Laser surface treatment apparatus and laser surface treatment system

Abstract

This laser surface treatment device comprises, for example, a laser device that outputs a laser beam, an optical head that emits the laser beam output from the laser device onto the surface of an object, a detecting unit that detects a physical quantity that changes in accordance with the emission state of the laser beam, and a control unit that controls the power of the laser beam output from the optical head on the basis of the physical quantity detected by the detecting unit, the laser beam being emitted onto the surface to treat the surface. Further, this laser surface treatment system may include, as a detecting unit, an intensity detecting unit that detects the intensity of light from the surface or from a position closer to an optical head than the surface.

Description

Technical Field

[0001] The present invention relates to a laser surface treatment apparatus and a laser surface treatment system.

Background Art

[0002] Conventionally, a method of removing a coating film or an adherent on the surface of a structure by irradiating laser light has been known (for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In surface removal by irradiating laser light, for example, when there are irregularities on the surface, there is a risk that the reflected light of the irradiated laser light may travel in an unintended direction on the surface. Therefore, ensuring safety is an important issue.

[0005] Also, it would be beneficial to detect the operating state of each part, such as whether the laser light is being irradiated on the surface in the desired state and whether there is any abnormality inside the laser surface treatment apparatus, store it as data, notify it by communication, and improve it.

[0006] [[ID=4३]] Therefore, one of the problems of the present invention is to obtain an improved new laser surface treatment apparatus and a laser surface treatment system that can, for example, enhance safety or improve the irradiation state of laser light.

Means for Solving the Problems

[0007] The laser surface processing apparatus of the present invention comprises, for example, a laser device that outputs laser light, an optical head that irradiates the surface of an object with the laser light output from the laser device, a detection unit that detects a physical quantity that changes in response to the irradiation of the laser light, and a control unit that controls at least one of the power of the laser light output from the optical head and the irradiation position of the laser light on the surface based on the physical quantity detected by the detection unit, and performs surface processing by irradiating the surface with laser light.

[0008] The laser surface processing apparatus may include, as the detection unit, an intensity detection unit that detects the intensity of light from the surface or from a position closer to the optical head than the surface.

[0009] In the laser surface processing apparatus, the control unit may control the laser apparatus to reduce the output power of the laser light when the intensity of the light detected by the intensity detection unit is equal to or greater than a first threshold.

[0010] In the laser surface processing apparatus, the control unit may control the laser apparatus to reduce the output power of the laser light when the ratio of the light intensity detected by the intensity detection unit to the output power of the laser light is less than or equal to a second threshold.

[0011] The laser surface treatment apparatus may include a plurality of intensity detection units provided at positions separated from each other as the intensity detection unit.

[0012] In the laser surface processing apparatus, the sensors of the plurality of intensity detection units may be arranged such that the optical axis of the laser beam output from the optical head or a virtual line overlapping the optical axis is located between them.

[0013] In the laser surface processing apparatus, the control unit may control the laser device to reduce the output power of the laser light when the difference in light intensity detected by the two intensity detection units is greater than or equal to a third threshold.

[0014] The laser surface processing apparatus may include an area intensity detection unit that acquires a two-dimensional brightness image as the intensity detection unit.

[0015] The laser surface treatment apparatus may include a temperature detection unit as the detection unit for remotely detecting the temperature of the surface.

[0016] In the laser surface treatment apparatus, the control unit may control the laser apparatus to reduce the output power of the laser light when there is a point on the surface where the temperature exceeds a fourth threshold within a predetermined range.

[0017] In the laser surface treatment apparatus, the control unit may control the laser device to increase the output power of the laser light when there is a point on the surface within a predetermined range where the temperature falls below a fifth threshold.

[0018] The laser surface treatment apparatus can operate in a normal mode and a low-power mode in which the output power of the laser light is lower than that of the normal mode. The control unit may, when the laser surface treatment apparatus is operating in the low-power mode, control the laser apparatus to increase the output power of the laser light and return to the normal mode if there is a point in a predetermined range on the surface where the temperature falls below a fifth threshold.

[0019] The laser surface treatment apparatus may include a detection unit as the detection unit, which has a sensor attached to the housing of the optical head or the housing housing that houses the optical head.

[0020] The laser surface treatment apparatus may also include a detection unit having a sensor provided on a mounting mechanism that can be attached to a worker or an object.

[0021] In the laser surface processing apparatus, the optical head has a scanning mechanism that moves the spot of laser light on the surface by scanning the spot of laser light on the surface, and the control unit may control the operation of the scanning mechanism.

[0022] In the laser surface treatment apparatus, the optical head includes a diffractive optical element and a rotation mechanism that rotates the diffractive optical element to rotate the spot of the laser light on the surface, and the control unit may control the operation of the rotation mechanism.

[0023] The laser surface treatment system of the present invention includes, for example, a server that is electrically connected to be communicable via an electrical communication line with the control unit of the laser surface treatment apparatus, and a storage device that stores control data related to the control by the control unit, and the control data is read out by the server and written into the storage device. The server writes the control data acquired via the control unit into the storage device.

[0024] In the laser surface treatment system, the control unit performs control to reduce the output power of the laser light based on the physical quantity detected by the detection unit, and the control data may include data acquired within a predetermined time before the control to reduce the output power of the laser light is performed.

[0025] In the laser surface treatment system, the laser surface treatment apparatus includes a storage unit provided corresponding to the control unit and storing the control data. The control data stored in the storage device is downloaded via the server and the electrical communication line and stored in the storage unit, and the control unit may control at least one of the power of the laser light output from the optical head and the irradiation position of the laser light on the surface based on the downloaded control data.

[0026] The laser surface treatment system includes an analysis device that calculates the value of the control data or a range of such value for each processing condition of the surface treatment based on the control data stored in the storage device, the value of the control data or a range of such value calculated by the analysis device is stored in the storage device, the value of the control data or a range of such value is downloaded to the storage unit via the server and the telecommunication line, and the control unit may control at least one of the power of the laser beam output from the optical head and the irradiation position of the laser beam on the surface based on the downloaded value of the control data or a range of such value.

[0027] In the laser surface treatment system, the control unit performs control to reduce the output power of the laser light based on the physical quantity detected by the detection unit, and the control data may include data acquired within a predetermined time period prior to the time when the control to reduce the output power of the laser light is performed.

[0028] In the laser surface treatment system, the analyzer may acquire data that serves as a precursor to the change in physical quantities that leads to the control of reducing the output power of the laser light, based on data acquired within a predetermined time period prior to the point in time when the control to reduce the output power of the laser light is performed, and the control by the control unit may be performed based on the precursor data. [Effects of the Invention]

[0029] According to the present invention, improved and novel laser surface treatment apparatuses and laser surface treatment systems can be obtained, for example, that can enhance protection or improve the irradiation state of laser light. [Brief explanation of the drawing]

[0030] [Figure 1] Figure 1 is an illustrative schematic diagram of a laser surface treatment apparatus according to an embodiment. [Figure 2]Figure 2 is a schematic plan view showing an example of the scanning trajectory of laser light emitted from the laser surface treatment apparatus of the embodiment on the surface of an object. [Figure 3] Figure 3 is an exemplary and schematic front view of a laser irradiation device included in the laser surface treatment apparatus of the first embodiment. [Figure 4] Figure 4 is an illustrative block diagram of a control device included in the laser surface treatment apparatus of the embodiment. [Figure 5] Figure 5 is a schematic diagram showing an example of the temperature distribution on an object surface acquired by an area temperature sensor when an area temperature sensor is provided as a sensor in the laser surface processing apparatus of the first embodiment. [Figure 6] Figure 6 is a graph showing an example of the change in intensity over time when an optical sensor is provided as a sensor in the laser surface treatment apparatus of the first embodiment. [Figure 7] Figure 7 is a graph showing a different example from Figure 6 of the change in intensity over time detected by an optical sensor when an optical sensor is provided as a sensor in the laser surface treatment apparatus of the first embodiment. [Figure 8] Figure 8 is a schematic diagram showing an example of an image acquired by an area image sensor when an area image sensor is provided as a sensor in the laser surface treatment apparatus of the first embodiment. [Figure 9] Figure 9 is a schematic diagram showing another example of an image acquired by an area image sensor when an area image sensor is provided as a sensor in the laser surface processing apparatus of the first embodiment. [Figure 10] Figure 10 is an exemplary and schematic front view of a laser irradiation device according to a second embodiment. [Figure 11] Figure 11 is a schematic diagram showing an example of the detection range of the temperature distribution by three area temperature sensors when the laser irradiation device of the second embodiment is equipped with three area temperature sensors as sensors. [Figure 12]Figure 12 is a graph showing an example of the change in intensity over time when the laser irradiation device of the second embodiment is equipped with three optical sensors as sensors. [Figure 13] Figure 13 is a graph showing another example of the change in intensity over time detected by three optical sensors when the laser irradiation device of the second embodiment is equipped with three optical sensors as sensors. [Figure 14] Figure 14 is an illustrative schematic diagram of a part of the laser surface treatment apparatus of the third embodiment. [Figure 15] Figure 15 is an illustrative and schematic side view showing a part of the internal configuration of the laser irradiation device included in the laser surface treatment apparatus of the fourth embodiment. [Figure 16] Figure 16 is a schematic plan view showing an example of a spot pattern formed on a virtual irradiation surface by a laser irradiation device included in the laser surface treatment apparatus of the fourth embodiment. [Figure 17] Figure 17 is a schematic diagram of the laser surface treatment system according to the fifth embodiment. [Figure 18] Figure 18 is an illustrative block diagram of a control device included in the laser surface treatment apparatus of the fifth embodiment. [Modes for carrying out the invention]

[0031] Illustrative embodiments of the present invention are disclosed below. The configurations of the embodiments shown below, as well as the actions and results (effects) brought about by such configurations, are examples only. The present invention can also be realized by configurations other than those disclosed in the following embodiments. Furthermore, according to the present invention, it is possible to obtain at least one of the various effects (including derived effects) that can be obtained by the configuration.

[0032] The following embodiments have similar components. In the following, these similar components will be given common reference numerals, and redundant explanations may be omitted.

[0033] In this specification, ordinal numbers may be assigned for convenience to distinguish directions, parts, components, thresholds, etc. Furthermore, ordinal numbers do not indicate priority or order, nor do they specify a number.

[0034] In the diagram, the X direction is indicated by arrow X, the Y direction by arrow Y, and the Z direction by arrow Z. The X, Y, and Z directions intersect and are also orthogonal to each other.

[0035] [Laser surface treatment system] Figure 1 is a diagram showing the schematic configuration of the laser surface treatment apparatus 100 according to the embodiment. As shown in Figure 1, the laser surface treatment apparatus 100 comprises a portable laser irradiation device 200, a mounting device 300, and a cable 400.

[0036] The laser irradiation device 200 irradiates the surface 1a of the object 1 from which the surface layer is to be removed with laser light L. By irradiating with laser light L under appropriate conditions, laser ablation occurs on the surface 1a at the location irradiated with laser light L and in its vicinity, and a thin layer of the surface is removed. In this process, the object 1 from which dirt, rust, paint, coatings, etc. are removed along with the material constituting the body (base material) including the surface 1a of the object 1 is removed. The object 1 from which the surface 1a is removed is an example of an object that is subject to surface treatment.

[0037] Object 1 encompasses a wide range of things, such as buildings, structures, architectural materials, products, and parts. Furthermore, the materials constituting Object 1 are not limited to, but may include, for example, metal, concrete, or mortar. Object 1 is simply an example of an object.

[0038] Operator W uses the laser irradiation device 200 by gripping it. Operator W can change the position of the laser irradiation device 200 by changing their own position. Operator W can also change the direction of the laser beam L output from the laser irradiation device 200 by changing the orientation of the laser irradiation device 200. In other words, by changing the position and orientation of the laser irradiation device 200, operator W can change the position on the surface 1a where the laser beam L is irradiated and the surface layer is removed, and perform the work of removing the surface layer over a wide area of ​​the surface 1a.

[0039] The mounted device 300 incorporates various components, such as a laser unit 301, a power supply unit 302, and a cooling unit 303. These components are bulky and heavy, making them difficult to mount on the laser irradiation unit 200. Therefore, the laser surface treatment apparatus 100 separates the components mounted on the mounted device 300 from the laser irradiation unit 200, and connects the mounted device 300 and the laser irradiation unit 200 with a cable 400, thereby reducing the weight and size of the laser irradiation unit 200. Furthermore, the cable 400 is made relatively long to allow surface 1a processing to be performed over a relatively wide area away from the mounted device 300.

[0040] Furthermore, the mounted device 300 is a mobile body configured to be movable, such as a truck (automobile, vehicle). Because the mounted device 300 is movable, the location where the surface removal process is performed by the laser surface treatment apparatus 100 can be easily changed. Note that the mounted device 300 is not limited to automobiles, but may be other vehicles such as trains, or ships, etc. Also, the mounted device 300 may not have its own power source, such as a trailer.

[0041] The laser device 301 is equipped with a laser oscillator and is configured to output laser light with a power of 6000 [W], for example. The laser oscillator is an example of a laser device. The wavelength of the laser light output by the laser oscillator is, for example, 400 [nm] or more and 1200 [nm] or less. Typically, it is equipped with a fiber laser oscillator with a wavelength of 1070 [nm]. These may be semiconductor laser oscillators with a wavelength of 940 [nm], semiconductor laser oscillators with a wavelength of 450 [nm], or disk lasers or solid-state lasers with a wavelength of 1064 [nm]. Furthermore, to improve the surface layer removal efficiency, the laser device 301 may be a continuous wave laser.

[0042] The laser device 301 and the laser irradiation device 200 are optically connected via an optical fiber cable 401. The optical fiber cable 401 has an optical fiber (not shown) having a core and a cladding surrounding the core. The optical fiber transmits the laser light output from the laser device 301 to the laser irradiation device 200.

[0043] For application to relatively large objects 1 such as buildings, structures, and structures, the length of the optical fiber cable 401 and thus the cable 400 is set to, for example, 5 [m] or more and 300 [m] or less, so that a relatively long distance can be secured between the laser device 301 and the laser irradiation device 200. Because there is a trade-off relationship between optical density and the transmittable cable length due to the energy shift caused by stimulated Raman scattering, in order to realize the transmission of laser light over such long distances, the diameter of the optical fiber core is preferably 50 [μm] or more, more preferably 80 [μm] or more, and even more preferably 100 [μm] or more.

[0044] Furthermore, in order to obtain a high-quality processed surface (surface layer removal surface) with less processing unevenness and high shape accuracy, it is essential to maintain high quality laser light output from the optical fiber to the laser irradiation device 200. From this perspective, the optical fiber, with the above-mentioned length and diameter specifications, has a high M laser light output from the optical fiber. 2It is configured so that the beam quality is 10 or less. 2 Beam quality is M 2 It can also be called a factor. If the optical fiber is a single-mode optical fiber, then M 2 The beam quality is set to 1.5 or less, in which case the laser output is set to 300[W] or more and 5000[W] or less. Also, if the optical fiber is a multimode optical fiber, M 2 The beam quality is set to 10 or less, in which case the laser output is set to between 500[W] and 20000[W].

[0045] The power supply unit 302 includes, for example, a battery or a generator, and supplies the laser irradiation device 200 with the power necessary for each part of it to operate. Power is supplied to the laser irradiation device 200 from the power supply unit 302 via the electrical cable 402.

[0046] Furthermore, the cooling device 303 includes, for example, a tank for storing a refrigerant such as a cooling liquid, and a pump for discharging the refrigerant, and supplies the refrigerant to the laser irradiation device 200 to cool its various parts. The refrigerant is supplied to the laser irradiation device 200 from the cooling device 303 via the refrigerant tube 403.

[0047] [Laser surface treatment equipment] The laser irradiation device 200 is an optical device for appropriately irradiating the target object 1 with laser light input from the laser device 301 via the optical fiber cable 401. Optical components such as lenses, mirrors, and DOEs are housed inside the housing 201 of the laser irradiation device 200.

[0048] The laser irradiation device 200 outputs laser light L, which has been shaped to a predetermined beam diameter and beam shape by optical components. The laser light L is irradiated onto the surface 1a of the object 1. The laser irradiation device 200 is an example of an optical head. Alternatively, the optical head may be housed within the housing 201 of the laser irradiation device 200.

[0049] The laser irradiation device 200 can operate in a normal output mode and a low output mode in which the output power of the laser beam L is lower than that of the normal output mode. The output power and other settings for both the normal output mode and the low output mode can be set in advance. The low output mode may also be referred to as the safety mode.

[0050] Furthermore, the laser irradiation device 200 may be equipped with a laser scanner. Figure 2 is a plan view of the surface 1a showing an example of the scanning trajectory of a spot S of laser light L on the surface 1a. As shown in Figure 2, the laser scanner forms an annular irradiation region Ai such that the spot S revolves around the center C (center of scanning rotation), creating a non-irradiated region An in the vicinity of the center C where the spot S is not directly irradiated. Such a scanning trajectory can be realized, for example, by having an optical component through which the laser light passes and a motor that rotates the optical component within the housing 201 of the laser scanner, and rotating the optical component with the motor to rotate the output direction of the laser light L. The laser scanner is an example of a scanning mechanism.

[0051] If the spot S is scanned in a manner that does not create an unirradiated area An, the energy density of the laser light L will be higher closer to the center C, causing variations in energy density depending on the location of the irradiated area Ai, which may result in uneven processing. In this respect, according to this embodiment, since the irradiated area Ai is formed in a ring shape that surrounds the unirradiated area An, it is possible to suppress the excessively high energy density near the center C, which can easily lead to uneven processing. Furthermore, by moving the housing 201 of the portable laser irradiation device 200 so that the irradiated area Ai moves on the surface 1a, processing can be performed on the unirradiated area An. In some cases, processing can also be performed on the unirradiated area An by transferring heat from the laser light L irradiated on the irradiated area Ai to the unirradiated area An. The size of the unirradiated area An is set as appropriate.

[0052] Figure 3 is a front view of the laser irradiation device 200A(200) of the first embodiment. As shown in Figures 1 and 3, in this embodiment, a sensor 112 is provided on the surface 201a of the housing 201 of the laser irradiation device 200A. The sensor 112 detects a physical quantity that changes according to the irradiation state of the laser light L.

[0053] Figure 4 is a block diagram of a control device 110 that controls the output of laser light from the laser device 301. The control device 110 comprises an arithmetic processing unit 111, a main memory unit 121, an auxiliary memory unit 122, a sensor 112, and the laser device 301. The arithmetic processing unit 111 is, for example, a processor (circuit) such as a CPU (central processing unit) that operates according to a program. The main memory unit 121 is, for example, RAM (random access memory), ROM (read-only memory), etc., and the auxiliary memory unit 122 is, for example, an HDD (hard disk drive), SSD (solid state drive), etc. The arithmetic processing unit 111 has a detection processing unit 111a, a determination unit 111b, and a processing control unit 111c.

[0054] The detection processing unit 111a acquires detection values ​​(data) corresponding to the physical quantity detected by the sensor 112. The sensor 112 and the detection processing unit 111a are examples of detection units. Note that the detection processing unit 111a may also be included in the sensor 112. The data obtained by the detection processing unit 111a is an example of control data.

[0055] The determination unit 111b compares the detected value acquired by the detection processing unit 111a with a predetermined threshold value determined according to the type of sensor 112 and other conditions.

[0056] The processing control unit 111c controls the output power of the laser beam from the laser device 301 according to the determination result of the determination unit 111b. The processing control unit 111c (control device 110) is an example of a control unit that controls the power of the laser beam L output from the laser irradiation device 200 based on the detection value of the sensor 112.

[0057] [Area Temperature Sensor] Sensor 112 may be an area temperature sensor, such as an infrared thermographic camera. In this case, sensor 112 acquires the intensity of far-infrared radiation emitted from a substance at each position within a two-dimensional detection range, i.e., the far-infrared radiation intensity distribution. The intensity of far-infrared radiation is an example of a physical quantity that changes depending on the irradiation state of the laser light L. Sensor 112 and detection processing unit 111a are an example of a temperature detection unit and may also be referred to as an area temperature detection unit.

[0058] Figure 5 shows an example of image It, which represents the temperature distribution as detected values ​​at various locations on the surface 1a. In image It, the surface is divided into regions according to temperature range, with finer dot patterns in regions where the average temperature is higher and coarser dot patterns in regions where the average temperature is lower. As shown in Figure 5, the temperature distribution on the surface 1a is radial, with the temperature higher closer to the center C (see Figure 2) and lower further away from the center C. In this case, the detection processing unit 111a is located within the sensor 112. Sensor 112 is an example of a temperature sensor that remotely detects the temperature of the surface 1a. In Figure 5, the colorless region Ah near the center C is a region where the temperature exceeds the upper limit of the detection temperature range of the infrared thermography camera.

[0059] The determination unit 111b acquires two-dimensional temperature distribution data from the sensor 112, showing the temperature distribution as shown in Figure 5. Then, as shown in Figure 5, it determines whether there is a point where the temperature exceeds a threshold within an arc-shaped, partially annular, or annular region Ad with a substantially constant width in the radial direction of the center C. This threshold is an example of a fourth threshold.

[0060] Then, the processing control unit 111c controls the laser device 301 to reduce the output power of the laser beam to a predetermined value or less if, in the determination made by the determination unit 111b, there is a point within the arc-shaped region Ad where the temperature exceeds the threshold.

[0061] Furthermore, the determination unit 111b determines whether there are any points in region Ad where the temperature is below a threshold, and the processing control unit 111c may, in the determination, control the laser device 301 to increase the output power of the laser beam if there are points in the arc-shaped region Ad where the temperature is below the threshold. This can prevent, for example, the temperature of the surface 1a from dropping too low due to a prolonged low-power mode. This threshold is a value lower than the fourth threshold and is an example of a fifth threshold.

[0062] When the processing control unit 111c controls the laser device 301 to reduce the output power of the laser beam in response to a determination based on the detected value of the sensor 112 as an area temperature sensor, as described above, it may control the laser device 301 so that the laser irradiation device 200 changes from a state in which it outputs the laser beam L in normal output mode to a state in which it outputs the laser beam L in low output mode.

[0063] [Intensity sensor] Sensor 112 may be an intensity sensor, such as a photodiode, that detects the intensity of light from the surface 1a or a position closer to the laser irradiation device 200 than the surface 1a. In this case, the detected light is scattered or reflected light from the surface 1a or from smoke, etc., located between the surface 1a and the laser irradiation device 200. The intensity of light is an example of a physical quantity that changes depending on the irradiation state of the laser light L. Sensor 112 and detection processing unit 111a are examples of intensity detection units.

[0064] Figures 6 and 7 are graphs showing examples of changes over time in the detected value (light intensity) by the detection unit including sensor 112. In both examples in Figures 6 and 7, the time waveform of the intensity changes at time tp, and the average value of the detected value per unit time increases.

[0065] In the example in Figure 6, the minimum value remains unchanged at time tp, but the average value, maximum value, and amplitude increase. For example, such a change over time can be observed when the intensity of reflected light increases in a specific direction after time tp.

[0066] In the example in Figure 7, the amplitude remains constant at time tp, but the minimum, maximum, and average values ​​increase. For example, such a change over time can be observed when the intensity of reflected light increases in a specific direction after time tp.

[0067] In cases like those shown in Figures 6 and 7, it is undesirable for the state to continue after time tp. Therefore, the determination unit 111b determines, for example, whether the detected value exceeds a predetermined threshold for a predetermined number of times within a predetermined time. Alternatively, the determination unit 111b may determine, for example, whether the time-averaged value of the detected value over a predetermined time exceeds a threshold. These thresholds are examples of first thresholds.

[0068] Then, in the determination by the determination unit 111b, the processing control unit 111c controls the laser device 301 to reduce the output power of the laser beam if, for example, the detected value exceeds a predetermined threshold for a predetermined number of times within a predetermined time, or if the time average value of the detected value over a predetermined time exceeds a threshold. In this case, the laser device 301 may also be controlled to stop the output of the laser beam. This makes it possible to suppress the output of the laser beam L in a direction different from the intended output direction.

[0069] Furthermore, the determination unit 111b determines whether the ratio of the detected value (light intensity) to the output power of the laser light from the laser device 301 is below a predetermined threshold, and the processing control unit 111c may control the laser device 301 to reduce the output power of the laser light if, in the determination by the determination unit 111b, the ratio of the detected value to the output power of the laser light is below the threshold. In this case as well, it is possible to suppress the output of the laser light L in a direction different from the intended output direction. The threshold in this case is an example of a second threshold.

[0070] When the processing control unit 111c controls the laser device 301 to reduce the output power of the laser light in response to a determination based on the detected value of the sensor 112 as an intensity sensor, as described above, it may control the laser device 301 so that the laser irradiation device 200 changes from a state in which it outputs the laser light L in normal output mode to a state in which it outputs the laser light L in low output mode.

[0071] [Area strength sensor] The sensor 112 may be an area intensity sensor, such as a visible light camera, that acquires a two-dimensional brightness image of light from the surface 1a or a position closer to the laser irradiation device 200 than the surface 1a. In this case, the detected light is scattered or reflected light from the surface 1a or from smoke, etc., located between the surface 1a and the laser irradiation device 200. The sensor 112 also detects the intensity of light at each position. Therefore, in this case, the intensity of light is an example of a physical quantity that changes depending on the irradiation state of the laser light L. The sensor 112 and the detection processing unit 111a are an example of an area intensity detection unit.

[0072] Figures 8 and 9 are examples of two-dimensional luminance images Iv acquired by a detection unit including sensor 112. In the examples of Figures 8 and 9, both include a region Ab whose luminance is increased by heating with laser light L, and a region Ac whose luminance is increased by scattered light from smoke generated by irradiation with laser light L. The luminance value of region Ac is higher than that of the surrounding region, and the luminance value of region Ab is higher than that of region Ac. Therefore, regions Ab and Ac can be extracted by binarization processing using a threshold value for the luminance image data. The extraction of regions Ab and Ac is performed, for example, by the detection processing unit 111a.

[0073] The example in Figure 8 shows a state in which the laser beam L is scattered by the spread of smoke. In this case, there is a risk of localized decreases or variations in power density on the surface 1a of the laser beam L. Therefore, the determination unit 111b may determine whether the area Ac is greater than or equal to a predetermined threshold, and the processing control unit 111c may control the laser device 301 to reduce the output power of the laser beam if the determination unit 111b determines that the area Ac is greater than or equal to a predetermined threshold. This can suppress the generation of smoke and suppress localized decreases or variations in power density on the surface 1a of the laser beam L. Furthermore, as the surface layer is removed, the unevenness of the surface 1a decreases, so if the irradiation area Ai is approximately circular as shown in Figure 2, the area Ab will approach a circular shape. Therefore, the determination unit 111b may determine whether the roundness of region Ab is below a predetermined threshold, and the processing control unit 111c may control the laser device 301 to reduce the output power of the laser beam if, in the determination by the determination unit 111b, the roundness of region Ab is below a predetermined threshold. In this case as well, the generation of smoke can be suppressed, and localized decreases and variations in power density on the surface 1a of the laser beam L can be suppressed. Figure 9 shows a state in which the irradiation state on the surface 1a of the laser beam L has been improved by the operation of the processing control unit 111c as described above, and both regions Ab and Ac have become smaller and their roundness has increased. In this state, the generation of smoke is suppressed, and localized decreases and variations in power density on the surface 1a of the laser beam L are suppressed.

[0074] Furthermore, when the processing control unit 111c controls the laser device 301 to reduce the output power of the laser light in response to a determination based on the detected value of the sensor 112 as an area intensity sensor, as described above, it may control the laser device 301 so that the laser irradiation device 200 changes from a state in which it outputs the laser light L in normal output mode to a state in which it outputs the laser light L in low output mode.

[0075] As described above, according to this embodiment, an improved and novel laser surface treatment apparatus 100 can be obtained, for example, that can enhance protective properties or improve the irradiation state of the laser light L.

[0076] [Second Embodiment] Figure 10 is a front view of the laser irradiation device 200B (200) of the second embodiment. As shown in Figure 10, in this embodiment, a plurality of sensors 112, separated from each other, are provided on the surface 201a of the housing 201 of the laser irradiation device 200B. In this example, there are three sensors 112. These multiple sensors 112 are arranged such that a virtual line overlapping the optical axis of the laser beam L output from the laser irradiation device 200B is located between them. The virtual line overlaps with the extension of the optical axis of the laser beam L output from the laser irradiation device 200B, extended from the output end in the direction opposite to the output direction (irradiation direction). By arranging them in this way, the probability of detecting reflected light from the irradiation area Ai on the surface 1a in various directions is increased by the multiple sensors 112, and the effect of ensuring safety against reflected light in various directions is obtained. Note that the number of sensors 112 is not limited to three, but may be two or four or more.

[0077] [Different types of sensors] At least two of the three sensors 112 in Figure 10 may be of different types. Specifically, for example, one of the sensors 112 may be an area temperature sensor and the other may be an area intensity sensor. In this case, these two sensors 112 can be configured to obtain detection values ​​for at least partially the same location on the surface 1a. This configuration has the effect of making it easier to ensure safety more reliably based on detection values ​​from multiple sensors 112 of different types.

[0078] Furthermore, for example, while ensuring that the temperature in region Ad (see Figure 5) is within a predetermined range based on the detection value of an area temperature sensor (one sensor 112), the criterion for determining the end of processing for the irradiated region Ai may be that the roundness of region Ab (see Figures 8 and 9), obtained based on the detection value of an area intensity sensor (another sensor 112), falls below a predetermined threshold. With such a configuration and control, it is possible to obtain a high-quality processed surface with less processing unevenness and higher shape accuracy.

[0079] [Multiple detection ranges] Figure 11 shows an example of the detection range of the temperature distribution by three area temperature sensors when the sensor 112 in Figure 10 is an area temperature sensor. The detection range I can also be called the imaging range. As shown in Figure 11, the locations of the detection range I are all different. In the example in Figure 11, the detection processing unit 111a can combine the detected values ​​in the detection range I from each sensor 112. Specifically, for example, the detection processing unit 111a obtains the temperature at each position where two detection ranges I overlap by averaging the temperature values ​​of each detection range I at each position. This makes it possible to operate the determination unit 111b and the processing control unit 111c as described above for a wider detection range I. Although not shown, by setting each detection range I to be extended in the circumferential direction of the center C, a wider detection range I can be processed.

[0080] [Changes over time in multiple intensity sensors] Figures 12 and 13 are graphs showing examples of the time-dependent changes in the detected value (light intensity) from a detection unit containing three sensors 112. In the examples in Figures 12 and 13, the three sensors 112 are intensity sensors, and the time waveform of the intensity changes at time tp. In each graph, the time-dependent changes in the detected values ​​of the three sensors 112 are distinguished by the signs A, B, and C and the line type.

[0081] In the example shown in Figure 12, at time tp, the amplitude of the intensity detected by one sensor 112(A) becomes larger than before, while the amplitude of the intensity detected by the two sensors 112(B,C) becomes smaller than before. For example, such a change over time can be observed when the intensity of reflected light increases in a specific direction after time tp.

[0082] In the example shown in Figure 13, the intensity detected by the three sensors 112 (A, B, C) becomes approximately 0 after time tp. For example, such a change over time can be observed if, after time tp, the laser irradiation device 200 is no longer directly facing the surface 1a, or if the laser beam L is irradiated to a position away from the surface 1a.

[0083] In cases like those shown in Figures 12 and 13, it is undesirable for the state to continue after time tp. Therefore, the determination unit 111b calculates, for example, the difference in intensity detected by two sensors 112 and determines whether the difference is greater than or equal to a predetermined threshold. The determination unit 111b performs this determination for all combinations of two sensors 112 among the multiple sensors 112. For example, if the laser irradiation device 200 has three sensors 112 (A to C), the determination unit 111b performs this determination for the three combinations of sensors (A, B), sensors (B, C), and sensors (C, A).

[0084] Then, the processing control unit 111c controls the laser device 301 to reduce the output power of the laser beam if, in the determination by the determination unit 111b, at least one of the above differences exceeds a predetermined threshold. In this case, the laser device 301 may also be controlled to stop the output of the laser beam. This prevents the laser beam L from being output in a direction different from the intended output direction. The threshold is an example of a third threshold.

[0085] Furthermore, the determination unit 111b may determine whether the ratio of the above difference to the output power is greater than or equal to a predetermined threshold, and the processing control unit 111c may, in the determination by the determination unit 111b, control the laser device 301 to reduce the output power of the laser beam if the ratio of the difference is less than or equal to the threshold.

[0086] In this embodiment as well, if the processing control unit 111c controls the laser device 301 to reduce the output power of the laser light in response to a determination based on the detected value of the sensor 112, the laser irradiation device 200 may control the laser device 301 so that it switches from a state in which it outputs the laser light L in normal output mode to a state in which it outputs the laser light L in low output mode.

[0087] As described above, according to this embodiment, the processing control unit 111c can perform more reliable or more accurate control based on the detection values ​​of the multiple sensors 112, with respect to ensuring safety and improving the laser beam irradiation state.

[0088] [Third Embodiment] Figure 14 shows a schematic configuration of a part of the laser surface treatment apparatus 100C(100) of the third embodiment. As shown in Figure 1, in this embodiment, the sensor 112 is not provided on the housing 201 of the laser irradiation device 200, but on a mounting mechanism 202 that is configured separately from the housing 201 and can be detachably attached to the worker W. In the example of Figure 14, the mounting mechanism 202 is configured as a detachable band attached to the head of the worker W. With such a configuration, safety for the worker can be further enhanced in the vicinity of the part to which the mounting mechanism 202 is attached. Note that the mounting mechanism 202 is not limited to a band, and may be a different mechanism such as a belt, clip, or hook-and-loop fastener. Also, the mounting mechanism 202 may be configured to be detachably attached to some object, etc., rather than the worker W. In other words, according to this embodiment, protection from laser light can be enhanced for workers, objects (e.g., precision equipment), places, etc., that you want to avoid being irradiated with laser light. Furthermore, the object to which the mounting mechanism 202 is attached and the object to which the laser beam is to be protected may be different entities.

[0089] [Fourth Embodiment] Figure 15 is a side view showing a part of the internal configuration of the laser irradiation device 200D (200) included in the laser surface treatment apparatus 100 of the fourth embodiment. As shown in Figure 15, the laser irradiation device 200D includes a diffractive optical element 203 (hereinafter referred to as DOE203, DOE: diffractive optical element), a motor 204, a rotation transmission mechanism 205, and a window member 206.

[0090] The DOE203 has a configuration in which multiple diffraction gratings with different periods are superimposed, allowing the transmitted laser light to be divided into multiple beams and arranged as appropriate. Figure 16 is a plan view showing an example of a spot pattern P1 formed on a virtual irradiation surface Pv intersecting the Y direction by the laser irradiation device 200D. The DOE203 forms a spot pattern P1 including multiple spots S formed by multiple beams, as shown in Figure 16. Note that the spot pattern formed by the DOE203 is not limited to the spot pattern P1 in Figure 16, and various spot patterns can be formed by replacing the DOE203 with one of a different configuration.

[0091] The motor 204 and rotation transmission mechanism 205 are mechanisms for rotating the DOE 203 around a central axis Cr that is substantially aligned with the optical axis of the laser beam, and are an example of a rotation mechanism. The rotation transmission mechanism 205 is, for example, a set of gears that mesh with each other, and transmits the rotation of the shaft 204a of the motor 204 to a ring gear provided on the outer circumference of the DOE 203. The rotation transmission mechanism 205 may also be called a reduction mechanism. As shown in Figure 16, the spot pattern P1 rotates around the central axis Cr as the shaft 204a of the motor 204 rotates. The window member 206 is fitted into the opening of the housing 201 and transmits the laser beam.

[0092] According to this configuration, as the DOE 203 rotates, the spot pattern P1 rotates on the virtual irradiation surface Pv around the central axis Cr at a substantially constant angular velocity over time. This allows multiple beam spots S, each with appropriately adjusted power density, to rotate on the surface 1a by the DOE 203. For example, compared to the case where a single beam spot without specific power density adjustment rotates on the surface 1a, variations in power density depending on location on the surface 1a, and consequently variations in the processing state of the surface 1a depending on location, can be suppressed. Furthermore, the spot pattern P1 does not include any spots S near the central axis Cr. This prevents the area near the central axis Cr from being continuously irradiated with laser light and thus having a higher energy density compared to other areas. In addition, the rotation speed of the spot pattern P1 can be changed by changing the rotation speed of the shaft 204a in the motor 204. When the rotation of the spot pattern P1 is combined with the movement of the center of gravity of the spot pattern P1, i.e., scanning, the energy density of the laser light on the surface 1a can be suitably changed by appropriately adjusting the rotation speed and movement speed. Note that the rotation of the DOE 203 and the rotation of the optical components in the laser scanner described above are the same in that the spot S rotates. Therefore, the control device 110 can perform the same control for rotating the spot S as in the first embodiment as it can for rotating the DOE 203. The control of rotation and scanning of the spot S and spot pattern P1 by the control device 110 is an example of control for changing the irradiation position of the laser light.

[0093] [Fifth Embodiment] Figure 17 is a schematic diagram of the laser surface treatment system 1000 according to the fourth embodiment. The laser surface treatment system 1000 comprises a server 10, a storage device 30, and a plurality of laser surface treatment devices 100D (100). The server 10 and the plurality of laser surface treatment devices 100D are electrically connected via a telecommunications line 20. The storage device 30 is also electrically connected to the server 10. The server 10 can read and write data to the storage device 30. The laser surface treatment devices 100D can download data from the storage device 30 via the telecommunications line 20 and the server 10. The server 10 can also upload control data related to processing performed by the laser surface treatment devices 100D to the storage device 30. The telecommunications line 20 is a network that communicates data by wire or wireless, and includes, for example, the Internet, a local area network, a wide area network, an intranet, etc. The server 10 and the control device 110 of the laser surface treatment device 100D are electrically connected via the telecommunications line 20 so as to be able to communicate. Furthermore, the server 10 and the storage device 30 may be electrically connected via a telecommunications line 20.

[0094] The storage device 30 stores various control data related to the control of surface processing by the control device 110 of the laser surface processing apparatus 100D. The control data includes, for example, the values ​​and ranges of parameters used in the control, processing procedures, thresholds, events such as abnormal occurrences exceeding thresholds, and data indicating the quality of the processing state. The storage device 30 may be, for example, a RAID array and may include multiple storage devices.

[0095] The control data includes not only control data for each processing condition during normal surface treatment, but also control data corresponding to abnormal situations, such as a threshold value referenced when reducing the output power of the laser beam from the laser device 301.

[0096] Server 10 is responsible for reading and writing control data to and from the storage device 30, and for data communication between the storage device 30 and the control device 110. Server 10 can write control data sent from each laser surface treatment device 100D to the storage device 30. In this case, the control device 110 may send control data in response to a request from Server 10, or it may send control data at a predetermined timing.

[0097] The control device 110 transmits various control data to the server 10 during the execution of surface treatment control, and the server 10 can store the control data in the storage device 30. The control data includes various types of data, such as data detected by the sensor 112 during numerous and various surface treatments performed by multiple laser surface treatment devices 100D, and data input by workers W or operators.

[0098] Server 10 can also function as an analytical device. In this case, Server 10 can determine control data indicating appropriate control parameters (values, ranges of values, etc.) and appropriate control procedures according to the type of surface treatment, using machine learning or deep learning based on data collected in the storage device 30 from multiple laser surface treatment devices 100D. Server 10 may also calculate the average value of control parameters in various cases.

[0099] The server 10, which functions as an analysis device, may acquire data that serves as a precursor to changes in various physical quantities leading up to the control being performed, based on data indicating physical quantities acquired within a predetermined time period prior to the control being performed by the control device 110 when the control device 110 performs control to reduce the output power of the laser beam from the laser device 301. Such precursory data may include, for example, data such as the distance to the object, the surface temperature of the object, and the attitude and temperature of the laser irradiation device 200. Based on this data or a comparison of the time-dependent changes in such data with corresponding thresholds, it is possible to detect precursors to the situation in which control to reduce the output power of the laser beam is performed.

[0100] Furthermore, the server 10 transmits the control data stored in the storage device 30 to the control device 110 of each laser surface processing device 100D. That is, the control data is downloaded from the storage device 30 to the laser surface processing device 100D via the server 10 and the telecommunication line 20, and stored in the auxiliary storage unit 122 (see Figure 18) of the laser surface processing device 100D. In this case, the server 10 may transmit the control data in response to a request from the control device 110, or it may transmit the control data at a predetermined timing.

[0101] With this configuration, in the laser surface treatment system 1000, control data is collected from multiple laser surface treatment devices 100D, further analyzed, and stored in the storage device 30. Each laser surface treatment device 100D can download the stored control data and control data obtained through analysis from the storage device 30 for various surface treatments, and effectively utilize this control data to perform more suitable surface treatments.

[0102] Figure 18 is a block diagram of the control device 110 of the laser surface treatment apparatus 100D of this embodiment. The control device 110 includes an arithmetic processing unit 111, a sensor 112, a camera 113, an input unit 114, an output unit 115, a communication device 116, a laser device 301, a motor 204, a laser scanner 207, a main memory unit 121, and an auxiliary memory unit 122.

[0103] The input unit 114 is, for example, a touch panel, a keyboard, or a push button, and electrically acquires operational input from the worker W or operator.

[0104] The output unit 115 is, for example, a display output unit such as an LED or a display, or an audio output unit such as a speaker or buzzer.

[0105] Sensor 112 is a sensor that detects physical quantities related to the control of surface treatment and the state of the laser irradiation device 200, and includes, for example, a temperature sensor, a rotational speed sensor, a voltage sensor, a current sensor, a water leak sensor, a distance sensor, an acceleration sensor, a gyroscope sensor, a compass, a piezoelectric element, a GPS, etc. Of these, the acceleration sensor, gyroscope sensor, compass, GPS, etc. are sensors that detect the position and orientation of the laser irradiation device 200. Distance sensors include, for example, a laser rangefinder, LiDAR, an ultrasonic sensor, a camera, an RGB-D sensor, etc.

[0106] These sensors 112 can also function as sensors 112 for ensuring safety in the first embodiment described above. That is, the processing control unit 111c can control the laser device 301 to reduce the output power of the laser light if, for example, the detected value of the sensor 112 exceeds a predetermined threshold corresponding to various abnormal events in the laser irradiation device 200, such as abnormally high temperature of the laser irradiation device 200, a rapid rise in temperature, the laser irradiation device 200 falling, a collision with the worker W, a fall, etc.

[0107] Camera 113 can be, for example, a visible light camera, an infrared camera, or an RGB-D sensor. Camera 113 is also an example of sensor 112.

[0108] The communication device 116 transmits and receives control data to and from the server 10 via the telecommunications line 20, either by wire or wireless connection.

[0109] The arithmetic processing unit 111 includes a detection processing unit 111a, a determination unit 111b, a processing control unit 111c, an input processing unit 111d, an image processing unit 111e, a processing state determination unit 111f, an information acquisition unit 111g, a processing condition setting unit 111i, an output control unit 111j, an information collection unit 111k, a transmission information generation unit 111m, a special information generation unit 111n, a transmission control unit 111o, a reception control unit 111p, a writing processing unit 111q, and a reading processing unit 111r. The arithmetic processing unit 111 executes arithmetic processing according to the installed program and functions as a detection processing unit 111a, a determination unit 111b, a processing control unit 111c, an input processing unit 111d, an image processing unit 111e, a processing state determination unit 111f, an information acquisition unit 111g, a processing condition setting unit 111i, an output control unit 111j, an information collection unit 111k, a transmission information generation unit 111m, a special information generation unit 111n, a transmission control unit 111o, a reception control unit 111p, a writing processing unit 111q, and a reading processing unit 111r.

[0110] The input processing unit 111d acquires data corresponding to the operation input in the input unit 114. The data obtained by the input processing unit 111d is an example of control data.

[0111] The image processing unit 111e performs predetermined image processing on the image data acquired by the camera 113. The image data and value data processed by the image processing unit 111e are examples of control data.

[0112] The processing state determination unit 111f analyzes the image data processed by the image processing unit 111e to determine whether the surface treatment on the surface 1a of the surface-treated object 1 is good or bad. Depending on the object and the type of surface layer to be removed, the processing state determination unit 111f compares the data obtained by image analysis with data corresponding to a good treatment state or data corresponding to a poor treatment state, and can determine the quality and degree of the treatment state, for example, by the ratio of the area of ​​regions where the brightness is higher than a threshold to the total area.

[0113] The information acquisition unit 111g can acquire data indicating whether the processing status is good or bad, which is input by the input unit 114. The data obtained by the information acquisition unit 111g is an example of control data.

[0114] The processing condition setting unit 111i acquires data that identifies the type and content of the surface treatment to be performed, which is input by the input unit 114 and obtained by the input processing unit 111d. For example, it acquires data indicating the material of the object 1 and the object to be removed. The processing condition setting unit 111i then refers to the auxiliary storage unit 122 to acquire a suitable control data value or range corresponding to the data identifying the type and content of the surface treatment, and sets it as the control data value or range indicating the processing conditions corresponding to the surface treatment.

[0115] As an example, the auxiliary storage unit 122 stores, for each material of the object 1 (base material) (e.g., iron, steel, brass, copper, zinc, etc.) and the type of rust to be removed from the surface 1a (e.g., red rust, black rust, white rust, etc.), the power value (range) of the laser device 301 and the rotational speed value (range) of the shaft 204a of the DOE 203 or motor 204, as shown in Table 1, for example. [Table 1]

[0116] Furthermore, the auxiliary storage unit 122 may store, for example, the material of the object 1 (base material) and the object to be removed, as well as the power value (range) of the laser device 301 and the rotational speed value (range) of the shaft 204a of the DOE 203 or motor 204, for each specification of the object to be removed (e.g., rust thickness), as shown in Table 2. [Table 2]

[0117] Furthermore, the auxiliary storage unit 122 stores the power value (range) of the laser device 301 and the rotational speed value (range) of the DOE 203 or motor 204 shaft 204a for each surface treatment performed. Table 3 shows the power value (range) of the laser device 301 and the rotational speed value (range) of the DOE 203 or motor 204 shaft 204a, set for each material of the base material (e.g., steel, stainless steel, aluminum, copper, glass, etc.) and the type of resin to be removed (e.g., epoxy resin, urethane resin, fluororesin, etc.) when the object 1 (base material) is metal and the object to be removed is a synthetic resin material. [Table 3] Note that the material of object 1, the object to be removed, and the specifications of the object to be removed are not limited to those exemplified in these tables.

[0118] The processing control unit 111c controls the operation of the laser device 301, motor 204, laser scanner 207, etc., to perform surface treatment according to the processing conditions set by the processing condition setting unit 111i.

[0119] The output control unit 111j controls the operation of the output unit 115 to produce a predetermined display output or audio output. Furthermore, if the detection value of the sensor 112 exceeds a predetermined threshold corresponding to various abnormal events in the laser irradiation device 200 as described above, or if the detection value exceeds a predetermined threshold and changes over time, the output control unit 111j can control the output unit 115 to produce a predetermined warning output.

[0120] The information gathering unit 111k collects detected values ​​corresponding to the physical quantities detected by each sensor 112 obtained by the detection processing unit 111a at predetermined timings, for example, at regular time intervals, during the time from the start to the end of processing, and stores them in the auxiliary storage unit 122. The start and end of processing are determined, for example, based on data indicating the operation to start processing, which is input by the input unit 114 and obtained by the input processing unit 111d. The start of processing may also be the start of output of the laser device 301. In addition, the information gathering unit 111k can also collect data acquired by the input processing unit 111d in response to the operation input of the input unit 114, along with its time, and store it in the auxiliary storage unit 122 as an event log.

[0121] The transmission information generation unit 111m picks data from the control data stored in the auxiliary storage unit 122 according to predetermined conditions and generates transmission information to be sent to the server 10. The transmission information may include, for example, all data related to the control of surface treatment (control data) that has not been transmitted, or it may include only specified data from the untransmitted data. The transmission information may also include control data collected by the information collection unit 111k during the time from the start to the end of processing. In that case, the transmission information may include control data collected for each of the multiple processes.

[0122] The special information generation unit 111n generates special information, including data indicating an event, when an event meeting specific conditions occurs during surface processing. This special information is also sent to the server 10. In other words, special information is an example of transmitted information. The special information includes, for example, data indicating physical quantities acquired within a predetermined time prior to the time when an abnormality occurs, such as when control is performed to reduce the output power of the laser beam of the laser device 301. In this case, the special information may also include data acquired by the input processing unit 111d in response to the operation input of the input unit 114.

[0123] The transmission control unit 111o controls the communication device 116 to send transmission information and special information to the server 10. The reception control unit 111p also controls the communication device 116 to receive information from the server 10. The reception control unit 111p downloads the data transmitted from the server 10. This data is an example of control data.

[0124] The write processing unit 111q controls the writing of data to the auxiliary storage unit 122. The write processing unit 111q acquires the data received by the receive control unit 111p, i.e., the downloaded data, and writes it to the auxiliary storage unit 122. At this time, the data stored in the auxiliary storage unit 122, such as the data shown in Tables 1 to 3, is updated with the downloaded data. As described above, the processing condition setting unit 111i sets the processing conditions based on the data stored in the auxiliary storage unit 122, and the processing control unit 111c executes the surface treatment according to the processing conditions set by the processing condition setting unit 111i. Therefore, the laser surface treatment apparatus 100 can perform surface treatment with updated, latest, and more suitable processing conditions.

[0125] Although embodiments of the present invention have been illustrated above, these embodiments are merely examples and are not intended to limit the scope of the invention. The above embodiments can be implemented in various other forms, and various omissions, substitutions, combinations, and modifications can be made without departing from the spirit of the invention. Furthermore, each configuration, shape, and other specifications (structure, type, orientation, model, size, length, width, thickness, height, number, arrangement, position, material, etc.) can be modified as appropriate.

[0126] For example, the control unit of a laser surface treatment apparatus may acquire control data based on sensor detection values ​​during one or more trials of surface treatment by the laser surface treatment apparatus, and determine the quality or degree of the treatment state based on the acquired control data (e.g., image data). In this case, the control unit may, while referring to the memory unit of the laser surface treatment apparatus or a memory device electrically connected via a telecommunications line, acquire control data that is expected to improve the treatment state by performing calculations (e.g., extrapolation, interpolation, machine learning, etc.) based on the control data acquired during the trial, and set it as the control data for the next surface treatment. In this case, the control data for the next surface treatment may be determined by outputting candidate control data from the output unit via display, etc., and allowing the operator to select or confirm the control data through operation input at the input unit. [Industrial applicability]

[0127] This invention can be used in laser surface treatment apparatuses and laser surface treatment systems. [Explanation of symbols]

[0128] 1... Object (body) 1a…Surface 10…Server (analytical device) 20... Telecommunication lines 30…Storage device 100, 100C, 100D… Laser surface treatment equipment 110...Control device (control unit) 111... Arithmetic Processing Unit 111a...Detection processing unit (detection unit) 111b...judgment section 111c... Processing control unit (control unit) 111d... Input processing unit 111e...Image Processing Unit 111f... Processing status determination unit 111g…Information acquisition department 111i... Processing condition setting unit 111j... Output control unit 111k... Information Gathering Department 111m...Transmission information generation unit 111n…Special information generation unit 111o...Transmission Control Unit 111p...Receiver Control Unit 111q...Writing Processing Unit 111r...Reading Processing Unit 112...Sensor (detection unit) 113...Camera (detection unit) 114...Input section 115...Output section 116...Communication device 121...Main memory section 122…Auxiliary storage unit 200, 200A, 200B, 200D… Laser irradiation devices 201... Cabinet 201a…Surface 202…Mounting mechanism 203…DOE (Diffractive Optical Element) 204…Motor (rotating mechanism) 204a... Shaft 205... Rotational transmission mechanism (rotational mechanism) 206... Window components 207…Laser scanner (scanning mechanism) 300... Onboard equipment 301…Laser device 302…Power supply device 303…Cooling device 400... Cable 401… Fiber optic cable 402…Electrical cable 403... Refrigerant tube 1000…Laser surface treatment system Ab…area Ac…area Ad…area Ah... area Ai…irradiation area An…non-irradiated area C…center Cr…Central axis I...Detection range It...image Iv... Brightness image P1...Spot Pattern Pv...Virtual illumination surface L... Laser light S... Spot tp…Time W...Worker X…direction Y... Direction Z…direction

Claims

1. A laser device that emits laser light, An optical head that irradiates the surface of an object with laser light output from the laser device, A detection unit for detecting a physical quantity that changes in response to the irradiation of the laser light, A control unit controls at least one of the power of the laser beam output from the optical head and the irradiation position of the laser beam on the surface based on the physical quantity detected by the detection unit, A laser surface processing apparatus comprising a laser beam that irradiates the surface to perform a process on the surface, The detection unit includes a plurality of intensity detection units provided at positions separated from each other, which detect the intensity of light from the surface or a position closer to the optical head than the surface. A laser surface treatment apparatus comprising: a control unit that controls the laser device to reduce the output power of the laser light when the intensity of the light detected by the intensity detection unit is equal to or greater than a first threshold, and a control unit that controls the laser device to reduce the output power of the laser light when the difference in the intensity of the light detected by two of the plurality of intensity detection units is equal to or greater than a third threshold.

2. The laser surface processing apparatus according to claim 1, wherein each of the plurality of intensity detection units has a sensor attached to a housing that houses the optical head.

3. The laser surface processing apparatus according to claim 1, wherein the control unit controls the laser apparatus to reduce the output power of the laser light when the ratio of the light intensity detected by the intensity detection unit to the output power of the laser light is less than or equal to a second threshold.

4. The laser surface apparatus according to claim 1, wherein the sensors of the plurality of intensity detection units are arranged such that the optical axis of the laser light output from the optical head or a virtual line overlapping the optical axis is located between them.

5. The laser surface processing apparatus according to claim 1, further comprising an area intensity detection unit that acquires a two-dimensional brightness image as the intensity detection unit.

6. The laser surface processing apparatus according to claim 1, further comprising a temperature detection unit for remotely detecting the temperature of the surface as the detection unit.

7. The laser surface processing apparatus according to claim 6, wherein the control unit controls the laser device to reduce the output power of the laser light when there is a point on the surface in a predetermined range where the temperature exceeds a fourth threshold.

8. The laser surface processing apparatus according to claim 6, wherein the control unit controls the laser device to increase the output power of the laser light when there is a point in a predetermined range on the surface where the temperature falls below a fifth threshold.

9. The laser surface treatment apparatus can operate in a normal mode and a low-power mode in which the output power of the laser light is lower than that of the normal mode. The laser surface treatment apparatus according to claim 8, wherein the control unit controls the laser apparatus to increase the output power of the laser beam and return to the normal mode when the laser surface treatment apparatus is operating in the low-power mode and there is a point in a predetermined range on the surface where the temperature falls below a fifth threshold.

10. The laser surface processing apparatus according to claim 1, wherein the detection unit comprises a detection unit having a sensor attached to the housing of the optical head or a housing housing that houses the optical head.

11. The laser surface processing apparatus according to claim 1, wherein the detection unit comprises a detection unit having a sensor provided on a mounting mechanism that can be attached to a worker or an object.

12. The optical head has a scanning mechanism that moves the spot of laser light on the surface by scanning the spot of laser light on the surface, The laser surface processing apparatus according to claim 1, wherein the control unit controls the operation of the scanning mechanism.

13. The optical head comprises a diffractive optical element and a rotating mechanism that rotates the spot of the laser beam on the surface by rotating the diffractive optical element. The laser surface processing apparatus according to claim 1, wherein the control unit controls the operation of the rotation mechanism.

14. A server electrically connected to the control unit of the laser surface processing apparatus according to any one of claims 1 to 13 via a telecommunications line, A storage device that stores control data related to the control by the control unit, and on which the control data is read and written by the server, Equipped with, The server is a laser surface treatment system that writes the control data acquired via the control unit to the storage device.

15. The control unit performs control to reduce the output power of the laser light based on the physical quantity detected by the detection unit. The laser surface treatment system according to claim 14, wherein the control data includes data acquired within a predetermined time period prior to the time when the control to reduce the output power of the laser light is performed.

16. The control unit is provided in correspondence with the control unit and includes a storage unit for storing the control data, The control data stored in the storage device is downloaded via the server and the telecommunications line and stored in the storage unit. The laser surface treatment system according to claim 14, wherein the control unit controls at least one of the power of the laser beam output from the optical head and the irradiation position of the laser beam on the surface based on the downloaded control data.

17. The device includes an analyzer that calculates the value of the control data or the range of such value for each processing condition of the surface treatment based on the control data stored in the storage device, The value of the control data calculated by the analysis device, or the range of such value, is stored in the storage device. The value or range of the control data is downloaded to the storage unit via the server and the telecommunications line. The laser surface treatment system according to claim 16, wherein the control unit controls at least one of the power of the laser beam output from the optical head and the irradiation position of the laser beam on the surface based on the value or range of the downloaded control data.

18. The control unit performs control to reduce the output power of the laser light based on the physical quantity detected by the detection unit. The laser surface treatment system according to claim 17, wherein the control data includes data acquired within a predetermined time period prior to the time when the control to reduce the output power of the laser light is performed.

19. The analysis device acquires data as control data that is a precursor to the change in the physical quantity that leads to the control of reducing the output power of the laser light, based on data acquired within a predetermined time period prior to the point in time when the control to reduce the output power of the laser light is performed. The laser surface treatment system according to claim 18, wherein the control by the control unit is performed based on the precursory data.

Images