Clips and fluid supply devices equipped with clips

Abstract

The present invention provides a heater-equipped clip that is attached to a plurality of fluid supply lines installed side-by-side in a fluid supply device, each fluid supply line being formed of a plurality of base blocks, the clip comprising: a plate portion having a fixed heater and formed to allow surface abutment against one side wall of the base block; a pinching claw portion formed to allow abutment against the other side wall opposite to said one side wall of the base block; and a coupling mechanism that couples the plate portion and the pinching claw portion to each other.

Description

Technical Field

[0001] The present invention relates to a clip and a fluid supply device including the clip.

Background Art

[0002] JP2020-159445A discloses a heater fixture that sandwiches a gas line (i.e., a fluid supply line) and heaters provided on both sides of the gas line.

Summary of the Invention

[0003] However, since the heater fixture described in JP2020-159445A sandwiches the gas line via the heater, it is difficult to attach such a heater fixture to the gas line when the gap between the gas lines is narrow.

[0004] The present invention has been made focusing on this problem, and an object thereof is to provide a clip and a fluid supply device including the clip that can be attached even when the gap between fluid supply lines is narrow.

[0005] According to an aspect of the present invention, there is provided a clip attached to a plurality of fluid supply lines arranged in parallel in a fluid supply device and each including a plurality of flow path blocks, the clip including: a plate portion integrally formed with a heater and formed to be capable of surface contact with one side wall of the flow path block; a clamping claw portion formed to be capable of contacting the other side wall of the flow path block opposite to the one side wall; and a connecting mechanism connecting the plate portion and the clamping claw portion. The plate portion has an insertion hole into which the clamping claw portion of the clip attached to the adjacent fluid supply line can enter, and the plate portion of one adjacent clip and the clamping claw portion of the other adjacent clip are arranged in the gap between the adjacent fluid supply lines so as not to interfere with each other. A clip is provided.

[0006] According to another aspect of the present invention, a plurality of fluid supply lines are arranged side by side and comprise a plurality of flow path blocks, and each of the plurality of clips is attached to the plurality of fluid supply lines, wherein the clip has a plate portion formed to be in surface contact with one side wall of the flow path block and having an integrally formed heater, a clamping claw portion formed to be in contact with the other side wall of the flow path block opposite to the one side wall, and a connecting mechanism connecting the plate portion and the clamping claw portion, and the plate portion has an insertion hole into which the clamping claw portion of the clip attached to the adjacent fluid supply line can enter. Furthermore, the gap between adjacent fluid supply lines is arranged such that the plate portion of one adjacent clip and the clamping claw portion of the other adjacent clip do not interfere with each other. A fluid supply device is provided.

[0007] According to these embodiments, the clip can be attached to the fluid supply line of the fluid supply device even if the gap between the fluid supply lines is narrow. [Brief explanation of the drawing]

[0008] [Figure 1] Figure 1 is a perspective view showing a fluid supply device according to this embodiment. [Figure 2] Figure 2 is a schematic perspective view showing the heated clip attached to a fluid supply line. [Figure 3] Figure 3 is a schematic plan view showing the heated clip attached to a fluid supply line. [Figure 4] Figure 4 is a cross-sectional view along the line IV-IV in Figure 3. [Figure 5] Figure 5 is a perspective view showing a first component that constitutes part of a heated clip. [Figure 6] Figure 6 is a perspective view showing a second component that makes up the rest of the heated clip. [Figure 7] Figure 7 is a front view showing the second member. [Figure 8] Figure 8 is a flowchart showing how to attach the heated clip. [Modes for carrying out the invention]

[0009] Hereinafter, embodiments of the present invention (hereinafter referred to as "these embodiments") will be described with reference to the attached drawings. Throughout this specification, the same elements will be denoted by the same reference numerals.

[0010] (Fluid supply device) The fluid supply device 100 according to this embodiment will be described with reference to Figure 1.

[0011] Figure 1 is a perspective view showing the fluid supply device 100 according to this embodiment. In Figure 1, the longitudinal direction, width direction, and height direction of the fluid supply device 100, which are orthogonal to each other, are defined as the direction along the X-axis, the direction along the Y-axis, and the direction along the Z-axis, respectively. Hereafter, for the sake of convenience in explanation, the longitudinal direction, width direction, and height direction of the fluid supply device 100 will also be simply referred to as the longitudinal direction, width direction, and height direction.

[0012] The fluid supply device 100 according to this embodiment is used as a means for supplying process gas or purge gas in semiconductor manufacturing equipment (CVD equipment, sputtering equipment, etching equipment, etc. / not shown).

[0013] As shown in Figure 1, the fluid supply device 100 comprises a plurality of fluid supply lines 1 that are arranged side by side along the width direction and extend along the longitudinal direction, and a plurality of heated clips 2 that are attached (assembled) to each of the plurality of fluid supply lines 1.

[0014] Multiple fluid supply lines 1, for example, each supply process gas to semiconductor manufacturing equipment by appropriately controlling the flow rate of process gas as a gas. A small gap is formed between adjacent fluid supply lines 1. In the gap between adjacent fluid supply lines 1, the plate portion 211 of one heater-equipped clip 2, which is attached to one of the adjacent fluid supply lines 1, and the clamping claw portion 221 of the other heater-equipped clip 2, which is attached to the other adjacent fluid supply line 1, are arranged so as not to interfere with each other (see Figures 2 to 7).

[0015] Each fluid supply line 1 comprises a base block 11 as a plurality of flow path blocks arranged along the longitudinal direction, and a plurality of fluid devices 12 fixed to each of the plurality of base blocks 11 by bolting. The plurality of fluid devices 12 include, for example, on-off valves, regulators, pressure gauges, and mass flow controllers. Each fluid device 12 has a block portion 121 as a flow path block connected to the base block 11, and a fluid device body 122 provided on the block portion 121. Here, a flow path block is a block in which a flow path for fluid is formed.

[0016] The heater-equipped clip 2 is a clip that prevents the liquefaction of process gas by transferring heat from the integrally formed heater 211b to the base block 11 and the block portion 121 of the fluid equipment 12 (see Figure 5). Details of the heater-equipped clip 2 will be described later.

[0017] (Heater clip) Next, the details of the heater-equipped clip 2 according to this embodiment will be described with reference to Figures 1 to 7.

[0018] Figure 2 is a schematic perspective view showing the heated clip 2 attached to the fluid supply line 1. Figure 3 is a schematic plan view showing the heated clip 2 attached to the fluid supply line 1. Figure 4 is a cross-sectional view along the line IV-IV in Figure 3. Figure 5 is a perspective view showing the first member 21 which constitutes part of the heated clip 2. Figure 6 is a perspective view showing the second member 22 which constitutes another part of the heated clip 2. Figure 7 is a front view showing the second member 22. In Figures 2 to 4, the base block 11 and the block portion 121 are shown as a single unit in a simplified manner, and the fluid equipment body 122 is omitted. Note that the heated clip 2 shown in Figure 1 is only a part of the heated clip 2 shown in Figures 2 to 4.

[0019] As shown in FIGS. 1 to 7, the clip 2 with a heater according to the present embodiment includes a first member 21, a second member 22, and a screw 23 that connects the first member 21 and the second member 22 by screwing. Note that the first member 21 (excluding the heater 211b) and the second member 22 are formed by bending sheet metal.

[0020] The first member 21 has an integrally formed plate portion 211 and a plurality (here, three) of first connecting pieces 212. On the other hand, the second member 22 has an integrally formed clamping claw portion 221 and a plurality (here, three) of second connecting pieces 222. And in a state where the clip 2 with a heater is attached to the fluid supply line 1 (that is, a state where the fluid supply line 1 is clamped by the clip 2 with a heater), the plate portion 211 and the clamping claw portion 221 connected by a connecting mechanism having the first connecting piece 212 and the second connecting piece 222 sandwich both side walls of the base block 11 and the block portion 121.

[0021] The plate portion 211 has a plate portion main body 211a, a heater 211b fixed to the plate portion main body 211a, a plurality (here, three) of protruding pieces 211c provided on the plate portion main body 211a, and a plurality (here, three) of insertion holes 211d formed in both the plate portion main body 211a and the protruding pieces 211c.

[0022] In a state where the clip 2 with a heater is attached to the fluid supply line 1 (that is, a state where the fluid supply line 1 is clamped by the clip 2 with a heater), the plate portion main body 211a is formed to be in surface contact with one side wall of a plurality of base blocks 11 and block portions 121 that extend and are arranged along the longitudinal direction of the fluid supply line 1.

[0023] The heater 211b is provided on one side of the plate portion 211 (specifically, the plate portion body 211a), and specifically consists of a heating element (not shown) and a protective film (not shown) covering the heating element. In other words, the heater 211b and the plate portion body 211a are integrally formed. This makes it easier to adjust the position of the heater 211b when attaching the heater-equipped clip 2 to the fluid supply line 1 (during installation), compared to a clip formed separately from the heater.

[0024] In this embodiment, in order to improve the heat transfer performance of the heater 211b, the heater 211b is provided on the opposite side of the plate portion 211 that is in surface contact with one side wall of the base block 11 and the block portion 121. However, it is not limited to this, and for example, it may be provided interposed between the plate portion 211 (specifically, one side of the plate portion 211) and the base block 11 and the block portion 121 (specifically, one side wall of the base block 11 and the block portion 121).

[0025] Each of the multiple protruding pieces 211c is integrally formed with each of the multiple first connecting pieces 212. In other words, each of the multiple first connecting pieces 212 is connected to the plate body 211a via each of the multiple protruding pieces 211c. The multiple protruding pieces 211c are spaced apart along the longitudinal direction and are provided to protrude from the upper end of the plate body 211a.

[0026] Here, the spacing between adjacent protruding pieces 211c in the same fluid supply line 1 is determined by the longitudinal length of the fluid device 12. In other words, when the heated clip 2 is attached to the fluid supply line 1 (i.e., when the fluid supply line 1 is clamped by the heated clip 2), the multiple protruding pieces 211c are positioned at the boundary points of adjacent fluid devices 12 in the same fluid supply line 1 (i.e., at the boundary points of the block section 121 / areas where the fluid device body 122 is not provided).

[0027] Furthermore, in this configuration, the main body of the plate section 211a does not protrude from the upper wall of the highest block section 121, while the multiple protruding pieces 211c are arranged to protrude from the upper wall of the highest block section 121. This allows the heat from the heater 211b to be efficiently transferred to the base block 11 and block section 121 via the plate section 211, compared to a structure in which the main body of the plate section 211a protrudes from the upper wall of the highest block section 121, thereby improving the heat transfer effect from the heater 211b to the base block 11 and block section 121.

[0028] The multiple insertion holes 211d are elongated holes formed in both the multiple protruding pieces 211c (specifically, the entire area of ​​the protruding pieces 211c) and the plate body 211a, extending along the height direction (the protruding direction of the protruding pieces 211c) perpendicular to the longitudinal direction of the plate body 211a. Specifically, each insertion hole 211d is formed so that the clamping claw portion 221 (specifically, the clamping claw 221a described later) of a heated clip 2 attached to an adjacent fluid supply line 1 can enter.

[0029] Multiple first connecting pieces 212 constitute part of a connecting mechanism that connects the plate portion 211 and the clamping claw portion 221. Each of the multiple first connecting pieces 212 is formed by bending the tip of each of the multiple protruding pieces 211c by 90°.

[0030] When the heated clip 2 is attached to the fluid supply line 1 (i.e., when the fluid supply line 1 is clamped by the heated clip 2), the multiple first connecting pieces 212 are integrally formed with the plate portion 211 so as to face the upper wall of the block portion 121.

[0031] Each of the multiple first connecting pieces 212 has multiple (in this case, three) screw holes 212a formed therein, which engage with multiple screws 23. These screw holes 212a are burred. In addition, each of the multiple first connecting pieces 212 has multiple notches 212b formed therein, which serve as openings that communicate with multiple insertion holes 211d.

[0032] In this embodiment, each of the multiple first connecting pieces 212 is connected to the plate body 211a via multiple protruding pieces 211c, but the embodiment is not limited to this, and for example, the multiple protruding pieces 211c may be eliminated and the pieces may be directly connected to the upper end of the plate body 211a. In this case, the multiple insertion holes 211d are formed only in the plate body 211a.

[0033] The clamping claw portion 221 has a plurality (in this case, three) of clamping claws 221a. When the heated clip 2 is attached to the fluid supply line 1 (i.e., when the fluid supply line 1 is clamped by the heated clip 2), the plurality of clamping claws 221a are clamping pieces arranged at intervals along the longitudinal direction of the fluid supply line 1. In other words, each of the plurality of clamping claws 221a is provided so as to abut against the other side wall of the boundary of adjacent fluid equipment 12 in the same fluid supply line 1 (i.e., the boundary of the block portion 121 / the area where the fluid equipment body 122 is not provided). Note that no heater is fixed to each clamping claw 221a.

[0034] Multiple second connecting pieces 222 constitute the other part of the connecting mechanism that connects the plate portion 211 and the clamping claw portion 221 (clamping claw 221a). Multiple second connecting pieces 222 are formed by bending the respective tips of multiple clamping claws 221a. The clamping claws 221a are elastic materials formed so that the angle between them and the second connecting pieces 222 can be changed. When the clamping claws 221a do not elastically deform, an acute angle is formed between the second connecting pieces 222 and the clamping claws 221a (see Figure 7).

[0035] When the heated clip 2 is attached to the fluid supply line 1 (i.e., when the fluid supply line 1 is clamped by the heated clip 2), the multiple second connecting pieces 222 are integrally formed with the plate portion 211 so as to face the upper wall of the block portion 121. Specifically, the multiple first connecting pieces 212 and the multiple second connecting pieces 222 are formed to face the upper wall of the block portion 121, spaced apart from the upper wall of the boundary between adjacent fluid equipment 12 in the same fluid supply line 1 (i.e., the boundary of the block portion 121 / the area where the fluid equipment body 122 is not provided). This makes it possible to avoid interference between the multiple first connecting pieces 212 (or the multiple second connecting pieces 222) and bolts fastened to the upper wall of the fluid equipment 12.

[0036] Each of the multiple second connecting pieces 222 has multiple (in this case, three) elongated holes 222a formed at the ends spaced apart from the clamping claws 221a, through which multiple screws 23 can pass. These elongated holes 222a are formed to extend along the width direction (the direction in which the second connecting piece 222 extends). Each screw 23 passes through each elongated hole 222a of each second connecting piece 222 and screws into each screw hole 212a of each first connecting piece 212, thereby easily connecting the plate portion 211 and the clamping claw portion 221 by the connecting mechanism.

[0037] In this embodiment, an elongated hole 222a is formed in the second connecting piece 222 to adjust the position of the second member 22 relative to the first member 21 in the width direction, but it is not limited to this, and for example, a circular hole may be formed in the second connecting piece 222.

[0038] Furthermore, in this embodiment, the threaded hole 212a and the elongated hole 222a are formed in the first connecting piece 212 and the second connecting piece 222, respectively, but are not limited to this, and may be formed in the second connecting piece 222 and the first connecting piece 212, respectively. In other words, the threaded hole 212a may be formed in one of the first connecting piece 212 and the second connecting piece 222, and the elongated hole 222a may be formed in the other of the first connecting piece 212 and the second connecting piece 222.

[0039] When the heated clip 2 is attached to the fluid supply line 1 (i.e., when the fluid supply line 1 is clamped by the heated clip 2), the clamping claw 221a elastically deforms, and the angle formed between the second connecting piece 222 and the clamping claw 221a expands to approximately 90°. As shown in Figure 4, in this state, the clamping claw 221a is formed so that its length is shorter than the length of the insertion hole 211d. As a result, when the heated clips 2 are attached to each of the adjacent fluid supply lines 1, the clamping claw 221a of the other heated clip 2 is accommodated in the insertion hole 211d (or both the insertion hole 211d and the notch 212b) of the plate portion 211 of one heated clip 2, which is positioned in the gap between the adjacent fluid supply lines 1. In other words, the plate portion 211 of one adjacent heated clip 2 and the clamping claw 221a of the other adjacent heated clip 2 can be positioned so as not to interfere with each other in the gap between adjacent fluid supply lines 1. As a result, even if the gap between adjacent fluid supply lines 1 is narrow (specifically, even if the gap between adjacent fluid supply lines 1 is wider than the thickness of the plate portion 211 and narrower than the combined thickness of the plate portion 211 and the clamping claw 221a), adjacent heated clips 2 can be attached to adjacent fluid supply lines 1.

[0040] Furthermore, in this case, the other side wall of one base block 11 and block portion 121 in the gap between adjacent fluid supply lines 1 is heated by the heater 211b of the plate portion 211 of another heated clip 2 attached to the adjacent other fluid supply line 1 (base block 11 and block portion 121), thus efficiently heating (keeping warm) one of the base blocks 11 and block portion 121.

[0041] As described above, in the heater-equipped clip 2 according to this embodiment, the heater 211b is fixed only to the plate portion 211 (specifically, the plate portion body 211a) without fixing it to the clamping claw portion 221. Therefore, compared to a fluid supply device that uses a heater fixing device that clamps two heaters to both side walls of the base block 11 and block portion 121, the gap between adjacent fluid supply lines 1 can be narrowed. As a result, even if the gap between the fluid supply lines 1 is narrow, the heater-equipped clip 2 can be attached to the fluid supply line 1.

[0042] Furthermore, by forming the first connecting piece 212, which is integrally formed with the plate portion 211, and the second connecting piece 222, which is integrally formed with the clamping claw portion 221, separately, the heated clip 2 can be easily attached to the fluid supply line 1 compared to a clip in which the plate portion 211, the clamping claw portion 221, and the connecting mechanism connecting the two are integrally formed.

[0043] (How to install the heated clip) Next, we will explain how to attach the heater-equipped clip 2, referring to Figure 8.

[0044] Figure 8 is a flowchart showing the method for attaching the heated clip 2.

[0045] As shown in Figure 8, first, in step S1, the first connecting piece 212, which is integrally formed with the plate portion 211 to which the heater 211b is fixed, and the second connecting piece 222, which is integrally formed with the clamping claw portion 221, are temporarily fastened (connected) by screwing them together.

[0046] Next, in step S2, the heated clip 2 is attached to the fluid supply line 1 such that the plate portion 211 abuts against one side wall of the base block 11 and block portion 121 of the fluid supply line 1, and the clamping claw portion 221 abuts against the other side wall of the boundary between adjacent fluid equipment 12 of the fluid supply line 1 (i.e., the boundary of the block portion 121).

[0047] Next, in step S3, the position of the clamping claw portion 221 (second member 22) relative to the plate portion 211 (first member 21) is adjusted as necessary.

[0048] Finally, in step S4, the fluid supply line 1 is securely held by the heated clip 2 by tightening the screw 23.

[0049] (Effects and Benefits) Next, the effects and advantages of this embodiment will be described.

[0050] The heater-equipped clip 2 according to this embodiment is a clip that is attached to a plurality of fluid supply lines 1, which are arranged in parallel on a fluid supply device 100 and each line is equipped with a plurality of base blocks 11. The clip comprises a plate portion 211 having a fixed heater 211b and formed to be in surface contact with one side wall of the base block 11, a clamping claw portion 221 formed to be in contact with the other side wall of the base block 11 opposite to the one side wall, and a connecting mechanism that connects the plate portion 211 and the clamping claw portion 221. The plate portion 211 has an insertion hole 211d into which the clamping claw 221a of a heater-equipped clip 2 attached to an adjacent fluid supply line 1 can enter.

[0051] The fluid supply device 100 according to this embodiment comprises a plurality of fluid supply lines 1, each of which is arranged in a row and includes a plurality of base blocks 11, and a plurality of heated clips 2 attached to each of the plurality of fluid supply lines 1. The heated clip 2 has a plate portion 211 having an integrally formed heater 211b and formed to be in surface contact with one side wall of the base block 11, a clamping claw portion 221 formed to be in contact with the other side wall of the base block 11 opposite to the one side wall, and a connecting mechanism that connects the plate portion 211 and the clamping claw portion 221. The plate portion 211 has an insertion hole 211d into which the clamping claw portion 221 of an adjacent heated clip 2 attached to the fluid supply line 1 can enter.

[0052] With these configurations, the heater 211b is fixed only to the plate portion 211 (specifically, the plate portion body 211a) without being fixed to the clamping claw portion 221. Therefore, compared to a fluid supply device that uses a heater fixing device that clamps two heaters to both side walls of the base block 11, the gap between adjacent fluid supply lines 1 can be narrowed. As a result, even if the gap between fluid supply lines 1 is narrow, the heater-equipped clip 2 can be attached to the fluid supply line 1.

[0053] Furthermore, the plate portion 211 has a fixed heater 211b, meaning that the heater 211b and the plate portion 211 are integrally formed. Therefore, compared to a clip with a heater formed separately, the position of the heater 211b can be easily adjusted when attaching the heater-equipped clip 2 to the base block 11 of the fluid supply line 1 (during installation).

[0054] Furthermore, when the heated clips 2 are attached to each of the adjacent fluid supply lines 1, the insertion hole 211d of the plate portion 211 of one heated clip 2, which is positioned in the gap between the adjacent fluid supply lines 1, accommodates the clamping claw 221a of the other heated clip 2. In other words, the plate portion 211 of one adjacent heated clip 2 and the clamping claw 221a of the other adjacent heated clip 2 can be positioned in the gap between the adjacent fluid supply lines 1 so as not to interfere with each other. As a result, even if the gap between the adjacent fluid supply lines 1 is narrow (specifically, even if the gap between the adjacent fluid supply lines 1 is wider than the thickness of the plate portion 211 and narrower than the combined thickness of the plate portion 211 and the clamping claw 221a), the adjacent heated clips 2 can be attached to each of the adjacent fluid supply lines 1.

[0055] Furthermore, in this embodiment, the connecting mechanism includes a first connecting piece 212 integrally formed with the plate portion 211 so as to be able to face the upper wall of the block portion 121, and a second connecting piece 222 integrally formed with the clamping claw portion 221 so as to be able to face the upper wall of the block portion 121, and the first connecting piece 212 and the second connecting piece 222 are connected by screw fastening.

[0056] With this configuration, by forming the first connecting piece 212, which is integrally formed with the plate portion 211, and the second connecting piece 222, which is integrally formed with the clamping claw portion 221, separately, the heated clip 2 can be easily attached to the fluid supply line 1 compared to a clip in which the plate portion 211, the clamping claw portion 221, and the connecting mechanism connecting the two are integrally formed.

[0057] Furthermore, in this embodiment, a screw hole 212a is formed in either the first connecting piece 212 or the second connecting piece 222, and an elongated hole 222a extending along the width direction of the base block 11 is formed in the other of the first connecting piece 212 or the second connecting piece 222.

[0058] With this configuration, the screw 23 can slide within the elongated hole 222a, allowing the position of the clamping claw portion 221 relative to the plate portion 211 to be adjusted as needed.

[0059] Furthermore, in this embodiment, the plate portion 211 is formed to be able to contact one side wall of a plurality of base blocks 11 that extend along the longitudinal direction of the fluid supply line 1 and are arranged in a manner, and the clamping claw portion 221 has a plurality of clamping claws 221a that are spaced apart in the longitudinal direction of the fluid supply line 1.

[0060] Furthermore, in this embodiment, the connecting mechanism has a plurality of first connecting pieces 212 which are arranged at intervals in the longitudinal direction of the fluid supply line 1 and integrally formed with the plate portion 211 so as to be able to face the upper wall of the block portion 121, and a plurality of second connecting pieces 222 which are arranged at intervals in the longitudinal direction of the fluid supply line 1 and integrally formed with the clamping claw portion 221 so as to be able to face the upper wall of the block portion 121. The plurality of clamping claws 221a abut against each of the other side walls of the boundary portions of adjacent block portions 121 in the same fluid supply line 1, and the plurality of first connecting pieces 212 each correspond to the plurality of second connecting pieces 222 and face each of the upper walls of the boundary portions of adjacent block portions 121 in the same fluid supply line 1.

[0061] These configurations allow the heated clip 2 to be easily attached to the fluid supply line 1, while also avoiding interference between the multiple first connecting pieces 212 (or multiple second connecting pieces 222) and the bolts fastened to the fluid equipment 12.

[0062] Furthermore, in this embodiment, one side of the plate portion 211 is formed so as to be able to contact one side wall of the base block 11, and a heater 211b is fixed to the other side of the plate portion 211.

[0063] This configuration allows for improved heat transfer performance of the heater 211b compared to a structure in which the heater 211b is interposed between the plate portion 211 and the base block 11.

[0064] Furthermore, in this embodiment, the gap between adjacent fluid supply lines 1 is arranged such that the plate portion 211 of one adjacent heated clip 2 and the clamping claw portion 221 of the other adjacent heated clip 2 do not interfere with each other.

[0065] Although this embodiment has been described above, the above-described embodiment only illustrates a part of the application of the present invention, and is not intended to limit the technical scope of the present invention to the specific configurations of the above-described embodiment.

[0066] This application claims priority under Japanese Patent Application No. 2023-051366, filed with the Japan Patent Office on 28 March 2023, and all contents of that application are incorporated herein by reference.

Claims

1. A clip attached to a fluid supply device, which is arranged in parallel and consists of multiple fluid supply lines, each equipped with multiple flow path blocks, A plate portion having a fixed heater and formed to be in surface contact with one side wall of the flow path block, A clamping claw portion is formed so as to be able to contact the other side wall of the flow channel block opposite to the one side wall, It comprises a connecting mechanism that connects the plate portion and the clamping claw portion, The plate portion has an insertion hole into which the clamping claw portion of the clip attached to the adjacent fluid supply line can enter. The plate portion of one adjacent clip and the clamping claw portion of the other adjacent clip are arranged in the gap between adjacent fluid supply lines so as not to interfere with each other. clip.

2. The aforementioned coupling mechanism is A first connecting piece is integrally formed with the plate portion so as to be able to face the upper wall of the flow channel block, The flow path block has a second connecting piece integrally formed with the clamping claw portion so as to be able to face the upper wall of the flow path block, The first connecting piece and the second connecting piece are connected by screw threading. The clip according to claim 1.

3. A screw hole is formed in either the first connecting piece or the second connecting piece. The other of the first connecting piece and the second connecting piece has an elongated hole that extends along the width direction of the flow channel block. The clip according to claim 2.

4. The plate portion is formed so as to be able to contact the one side wall of a plurality of flow path blocks that extend along the longitudinal direction of the fluid supply line and are arranged therein. The clamping claw portion has a plurality of clamping claws arranged at intervals along the longitudinal direction of the fluid supply line. The clip according to claim 1.

5. The aforementioned coupling mechanism is A plurality of first connecting pieces are arranged at intervals in the longitudinal direction of the fluid supply line and are integrally formed with the plate portion so as to be able to face the upper wall of the flow path block, The fluid supply line has a plurality of second connecting pieces that are spaced apart in the longitudinal direction and are integrally formed with the clamping claw portion so as to be able to face the upper wall of the flow path block, The multiple clamping claws abut against each of the other side walls at the boundary of adjacent flow path blocks in the same fluid supply line. Each of the multiple first connecting pieces corresponds to each of the multiple second connecting pieces and faces the upper wall of the boundary portion of adjacent flow path blocks in the same fluid supply line. The clip according to claim 4.

6. The plate portion is formed such that one side surface can come into contact with the one side wall of the flow channel block. The heater is fixed to the other side of the plate portion. The clip according to claim 1.

7. Multiple fluid supply lines are arranged side by side and comprised of multiple flow path blocks, Each comprises multiple clips attached to multiple fluid supply lines, The aforementioned clip is A plate portion having an integrally formed heater and being formed to be in surface contact with one side wall of the flow path block, A clamping claw portion is formed so as to be able to contact the other side wall of the flow channel block opposite to the one side wall, It has a connecting mechanism that connects the plate portion and the clamping claw portion, The plate portion has an insertion hole into which the clamping claw portion of the clip attached to the adjacent fluid supply line can enter. The gap between adjacent fluid supply lines is arranged such that the plate portion of one adjacent clip and the clamping claw portion of the other adjacent clip do not interfere with each other. Fluid supply device.

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