Conveying unit and processing equipment

Abstract

To provide a conveying unit and / or a processing apparatus including the conveying unit that dry a workpiece of a lower face of a frame unit including the workpiece and can suppress reduction in throughput.SOLUTION: With a workpiece or a frame unit being inclined such that a front side in a direction of travel is raised higher than a rear side in the direction of travel, air is injected to a lower face of the workpiece or the frame unit. In this case, for example, liquid (for example, working liquid) attached to the lower face of the workpiece or the frame unit tends to flow along the lower face toward the rear side in the direction of travel of the workpiece or the frame unit and fall down from its rear end. Consequently, when the workpiece or the frame unit is conveyed in this manner, a moving speed of the workpiece or the frame unit can be increased. As a result, the lower face of the workpiece or the frame unit can be dried, and reduction in throughput can be suppressed.SELECTED DRAWING: Figure 4

Description

Technical Field

[0001] The present invention relates to a transport unit for transporting a workpiece or a frame unit including the workpiece, and a processing apparatus including the transport unit.

Background Art

[0002] Chips of devices such as IC (Integrated Circuit) are essential components in various electronic devices such as mobile phones and personal computers. Such chips are manufactured, for example, in the following order.

[0003] First, a plurality of devices are formed by performing photolithography or the like to form a large number of elements on the surface of a workpiece including a wafer or the like. Next, the back surface side of the workpiece is ground to thin the workpiece. Next, the workpiece is cut along the boundaries of the plurality of devices to divide the workpiece into a plurality of chips.

[0004] In a processing apparatus such as a grinding apparatus for grinding a workpiece or a cutting apparatus for cutting a workpiece, generally, the workpiece is processed from the upper surface (for example, the back surface) side while the lower surface (for example, the surface) side of the workpiece is held by a chuck table.

[0005] Further, when the workpiece is processed in this processing apparatus, the workpiece is heated due to the friction between the cutting tool and the workpiece, and chips (processing chips) of the removed workpiece are generated. Then, when heating of the workpiece and / or adhesion of the processing chips to the workpiece occur, the workpiece may be damaged and / or the quality of the chips manufactured from the workpiece may deteriorate.

[0006] Therefore, in processing equipment, the workpiece is often processed with a liquid such as pure water (processing fluid) supplied to its upper surface, and then the workpiece is cleaned with a liquid such as pure water (cleaning fluid) supplied to its upper surface. This cleaning is generally performed with the lower surface of the workpiece held by a spinner table separate from the chuck table mentioned above.

[0007] In this case, when a workpiece is removed from the chuck table, not only its top surface but also its bottom surface may be wet. For example, once the processing of the workpiece is complete, air may be supplied from the chuck table towards the workpiece to separate it from the table.

[0008] In this case, the machining fluid may seep into the gap between the workpiece and the chuck table, wetting the underside of the workpiece. If a workpiece with a wet underside is held by the spinner table, it may become difficult to remove the workpiece from the spinner table after cleaning.

[0009] In light of this, it has been proposed to install an air curtain that sprays air towards the transport path of the workpiece (see, for example, Patent Document 1). In a processing apparatus equipped with this air curtain, the processed workpiece can be moved so that it passes through the air sprayed from the air curtain, thereby scattering and removing the processing fluid adhering to the workpiece.

[0010] Therefore, in this processing apparatus, the underside of the workpiece can be dried before it is loaded onto the spinner table. As a result, it becomes easier to remove the cleaned workpiece from the spinner table in this processing apparatus. [Prior art documents] [Patent Documents]

[0011] [Patent Document 1] Japanese Patent Application Publication No. 9-293695 [Overview of the project] [Problems that the invention aims to solve]

[0012] In the processing apparatus described above, drying the underside of the workpiece requires reducing the speed at which the workpiece moves through the air sprayed from the air curtain. However, this may increase the time required to complete the processing of the workpiece, potentially reducing throughput.

[0013] In view of this, an object of the present invention is to provide a transport unit and / or a processing apparatus including this transport unit that can dry the lower surface of a workpiece or a frame unit containing a workpiece, and suppress a decrease in throughput. [Means for solving the problem]

[0014] According to one aspect of the present invention, a transport unit for transporting a workpiece or a frame unit including the workpiece, comprising: a holding mechanism for holding the workpiece or the frame unit; a tilt adjustment mechanism for adjusting the tilt of the workpiece or the frame unit held by the holding mechanism; a horizontal movement mechanism for moving the workpiece or the frame unit held by the holding mechanism along the horizontal direction; a vertical movement mechanism for moving the workpiece or the frame unit held by the holding mechanism along the vertical direction; and a water transport mechanism for transporting the workpiece or the frame unit held by the holding mechanism along the water A transport unit is provided, comprising: an air injector positioned below the movement path of the workpiece or frame unit when moved along the horizontal direction by a horizontal movement mechanism, and which injects air upwards; a tilt adjustment mechanism adjusts the tilt of the workpiece or frame unit so that the front side in the direction of travel of the workpiece or frame unit held by the holding mechanism is above the rear side in the direction of travel; and the horizontal movement mechanism moves the workpiece or frame unit held by the holding mechanism so that it passes above the air injector while the air injector is injecting air upwards.

[0015] According to another aspect of the present invention, a processing apparatus for processing a workpiece, comprising: a chuck table for holding the lower side of the workpiece when processing the workpiece while supplying a processing fluid to the upper surface of the workpiece; a spinner table for holding the lower side of the workpiece when cleaning the workpiece while supplying a cleaning fluid to the upper surface of the workpiece; a cassette mounting area on which a cassette for containing the workpiece is placed; and a transport unit for transporting the workpiece or a frame unit including the workpiece between the chuck table and the spinner table or between the spinner table and the cassette, wherein the transport unit comprises: a holding mechanism for holding the workpiece or the frame unit; a tilt adjustment mechanism for adjusting the tilt of the workpiece or the frame unit held by the holding mechanism; and the transport unit for transporting the workpiece or the frame unit held by the holding mechanism. A processing apparatus is provided comprising: a horizontal movement mechanism for moving a frame unit along the horizontal direction; a vertical movement mechanism for moving the workpiece or frame unit held by the holding mechanism along the vertical direction; and an air injector positioned below the movement path of the workpiece or frame unit when the workpiece or frame unit held by the holding mechanism is moved along the horizontal direction by the horizontal movement mechanism, and which injects air upward, wherein the tilt adjustment mechanism adjusts the tilt of the workpiece or frame unit so that the front side in the direction of travel of the workpiece or frame unit held by the holding mechanism is above the rear side in the direction of travel, and the horizontal movement mechanism moves the workpiece or frame unit held by the holding mechanism so that it passes above the air injector while the air injector is injecting air upward. [Effects of the Invention]

[0016] In the transport unit of the present invention, a tilt adjustment mechanism adjusts the tilt of the workpiece or frame unit so that the front side in the direction of travel of the workpiece or frame unit including the workpiece held by the holding mechanism is higher than the rear side in the direction of travel, and a horizontal movement mechanism moves the workpiece or frame unit held by the holding mechanism so that it passes above the air injector while the air injector is injecting air upward.

[0017] In other words, in this conveying unit, air is sprayed onto the underside of the workpiece or frame unit while it is tilted so that the front side in the direction of travel of the workpiece or frame unit is higher than the rear side in the direction of travel. In this case, for example, any liquid (e.g., processing fluid) adhering to the underside of the workpiece or frame unit will flow along the underside toward the rear side in the direction of travel of the workpiece or frame unit, making it more likely to fall from the rear end.

[0018] Therefore, when using this transport unit to transport a workpiece or frame unit, for example, from a chuck table to a spinner table, the movement speed of the workpiece or frame unit can be increased. As a result, this transport unit can dry the underside of the workpiece or frame unit and suppress a decrease in throughput. [Brief explanation of the drawing]

[0019] [Figure 1] Figure 1 is a schematic perspective view showing an example of a grinding apparatus. [Figure 2] Figure 2 is a schematic perspective view showing an example of a workpiece. [Figure 3] Figure 3 is a schematic cross-sectional side view illustrating the detailed structure of an example of a transport unit included in a grinding machine. [Figure 4] Figure 4 is a schematic cross-sectional side view illustrating how a workpiece is moved by a transport unit. [Figure 5] Figure 5 is a schematic perspective view showing an example of a cutting apparatus. [Figure 6] FIG. 6 is a top view schematically showing some components of a cutting device. [Figure 7] FIG. 7 is a perspective view schematically showing an example of a frame unit including a workpiece. DETAILED DESCRIPTION OF THE INVENTION

[0020] Embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a perspective view schematically showing an example of a grinding device. The X-axis direction (left - right direction) and the Y-axis direction (front - rear direction) shown in FIG. 1 are directions orthogonal to each other on a horizontal plane, and the Z-axis direction (up - down direction) is a direction (vertical direction) orthogonal to the X-axis direction and the Y-axis direction.

[0021] The grinding device 2 shown in FIG. 1 includes a base 4 that supports or houses each component. On the upper surface of the front end portion of the base 4, a pair of cassette placement areas 6a and 6b are provided respectively. And on each of the cassette placement areas 6a and 6b, cassettes 8a and 8b capable of accommodating a plurality of workpieces spaced apart from each other in the Z-axis direction are placed.

[0022] That is, each of the cassettes 8a and 8b is provided with a plurality of accommodation areas capable of accommodating workpieces. FIG. 2 is a perspective view schematically showing an example of a workpiece accommodated in the cassettes 8a and 8b. The workpiece 11 shown in FIG. 2 is, for example, a wafer made of a semiconductor material such as silicon (Si) and has a circular front surface 11a and a back surface 11b.

[0023] This workpiece 11 is partitioned into a plurality of regions by a plurality of division planned lines 13 set in a grid pattern, and devices 15 such as ICs are formed on the front surface 11a side of each region. Also, the workpiece 11 may include a film - like tape provided so as to cover the device 15. This tape has a diameter approximately equal to the diameter of the workpiece 11 and is made of, for example, resin.

[0024] Furthermore, this tape protects the device 15 by mitigating the impact applied to the surface 11a side when grinding the back surface 11b side of the workpiece 11. There are no restrictions on the material, shape, structure, and size of the workpiece 11. For example, the workpiece 11 may include other semiconductor materials, ceramics, resins, or metals.

[0025] Furthermore, as shown in Figure 1, a recess 4a is formed behind the cassette placement areas 6a and 6b, and a transport unit 10 is provided inside this recess 4a. This transport unit 10 is used to transport the workpiece 11 before grinding from one of the multiple storage areas (original storage area) of the cassettes 8a and 8b, and to transport the workpiece 11 after grinding back into the original storage area, for example.

[0026] Specifically, the transport unit 10 has, for example, multiple joints and a robot hand, and holds the workpiece 11 on one side of this robot hand. Furthermore, the transport unit 10 can also reverse the robot hand that holds the workpiece 11, that is, it can reverse the top and bottom of the workpiece 11.

[0027] Furthermore, a position adjustment mechanism 12 for adjusting the position of the workpiece 11 is provided diagonally behind the recess 4a. This position adjustment mechanism 12 includes a disc-shaped position adjustment table and a plurality of pins arranged around the position adjustment table. The workpiece 11, which has been discharged from the cassettes 8a and 8b by the transport unit 10, is then placed on this position adjustment table and its center is aligned to a predetermined position.

[0028] Specifically, the workpiece 11 is brought into the position adjustment table with its back surface 11b facing upwards. Then, multiple pins approach the position adjustment table along its radial direction. As a result, the multiple pins come into contact with the side surface of the workpiece 11, causing it to move slightly. Consequently, the center of the workpiece 11 is aligned to a predetermined position.

[0029] Furthermore, a transport unit 14 is provided to the side of the position adjustment mechanism 12 to hold the workpiece 11 and transport it to the rear. This transport unit 14 includes, for example, a support shaft extending in the Z-axis direction, an arm whose base end is fixed to the upper end of the support shaft and which extends in a direction perpendicular to the Z-axis direction, and a suction pad fixed to the underside of the tip of the arm.

[0030] Furthermore, the support shaft of the transport unit 14 is connected to a rotational drive source such as a motor. When this rotational drive source is operated, the support shaft rotates with a straight line along the Z-axis as the axis of rotation. In addition, the support shaft of the transport unit 14 is connected to, for example, a ball screw type moving mechanism (not shown). When this moving mechanism is operated, the support shaft moves along the Z-axis, that is, the support shaft moves up and down.

[0031] For example, the transport unit 14 holds the workpiece 11 and transports it backward in the following order: First, the support shaft is rotated so that the suction pad is positioned directly above the workpiece 11, whose center has been aligned to a predetermined position in the position adjustment mechanism 12. Next, the support shaft is lowered so that the suction pad contacts the back surface (top surface) 11 of the workpiece 11.

[0032] Next, the workpiece 11 is held in place by suction from the back (top) 11b side using the suction pad. Then, the support shaft is raised to raise the suction pad that holds the workpiece 11. Next, the support shaft is rotated to swivel the suction pad that holds the workpiece 11. As a result, the workpiece 11 is transported backward.

[0033] A turntable 16 is provided behind the transport unit 14. This turntable 16 is connected to a rotational drive source such as a motor. When this rotational drive source is operated, the turntable 16 rotates with a rotation axis that passes through the center of the upper surface of the turntable 16 and is aligned with the Z-axis direction.

[0034] Furthermore, the turntable 16 is provided with three disc-shaped table bases (not shown) at approximately equal angular intervals along the circumferential direction of the turntable 16. In addition, a chuck table 18 is mounted on top of each table base to hold the surface (bottom) 11a side of the workpiece 11.

[0035] The chuck table 18 has a disc-shaped frame made of, for example, ceramics, which is supported on the table base via bearings or the like. A recess with a circular bottom surface is formed on the upper surface of the frame of the chuck table 18, and a disc-shaped porous plate made of porous ceramics or the like is fixed in this recess.

[0036] Furthermore, the upper surface of the porous plate of the chuck table 18 and the upper surface of the frame surrounding the porous plate have a shape corresponding to the side surface of a cone, and function as a holding surface when holding the workpiece 11. The frame of the chuck table 18 is connected to a rotational drive source such as a motor. When this motor is operated, the chuck table 18 rotates with a straight line passing through the center of the holding surface of the chuck table 18 as the axis of rotation.

[0037] Furthermore, the frame of the chuck table 18 is connected to a tilt adjustment mechanism (not shown) via a table base. This tilt adjustment mechanism includes two movable axes and one fixed axis, which are arranged at approximately equal angular intervals along the circumferential direction of the chuck table 18. When at least one of the two movable axes partially raises or lowers the table base and the chuck table, the tilt of the rotation axis of the chuck table 18 is adjusted.

[0038] Furthermore, the lower side of the porous plate of the chuck table 18 is connected to a suction source (not shown), such as an ejector, and an air supply source (not shown), such as a cylinder, via a flow path formed in its frame. When the suction source is operated with the workpiece 11 placed on the holding surface of the chuck table 18, the surface (lower side) 11a of the workpiece 11 is sucked into and held by the chuck table 18.

[0039] Furthermore, when the air supply source is operated while the flow path formed in the frame of the chuck table 18 is under negative pressure, air is supplied to this flow path, bringing it to normal pressure, which makes it easier to separate the workpiece 11 from the chuck table 18.

[0040] Furthermore, when the turntable 16 is rotated with the chuck table 18 mounted on the table base, the chuck table 18 moves together with the table base. Specifically, in this case, the table base and the chuck table 18 move along the circumferential direction of the turntable 16.

[0041] This allows the table base and chuck table 18 to be positioned sequentially at, for example, the loading / unloading position A adjacent to the transport unit 14, the rough grinding position B diagonally behind the loading / unloading position, and the finish grinding position C to the side of the rough grinding position.

[0042] Then, the workpiece 11, which has been transported to the rear by the transport unit 14, is loaded onto the chuck table 18 positioned at loading / unloading position A. For example, the loading of the workpiece 11 onto the chuck table 18 is carried out in the following order.

[0043] First, the support shaft connected to the support shaft of the transport unit 14 is lowered so that the workpiece 11, held by the suction pad of the transport unit 14, approaches the holding surface of the chuck table 18. Next, the suction of the back (top) surface 11b of the workpiece 11 by the suction pad is stopped. As a result, the workpiece 11 is separated from the suction pad and transported to the chuck table 18.

[0044] Next, a suction source communicating with the lower surface of the porous plate of the chuck table 18 is activated so that the surface (lower surface) 11a of the workpiece 11 is attracted to and held by the chuck table 18. Then, the turntable 16 is rotated to position the chuck table 18, which holds the workpiece 11, at the rough grinding position B.

[0045] A columnar support structure 20 is provided behind both the rough grinding position B and the finish grinding position C. A moving mechanism 22 is provided on the front side of each support structure 20. This moving mechanism 22 includes a pair of guide rails 24 that extend along the Z-axis direction. Furthermore, a moving plate 26 is attached to the pair of guide rails 24 in a slidable manner.

[0046] Furthermore, a ball screw nut (not shown) is fixed to the rear side of the movable plate 26, and a screw shaft 28 extending along the Z-axis direction is rotatably connected to this nut. This nut also houses a number of balls that roll on the surface of the screw shaft 28 in response to the rotation of the screw shaft 28.

[0047] Furthermore, a motor 30 is connected to one end (the upper end) of the screw shaft 28. When the motor 30 rotates the screw shaft 28, numerous balls circulate inside the nut, causing the movable plate 26 to move along the Z-axis direction along with the nut.

[0048] Furthermore, a grinding unit 32 is provided on the front (surface) of the movable plate 26. This grinding unit 32 includes a spindle housing 34 fixed to the movable plate 26. In addition, a spindle (not shown) extending along the Z-axis direction or a direction slightly inclined with respect to the Z-axis direction is rotatably housed in the spindle housing 34.

[0049] Furthermore, the tip (lower end) of the spindle is exposed from the lower end surface of the spindle housing 34, and a disc-shaped mount 36 is fixed to this lower end. A grinding wheel 38a for rough grinding is mounted on the lower surface of the mount 36 of the grinding unit 32 on the rough grinding position B side. Similarly, a grinding wheel 38b for finish grinding is mounted on the lower surface of the mount 36 of the grinding unit 32 on the finish grinding position C side.

[0050] Furthermore, a motor 40 is connected to the base end (upper end) of the spindle housed in the spindle housing 34. When this motor is operated, the mount 36 and grinding wheels 38a and 38b rotate together with the spindle, with the axis of rotation being a straight line in the Z-axis direction or slightly inclined relative to the Z-axis direction.

[0051] Each grinding wheel 38a, 38b includes an annular wheel base made of a metal such as stainless steel or aluminum. Multiple grinding wheels are fixed to the underside of the wheel base at approximately equal angular intervals along the circumferential direction of the wheel base.

[0052] Each of the multiple grinding wheels contains a binder such as a vitrified or resinoid, and abrasive grains such as diamond dispersed in this binder. The average particle size of the abrasive grains contained in the grinding wheel 38b for finish grinding is smaller than the average particle size of the abrasive grains contained in the grinding wheel 38a for rough grinding.

[0053] Furthermore, a liquid supply unit (not shown) is provided near each grinding wheel 38a, 38b. This liquid supply unit includes, for example, a nozzle located inside the grinding wheels 38a, 38b in a plan view, and a pump that supplies a liquid (processing fluid) such as pure water to this nozzle.

[0054] When this pump is activated, machining fluid is supplied from the nozzle to the back surface (top surface) 11b of the workpiece 11, which is held on its front surface (bottom surface) 11a side by the chuck table 18 positioned at the rough grinding position B or the finish grinding position C.

[0055] Furthermore, when the chuck table 18 that holds the workpiece 11 is positioned at the rough grinding position B or the finish grinding position C, rough grinding or finish grinding is performed on the back (top) surface 11b of the workpiece 11. Once the rough grinding and finish grinding of the back (top) surface 11b of the workpiece 11 are completed, the turntable 16 is rotated so that the chuck table 18 that holds the workpiece 11 is positioned at the loading / unloading position A.

[0056] A transport unit 42 is provided in front of the loading / unloading position A and to the side of the transport unit 14, which holds the workpiece 11 and transports it forward. Figure 3 is a schematic partial cross-sectional side view showing the detailed structure of the transport unit 42. This transport unit 42 has a holding mechanism 44 for holding the back (top) 11b side of the workpiece 11.

[0057] The holding mechanism 44 has a disc-shaped frame 44a made of, for example, ceramics. A recess with a circular bottom surface is formed on the lower surface of this frame 44a, and a disc-shaped porous plate 44b made of porous ceramics is fixed to this recess. In addition, a plurality of screw holes are formed on the upper surface of the frame 44a, and a bolt 46 is screwed into each of these screw holes.

[0058] Specifically, the bolt 46 has a cylindrical shaft portion extending along the Z-axis direction, and a hexagonal prism-shaped head portion that is larger in diameter than the shaft portion and shorter in length along the Z-axis direction. Furthermore, the shaft portion has a lower part (threaded portion) where threads are formed and an upper part (cylindrical portion) where threads are not formed. The threaded portion of the bolt 46 is screwed into a threaded hole formed on the upper surface side of the frame 44a.

[0059] Furthermore, a through-hole is formed on the upper side of the frame 44a, which communicates with the upper side of the porous plate 44b. This through-hole communicates with a suction source (not shown) such as an ejector and an air supply source (not shown) such as a cylinder via piping (not shown) and a valve (not shown).

[0060] Then, when the suction source is operated with the back surface 11b of the workpiece 11 in contact with the lower surface (holding surface) of the porous plate 44b, the back surface (upper surface) 11b of the workpiece 11 is sucked into the holding mechanism 44 and held. Also, when the air supply source is operated while the through holes formed on the upper surface of the frame 44a are under negative pressure, air is supplied to these through holes, bringing the pressure back to normal, making it easier to separate the workpiece 11 from the holding mechanism 44.

[0061] Above the holding mechanism 44, a tilt adjustment mechanism 48 is provided for adjusting the tilt of the workpiece 11 held by the holding mechanism 44. This tilt adjustment mechanism 48 has a disc-shaped support member 48a. The support member 48a has multiple through holes formed in the thickness direction, each with a circular cross-section.

[0062] These through holes are positioned to overlap with multiple screw holes formed on the upper surface of the frame 44a, and the cylindrical portion of a bolt 46 passes through each through hole. Furthermore, the diameter of the bolt 46 head is larger than the diameter of the through hole. Therefore, the bolt 46 will not fall through the through hole.

[0063] Furthermore, a compression coil spring 50 is provided around the portion of the bolt 46's shaft that is located between the frame 44a and the support member 48a. In other words, this portion is located inside the compression coil spring 50. The frame 44a and the support member 48a are subjected to a reaction force generated by compressing the compression coil spring 50.

[0064] Furthermore, the tip of the arm 48b is connected to the side of the support member 48a. This arm 48b extends in a direction perpendicular to the Z-axis direction, and a motor 48c is connected to its base end. When this motor 48c is operated, the arm 48b and the support member 48a rotate around a straight line along the direction in which the arm 48b extends as the axis of rotation.

[0065] Therefore, when the workpiece 11 is held by the holding mechanism 44, the tilt of the workpiece 11 can be adjusted by operating the motor 48c of the tilt adjustment mechanism 48. For example, the tilt adjustment mechanism 48 adjusts the tilt of the workpiece 11 so that the angle that the back surface (top surface) 11b of the workpiece 11 makes with respect to the horizontal plane is between 30° and 55°.

[0066] Below the motor 48c, a horizontal movement mechanism 52 is provided for moving the workpiece 11, which is held by the holding mechanism 44, along the horizontal direction. This horizontal movement mechanism 52 has a support shaft 52a that extends along the Z-axis direction. The motor 48c is fixed to the tip (upper end) of the support shaft 52a so that the tilt adjustment mechanism 48 and the holding mechanism 44 are supported by the support shaft 52a.

[0067] Furthermore, a motor 52b is connected to the base end of the support shaft 52a. When this motor 52b is operated, the support shaft 52a rotates with a straight line along the Z-axis as the axis of rotation. Therefore, when the workpiece 11 is held by the holding mechanism 44, the motor 52b of the horizontal movement mechanism 52 can be operated to rotate the workpiece 11 around the support shaft 52a, that is, to move the workpiece 11 along the horizontal direction.

[0068] A vertical movement mechanism 54 is provided on the side of the horizontal movement mechanism 52 for moving the workpiece 11, which is held by the holding mechanism 44, along the Z-axis direction (vertical direction). This vertical movement mechanism 54 is a ball screw type movement mechanism. Specifically, the vertical movement mechanism 54 has a movement plate 54a whose surface is fixed to the side of the motor 52b of the horizontal movement mechanism 52.

[0069] Nuts 54b, which house a number of balls, are fixed to the back side of the movable plate 54a. A screw shaft 54c, which extends along the Z-axis direction, is screwed into this nut 54b. The screw shafts 54c are provided between a pair of guide rails (not shown), each extending along the Z-axis direction, and the movable plate 54a is attached to the front side of this pair of guide rails in a slidable manner.

[0070] Furthermore, a motor 54d is connected to the base (lower) end of the screw shaft 54c. When the motor 54d rotates the screw shaft 54c, numerous balls circulate within the nut 54b, causing the movable plate 54a to move along the Z-axis direction together with the nut 54b.

[0071] Therefore, when the workpiece 11 is held by the holding mechanism 44, the workpiece 11 can be moved along the Z-axis direction (vertical direction) by operating the motor 54d of the vertical movement mechanism 54.

[0072] Near the vertical movement mechanism 54, an air injector (e.g., an air curtain or air knife) 56 is provided, extending along the X-axis direction and injecting air upward from a region extending from one end to the other on its upper surface.

[0073] Specifically, the air injector 56 is positioned between the loading / unloading position A and the cleaning device 58 described later, and below the movement path of the workpiece 11 when the workpiece 11 held by the holding mechanism 44 is moved horizontally by the horizontal movement mechanism 52.

[0074] Furthermore, the upper surface of the air injector 56 is provided with, for example, a slit-shaped nozzle extending along the X-axis direction, from which air is ejected. The length of this nozzle along the X-axis direction is, for example, greater than the diameter of the workpiece 11.

[0075] Then, when the chuck table 18 that holds the workpiece 11 after grinding is positioned at loading / unloading position A, the transport unit 42 unloads the workpiece 11 from the chuck table 18. For example, the unloading of the workpiece 11 from the chuck table 18 is performed in the following order.

[0076] First, the operation of the suction source communicating with the underside of the porous plate of the chuck table 18 is stopped. Next, the air supply source communicating with the underside of the porous plate of the chuck table 18 is activated. At this time, the workpiece 11 is momentarily separated from the chuck table 18. Then, the machining fluid supplied during the rough grinding and finish grinding of the workpiece 11 may seep into this gap. As a result, the surface (underside) 11a of the workpiece 11 may become wet.

[0077] Next, the motor 52b of the horizontal movement mechanism 52 is operated to rotate the holding mechanism 44 so that the holding mechanism 44 is positioned directly above the workpiece 11 placed on the chuck table 18. Then, the motor 54d of the vertical movement mechanism 54 is operated to lower the holding mechanism 44 so that the lower surface of the porous plate 44b of the holding mechanism 44 comes into contact with the back surface (top surface) 11b of the workpiece 11.

[0078] Next, a suction source communicating with the upper surface of the porous plate 44b is activated so that the back (upper) surface 11b of the workpiece 11 is attracted to and held by the holding mechanism 44. Then, the motor 54d of the vertical movement mechanism 54 is activated to raise the holding mechanism 44 so that the workpiece 11 is separated from the chuck table 18.

[0079] Next, the workpiece 11 is moved horizontally so that it passes above the air injector 56. Figure 4 is a schematic partial cross-sectional side view showing how the workpiece 11 is moved by the transport unit 42. During this movement, the motor 48c of the tilt adjustment mechanism 48 is operated to adjust the tilt of the workpiece 11 so that the front side of the workpiece 11 in the direction of travel is higher than the rear side in the direction of travel.

[0080] Then, with the air injector 56 operating to spray air A upwards, the motor 52b of the horizontal movement mechanism 52 is operated so that the workpiece 11 passes above the air injector 56.

[0081] In this case, air A is sprayed onto the surface (bottom surface) 11a of the workpiece 11, causing the processing fluid L adhering to this surface (bottom surface) 11a to flow along the surface (bottom surface) 11a toward the rear in the direction of movement of the workpiece 11, making it easier to fall from the rear end. As a result, the surface (bottom surface) 11a of the workpiece 11 dries.

[0082] Furthermore, the movement speed of the workpiece 11 when air is sprayed towards the rear in the direction of travel of the workpiece 11 (the movement speed in the second half) may be changed to be slower than the movement speed of the workpiece 11 when air is sprayed towards the front in the direction of travel (the movement speed in the first half). For example, the movement speed in the second half may be changed to 3 / 4 times or less, 1 / 2 times or less, or 1 / 4 times or less of the movement speed in the first half.

[0083] Alternatively, the movement speed of the workpiece 11 may be changed so that it gradually slows down as it passes over the air injector 56. When the movement speed of the workpiece 11 is changed in this way, the surface (bottom surface) 11a of the workpiece 11 becomes easier to dry.

[0084] As shown in Figure 1, a cleaning device 58 for cleaning the workpiece 11 that has been unloaded from the chuck table 18 is provided on the side of the transport unit 42. This cleaning device 58 includes, for example, a spinner table for holding the front (bottom) 11a side of the workpiece 11, and a cleaning unit including a nozzle for supplying a liquid (cleaning solution) such as pure water to the back (top) 11b side of the workpiece 11 held by the spinner table.

[0085] This spinner table has a structure similar to the chuck table 18 shown in Figure 1, and is connected to a rotational drive source such as a motor. When this rotational drive source is operated, the spinner table rotates with a rotation axis that passes through the center of the upper surface of the spinner table and is aligned with the Z-axis direction.

[0086] Then, the workpiece 11, which has been unloaded from the chuck table 18 by the transport unit 42, is loaded onto the spinner table. For example, the loading of the workpiece 11 onto the spinner table is carried out in the following order.

[0087] First, the motor 52b of the horizontal movement mechanism 52 is operated to rotate the workpiece 11, which is held by the holding mechanism 44, so that it is positioned directly above the spinner table. Next, the motor 54d of the vertical movement mechanism 54 is operated to lower the workpiece 11 so that its surface (bottom surface) 11a approaches the holding surface of the spinner table.

[0088] Next, the operation of the suction source communicating with the upper surface of the porous plate 44b of the holding mechanism 44 is stopped. Then, the air supply source communicating with the upper surface of the porous plate 44b of the holding mechanism 44 is activated to separate the workpiece 11 from the holding mechanism 44. This completes the loading of the workpiece 11 onto the spinner table.

[0089] In this cleaning device 58, the workpiece 11 is cleaned by supplying cleaning fluid from a cleaning unit to the back surface (top surface) 11b of the workpiece 11 while rotating a spinner table that holds the front surface (bottom surface) 11a side of the workpiece 11. Once the cleaning of the workpiece 11 in the cleaning device 58 is complete, the transport unit 10 carries the workpiece 11 from the cleaning device 58 to one of the multiple storage areas (for example, the original storage area) of the cassettes 8a and 8b.

[0090] In the conveying unit 42 of the grinding apparatus 2 described above, the tilt adjustment mechanism 48 adjusts the tilt of the workpiece 11 held by the holding mechanism 44 so that the front side in the direction of travel of the workpiece 11 is higher than the rear side in the direction of travel, and with the air injector 56 injecting air A upward, the horizontal movement mechanism 52 moves the workpiece 11 held by the holding mechanism 44 so that it passes above the air injector 56 (see Figure 4).

[0091] In other words, in this transport unit 42, air A is sprayed onto the surface (bottom surface) 11a of the workpiece 11 while it is tilted so that the front side in the direction of travel of the workpiece 11 is higher than the rear side in the direction of travel. In this case, the liquid (for example, processing fluid L) adhering to the surface (bottom surface) 11a of the workpiece 11 flows along the surface (bottom surface) 11a toward the rear side in the direction of travel of the workpiece 11, and is more likely to fall from the rear end.

[0092] Therefore, when using this transport unit 42 to transport the workpiece 11, for example, from the chuck table 18 to the spinner table of the cleaning device 58, the movement speed of the workpiece 11 can be increased. As a result, this transport unit 42 can dry the surface (bottom surface) 11a of the workpiece 11 and suppress a decrease in throughput.

[0093] It should be noted that the above description represents only one aspect of the present invention, and the present invention is not limited to the above description. For example, in the present invention, the vertical distance between the workpiece 11 and the air injector 56 may be kept constant by moving the workpiece 11 diagonally upward as it passes above the air injector 56.

[0094] Specifically, in this case, when the workpiece 11 passes above the air injector 56, the motor 52b of the horizontal movement mechanism 52 and the motor 54d of the vertical movement mechanism 54 should be operated simultaneously.

[0095] Furthermore, the transport unit of the present invention may be provided between the spinner table of the washing device 58 and the cassettes 8a and 8b. That is, the transport unit of the present invention may also dry the workpiece 11 whose surface (bottom surface) 11a has become wet as a result of washing the workpiece 11.

[0096] Furthermore, the transport unit of the present invention may be capable of both transporting the workpiece 11 from the chuck table 18 to the spinner table of the washing device 58 and transporting it from the spinner table of the washing device 58 to the cassettes 8a and 8b. That is, the transport unit of the present invention may dry the workpiece 11 whose surface (bottom surface) 11a has become wet due to processing, and also dry the workpiece 11 whose surface (bottom surface) 11a has become wet due to washing.

[0097] Furthermore, the transport unit of the present invention may be provided in processing equipment other than the grinding device 2. Figure 5 is a schematic perspective view showing an example of such processing equipment, and Figure 6 is a schematic top view showing some of the components of the processing equipment shown in Figure 5.

[0098] Specifically, the processing apparatus shown in Figures 5 and 6 is a cutting apparatus 60 capable of cutting the workpiece 11. Note that the U-axis direction (front-back direction) and V-axis direction (left-right direction) shown in Figures 5 and 6 are mutually orthogonal directions on the horizontal plane, and the W-axis direction (up-down direction) is perpendicular to the U-axis and V-axis directions (vertical direction).

[0099] The cutting device 60 includes a base 62 on which each component is mounted. A cassette table 64 is installed at the corner of the base 62. The upper surface of this cassette table 64 includes a cassette mounting area 68 suitable for placing a cassette 66. The cassette 66 is provided with multiple storage areas, each capable of accommodating a frame unit containing a workpiece 11.

[0100] Figure 7 is a schematic perspective view showing an example of a frame unit including a workpiece 11. The frame unit 17 shown in Figure 7 has a disc-shaped dicing tape 19. The diameter of this dicing tape 19 is longer than the diameter of the workpiece 11. The back surface 11b of the workpiece 11 is attached to the central region of the dicing tape 19.

[0101] The dicing tape 19 has, for example, a flexible film-like base layer and an adhesive layer (glue layer) provided on one side of the base layer (the side facing the workpiece 11). Specifically, the base layer is made of polyolefin (PO), polypropylene (PP), polyethylene terephthalate (PET), polyvinyl chloride (PVC), or polystyrene (PS), etc. The adhesive layer is made of UV-curable silicone rubber, acrylic material, or epoxy material, etc.

[0102] Furthermore, an annular frame 21 is attached to the outer periphery of the dicing tape 19, with a circular opening 21a having a diameter greater than that of the workpiece 11. This frame 21 is made of a metal material such as aluminum or stainless steel.

[0103] Furthermore, the cassette table 64 shown in Figure 5 is connected to a W-axis movement mechanism (not shown). This W-axis movement mechanism adjusts the height of the cassette 66 placed on the cassette placement area 68 so that the frame unit 17 can be properly loaded into and unloaded from the cassette 66.

[0104] Furthermore, above the base 62, there is a chuck table 70, a pair of cutting units (processing units) 72, a spinner table 74, a cleaning unit 76, and a transport unit 78.

[0105] The chuck table 70 holds the back (bottom) 11b side of the workpiece 11 via the dicing tape 19 when processing the workpiece 11. The chuck table 70 has a structure similar to the chuck table 18 shown in Figure 1 and is in communication with a suction source such as an ejector (not shown) and an air supply source such as a cylinder (not shown).

[0106] Furthermore, the chuck table 70 is connected to a U-axis movement mechanism (not shown) and a rotational drive source (not shown). The U-axis movement mechanism includes, for example, a ball screw and a motor, and moves the chuck table 70 from the cutting chamber, where a pair of cutting units 72 are provided, to a standby position D between the cassette table 64 and the spinner table 74.

[0107] Furthermore, the rotational drive source includes, for example, a spindle and a motor, and rotates the chuck table 70 with a rotation axis that passes through the center of the upper surface of the chuck table 70 and is aligned with the W-axis direction.

[0108] Furthermore, four clamps 80 are provided around the chuck table 70 at approximately equal angular intervals along the circumferential direction of the chuck table 70. Each of the four clamps 80 holds the frame 21 at a position lower than the holding surface of the chuck table 70 when the chuck table 70 holds the back (bottom) 11b side of the workpiece 11 via the dicing tape 19.

[0109] Each of the pair of cutting units 72 cuts the workpiece 11 from the surface (top surface) 11a side. Specifically, each cutting unit 72 has a spindle that extends along the V-axis direction. An annular cutting blade is mounted at the tip of this spindle.

[0110] Furthermore, the base end of the spindle is connected to a rotational drive source (not shown), such as a motor. When this rotational drive source is activated, the cutting blade rotates together with the spindle, with the axis of rotation being a straight line along the V-axis direction.

[0111] Furthermore, each of the pair of cutting units 72 is connected to a V-axis movement mechanism (not shown) and a W-axis movement mechanism (not shown). The V-axis movement mechanism includes, for example, a ball screw and a motor, and moves the cutting unit 72 along the V-axis direction inside the cutting chamber.

[0112] Furthermore, the W-axis movement mechanism includes, for example, a ball screw and a motor, and moves the cutting unit 72 along the W-axis direction inside the cutting chamber. Then, in the cutting device 60, as described above, the workpiece 11 is cut from the surface (upper surface) 11a side by bringing the cutting blade into contact with the workpiece 11 while the cutting blade is rotating.

[0113] Furthermore, a liquid supply unit (not shown) is provided near each of the pair of cutting units 72. This liquid supply unit supplies cutting fluid to the surface (top surface) 11a of the workpiece 11 when the workpiece 11 is being cut.

[0114] Specifically, the liquid supply unit includes, for example, a nozzle connected to each of the pair of cutting units 72 so as to be movable with each of the cutting units 72, and a pump that supplies cutting fluid to this nozzle. When this pump is operated, cutting fluid is supplied from the nozzle to the top surface 11a of the workpiece 11, whose back surface (bottom surface) 11b is held by a chuck table 70 positioned in the cutting chamber.

[0115] The spinner table 74 holds the back (bottom) side 11b of the workpiece 11 via the dicing tape 19 when cleaning the workpiece 11. The spinner table 74 has a structure similar to the chuck table 18 shown in Figure 1 and is in communication with a suction source such as an ejector (not shown) and an air supply source such as a cylinder (not shown).

[0116] Furthermore, the spinner table 74 is connected to a rotational drive source (not shown). This rotational drive source includes, for example, a spindle and a motor, and rotates the spinner table 74 with a rotation axis that passes through the center of the upper surface of the spinner table 74 and is aligned with the W-axis direction.

[0117] The cleaning unit 76 has a pipe-shaped support shaft that extends along the W-axis. A rotational drive source, such as a motor, is connected to the lower end of this support shaft. An arm is also connected to the upper end of the support shaft.

[0118] This arm is a pipe-shaped member that extends in a direction perpendicular to the W-axis direction, with a length corresponding to the distance from the upper end of the support shaft to the center of the upper surface of the spinner table 74. A nozzle is provided at the tip of the arm to discharge cleaning water downward.

[0119] Furthermore, the support shaft is connected to a pump that supplies cleaning fluid. Therefore, for example, if the shaft is rotated so that the nozzle is positioned above the spinner table 112, and then the pump is operated, the cutting fluid is supplied from the nozzle to the surface (top surface) 11a of the workpiece 11, which is held on its back (bottom surface) 11b side by the spinner table 74.

[0120] The transport unit 78 is, for example, held on the chuck table 70 positioned at the standby position D, and is used when transporting the frame unit 17, including the workpiece 11 after cutting, from the chuck table 70 to the spinner table 74. The transport unit 78 has a gripping part (not shown) for grasping the frame 21, and a holding mechanism including a suction pad or the like for holding the frame unit 17 by sucking the upper surface of the frame 21.

[0121] Furthermore, this holding mechanism is connected to a tilt adjustment mechanism (not shown), a V-axis direction movement mechanism (horizontal movement mechanism) (not shown), and a W-axis direction movement mechanism (vertical movement mechanism) (not shown). The tilt adjustment mechanism (not shown) has an arm whose tip is fixed to the holding mechanism and extends along the U-axis direction, and a motor connected to the base end of the arm.

[0122] Then, when the motor is operated while the frame 21 of the frame unit 17 is held in place by the holding mechanism, the tilt of the frame unit 17 held by the holding mechanism is adjusted. For example, this tilt adjustment mechanism adjusts the tilt of the frame unit 17 so that the angle that the upper surface of the frame 21 included in the frame unit 17 makes with respect to the horizontal plane is between 30° and 55°.

[0123] Furthermore, the V-axis movement mechanism includes, for example, a ball screw and a motor, and moves the transport unit 78 from a position above the spinner table 74 to a position near the cassette 66 placed on the cassette table 64. The W-axis movement mechanism also includes, for example, a ball screw and a motor, and adjusts the height of the transport unit 78.

[0124] Furthermore, the transport unit 78 is provided to extend along the U-axis direction and has an air injector (e.g., an air curtain or air knife) 82 that injects air upward from a region extending from one end to the other on its upper surface.

[0125] Specifically, the air injector 82 is positioned between the standby position D and the spinner table 74 (described later), and below the movement path of the workpiece 11 when the workpiece 11, held by the holding mechanism of the transport unit 78, is moved along the V-axis direction by the V-axis direction movement mechanism.

[0126] Furthermore, the upper surface of the air injector 82 is provided with, for example, a slit-shaped nozzle extending along the U-axis direction, from which air is ejected. The length of this nozzle along the U-axis direction is, for example, greater than the diameter of the dicing tape 19 included in the frame unit 17.

[0127] Then, when the chuck table 70, which holds the frame unit 17 including the workpiece 11 after cutting, is positioned at the standby position D, the workpiece 11 is transported from the chuck table 70 to the spinner table 74 by the transport unit 78. For example, the transport of the workpiece 11 is carried out in the following order.

[0128] First, the operation of the suction source communicating with the chuck table 70 is stopped. Next, the air supply source communicating with the chuck table 70 is activated. At this time, the frame unit 17 momentarily separates from the chuck table 18. Then, the cutting fluid supplied during the cutting of the workpiece 11 may seep into this gap. As a result, the underside of the dicing tape 19 may get wet.

[0129] Next, the V-axis movement mechanism is operated so that the holding mechanism of the transport unit 78 is positioned directly above the workpiece 11 placed on the chuck table 70. Then, the W-axis movement mechanism is operated to lower the holding mechanism so that it comes into contact with the upper surface of the frame 21 of the frame unit 17.

[0130] Next, the frame unit 17 is held by this holding mechanism. Then, the W-axis movement mechanism of the transport unit 78 is operated to raise the holding mechanism so that the frame unit 17 is separated from the chuck table 70. Next, the tilt adjustment mechanism of the transport unit 78 is operated to adjust the tilt of the workpiece 11 so that the front side of the frame unit 17 in the direction of travel is higher than the rear side in the direction of travel.

[0131] Next, with the air injector 82 operating to spray air upwards, the frame unit 17 is moved along the V-axis so that it passes above the air injector 82.

[0132] In this case, air is sprayed onto the underside of the dicing tape 19, causing the processing fluid adhering to this underside to flow along the underside towards the rear in the direction of travel of the frame unit 17, making it easier to fall off from the rear end. This dries the underside of the dicing tape 19.

[0133] Furthermore, the movement speed of the frame unit 17 when air is ejected to the rear side in the direction of travel (the movement speed in the latter half) may be changed to be slower than the movement speed of the frame unit 17 when air is ejected to the front side in the direction of travel (the movement speed in the first half). For example, the movement speed in the latter half may be changed to 3 / 4 times or less, 1 / 2 times or less, or 1 / 4 times or less of the movement speed in the first half.

[0134] Alternatively, the speed at which the frame unit 17 moves may be changed so that it gradually slows down as it passes over the air injector 82. When the speed at which the frame unit 17 moves is changed in this way, the underside of the dicing tape 19 dries more easily.

[0135] In the transport unit 78 of the cutting device 60 described above, the tilt adjustment mechanism adjusts the tilt of the frame unit 17 so that the front side in the direction of travel of the frame unit 17 held by the holding mechanism is higher than the rear side in the direction of travel, and with the air injector 82 injecting air upward, the V-axis movement mechanism moves the frame unit 17 held by the holding mechanism so that it passes above the air injector 82.

[0136] In other words, in this transport unit 78, air is sprayed onto the underside of the dicing tape 19 with the frame unit 17 tilted so that the front side in the direction of travel is higher than the rear side in the direction of travel. In this case, the processing fluid adhering to the underside of the dicing tape 19 flows along the underside toward the rear side in the direction of travel, making it easier for it to fall from the rear end.

[0137] Therefore, when using this transport unit 78 to transport the frame unit 17, for example, from the chuck table 70 to the spinner table 74, the movement speed of the frame unit 17 can be increased. As a result, this transport unit 78 can dry the underside of the dicing tape 19 and suppress a decrease in throughput.

[0138] Furthermore, in the cutting apparatus 60, the transport unit 78 is also used when transporting the frame unit 17 from the spinner table 74 to the cassette 66. Therefore, in this cutting apparatus 60, not only can the dicing tape 19, whose underside has become wet due to the processing of the workpiece 11, be dried, but the dicing tape 19, whose underside has become wet due to the cleaning of the workpiece 11, can also be dried.

[0139] Furthermore, the structures and methods of the embodiments described above can be modified as appropriate without departing from the scope of the present invention. [Explanation of Symbols]

[0140] 2: Grinding equipment 4: Base (4a: Recess) 6a, 6b: Cassette mounting area 8a, 8b: Cassette 10: Conveyor Unit 11: Workpiece (11a: front side, 11b: back side) 12:Position adjustment mechanism 13: Planned division line 14: Conveyor Unit 15: Devices 16: Turntable 17: Frame Unit 18: Chuck Table 19: Dicing Tape 20:Support structure 21: Frame (21a: Opening) 22: Movement mechanism 24: Guide rail 26: Mobile Plate 28: Screw shaft 30: Motor 32: Grinding Unit 34: Spindle housing 36: Mount 38a, 38b: Grinding wheels 40: Motor 42: Conveyor Unit 44: Holding mechanism (44a: frame body, 44b: porous plate) 46: Bolt 48: Tilt adjustment mechanism (48a: Support member, 48b: Arm, 48c: Motor) 50: Compression coil spring 52: Horizontal movement mechanism (52a: support shaft, 52b: motor) 54: Vertical movement mechanism (54a: moving plate, 54b: nut) (54c: screw shaft, 54d: motor) 56: Air injector 58: Washing device 60: Cutting equipment 62: Base 64: Cassette Table 66: Cassette 68: Cassette mounting area 70: Chuck Table 72: Cutting Unit 74: Spinner Table 76: Washing Unit 78: Conveyor Unit 80: Clamp 82: Air sprayer

Claims

1. A transport unit for transporting a workpiece or a frame unit containing said workpiece, A holding mechanism for holding the workpiece or the frame unit, A tilt adjustment mechanism for adjusting the tilt of the workpiece or frame unit held by the holding mechanism, A horizontal movement mechanism for moving the workpiece or frame unit held by the holding mechanism along the horizontal direction, A vertical movement mechanism for moving the workpiece or frame unit held by the holding mechanism along the vertical direction, The device comprises an air injector positioned below the movement path of the workpiece or frame unit when the workpiece or frame unit held by the holding mechanism is moved along the horizontal direction by the horizontal movement mechanism, and which injects air upward, A transport unit in which a tilt adjustment mechanism adjusts the tilt of the workpiece or frame unit held by the holding mechanism so that the front side in the direction of travel of the workpiece or frame unit held by the holding mechanism is higher than the rear side in the direction of travel, and a horizontal movement mechanism moves the workpiece or frame unit held by the holding mechanism so that it passes above the air injector while the air injector is injecting air upward.

2. The transport unit according to Claim 1, wherein when the workpiece or the frame unit passes above the air injector, the moving speed of the workpiece or the frame unit is changed such that the second half is slower than the first half, or the speed gradually decreases.

3. A processing device for processing a workpiece, A chuck table for holding the lower side of a workpiece when processing the workpiece while supplying processing fluid to the upper surface of the workpiece, A spinner table for holding the lower side of a workpiece while cleaning the workpiece with cleaning fluid supplied to the upper surface of the workpiece, A cassette mounting area on which a cassette for containing the workpiece is placed, The system comprises a transport unit for transporting the workpiece or a frame unit containing the workpiece between the chuck table and the spinner table, or between the spinner table and the cassette, The transport unit is, A holding mechanism for holding the workpiece or the frame unit, A tilt adjustment mechanism for adjusting the tilt of the workpiece or frame unit held by the holding mechanism, A horizontal movement mechanism for moving the workpiece or frame unit held by the holding mechanism along the horizontal direction, A vertical movement mechanism for moving the workpiece or frame unit held by the holding mechanism along the vertical direction, The device comprises an air injector positioned below the movement path of the workpiece or frame unit when the workpiece or frame unit held by the holding mechanism is moved along the horizontal direction by the horizontal movement mechanism, and which injects air upward, A machining apparatus in which a tilt adjustment mechanism adjusts the tilt of the workpiece or frame unit held by the holding mechanism so that the front side in the direction of travel of the workpiece or frame unit held by the holding mechanism is higher than the rear side in the direction of travel, and the horizontal movement mechanism moves the workpiece or frame unit held by the holding mechanism so that it passes above the air injector while the air injector is injecting air upward.

4. The processing apparatus according to claim 3, wherein when the workpiece or frame unit passes above the air injector, the moving speed of the workpiece or frame unit is changed such that the second half is slower than the first half, or gradually slows down.

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