Barrier discharge lamp module and liquid processing apparatus
The barrier discharge lamp module integrates the protective tube and lamp with a sealing mechanism to prevent gas leakage and material degradation, enhancing maintenance efficiency and reducing costs by maintaining ultraviolet light intensity and extending the lamp's lifespan.
Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Patents
- Current Assignee / Owner
- TOSHIBA LIGHTING & TECHNOLOGY CORP
- Filing Date
- 2022-06-29
- Publication Date
- 2026-07-23
AI Technical Summary
Existing barrier discharge lamp systems require frequent maintenance due to the degradation of protective tubes and gas leakage, leading to increased maintenance time and costs when used in liquid treatment equipment.
A barrier discharge lamp module with a protective tube sealed by a support portion and sealing portion, integrating the lamp and tube, and filled with inert gas to prevent gas leakage and material degradation, allowing easy replacement and maintenance.
The solution reduces maintenance time and costs by maintaining ultraviolet light intensity and extending the lifespan of the lamp module, facilitating easy replacement and reducing operational inefficiencies.
Smart Images
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Abstract
Description
Technical Field
[0001] Embodiments of the present invention relate to a barrier discharge lamp module and a liquid treatment apparatus.
Background Art
[0002] If ultraviolet rays are irradiated on a liquid, impurities in the liquid can be removed. For example, when ultraviolet rays are irradiated on water, hydroxyl radicals with strong oxidizing power are generated. Since hydroxyl radicals decompose total organic carbon (TOC) in water into carbon dioxide via organic acids, pure water with higher purity can be produced compared to filtration methods.
[0003] In addition, the hydroxyl radicals generated by irradiating water with ultraviolet rays are also effective in sterilizing and inactivating bacteria and viruses. Therefore, the technique of irradiating water with ultraviolet rays is used for water sterilization treatment, etc., separately from or together with the removal of the above-mentioned impurities.
[0004] Here, as a light source for irradiating ultraviolet rays, a low-pressure mercury lamp that irradiates ultraviolet rays with a peak wavelength of 254 nm or ultraviolet rays with peak wavelengths of 185 nm and 254 nm has been used. However, the ultraviolet absorption coefficient of water is minimized near a wavelength of 500 nm and increases as the wavelength shifts to the longer wavelength side or the shorter wavelength side than 500 nm. Therefore, barrier discharge lamps (for example, xenon excimer lamps) that irradiate ultraviolet rays with a peak wavelength of 172 nm have come to be used.
[0005] If a barrier discharge lamp is provided in the liquid to be treated, the liquid can be directly irradiated with ultraviolet rays, so that the liquid treatment can be performed efficiently. However, a barrier discharge lamp cannot be directly provided in the liquid. Therefore, a technique of housing a barrier discharge lamp inside a protective tube provided in the liquid has been proposed.
[0006] However, when a protective tube is installed, ultraviolet light emitted from the barrier discharge lamp enters the protective tube. As a result, the chemical structure of the protective tube material may change over time due to the ultraviolet light, which can lead to a decrease in ultraviolet light transmittance and, consequently, a decrease in the ability to maintain ultraviolet light intensity. Furthermore, if oxygen is present in the space between the barrier discharge lamp and the inner wall of the protective tube, the ultraviolet light emitted from the barrier discharge lamp will be attenuated. For this reason, in general, an inert gas such as nitrogen gas or a noble gas is sealed in the space between the barrier discharge lamp and the inner wall of the protective tube. However, over time, oxygen from the atmosphere may enter the space between the barrier discharge lamp and the inner wall of the protective tube.
[0007] Therefore, when using protective tubes, maintenance is required, such as replacing the protective tubes if the chemical structure of the material changes, or refilling them with inert gas. However, it is difficult to replace protective tubes or refill inert gas at the installation site of the liquid treatment equipment. As a result, maintenance time may be extended, maintenance costs may increase, and the operating efficiency of the liquid treatment equipment may decrease. Therefore, there was a need for the development of technology that could shorten maintenance time, even when protective tubes were used. [Prior art documents] [Patent Documents]
[0008] [Patent Document 1] Japanese Patent Publication No. 2018-043182 [Overview of the project] [Problems that the invention aims to solve]
[0009] The problem that this invention aims to solve is to provide a barrier discharge lamp module and a liquid processing apparatus that can shorten maintenance time even when a protective tube is used. [Means for solving the problem]
[0010] The barrier discharge lamp module according to the embodiment comprises: a cylindrical protective tube having an open end at at least one end; a barrier discharge lamp provided inside the protective tube and capable of irradiating ultraviolet light; a plurality of support parts provided inside the protective tube and supporting the barrier discharge lamp; and a sealing part provided between the open end of the protective tube and the support parts provided at the open end of the protective tube, which seals an inert gas in the space between the barrier discharge lamp and the inner wall of the protective tube. The sealing portion is formed by curing an epoxy adhesive or a silicone adhesive. [Effects of the Invention]
[0011] According to embodiments of the present invention, it is possible to provide a barrier discharge lamp module and a liquid processing apparatus that can shorten maintenance time even when a protective tube is used. [Brief explanation of the drawing]
[0012] [Figure 1] This is a schematic cross-sectional view illustrating a liquid processing apparatus according to this embodiment. [Figure 2] Figure 1 is a schematic cross-sectional view of the liquid processing apparatus in the direction of line AA. [Figure 3] (a) is a schematic diagram illustrating a barrier discharge lamp. (b) is a schematic enlarged view of section B of the barrier discharge lamp in Figure 3(a). [Figure 4] This graph illustrates the effectiveness of the sealing portion. [Modes for carrying out the invention]
[0013] The embodiments will be illustrated below with reference to the drawings. In each drawing, similar components are denoted by the same reference numerals, and detailed descriptions will be omitted as appropriate.
[0014] Figure 1 is a schematic cross-sectional view illustrating the liquid processing apparatus 100 according to this embodiment. Figure 2 is a schematic cross-sectional view of the liquid processing apparatus 100 in Figure 1 in the direction of line AA. As shown in FIG. 1, the liquid treatment apparatus 100 is provided with, for example, a barrier discharge lamp module 101, a container 102, a holder 103, and a seal member 104. In the case of the liquid treatment apparatus 100 illustrated in FIGS. 1 and 2, one barrier discharge lamp module 101 is provided. However, a plurality of barrier discharge lamp modules 101 can also be provided. That is, at least one barrier discharge lamp module 101 can be provided. Further, when a plurality of barrier discharge lamp modules 101 are provided, for example, a plurality of sets of holders 103 and seal members 104 can be provided.
[0015] The barrier discharge lamp module 101 (barrier discharge lamp 1) irradiates ultraviolet rays to the liquid 300 flowing inside the container 102. In this case, when water is contained in the liquid 300, hydroxyl radicals are generated by the irradiated ultraviolet rays. Since hydroxyl radicals have a strong oxidizing power, they can decompose total organic carbon (TOC) contained in the liquid 300. Further, sterilization and inactivation of bacteria and viruses can also be performed by hydroxyl radicals. Note that even when water is not contained in the liquid 300, organic substances can be decomposed by ultraviolet rays, and sterilization and inactivation of bacteria and viruses can be performed by ultraviolet rays.
[0016] As shown in FIG. 1, the barrier discharge lamp module 101 has, for example, a barrier discharge lamp 1, a protective tube 10, a support portion 20, and a support portion 30. FIG. 3(a) is a schematic diagram for exemplifying the barrier discharge lamp 1. FIG. 3(b) is a schematic enlarged view of part B of the barrier discharge lamp 1 in FIG. 3(a). As shown in FIGS. 3(a) and 3(b), the barrier discharge lamp 1 has, for example, a light emitting tube 2, a conductive portion 3, an internal electrode 4, an anchor 5, a holder 6, an external electrode 7, a lead wire 8, and a lead wire 9.
[0017] The light-emitting tube 2 has a cylindrical shape and a form in which the overall length (length in the tube axis direction) is longer than the tube diameter. The light-emitting tube 2 can be, for example, a cylindrical tube. The outer diameter of the light-emitting tube 2 is, for example, 10 mm or more and 25 mm or less. The wall thickness of the light-emitting tube 2 is, for example, about 1 mm. The length of the light-emitting tube 2 can be appropriately changed according to the specifications of the liquid treatment apparatus 100 and the like. For example, the length of the light-emitting tube 2 is about 400 mm.
[0018] Sealing portions 2a are provided at both ends of the light-emitting tube 2 in the tube axis direction. By providing the sealing portions 2a, the internal space of the light-emitting tube 2 can be hermetically sealed. The sealing portions 2a can be formed, for example, using a pinch seal method or a shrink seal method.
[0019] Protrusions 2b can be provided on the outer surface of the light-emitting tube 2. The protrusions 2b are provided, for example, for evacuating the internal space of the light-emitting tube 2 or introducing a gas described later into the internal space of the light-emitting tube 2 when manufacturing the barrier discharge lamp 1. The protrusions 2b can be formed by cutting off a tube made of synthetic quartz glass after evacuation and gas introduction. <着
[0020] A gas is enclosed in the internal space of the light-emitting tube 2. In the barrier discharge lamp 1, dielectric barrier discharge is performed between the internal electrode 4 and the external electrode 7 to give high-energy electrons to the enclosed gas and generate excimer-excited molecules. When the excimer-excited molecules return to their original state, light having a specific peak wavelength is generated according to the type of gas. Therefore, the gas enclosed in the internal space of the light-emitting tube 2 can be appropriately changed according to the use of the barrier discharge lamp 1. The gas enclosed in the internal space of the light-emitting tube 2 can be, for example, a noble gas such as krypton, xenon, argon, neon, or a mixed gas in which a plurality of types of noble gases are mixed. The gas can further include a halogen gas or the like as necessary.
[0021] The gas pressure (filling pressure) inside the discharge tube 2 at 25°C is, for example, approximately 1.3 kPa to 200 kPa. The filling pressure can be determined using the standard conditions of the gas (SATP (Standard Ambient Temperature and Pressure): 25°C, 1 bar).
[0022] For example, when decomposing impurities such as organic matter contained in liquids such as water, it is preferable to use xenon as the sealed gas. The sealing pressure of xenon can be, for example, around 93 kPa. By using xenon as the sealed gas, ultraviolet light with a peak wavelength of 172 nm can be generated, which effectively decomposes impurities. In addition, since ultraviolet light with a short peak wavelength is irradiated, it is also effective for sterilizing and inactivating bacteria and viruses.
[0023] Ultraviolet light generated in the internal space of the discharge tube 2 is irradiated to the outside through the discharge tube 2. Therefore, the discharge tube 2 is made of a material with high ultraviolet light transmittance. Materials with high ultraviolet light transmittance include, for example, SiO2-containing materials such as synthetic quartz glass. However, when ultraviolet light with a peak wavelength of 172 nm is incident on a material containing SiO2, the chemical structure of the material may change over time. For example, when ultraviolet light with a peak wavelength of 172 nm is incident on SiO2, the bond between Si and O may break. Therefore, if the barrier discharge lamp 1 is lit for a long time, defects may occur in the chemical structure of the material of the discharge tube 2, which may lead to a decrease in ultraviolet light transmittance and, consequently, a decrease in the maintenance rate of ultraviolet light intensity.
[0024] According to the inventors' findings, increasing the amount of OH groups in a material containing SiO2 allows for the repair of chemical structural defects even if the Si-O bond is broken by ultraviolet light. However, increasing the OH group content too much may reduce the ultraviolet light transmittance. Therefore, it is preferable that the OH group content be between 1 ppm and 3000 ppm. In this way, even if ultraviolet light with a peak wavelength of 172 nm is generated in the internal space of the discharge tube 2, the decrease in ultraviolet light transmittance can be suppressed, and consequently, the decrease in the maintenance rate of ultraviolet light can be suppressed.
[0025] The conductive portion 3 is provided inside the sealing portion 2a. One conductive portion 3 can be provided for each sealing portion 2a. The planar shape of the conductive portion 3 is, for example, a rectangle. The conductive portion 3 is in the form of a thin film. The conductive portion 3 can be formed from, for example, molybdenum foil.
[0026] The internal electrode 4 has, for example, a coil 4a and a leg 4b. The coil 4a and the leg 4b are formed integrally. The coil 4a and the leg 4b are formed, for example, by plastic deformation of a wire. The wire diameter is, for example, about 0.2 mm to 1.0 mm.
[0027] Coil 4a and leg 4b contain, for example, tungsten as their main component. The tungsten content is, for example, 50 wt% or more. In this case, using doped tungsten, which has potassium or other substances added to it, can improve the dimensional stability of coil 4a.
[0028] The coil 4a is spiral in shape and is installed in the internal space of the discharge tube 2. The coil 4a extends along the tube axis of the discharge tube 2 in the central region of the internal space of the discharge tube 2. The spacing P (pitch dimension) between adjacent wires in the tube axis direction of the discharge tube 2 is, for example, about 0.5 mm to 3.0 mm. Also, the outer diameter D of the coil 4a in the direction perpendicular to the tube axis direction of the discharge tube 2 is, for example, about 1 mm to 5 mm.
[0029] Legs 4b are provided at each of the ends of the coil 4a. Legs 4b are linear in shape and extend from the ends of the coil 4a along the tube axis of the discharge tube 2. The ends of legs 4b are electrically connected to the conductive part 3 inside the sealing part 2a. The vicinity of the ends of legs 4b can be laser-welded or resistance-welded to the conductive part 3.
[0030] The anchor 5 is provided in the internal space of the discharge tube 2. The material of the anchor 5 can be the same as the material of the internal electrode 4, for example. The anchor 5 is formed by plastic deformation of a wire. For example, one end of the anchor 5 can be wrapped around the outer surface of the coil 4a. For example, the other end of the anchor 5 can be in contact with the inner wall of the discharge tube 2. Although the example given shows the anchor 5 attached to the coil 4a, the anchor 5 may also be formed by increasing the diameter of a portion of the coil 4a.
[0031] The anchor 5 supports the coil 4a within the internal space of the discharge tube 2. Furthermore, by electrically connecting the anchor 5 to the coil 4a, the anchor 5 functions as an internal electrode 4. In other words, the anchor 5 functions as a support member for the coil 4a and as part of the internal electrode 4.
[0032] Multiple anchors 5 can be provided, for example. In this case, the spacing between adjacent anchors 5 in the axial direction of the discharge tube 2 (the pitch dimension of the anchors 5) is, for example, about 10 mm to 40 mm.
[0033] The holder 6 is cylindrical, with one end located inside the sealing portion 2a and the other end exposed from the sealing portion 2a. One holder 6 can be provided for each sealing portion 2a. The holder 6 can be formed from, for example, resin or an inorganic material such as ceramics. The holder 6 can also be formed from, for example, steatite or aluminum oxide.
[0034] The external electrode 7 is provided on the outside of the discharge tube 2. Both ends of the external electrode 7 can be attached to the outer surface of the discharge tube 2 with, for example, stainless steel wire. The external electrode 7 is formed from a metal such as Monel, stainless steel, aluminum, nickel, silver, gold, or platinum. The external electrode 7 generates a dielectric barrier discharge with respect to the internal electrode 4. As described above, when a dielectric barrier discharge occurs, ultraviolet light is generated in the internal space of the discharge tube 2.
[0035] In this case, if ultraviolet light generated in the internal space of the discharge tube 2 can pass through the external electrode 7, ultraviolet light can be irradiated in all directions around the discharge tube 2. For this reason, the external electrode 7 is provided with multiple holes or slits that penetrate in the thickness direction. In this case, it is preferable that the light shielding rate of the external electrode 7 be 10% or less.
[0036] For example, as shown in Figure 3(a), the external electrode 7 has a mesh-like structure. For example, the external electrode 7 has a knitted braid structure. The wire material used in the knitted braid structure is, for example, Monel wire with a diameter of about 0.1 mm. The mesh spacing is, for example, about 2.8 mm vertically and about 3 mm horizontally.
[0037] Using a mesh-like external electrode 7 makes it easy to achieve a light-shielding rate of 10% or less. Furthermore, a mesh-like external electrode 7 can cover the outer surface of the discharge tube 2, thereby increasing the surface area in contact with the internal electrode 4. This makes it easier for dielectric barrier discharge to occur stably over a large area.
[0038] The lead wire 8 can be provided in at least one of the holders 6. One end of the lead wire 8 passes through the inside of the holder 6, for example, and is electrically connected to the conductive part 3 inside the sealing part 2a. The vicinity of one end of the lead wire 8 can be laser-welded or resistance-welded to the conductive part 3. The gap between the lead wire 8 and the holder 6 is sealed with a sealing material. The other end of the lead wire 8 can be exposed from the holder 6. A crimp terminal or connector can be connected to the other end of the lead wire 8.
[0039] One end of the lead wire 9 is electrically connected to the external electrode 7 via a nickel sleeve 9a. A crimp terminal or connector can be connected to the other end of the lead wire 9. Lead wires 8 and 9 are, for example, wires coated with fluororesin. Lead wires 8 and 9 are electrically connected to, for example, a high-frequency power supply. A high-frequency power supply is, for example, a power supply that generates a sine wave of about 15 kHz or a pulse power supply.
[0040] When using the barrier discharge lamp 1 to process liquid 300, it is not possible to place the barrier discharge lamp 1 directly in the liquid 300. Therefore, as shown in Figure 1, the barrier discharge lamp 1 is installed inside the protective tube 10.
[0041] The protective tube 10 has a cylindrical shape, with its overall length (length in the axial direction of the tube) being longer than its diameter. The protective tube 10 can be, for example, a cylindrical tube. However, the protective tube 10 is not limited to a cylindrical tube. For example, the protective tube 10 may be a rectangular tube or the like. For example, one end of the protective tube 10 is closed and the other end is open. The barrier discharge lamp 1 is housed in the internal space of the protective tube 10. The dimensions of the protective tube 10 can be appropriately changed according to the dimensions of the barrier discharge lamp 1 housed inside.
[0042] The protective tube 10 is installed in the internal space of the container 102 (the space through which the liquid 300 is supplied). As shown in Figure 1, the space between the inner wall 102e of the container 102 and the protective tube 10 becomes a flow path for the liquid 300 to be processed. Therefore, if the barrier discharge lamp module 101, which has the barrier discharge lamp 1 and the protective tube 10, is installed in the internal space of the container 102, the barrier discharge lamp 1 will be installed in the flow path of the liquid 300.
[0043] Ultraviolet light generated in the barrier discharge lamp 1 is irradiated onto the liquid 300 via the protective tube 10. Therefore, the protective tube 10 is made of a material with high ultraviolet light transmittance. For example, similar to the discharge tube 2 described above, the protective tube 10 is preferably made of a material containing SiO2, such as synthetic quartz glass, with an OH group content of 1 ppm or more and 3000 ppm or less. In this way, even if ultraviolet light with a peak wavelength of 172 nm is irradiated from the barrier discharge lamp 1, the decrease in ultraviolet light transmittance can be suppressed, and consequently, the decrease in the maintenance rate of ultraviolet light can be suppressed.
[0044] As shown in Figure 1, the support portion 20 is provided inside the protective tube 10. The support portion 20 is provided on the closed end side of the protective tube 10. A recess 20a is provided at one end of the support portion 20. The end of the barrier discharge lamp 1 opposite to the side where the lead wires 8 and 9 are provided is inserted into the recess 20a.
[0045] The support portion 30 is provided at the open end of the protective tube 10. The support portion 30 has a hole that penetrates the barrier discharge lamp 1 in the axial direction, allowing the lead wires 8 and 9 to be pulled out to the outside of the protective tube 10. The support portion 30 also has a hole 30a into which the end of the barrier discharge lamp 1 on which the lead wires 8 and 9 are attached is inserted.
[0046] Support parts 20 and 30 can be brought into contact with the inner wall of the protective tube 10. Support parts 20 and 30 support the barrier discharge lamp 1 in the internal space of the protective tube 10. In this case, support parts 20 and 30 support the barrier discharge lamp 1 so as to be substantially concentric with the protective tube 10.
[0047] Support parts 20 and 30 are formed from, for example, resin or an inorganic material such as ceramics. Support parts 20 and 30 can be formed from, for example, steatite or aluminum oxide.
[0048] Here, if oxygen is present in the space between the barrier discharge lamp 1 and the inner wall of the protective tube 10, the ultraviolet light emitted from the barrier discharge lamp 1 will be attenuated. Therefore, an inert gas such as nitrogen gas or a noble gas is sealed in the space between the barrier discharge lamp 1 and the inner wall of the protective tube 10. In this case, if nitrogen gas is used as the sealed gas, manufacturing costs can be reduced. The pressure of the inert gas in the space between the barrier discharge lamp 1 and the inner wall of the protective tube 10 at 25°C (sealing pressure) is, for example, between 1 Pa and 400 kPa. The sealing pressure can be determined using the standard conditions of the gas (SATP (Standard Ambient Temperature and Pressure): 25°C, 1 bar).
[0049] As shown in Figure 1, the sealing portion 30b is provided between the open end of the protective tube 10 and the support portion 30 provided at the open end of the protective tube 10. The sealing portion 30b seals an inert gas in the space between the barrier discharge lamp 1 and the inner wall of the protective tube 10. Furthermore, a sealing portion 30b can also be provided in the gap between the support portion 30 and the lead wires 8 and 9. A sealing portion 30b can also be provided in the gap between the support portion 30 and the end of the barrier discharge lamp 1. The sealing portion 30b can be formed, for example, by the curing of an epoxy adhesive or a silicone adhesive.
[0050] If the opening side of the protective tube 10 is sealed by the sealing portion 30b, it is possible to suppress the leakage of inert gas to the outside of the protective tube 10 and the intrusion of air (oxygen) into the inside of the protective tube 10. Therefore, it is possible to suppress the attenuation of ultraviolet light by oxygen inside the protective tube 10, and thus suppress the decrease in the maintenance rate of ultraviolet light intensity. In addition, if the opening side of the protective tube 10 is sealed by the sealing portion 30b, it is possible to suppress the intrusion of liquid 300 into the inside of the protective tube 10.
[0051] The sealing by the sealing portion 30b can be performed, for example, in an inert gas atmosphere. In this way, the inert gas can be sealed in the space between the barrier discharge lamp 1 and the inner wall of the protective tube 10. Alternatively, a hole may be provided in the support portion 30, and the inert gas can be sealed in the space between the barrier discharge lamp 1 and the inner wall of the protective tube 10 through the hole. The hole provided in the support portion 30 can be sealed by the sealing portion 30b.
[0052] Figure 4 is a graph illustrating the effect of the sealing portion 30b. If the open end of the protective tube 10 is sealed using a sealing member such as a packing, over time, inert gas may leak to the outside of the protective tube 10, or air (oxygen) may enter the inside of the protective tube 10. In addition, vibrations from the liquid 300 supply device may be transmitted to the liquid processing device 100. When vibrations are transmitted to the liquid processing device 100, a gap is more likely to form between the sealing member such as a packing and the protective tube 10.
[0053] Therefore, as can be seen from Figure 4, if the open end of the protective tube 10 is sealed with a sealing member such as a packing, the ultraviolet illuminance retention rate may decrease over time. In contrast, by sealing the open end of the protective tube 10 using the sealing portion 30b, the reliability of sealing with inert gas can be improved. As a result, as can be seen from Figure 4, the ultraviolet illuminance maintenance rate can be maintained.
[0054] In the above description, we have explained the case where one end of the protective tube 10 is open and the other end is closed, but both ends of the protective tube 10 may be open. That is, the protective tube 10 only needs to have at least one end open. If both ends of the protective tube 10 are open, both ends of the protective tube 10 may be sealed with the support portion 30 and the sealing portion 30b. However, if the other end of the protective tube 10 is closed, the reliability of sealing with inert gas can be improved.
[0055] As shown in Figure 1, the container 102 has a cylindrical shape, and for example, its overall length (length in the direction perpendicular to the central axis) is longer than its cross-sectional dimensions (length in the direction perpendicular to the central axis). The container 102 can be, for example, cylindrical. The container 102 is made of a metal such as stainless steel. The container 102 has a space inside into which the liquid 300 is supplied. A barrier discharge lamp module 101 is provided in the internal space of the container 102. The space between the protective tube 10 and the inner wall 102e of the container 102 becomes a channel through which the liquid 300 flows. Therefore, ultraviolet light generated in the barrier discharge lamp 1 can be irradiated onto the liquid 300 via the protective tube 10.
[0056] The container 102 may be provided with an inlet 102a and an outlet 102b. The inlet 102a is cylindrical, with one end communicating with the internal space of the container 102. At least one inlet 102a may be provided. The other end of the inlet 102a can be connected to, for example, a supply device for supplying the liquid 300 to be treated. The outlet 102b is cylindrical, with one end communicating with the internal space of the container 102. At least one outlet 102b may be provided. The other end of the outlet 102b can be connected to, for example, a tank or washing device to which the treated liquid 300a is supplied.
[0057] For example, the inlet 102a and outlet 102b can be arranged side by side along the central axis of the container 102. For example, the inlet 102a can be positioned opposite one end of the barrier discharge lamp 1. For example, the outlet 102b can be positioned opposite the other end of the barrier discharge lamp 1. In this way, the liquid 300 can flow along the barrier discharge lamp 1, thereby enabling effective utilization of the ultraviolet light irradiated from the barrier discharge lamp 1.
[0058] A recess 102c can be provided at one end of the container 102 to support the end of the barrier discharge lamp module 101 (protective tube 10) on the side where the support portion 20 is provided. The recess 102c opens into the internal space of the container 102.
[0059] A support plate 102d can be provided on the other end of the container 102. The support plate 102d can have a hole 102d1 that penetrates in the thickness direction. The barrier discharge lamp module 101 (protective tube 10) is inserted into the hole 102d1, and the vicinity of the end of the barrier discharge lamp module 101 (protective tube 10) on the side where the support portion 20 is provided is supported by the support plate 102d.
[0060] Furthermore, the central axis of the recess 102c and the central axis of the hole 102d1 are aligned with the central axis of the container 102. In this way, the barrier discharge lamp module 101 can be positioned approximately concentrically with the internal space of the container 102 (the flow path of the liquid 300). Therefore, it is possible to suppress variations in the flow velocity of the liquid 300 due to fluctuations in the flow path resistance around the barrier discharge lamp module 101, and to suppress variations in the concentration of substances (e.g., hydroxyl radicals) generated by ultraviolet irradiation.
[0061] The holder 103 holds, for example, the vicinity of the end of the barrier discharge lamp module 101 (protective tube 10) on the side where the support portion 30 is provided. For example, the holder 103 is plate-shaped and is attached to the support plate 102d of the container 102 using fastening members such as screws.
[0062] The sealing member 104 has an annular shape. The barrier discharge lamp module 101 (protective tube 10) is inserted into the sealing member 104. The sealing member 104 is also provided between the holder 103 and the support plate 102d. The sealing member 104 can be, for example, an O-ring.
[0063] When the holder 103 is attached to the support plate 102d using fastening members such as screws, the sealing member 104 provided between the holder 103 and the support plate 102d undergoes elastic deformation. This elastic deformation of the sealing member 104 seals the gap between the barrier discharge lamp module 101 (protective tube 10) and the inner wall of the hole 102d1 in the support plate 102d. Furthermore, the elastic deformation of the sealing member 104 allows the barrier discharge lamp module 101 (protective tube 10) to be held in place. Furthermore, the barrier discharge lamp module 101 can be removed from the container 102 by removing fastening members such as screws.
[0064] In Figure 1, an example is shown in which the barrier discharge lamp module 101 is immersed in a flow of liquid 300 to be treated. However, the barrier discharge lamp module 101 may also be immersed in liquid 300 that is not flowing. For example, the barrier discharge lamp module 101 may be immersed in liquid 300 stored in a tank or the like.
[0065] For example, a support plate 102d can be provided on the inner wall of a tank or the like, and the barrier discharge lamp module 101 can be attached to the support plate 102d using a holder 103 and a sealing member 104. Alternatively, a hole can be provided in the side wall of a tank or the like, and the barrier discharge lamp module 101 can be attached to the hole in the side wall using a holder 103 and a sealing member 104. In this case, the tip of the barrier discharge lamp module 101 may or may not be supported.
[0066] Generally, the inside of a protective tube containing a barrier discharge lamp is sealed using a sealing material such as a gasket. As mentioned above, when the inside of a protective tube is sealed using a sealing material such as a gasket, over time, inert gas may leak to the outside of the protective tube or air (oxygen) may enter the inside of the protective tube, which can reduce the maintenance rate of ultraviolet light intensity. Furthermore, if the materials for the discharge tube and protective tube are simply made from materials with high ultraviolet transmittance, ultraviolet light may cause defects in the chemical structure of the discharge tube and protective tube materials, which can reduce the rate at which ultraviolet light is maintained.
[0067] Therefore, maintenance is required periodically, or as needed, including refilling the inert gas and replacing the barrier discharge lamp and protective tube. However, refilling the inert gas or replacing the barrier discharge lamps and protective tubes at the liquid treatment equipment installation site is difficult. This can lead to longer maintenance times, increased maintenance costs, and reduced operating efficiency of the liquid treatment equipment.
[0068] In the barrier discharge lamp module 101 according to this embodiment, the protective tube 10 and the barrier discharge lamp 1 are integrated by a support portion 30 and a sealing portion 30b provided at the open end of the protective tube 10. Furthermore, an inert gas is sealed in the space between the barrier discharge lamp 1 and the inner wall of the protective tube 10 by the sealing portion 30b.
[0069] Therefore, the barrier discharge lamp module 101 can be simply replaced at the installation location of the liquid processing device 100. Furthermore, since the barrier discharge lamp module 101 can be attached to and detached from the liquid processing device 100 using fasteners such as screws, the replacement work is also easy. In other words, the barrier discharge lamp module 101 according to this embodiment can reduce maintenance time.
[0070] Furthermore, if the discharge tube 2 and the protective tube 10 contain SiO2 and the OH group content is between 1 ppm and 3000 ppm, it is possible to suppress the occurrence of defects in the chemical structure of the materials of the discharge tube 2 and the protective tube 10 due to ultraviolet light. Furthermore, since the opening end of the protective tube 10 is sealed using the sealing portion 30b, the reliability of sealing with inert gas can be improved. As a result, as can be seen from Figure 4, the ultraviolet illuminance maintenance rate can be maintained.
[0071] In other words, the lifespan of the barrier discharge lamp module 101 can be extended by keeping the OH group content in the materials of the discharge tube 2 and the protective tube 10 within an appropriate range, or by sealing the open end of the protective tube 10 using the sealing part 30b. Therefore, the number of maintenance cycles can be reduced, which in turn shortens the total maintenance time over a specified period.
[0072] Although several embodiments of the present invention have been illustrated above, these embodiments are presented as examples only and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their variations are included in the scope and spirit of the invention, as well as in the claims of the invention and its equivalents. Furthermore, the embodiments described above can be implemented in combination with each other.
[0073] For example, in one embodiment of the present invention, a liquid processing apparatus 100 equipped with a barrier discharge lamp module 101 can be provided. The above-described description of the barrier discharge lamp module 101, and any modifications of the barrier discharge lamp module 101 (for example, those in which components are added, deleted, or the design is modified as appropriate by those skilled in the art, and which possess the features of the present invention) can all be applied to the liquid processing apparatus 100.
[0074] The following are additional notes regarding the embodiments described above.
[0075] (Note 1) A protective tube having a cylindrical shape with at least one end open; A barrier discharge lamp capable of irradiating ultraviolet light is provided inside the protective tube; A plurality of support parts are provided inside the protective tube to support the barrier discharge lamp; A sealing portion is provided between the open end of the protective tube and the support portion provided at the open end of the protective tube, and seals an inert gas in the space between the barrier discharge lamp and the inner wall of the protective tube; A barrier discharge lamp module equipped with [a specific feature].
[0076] (Note 2) The barrier discharge lamp module according to Appendix 1, wherein the protective tube and the barrier discharge lamp are integrated by the support portion provided at the open end of the protective tube and the sealing portion.
[0077] (Note 3) The barrier discharge lamp module according to Appendix 1 or 2, wherein the pressure of the inert gas is 1 Pa or more and 400 kPa or less.
[0078] (Note 4) The protective tube is a barrier discharge lamp module according to any one of the appendices 1 to 3, wherein the protective tube contains SiO2 and has an OH group content of 1 ppm or more and 3000 ppm or less.
[0079] (Note 5) A container having an internal space into which liquid is supplied; A barrier discharge lamp module according to any one of the appendices 1 to 4 is provided in the space where the liquid is supplied; A liquid processing apparatus equipped with the following. [Explanation of symbols]
[0080] 1 Barrier discharge lamp, 2 Discharge tube, 4 Internal electrode, 7 External electrode, 10 Protective tube, 20 Support part, 30 Support part, 30b Sealing part, 100 Liquid processing device, 101 Barrier discharge lamp module, 102 Container, 103 Holder, 104 Sealing member, 300 Liquid
Claims
1. A protective tube having a cylindrical shape with at least one end open; A barrier discharge lamp capable of irradiating ultraviolet light is provided inside the protective tube; A plurality of support parts are provided inside the protective tube to support the barrier discharge lamp; A sealing portion is provided between the open end of the protective tube and the support portion provided at the open end of the protective tube, and seals an inert gas in the space between the barrier discharge lamp and the inner wall of the protective tube; It is equipped with, The sealing portion is a barrier discharge lamp module formed by curing an epoxy adhesive or a silicone adhesive.
2. A first lead wire electrically connected to the internal electrode of the barrier discharge lamp; A second lead wire electrically connected to the external electrode of the barrier discharge lamp; Furthermore, it is equipped with, The support portion provided at the open end of the protective tube is provided with holes for pulling the first lead wire and the second lead wire out of the protective tube. The barrier discharge lamp module according to claim 1, wherein the sealing portion is also provided in the gap between the hole and the first lead wire, and in the gap between the hole and the second lead wire.
3. The barrier discharge lamp module according to claim 1 or 2, wherein the protective tube and the barrier discharge lamp are integrated by the support portion provided at the open end of the protective tube and the sealing portion.
4. The barrier discharge lamp module according to claim 1 or 2, wherein the pressure of the inert gas is 1 Pa or more and 400 kPa or less.
5. The protective tube is made of SiO ２ A barrier discharge lamp module according to claim 1 or 2, comprising, wherein the content of OH groups is 1 ppm or more and 3000 ppm or less.
6. A container having a space inside into which liquid is supplied; A barrier discharge lamp module according to claim 1 or 2, provided in the space to which the liquid is supplied; A liquid processing apparatus equipped with the following.