Auto coupler for utility supply

Abstract

To provide an automatic coupler for supplying utilities.SOLUTION: According to the present invention, an automatic coupler for supplying utilities comprises: a first coupling member (110) provided in one of a utility supply end and a utility reception end; a first valve body (120) that is provided in the first coupling member (110) and has an elastically-supported first check ball (121) such that a flow passage is opened and closed by the first check ball (121); a second coupling member (210) that is provided in the other of the utility supply end and the utility reception end and is coupled to the first coupling member (110); and a second valve body (220) that is provided in the second coupling member (210) and has an elastically-supported second check ball (221) such that a flow passage is opened and closed by the second check ball (221).SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] The present invention relates to an auto coupler for connecting utility air pressure.

Background Art

[0002] Generally, semiconductor manufacturing processes require various utilities such as air, nitrogen, vacuum, deionized water (DW), and power supply, and it is very important to smoothly supply utilities during the manufacturing process.

[0003] For example, in the packaging process of semiconductor devices, after assembly, unit semiconductor devices are electrically inspected using a tester and a handler. The handler receives an electrical signal and performs a mechanical operation to connect the semiconductor device to a contactor connected to the tester, inspects the electrical characteristics, classifies the semiconductor device as defective or non-defective based on the inspection results, and further unloads the semiconductor device using a semiconductor package carrier such as a tube or a tray.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] An object of the present invention is to provide an auto coupler for utility supply that can prevent leaks between a utility supply end and a utility receiving end for utility supply in manufacturing equipment and can stably connect air pressure.

Means for Solving the Problems

[0006] To achieve the above objective, the present invention provides an automatic utility supply coupler comprising: a first coupling member provided at either a utility supply end or a utility receiving end; a first valve body provided at the first coupling member and equipped with an elastically supported first check ball, the first check ball being used to open and close a flow path; a second coupling member provided at the other of the utility supply end or utility receiving end and coupled with the first coupling member; and a second valve body provided at the second coupling member and equipped with an elastically supported second check ball, the second check ball being used to open and close a flow path, wherein the second valve body comprises: a main body portion; a first floating body portion elastically supported with respect to the main body portion; and a second floating body portion elastically supported with respect to the first floating body portion and provided such that a portion of the first floating body portion protrudes to the outside of the first floating body portion, and elastically supporting the second check ball such that a portion of the second check ball protrudes to the outside of the first floating body portion.

[0007] Preferably, the second valve body is provided such that the second floating body portion protrudes by a certain height relative to the contact surface of the first floating body portion that contacts the first valve body, and the second check ball is provided such that it protrudes even higher than the protruding height of the second floating body portion.

[0008] Preferably, the first valve body and the second valve body further include an airtight member provided on at least one of two opposing contact surfaces for maintaining airtightness.

[0009] Preferably, the structure includes a first elastic body that elastically supports the main body portion and the first floating body portion, a second elastic body that elastically supports the first floating body portion and the second floating body portion, and a third elastic body that elastically supports the second floating body portion and the second check ball, wherein the first elastic body has an even greater elastic modulus than the second elastic body, and the second elastic body has an even greater elastic modulus than the third elastic body.

[0010] More preferably, the second valve body further includes a valve stem fixed to the second floating body portion and supporting the third elastic body. [Effects of the Invention]

[0011] The utility supply auto coupler of the present invention includes a first coupling member provided at either the utility supply end or the utility receiving end; a first valve body provided at the first coupling member and equipped with an elastically supported first check ball, the first check ball which opens and closes the flow path; a second coupling member provided at the other of the utility supply end or the utility receiving end and coupled with the first coupling member; and a second valve body provided at the second coupling member and equipped with an elastically supported second check ball, the second check ball which opens and closes the flow path. The second valve body includes a main body portion, a first floating body portion elastically supported with respect to the main body portion, and a second floating body portion elastically supported with respect to the first floating body portion and provided such that a portion of the second check ball protrudes to the outside of the first floating body portion, and elastically supports the second check ball such that a portion of the second check ball protrudes to the outside of the first floating body portion. This has the effect of minimizing the possibility of leakage that may occur when the two valve bodies are connected and maintaining a stable pneumatic connection state. [Brief explanation of the drawing]

[0012] [Figure 1](a) and (b) are configuration diagrams showing the separated state and connected state of the utility supply auto coupler according to an embodiment of the present invention, respectively. [Figure 2] This is a cross-sectional view of a utility supply auto coupler according to an embodiment of the present invention. [Figure 3] This is a cross-sectional diagram showing the connection process of an automatic coupler for utility supply according to an embodiment of the present invention. [Figure 4] This is a cross-sectional diagram showing the connection process of an automatic coupler for utility supply according to an embodiment of the present invention. [Figure 5] This is a cross-sectional diagram showing the connection process of an automatic coupler for utility supply according to an embodiment of the present invention. [Figure 6] This is a cross-sectional diagram showing the connection process of an automatic coupler for utility supply according to an embodiment of the present invention. [Modes for carrying out the invention]

[0013] The specific structural or functional descriptions presented in the embodiments of the present invention are merely illustrative for the purpose of illustrating embodiments of the concept of the present invention, and embodiments of the concept of the present invention can be implemented in various forms. Furthermore, the embodiments described herein should not be construed as being limited to those described herein, but should be understood to include all modifications, equivalents, or substitutes that fall within the spirit and technical scope of the present invention.

[0014] The present invention will be described in detail below with reference to the attached drawings.

[0015] Figures 1(a) and 1(b) are configuration diagrams showing the disconnected and connected states of the utility supply auto coupler 1 according to an embodiment of the present invention, respectively.

[0016] Referring to Figures 1(a) and 1(b), the utility supply auto coupler 1 according to an embodiment of the present invention includes a first coupling member 110, a first valve body 120, a second coupling member 210, and a second valve body 220.

[0017] The first coupling member 110 and the second coupling member 210 are provided at the utility receiving end and the utility supply end respectively, and can include male and female coupling guide members. In the present embodiment, the coupling guide member includes a guide arm 211 protruding in the coupling direction from the second coupling member 210, and a guide groove 111 recessed in the first coupling member 110 corresponding to the guide arm 211 and into which the guide arm 211 is inserted. Such a guide member can be deformed into various forms within the range where the first coupling member 110 and the second coupling member 210 can be coupled. On the other hand, although not shown, a separate locking member for mechanically fixing or releasing the coupling state between the first coupling member 110 and the second coupling member 210 may be added.

[0018] The first valve body 120 is provided in the first flow path 112 of the first coupling member 110 and is provided with a first check ball 121 that is elastically supported, and the opening and closing of the flow path is performed by the first check ball 121. Preferably, at least a part of the first check ball 121 is elastically supported within the first valve body 120 so as to protrude outside the first valve body 120.

[0019] The second valve body 220 is provided in the second flow path 212 of the second coupling member 210 and is provided with a second check ball 221 that is elastically supported, and the opening and closing of the flow path is performed by the second check ball 221. Preferably, at least a part of the second check ball 221 is elastically supported within the second valve body 220 so as to protrude outside the second valve body 220.

[0020] When the first coupling member 110 and the second coupling member 210 maintain a state in which the first valve body 120 and the second valve body 220 are separated, the pneumatic pressure is blocked by the check balls 121 and 221 of the respective valve bodies 120 and 220. On the other hand, when the first coupling member 110 and the second coupling member 210 are coupled, the check balls 121 and 221 of the first valve body 120 and the second valve body 220 are pushed inward, and the supply end and the receiving end of the utility (pneumatic pressure) are connected to each other.

[0021] In particular, in the present invention, the contact process between the first valve body 120 and the second valve body 220 consists of two steps, and the possibility of leakage that may occur when the first valve body 120 and the second valve body 220 are connected can be minimized.

[0022] Hereinafter, the configuration of each valve body, which is a main component of the present invention, will be described in detail with reference to the relevant drawings. FIG. 2 is a cross-sectional configuration diagram of the utility supply autoclamp 1 according to an embodiment of the present invention.

[0023] Referring to FIG. 2, the second valve body 220 includes a second check ball 221, a main body portion 222, a first floating body portion 223, and a second floating body portion 224.

[0024] The main body portion 222 has a hollow shape, constitutes the main appearance of the second valve body 220, and is assembled with the second coupling member 210. The main body portion 222 is provided with a first elastic body S1 that elastically supports the first floating body portion 22, and a first locking step 222a bent in the inner diameter direction is provided at the lower end of the main body portion 222. The first floating body portion 223 inserted into the main body portion 222 and elastically supported by the first elastic body S1 has its lower end supported by the first locking step 222a. In the present embodiment, the first floating body portion 223 is provided with a second flow path 212 inside.

[0025] The second floating body portion 224 is inserted into the first floating body portion 223 and elastically supported by a second elastic body S2, and a second locking step 222a that supports the second check ball 221 is provided at the outer opening end of the flow path. The diameter of the opening portion with the second locking step 222a is smaller than the diameter of the second check ball 221.

[0026] Such a second floating body portion 224 is elastically supported by the first floating body portion 223 by the second elastic body S2 and is provided such that a portion of it protrudes to the outside of the first floating body portion 223 by a certain height d1, and a third elastic body S3 is provided to elastically support the second check ball 221 such that a portion of the second check ball 221 protrudes to the outside of the first floating body portion 223.

[0027] Preferably, the second floating body portion 224 further includes a first airtight member 225 for maintaining airtightness at the contact surface facing and in contact with the first valve body 120, for example, such a first airtight member 225 can be provided by a well-known O-ring. On the other hand, although this embodiment illustrates that the first airtight member 225 is provided on the second floating body portion 224, it may also be provided around the open end of the first floating body portion 223 to provide airtightness with the first valve body 120.

[0028] In this second valve body 220, the first floating body portion 223 protrudes by a certain height d1 relative to the contact surface of the first floating body portion 223 that contacts the first valve body 120, and the second check ball 221 protrudes by a certain height d2, which is even higher than the protrusion height d1 of the first floating body portion 223 (d1 <d2)。

[0029] Preferably, the second valve body 220 is fixed to the first floating body portion 223 and positioned in the flow path, further including a first valve stem 226 that supports the third elastic body S3, and further including a first guide stem 226a extending from the first valve stem 226 into which a portion of the third elastic body S3 is inserted.

[0030] Preferably, the first elastic body S1 has a larger elastic modulus than the second elastic body S2, and the second elastic body S2 has a larger elastic modulus than the third elastic body S3. Therefore, when the second valve body 220 and the first valve body 120 come into contact, the third elastic body S3, the second elastic body S2, and the first elastic body S1 are sequentially compressed, causing the second check ball 221 to be inserted inside the second floating body portion 224 (compression of the third elastic body S3), and then the first floating body portion 223 is inserted inside the main body portion 222 (compression of the second elastic body S2 and the third elastic body S3).

[0031] The first valve body 120 has a hollow shape, constitutes the main external appearance of the first valve body 120, and is assembled with the first coupling member 110. Preferably, it may be provided with a second airtight member 126 for maintaining airtightness of the first coupling member 110. The first valve body 120 is provided with a second locking step 120a at the outer opening end of the flow path that supports a first check ball 121, and the diameter of the opening end with the second locking step 120a is smaller than the diameter of the first check ball 121. The first valve body 120 further includes a second valve stem 124 that supports a fourth elastic body S4, and may further include a second guide stem 124a extending from the second valve stem 124 into which a portion of the fourth elastic body S4 is inserted.

[0032] In this first valve body 120, the first check ball 121 is provided so that a portion of it protrudes outward by a certain height d3, relative to the contact surface with the second valve body 220.

[0033] Preferably, the first valve body 120 further includes a valve body head 122 that is coupled to the first coupling member 110 and protrudes outward, and the outer diameter D1 of the valve body head 122 is smaller than the inner diameter D2 of the opening end of the main body portion 222.

[0034] Figures 3 to 6 are cross-sectional diagrams showing the connection process of the utility supply auto coupler 1 according to an embodiment of the present invention.

[0035] The coupling process of the utility supply auto coupler 1 of the present invention, configured in this manner, will be explained with reference to Figures 3 and 6 to aid understanding. It will be explained that the first valve body 120 is fixed, and the second valve body 220 moves to connect the first valve body 120 and the second valve body 220.

[0036] As illustrated in Figures 3 and 4, the second valve body 220 moves downward, causing the first check ball 121 and the second check ball 221 to come into contact and push against each other (see Figure 3). As the second elastic body S2 and the fourth elastic body S4 are compressed, the first check ball 121 and the second check ball 221 are drawn inward into the first valve body 120 and the second floating body portion 224, respectively, and the flow paths of the first valve body 120 and the second valve body 220 begin to connect (see Figure 4). Meanwhile, with the first check ball 121 and the second check ball 221 completely drawn inward into the first valve body 120 and the second floating body portion 224, the upper surface of the valve body head 122 and the lower surface of the second floating body portion 224 are in close contact.

[0037] Next, as shown in Figures 5 and 6, the second elastic body S2 is compressed as the second valve body 220 continues to move downward, the second floating body portion 224 is pulled inward of the first floating body portion 223, and the first floating body portion 223 is pulled inward of the main body portion 222, so that the flow paths of the first valve body 120 and the second valve body 220 are completely connected. Meanwhile, with the flow paths of the first valve body 120 and the second valve body 220 connected, the airtightness effect can be enhanced by the first airtight member 225 provided between the contact surfaces of the first valve body 120 and the first floating body portion 223.

[0038] The first valve body 120 and the second valve body 220 are disconnected in the reverse order of the connection process, with the first valve body 120 and the second valve body 220 separating and the check balls 121 and 221 being pulled outwards, thereby blocking the flow paths of the respective valve bodies 120 and 220.

[0039] On the other hand, in this embodiment, the first coupling member 110, which is provided with the first valve body 120, and the second coupling member 210, which is provided with the second valve body 220, are described as being provided at the utility receiving end and the utility supply end, respectively. However, they may be arranged in the reverse order. Either the first coupling member 110 or the second coupling member 210 may be fixed and the other may move to connect the first valve body 120 and the second valve body 220, or the first coupling member 110 and the second coupling member 210 may move together to connect the first valve body 120 and the second valve body 210.

[0040] The present invention described above is not limited by the embodiments and accompanying drawings, and it will be obvious to those with ordinary skill in the art to which the present invention pertains that various substitutions, modifications, and changes are possible without departing from the technical spirit of the present invention. [Explanation of Symbols]

[0041] 1. Auto coupler for utility supply 110 First connecting member 120 First valve assembly 121 First check ball 210 Second connecting member 220 Second valve body 221 Second check ball 222 Main body section 223 First floating body section 224 Second floating body section S1 First elastic body S2 Second elastic body S3 Third elastic body S4 Fourth elastic body

Claims

1. A first coupling member provided at either the utility supply end or the utility receiving end, A first valve body is provided on the first coupling member and is equipped with an elastically supported first check ball, the first check ball which opens and closes the flow path, A second coupling member is provided on the other of the utility supply end or the utility receiving end, and is coupled to the first coupling member, The second valve body includes a second check ball provided on the second coupling member and elastically supported, the second check ball which opens and closes the flow path, The second valve body is The main body section, A first floating body portion elastically supported with respect to the main body portion, An automatic utility coupler comprising: a second floating body portion elastically supported by the first floating body portion and provided such that a portion of the second check ball protrudes to the outside of the first floating body portion, and elastically supporting the second check ball such that a portion of the second check ball protrudes to the outside of the first floating body portion.

2. The utility supply auto coupler according to claim 1, characterized in that the second valve body is provided such that the second check ball protrudes higher than the contact surface of the second floating body portion that contacts the first valve body, with reference to the contact surface of the second floating body portion that contacts the first valve body.

3. The utility supply auto coupler according to claim 1, wherein the first valve body and the second valve body further include an airtight member provided on at least one of two opposing contact surfaces for maintaining airtightness.

4. It includes a first elastic body that elastically supports the main body portion and the first floating body portion, a second elastic body that elastically supports the first floating body portion and the second floating body portion, and a third elastic body that elastically supports the second floating body portion and the second check ball, The utility supply auto coupler according to claim 1, characterized in that the first elastic body has an even greater elastic modulus than the second elastic body, and the second elastic body has an even greater elastic modulus than the third elastic body.

5. The utility supply auto coupler according to claim 4, wherein the second valve body further includes a valve stem fixed to the second floating body portion and supporting the third elastic body.

Images