Magnetic sensor, magnetic head, and magnetic recording device
By optimizing the layout of shields, magnetic layers, and conductive layers in magnetic sensors, sensitivity and resolution are enhanced, addressing the limitations of existing technologies.
Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Patents
- Current Assignee / Owner
- KK TOSHIBA
- Filing Date
- 2022-10-21
- Publication Date
- 2026-07-23
AI Technical Summary
Existing magnetic sensors and heads used in magnetic recording devices, such as HDDs, face challenges in improving sensitivity and resolution.
The magnetic sensor is designed with a specific configuration of shields, magnetic layers, and conductive layers, where the area of certain intermediate layers is minimized to reduce current flow interference, enhancing sensitivity through the anomalous Hall effect.
This configuration results in improved detection sensitivity and output, enabling higher performance in magnetic sensors and heads.
Smart Images
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Abstract
Description
Technical Field
[0001] Embodiments of the present invention relate to a magnetic sensor, a magnetic head, and a magnetic recording device.
Background Art
[0002] There is a magnetic sensor using a magnetic layer. Information is recorded on a magnetic recording medium such as an HDD (Hard Disk Drive) using a magnetic head including the magnetic sensor. In the magnetic sensor, an improvement in resolution is desired.
Prior Art Documents
Patent Documents
[0003]
Patent Document 1
Summary of the Invention
Problems to be Solved by the Invention
[0004] Embodiments of the present invention provide a magnetic sensor, a magnetic head, and a magnetic recording device capable of improving sensitivity.
Means for Solving the Problems
[0005] According to the embodiment, the magnetic sensor includes a first shield, a second shield, a third shield, a fourth shield, a first magnetic layer, a first conductive layer, a second conductive layer, a first intermediate layer, and a second intermediate layer. The second direction from the third shield to the fourth shield intersects the first direction from the first shield to the second shield. The first magnetic layer is provided between the first shield and the second shield. The first magnetic layer is located between the third shield and the fourth shield. The first magnetic layer includes a first surface and a second surface. The first surface is located between the first shield and the second surface. The first conductive layer is provided between the third shield and the first magnetic layer and is non-magnetic. The second conductive layer is provided between the first magnetic layer and the fourth shield and is non-magnetic. The first intermediate layer is provided between the first shield and the first magnetic layer and is non-magnetic and conductive. The first intermediate layer includes a first intermediate layer surface facing the first surface. The area of the first intermediate layer surface is smaller than the area of the first surface. The second intermediate layer is provided between the first magnetic layer and the second shield, and is non-magnetic and conductive. [Brief explanation of the drawing]
[0006] [Figure 1] Figures 1(a) and 1(b) are schematic cross-sectional views illustrating a magnetic sensor according to the first embodiment. [Figure 2] Figures 2(a) and 2(b) are schematic cross-sectional views illustrating a magnetic sensor according to the first embodiment. [Figure 3] Figures 3(a) and 3(b) are schematic cross-sectional views illustrating a magnetic sensor according to the first embodiment. [Figure 4] Figures 4(a) and 4(b) are schematic cross-sectional views illustrating a magnetic sensor according to the first embodiment. [Figure 5] Figure 5 is a schematic perspective view illustrating a magnetic head and magnetic recording device according to the second embodiment. [Figure 6] Figure 6 is a schematic perspective view illustrating a part of the magnetic recording apparatus according to the embodiment. [Figure 7]Figure 7 is a schematic perspective view illustrating a magnetic recording device according to an embodiment. [Figure 8] Figures 8(a) and 8(b) are schematic perspective views illustrating a part of a magnetic recording apparatus according to an embodiment. [Modes for carrying out the invention]
[0007] The embodiments of the present invention will be described below with reference to the drawings. Drawings are schematic or conceptual, and the relationships between the thickness and width of each part, as well as the ratios of the sizes of different parts, are not necessarily identical to those of reality. Even when representing the same part, the dimensions and ratios may be depicted differently in different drawings. In this specification and in each figure, elements similar to those described above are denoted by the same reference numerals with respect to previously shown figures, and detailed explanations are omitted as appropriate.
[0008] (First Embodiment) Figures 1(a) and 1(b) are schematic cross-sectional views illustrating a magnetic sensor according to the first embodiment. As shown in Figure 1(a), the magnetic sensor 70A according to this embodiment includes a first shield 41, a second shield 42, a third shield 43, a fourth shield 44, a first magnetic layer 11, a first conductive layer 21, a second conductive layer 22, a first intermediate layer 61, and a second intermediate layer 62.
[0009] The second direction D2 from the third shield 43 to the fourth shield 44 intersects with the first direction D1 from the first shield 41 to the second shield 42.
[0010] In this example, the first direction D1 is defined as the X-axis direction. One direction perpendicular to the X-axis direction is defined as the Y-axis direction. A direction perpendicular to both the X-axis and Y-axis directions is defined as the Z-axis direction. The second direction D2 is, for example, the Y-axis direction.
[0011] The first magnetic layer 11 is provided between the first shield 41 and the second shield 42. The first magnetic layer 11 is located between the third shield 43 and the fourth shield 44. The first magnetic layer 11 includes a first surface 11a and a second surface 11b. The first surface 11a is located between the first shield 41 and the second surface 11b. The first surface 11a is the surface on the side of the first shield 41. The second surface 11b is the surface on the side of the second shield 42. The first surface 11a faces the first shield 41. The second surface 11b faces the second shield 42.
[0012] In this example, the third shield 43 is provided between a part of the first shield 41 and a part of the second shield 42 in the first direction D1. The fourth shield 44 is provided between another part of the first shield 41 and another part of the second shield 42 in the first direction D1.
[0013] The first conductive layer 21 is provided between the third shield 43 and the first magnetic layer 11. The first conductive layer 21 is non-magnetic. The second conductive layer 22 is provided between the first magnetic layer 11 and the fourth shield 44. The second conductive layer 22 is non-magnetic.
[0014] The first intermediate layer 61 is provided between the first shield 41 and the first magnetic layer 11. The first intermediate layer 61 is non-magnetic and conductive. The first intermediate layer 61 includes a first intermediate layer surface 61f facing the first surface 11a. In this embodiment, the area of the first intermediate layer surface 61f is smaller than the area of the first surface 11a.
[0015] The second intermediate layer 62 is provided between the first magnetic layer 11 and the second shield 42. The second intermediate layer 62 is non-magnetic and conductive.
[0016] As shown in Figure 1(a), the magnetic sensor 70A may include a first terminal 51, a second terminal 52, a third terminal 53, and a fourth terminal. The first terminal 51 is electrically connected to the first shield 41. The second terminal 52 is electrically connected to the second shield 42. The third terminal 53 is electrically connected to the third shield 43. The fourth terminal 54 is electrically connected to the fourth shield 44.
[0017] A first current i1 can be supplied between a third terminal 53 and a fourth terminal 54. For example, the magnetic sensor 70A may include a second circuit 75b. The second circuit 75b can supply the first current i1 between the third terminal 53 and the fourth terminal 54. The first current i1 passes through the first magnetic layer 11 via the third shield 43 and the fourth shield 44.
[0018] A voltage Vx between a first terminal 51 and a second terminal 52 can be detected. For example, the magnetic sensor 70A may include a first circuit 75a. The first circuit 75a can detect a value corresponding to the voltage Vx between the first terminal 51 and the second terminal 52.
[0019] The voltage Vx between the first terminal 51 and the second terminal 52 when the first current i1 flows between the third terminal 53 and the fourth terminal 54 can vary according to the detected magnetic field.
[0020] The change in the voltage Vx is considered to be caused, for example, by a special magnetic effect occurring in the first magnetic layer 11. For example, the first magnetic layer 11 may include at least one selected from the group consisting of Co, Ni, and Fe. The first magnetic layer 11 may include at least one selected from the group consisting of Co2MnGa, CoMnAl, and FePt. For example, Co2MnGa and CoMnAl are Heusler alloy materials. In the above materials, a large change in the voltage Vx is easily obtained.
[0021] The special magnetic effect related to the change in the voltage Vx may include, for example, the Anomalous Hall Effect. For example, the first magnetic layer 11 has the Anomalous Hall Effect.
[0022] As described above, the voltage Vx changes in response to changes in the target magnetic field. The change in voltage Vx is based on the first current i1. The first current i1 flows through the first magnetic layer 11 along the second direction D2. At this time, the first current i1 may flow through a portion of the first shield 41 via the first intermediate layer 61. When a portion of the first current i1 flows through the first intermediate layer 61 and the first shield 41, the current flowing through the first magnetic layer 11 decreases. This reduces the change in voltage Vx. As a result, for example, the output obtained decreases. For example, the detection sensitivity decreases.
[0023] In this embodiment, the area of the first intermediate layer surface 61f is smaller than the area of the first surface 11a. This suppresses the flow of a portion of the first current i1 through the first intermediate layer 61 and the first shield 41. The decrease in the current flowing through the first magnetic layer 11 is suppressed. Large changes in voltage Vx are easily obtained. High output is easily obtained. For example, high detection sensitivity can be obtained. According to this embodiment, a magnetic sensor capable of improving sensitivity can be provided.
[0024] In this embodiment, the fact that the area of the first intermediate layer surface 61f is smaller than the area of the first surface 11a does not adversely affect the detection of the voltage Vx via the first terminal 51 and the second terminal 52.
[0025] As shown in Figure 1(a), the magnetic sensor 70A may further include a first insulating member 31. The first insulating member 31 includes a first region 31a and a second region 31b. The first region 31a is provided between the first shield 41 and the third shield 43, and between the first shield 41 and a part of the first magnetic layer 11. The second region 31b is provided between the first shield 41 and the fourth shield 44, and between the first shield 41 and another part of the first magnetic layer 11. The area of the first intermediate layer surface 61f can be made smaller than the area of the first surface 11a by a portion of the first region 31a and a portion of the second region 31b.
[0026] As shown in Figure 1(a), the second intermediate layer 62 includes a second intermediate layer surface 62f. The second intermediate layer surface 62f faces the second surface 11b. In this example, the area of the second intermediate layer surface 62f is smaller than the area of the second surface 11b. This suppresses the flow of a portion of the first current i1 through the second intermediate layer 62 and the second shield 42. This suppresses the decrease in the current flowing through the first magnetic layer 11. Larger changes in voltage Vx are easier to obtain. Higher output is easier to obtain. For example, higher detection sensitivity can be obtained. A magnetic sensor with improved sensitivity can be provided.
[0027] As shown in Figure 1(a), the first insulating member 31 may further include a third region 31c and a fourth region 31d. The third region 31c is provided between the third shield 43 and the second shield 42, and between a part of the first magnetic layer 11 and the second shield 42. The fourth region 31d is provided between the fourth shield 44 and the second shield 42, and between another part of the first magnetic layer 11 and the second shield 42.
[0028] The first insulating member 31 may include a first element comprising at least one selected from the group consisting of oxygen and nitrogen, and a second element comprising at least one selected from the group consisting of Si, Al, Ta, Hf, and Mg. The first insulating member 31 may include, for example, at least one selected from the group consisting of silicon oxide, silicon nitride, silicon oxynitride, and aluminum oxide.
[0029] Figure 1(b) shows the XZ plane passing through the first magnetic layer 11. along This is a cross-sectional view. As shown in Figure 1(b), the first shield 41 includes a first end face 41F. As will be described later, the magnetic sensor 70A may be included in the magnetic head. In this case, the first end face 41F corresponds to the media-facing surface.
[0030] As shown in Figure 1(b), the third direction D3 intersects the plane containing the first direction D1 and the second direction D2. The third direction D3 is, for example, the Z-axis direction. When the magnetic sensor 70A is included in the magnetic head, the third direction D3 corresponds to the height direction.
[0031] As shown in Figure 1(b), the length of the first intermediate layer surface 61f along the third direction D3 may be different from the length of the second intermediate layer surface 62f along the third direction D3. In this embodiment, the length of the first intermediate layer surface 61f along the third direction D3 may be the same as the length of the second intermediate layer surface 62f along the third direction D3.
[0032] As shown in Figure 1(a), the magnetization 11M of the first magnetic layer 11 may be aligned with the second direction D2. The magnetization 43M of the third shield 43 may be aligned with the second direction D2. The magnetization 44M of the fourth shield 44 may be aligned with the second direction D2. The magnetizations 43M and 44M may have the same orientation as the magnetization 11M.
[0033] At least one of the first conductive layer 21 and the second conductive layer 22 may contain at least one selected from the group consisting of Cu, Au, Ag, Pt, Al, Pd, Ta, Ru, Hf, W, Mo, Ir, Cr, Tb, and Rh.
[0034] At least one of the first shield 41, the second shield 42, the third shield 43, and the fourth shield 44 may contain at least one selected from the group consisting of Fe, Co, and Ni.
[0035] Figures 2(a) and 2(b) are schematic cross-sectional views illustrating a magnetic sensor according to the first embodiment. As shown in Figures 2(a) and 2(b), in the magnetic sensor 70B according to the embodiment, the first intermediate layer 61 may include a first hole 61h. The first hole 61h extends along the first direction D1. The configuration of the magnetic sensor 70B, excluding this, may be the same as that of the magnetic sensor 70A.
[0036] In the magnetic sensor 70B, the provision of the first hole 61h results in a smaller area of the first intermediate layer surface 61f than the area of the first surface 11a. This suppresses the flow of a portion of the first current i1 through the first intermediate layer 61 and the first shield 41, thereby improving sensitivity.
[0037] A portion of the first insulating member 31 may be provided in the first hole 61h. Multiple first holes 61h may be provided.
[0038] As shown in Figures 2(a) and 2(b), the second intermediate layer 62 may include a second hole 62h. The second hole 62h extends along the first direction D1. By providing the second hole 62h, the area of the second intermediate layer surface 62f is smaller than the area of the second surface 11b. This suppresses the flow of a portion of the first current i1 through the second intermediate layer 62 and the second shield 42. Sensitivity can be improved.
[0039] A portion of the first insulating member 31 may be provided in the second hole 62h. Multiple second holes 62h may be provided.
[0040] Figures 3(a) and 3(b) are schematic cross-sectional views illustrating a magnetic sensor according to the first embodiment. As shown in Figure 3(a), in the magnetic sensor 70C according to this embodiment, the first shield 41 is provided between a part of the third shield 43 and a part of the fourth shield 44 in the second direction D2. The second shield 42 is provided between another part of the third shield 43 and another part of the fourth shield 44 in the second direction D2. The first direction D1 is along the Y-axis direction. The second direction D2 is along the X-axis direction. In the magnetic sensor 70C, the configuration other than this may be the same as that of the magnetic sensor 70A.
[0041] In the magnetic sensor 70C, the voltage Vx between the first terminal 51 and the second terminal 52 when the first current i1 flows between the third terminal 53 and the fourth terminal 54 can be varied according to the magnetic field to be detected. In the magnetic sensor 70C, the area of the first intermediate layer surface 61f is smaller than the area of the first surface 11a. This suppresses the flow of a portion of the first current i1 through the first intermediate layer 61 and the first shield 41. Sensitivity can be improved.
[0042] As shown in Figure 3(a), in the magnetic sensor 70C, the first insulating member 31 includes a first region 31a and a second region 31b. The first region 31a is provided between the first shield 41 and a part of the first magnetic layer 11. The second region 31b is provided between the third shield 43 and the first shield 41.
[0043] As shown in Figure 3(a), in the magnetic sensor 70C, the first insulating member 31 may further include a third region 31c and a fourth region 31d. The third region 31c is provided between the first shield 41 and another part of the first magnetic layer 11. The fourth region 31d is provided between the first shield 41 and the fourth shield 44.
[0044] As shown in Figure 3(a), in the magnetic sensor 70C, the second intermediate layer 62 may include a second intermediate layer surface 62f. The second intermediate layer surface 62f faces the second surface 11b. The area of the second intermediate layer surface 62f is smaller than the area of the second surface 11b. This suppresses the flow of a portion of the first current i1 through the second intermediate layer 62 and the second shield 42. Sensitivity can be improved.
[0045] As shown in Figure 3(a), the first insulating member 31 may include a fifth region 31e and a sixth region 31f. The fifth region 31e is provided between a part of the first magnetic layer 11 and the second shield 42. The sixth region 31f is provided between the third shield 43 and the second shield 42.
[0046] As shown in Figure 3(a), the first insulating member 31 may further include a seventh region 31g and an eighth region 31h. The seventh region 31g is provided between another part of the first magnetic layer 11 and the second shield 42. The eighth region 31h is provided between the second shield 42 and the fourth shield 44.
[0047] As shown in Figure 3(b), the length of the first conductive layer 21 along the third direction D3 may be shorter than the length of the first magnetic layer 11 along the third direction D3. The length of the second conductive layer 22 along the third direction D3 may be shorter than the length of the first magnetic layer 11 along the third direction D3.
[0048] In the magnetic sensor 70C, the magnetization 11M of the first magnetic layer 11 may be aligned with the second direction D2. The magnetization 43M of the third shield 43 may be aligned with the second direction D2. The magnetization 44M of the fourth shield 44 may be aligned with the second direction D2. The magnetizations 43M and 44M may have the same orientation as the magnetization 11M.
[0049] Figures 4(a) and 4(b) are schematic cross-sectional views illustrating a magnetic sensor according to the first embodiment. As shown in Figures 4(a) and 4(b), in the magnetic sensor 70D according to the embodiment, the first intermediate layer 61 may include a first hole 61h. The first hole 61h extends along the first direction D1. The configuration of the magnetic sensor 70D, apart from this, may be the same as that of the magnetic sensor 70C.
[0050] In the magnetic sensor 70D, the provision of the first hole 61h results in a smaller area of the first intermediate layer surface 61f than the area of the first surface 11a. This suppresses the flow of a portion of the first current i1 through the first intermediate layer 61 and the first shield 41, thereby improving sensitivity.
[0051] A portion of the first insulating member 31 may be provided in the first hole 61h. Multiple first holes 61h may be provided.
[0052] As shown in Figures 4(a) and 4(b), the second intermediate layer 62 may include a second hole 62h. The second hole 62h extends along the first direction D1. By providing the second hole 62h, the area of the second intermediate layer surface 62f is smaller than the area of the second surface 11b. This suppresses the flow of a portion of the first current i1 through the second intermediate layer 62 and the second shield 42. Sensitivity can be improved.
[0053] A portion of the first insulating member 31 may be provided in the second hole 62h. Multiple second holes 62h may be provided.
[0054] (Second Embodiment) Figure 5 is a schematic perspective view illustrating a magnetic head and magnetic recording device according to the second embodiment. As shown in Figure 5, the magnetic head 110 according to this embodiment includes a playback unit 70. The playback unit 70 includes a magnetic sensor (magnetic sensor 70A, magnetic sensor 70B, magnetic sensor 70C, or magnetic sensor 70D) according to the first embodiment. The magnetic head 110 is used together with a magnetic recording medium 80. In this example, the magnetic head 110 includes a recording unit 90. The recording unit 90 of the magnetic head 110 records information on the magnetic recording medium 80. The playback unit 70 plays back the information recorded on the magnetic recording medium 80.
[0055] The magnetic recording medium 80 includes, for example, a media substrate 82 and a magnetic recording layer 81 provided on the media substrate 82. The magnetization 83 of the magnetic recording layer 81 is controlled by the recording unit 90. The recording unit 90 includes, for example, a first magnetic pole 91 and a second magnetic pole 92. The first magnetic pole 91 is, for example, a main magnetic pole. The second magnetic pole 92 is, for example, a trailing shield. The recording unit 90 may also include a recording unit element 93. The recording unit element 93 may include a magnetic field control element or a high-frequency oscillation element, etc. The recording unit element 93 may be omitted.
[0056] The regeneration unit 70 includes, for example, a first regeneration magnetic shield 72a, a second regeneration magnetic shield 72b, and a magnetic regeneration element 71. The magnetic regeneration element 71 is provided between the first regeneration magnetic shield 72a and the second regeneration magnetic shield 72b. The magnetic regeneration element 71 is capable of outputting a signal corresponding to the magnetization 83 of the magnetic recording layer 81.
[0057] When a magnetic sensor 70A or magnetic sensor 70B is applied, the first regenerative magnetic shield 72a corresponds to, for example, one of the first shield 41 and the second shield 42, and the second regenerative magnetic shield 72b corresponds to, for example, the other of the first shield 41 and the second shield 42. When a magnetic sensor 70C or magnetic sensor 70D is applied, the first regenerative magnetic shield 72a corresponds to, for example, one of the third shield 43 and the fourth shield 44, and the second regenerative magnetic shield 72b corresponds to, for example, the other of the third shield 43 and the fourth shield 44. The magnetic regeneration element 71 includes a first magnetic layer 11.
[0058] As shown in Figure 5, the magnetic recording medium 80 moves relative to the magnetic head 110 in the direction of the medium movement direction 85. The magnetic head 110 controls the information corresponding to the magnetization 83 of the magnetic recording layer 81 at any position. The magnetic head 110 reproduces the information corresponding to the magnetization 83 of the magnetic recording layer 81 at any position.
[0059] Figure 6 is a schematic perspective view illustrating a part of the magnetic recording apparatus according to the embodiment. Figure 6 illustrates a head slider. The magnetic head 110 is mounted on a head slider 159. The head slider 159 includes, for example, Al2O3 / TiC. The head slider 159 moves relative to the magnetic recording medium, either floating above or in contact with it.
[0060] The head slider 159 has, for example, an air inlet side 159A and an air outlet side 159B. The magnetic head 110 is positioned on the side of the air outlet side 159B of the head slider 159. As a result, the magnetic head 110 moves relative to the magnetic recording medium while floating above or in contact with it.
[0061] Figure 7 is a schematic perspective view illustrating a magnetic recording device according to an embodiment. Figures 8(a) and 8(b) are schematic perspective views illustrating a part of a magnetic recording apparatus according to an embodiment. The magnetic recording device may be a magnetic recording and playback device. As shown in Figure 7, a rotary actuator is used in the magnetic recording device 150 according to this embodiment. The recording medium disk 180 is mounted on a spindle motor 180M. The recording medium disk 180 rotates in the direction of arrow AR by the spindle motor 180M. The spindle motor 180M responds to a control signal from the drive unit control. The magnetic recording device 150 according to this embodiment may include a plurality of recording medium disks 180. The magnetic recording device 150 may also include a recording medium 181. The recording medium 181 is, for example, an SSD (Solid State Drive). For example, a non-volatile memory such as flash memory is used for the recording medium 181. For example, the magnetic recording device 150 may also be a hybrid HDD (Hard Disk Drive).
[0062] The head slider 159 records and plays back information to be recorded on the recording medium disk 180. The head slider 159 is located at the tip of a thin-film suspension 154. A magnetic head according to this embodiment is located near the tip of the head slider 159.
[0063] As the recording medium disk 180 rotates, the pressing pressure from the suspension 154 and the pressure generated on the media-facing surface (ABS) of the head slider 159 are balanced. The distance between the media-facing surface of the head slider 159 and the surface of the recording medium disk 180 becomes a predetermined amount of levitation. In this embodiment, the head slider 159 may be in contact with the recording medium disk 180. For example, a contact-running type may be applied.
[0064] The suspension 154 is connected to one end of an arm 155 (for example, an actuator arm). The arm 155 has, for example, a bobbin section. The bobbin section holds a drive coil. A voice coil motor 156 is provided at the other end of the arm 155. The voice coil motor 156 is a type of linear motor. The voice coil motor 156 includes, for example, a drive coil and a magnetic circuit. The drive coil is wound around the bobbin section of the arm 155. The magnetic circuit includes a permanent magnet and an opposing yoke. The drive coil is provided between the permanent magnet and the opposing yoke. The suspension 154 has one end and the other end. A magnetic head is provided at one end of the suspension 154. The arm 155 is connected to the other end of the suspension 154.
[0065] The arm 155 is held by ball bearings. Ball bearings are provided at two locations, above and below the bearing portion 157. The arm 155 can rotate and slide by a voice coil motor 156. The magnetic head can move to any position on the recording medium disk 180.
[0066] Figure 8(a) illustrates a part of the configuration of a magnetic recording device and is an enlarged perspective view of the head stack assembly 160. Figure 8(b) is a perspective view illustrating a magnetic head assembly (head gimbal assembly: HGA) 158, which is part of the head stack assembly 160.
[0067] As shown in Figure 8(a), the head stack assembly 160 includes a bearing section 157, a head gimbal assembly 158, and a support frame 161. The head gimbal assembly 158 extends from the bearing section 157. The support frame 161 extends from the bearing section 157. The direction in which the support frame 161 extends is opposite to the direction in which the head gimbal assembly 158 extends. The support frame 161 supports the coil 162 of the voice coil motor 156.
[0068] As shown in Figure 8(b), the head gimbal assembly 158 includes an arm 155 extending from a bearing portion 157 and a suspension 154 extending from the arm 155.
[0069] A head slider 159 is provided at the tip of the suspension 154. A magnetic head according to the embodiment is provided on the head slider 159.
[0070] The magnetic head assembly (head gimbal assembly) 158 according to the embodiment includes a magnetic head according to the embodiment, a head slider 159 on which the magnetic head is provided, a suspension 154, and an arm 155. The head slider 159 is provided at one end of the suspension 154. The arm 155 is connected to the other end of the suspension 154.
[0071] The suspension 154 may have, for example, lead wires (not shown) for recording and reproducing signals. The suspension 154 may also have, for example, lead wires (not shown) for heaters for adjusting the amount of levitation. The suspension 154 may also have, for example, lead wires (not shown) for an oscillator or the like. These lead wires are electrically connected to a plurality of electrodes provided on the magnetic head.
[0072] In the magnetic recording device 150, a signal processing unit 190 is provided. The signal processing unit 190 records and reproduces signals on a magnetic recording medium using a magnetic head. The input and output lines of the signal processing unit 190 are connected, for example, to the electrode pads of the head gimbal assembly 158 and are electrically connected to the magnetic head.
[0073] The magnetic recording apparatus 150 according to the embodiment includes a magnetic recording medium, a magnetic head according to the embodiment, a movable part, a position control unit, and a signal processing unit. The movable part allows the magnetic recording medium and the magnetic head to move relative to each other while separated or in contact. The position control unit aligns the magnetic head to a predetermined recording position on the magnetic recording medium. The signal processing unit records and reproduces signals on the magnetic recording medium using the magnetic head.
[0074] For example, a recording medium disk 180 is used as the magnetic recording medium. The movable part includes, for example, a head slider 159. The position control unit includes, for example, a head gimbal assembly 158.
[0075] The embodiment may include the following configuration (e.g., proposed technical details). (Composition 1) The first shield and, The second shield, The third shield and, The fourth shield is such that the second direction from the third shield to the fourth shield intersects with the first direction from the first shield to the second shield, and the fourth shield is... A first magnetic layer provided between the first shield and the second shield, the first magnetic layer being located between the third shield and the fourth shield, the first magnetic layer including a first surface and a second surface, the first surface being located between the first shield and the second surface, A non-magnetic first conductive layer is provided between the third shield and the first magnetic layer, A non-magnetic second conductive layer is provided between the first magnetic layer and the fourth shield, A non-magnetic and conductive first intermediate layer provided between the first shield and the first magnetic layer, wherein the first intermediate layer includes a first intermediate layer surface facing the first surface, and the area of the first intermediate layer surface is smaller than the area of the first surface, A non-magnetic and conductive second intermediate layer is provided between the first magnetic layer and the second shield, A magnetic sensor equipped with a magnetic sensor.
[0076] (Configuration 2) The first shield and the first terminal electrically connected, The second terminal is electrically connected to the second shield, The third terminal electrically connected to the third shield, The fourth terminal is electrically connected to the fourth shield, A magnetic sensor as described in configuration 1, further comprising the above.
[0077] (Composition 3) The magnetic sensor according to configuration 2, wherein the voltage between the first terminal and the second terminal when a first current flows between the third terminal and the fourth terminal is variable according to the magnetic field to be detected.
[0078] (Composition 4) A magnetic sensor according to any one of configurations 1 to 3, wherein at least one of the first conductive layer and the second conductive layer includes at least one selected from the group consisting of Cu, Au, Ag, Pt, Al, Pd, Ta, Ru, Hf, W, Mo, Ir, Cr, Tb, and Rh.
[0079] (Composition 5) The third shield is provided between a part of the first shield and a part of the second shield in the first direction. The magnetic sensor according to any one of configurations 1 to 4, wherein the fourth shield is provided between another part of the first shield and another part of the second shield in the first direction.
[0080] (Composition 6) Further comprising a first insulating member, The first insulating member includes a first region and a second region, The first region is provided between the first shield and the third shield, and between the first shield and a part of the first magnetic layer. The magnetic sensor according to configuration 5, wherein the second region is provided between the first shield and the fourth shield, and between the first shield and another part of the first magnetic layer.
[0081] (Composition 7) The second intermediate layer includes a second intermediate layer surface facing the second surface, The magnetic sensor according to configuration 5, wherein the area of the second intermediate layer surface is smaller than the area of the second surface.
[0082] (Composition 8) Further comprising a first insulating member, The first insulating member includes a first region, a second region, a third region and a fourth region, The first region is provided between the first shield and the third shield, and between the first shield and a part of the first magnetic layer. The second region is provided between the first shield and the fourth shield, and between the first shield and another part of the first magnetic layer. The third region is provided between the third shield and the second shield, and between the portion of the first magnetic layer and the second shield. The magnetic sensor according to configuration 7, wherein the fourth region is provided between the fourth shield and the second shield, and between the other part of the first magnetic layer and the second shield.
[0083] (Composition 9) The magnetic sensor according to configuration 6 or 8, wherein the first insulating member comprises a first element including at least one selected from the group consisting of oxygen and nitrogen, and a second element including at least one selected from the group consisting of Si, Al, Ta, Hf and Mg.
[0084] (Composition 10) The first shield is provided between a part of the third shield and a part of the fourth shield in the second direction. The magnetic sensor according to any one of configurations 1 to 4, wherein the second shield is provided between another part of the third shield and another part of the fourth shield in a second direction.
[0085] (Composition 11) Further comprising a first insulating member, The first insulating member includes a first region and a second region, The first region is provided between the first shield and a portion of the first magnetic layer, The second region is the magnetic sensor according to configuration 10, provided between the third shield and the first shield.
[0086] (Composition 12) The first insulating member further includes a third region and a fourth region, The third region is provided between the first shield and another part of the first magnetic layer, The fourth region is the magnetic sensor according to configuration 11, provided between the first shield and the fourth shield.
[0087] (Composition 13) The second intermediate layer includes a second intermediate layer surface facing the second surface, The magnetic sensor according to configuration 10, wherein the area of the second intermediate layer surface is smaller than the area of the second surface.
[0088] (Composition 14) Further comprising a first insulating member, The first insulating member includes a fifth region and a sixth region, The fifth region is provided between a part of the first magnetic layer and the second shield, The sixth region is the magnetic sensor according to configuration 13, provided between the third shield and the second shield.
[0089] (Composition 15) The first insulating member further includes a seventh region and an eighth region, The seventh region is provided between another part of the first magnetic layer and the second shield, The eighth region is the magnetic sensor according to configuration 14, provided between the second shield and the fourth shield.
[0090] (Composition 16) The magnetic sensor according to any one of configurations 1 to 15, wherein the first magnetic layer includes at least one selected from the group consisting of Co2MnGa, CoMnAl, and FePt.
[0091] (Composition 17) The magnetic sensor according to any one of configurations 1 to 16, wherein the first intermediate layer includes a first hole extending along the first direction.
[0092] (Composition 18) The first magnetic layer has an anomalous Hall effect, as described in any one of configurations 1 to 17.
[0093] (Composition 19) A magnetic head equipped with a magnetic sensor as described in any one of configurations 1 to 18.
[0094] (Composition 20) The magnetic head described in configuration 19, Magnetic recording medium and Equipped with, The magnetic sensor is a magnetic recording device capable of reproducing information recorded on the magnetic recording medium.
[0095] According to the embodiment, a magnetic sensor, a magnetic head, and a magnetic recording device capable of improving sensitivity can be provided.
[0096] In this specification, "perpendicular" and "parallel" do not mean strictly perpendicular and strictly parallel, but also include variations in the manufacturing process, for example, and it is sufficient if they are substantially perpendicular and substantially parallel.
[0097] The embodiments of the present invention have been described above with reference to specific examples. However, the present invention is not limited to these specific examples. For example, the specific configuration of each element included in the magnetic sensor, magnetic head, and magnetic recording device, such as shields, magnetic layers, conductive layers, members, intermediate layers, and terminals, is included within the scope of the present invention as long as the present invention can be implemented in the same manner and similar effects can be obtained by appropriately selecting from the range known to those skilled in the art.
[0098] Combinations of two or more elements from any of the specific examples, to the extent technically feasible, are also included within the scope of the present invention, insofar as they encompass the gist of the invention.
[0099] Furthermore, all magnetic sensors, magnetic heads, and magnetic recording devices that a person skilled in the art can design and implement based on the above-described embodiments of the present invention are also within the scope of the present invention, insofar as they encompass the gist of the present invention.
[0100] Furthermore, within the scope of the concept of the present invention, a person skilled in the art could conceive of various modifications and alterations, and it is understood that such modifications and alterations also fall within the scope of the present invention.
[0101] While several embodiments of the present invention have been described, these embodiments are presented as examples only and are not intended to limit the scope of the invention. These novel embodiments can be carried out in a variety of other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their variations are included in the scope and spirit of the invention, as well as in the claims of the invention and its equivalents. [Explanation of symbols]
[0102] 11: First magnetic layer, 11M: First magnetization, 11a, 11b: First and second surfaces, 21, 22: First and second conductive layers, 31: First component, 31a~32h: First to eighth regions, 41~44: First to fourth shields, 41F: First end face, 43M, 44M: Magnetization, 51~54: First to fourth terminals, 61, 62: First and second intermediate layers, 61f, 62f: First and second intermediate layer surfaces, 61h, 62h: First and second holes, 70: Regeneration section, 70A~70D: Magnetic sensors, 71: Magnetic regeneration element, 72a, 72b: First and second regeneration magnetic shields, 75a, 75b: First and second circuits, 80: Magnetic recording medium, 81: Magnetic recording layer, 82: Medium substrate, 83: Magnetization, 85: Medium movement direction, 90: Recording section, 91, 92: First and second magnetic poles, 93: Recording section element, 110: Magnetic head, 150: Magnetic recording device, 154: Suspension, 155: Arm, 156: Voice coil motor, 157: Bearing section, 158: Head gimbal assembly, 159: Head slider, 159A: Air inlet side, 159B: Air outlet side, 160: Head stack assembly, 161: Support frame, 162: Coil, 180: Recording medium disk, 180M: Spindle motor, 181: Recording medium, 190: Signal processing section, AR: Arrow, D1~D3: First to third directions, Vx: Voltage, i1: First current
Claims
1. The first shield and, The second shield and, The third shield and, A fourth shield, wherein the second direction from the third shield to the fourth shield intersects with the first direction from the first shield to the second shield, and the fourth shield A first magnetic layer provided between the first shield and the second shield, wherein the first magnetic layer is located between the third shield and the fourth shield, and the first magnetic layer includes a first surface and a second surface, the first surface being located between the first shield and the second surface, A non-magnetic first conductive layer is provided between the third shield and the first magnetic layer, A non-magnetic second conductive layer is provided between the first magnetic layer and the fourth shield, A non-magnetic and conductive first intermediate layer is provided between the first shield and the first magnetic layer, wherein the first intermediate layer includes a first intermediate layer surface facing the first surface, and the area of the first intermediate layer surface is smaller than the area of the first surface, A non-magnetic and conductive second intermediate layer is provided between the first magnetic layer and the second shield, The first terminal is electrically connected to the first shield, The second terminal is electrically connected to the second shield, The third shield and the third terminal electrically connected, The fourth terminal electrically connected to the fourth shield, A magnetic sensor equipped with a magnetic sensor.
2. The magnetic sensor according to claim 1, wherein the voltage between the first terminal and the second terminal when a first current flows between the third terminal and the fourth terminal is variable according to the magnetic field to be detected.
3. The third shield is provided between a part of the first shield and a part of the second shield in the first direction. The magnetic sensor according to claim 1, wherein the fourth shield is provided between another part of the first shield and another part of the second shield in the first direction.
4. Further comprising a first insulating member, The first insulating member includes a first region and a second region, The first region is provided between the first shield and the third shield, and between the first shield and a part of the first magnetic layer. The magnetic sensor according to claim 3, wherein the second region is provided between the first shield and the fourth shield, and between the first shield and another part of the first magnetic layer.
5. The first shield is provided between a part of the third shield and a part of the fourth shield in the second direction. The magnetic sensor according to claim 1, wherein the second shield is provided between another part of the third shield and another part of the fourth shield in the second direction.
6. The first shield and, The second shield and, The third shield and, A fourth shield, wherein the second direction from the third shield to the fourth shield intersects with the first direction from the first shield to the second shield, and the fourth shield A first magnetic layer provided between the first shield and the second shield, wherein the first magnetic layer is located between the third shield and the fourth shield, and the first magnetic layer includes a first surface and a second surface, the first surface being located between the first shield and the second surface, A non-magnetic first conductive layer is provided between the third shield and the first magnetic layer, A non-magnetic second conductive layer is provided between the first magnetic layer and the fourth shield, A non-magnetic and conductive first intermediate layer is provided between the first shield and the first magnetic layer, wherein the first intermediate layer includes a first intermediate layer surface facing the first surface, and the area of the first intermediate layer surface is smaller than the area of the first surface, A non-magnetic and conductive second intermediate layer is provided between the first magnetic layer and the second shield, Equipped with, The first shield is provided between a part of the third shield and a part of the fourth shield in the second direction. The second shield is a magnetic sensor provided between another part of the third shield and another part of the fourth shield in the second direction.
7. A first shield and The second shield and, The third shield and, A fourth shield, wherein the second direction from the third shield to the fourth shield intersects with the first direction from the first shield to the second shield, and the fourth shield A first magnetic layer provided between the first shield and the second shield, wherein the first magnetic layer is located between the third shield and the fourth shield, and the first magnetic layer includes a first surface and a second surface, the first surface being located between the first shield and the second surface, A non-magnetic first conductive layer is provided between the third shield and the first magnetic layer, A non-magnetic second conductive layer is provided between the first magnetic layer and the fourth shield, A non-magnetic and conductive first intermediate layer is provided between the first shield and the first magnetic layer, wherein the first intermediate layer includes a first intermediate layer surface facing the first surface, and the area of the first intermediate layer surface is smaller than the area of the first surface, A non-magnetic and conductive second intermediate layer is provided between the first magnetic layer and the second shield, Equipped with, The first magnetic layer is made of Co ２ A magnetic sensor comprising at least one selected from the group consisting of MnGa, CoMnAl, and FePt.
8. A first shield and The second shield and, The third shield and, A fourth shield, wherein the second direction from the third shield to the fourth shield intersects with the first direction from the first shield to the second shield, and the fourth shield A first magnetic layer provided between the first shield and the second shield, wherein the first magnetic layer is located between the third shield and the fourth shield, and the first magnetic layer includes a first surface and a second surface, the first surface being located between the first shield and the second surface, A non-magnetic first conductive layer is provided between the third shield and the first magnetic layer, A non-magnetic second conductive layer is provided between the first magnetic layer and the fourth shield, A non-magnetic and conductive first intermediate layer is provided between the first shield and the first magnetic layer, wherein the first intermediate layer includes a first intermediate layer surface facing the first surface, and the area of the first intermediate layer surface is smaller than the area of the first surface, A non-magnetic and conductive second intermediate layer is provided between the first magnetic layer and the second shield, Equipped with, A magnetic sensor comprising a first intermediate layer including a first hole extending along the first direction.
9. The first shield and, The second shield and, The third shield and, A fourth shield, wherein the second direction from the third shield to the fourth shield intersects with the first direction from the first shield to the second shield, and the fourth shield A first magnetic layer provided between the first shield and the second shield, wherein the first magnetic layer is located between the third shield and the fourth shield, and the first magnetic layer includes a first surface and a second surface, the first surface being located between the first shield and the second surface, A non-magnetic first conductive layer is provided between the third shield and the first magnetic layer, A non-magnetic second conductive layer is provided between the first magnetic layer and the fourth shield, A non-magnetic and conductive first intermediate layer is provided between the first shield and the first magnetic layer, wherein the first intermediate layer includes a first intermediate layer surface facing the first surface, and the area of the first intermediate layer surface is smaller than the area of the first surface, A non-magnetic and conductive second intermediate layer is provided between the first magnetic layer and the second shield, Equipped with, The first conductive layer and the second conductive layer each contain at least one selected from the group consisting of Cu, Au, Ag, Pt, Al, Pd, Ta, Ru, Hf, W, Mo, Ir, Cr, Tb, and Rh. The third and fourth shields are magnetic sensors comprising at least one selected from the group consisting of Fe, Co, and Ni.
10. A magnetic head comprising a magnetic sensor according to any one of claims 1 to 9.
11. The magnetic head according to claim 10, Magnetic recording medium and Equipped with, The magnetic sensor is a magnetic recording device capable of reproducing information recorded on the magnetic recording medium.