Information processing device, optical device, information processing method, method for using an optical device, and information processing program
The information processing apparatus and method accurately manage defect positions in samples by switching between luminance peak and centroid processing based on defect size, correcting for optical device variations, and enhancing defect mitigation precision.
JP7894406B2Active Publication Date: 2026-07-23LASERTEC CORP
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Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Patents
- Current Assignee / Owner
- LASERTEC CORP
- Filing Date
- 2024-05-13
- Publication Date
- 2026-07-23
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Figure 0007894406000001 
Figure 0007894406000002 
Figure 0007894406000003
Abstract
To provide an information processing device, an optical device, an information processing method, a method of using the optical device, and an information processing program capable of managing the position of a defect with high precision.SOLUTION: An information processing device 10 includes a size acquisition unit 11 for acquiring a size SZ of a defect region 52 contained within a sample 50, a defect coordinate determination unit 12 for determining representative position coordinates of the defect region 52 on the basis of multiple distinct information processing operations performed on the basis of the size SZ of the defect region 52, and a storage unit 13 for storing the defect region 52 associated with the representative position coordinates.SELECTED DRAWING: Figure 1
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