基板保持装置および基板処理装置

Abstract

To prevent dust emission from suction pads and wear of the suction pads in a substrate holding device that suction-holds a substrate on a mounting table by the suction pads in a state of positioning the substrate at a predetermined position with respect to the mounting table, and in the substrate processing apparatus using the substrate holding device.SOLUTION: A substrate holding device comprises: a mounting table having a mounting surface on which a substrate is placed; a lifting / lowering unit that places the substrate on the mounting surface by lowering a plurality of support pins supporting the substrate from below; a suction unit that holds the substrate placed on the mounting surface by suctioning a peripheral portion of the substrate from below with suction pads; a positioning unit that positions the substrate by abutting against an end face of the substrate supported by the plurality of support pins at a positioning position located above and spaced from the suction pads; and a control unit that controls the lifting / lowering unit, the suction unit, and the positioning unit. The substrate positioned by the positioning unit is placed on the mounting surface by the lifting / lowering unit and suction-held by the suction unit.SELECTED DRAWING: Figure 6C

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