Workbench and relay platform

Abstract

To support the work of attaching or removing a sample support plate to a sample cartridge, and support sample cartridge transport work or attachment / detachment work.SOLUTION: A sample cartridge 12A includes two pressing pieces that apply pressing force to a sample support plate. A workbench 10 has a release mechanism 16. The release mechanism 16 includes two push-up pins that push up the two pressing pieces to release the pressing force. In a state where the rear end portion of the sample cartridge 12A is held by the workbench 10, the forward end portion of the sample cartridge 12A is held by a relay table 20. As a result, the sample cartridge 12A is transferred from the workbench 10 to the relay table 20.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a workbench and a relay stand, and particularly to a tool set for assisting in handling a sample cartridge.

Background Art

[0002] Prior to observing a sample with a transmission electron microscope, the original sample is processed using a sample processing apparatus. Through this processing, a thin-film observation sample is produced. The observation sample is usually placed on or attached to a sample support plate. The sample support plate is also referred to as a grid or a mesh. In order to facilitate handling of the sample support plate, a sample cartridge that functions as a carrier is used. A sample cartridge having a function of changing the angle or posture of the sample support plate has also been put into practical use. The sample cartridge is also referred to as a sample retainer.

[0003] A typical sample cartridge has a plurality of pressing pieces (specifically, a plurality of leaf springs) for pressing and restraining the sample support plate. Each pressing piece is fixed to the main body of the sample cartridge or to the sample stage in the sample cartridge by a screw.

[0004] Since the sample support plate is extremely small, the operation of attaching the sample support plate to the sample cartridge is a very difficult operation. In particular, careful work is required when loosening or tightening a plurality of screws. Against this background, there is a need to assist in the attachment and removal operations of the sample support plate.

[0005] The sample cartridge is a small precision part. When attaching the sample cartridge to a processing holder or an observation holder, careful work is required so as not to damage the sample cartridge. Conventionally, when transporting the sample cartridge, the sample cartridge is directly held by the operator's hand. There is a need to assist in the transportation operation or the attachment / detachment operation of the sample cartridge, particularly for protecting the sample.

[0006] Patent Document 1 discloses an instrument for assisting in the process of attaching a sample support plate to a holder for a transmission electron microscope. Patent Document 2 discloses a push-up pin that functions when removing a sample tip. Neither Patent Document 1 nor Patent Document 2 discloses a mechanism for generating a release force to counteract the pressing force applied to the sample support plate. [Prior art documents] [Patent Documents]

[0007] [Patent Document 1] Japanese Patent Publication No. 2018-77950 [Patent Document 2] Japanese Patent Publication No. 2021-57169 [Overview of the project] [Problems that the invention aims to solve]

[0008] The first object of the present invention is to assist in the attachment or removal of a sample support plate to a sample cartridge. The second object of the present invention is to assist in the transport or attachment / detachment of a sample cartridge. [Means for solving the problem]

[0009] The workbench according to the present invention holds a sample cartridge which includes a pressing member that applies a pressing force to restrain it against a sample support plate. Workbench The device is characterized by comprising a main body and a release mechanism that directly or indirectly contacts the pressing member and applies a release force to the pressing member that opposes the pressing force.

[0010] The relay stand according to the present invention is a relay stand that receives a sample cartridge from the workbench, and is characterized by including a storage section for accommodating the front portion of the sample cartridge when the rear portion of the sample cartridge is held on the workbench, and a capture mechanism for capturing the sample cartridge when the front portion is accommodated in the storage section.

Advantages of the Invention

[0011] According to the workbench of the present invention, the attachment or detachment operation of the sample support plate to the sample cartridge can be assisted. According to the relay stand of the present invention, the conveyance or attachment / detachment operation of the sample cartridge can be assisted.

Brief Description of the Drawings

[0012] [Figure 1] It is a diagram showing a method of using the tool set according to the embodiment. [Figure 2] It is a perspective view showing the workbench according to the embodiment. [Figure 3] It is a perspective view showing the first example of the sample cartridge. [Figure 4] It is a perspective view showing the workbench holding the sample cartridge. [Figure 5] It is a cross-sectional view of the holding structure. [Figure 6] It is a diagram showing the release mechanism. [Figure 7] It is a diagram showing the release operation. [Figure 8] It is a perspective view showing the second example of the sample cartridge. [Figure 9] It is a diagram showing another example of the release operation. [Figure 10] It is a perspective view showing the workbench and the relay stand according to the embodiment. [Figure 11] It is a perspective view showing the relay stand according to the embodiment. [Figure 12] It is a plan view showing the relay stand according to the embodiment. [Figure 13] It is a plan view showing the state before capture. [Figure 14] It is a plan view showing the state after capture. [Figure 15] It is a diagram showing the pedestal for the TEM holder. [Figure 16] It is an enlarged view showing a part of the pedestal shown in FIG. 15. [Figure 17] It is a diagram showing the TEM holder holding the sample cartridge.

Best Mode for Carrying Out the Invention

[0013] Hereinafter, embodiments will be described based on the drawings.

[0014] (1) Outline of Embodiment (1-1) Workbench The workbench according to the embodiment Workbench has a main body and a release mechanism. Workbench The main body holds a sample cartridge including a pressing member that applies a pressing force for restraining it against a sample support plate. The release mechanism directly or indirectly contacts the pressing member and applies a release force that counteracts the pressing force to the pressing member.

[0015] According to the above configuration, the pressing force can be temporarily released without removing the pressing member from the sample cartridge. In a state where the pressing force is temporarily released, the sample support plate is attached to the sample cartridge, or the sample support plate is removed from the sample cartridge. When the pressing member is fastened with a screw, the operation of engaging a tool with the screw and turning the screw becomes unnecessary. Therefore, workability can be improved, and members such as screws can be protected.

[0016] The release force may be directly applied to the pressing member, or the release force may be indirectly applied to the pressing member. For example, when the direction of the pressing force is downward, an upward pushing force may be applied to the pressing member from below the pressing member, or an upward pulling force may be applied to the pressing member from above the pressing member.

[0017] In the embodiment, the pressing member has at least one pressing piece. The release mechanism has at least one operating element. The at least one pressing piece Place the sample support plate on the sample cartridge.It has a fixed portion that is fixed to the main body and an unfixed portion that is connected to the fixed portion. At least one operator applies a release force to the unfixed portion. A release force may be applied from one operator to multiple pressing pieces, or a release force may be applied from multiple operators to one pressing piece. In this embodiment, one operator is provided for each pressing piece.

[0018] In this embodiment, at least one operator is at least one push-up pin. With this configuration, the upward movement of the push-up pin applies a release force to the pressing member. A lever or other component may be used instead of the push-up pin. In that case, the lever or other component corresponds to the operator.

[0019] In one embodiment, the sample cartridge is supported by a sample support plate. Equipped with the main unit The apparatus has a sample stage. The sample stage has at least one through hole. When a release force is applied to the non-fixed portion, at least one operator passes through at least one through hole. In one embodiment, the sample stage is provided with two pressing pieces, and two through holes are provided directly below the two pressing pieces. Two operators pass through the two through holes.

[0020] In one embodiment, the release mechanism includes a handle operated by the user and a motion conversion mechanism that converts the movement of the handle into the movement of at least one operator. A mechanism for locking or holding the position or orientation of the handle may be provided.

[0021] In this embodiment, the sample cartridge includes a spacer provided between the pressing member and the sample support plate. The release mechanism indirectly applies a release force to the pressing member via the spacer, thereby creating a gap between the spacer and the sample support plate. Alternatively, the release mechanism directly applies a release force to the pressing member, thereby creating a gap between the pressing member and the sample support plate.

[0022] Embodiments, sample cartridge The main body inIt has a mounting surface on which a sample support plate is placed. When a release force is applied to the pressing member before the sample support plate is attached to the sample cartridge, a gap is created between the mounting surface and the spacer, or between the mounting surface and the pressing member. In this embodiment, the width of the gap is greater than the thickness of the sample support. While the gap is maintained, the sample support plate is inserted into the gap.

[0023] In the embodiment, Workbench The main body has a storage section, a first surface, and a second surface. The sample cartridge is housed in the storage section. The first surface is parallel to the central axis of the storage section and functions as the bottom surface when the workbench is in an upright position (normal position). The second surface is inclined with respect to the central axis of the storage section and functions as the bottom surface when the workbench is in an inclined position. When the workbench is in an inclined position, the entrance to the storage section faces diagonally upward.

[0024] If the entrance to the storage compartment faces diagonally upwards, the visibility of the front part of the sample cartridge (especially the sample stage) can be improved. Furthermore, the process of attaching the sample support plate to the sample cartridge and removing the sample support plate from the sample cartridge becomes easier.

[0025] (1-2) Relay station The relay stand according to this embodiment is a device or jig for receiving a sample cartridge from the workbench described above. The sample cartridge has a front portion including a sample support plate and a rear portion opposite to the front portion. The workbench has a first storage section for accommodating the rear portion.

[0026] Based on the above configuration, the relay stand according to the embodiment has a second storage section and a capture mechanism. The second storage section accommodates the front portion of the sample cartridge when the rear portion of the sample cartridge is held on the workbench. The capture mechanism captures the sample cartridge when the front portion of the sample cartridge is housed in the second storage section.

[0027] By using a transfer platform, it becomes unnecessary to directly grasp the sample cartridge by hand. The capture mechanism selectively creates the captured and released states of the sample cartridge. The capture mechanism ensures reliable transfer of the sample cartridge from the workbench to the transfer platform. The sample cartridge may also be transferred from the transfer platform to the workbench.

[0028] In this embodiment, the second storage section is provided at the same height as the first storage section. This configuration facilitates the transfer of sample cartridges from the workbench to the transfer table.

[0029] The relay stand according to the embodiment includes a second positioning structure connected to a first positioning structure of the workbench. With this configuration, when the workbench and the relay stand are connected, the sample cartridge can be safely and accurately transferred from the workbench to the relay stand. In the embodiment, the first positioning structure has one of a convex structure and a concave structure that is coupled thereto. The second positioning structure has the other of a convex structure and a concave structure.

[0030] In one embodiment, the capture mechanism includes an operating member operated by a user, a lever having a hook for capturing a sample cartridge, and a mechanism for transmitting the operating force applied to the operating member to the lever.

[0031] A work support tool set (work support system) is formed by a workbench and a transfer table. The work support tool set may further include other work support tools. Examples of other work support tools include a transfer table and a base for mounting an observation holder. A sample cartridge may be transferred from the transfer table to the processing holder, or from the processing holder to the transfer table.

[0032] (2) Details of the embodiment (2-1) Work support tool set Figure 1 shows a work support toolset and a series of operations using the same according to an embodiment. The work support toolset includes a workbench 10 and a relay station 20. The series of operations are performed by an operator. Some of the operations may be automated.

[0033] In the sample cartridge preparation step S10, the sample cartridge 12A is attached to the workbench 10. The sample cartridge 12A according to this embodiment includes a sample stage 14 as a movable stage.

[0034] In the sample support plate preparation step S12, the sample support plate 18 is attached to the sample stage 14. At this point, the sample has not yet been attached to the sample support plate 18. The sample stage 14 has a plurality of pressing pieces (specifically, a plurality of leaf springs) that apply a pressing force to restrain the sample support plate, and a plurality of screws for fixing the plurality of pressing pieces to the sample stage 14.

[0035] When attaching the sample support plate 18, a release mechanism 16 provided on the workbench 10 is used. As will be described in detail later, the release mechanism 16 generates a release force that counteracts the pressing force and applies this release force to multiple pressing pieces. With the release mechanism 16, it becomes unnecessary to loosen and tighten multiple screws when attaching and removing the sample support plate. Therefore, multiple screws can be protected and workability can be improved.

[0036] In the transfer process S14, the sample cartridge 12A held on the workbench 10 is transferred to the transfer table 20. The transferred sample cartridge is labeled with the code 12B. By using the transfer table 20, it becomes unnecessary to directly grasp the sample cartridge 12 by hand.

[0037] In the mounting process S16, the sample cartridge 12B, held on the transfer table 20, is attached to the processing holder 22. At this time, the transfer table 20 is grasped by the operator. After the sample cartridge is attached to the processing holder 22, the transfer table 20 is removed from the sample cartridge.

[0038] Subsequently, the processing holder 22 is placed in the processing apparatus, and the processing step is executed. Multiple processing apparatuses may be used in stages during the processing step. During the processing step, the original sample is processed, and a thin-film observation sample is prepared from the original sample. The observation sample is then attached to the sample support plate. At this time, the sample transport mechanism provided in the processing apparatus is used. Multiple observation samples may be attached to the sample support plate. The original sample or an intermediate sample may be attached to the sample support plate, and an observation sample may be prepared from the original sample or the intermediate sample.

[0039] In the removal process S18, the processing holder 22 is removed from the processing device, and then the sample cartridge 12B is removed from the processing holder 22. The transfer stage 20 is also used at this time. Specifically, the sample cartridge 12B is transferred from the processing holder 22 to the transfer stage 20. As described above, the sample for observation is attached to the sample support plate 18a held on the sample stage.

[0040] In the transfer process S20, the sample cartridge 12B is transferred from the relay stage 20 to the TEM holder (transmission electron microscope holder) 23. Reference numeral 12C indicates the sample cartridge held in the TEM holder 23.

[0041] The workbench described above facilitates the attachment of the sample support plate to the sample cartridge and protects the sample support plate. The transfer stand described above facilitates the attachment, detachment, and transport of the sample cartridge and protects the sample cartridge. The specific configurations of the workbench and transfer stand are described in detail below.

[0042] (2-2) Workbench Figure 2 shows a workbench 30 according to an embodiment. In each figure, the X direction is the first horizontal direction, the Y direction is the second horizontal direction, and the Z direction is the vertical direction. The workbench 30 shown in Figure 2 has an upright position (basic position).

[0043] The workbench 30 has a block-shaped body 32. The body 32 is made of a metal such as copper. A release mechanism 42, which will be described in detail below, is provided at the front of the body 32. The body 32 also has notches, specifically a vertical surface 33A and a horizontal surface 33B.

[0044] The main body 32 has a holding structure 34. The holding structure 34 houses and holds the rear end of the sample cartridge (not shown in Figure 2). Specifically, the holding structure 34 includes a housing section 36, a cover 38, a leaf spring 40, a base 41, etc. The housing section 36 is a space that extends in the X and Y directions, and the rear end portion of the sample cartridge is housed in the housing section 36. The housing section 36 has an entrance and an upper opening. When the workbench 30 is in an upright position, the central axis of the housing section 36 is parallel to the X direction, and the entrance of the housing section 36 faces forward.

[0045] The upper opening of the housing section 36 is covered by a cover 38. The cover 38 is a horizontal plate made of a metal such as copper. When the rear end portion of the sample cartridge is housed in the housing section 36, the capturing force generated by the leaf spring 40 exerts on the frame of the sample cartridge.

[0046] A base 41 is provided on the front side of the housing section 36. The base 41 is a terrace-like portion that protrudes horizontally from the main body 32. The base 41 and the main body 32 are integrated, but they may be separate. Two through holes are formed in the base 41. The two through holes are aligned in the Y direction, and the central axis of each through hole is parallel to the Z direction. The bottom surface of the housing section 36 and the top surface of the base 41 function as mounting surfaces for placing the sample cartridge. A gap exists between the horizontal surface 33B and the bottom surface of the base 41.

[0047] As will be described in detail later, the sample cartridge has a sample stage, and the sample stage has two pressing pieces (specifically, two leaf springs) that restrain the sample support plate. The two pressing pieces apply a pressing force to the sample support plate, thereby fixing the sample support plate to the sample stage.

[0048] The release mechanism 42 is a mechanism that generates a release force to counteract the pressing force generated in the sample cartridge. Specifically, the release mechanism 42 includes a handle 44, a motion conversion mechanism 47, shafts 56 and 58, etc. The shafts 56 and 58 have push-up pins 60 and 62. Each push-up pin 60 and 62 is a rod-shaped member extending in the Z direction. The upper ends of the two push-up pins 60 and 62 directly or indirectly push up the two pressing pieces, thereby applying a release force to the two pressing pieces. When the release force is generated, i.e., during the release operation, the shafts 56 and 58 are inserted into two through holes formed in the base 41. The two push-up pins 60 and 62 protrude upward from the two through holes.

[0049] The handle 44 is a component that performs rotational motion around the rotation axis 46. The handle 44 has an operating end and an action end. The operating end is operated by the operator. When attaching or removing the sample support plate, the operating end is pulled downward. When the operating end is pulled upward, no release force is generated, and the restrained state of the sample support plate in the sample cartridge is maintained.

[0050] The motion conversion mechanism 47, in the illustrated configuration example, includes a lifting block 48, a guide wall 50, a pin 52, a U-shaped groove 54, etc. The lifting block 48 moves up and down guided by the guide wall 50. Two shafts 56 and 58 are fixed to the lifting block 48. A pin 52 is also fixed to the lifting block 48. A U-shaped groove 54 is formed at the working end of the handle 44, and the pin 52 is inserted into the U-shaped groove 54. During the upward movement of the working end of the handle 44, the motion force of the working end is transmitted to the lifting block 48 via the U-shaped groove 54 and the pin 52, causing the lifting block 48 to move upward. This causes the two shafts 56 and 58 to move upward.

[0051] A locking mechanism is provided to maintain the position and orientation of the handle 44. In this embodiment, the locking mechanism consists of two ball plungers 64. A cover 66 is attached to the front of the main body 32. In Figure 1, the cover 66 is not shown.

[0052] The main body 32 has a first surface 68 and a second surface 70. The first surface 68 is a surface that extends in the X and Y directions. When the main body 32 is in an upright position, the first surface 68 functions as the bottom surface. The second surface 70 is a surface inclined with respect to the first surface, and its inclination angle is, for example, in the range of 30 to 60 degrees. When the main body 32 is in an inclined position, the second surface 70 functions as the bottom surface. In that state, the entrance to the storage section 36 faces diagonally upward. By making the main body 32 in an inclined position, the visibility of the sample stage in the sample cartridge is improved, and the installation or removal of the sample support plate is made easier. The dimensions of the work table 30 in the X, Y, and Z directions are each about a few centimeters.

[0053] Figure 3 shows a first example of a sample cartridge. Reference numeral 72F indicates the front end portion of the sample cartridge 72, and reference numeral 72R indicates the rear end portion of the sample cartridge 72. The sample cartridge 72 has a frame 73 made of metal. A sample stage 74 is provided in the space enclosed by the frame 73, and a tilting mechanism 78 is also provided. The tilting mechanism 78 is a mechanism that tilts the sample stage 74, which is a movable stage.

[0054] The sample stage 74 has a flat body 74A. In the illustrated configuration example, the body 74A has a semicircular opening, and the area around the opening is the mounting surface. The peripheral portion of the sample support plate 90 is placed on the mounting surface. The sample support plate 90 has a semicircular shape. Multiple protrusions are provided at the front end of the sample support plate 90. Each protrusion has a front surface and side surfaces. The front surface and side surfaces are the surfaces to which the observation sample (thin film sample) is attached, respectively. The diameter of the sample support plate 90 is, for example, in the range of 2 to 5 mm.

[0055] Two pressing pieces 92 and 94 are provided to fix the sample support plate 90 to the main body 74A. Each pressing piece 92 and 94 is a leaf spring. The two pressing pieces are fixed to the main body 74A by two screws 93 and 95. The two pressing pieces 92 and 94 generate a pressing force to restrain the sample support plate 90. In the illustrated configuration example, a spacer 96 is provided between the ends of the two pressing pieces 92 and 94 and the sample support plate 90. The pressing force from the two pressing pieces 92 and 94 is applied to the sample support plate 90 via the spacer 96. The spacer 96 has a half-ring portion and a pair of arm portions extending in the Y direction from that portion.

[0056] The sample stage 74 rotates around the rotation axis 76. The frame 73 has a bridge portion 73A that surrounds the front side of the sample stage 74. The rigidity of the frame 73 is increased by the bridge portion 73A. The frame 73 has a notch 97 and a recess 98.

[0057] The tilting mechanism 78 includes a lever 80, an arm 74B, a torsion spring 86, etc. The lever 80 rotates around the rotation axis 84. The lever 80 has an arm 80A. An elongated hole is formed in the arm 80A, while a pin is formed in the arm 74B. The pin is inserted into the elongated hole. As indicated by reference numeral 88, when a pressing force is applied to the lever 80, the arm 80A moves downward (in the negative Z direction). As a result, the arm 74B, which is engaged with the arm 80A, also moves downward. Consequently, the sample stage 74, to which the arm 80A is integrated, rotates in the +θ direction. On the other hand, an elastic force from the torsion spring 86 is applied to the arm 74B, and when the pressing force 88 disappears, the sample stage 74 rotates in the -θ direction. The rotation angle of the sample stage 74 can be arbitrarily set by adjusting the position of the lever 80. Reference numeral 100 indicates a locking mechanism that locks the rotation angle of the lever 80 to 0 degrees.

[0058] Sample cartridges without a tilting mechanism may be used. Sample cartridges that simultaneously hold multiple sample support plates may be used. The sample support plates may be restrained by a relatively large single leaf spring or a pressing member other than a leaf spring. Sample support plates of various forms can be used.

[0059] Figure 4 shows a workbench 30 holding a sample cartridge 72. The rear end portion of the sample cartridge 72 is housed in a storage section 36, and this rear end portion is held by a holding structure 34.

[0060] In Figure 4, the workbench 30 is in an upright position, with the first surface 68 functioning as the bottom surface. In this case, the entrance to the storage compartment 36 faces horizontally forward (see A). When the second surface 70 is used as the bottom surface, the workbench 30 is tilted, and the second surface 70 functions as the bottom surface. In this case, the entrance to the storage compartment 36 faces diagonally upward (see B).

[0061] A portion of the cover of the holding structure 34 contacts the rear surface of the lever on the sample cartridge, causing the lever to be in an upright position. In other words, when the rear end of the sample cartridge is inserted into the housing, the angle of the sample stage becomes 0 degrees.

[0062] Figure 5 shows a cross-section of the holding structure 34. The rear end portion of the sample cartridge 72 is housed in the housing. An opening is formed in the cover 38, and a ball 102 is placed inside this opening. A pressing force is applied to the ball 102 from the leaf spring 40. Meanwhile, a recess 98 is formed in the frame 73. The lower part of the ball 102 fits into the recess 98. This captures the sample cartridge 72.

[0063] The operation of the release mechanism 42 will be explained using Figures 6 and 7. In Figure 6, a partial cross-section is shown, indicated by reference numeral 107. The same applies to Figure 7.

[0064] In Figure 6, the release mechanism 42 is not functioning. The working end of the handle 44 (the left end in Figure 6) is lowered, and the lifting block 48 is in the retracted position. As described above, the lifting block 48 is provided with two shafts 56, 58. They have two push-up pins 60, 62.

[0065] The main body of the workbench has two positioning holes 104 and 106. These two holes 104 and 106 function when connecting the workbench to the connecting base, which will be described later.

[0066] In Figure 7, each pressing piece 92, 94 has a fixed portion (see reference numeral 94a) and an unfixed portion (see reference numeral 94b). The fixed portion is the part that is fixed by a screw, and the unfixed portion is the part that is connected to the fixed portion. In Figure 7, only one of the push-up pins 60 is shown. The action of one push-up pin 60 is the same as the action of the other push-up pin.

[0067] A pressing force is applied to the sample support plate 90 from the pressing piece 92 via the spacer 96, and this pressing force restrains the sample support plate 90 on the sample stage. When removing the sample support plate 90, the handle is operated beforehand, which releases (turns on) the release mechanism.

[0068] Specifically, the push-up pin 60 passes through the through hole 108 formed in the sample stage and protrudes upward, causing the tip of the push-up pin 60 to push up against the lower surface of the arm portion 96A of the spacer 96. This push-up imparts a release force 100 to the pressing piece 92 that counteracts the pressing force. In other words, the pressing force acting on the sample support plate 90 via the spacer 96 is released. Due to the above push-up, the spacer 96 is displaced slightly upward (see reference numeral 112), creating a gap between the lower surface of the spacer 96 and the upper surface of the sample support plate 90. In this state, the sample support plate 90 is removed. After that, the release mechanism is turned off.

[0069] On the other hand, when attaching the sample support plate 90, the handle is operated beforehand, which activates the release mechanism (turns it on). Specifically, as described above, the push-up pin 60 passes through the through hole 108 formed in the sample stage and protrudes upward, causing the tip of the push-up pin 60 to push up against the lower surface of the arm portion 96A of the spacer 96. This push-up applies a release force 100 to the pressing piece 92 that counteracts the pressing force. This releases the pressing force acting on the mounting surface of the sample support stage. That is, the push-up causes the spacer 96 to be displaced slightly upward, creating a gap between the lower surface of the spacer 96 and the mounting surface. The width of this gap is greater than the thickness of the sample support plate 90. The sample support plate 90 is then inserted into this gap. Normally, when inserted, a small gap remains between the lower surface of the spacer 96 and the upper surface of the sample support plate 90. Subsequently, the release mechanism turns off, and the sample support plate 90 is constrained.

[0070] In this embodiment, an upward force can be applied to the non-fixed portion of the pressing piece from directly below it, thereby ensuring that the pressing force is released. To achieve this advantage, a through hole is formed directly below the non-fixed portion, and a push-up pin is provided directly below the non-fixed portion so as to be able to move up and down. The amount the push-up pin rises should be determined to obtain the required amount of upward force. The release mechanism may be configured to allow the amount the push-up pin rises to be varied depending on the thickness of the support member and the cartridge type.

[0071] Instead of a push-up pin, an operating element such as a lever or link may be used. In this embodiment, the release force is generated by an operator, but the release force may also be generated by an actuator. The release force may be applied from a single moving member to two pressing pieces.

[0072] Figure 8 shows a second example of a sample cartridge. The illustrated sample cartridge 114 has basically the same configuration as the sample cartridge shown in Figure 3, with a few exceptions. That is, the sample cartridge 114 has a sample stage 74. The sample stage 74 has a main body 74A and two pressing pieces 92, 94. On the other hand, the sample cartridge 114 does not have the spacer described above. The sample support plate 90 is directly fixed by the two pressing pieces 92, 94.

[0073] Figure 9 shows a partial cross-section of the sample cartridge shown in Figure 8. The end of the pressing piece 92 is in contact with the end of the sample support plate 90, and the pressing force is directly applied from the pressing piece 92 to the sample support plate 90. This restrains the sample support plate 90. Prior to the removal of the sample support plate 90, the release mechanism performs a release operation. Specifically, the push-up pin 60 passes through the through hole 108 formed in the sample stage, and the tip of the push-up pin 60 pushes up the pressing piece 92. That is, a release force 110 that opposes the pressing force is applied from the push-up pin 60 to the pressing piece 92. As a result, the end of the pressing piece 92 floats upward (see reference numeral 112), and a gap is created between the sample support plate 90 and the pressing piece 92. In this state, the sample support plate is removed. After that, when the push-up pin 60 moves downward, the pressing force is restored, and a state is formed where the pressing piece 92 is in contact with the mounting surface or its surroundings. The same procedure as described above is basically followed when attaching the sample support plate 90 to the sample cartridge.

[0074] (2-3) relay platform Figure 10 shows a relay stand 116 according to the embodiment. The relay stand 116 is a tool for receiving the sample cartridge 72 from the workbench 30 and transporting the received sample cartridge 72.

[0075] In Figure 10, the workbench 30 holds the rear end portion of the sample cartridge 72. The front end portion of the sample cartridge 72, along with its base, protrudes from the main body of the workbench 30. The relay stand 116 has a main body 118 and a holding portion 120. The holding portion 120 protrudes from the main body 118. With the workbench 30 and the relay stand 116 connected, the sample cartridge is passed from the workbench 30 to the relay stand 116.

[0076] In the workbench 30, the height of the central axis of the storage section (first storage section) is h1. In the relay table 116, the height of the central axis of the storage section (second storage section) is also h1. In other words, the height of the entrance to the first storage section and the height of the entrance to the second storage section are the same. When the workbench 30 and the relay table 116 are connected, the central axis of the first storage section and the central axis of the second storage section coincide. Note that in Figure 10, the cover 122 that covers the top surface of the main body 118 and the cover 124 that covers the top surface of the holding section 120 are not shown.

[0077] Figure 11 shows only the relay platform 116. The holding section 120 has a hollow housing. The upper space within the housing is a housing section 126 that accommodates the tip portion of the sample cartridge. The housing is provided with two positioning pins 128 and 130. Two through holes 129 are formed in the bottom wall of the housing. When the release mechanism is released while the units are connected, the two shafts pass through the two through holes 129. The sample support plate can be attached and detached while the units are connected, as needed.

[0078] The relay platform 116 has a capture mechanism 132. The capture mechanism 132 includes a lever 134 and a button 140. The lever 134 is a member that performs rotational motion around a rotation axis 136. A hook is formed on the tip 134A of the lever 134. An elastic force 142 is constantly applied to the lever 134. Due to this elastic force 142, the lever 134 rotates counterclockwise, and the tip of the hook enters the housing section 126. As will be described later, when the tip portion of the sample cartridge is housed in the housing section 126, the tip of the hook catches on a notch formed in the frame of the sample cartridge. This creates a captured state for the sample cartridge.

[0079] Button 140 is an operating component. When the operator presses button 140, an operating force 144 is generated that counteracts the elastic force 142. This causes the lever to rotate clockwise and the hook to retract from the housing 126. This releases the capture state of the sample cartridge.

[0080] When the workbench and the relay stand 116 are connected, two positioning pins provided on the relay stand 116 are inserted into two positioning holes formed in the workbench (see reference numerals 104 and 106 in Figure 6). This optimizes the positional relationship between the workbench and the relay stand 116. The two positioning pins are convex structures for positioning, and the two positioning holes are concave structures for positioning. Alternatively, the workbench may be provided with convex structures for positioning, and the relay stand with concave structures for positioning.

[0081] Figure 12 is a plan view of the relay platform. Figure 12 also shows a partial cross-section of the relay platform. In Figure 12, the elements shown in Figure 11 are denoted by the same reference numerals, and their descriptions are omitted.

[0082] The tip of the sample cartridge 72 is held by the holding part 120. Specifically, the hook formed on the tip 134A of the lever 134 is inserted into the notch 97 formed in the frame of the sample cartridge 72. In this state, the sample cartridge 72 is completely captured and cannot be removed.

[0083] The capture mechanism 132 will now be explained in detail. A cavity 146 is formed in the main body of the relay platform. A spring 148, a slider 152, and a cap 154 ​​are provided in the cavity 146. Another cavity 158 is formed in the main body of the relay platform. A slider 160 is provided in the cavity 158. The end of the slider 160 constitutes the button 140. The slider 160 is the mechanism that transmits the operating force to the lever 134.

[0084] The elastic force generated by the spring 148 is transmitted to the base end 134B of the lever 134 via the slider 152. An opening is formed at the end of the slider 152, and a ball 156 is placed inside the opening. The elastic force is transmitted to the base end 134B of the lever 134 via the ball 156, causing the lever 134 to rotate counterclockwise.

[0085] On the other hand, an opening is formed at the end of the slider 160, and a ball 162 is positioned inside the opening. The shoulder portion 160A of the slider 160 collides with the wall surrounding the button 140. This prevents the slider 160 from falling off. When the button 140 is pressed, the lever 134 rotates clockwise, releasing the capture state of the sample cartridge 72.

[0086] Figures 13 and 14 show the operation of the capture mechanism 132. Before the connection between the workbench 30 and the relay platform 116 is formed, the button 140 is operated. This causes the operating force 144 to exceed the elastic force 142, releasing the hook. In this state, the connection is formed, that is, the tip of the sample cartridge is housed in the containment section. After that, when the hand is released from the button 140, the capture state of the sample cartridge 72 is reformed by the action of the elastic force 142, as shown in Figure 14.

[0087] After the capture state is established, the workbench 30 and the relay table 116 are separated from each other. This completes the transfer of the sample cartridge from the workbench 30 to the relay table 116. Subsequently, the sample cartridge 72 is transported by the relay table 116, which is holding the sample cartridge 72. With the leading edge of the sample cartridge 72 held by the relay table 116, the rear end of the sample cartridge 72 is exposed. The rear end is then inserted into a processing holder or an observation holder.

[0088] Next, the transfer of the sample cartridge from the relay stage to the TEM holder (transmission electron microscope holder) will be explained using Figures 15 to 17. Figure 15 shows a base 166 for the TEM holder. The base 166 has a base 168. The relay stage 116 is fixed on the base 168. The base 166 has members that hold and guide the TEM holder.

[0089] Figure 16 shows a sample cartridge 72 held on a relay platform 116. The rear end portion of the sample cartridge 72 is exposed. The tip portion 170 of the TEM holder 164 is provided with a holding structure to hold the rear end portion. For example, as the TEM holder 164 moves forward, the rear end portion is inserted into the holding structure, thereby transferring the sample cartridge to the holding structure. The height of the sample cartridge on the base 168 is the same as the height of the holding structure on the TEM holder.

[0090] Figure 17 shows the sample cartridge 72 held by the tip portion 170. When the sample cartridge 72 is being transferred, a non-capture state is formed. That is, the lever is rotated clockwise. This causes the hook formed on the tip portion 134A to detach from the notch 97 formed in the frame.

[0091] The above-mentioned relay stand protects the sample cartridge. Furthermore, it facilitates the attachment, detachment, and transport of the sample cartridge. [Explanation of Symbols]

[0092] 10,30 Workbench, 12A,12B,12C,72 Sample cartridge, 14,74 Sample stage, 18,90 Sample support plate, 20,116 Intermediate stage, 34 Holding structure, 42 Release mechanism, 60,62 Push-up pin, 90 Spacer, 92,94 Pressing piece, 108 Through hole, 120 Holding part, 132 Capture mechanism.

Claims

1. A workbench body for holding a sample cartridge, which includes a main body on which a sample support plate is placed and a pressing member that applies a pressing force to the sample support plate to restrain it, A release mechanism that directly or indirectly contacts the pressing member and applies a release force to the pressing member that is opposed to the pressing force, Includes, The pressing member is a leaf spring having a fixed portion that is fixed to the main body and an unfixed portion that is connected to the fixed portion. The release mechanism applies a release force to the non-fixed portion of the leaf spring, which raises the non-fixed portion. A workbench characterized by the following features.

2. In the workbench according to claim 1, The aforementioned fixing part is a part that is fixed to the main body by a screw. A workbench characterized by the following features.

3. A workbench body for holding a sample cartridge, which includes a main body on which a sample support plate is placed and a pressing member that applies a pressing force to the sample support plate to restrain it, A release mechanism that directly or indirectly contacts the pressing member and applies a release force to the pressing member that is opposed to the pressing force, Includes, The pressing member has at least one pressing piece, The release mechanism has at least one operator, The at least one pressing piece has a fixed portion that is fixed to the main body and a non-fixed portion that is connected to the fixed portion. The at least one operator applies the release force to the non-fixed portion, The aforementioned at least one operator is at least one push-up pin. A workbench characterized by the following features.

4. A workbench body for holding a sample cartridge, which includes a main body on which a sample support plate is placed and a pressing member that applies a pressing force to the sample support plate to restrain it, A release mechanism that directly or indirectly contacts the pressing member and applies a release force to the pressing member that is opposed to the pressing force, Includes, The pressing member has at least one pressing piece, The release mechanism has at least one operator, The at least one pressing piece has a fixed portion that is fixed to the main body and a non-fixed portion that is connected to the fixed portion. The at least one operator applies the release force to the non-fixed portion, The sample cartridge has a sample stage comprising the main body on which the sample support plate is placed, At least one through hole is formed in the sample stage. When the release force is applied to the non-fixed portion, the at least one operator passes through the at least one through hole. A workbench characterized by the following features.

5. A workbench body for holding a sample cartridge, which includes a main body on which a sample support plate is placed and a pressing member that applies a pressing force to the sample support plate to restrain it, A release mechanism that directly or indirectly contacts the pressing member and applies a release force to the pressing member that is opposed to the pressing force, Includes, The pressing member has at least one pressing piece, The release mechanism has at least one operator, The at least one pressing piece has a fixed portion that is fixed to the main body and a non-fixed portion that is connected to the fixed portion. The at least one operator applies the release force to the non-fixed portion, The release mechanism is A handle operated by the user, A motion conversion mechanism that converts the motion of the handle into the motion of the at least one operator, including, A workbench characterized by the following features.

6. In the workbench according to claim 1, The sample cartridge includes a spacer provided between the pressing member and the sample support plate. The release mechanism indirectly applies the release force to the pressing member via the spacer, thereby creating a gap between the spacer and the sample support plate. A workbench characterized by the following features.

7. In the workbench according to claim 1, The release mechanism directly applies the release force to the pressing member, thereby creating a gap between the pressing member and the sample support plate. A workbench characterized by the following features.

8. In the workbench according to claim 1, The aforementioned workbench body is A housing section for housing the aforementioned sample cartridge, A first surface parallel to the central axis of the storage section, which functions as the bottom surface when the workbench is in an upright position, A second surface inclined with respect to the central axis of the housing, which functions as the bottom surface when the workbench is in an inclined position, Includes, When the workbench has the inclined position, the entrance to the storage compartment faces diagonally upward. A workbench characterized by the following features.

9. A relay station for receiving sample cartridges from a workbench, The aforementioned workbench is A workbench body for holding the sample cartridge, which includes a pressing member that applies a pressing force to restrain the sample cartridge against the sample support plate, A release mechanism that directly or indirectly contacts the pressing member and applies a release force to the pressing member that is opposed to the pressing force, Includes, The sample cartridge has a front portion including the sample support plate and a rear portion opposite to the front portion. The workbench has a first housing section that accommodates the rear portion, The aforementioned relay platform is With the rear portion held on the workbench, a second housing portion accommodates the front portion, With the front portion housed in the second housing, a capture mechanism for capturing the sample cartridge is provided. A relay platform characterized by including [this].

10. In the relay platform according to claim 9, The second storage section is provided at the same height as the first storage section. A relay platform characterized by the following features.

11. In the relay platform according to claim 9, The workbench includes a second positioning structure connected to a first positioning structure, A relay platform characterized by the following features.

12. In the relay platform according to claim 11, The first positioning structure has one of a convex structure and a concave structure that is coupled thereto. The second positioning structure has the other of the convex structure and the concave structure. A relay platform characterized by the following features.

13. In the relay platform according to claim 9, The aforementioned capture mechanism is A control component operated by the user, A lever having a hook for capturing the sample cartridge, A mechanism for transmitting the operating force applied to the operating member to the lever, A relay platform characterized by including [this].

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