Holding device

Abstract

To provide a retainer device capable of setting respective drivers to substantially equal resistance values while suppressing the drivers connected to a plurality of internal resistances from getting congested.SOLUTION: A retainer device comprises a plate-like member 10 which has a first surface S1 orthogonal to a first direction and a second surface S2 located on the opposite side from the first surface S1; a plurality of internal resistances formed on the plate-like member 10; and a plurality of drivers formed on the plate-like member 10 and extending in parallel with the first surface S1, wherein each driver comprises an integration line 81 and a plurality of branch lines 82, 83, 84, and 85 branching off from a branch point 81A provided at one end of the integration line 81, and end parts of the respective branch lines 82, 83, 84, and 85 on the opposite sides from the branch point 81A are electrically connected to respective different internal resistances.SELECTED DRAWING: Figure 11

Description

Technical Field

[0001] The present disclosure relates to a holding device.

Background Art

[0002] As a holding device for holding a wafer when manufacturing a semiconductor, an electrostatic chuck described in Japanese Patent No. 6571880 (hereinafter referred to as Patent Document 1) is used. This electrostatic chuck includes a ceramic plate, a temperature measuring resistor provided inside the ceramic plate, and a driver for a temperature measuring resistor that constitutes a power supply path for the temperature measuring resistor.

[0003] In the fourth embodiment of Patent Document 1, a so-called cross-link type driver is adopted as the driver for the temperature measuring resistor. That is, the driver for the temperature measuring resistor includes a plurality of first conductive lines and a plurality of second conductive lines, and each of the first conductive lines and each of the second conductive lines are both electrically connected to a plurality of temperature measuring resistors. Here, the combination of the first conductive line and the second conductive line electrically connected to the temperature measuring resistor is different for each temperature measuring resistor. Therefore, by sequentially selecting the combination of the first conductive line and the second conductive line to which a voltage is applied from the power supply, temperature measurement can be performed using each individual temperature measuring resistor.

[0004] According to the cross-link type driver as described above, compared with the case where a pair of conductive lines is provided for one temperature measuring resistor, an individual power supply path to each temperature measuring resistor can be configured with a smaller number of conductive lines. As a result, it becomes easier to form a wider line width for each conductive line and reduce the resistance value of each conductive line included in the driver for the temperature measuring resistor. Therefore, the resistance value of the temperature measuring resistor can be made relatively larger than the resistance value of each conductive line, and the accuracy of temperature measurement based on the resistance value of the temperature measuring resistor can be improved.

Prior Art Documents

Patent Documents

[0005] [Patent Document 1] Patent No. 6571880 [Overview of the Initiative] [Problems that the invention aims to solve]

[0006] When configuring a cross-link type driver as described above, it is preferable that the resistance values ​​of each conductive line be approximately the same in order to make the measurement environment of multiple temperature-sensing resistors connected to the same conductive line approximately identical. To achieve this, it is essential to avoid the dense arrangement of multiple conductive lines and to ensure design flexibility for each conductive line.

[0007] This disclosure was completed based on the circumstances described above, and aims to provide a holding device that can set the resistance value of each driver to be approximately the same while suppressing the crowding of drivers connected to multiple internal resistors. [Means for solving the problem]

[0008] The holding device of the present disclosure comprises a plate-shaped member having a first surface perpendicular to a first direction and a second surface located opposite to the first surface; a plurality of internal resistors formed on the plate-shaped member; and a plurality of drivers formed on the plate-shaped member and extending parallel to the first surface, wherein each driver comprises an integration line and a plurality of branch lines branching from a branch point provided at one end of the integration line, and the end of each branch line opposite to the branch point is electrically connected to a different internal resistor. [Effects of the Invention]

[0009] According to this disclosure, it is possible to provide a holding device that can suppress the crowding of drivers connected to multiple internal resistors while setting the resistance value of each driver to be approximately the same. [Brief explanation of the drawing]

[0010] [Figure 1] Figure 1 is a schematic perspective view showing the external configuration of an electrostatic chuck according to an embodiment. [Figure 2] Figure 2 is a schematic plan view of an electrostatic chuck. [Figure 3] Figure 3 is a schematic cross-sectional view of an electrostatic chuck. [Figure 4] Figure 4 is a schematic diagram illustrating a cross-link type driver. [Figure 5] Figure 5 is a schematic diagram showing the configuration of multiple first drivers in the XY plane. [Figure 6] Figure 6 is a schematic diagram of a Type A first driver in which branch lines and integration lines are provided at equiangled angles from the branching point. [Figure 7] Figure 7 is an enlarged view of Figure 6, showing the slit. [Figure 8] Figure 8 is a schematic diagram of a Type B first driver having one composite branch line. [Figure 9] Figure 9 is a schematic diagram of a Type C first driver having two composite branch lines. [Figure 10] Figure 10 is a schematic diagram showing the configuration of a resistance thermometer in the XY plane. [Figure 11] Figure 11 is a schematic diagram showing the arrangement of the resistance thermometer and the first driver in the XY plane. [Modes for carrying out the invention]

[0011] [Description of Embodiments in this Disclosure] First, embodiments of this disclosure will be listed and described. (1) The holding device of the present disclosure comprises a plate-like member having a first surface perpendicular to a first direction and a second surface located opposite to the first surface; a plurality of internal resistors formed on the plate-like member; and a plurality of drivers formed on the plate-like member and extending parallel to the first surface, each of which comprises an integration line and a plurality of branch lines branching from a branch point provided at one end of the integration line, and the end of each branch line opposite to the branch point is electrically connected to a different internal resistor.

[0012] With such a configuration, in the cross-link power supply path where each driver is electrically connected to a plurality of internal resistors, it is easy to set the resistance values of each branch line to be substantially the same. Also, it is easy to set the resistance values of each driver to be substantially the same.

[0013] (2) In the holding device described in (1), it is preferable that at least one of the drivers is configured such that the plurality of branch lines and the integrated line extend from the branch point at equal angles.

[0014] With such a configuration, it is possible to suppress the concentration of a plurality of branch lines around the branch point.

[0015] (3) In the holding device described in (1) or (2), it is preferable that a slit for separating two adjacent branch lines or between an adjacent branch line and the integrated line is formed at a position near the branch point in at least one of the drivers. [[ID=,16]]

[0016] With such a configuration, it is possible to clarify the branching between two adjacent branch lines or between an adjacent branch line and the integrated line. Therefore, it is easy to independently set the resistance value of each branch line.

[0017] (4) In the holding device described in any one of (1) to (3), it is preferable that at least one of the branch lines is a composite branch line, and the composite branch line includes a sub-integrated line extending from the branch point and a plurality of sub-branch lines branching from a sub-branch point provided at an end of the sub-integrated line opposite to the branch point, and ends of each of the sub-branch lines opposite to the sub-branch point are electrically connected to different ones of the internal resistors.

[0018] With such a configuration, by providing a composite branch line and branching the driver in two stages, it is possible to further suppress the concentration of a plurality of branch lines.

[0019] (5) In the holding device described in any of (1) to (4), the plurality of drivers is composed of a plurality of first drivers and a plurality of second drivers, wherein the plurality of first drivers are arranged in the same position with respect to the first direction, and the plurality of second drivers are arranged in the same position with respect to the first direction and are positioned on the second surface side of the plurality of first drivers.

[0020] This configuration makes it possible to suppress the congestion of power supply paths for multiple internal resistors.

[0021] (6) In the holding device described in any of (1) to (5), it is preferable that the end of the integrated line of each driver opposite to the branching point is located on the outer circumference side of the plate-shaped member.

[0022] With this configuration, power supply terminals that electrically connect each driver to an external power source can be placed on the outer periphery of the plate-shaped member.

[0023] [Details of the embodiments of this disclosure] Specific examples of embodiments of this disclosure will be described with reference to Figures 1 to 11. This disclosure is not limited to these examples, but is intended to include all modifications within the meaning and scope of the claims, as indicated by the claims. In the following description, for multiple identical components, only some components may be reference-labeled, while others may be omitted. In this specification, the configuration of the holding device is described with the positive Z-axis direction as upward, the negative Z-axis direction as downward, and the XY-plane direction as horizontal; however, the actual usage of the holding device may involve different configurations. Furthermore, in this specification, "orthogonal" includes configurations that are perceived as substantially orthogonal, and "parallel" includes configurations that are perceived as substantially parallel.

[0024] <Electrostatic Chuck> The holding device of this disclosure is an electrostatic chuck 1 capable of adsorbing and holding an object such as a semiconductor wafer or a glass substrate (hereinafter referred to as "wafer W"). The electrostatic chuck 1 is attached, for example, to a processing chamber of a semiconductor manufacturing apparatus (not shown) and used to perform various processes (film deposition, etching, etc.) on the wafer W using plasma.

[0025] As shown in Figure 1, the electrostatic chuck 1 comprises a plate-shaped member 10 and a base member 20. The plate-shaped member 10 and the base member 20 are joined by a joint 30. The joint 30 is made of an adhesive such as a silicone resin, acrylic resin, or epoxy resin. The electrostatic chuck 1 is capable of holding a wafer W by electrostatic attraction.

[0026] The base member 20 is a disc-shaped member, and can be formed into a shape with, for example, a diameter of about 340 mm and a thickness of about 35 mm. The base member 20 is mainly composed of conductive materials such as aluminum and aluminum alloy. Here, "main component" refers to the component with the highest content (weight percentage) (the same applies hereinafter). As shown in Figure 3, the base member 20 has a third surface S3 located on the plate-shaped member 10 side and a fourth surface S4 located on the opposite side of the third surface S3. The third surface S3 is located on the upper side of the base member 20, and the fourth surface S4 is located on the lower side of the base member 20. The third surface S3 of the base member 20 is joined to the second surface S2 of the plate-shaped member 10, which will be described later, by a joint 30.

[0027] A refrigerant channel 21 is provided inside the base member 20. The refrigerant channel 21 is connected to a refrigerant circulation device (not shown). The refrigerant circulation device is configured to circulate a refrigerant such as a fluorine-based inert liquid or water through the refrigerant channel 21. When refrigerant flows through the refrigerant channel 21, the base member 20 is cooled, and the plate-shaped member 10 is cooled by heat transfer (heat dissipation) between the base member 20 and the plate-shaped member 10 via the joint 30, thereby cooling the wafer W held on the first surface S1 of the plate-shaped member 10, which will be described later. This allows the temperature of the wafer W to be controlled.

[0028] <Plate-shaped member> The plate-shaped member 10 is generally disc-shaped and can be formed into a shape with, for example, a diameter of about 300 mm and a thickness of about 5 mm. The plate-shaped member 10 is an insulating substrate and is formed from, for example, ceramics mainly composed of aluminum nitride (AlN) or alumina (Al2O3).

[0029] As shown in Figure 1, a step is provided on the outer circumference of the upper portion of the plate-shaped member 10, and the upper surface of the inner portion 10A of the plate-shaped member 10 is higher than the upper surface of the outer portion 10B of the plate-shaped member 10. The upper surface of the inner portion 10A is a first surface S1 perpendicular to the Z-axis direction (an example of a first direction). The first surface S1 is a circular plane and functions as an adsorption surface for holding the wafer W. The upper surface of the outer portion 10B of the plate-shaped member 10 is configured to engage with, for example, a jig (not shown) for fixing a focus ring or an electrostatic chuck 1.

[0030] As shown in Figure 3, in the plate-shaped member 10, the surface opposite to the first surface S1 (i.e., the bottom surface) is designated as the second surface S2. The second surface S2 is joined to the base member 20 via a joint 30.

[0031] A chuck electrode 40 made of a conductive material (e.g., tungsten, molybdenum, platinum, etc.) is positioned inside the inner portion 10A of the plate-shaped member 10. The shape of the chuck electrode 40 in the Z-axis direction is, for example, approximately circular. When a voltage is applied to the chuck electrode 40 from a power source (not shown), an electrostatic attraction force is generated, and the wafer W is attracted and fixed to the first surface S1 of the plate-shaped member 10 by this electrostatic attraction force.

[0032] Inside the plate-shaped member 10 are a heater 50, a resistance thermometer 60 (an example of internal resistance), a driver 70 for the resistance thermometer (an example of a driver), and various vias, all of which are made of conductive material (e.g., tungsten, molybdenum, platinum, etc.). In this embodiment, the resistance thermometer 60 is positioned below the chuck electrode 40, and the heater 50 is positioned below the resistance thermometer 60.

[0033] The plate-shaped member 10 with the above configuration can be manufactured, for example, by creating multiple ceramic green sheets, processing a predetermined ceramic green sheet by forming via holes, filling it with metallizing paste, printing, etc., heat-pressing these ceramic green sheets together, cutting or other processing, and then firing them.

[0034] In this embodiment, as shown in Figure 2, the inner portion 10A of the plate-shaped member 10 is virtually divided into a plurality of first zones 11 arranged horizontally (in a direction perpendicular to the Z-axis direction). More specifically, in a view along the Z-axis, the inner portion 10A of the plate-shaped member 10 is divided into a plurality of virtual annular regions (however, only the region including the center point P1 is a circular region) by a plurality of concentric first boundary lines BL1 centered on the center point P1 of the first surface S1, and each annular region is further divided into first zones 11 arranged circumferentially on the first surface S1 by a plurality of second boundary lines BL2 extending radially on the first surface S1. The plurality of first zones 11 are formed to demarcate the portion of the plate-shaped member 10 on which the wafer W is placed.

[0035] As shown in Figure 3, each of the multiple first zones 11 is equipped with a heater 50 and a resistance thermometer 60. The area outside the first zone 11 (corresponding to the outer part 10B) is not equipped with a heater 50 or a resistance thermometer 60. With this configuration, the temperature of the wafer W placed on the inner part 10A can be controlled.

[0036] Unlike this embodiment, a dedicated heater or resistance thermometer may be provided in the area outside the first zone 11 to control the temperature of a component (e.g., a focus ring) placed on the outer portion 10B. Alternatively, an electrode member such as a chuck electrode may be provided in the area outside the first zone 11.

[0037] <Resistance thermometer> Each first zone 11 has one resistance thermometer 60. The resistance thermometer 60 comprises a plurality (three in this embodiment) of resistors 61 arranged in series along the Z-axis. As shown in Figure 10, each resistor 61 comprises a thin wire-shaped resistance portion 61A and pad portions 61B located at both ends of the resistance portion 61A, and extends horizontally. The pad portions 61B are approximately circular in shape when viewed in the Z-axis direction, and their width is larger than that of the resistance portion 61A. In this embodiment, the configuration (shape, dimensions, position in the XY plane, etc.) of each resistor 61 is the same. Therefore, each resistor 61 is arranged superimposed when viewed in the Z-axis direction.

[0038] <Driver for resistance thermometer, first driver, second driver> As shown in Figure 3, the resistance thermometer driver 70 is part of the configuration for connecting the resistance thermometer 60 to the power supply terminal 13. The resistance thermometer driver 70 extends parallel to the first surface S1. The resistance thermometer driver 70 comprises a first driver 71 that is electrically connected to the resistor 61 located closest to the first surface S1 (upper side), and a second driver 72 that is electrically connected to the resistor 61 located closest to the second surface S2 (lower side). In this embodiment, the resistance thermometer 60 is positioned between the first driver 71 and the second driver 72 in the Z-axis direction.

[0039] Figure 4 is a schematic diagram illustrating the electrical connection between the resistance thermometer 60 and the resistance thermometer driver 70 in the XY plane. The resistance thermometer driver 70 in this embodiment is of the cross-link type. That is, multiple resistance thermometers 60 are connected to one resistance thermometer driver 70. For example, in Figure 4, each first driver 71 is connected to multiple resistance thermometers 60 arranged in the left-right direction shown in the figure. Each second driver 72 is connected to multiple resistance thermometers 60 arranged in the up-down direction shown in the figure. Therefore, when a certain resistance thermometer 60 is selected, the combination of the first driver 71 and the second driver 72 connected to that resistance thermometer 60 is determined. Thus, by selectively applying voltage to each resistance thermometer 60 via the resistance thermometer driver 70, temperature measurement by each resistance thermometer 60 becomes possible.

[0040] The cross-link type resistance thermometer driver 70 described above has a branching structure to electrically connect multiple resistance thermometers 60 to one power supply terminal 13. Below, the branching structure of the resistance thermometer driver 70 according to this embodiment will be described using the first driver 71 as a representative example. Since the branching structure of the second driver 72 can be configured in the same way as the first driver 71, a detailed explanation of the branching structure of the second driver 72 will be omitted.

[0041] Figure 5 shows a magnified view in the Z direction of a portion of the multiple first drivers 71 provided on the plate-shaped member 10. The multiple first drivers 71 include a type A first driver 80, a type B first driver 90, and a type C first driver 100, each having a different shape.

[0042] <Integration line, branching point, branch line> Figure 6 is an enlarged view of Figure 5, showing the Type A first driver 80. The Type A first driver 80 comprises an integrated line 81 and four branch lines 82, 83, 84, and 85 that branch off from a branch point 81A provided at one end of the integrated line 81. The four branch lines 82, 83, 84, and 85 are arranged in this order counterclockwise from the integrated line 81 with the branch point 81A as the center.

[0043] The other end of the integration line 81, that is, the end opposite to the branching point 81A, is designated as the power supply end 81B. The power supply end 81B is located on the outer part 10B of the plate-shaped member 10. The power supply end 81B is electrically connected to the power supply terminal 13 via vias or electrode pads. As shown in Figure 3, the power supply terminal 13 is housed in a terminal hole 22 provided in the electrostatic chuck 1. The terminal hole 22 extends in the Z-axis direction from the fourth surface S4 of the base member 20 to the interior of the plate-shaped member 10. The power supply terminal 13 is connected to a power source (not shown).

[0044] As shown in Figure 6, the ends of each branch line 82, 83, 84, and 85 opposite the branch point 81A are designated as resistance-side ends 82A, 83A, 84A, and 85A. The resistance-side ends 82A, 83A, 84A, and 85A are each located within different first zones 11. As shown in Figure 11, the resistance-side ends 82A, 83A, 84A, and 85A are electrically connected to the pad portions 61B of different resistance thermometers 60 via vias or the like.

[0045] <Regarding the dimensions and resistance values ​​of conductive paths> It is known that the resistance of a conductive path increases with increasing length and decreases with decreasing cross-sectional area. Furthermore, when a conductive path is made of a material with a certain thickness, such as metal foil, the resistance of the conductive path increases as the width of the conductive path decreases. In other words, since the integrated line 81 and branch lines 82, 83, 84, 85, etc. in this embodiment are usually formed with layers of approximately constant thickness, the resistance increases with increasing length and the resistance increases as the line width decreases.

[0046] In the Type A first driver 80, the branch line 85 has a longer length from the branch point 81A to the resistor end 85A compared to the other branch lines 82, 83, and 84. The wire width of branch line 85 is larger compared to the other branch lines 82, 83, and 84. With this configuration, based on the relationship between the dimensions of the conductive path and the resistance value described above, it is possible to make the resistance values ​​of each branch line 82, 83, 84, and 85 approximately the same. Furthermore, since the same power supply path is provided from the branch point 81A to the power supply terminal 13, the measurement environment of the resistance thermometer 60 connected to each branch line 82, 83, 84, and 85 can be made as similar as possible.

[0047] As shown in Figure 6, in the Type A first driver 80, the four branch lines 82, 83, 84, 85 and the integrating line 81 extend from the branching point 81A at equal angles. The portions of the four branch lines 82, 83, 84, 85 and the integrating line 81 on the branching point 81A side extend in a straight line from the branching point 81A. The directions in which these portions on the branching point 81A side extend are shown in Figure 6 as arrows A1, A2, A3, A4, and A5 extending from the branching point 81A, respectively. In this case, the angle between adjacent arrows A1, A2, A3, A4, and A5 (for example, arrows A1 and A2) is approximately 72 degrees. With this configuration, the density of branch lines 82, 83, 84, and 85 around the branching point 81A can be suppressed. Therefore, it becomes easier to adjust the line width of each branch line 82, 83, 84, and 85.

[0048] <Slit> As shown in Figure 7, in the Type A first driver 80, slits 82B1, 82B2, 83B1, 83B2, 84B1, 84B2, 85B1, and 85B2 are formed on both sides of the branch lines 82, 83, 84, and 85 near the branch point 81A. As a result, the line width of the end portion of each branch line 82, 83, 84, and 85 on the branch point 81A side is smaller than the line width of the portion of each branch line 82, 83, 84, and 85 further away from the branch point 81A.

[0049] Slit 82B1 separates adjacent branch lines 82 and integration line 81. Slits 82B2 and 83B1 separate two adjacent branch lines 82 and 83. Slits 83B2 and 84B1 separate two adjacent branch lines 83 and 84. Slits 84B2 and 85B1 separate two adjacent branch lines 84 and 85. Slit 85B2 separates adjacent branch line 85 and integration line 81. With this configuration, the branching of each branch line 82, 83, 84, 85 and integration line 81 becomes clear, and it becomes easier to independently set the resistance values ​​of each branch line 82, 83, 84, 85.

[0050] Figure 8 is an enlarged view of Figure 5, showing the Type B first driver 90. The Type B first driver 90 comprises an integrated line 91 and two branch lines 92 and 93 that branch off from a branch point 91A provided at one end of the integrated line 91. The end of the integrated line 91 opposite to the branch point 91A is the power supply side end 91B. The power supply side end 91B is located on the outer part 10B of the plate-shaped member 10. The power supply side end 91B is electrically connected to the power supply terminal 13 via vias or electrode pads. The branch line 92 extends upward from the branch point 91A as shown in the figure. The end of the branch line 92 opposite to the branch point 91A is provided with a resistance side end 92A. The resistance side end 92A is connected to the resistance thermometer 60 via vias or the like.

[0051] <Combined branch line, sub-integrated line, sub-branch point, sub-branch line> Branch line 93 extends to the left in the diagram from branch point 91A. Branch line 93 is a composite branch line that further branches into three at its tip. Specifically, branch line 93 comprises a sub-integration line 94 extending from branch point 91A, and three sub-branch lines 95, 96, and 97 branching from a sub-branch point 94A located at the end of the sub-integration line 94 opposite branch point 91A.

[0052] Sub-branch line 95 extends generally upward from sub-branch point 94A. Sub-branch line 96 extends downward to the left from sub-branch point 94A. Sub-branch line 97 extends downward to the right from sub-branch point 94A. The ends of each sub-branch line 95, 96, and 97 opposite sub-branch point 94A are designated as resistance-side ends 95A, 96A, and 97A. Resistance-side ends 95A, 96A, and 97A are electrically connected to different resistance thermometers 60 via vias or the like.

[0053] In the Type B first driver 90, a slit 94B is formed at the end of the sub-integration line 94 of the branch line 93 on the branch point 91A side. The slit 94B separates the sub-integration line 94 from the integration line 91. This clearly defines the branch between the sub-integration line 94 and the integration line 91, and allows the resistance value of the sub-integration line 94 to be set appropriately.

[0054] Figure 9 is an enlarged view of Figure 5, showing the Type C first driver 100. The Type C first driver 100 comprises an integrated line 101 and two branch lines 102 and 103 that branch off from a branch point 101A provided at one end of the integrated line 101. The end of the integrated line 101 opposite the branch point 101A is the power supply side end 101B. The power supply side end 101B is located on the outer part 10B of the plate-shaped member 10. The power supply side end 101B is electrically connected to the power supply terminal 13 via vias or electrode pads. Branch line 102 extends from branch point 101A in the direction shown to the upper right. Branch line 103 extends from branch point 101A in the direction shown to the upper left.

[0055] The branch line 102 is a composite branch line that further branches into two at its tip. Specifically, the branch line 102 comprises a sub-integration line 104 extending from branch point 101A, and two sub-branch lines 105 and 106 branching from a sub-branch point 104A located at the end of the sub-integration line 104 opposite to branch point 101A. Sub-branch line 105 extends from sub-branch point 104A in the direction of the lower right in the figure. Sub-branch line 106 extends from sub-branch point 104A in the direction of the upper left in the figure. The ends of each sub-branch line 105 and 106 opposite to sub-branch point 104A are designated as resistance-side ends 105A and 106A. The resistance-side ends 105A and 106A are electrically connected to different resistance thermometers 60 via vias or the like.

[0056] In the Type C first driver 100, slits 105B and 106B are formed at the ends of the sub-branch lines 105 and 106 of the branch line 102 on the sub-branch point 104A side. Slit 105B separates the sub-integration line 104 from the sub-branch line 105. Slit 106B separates the sub-integration line 104 from the sub-branch line 106. This clearly defines the branching between the sub-integration line 104 and each of the sub-branch lines 105 and 106, and allows for appropriate setting of the resistance values ​​of each of the sub-branch lines 105 and 106.

[0057] The branch line 103 is a composite branch line that further branches into two at its tip. Specifically, the branch line 103 comprises a sub-integration line 107 extending from branch point 101A, and two sub-branch lines 108 and 109 branching from a sub-branch point 107A located at the end of the sub-integration line 107 opposite to branch point 101A. Sub-branch line 108 extends from sub-branch point 107A in the direction of the lower right in the figure. Sub-branch line 109 extends from sub-branch point 107A in the direction of the upper left in the figure. The ends of each sub-branch line 108 and 109 opposite to sub-branch point 107A are designated as resistance-side ends 108A and 109A. The resistance-side ends 108A and 109A are electrically connected to different resistance thermometers 60 via vias or the like.

[0058] In the Type C first driver 100, slits 108B and 109B are formed at the ends of the sub-branch lines 108 and 109 of the branch line 103 on the sub-branch point 107A side. Slit 108B separates the sub-integration line 107 from the sub-branch line 108. Slit 109B separates the sub-integration line 107 from the sub-branch line 109. This clearly defines the branching between the sub-integration line 107 and each of the sub-branch lines 108 and 109, and allows for appropriate setting of the resistance values ​​of each of the sub-branch lines 108 and 109.

[0059] As described above, it is preferable that the multiple resistance thermometer drivers 70 are configured to have approximately the same resistance value by adjusting their respective lengths and line widths. With such a configuration, the measurement environment of the resistance thermometer 60 connected to each resistance thermometer driver 70 can be made as similar as possible. In this embodiment, the A-type first driver 80, the B-type first driver 90, and the C-type first driver 100, which are included in the multiple first drivers 71, are configured to have approximately the same resistance value by appropriately adjusting their lengths and line widths, as shown in Figure 5. For example, compared to the A-type first driver 80 and the C-type first driver 100, the B-type first driver 90 has a longer distance from the end on the power supply terminal 13 side (power supply side end 91B) to the end on the resistance thermometer 60 side (resistance side ends 92A, 95A, 96A, 97A), so the overall line width is set to be thicker than that of the A-type first driver 80 and the C-type first driver 100.

[0060] <Effects of the Embodiment> As described above, the holding device (electrostatic chuck 1) of the embodiment comprises a plate-shaped member 10 having a first surface S1 perpendicular to a first direction (Z-axis direction) and a second surface S2 located on the opposite side of the first surface S1; a plurality of internal resistors (resistance thermometers 60) formed on the plate-shaped member 10; and a plurality of drivers (drivers for resistance thermometers 70) formed on the plate-shaped member 10 and extending parallel to the first surface S1. The plurality of drivers include a first driver of type A 80, a first driver of type B 90, and a first driver of type C 100. The Type A first driver 80 comprises an integrated line 81 and a plurality of branch lines 82, 83, 84, and 85 branching from a branch point 81A provided at one end of the integrated line 81, with each branch line 82, 83, 84, and 85 having an end opposite to the branch point 81A (resistive end 82A, 83A, 84A, and 85A) electrically connected to a different internal resistance. The Type B first driver 90 comprises an integrated line 91 and a plurality of branch lines 92 and 93 branching from a branch point 91A provided at one end of the integrated line 91, with each branch line 92 and 93 having an end opposite to the branch point 91A (resistive end 92A, 95A, 96A, and 97A) electrically connected to a different internal resistance. The Type C first driver 100 comprises an integrated line 101 and a plurality of branch lines 102, 103 branching from a branch point 101A provided at one end of the integrated line 101, with each branch line 102, 103 having an end opposite to the branch point 101A (resistive end 105A, 106A, 108A, 109A) that is electrically connected to a different internal resistance.

[0061] With this configuration, in a cross-link type power supply path where the Type A first driver 80 is electrically connected to multiple internal resistors, it is easy to set the resistance values ​​of each branch line 82, 83, 84, and 85 to be approximately the same. In a cross-link type power supply path where the Type B first driver 90 is electrically connected to multiple internal resistors, it is easy to set the resistance values ​​of each branch line 92 and 93 to be approximately the same. In a cross-link type power supply path where the Type C first driver 100 is electrically connected to multiple internal resistors, it is easy to set the resistance values ​​of each branch line 102 and 103 to be approximately the same. Furthermore, it is easy to set the resistance values ​​of the Type A first driver 80, the Type B first driver 90, and the Type C first driver 100 to be approximately the same.

[0062] In this embodiment, the first driver of type A 80 is configured such that a plurality of branch lines 82, 83, 84, 85 and an integration line 81 extend from the branch point 81A at equal angles.

[0063] This configuration makes it possible to suppress the concentration of multiple branch lines 82, 83, 84, and 85 around branch point 81A.

[0064] In this embodiment, the first driver of type A 80 has slits 82B1, 82B2, 83B1, 83B2, 84B1, 84B2, 85B1, and 85B2 formed near the branch point 81A, separating two adjacent branch lines 82, 83, 84, 85 and the integration line 81.

[0065] With this configuration, it is possible to clearly distinguish between two adjacent branches from among the multiple branch lines 82, 83, 84, 85 and the integration line 81. Therefore, it is easy to independently set the resistance values ​​of each branch line 82, 83, 84, 85.

[0066] In this embodiment, at least one branch line 93 is a composite branch line, which comprises a sub-integration line 94 extending from a branch point 91A, and a plurality of sub-branch lines 95, 96, 97 branching from a sub-branch point 94A provided at the end of the sub-integration line 94 opposite to the branch point 91A, with each sub-branch line 95, 96, 97's end opposite to the sub-branch point 94A (resistive end 95A, 96A, 97A) being electrically connected to a different internal resistance.

[0067] With this configuration, by providing a composite branch line and branching the driver (Type B first driver 90) in two stages, the density of multiple branch lines 92 and 93 can be further suppressed.

[0068] In this embodiment, the plurality of drivers consist of a plurality of first drivers 71 and a plurality of second drivers 72, where the plurality of first drivers 71 are arranged at the same position in the first direction, and the plurality of second drivers 72 are arranged at the same position in the first direction and are positioned on the second surface S2 side of the plurality of first drivers 71.

[0069] This configuration makes it possible to suppress the congestion of power supply paths for multiple internal resistors.

[0070] In this embodiment, the ends of the integrated lines 81, 91, and 101 of each driver that are opposite the branching points 81A, 91A, and 101A (the power supply side ends 81B, 91B, and 101B) are located on the outer circumference of the plate-shaped member 10.

[0071] With this configuration, the power supply terminals 13 that electrically connect each driver to an external power source can be placed on the outer periphery of the plate-shaped member 10.

[0072] <Other Embodiments> (1) In the embodiment, the resistance thermometer 60 and the driver for the resistance thermometer 70 were arranged inside the plate-shaped member 10, but the internal resistance and at least a portion of the multiple drivers may be exposed on the first or second surface of the plate-shaped member. Also, in the embodiment, the plate-shaped member 10 was a single member, but the plate-shaped member may be formed by joining together multiple members (for example, a plate-shaped member of ceramics, a plate-shaped member of a composite material of ceramics and metal, or a metal member).

[0073] (2) In the embodiment, the resistance thermometer 60 had three resistors 61 arranged in the Z-axis direction, but the number of resistors in the internal resistance may be two or four or more. Also, the internal resistance may consist of one resistor.

[0074] (3) In this embodiment, a resistance thermometer 60 is exemplified as the internal resistance, but the internal resistance may be, for example, a heater.

[0075] (4) In the embodiment, each first driver 80, 90, 100 was connected to four resistance thermometers 60, but the number of internal resistors to which each driver is connected may be two or three, or five or more. In addition, each driver may be configured with an integration line and branch lines, and the shape of each driver may be changed as appropriate from the shape described in the embodiment. [Explanation of symbols]

[0076] 1…Electrostatic chuck 10…Plate-shaped member 10A…Inner part 10B…Outer part 11…First zone 13…Power supply terminal S1…First surface S2…Second surface BL1…First boundary line BL2…Second boundary line P1…Center point 20...Base component 21...Refrigerant flow path 22...Terminal hole S3...Third surface S4...Fourth surface 30…Joint part 40... Chuck electrode 50… Heater 60...Resistance thermometer 61...Resistance element 61A...Resistance wire section 61B...Pad section 70... Driver for resistance thermometer 71... First driver 72... Second driver 80...Type A 1st Driver 81...Integration line 81A...Branch point 81B...Power supply side end 82,83,84,85...Branch line 82A,83A,84A,85A...Resistor side end 82B1,82B2,83B1,83B2,84B1,84B2,85B1,85B2...Slit A1,A2,A3,A4,A5...Arrow line 90...Type B 1st driver 91...Integration line 91A...Branch point 91B...Power supply side end 92,93...Branch line 92A,95A,96A,97A...Resistor side end 94...Sub-integration line 94A...Sub-branch point 94B...Slit 95,96,97...Sub-branch line 95A,96A,97A...Resistor side end 100...Type C 1st driver 101…Integration line 101A…Branch point 101B…Power supply side end 102,103…Branch line 104…Sub-integration line 104A…Sub-branch point 105,106…Sub-branch line 105A,106A…Resistor side end 105B,106B…Slit 107…Sub-integration line 107A…Sub-branch point 108,109…Sub-branch line 108A,109A…Resistor side end 108B,109B…Slit

Claims

1. A plate-shaped member having a first surface perpendicular to a first direction and a second surface located on the opposite side of the first surface, Multiple internal resistances formed in the plate-shaped member, The plate-like member comprises a plurality of drivers formed on it and extending parallel to the first surface, Each of the drivers comprises an integration line and a plurality of branch lines that branch off from a branching point provided at one end of the integration line. Each of the aforementioned branch lines, the end opposite the branching point, is electrically connected to a different internal resistance. At least one of the aforementioned branch lines is a composite branch line, The composite branch line comprises a sub-integration line extending from the branch point, and a plurality of sub-branch lines branching from a sub-branch point provided at the end of the sub-integration line opposite to the branch point. A retaining device in which each of the aforementioned sub-branch lines has an end opposite to the sub-branch point that is electrically connected to a different internal resistance.

2. A plate-shaped member having a first surface perpendicular to the first direction and a second surface located on the opposite side of the first surface, Multiple internal resistances formed in the plate-shaped member, The plate-like member comprises a plurality of drivers formed on it and extending parallel to the first surface, Each of the drivers comprises an integration line and a plurality of branch lines that branch off from a branching point provided at one end of the integration line. Each of the aforementioned branch lines, the end opposite the branching point, is electrically connected to a different internal resistance. A holding device wherein at least one of the drivers has a slit formed near the branching point that separates two adjacent branch lines, or adjacent branch lines and the integration line.

3. The holding device according to claim 1 or 2, wherein at least one of the drivers is configured such that the plurality of branch lines and the integration line extend from the branch point at an equiangled angle.

4. The aforementioned plurality of drivers consist of a plurality of first drivers and a plurality of second drivers, The plurality of first drivers are arranged in the same position with respect to the first direction, The holding device according to claim 1 or claim 2, wherein the plurality of second drivers are arranged in the same position with respect to the first direction and are positioned on the second surface side of the plurality of first drivers.

5. The holding device according to claim 1 or claim 2, wherein the end of the integrated line of each driver opposite to the branching point is arranged on the outer circumference side of the plate-shaped member.

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