レーザプロファイル計測装置

Abstract

To provide a laser profile measuring device with which, of a more compact structure though, it is possible to perform more accurate laser profile measurement.SOLUTION: A laser profile measuring device comprises: a reflection attenuation unit that passes at least a portion of the laser entered from a first direction through and generates a measurement object laser that proceeds in the first direction, and that causes a residual component of the laser to be reflected in a second direction different from the first direction so as to generate an attenuated laser; a capture unit that is provided on one side in the first direction of the reflection attenuation unit and captures the measurement object laser; a casing that extends in the first direction and covers the reflection attenuation unit and capture unit from the outside; an attenuation cooling medium that is provided on at least one section in a circumferential direction of the casing, as seen from the first direction; and a pivoting support unit that supports the casing and attenuation cooling medium so as to be capable of rotationally moving toward an incidence direction of the laser.SELECTED DRAWING: Figure 4

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