation column 53 plays a role as a cooling mechanism, and by bringing the heat dissipation column 53 into contact with the part of the lower jig plate 46 that has become hot, it is possible to cool that part.

[0104] The number of heat dissipation columns 53 may be appropriately determined according to the temperature difference in each part of the lower jig plate 46. For example, if the temperature of the outer periphery of the lower jig plate 46 is significantly higher than the temperature of the central part, it is preferable to install a relatively large number of heat dissipation columns 53 at positions corresponding to the outer periphery of the lower jig plate 46. Alternatively, the multiple heat dissipation columns 53 may be installed densely as a cluster, or a relatively large number of heat dissipation columns 53 may be installed discretely.

[0105] Furthermore, if the temperature of the outer periphery of the lower jig plate 46 is not significantly different from the temperature of the central part, a relatively small number of heat dissipation columns 53 may be installed.

[0106] Multiple heat dissipation columns 53 may be arranged together with the multiple columnar members 50 in the area where the multiple columnar members 50 are arranged on the outer periphery of the lower jig plate 46. In this case, the multiple heat dissipation columns 53 may be arranged between the multiple columnar members 50 so as to be sandwiched (surrounded) by the multiple columnar members 50. Alternatively, the multiple heat dissipation columns 53 may be arranged in the area where the multiple columnar members 50 are not arranged on the outer periphery of the lower jig plate 46.

[0107] As shown in Figure 9, the heat dissipation column 53 has a column body 530, a cover 531, and an elastic part 532. The column body 530 is made of a columnar member and is installed upright on the upper surface of the installation part 52. The length of the column body 530 is shorter than the length of the columnar member 50 and is also smaller than the distance between the upper surface of the installation part 52 and the lower surface of the lower jig plate 46 (see Figure 8). The column body 530 may be made of the same material as the columnar member 50, or it may be made of a different material. For example, the column body 530 may be made of a material with lower rigidity (Young's modulus) than the columnar member 50 (especially the columnar member 50 arranged on the outer circumference of the lower jig plate 46).

[0108] Furthermore, the diameter of the column body portion 530 may be smaller than the diameters of the multiple columnar members 50. In this embodiment, the diameter of the column body portion 530 may be smaller than the diameter of the columnar member 50a arranged in the center of the lower jig plate 46, and may also be smaller than the diameter of the columnar members 50 arranged on the outer circumference of the lower jig plate 46. The column body portion 530 may be fixed to the surface of the installation portion 52, which has a substantially planar shape (substantially flat shape), by a connecting member such as an adhesive, or it may be fixed to the installation portion 52 via a connecting member as described later.

[0109] The elastic part 532 is made of an elastic material, such as a spring or rubber. Preferably, the elastic part 532 is made of a material with high thermal conductivity, such as stainless steel. One end of the elastic part 532 is connected to the top 530a of the column body 530, and the other end of the elastic part 532 is connected to the inner surface of the cover 531.

[0110] The cover portion 531 has a bottomed cylindrical shape, and its cross-sectional shape is approximately C-shaped. The cover portion 531 is made of a material with higher heat dissipation (thermal conductivity) than the column body portion 530, and covers the periphery (surface) of the column body portion 530. The cover portion 531 is made of a material with high thermal conductivity, and the material constituting the cover portion 531 is made of aluminum, iron, silver, copper, or an alloy containing at least one of these. The column body portion 530 may also be made of these materials with high thermal conductivity. By bringing the cover portion 531 into contact with the lower surface of the lower jig plate 46, heat from the lower jig plate 46 can be effectively dissipated to the outside via the cover portion 531. A portion of the heat transferred from the lower jig plate 46 to the cover portion 531 is dissipated to the installation portion 52 or the lower stage 42 (Figure 3A), etc., via the elastic portion 532 and the column body portion 530.

[0111] The cover portion 531 is attached to the top portion 530a of the column body portion 530 via the elastic portion 532. A first gap 533 is formed between the top portion 530a of the column body portion 530 and the inner surface of the cover portion 531, and a second gap 534 is formed between the side portion 530b of the column body portion 530 and the inner surface of the cover portion 531. The second gap 534 may be omitted, and the cover portion 531 may be brought into contact with the side portion 530b of the column body portion 530. The cover portion 531 is movable in the vertical direction due to the elastic force of the elastic portion 532, and the cover portion 531 is movable in the horizontal direction due to the elastic force of the elastic portion 532.

[0112] As shown in Figure 8, when the heat dissipation column 53 is installed on the installation section 52, the upper surface 531a of the cover section 531 is in close contact with the lower surface of the lower jig plate 46. The opening edge 531b of the cover section 531 is not in contact with the upper surface of the installation section 52, but is positioned at a predetermined distance from the upper surface of the installation section 52. However, the cover section 531 may be configured such that the opening edge 531b is in contact with the upper surface of the installation section 52.

[0113] As shown in Figure 3B, in this embodiment, columnar members 50 with relatively large amounts of strain are positioned at locations corresponding to the outer periphery of the lower jig plate 46. Therefore, when pressure is applied by the upper jig plate 44 while the outer periphery of the lower jig plate 46 is supported by multiple columnar members 50, a relatively large deflection occurs on the outer periphery of the lower jig plate 46. When the deflection on the outer periphery of the lower jig plate 46 acts on the heat dissipation column 53, the elastic part 532 shown in Figure 9 undergoes elastic deformation in the direction of the deflection of the lower jig plate 46. In response, the cover part 531, receiving the elastic force of the elastic part 532, moves in the direction of the deformation of the elastic part 532 while remaining in contact with the lower surface of the lower jig plate 46. As a result, the height position of the upper surface 531a of the cover part 531 fluctuates up and down in accordance with the deflection of the lower jig plate 46 or the elastic deformation of the elastic part 532.

[0114] Due to the elastic force of the elastic portion 532, the force with which the upper surface 531a of the cover portion 531 presses against the lower surface of the lower jig plate 46 is sufficiently small compared to the support force exerted on the lower jig plate 46 by the columnar members 50 (in the example shown in Figure 4, columnar members 50b and 50c) that support the outer periphery of the lower jig plate 46. Therefore, the function of adjusting the in-plane distribution of the deflection of the lower jig plate 46 by the multiple columnar members 50 is not hindered by the heat dissipation column 53. Thus, while adjusting the in-plane distribution of the deflection generated in the lower jig plate 46 by the multiple columnar members 50, heat dissipation at the outer periphery of the lower jig plate 46 can be promoted via the heat dissipation column 53.

[0115] As shown in Figures 10A to 10C, the heat dissipation column 53 can be fixed to the installation section 52 in various ways. For example, as shown in Figure 10A, the heat dissipation column 53 may be connected to the installation section 52 via a connecting member (non-penetrating connecting member) 54. In the example shown in Figure 10A, a connecting recess 535 is formed in the heat dissipation column 53, and a connecting recess 521 is formed in the installation section 52. One side of the connecting member 54 is inserted into the connecting recess 521 and screwed (engaged) into the connecting recess 521. The other side of the connecting member 54 is inserted into the connecting recess 535 and screwed (engaged) into the connecting recess 535. This makes it possible to fix the heat dissipation column 53 to the installation section 52 via the connecting member 54. The connecting member 54 consists of fasteners such as bolts and rivets, or other connecting members.

[0116] The columnar member 50 (50a1) is physically connected to the installation section 52 and the lower jig plate 46 via a connecting member (through-type connecting member) 55. The connecting member 55 passes through the inside of a through hole 501 formed in the columnar member 50 (50a1) and engages with the through hole. The upper end of the connecting member 55 is inserted into a connecting recess 462 formed on the lower surface of the lower jig plate 46 and engages with the connecting recess 462. The lower end of the connecting member 55 is inserted into a connecting recess 521 formed in the installation section 52 and engages with the connecting recess 521.

[0117] As a result, the installation section 52, the columnar member 50 (50a1), and the lower jig plate 46 are physically connected via the connecting member 55, and the columnar member 50 (50a1) is firmly fixed (clamped) between the installation section 52 and the lower jig plate 46. By connecting the columnar member 50 (50a1) not only to the lower jig plate 46 but also to the installation section 52, deflection of the lower jig plate 46 can be prevented more effectively at the position where the columnar member 50 (50a1) is placed.

[0118] Furthermore, as shown in Figure 10B, the heat dissipation column 53 may be embedded inside an installation hole 522 formed in the installation section 52. In the example shown in Figure 10B, an installation hole 522 is formed on the upper surface of the installation section 52, and a connecting recess 521 is formed on the bottom surface of the installation hole 522. One side of the connecting member 54 is inserted into the connecting recess 521 and engages with the connecting recess 521. The other side of the connecting member 54 is inserted into the connecting recess 535 and engages with the connecting recess 535. This makes it possible to fix the heat dissipation column 53 to the installation section 52 via the connecting member 54. By embedding the heat dissipation column 53 in the installation hole 522 in this way, displacement of the heat dissipation column 53 can be effectively prevented, and the positioning of the heat dissipation column 53 relative to the installation section 52 becomes easier.

[0119] Furthermore, the columnar member 50 (50a1), like the heat dissipation column 53, is embedded inside the installation hole 522 formed in the installation section 52, and in this state, it is connected to the installation section 52 and the lower jig plate 46 via the connecting member 55.

[0120] Furthermore, in the example shown in Figure 10C, the heat dissipation column 53 is not connected to the installation section 52 via the connecting member 54 shown in Figure 10B, but is simply embedded inside the installation hole 522. The heat dissipation column 53 may also be fixed to the bottom surface of the installation hole 522 via a connecting member such as an adhesive. Alternatively, the diameter of the installation hole 522 may be made approximately the same as the diameter of the column body 530 of the heat dissipation column 53, and the column body 530 may be tightly fitted into the installation hole 522 to prevent it from coming out.

[0121] As shown in Figure 11A, if the installation section 52 has multiple installation holes 522 formed in a 5x5 matrix, the multiple columnar members 50 and the multiple heat dissipation columns 53 may be installed in any of the multiple installation holes 522. Preferably, the multiple columnar members 50 are installed in the multiple installation holes 522 according to the in-plane distribution of the load applied to the lower jig plate 46.

[0122] In the drawing, the blacked-out and shaded areas indicate that the columnar members 50 are installed in the installation holes 522. In particular, the shaded areas represent the columnar members 50 connected to the lower jig plate 46 and the installation section 52 via the connecting member 55 shown in Figure 10A. The blacked-out areas represent the columnar members 50 connected to the installation section 52 via, for example, the connecting member 54 shown in Figure 10A, or the columnar members 50 simply installed in the installation holes 522 without the connecting member 54. In the drawing, the shaded areas indicate that the heat dissipation columns 53 are installed in the installation holes 522.

[0123] As shown in the figure, a columnar member 50 (50a1) is installed in the installation hole 522 located in the center of the installation section 52, and the columnar member 50 (50a1) is connected to the installation hole 522 and the lower jig plate 46 via a connecting member 55 shown in Figure 10A. This makes the central part of the lower jig plate 46 less prone to bending, and makes it possible to relatively increase the load applied to the central part of the lower jig plate 46.

[0124] Of the installation holes 522 formed in a 5x5 arrangement, two columnar members 50 and four heat dissipation columns 53 are installed in the multiple installation holes 522 located on the outermost periphery of the installation section 52. The two columnar members 50 are either connected to the installation section 52 via the connecting member 54 shown in Figure 10A, or simply installed in the installation holes 522, and are not connected to the lower jig plate 46.

[0125] Furthermore, the four heat dissipation columns 53 are each installed in installation holes 522 located at the four corners of the installation section 52. The four heat dissipation columns 53 are installed in the installation holes 522 in the manner shown in Figure 10B or Figure 10C. In this manner, it is preferable that the multiple heat dissipation columns 53 are arranged in positions corresponding to the outer periphery of the installation section 52, i.e., the outer periphery of the lower jig plate 46. At this position, the heat dissipation is lower than at the central part of the lower jig plate 46 where the columnar member 50 (50a1) is placed. Therefore, by installing multiple heat dissipation columns 53 at this position, the heat dissipation at the outer periphery of the lower jig plate 46 can be improved. In the illustrated example, the multiple heat dissipation columns 53 are installed in the installation holes 522 located at the outermost periphery of the installation section 52, but they may also be installed in installation holes 522 located further inward.

[0126] Furthermore, in the example shown in Figure 11B, the installation section 52 has multiple installation holes 522 formed concentrically, and multiple columnar members 50 and multiple heat dissipation columns 53 are installed in any of the multiple installation holes 522. More specifically, similar to the example shown in Figure 11A, a columnar member 50 (50a1) is installed in the installation hole 522 located in the center of the installation section 52, and the columnar member 50 (50a1) is connected to the installation section 52 and the lower jig plate 46 via the connecting member 55 shown in Figure 10A.

[0127] Multiple mounting holes 522 located on a circle closest to the center of the mounting section 52 are fitted with two columnar members 50. Additionally, multiple mounting holes 522 located in a circular area outside of these are fitted with two more columnar members 50. These columnar members 50 are either connected to the mounting section 52 via the connecting member 54 shown in Figure 10A, or simply fitted into the mounting holes 522, and are not connected to the lower jig plate 46.

[0128] Furthermore, four heat dissipation columns 53 are installed in multiple installation holes 522 located on a circle at the furthest distance from the center of the installation section 52. The four heat dissipation columns 53 are installed in the installation holes 522 in the manner shown in Figure 10B or Figure 10C. Even when multiple installation holes 522 are arranged concentrically in this manner, the heat dissipation performance on the outer periphery of the lower jig plate 46 can be improved by installing multiple heat dissipation columns 53 on the outer periphery of the installation section 52.

[0129] In the examples shown in Figures 11A and 11B, the installation section 52 has multiple installation holes 522 arranged in an orderly matrix or concentric pattern, but the multiple installation holes 522 may be formed randomly in the installation section 52. In this case as well, it is preferable that the multiple heat dissipation columns 53 are installed in the multiple installation holes 522 located on the outer periphery of the installation section 52.

[0130] The above-described installation configuration of the multiple heat dissipation columns 53 assumes that the temperature of the lower jig plate 46 is relatively lower towards the center and relatively higher towards the outer periphery. However, conversely, depending on the installation configuration of the multiple columnar members 50, the temperature of the lower jig plate 46 may be relatively higher towards the center and relatively lower towards the outer periphery. In such cases, multiple heat dissipation columns 53 can be installed in the center of the lower jig plate 46 and these heat dissipation columns 53 can be brought into contact with the lower surface of the lower jig plate. This makes it possible to promote heat dissipation through the heat dissipation columns 53 in the center of the lower jig plate 46, thereby reducing the temperature in the center of the lower jig plate 46. As a result, the temperature of the lower jig plate 46 can be balanced between the center and the outer periphery, and the temperature at each position of the lower jig plate 46 can be made uniform.

[0131] As described above, the substrate processing apparatus 10 according to this embodiment has a plurality of columnar members 50 that support the lower jig plate 46, as shown in Figure 8. With the lower jig plate 46 supported by the plurality of columnar members 50, by applying pressure to the substrate 2 placed on the lower jig plate 46, the in-plane distribution of deflection generated in the lower jig plate 46 can be adjusted according to the shape, material, or arrangement of the plurality of columnar members 50, and the in-plane distribution of the load applied to the substrate 2 can be adjusted to be uniform.

[0132] Furthermore, in this embodiment, by bringing multiple heat dissipation columns 53 into contact with the lower surface of the lower jig plate 46 in positions where no columnar members 50 are arranged, or in positions where the number of columnar members 50 is relatively small, it is possible to dissipate heat from the lower jig plate 46 via the heat dissipation columns 53 without affecting the magnitude of the support force applied to the lower jig plate 46 from the multiple columnar members 50. As a result, for example, temperature differences are less likely to occur in the lower jig plate 46 between positions where columnar members 50 are arranged and positions where they are not arranged (or between positions where the number of columnar members 50 is relatively small and positions where it is relatively large), and variations in surface accuracy (e.g., flatness and smoothness) at each position of the lower jig plate 46 due to thermal deformation of the lower jig plate 46 are less likely to occur. Therefore, a uniform load can be applied to the substrate 2 placed on the lower jig plate 46.

[0133] Furthermore, in this embodiment, there is an installation section 52 on which a plurality of columnar members 50 and a plurality of heat dissipation columns 53 are installed. As a result, the positioning of the plurality of columnar members 50 is made easier, displacement of the plurality of columnar members 50 is prevented, and the lower jig plate 46 can be supported by the plurality of columnar members 50 in a stable state. In addition, the positioning of the plurality of heat dissipation columns 53 is made easier, displacement of the plurality of heat dissipation columns 53 is prevented, and the plurality of heat dissipation columns 53 can be brought into contact with the lower surface of the lower jig plate 46 in a stable state.

[0134] It should be noted that the present invention is not limited to the embodiments described above, and can be modified in various ways within the scope of the present invention.

[0135] In the above embodiment, all of the columnar members 50 had a cylindrical shape. However, it is also possible that one of the columnar members 50 is cylindrical and the others are polygonal prisms, cones, or polygonal pyramidal shapes. Multiple columnar members 50 with such shapes will have different amounts of strain when subjected to a constant load. Therefore, in this case as well, similar to the above embodiment, the support member 45 can adjust the in-plane distribution of the load applied to the lower jig plate 46 and adjust the deflection that occurs in the lower jig plate 46 based on the differences in the amount of strain resulting from the differences in the shapes of the multiple columnar members 50.

[0136] In the above embodiment, the support member 45 may apply a support force to the lower jig plate 46 according to the height distribution of the substrate 2 on which the multiple elements 4a, 4b, and 4c are arranged. Non-uniformity of the load applied to the substrate 2 may occur due to the height distribution of the substrate 2. The height distribution of the substrate 2 may be caused by differences in the shape and size of the multiple elements 4a, 4b, and 4c, asymmetry in the arrangement of the multiple elements 4a, 4b, and 4c on the substrate 2, or deformation of the multiple elements 4a, 4b, and 4c when pressurized. For example, if no measures are taken, a relatively small load may be applied at positions where the height of the substrate 2 is relatively low, and a relatively large load may be applied at positions where the height of the substrate 2 is relatively high (the opposite pattern is also possible).

[0137] Even in such cases, at positions where the height of the substrate 2 is relatively low, a relatively large support force is applied to the lower jig plate 46 from the support member 45 (multiple columnar members 50) by arranging columnar members that are less prone to deformation, thereby increasing the load applied to the lower jig plate 46. At positions where the height of the substrate 2 is relatively high, a relatively small support force is applied to the lower jig plate 46 from the support member 45 (multiple columnar members 50) by arranging columnar members 50 that are easily deformed, thereby decreasing the load applied to the lower jig plate 46. In this way, the load applied to each position of the lower jig plate 46 can be balanced, and the load applied to the substrate 2 can be made uniform.

[0138] In the above embodiment, as shown in Figure 2, the shape of the substrate 2 was approximately rectangular, but it may be circular or other polygonal.

[0139] In the above embodiment, as shown in Figure 8, the multiple heat dissipation columns 53 were in direct contact with the lower surface of the lower jig plate 46. However, the multiple heat dissipation columns 53 may be indirectly in contact with the lower surface of the lower jig plate 46. In this case as well, the same effects as in the above embodiment can be obtained.

[0140] In the above embodiment, as shown in Figure 8, multiple heat dissipation columns 53 were in contact with the lower jig plate 46, but a single heat dissipation column 53 may be in contact with the lower jig plate 46.

[0141] The configuration of the heat dissipation column 53 shown in Figure 9 is an example and may be modified as appropriate. For example, at least a portion of the columnar members 50b and 50c located on the outer periphery of the installation section 52 shown in Figure 4 may be made of a material with high thermal conductivity, thereby improving the heat dissipation of the columnar members 50b and 50c compared to the columnar member 50a located in the center of the installation section 52. This makes it possible to make the columnar members 50b and 50c function as heat dissipation columns 53, and the columnar members 50b and 50c themselves can promote heat dissipation on the outer periphery of the lower jig plate 46.

[0142] Alternatively, the columnar members 50 (such as the columnar members 50b, 50c shown in Figure 4) that support the outer periphery of the lower jig plate 46 may be equipped with a cover portion 531 and an elastic portion 532 as shown in Figure 9, thereby allowing the columnar members 50 to function as heat dissipation columns 53. In this case, it is preferable to appropriately adjust the length of the columnar members 50 and the elastic force of the elastic portion 532 so that excessive support force is not applied from the columnar members 50 to the lower jig plate 46. [Explanation of symbols]

[0143] 2… Circuit board 4... Element array 4a, 4b, 4c... elements 6…Pressure-sensitive paper 10... Circuit board processing equipment 20… Stand 21…Upper part of the support structure 22...Movable pressure section 220…Through hole 221...Central area 23... Lower part of the support structure 24... Guide bush 25… Guide shaft 30... Load generation part 40... Substrate pressurization section 41…Upper stage 42... Lower stage 43…Upper mounting section 44… Upper jig plate 45...Support member 46... Lower jig plate 460…Central area 461…Lateral area 462...Connecting recess 50, 50a~50g... Columnar member 500…Aggregation 501…Through hole 52…Installation part 520…Central area 521...Connecting recess 522…Installation hole 53… Heat dissipation column 530...Main column section 530a...Top 530b...side 531...Cover part 531a…Top surface 531b…Opening edge 532...Elastic part 533...First gap 534...Second gap 535...Recess for connecting 54, 55… Connecting members

Claims

1. A lower jig plate on which the object to be pressed is placed, Multiple columnar members supporting the lower jig plate, A substrate processing apparatus having a heat dissipation column that directly or indirectly contacts the lower jig plate and has higher heat dissipation performance than the plurality of columnar members.

2. The aforementioned heat dissipation column consists of multiple parts, The substrate processing apparatus according to claim 1, wherein, in a direction perpendicular to the thickness direction of the lower jig plate, the plurality of heat dissipation columns are arranged outside of at least one columnar member located in the central part of the lower jig plate.

3. The substrate processing apparatus according to claim 1 or 2, wherein the heat dissipation column comprises a column body and a cover portion that covers the surface of the column body and is made of a material with a higher thermal conductivity than the column body.

4. The substrate processing apparatus according to claim 3, wherein the cover portion is attached to the top of the column body portion via an elastic member.

5. The substrate processing apparatus according to claim 1 or 2, wherein the heat dissipation column is provided outside the center of the lower jig plate in a direction perpendicular to the thickness direction of the lower jig plate.

6. The substrate processing apparatus according to claim 1 or 2, having an installation section on which a plurality of the columnar members and the heat dissipation column are installed.

Images