レーザービームの調整方法およびレーザー照射装置

Abstract

To provide a laser beam adjustment method and laser irradiation device that can easily adjust a laser beam while suppressing contamination of optical components.SOLUTION: A laser beam adjustment method includes: a diffractive optical element arrangement step 101 of arranging a diffractive optical element between a beam adjustment unit and a concentrator in a laser irradiation device that includes the beam adjustment unit having first and second lens units that can move along the optical axis between a laser oscillator and the concentrator; a laser beam irradiation step 102 of emitting a laser beam from the laser oscillator; an imaging step 103 of imaging the laser beam bifurcated by the diffractive optical element; a bifurcation interval measurement step 104 of measuring a bifurcation interval of the imaged laser beam; and a bifurcation interval adjustment step 105 of adjusting a divergence angle of the laser beam by adjusting the positions of the first and second lens units on the basis of the measured bifurcation interval.SELECTED DRAWING: Figure 3

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