RF電力供給制御システムのためのスマート動的負荷シミュレータ

JP7892082B2Active Publication Date: 2026-07-17APPLIED MATERIALS INC
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Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
APPLIED MATERIALS INC
Filing Date
2023-05-22
Publication Date
2026-07-17

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Abstract

The embodiments disclosed in this specification include a dynamic load simulator. In one embodiment, the dynamic load simulator includes an impedance load, a reverse matching circuit, and a smart RF controller. In one embodiment, the smart RF controller includes a dynamic load generator and a reverse matching controller.
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