Annular micro electromechanical angular velocity sensor

Abstract

The present invention relates to a microelectromechanical angular velocity sensor (100) having a flexible ring structure (110) suitable for forming a circle in an idle state and generating an excitation vibration substantially parallel to the plane of the circle above a substrate, wherein the excitation vibration is superimposed on a detection vibration generated by a Coriolis force during rotation of the ring structure (110). The microelectromechanical angular velocity sensor also has at least one coupling structure (120) connected to the ring structure (110) and designed to be suitable for compensating for an orthogonal error of the angular velocity sensor (100) together with an electrode (130) fixed to the substrate.

Description

Detailed Description of the Invention

[0001] The present invention relates to an annular microelectromechanical angular velocity sensor.

[0002] The annular microelectromechanical angular velocity sensor operates according to the principle of a self - contained structure. The annular microelectromechanical angular velocity sensor is usually designed as a circle or a ring and is made to vibrate above the substrate parallel to the substrate plane. When the ring is rotated about a rotation axis perpendicular to the substrate surface, the vibration motion of the ring generates a Coriolis force on each mass point of the ring. Its amplitude depends on the rotational angular velocity. Since the vibration direction of this detected vibration is determined in principle by the position of the ring and the excitation vibration, and the parameters of the excitation vibration are also known, the detected vibration can be read out to determine the angular velocity.

[0003] In practice, plate electrodes arranged along the circumference of the ring are often used to excite and read the vibration. However, this takes up a lot of space and does not meet all the requirements of the angular velocity sensor. Such plate electrodes can also be used to compensate for the so - called cross - axis error. The cross - axis error often affects the microelectromechanical sensor due to the inevitably occurring manufacturing tolerances.

[0004] However, the problem here is that the electrode plate arranged outside along the circumference of the ring has a limited electrode area. Since a larger signal can be input or read out through a larger electrode area, the use of an external electrode plate is disadvantageous. Also, it is not always possible to optimally design the excitation electrode and the read - out electrode with an external electrode plate.

[0005] Therefore, an object of the present invention is to identify an annular microelectromechanical angular velocity sensor that has a large electrode area, has a compact design, and enables compensation of the cross - axis error without restricting the possibility of exciting the ring of the angular velocity sensor or reading out the vibration.

[0006] This objective is achieved by the subject matter of the claims.

[0007] The micro-electromechanical angular velocity sensor has a flexible ring structure, which forms a circle in a stationary state and is suitable for generating an excited vibration substantially parallel to the plane of the circle above the substrate. The excited vibration is superimposed on the detected vibration generated by the Coriolis force during the rotation of the ring structure. Furthermore, the angular velocity sensor has at least one coupling structure, which is connected to the ring structure and, together with electrodes fixed to the substrate, is designed to be suitable for compensating for the orthogonality error of the angular velocity sensor.

[0008] Therefore, attempts to compensate for orthogonality errors via plate electrodes or other means that directly act on the ring structure of the angular velocity sensor are no longer made. Instead, a coupling structure can be connected to the ring structure and a compensatory force can be applied to it. The coupling structure can transmit these compensatory forces to the ring structure and compensate for orthogonality errors. The specific design of the coupling structure is arbitrary, as long as the movement of the coupling structure caused by the compensatory force is transmitted to the ring structure to a sufficient extent so that the strength of the compensatory force has a controllable and measurable effect on the movement of the ring structure. In micro-electromechanical devices, the vibration amplitude is usually small, so compensation using a first approximation is usually sufficient.

[0009] Furthermore, using a coupled structure allows for greater flexibility in electrode placement and design, providing a larger overall electrode area and enabling the advantageous design of electrodes with different functions, such as excitation electrodes and readout electrodes.

[0010] In particular, if the spring stiffness of the various components of the angular velocity sensor is appropriately designed, using a coupling structure makes it possible to achieve a vibration amplitude greater than that of the coupling structure by the ring structure. This can be used to create advantageous electrode designs, such as reducing the gap distance or operating in a linear region.

[0011] The angular velocity sensor may further include a first spring element connecting the ring structure to the substrate, with at least one coupling structure and the first spring element acting on the same side of the ring structure. Thus, the ring structure is connected to the substrate via the spring element. In this way, it is ensured that the ring structure can vibrate as freely as possible. All spring elements act from one side of the ring structure, i.e., from the inside or outside, ensuring a force- and torque-free coupling to the substrate. And one or more coupling structures act on the same side as the spring element. If necessary, the coupling structures are also connected via the first spring element. In this way, the important components of the angular velocity sensor are arranged together, so a relatively compact design of the angular velocity sensor can be achieved. In particular, when the components are located inside the ring structure, the size of the angular velocity sensor is determined by the size of the ring structure.

[0012] An angular velocity sensor can have multiple coupling structures evenly distributed along the circumferential direction of the ring structure. This improves response behavior and increases the possibility of compensating for orthogonal errors. Furthermore, the coupling structures can be designed to be structurally identical due to their uniform distribution, without causing non-uniform force distribution on the ring structure. This simplifies the manufacturing of the angular velocity sensor.

[0013] The electrodes for compensating for orthogonal errors can electrically interact with the portion of the coupling structure that extends substantially radially around the ring structure. This allows the coupling structure to be effectively rotated around the circumferential axis of the ring structure, i.e., the axis perpendicular to the substrate plane. This rotation is transmitted to the ring structure by the corresponding design of the coupling structure, resulting in a force that compensates for orthogonal errors.

[0014] The coupling structure can be designed as a frame connected to a ring structure at a first edge and to a substrate at a second opposite edge. At least a portion of the electrodes fixed to the substrate are formed within the frame. This allows all or part of the electrodes used to control the angular velocity sensor to be placed within the coupling structure, resulting in a compact design that requires no additional space.

[0015] The electrodes for correcting orthogonal errors can electrically interact with a third edge of the frame that extends substantially radially through the ring structure. Thus, the aforementioned interaction for compensating for orthogonal errors is carried out via appropriately positioned edges of the frame.

[0016] The first and second sides of the frame may be longer than the third side of the frame. In the radial direction, the frame is relatively short, and in the tangential direction, it is relatively long. The connection point between the frame and the ring structure is located on the corresponding first side and is therefore a relatively large distance relative to the frame dimensions from the point where electrodes for compensating for orthogonal errors are positioned. Thus, a long lever arm exists between the point where the force for compensating for orthogonal errors is generated and the point where it is transmitted to the ring structure. As a result, relatively small excitation by the electrodes is sufficient to compensate for the orthogonal errors. The magnitude of the charge or voltage on the electrodes can lead to other problems such as crosstalk, so this can be omitted, simplifying the compensation. Furthermore, energy consumption is also reduced.

[0017] The coupling structure, along with electrodes fixed to the substrate, can be designed to be suitable for generating excited vibrations and / or measuring detected vibrations. This means that not only orthogonal error compensation, but also the excitation and readout of vibrations of the ring structure can be performed via the coupling structure. This makes it possible to improve the operation of the angular velocity sensor. Driving, readout, and / or error compensation can be mediated by the same or different coupling structures. The aforementioned advantages regarding electrode area and / or electrode design benefit all electrodes.

[0018] Furthermore, the angular velocity sensor may include a second spring element connecting the coupling structure to the ring structure, which can deform radially in the ring structure such that the radial deflection of the coupling structure leads to a larger radial deflection of the ring structure. Thus, the second spring element fitted between the coupling structure and the ring structure plays a role in amplifying the amplitude. Relatively small deflections of the coupling structure accompanied by large accelerations (comparable to force shocks) over short periods of time are absorbed by the second spring element. The second spring element is designed so that low-amplitude force shocks lead to radial deformation, resulting in a larger (slower) deflection in the ring structure than in the coupling structure. This has the advantage of allowing a large amplitude to be given to the ring structure without requiring space to give a similarly large amplitude to the coupling structure. As a result, the required space can be further reduced. Moreover, such amplitude amplification allows the coupling structure to be excited or read out with relatively small deflections. This means that the corresponding electrodes can be designed with small gap widths and can operate in the linear region. At the same time, the vibration amplitude of the ring structure remains large, which is advantageous for accurate determination of angular velocity.

[0019] The angular velocity sensor may include a third spring element that connects the coupling structure to the substrate. This improves the mobility of the coupling structure. As a result, the coupling structure as a whole can also move, and the movement does not have to be due to deformation of the coupling structure, thus making the transmission of forces between the coupling structure and the ring structure more flexible.

[0020] At least two of the coupling structures can be coupled to each other so that their movements are coupled to one another. In particular, the coupling structures can be forced to move in common mode or push-pull mode via the coupling. This can improve the stability of the angular velocity sensor's vibrations and improve readout accuracy.

[0021] The present invention will be described illustratively below with reference to the figures. The following description should not be understood as restrictive. The present invention is defined solely by the subject matter of the claims.

[0022] Figure 1 is a schematic diagram of an annular microelectromechanical angular velocity sensor.

[0023] Figure 2 is another schematic diagram of an annular microelectromechanical angular velocity sensor.

[0024] Figure 3 is another schematic diagram of an annular microelectromechanical angular velocity sensor.

[0025] Figure 4 is a schematic diagram of electrodes for compensating the cross-axis error of an annular angular velocity sensor.

[0026] Figure 5 is a schematic diagram of plate-shaped electrodes for exciting and / or reading out the vibration of an annular angular velocity sensor.

[0027] Figure 6 is a schematic diagram of comb-shaped electrodes for exciting and / or reading out the vibration of an annular angular velocity sensor.

[0028] Figure 7 is a schematic diagram of various electrodes for operating an annular angular velocity sensor.

[0029] Figure 1 is a schematic diagram of an annular microelectromechanical angular velocity sensor 100. This angular velocity sensor has a flexible ring structure 110 that forms a circle in a stationary state and is suitable for generating excitation vibrations substantially parallel to the plane of the circle above the substrate. The excitation vibrations are superimposed on the detection vibrations generated by the Coriolis force during the rotation of the ring structure 110.

[0030] The ring structure 110 can be, for example, a self-contained bending beam spring disposed above a substrate (not shown) lying parallel to the image plane. That is, the ring structure 110 consists substantially of a bar whose height (perpendicular to the image plane) is significantly higher than its width (in the image plane). As a result, the ring structure can be deformed parallel to the substrate but is rigid and inflexible with respect to deformation perpendicular to the substrate.

[0031] To measure the angular velocity, the ring structure 110 is set to a fundamental vibration or an excitation vibration, and for example, an elliptical deformation occurs along a certain direction. When the angular velocity sensor 100 rotates about an axis perpendicular to the substrate, a Coriolis force is generated on the mass points of the ring structure 110 due to the movement resulting from the excitation vibration, and a change occurs in the vibration of the ring structure 110. This change can be regarded as, for example, the superposition of another vibration with respect to the excitation vibration, but the vibration direction of this detected vibration is different from the vibration direction of the excitation vibration. In other words, the Coriolis force excites a vibration mode different from the vibration mode of the excitation vibration. This change in the vibration generated by the ring structure 110 can be measured to determine the angular velocity of rotation.

[0032] Although the ring structure 110 is shown as a circle at rest, this is not intended to exclude any shape that is similarly suitable for detecting the Coriolis force / angular velocity. For example, the ring structure 110 can deviate from the circular shape at rest and be formed as, for example, a deformed circle, a polygon with or without rounded edges, etc. All these deformations are understood to fall within the term "circle".

[0033] Furthermore, the angular velocity sensor 100 has at least one coupling structure 120 connected to the ring structure 110 and designed to be suitable for compensating the orthogonal error of the angular velocity sensor 100 together with the electrode 130 fixed to the substrate. Such an orthogonal error almost inevitably exists due to the manufacturing tolerances that occur during the manufacture of microelectromechanical components. In particular, because an etching process is used during manufacture, the dimensions of parts with the same design may vary slightly. For example, the thickness of the ring structure 110 may vary along the circumferential direction. This results in an undesirable situation where the spring stiffness is different and the response behavior to the influence of force is different. In order to operate the angular velocity sensor 100 as if there is no deviation from such an ideal behavior, it is necessary to compensate for the deviation by applying an additional force. <00001 (This seems to be an incomplete or incorrect tag. Assuming it should be

[0034] as per the sequence, it remains unchanged here.)

[0034] This is typically attempted with a plate electrode 135. The plate electrode 135 is positioned outside or inside the ring structure 110 and interacts electrically with the ring structure 110. However, the problem here is that, due to the flat design of the plate electrode 135, it is not possible to generate sufficient compensatory force in the desired manner. Furthermore, it is not possible to apply force to the ring structure 110 in any direction via the plate electrode 135, and the area available for the plate electrode 135 is limited by the circumference of the ring structure 110.

[0035] To avoid such problems, the angular velocity sensor 100 has at least one, preferably more, coupling structures 120. The coupling structures 120 receive forces via electrodes 130 connected to the substrate. The coupling structures 120 are designed to accurately transmit these compensating forces to the ring structure 110. The specific design of the coupling structures 120 and electrodes 130 is arbitrary as long as this function is achieved.

[0036] In particular, the coupling structure 120 must be able to apply a tangential force to the ring structure 110. This tangential force is symbolized by the double arrow A in Figure 1. This is achieved, for example, by allowing the coupling structure 120 to rotate about an axis perpendicular to the substrate, thereby causing a tangential tensile force to act at the connection point between the coupling device 120 and the ring structure 110.

[0037] As shown in Figure 1, the coupling structure 120 is preferably connected to the ring structure 110 at exactly one point for this purpose. This allows for precise determination of the point of application of the compensating force. However, the coupling structure 120 can also be connected to the ring structure 110 at several points, thereby achieving, for example, dimensional stability in the connection region.

[0038] As shown in Figure 1, the electrode 130 can be positioned in different parts of the coupling structure 120 to compensate for orthogonal errors. This increases the effective area available for the electrode region. It is also possible to deviate from the plate structure and design the electrode 130 to precisely match its function. This applies not only to the electrode 130 for compensating for orthogonal errors, but also to all electrodes acting on the coupling structure 120. This will be explained in more detail below.

[0039] In this process, electrodes for compensating for orthogonal errors can preferably be positioned on portions of the coupling structure 120 that substantially extend radially over the ring structure 110. A substantially radially running portion is understood here as a portion where the radial vector is greater than the tangential vector, such as the outer side of the coupling structure 120 shown in Figure 1. Then, the electrode 130 can be simply designed as a plate electrode that generates a force perpendicular to the substantially radially running portion of the coupling structure 120, i.e., a substantially tangentially running force suitable for tangentially displacing or twisting the coupling structure 120.

[0040] By using an appropriate shape and suitable electrodes 130, radial forces can be applied to the ring structure 110 via the coupling structure 120, in addition to tangential forces. In contrast to conventionally used plate electrodes 135, the coupling structure 120 can thus generate compensatory forces in all directions and apply them precisely to the ring structure 110. This effectively reduces orthogonal errors, especially when multiple coupling structures 120 are used. The electrode area can also be increased in this way by dividing the electrode area.

[0041] As shown in Figure 2, the angular velocity sensor 100 may include a first spring element 140, which connects the ring structure 110 to the substrate via an anchor structure 142. The first spring element 140 serves to hold the ring structure 110 above the substrate while simultaneously enabling the vibrations necessary for the operation of the angular velocity sensor 100. The design of the first spring element 140 is at the discretion of those skilled in the art. This is symbolized in Figure 2 by the use of a zigzag line as a general pictogram for "spring". The decisive factor in this context is not the shape of the first spring element 140, but rather that at least one coupling structure 120 and all of the first spring element 140 act on the same side of the ring structure 110. In Figure 2, this is inside the ring structure 110. However, the first spring element 140 and at least one coupling structure 120 can also be positioned outside the ring structure 110.

[0042] By connecting the first spring element 140 and the coupling structure(s) 120 to the same side of the ring structure 110, a compact design of the angular velocity sensor 100 can be achieved. In particular, the side of the ring structure 110 without the spring element 140 and the coupling structure(s) 120 is free for the arrangement of various other components of the angular velocity sensor 100.

[0043] Figure 3 is another schematic diagram of an exemplary embodiment of the angular velocity sensor 100. In addition to the components described above, the angular velocity sensor 100 has a plurality of coupling structures 120 evenly distributed along the circumferential direction of the ring structure 110. Furthermore, in the example of Figure 3, a second spring element 150 that connects the coupling structures 120 to the ring structure 110 and a third spring element 160 that connects the coupling structures 120 to the substrate are depicted. The anchor structures that connect the first and third spring elements 140 and 160 to the substrate are not shown for clarity. The second and third spring elements 150 and 160 are each optional.

[0044] The use of multiple coupling structures 120 distributed along the circumference of the ring structure 110 allows for sufficient compensatory force to be applied to the ring structure 110 at each point to compensate for orthogonal errors. Any uniform distribution has the further advantage that, because uniform distributions are theoretically easier to handle, the results of the force effects on the ring structure can be more easily estimated or predicted. Furthermore, uniformly designed coupling structures 120 thus guarantee the desired rotational symmetry of the angular velocity sensor 100. Uniformly shaped coupling structures 120 are easier to manufacture than coupling structures 120 of different shapes (for example, structures of uniform dimensions are easier to manufacture in the etching process), so the uniform distribution of coupling structures 120 also simplifies the manufacturing process of the angular velocity sensor 100.

[0045] As shown in Figure 3, the coupling structure 120 can be designed as a frame connected to the ring structure 110 at a first side 122 and to the substrate at a second opposite side 124. This allows at least a portion of the electrode 130, which is fixed to the substrate and can interact with the coupling structure 120, to be formed within the frame. In this way, the structure for exciting / detecting the motion of the coupling structure 120 can be arranged within the angular velocity sensor 100 in a compact and space-saving manner. Furthermore, by using the frame, the area that can interact with the electrode is increased compared to the area of ​​the circumferential portion of the ring structure 110 that interacts with a simple plate electrode 135.

[0046] As further illustrated in Figure 3, the first and second sides 122 and 124 of the frame may be longer than the third side 126 of the frame, which extends substantially radially through the ring structure 110. Thus, the frame has an elongated rectangular or trapezoidal shape and is connected to the ring structure 110 or the substrate at its longitudinal sides. On the one hand, this is a space-saving design for the coupling structure 120.

[0047] On the other hand, this shape of the coupling structure 120 allows the electrode 132 to be positioned to electrically interact with the third side surface 126 in order to compensate for orthogonal errors. This is illustrated in Figure 4, which shows an enlarged view of the area shown in Figure 3B. Since the relatively long first side surface 122 and second side surface 124 provide a large lever arm between the point of force application by the electrode 132 and the connection between the coupling device 120 and the ring structure 110, compensation for orthogonal errors can be effectively brought about by this structure. Thus, the transmission of a relatively small force at the third side surface 126 leads to an increase in the force on the ring structure 110 by the lever arm, which can be used to compensate for orthogonal errors. The ratio of the lengths of the first side surface 122 to the third side surface 126 can be between 3:1 and 10:1, for example, 5:1.

[0048] In addition to, or instead of, the electrode 132 for compensating for orthogonal errors, an electrode 134 fixed to the substrate may be formed within or on the frame constituting the coupling structure 120, through which the excitation vibration of the ring structure 110 is generated, or through which the detection vibration is measured. Examples of such electrode structures are shown in Figures 5 to 7 with reference to area B in Figure 3. In all these figures, it is clear that both the electrode area and the design options for individual electrodes are significantly improved compared to the use of external plate electrodes.

[0049] Figure 5 depicts electrodes 134 configured as plates for driving / reading vibrations of a ring structure 110, and are arranged alternately with electrode plates 128 connected to a frame. Electrodes 134 and 128 form a plate capacitor through which a radial force can be applied to the frame, or such force can be detected. The structure depicted in Figure 5 can be used in multiple coupling devices 120. In individual coupling devices 120, it can be used only for driving, and in other coupling devices 120, it can be used only for detection. However, the same structure can also be used for time multiplexing for both tasks.

[0050] In Figure 6, the electrode 134 for driving / reading vibrations of the ring structure is designed as a comb electrode that engages with a comb electrode 128 connected to the frame. This design allows for excitation / detection of radial motion as well.

[0051] Figure 7 shows various electrode shape combinations as depicted in Figures 4 to 6. In addition to the electrode 134 designed as a plate or comb for drive / read operation and its opposing electrode 128 connected to the frame, there is also an electrode 132 for compensating for orthogonality errors, which can interact with the frame and the connection between the frame and the ring structure 110.

[0052] Figures 4 to 7 demonstrate that the frame structure allows for significant space savings in addition to full functionality. Considering this in relation to Figure 3 and the arrangement of the first spring element 140 depicted therein, the angular velocity sensor 100 becomes extremely compact.

[0053] As described above, radial forces in particular can be applied to the ring structure 110 via the coupling structure 120. The amplitude of the deformation of the ring structure 110 caused by these forces can be increased by a well-designed second spring element 150. For this purpose, the second spring element 150 needs to have a low spring constant with respect to radial deflection. A radially soft spring will result in a large deformation of the spring in the case of a small amplitude force impact, and this deformation is transmitted to the ring structure 110. Thus, by appropriately selecting the connection between the coupling structure 120 and the ring structure 110, amplitude amplification can be achieved, which is advantageous for applying a driving or compensatory force to the ring structure 110.

[0054] As shown in Figure 3, the second spring element 150 can be designed, for example, as a double-folded spring. Furthermore, these can interact with the first spring element 140. However, the second spring element 150 can also be directly connected to the ring structure 110. Instead of the double-folded spring shown, other spring designs that are sufficiently flexible in the radial direction can also be used to achieve the aforementioned amplitude amplification objective.

[0055] The third spring element 160, also shown in Figure 3, plays a role in increasing the mobility of the coupling structure 120. This simplifies the transmission of force from the coupling structure 120 to the ring structure 110. The third spring element 160 can be designed according to technical requirements.

[0056] As shown by line 170 in Figure 3, at least two of the coupling structures 120 are coupled to each other such that their movements are interlocked. The movement of one coupling structure 120 affects the movement of the other coupling structure 120, and vice versa. In particular, it may be advantageous for adjacent coupling structures 120 to move in a common mode or push-pull mode in order to induce and / or stabilize a desired vibration mode of the ring structure 110. The coupling of the coupling structures 120 to each other can take any form that makes it possible to achieve this objective.

[0057] As is clear from the above description, the angular velocity sensor 100 is characterized by a coupling structure 120. This coupling structure 120, together with electrodes 130 fixed to the substrate, is designed to be suitable for compensating for the orthogonality error of the angular velocity sensor 100. In this way, a particularly reliable annular angular velocity sensor 100 can be provided. [Brief explanation of the drawing]

[0058] [Figure 1] This is a schematic diagram of a ring-shaped, micro-electromechanical angular velocity sensor. [Figure 2] This is another schematic diagram of a ring-shaped micro-electromechanical angular velocity sensor. [Figure 3]This is another schematic diagram of a ring-shaped micro-electromechanical angular velocity sensor. [Figure 4] This is a schematic diagram of electrodes for compensating for the orthogonal error of a ring-shaped angular velocity sensor. [Figure 5] This is a schematic diagram of a plate-shaped electrode for exciting and / or reading vibrations of an annular angular velocity sensor. [Figure 6] This is a schematic diagram of a comb-shaped electrode for exciting and / or reading vibrations of an annular angular velocity sensor. [Figure 7] This is a schematic diagram of the various electrodes used to operate a ring-shaped angular velocity sensor.

Claims

1. A flexible ring structure (110) suitable for forming a circle in a stationary state and generating an excited vibration substantially parallel to the plane of the circle above a substrate, wherein the excited vibration is superimposed on a detected vibration generated by the Coriolis force during the rotation of the ring structure (110), A plurality of coupling structures (120) connected to the ring structure (110) and designed to be suitable for compensating for the orthogonal error of the angular velocity sensor (100) together with electrodes (130, 132) fixed to the substrate, wherein the plurality of coupling structures (120) are evenly arranged along the circumferential direction of the ring structure (110), A plurality of first spring elements (140) distinct from the plurality of coupling structures (120), wherein the plurality of first spring elements (140) are directly connected to the ring structure (110) at their first ends and directly connected to the substrate via an anchor structure at their second ends, and are evenly arranged along the circumferential direction of the ring structure (110), The plurality of coupling structures (120) and the plurality of first spring elements (140) are connected on the same side of the ring structure (110) to form a micro electromechanical angular velocity sensor (100).

2. The angular velocity sensor (100) according to claim 1, wherein the electrode (132) for compensating for orthogonal errors electrically interacts with a portion of the coupling structure (120) that substantially extends radially to the ring structure (110).

3. The coupling structure (120) is designed as a frame connected to the ring structure (110) by a first side (122) and connected to the substrate by a second opposite side (124), and The angular velocity sensor (100) according to claim 1 or 2, wherein at least a portion of the electrodes (130, 132) fixed to the substrate is formed within the frame.

4. The angular velocity sensor (100) according to claim 3, wherein the electrode (132) for compensating for orthogonal errors electrically interacts with a third side (126) of the frame which extends substantially radially to the ring structure (110).

5. The angular velocity sensor (100) according to claim 4, wherein the first and second sides (122, 124) of the frame are longer than the third side (126) of the frame.

6. The angular velocity sensor (100) according to claim 1 or 2, wherein the coupling structure (120), together with the electrode (134) fixed to the substrate, is designed to be suitable for generating the excitation vibration and / or measuring the detection vibration.

7. The coupling structure (120) is further comprising a second spring element (150) that connects to the ring structure (110), The angular velocity sensor (100) according to claim 1 or 2, wherein the second spring element (150) is deformable in the radial direction of the ring structure (110) such that the radial deflection of the coupling structure (120) increases the radial deflection of the ring structure (110).

8. The angular velocity sensor (100) according to claim 1 or 2, further comprising a third spring element (160) that connects the coupling structure (120) to the substrate.

9. The angular velocity sensor (100) according to claim 1 or 2, wherein the angular velocity sensor (100) has at least two coupling structures (120) that are coupled to each other through a connecting portion (70) such that their movements are coupled to each other.

10. A flexible ring structure (110) suitable for forming a circle in a stationary state and generating an excited vibration substantially parallel to the plane of the circle above a substrate, wherein the excited vibration is superimposed on a detected vibration generated by the Coriolis force during rotation of the ring structure (110), A coupling structure (120) connected to the ring structure (110) and together with electrodes (130, 132) fixed to the substrate, is designed to be suitable for compensating for the orthogonality error of the angular velocity sensor (100), Equipped with, The coupling structure (120) is designed as a frame connected to the ring structure (110) at a first edge (122) and connected to the substrate at a second opposite edge (124), and, At least a portion of the electrodes (130, 132) fixed to the substrate is formed within the frame. The electrode (132) for compensating for orthogonal errors is electrically interacted with the third side (126) of the frame which extends substantially radially to the ring structure (110), The first and second sides (122, 124) of the frame are longer than the third side (126) of the frame, forming a miniature electromechanical angular velocity sensor (100).

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