固定具並びに関連するインプリントシステム及び方法

Abstract

A fixture and related systems and methods are disclosed. According to one implementation, the method includes applying a resin (124) onto a substrate (122) and positioning the substrate on a chuck (110) of a base (108) of the fixture (104). The method also includes moving a mold (118) to engage the resin and curing the resin. The method also includes separating the mold and the resin and determining a separation force applied as a function of a separation distance between the mold and the resin during separation of the mold and the resin.

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