画像処理方法、画像処理装置、及び学習方法
JP7892041B2Active Publication Date: 2026-07-17LASERTEC CORP
Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Patents
- Current Assignee / Owner
- LASERTEC CORP
- Filing Date
- 2024-10-04
- Publication Date
- 2026-07-17
AI Technical Summary
Benefits of technology
【0032】 本開示によれば、比較対象の撮像画像の撮像位置を考慮した参照画像を用いた検査の実現に寄与することができる新規な画像処理方法などを提供することができる。
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Abstract
This invention provides a novel technology that can contribute to the realization of inspections using reference images that take into account the acquisition position of the image being compared. [Solution] The image processing method comprises the steps of: acquiring an inspection image which is an image of the inspection target area of the inspection target included in an image of the inspection target taken by a detector having a predetermined imaging range; acquiring position data indicating the imaging position which is the position of the inspection image in the predetermined imaging range; generating a reference image based on the design information of the inspection target; and inspecting the inspection target area by comparing the inspection image and the reference image, wherein in the step of generating the reference image, different reference images are generated for areas that show a common structure in the design information by using the position data.
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