撮像装置及び切削装置
JP7891904B2Active Publication Date: 2026-07-17DISCO CORP
Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Patents
- Current Assignee / Owner
- DISCO CORP
- Filing Date
- 2022-11-15
- Publication Date
- 2026-07-17
AI Technical Summary
Benefits of technology
【0012】 本発明は、対物レンズへの異物の付着を抑制することができるという効果を奏する。
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Abstract
To prevent a foreign matter from adhering to an objective lens.SOLUTION: An imaging device 30 includes: an objective lens which is opposed to a workpiece that is the subject; an imaging element which captures an image formed by the objective lens; a housing 32 which stores at least the objective lens and in which an opening 322 is formed in an area corresponding to the objective lens; a shielding member 72 which covers the opening 322; a shielding member movement unit 78 which moves the shielding member 72 between the closed position where the shielding member 72 shields the opening 322 and the open position where the shielding member opens the opening 322; and a guide member 71 formed with a pair of guide grooves 75, 76 which extend along the movement direction of the shielding member 72 and accommodate both ends of the shielding member 72 in such a state that the shielding member 72 is movable. The guide member 71 has a fluid supply port 81 that opens to the guide groove and a fluid supply path 80 whose one end communicates to the fluid supply port 81 and whose other end is connected to the fluid supply source.SELECTED DRAWING: Figure 4
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