Valve control device, valve control system, valve control method, and valve control program

Abstract

To precisely adjust operation time of a valve with a simple configuration.SOLUTION: A valve control device 80 includes: an operation time measurement part 81 for measuring operation time of a valve V on the basis of operation pressure of the valve and an open / close state of a valve element of the valve; and a command control part 83 for transmitting an open command to the valve which is transmitted from the control device while delaying the command to the valve.SELECTED DRAWING: Figure 5

Description

Technical Field

[0001] The present invention relates to a valve control device, a valve control system, a valve control method, and a valve control program for adjusting the response time of a valve in order to keep the flow rate of a process gas controlled by the valve constant.

Background Art

[0002] In a film formation process for forming a thin film on the surface of a semiconductor wafer, miniaturization of the thin film is required, and in recent years, a film formation method called ALD (Atomic Layer Deposition) for forming a thin film with a thickness at the atomic level or molecular level has been used. Such miniaturization of the thin film requires the valve to perform opening and closing operations with higher frequency and precision than ever before. In this regard, the valve has a configuration in which a signal for an opening / closing command is transmitted from a control device to a solenoid valve, and an operating pressure is supplied or discharged to / from the opening / closing valve in accordance with the command.

[0003] However, the response time of the valve to the signal for the opening / closing command may change due to the aging deterioration of the valve caused by wear of the O-ring or the like. The change in the response time changes the opening time of the valve, which becomes a major problem in situations where precise control of the gas flow rate is required. Therefore, a system for precisely adjusting the response time so that a desired flow rate can be achieved is needed.

[0004] In this regard, Patent Document 1 discloses a valve in which an information processing module that processes data detected by a pressure sensor, a temperature sensor, and a limit switch is housed inside. Patent Document 2 discloses a fluid drive valve that detects an abnormality with three sensors: a first pressure sensor that detects the pressure in a pressure-receiving space, a second pressure sensor that detects the pressure in a non-pressure-receiving space, and a position sensor that detects the distance from a piston. Patent Document 3 discloses a control method for determining the presence or absence of an abnormality in a highly airtight gate valve by arranging a plurality of pressure sensors, vibration sensors, position sensors, etc.

Prior Art Documents

[0005] [Patent Document 1] International Publication No. 2018 / 168872 [Patent Document 2] Patent No. 7136469 [Patent Document 3] Patent No. 6564544 [Overview of the project] [Problems that the invention aims to solve]

[0006] One of the objectives of this invention is to precisely adjust the response time of a valve with a simple configuration. [Means for solving the problem]

[0007] To achieve the above objective, a valve control device according to one aspect of the present invention includes: an operating time measuring unit that measures the operating time of the valve based on the operating pressure of the valve and the open / closed state of the valve; and a command control unit that delays the open command transmitted from the control device to the valve and transmits it to the valve based on the operating time and a predetermined reference time.

[0008] The system further includes a delay time determination unit that determines a delay time to delay the opening command based on the difference between the operating time and the reference time, and the command control unit may delay the opening command by the delay time.

[0009] The delay time determination unit may refer to the time from a predetermined point in time when the operating pressure rises to a predetermined point in time when a valve opening operation corresponding to the rise is detected as the operating time, and determine the delay time based on the operating time and the reference time.

[0010] The delay time determination unit may refer to the time from a predetermined point in time when the operating pressure rises to a predetermined point in time when a valve opening operation corresponding to the rise is detected as the operating time, and refer to the time from a predetermined point in time when the operating pressure falls to a predetermined point in time when a valve closing operation corresponding to the fall is detected as the second operating time, and determine the delay time based on the operating time, the reference time, the second operating time, and a predetermined second reference time.

[0011] To achieve the above objective, a valve control method according to another aspect of the present invention includes: an operating time measurement step of measuring the operating time of a valve based on the operating pressure of the valve and the open / closed state of the valve; and an open command control step of delaying the transmission of an open command to the valve, based on the operating time and a predetermined reference time, to the valve.

[0012] To achieve the above objective, a valve control program according to yet another aspect of the present invention causes a computer to execute an operating time measurement command for measuring the operating time of the valve based on the operating pressure of the valve and the open / closed state of the valve, and an open command control command for delaying the open command transmitted to the valve from the control device and transmitting it to the valve based on the operating time and a predetermined reference time.

[0013] To achieve the above objective, a valve control system according to yet another aspect of the present invention comprises a valve, a control device that transmits an open command to the valve, and a valve control device that adjusts the time from a predetermined point in time when the operating pressure applied to the valve changes to a predetermined point in time when an operation corresponding to the change is detected as the operating time, wherein the valve comprises a valve that controls the flow and shutoff of fluid in a flow path by opening and closing the valve in accordance with the operating pressure, an operating pressure sensor that measures the operating pressure applied to the valve, and an open / close sensor that detects at least the open / closed state of the valve, and the valve control device comprises an operating time measuring unit that measures the operating time based on the operating pressure and the open / closed state of the valve, and a command control unit that delays the open command transmitted from the control device to the valve and transmits it to the valve based on the operating time and a predetermined reference time.

[0014] Computer programs can be provided by storing them on various data-readable storage media, or by making them available for download via networks such as the Internet. [Effects of the Invention]

[0015] According to the valve control device of the present invention, the response time of the valve can be precisely adjusted with a simple configuration. [Brief explanation of the drawing]

[0016] [Figure 1] This is an external perspective view showing a valve according to an embodiment of the present invention. [Figure 2] This is a longitudinal cross-sectional view showing the internal structure of the valve according to this embodiment, and is a diagram showing the valve in the open state. [Figure 3] This is a partially enlarged longitudinal cross-sectional view showing the internal structure of the valve according to this embodiment, (a) showing the valve in the open state and (b) showing the valve in the closed state. [Figure 4] This is a perspective view showing the bonnet of the valve according to this embodiment. [Figure 5]This is a functional block diagram showing the functions of the valve according to this embodiment. [Figure 6] This is a graph showing the relationship between the operating pressure and the position sensor output, which is the basis for calculating the operating time of the valve according to this embodiment. [Figure 7] This is a process flow diagram showing the flow of processes executed by the valve according to this embodiment. [Figure 8] This is a process flow diagram showing the flow of processes executed by the valve according to this embodiment.

Mode for Carrying Out the Invention

[0017] Hereinafter, the valve according to the embodiment of the present invention will be described with reference to the drawings. In the following description, for convenience, the directions of members and the like may be referred to as up, down, left, and right according to the directions on the drawing, but these do not limit the directions of members and the like during the implementation or use of the present invention. As shown in FIG. 1, the valve V according to this embodiment is an air-operated direct diaphragm valve that incorporates a sensor for detecting the internal operation of the valve V and performs communication with other terminals and the like. Here, the other terminals mentioned here include so-called computers such as servers, as well as devices and apparatuses such as other fluid control devices and flow control devices.

[0018] The valve V according to this embodiment is a device capable of acquiring data related to the internal operation, and as shown in FIGS. 1 and 2, includes a valve body portion 1, a first bonnet portion 2, a second bonnet portion 4, and an actuator portion 5.

[0019] ● Valve body portion 1 As shown in FIGS. 1 and 2, the valve body portion 1 includes a base portion 11 in which a process gas flow path is formed, a substantially cylindrical cylindrical portion 12 provided on the base portion 11, and an annular sheet 13. <0000The base portion 11 has a rectangular shape in plan view and, when a fluid control device unitized by multiple valves V is constructed, it becomes the part that is installed on a circuit board or manifold block.

[0020] The cylindrical portion 12 has a hollow shape with an open end face on the side where a part of the first bonnet portion 2 is disposed, and the inside of the hollow portion forms a recess 12a in which a part of the first bonnet portion 2 is housed. Below the recess 12a and inside the base portion 11, an inlet passage 111 through which fluid flows in, an outlet passage 113 through which fluid flows out, and a valve chamber 112 communicating with the inlet passage 111 and the outlet passage 113 are formed. The inlet passage 111, the outlet passage 113, and the valve chamber 112 integrally constitute a fluid flow path.

[0021] The annular sheet 13 is provided on the periphery of the inlet passage 111. A diaphragm 22 is provided on the sheet 13, which allows fluid to flow through the inlet passage 111 and the outlet passage 113, or to block the flow, by contacting and separating from the sheet 13.

[0022] ●First bonnet section 2 As shown in Figure 2, the first bonnet portion 2 is positioned on the cylindrical portion 12 of the valve body portion 1. This first bonnet section 2 comprises a first bonnet body 21, a diaphragm 22, a disc 23, a sensor bonnet 24, a diaphragm retainer 25, and a retainer adapter 26.

[0023] As shown in Figures 3(a) and (b), the diaphragm 22 is a spherical shell-shaped member made of metal such as stainless steel or Ni-Co alloy, or fluororesin, with a convex bulge in the center 221, and separates the inlet passage 111 and outlet passage 113 from the space in which the first bonnet section 2 operates.

[0024] The first bonnet body 21 is interposed between the cylindrical portion 12 and the second bonnet body 41. The first bonnet body 21 has a roughly cylindrical shape, and a through-hole 21a is provided along its length in the center through which the sensor bonnet 24 passes. The lower end of the first bonnet body 21 is in contact with the retaining adapter 26, pressing the retaining adapter 26 downward. The first bonnet body 21 has an opening at one end opposite to the base portion 11, and is provided with a slit 21b that penetrates from the outside towards the through hole 21a.

[0025] When the diaphragm 22 is released from the pressure of the diaphragm retainer 25 after the driving fluid is supplied as the operating pressure, its central portion 221 is displaced away from the seat 13 by its own restoring force and the pressure in the flow path. As a result, the valve chamber 112 is opened, and the inlet passage 111 and the outlet passage 113 are connected. On the other hand, when the driving fluid is discharged as the operating pressure and the diaphragm 22 is pressed by the diaphragm retainer 25, the central portion 221 of the diaphragm 22 is displaced in a direction that contacts the seat 13 and comes into contact with the seat 13. As a result, the valve chamber 112 is closed, and the inlet passage 111 and the outlet passage 113 are closed.

[0026] In other words, the central portion 221 of the diaphragm 22 is a movable portion that is displaced by the supply of the driving fluid, while the peripheral portion 222 is a non-movable portion that is not displaced even when the driving fluid is supplied.

[0027] The peripheral edge 222 of the diaphragm 22 abuts against the retaining adapter 26, which will be described later, and is held between the retaining adapter 26 and the projection 121a (see Figures 3(a) and (b)) which is provided facing upward inside the recess 12a of the valve body 1.

[0028] The disc 23 is located above the diaphragm 22 and is supported by the sensor bonnet 24 so as to be able to move up and down, and presses against the central part of the diaphragm 22 in conjunction with the sliding stem 43.

[0029] An O-ring O1 is attached to the outer surface of the disc 23, and this O-ring O1 seals the inner surface of the sensor bonnet 24 between the disc 23 and the sensor bonnet 24.

[0030] The upper part of the disk 23 has a smaller outer diameter, and the magnet holder M10 is inserted through it. The magnet holder M10 is a roughly annular member with a portion cut out, and a magnet is attached to the cut-out portion. This magnet, together with the magnetic material M2 attached to the sensor holder 241 which is fitted into a recess in the sensor bonnet 24, constitutes the magnetic sensor M described later. The magnet holder M10 also has a recess on its outer circumference, and a positioning member such as a bolt that passes through the sensor holder 241 presses against this recess, preventing the magnet holder M10 from shifting position. A lock nut 231 is fitted on the upper end of the disk 23, above the magnet holder M10, to prevent the magnet holder M10 from coming out.

[0031] A diaphragm retainer 25 is connected to the lower end of the disc 23. The diaphragm retainer 25 has a convex surface that bulges downwards on its lower side, and on its lower side it contacts the central part 221 of the diaphragm 22, pressing the diaphragm 22 in conjunction with the sliding stem 43.

[0032] As shown in Figures 3(a) and (b), the lower end of the diaphragm retainer 25 is in contact with the central portion 221 of the diaphragm 22, both when the valve is open and when it is closed. In other words, the contact area between the diaphragm retainer 25 and the diaphragm 22 is the same when the valve is open and when it is closed. With this configuration, the heat transfer area of ​​the diaphragm 22 is kept constant when the valve is open and when it is closed, enabling accurate temperature measurement by the temperature sensor T described later.

[0033] As shown in Figures 2 and 4, the sensor bonnet 24 is substantially cylindrical and is housed within the first bonnet body 21, covering the valve chamber 112. Inside the sensor bonnet 24, a through-hole 241a is formed in the center through which the disk 23 is inserted. Furthermore, the sensor bonnet 24 is provided with a communication hole 241d that communicates with the pressure sensor P and the temperature sensor T. By providing the pressure sensor P and the temperature sensor T through the communication hole 241d, it is possible to measure the pressure and temperature within the space defined by the diaphragm 22, the disk 23, and the sensor bonnet 24. In this embodiment, the temperature sensor T is provided inside the sensor bonnet 24, but the temperature sensor T only needs to be located inside the valve body 1, and in particular, at least the temperature detection portion of the temperature sensor T needs to be mounted inside the valve body 1. With this configuration, the temperature inside the valve V can be accurately measured simply by installing the valve V, without having to perform any separate installation work for a temperature sensor.

[0034] Additionally, a flexible cable 60 extends outward from the side of the sensor bonnet 24, connecting to the pressure sensor P, temperature sensor T, and magnetic sensor M located inside the sensor bonnet 24.

[0035] A magnetic material M2, held by a sensor holder 241, is attached to the inner circumferential surface of the sensor bonnet 24, and together with the magnet attached to the disk 23, it constitutes the magnetic sensor M described later.

[0036] The sensor bonnet 24 is made of aluminum. Because aluminum has a higher thermal conductivity than materials such as stainless steel, it can more accurately transmit the fluid temperature to the temperature sensor T inside the sensor bonnet 24. Furthermore, since the sensor bonnet 24 made of aluminum is not magnetized, the influence of the magnetic sensor M on the temperature sensor T and pressure sensor P can be reduced.

[0037] The retaining adapter 26 contacts the peripheral edge 222 of the diaphragm 22, and clamps the diaphragm 22 between itself and the projection 121a in the recess 12a of the valve body 1. It also presses down on the peripheral edge 222 from above, preventing the fluid flowing through the inlet passage 111 and outlet passage 113 from leaking to the outside from near the peripheral edge 222.

[0038] The retaining adapter 26 does not touch the movable part of the diaphragm 22, in other words, the central part 221, whether the valve is open or closed. Furthermore, the contact area between the retaining adapter 26 and the diaphragm 22 is the same whether the valve is open or closed. With this configuration, the heat transfer area of ​​the diaphragm 22 can be kept constant whether the valve is open or closed. Consequently, since the conductive heat from the diaphragm 22 is constant, accurate temperature measurement by the temperature sensor T, described later, is possible regardless of the valve's open or closed state.

[0039] ● Second bonnet section 4 The second bonnet section 4 is positioned on top of the first bonnet section 2. As shown in Figure 2, this second bonnet section 4 comprises a second bonnet body 41, a stem 43, and a spring 44.

[0040] The second bonnet body 41 is interposed between the stem 43 and the sensor bonnet 24. This second bonnet body 41 has a roughly cylindrical shape, and a through-hole 41a is provided along its length in the center, through which the stem 43 and disc 23 are inserted. As shown in Figures 2 and 3, the stem 43 and disc 23 are in contact within the through-hole 41a, and when the stem 43 is displaced downward, the disc 23 is pressed downward, causing the diaphragm 22 to contact the seat 13.

[0041] The stem 43 moves up and down in response to the supply and release of operating pressure, causing the diaphragm 22 to come into contact with and separate from the seat 13 via the disc 23 and the diaphragm retainer 25. A rod 431 is connected to the upper part of the stem 43. The rod 431 protrudes from the upper part of the second bonnet section 4 and is inserted into the actuator section 5. Since the rod 431 is connected to the stem 43 and moves up and down together as one unit, the rod 431 is sometimes treated as synonymous with the stem 43. The stem 43 has an enlarged diameter section at its lower part, and the biasing force of the spring 44 is received on the upper surface of the enlarged diameter section.

[0042] The spring 44 is wound around the outer surface of the stem 43 and contacts the upper surface of the enlarged diameter portion formed at the lower part of the stem 43, biasing the stem 43 downward, that is, in a direction that pushes the diaphragm 22 downward.

[0043] ● Actuator section 5 As shown in Figure 2, the actuator section 5 is a bottomed cylindrical member having a supply port 51 to which a source of drive fluid is connected. The supply port 51 is an opening that communicates with an operating pressure introduction passage 511 formed above the rod 431, and the operating pressure introduction passage 511 branches radially from the axial direction of the rod 431 and communicates with the operating pressure chamber 52.

[0044] Inside the actuator section 5, there are two pistons 54, one above and one below, that engage with the rod 431 and are slidably mounted in the vertical direction. The space in which the piston 54 is located is divided into an operating pressure chamber 52 and an atmospheric chamber 55.

[0045] The operating pressure chamber 52 is connected to the operating pressure introduction passage 511 formed in the center of the rod 431 via a branch passage. The opening at the upper end of the operating pressure introduction passage 511 of the rod 431 is connected to the supply port 51 formed in the upper center of the actuator section 5. The drive fluid supplied through the operating pressure introduction passage 511 is supplied to the operating pressure chamber 52. The atmospheric chamber 55 is in communication with the atmosphere through an air discharge passage 551 formed on the upper or side of the actuator section 5.

[0046] O-rings O2 are provided between the piston 54 and the inner wall of the actuator section 5, and between the rod 431 and the piston 54, to ensure airtightness of the operating pressure chamber 52. These O-rings O2 slide up and down in accordance with the up and down movement of the piston 54.

[0047] Here, we will discuss the opening and closing operation of the valve in conjunction with the supply and cessation of operating pressure. When the drive fluid is supplied from the three-way valve connected to the supply port 51 via an introduction pipe (not shown), the drive fluid is introduced into the operating pressure chamber 52 via the operating pressure introduction passage 511. In response, when the piston 54 rises, the stem 43 and sensor bonnet 24 are pushed upward against the biasing force of the spring 44, and the air in the atmospheric chamber 55 is discharged to the outside via the air discharge passage 551. As a result, the diaphragm 22 separates from the seat 13 and the valve opens, allowing fluid to flow. On the other hand, when the supply of the drive fluid is shut off in the three-way valve, and the supply port 51 and operating pressure introduction passage 511 are opened to the atmosphere via the introduction pipe (not shown), the operating pressure in the operating pressure chamber 52 is discharged to the outside via the operating pressure introduction passage 511. In response, as the pressure in the operating pressure chamber 52 decreases, the piston 54 descends, and the stem 43 and sensor bonnet 24 are pushed downward according to the biasing force of the spring 44. Also, outside air flows into the atmospheric chamber 55 through the air discharge passage 551. As a result, the diaphragm 22 comes into contact with the seat 13, closing the valve and shutting off the flow of fluid.

[0048] ● Sensor Valve V is equipped with a pressure sensor P, a temperature sensor T, a magnetic sensor M, and an operating pressure sensor D as sensors for detecting operation within the device. Of these, the pressure sensor P, temperature sensor T, and magnetic sensor M are located inside the sensor bonnet 24 and face the through-hole 241a of the sensor bonnet 24 via the communication hole 241d of the sensor bonnet 24 shown in Figure 4, and communicate with the space defined by the diaphragm 22, disk 23, and sensor bonnet 24. As a result, the pressure sensor P can detect the pressure in this space. Furthermore, a sealing member such as a packing is interposed at the point where the pressure sensor P connects to the communication hole 241d, ensuring an airtight state.

[0049] The temperature sensor T measures the temperature of the space defined by the diaphragm 22, disk 23, and sensor bonnet 24. According to the valve V having the temperature sensor T, the fluid temperature can be measured along with fluid control.

[0050] A magnetic material M2 is attached to the through-hole 241e of the sensor bonnet 24. This magnetic material M2, together with the magnet attached to the disk 23, constitutes a magnetic sensor M and acts as a position sensor to detect the position of the stem 43. This magnetic sensor M can detect the opening and closing operation of the valve and the amount of movement of the stem 43, as follows. Specifically, the magnet held in the magnet holder M10 slides in accordance with the vertical movement of the disk 23, while the magnetic body M2 moves together with the sensor bonnet 24. First bonnet section 2 It is fixed inside. As a result, the movement of the disk 23 and the diaphragm retainer 25, and consequently the opening and closing operation of the valve and the amount of movement of the stem 43 can be detected based on the change in the magnetic field generated between the magnet held in the magnet holder M10, which moves up and down in accordance with the up and down movement of the disk 23, and the magnetic material M2, which is fixed in position. The magnetic sensor M is an example of a position sensor, and is at least an example of an open / close sensor that detects the open / closed state of a valve. In this embodiment, a magnetic sensor M is used, but the invention is not limited to this, and in other embodiments, other types of sensors, such as optical position sensors, can be used.

[0051] The operating pressure sensor D is provided in the actuator unit 5 and detects the operating pressure in the operating pressure chamber 52 via a communication hole 53 that communicates with the operating pressure chamber 52.

[0052] Each of the pressure sensor P, temperature sensor T, magnetic sensor M, and operating pressure sensor D is connected to one end of a flexible communication cable 60 (specifically, the magnetic sensor M is connected to a magnetic material M2), and the other end of the flexible cable 60 is connected to a circuit board located on the outside of the valve V. Furthermore, the circuit board is provided with a roughly rectangular connector for external terminal connection, which allows for the extraction of data measured by the pressure sensor P, temperature sensor T, and magnetic sensor M. The type and shape of the connector can be designed as appropriate according to various standards. In addition, the data detected by each sensor may be transmitted wirelessly to a predetermined device or server.

[0053] With a valve V having this configuration, data detected by the pressure sensor P, temperature sensor T, magnetic sensor M, and operating pressure sensor D can be output to the outside. This data can then be used to understand the opening and closing operation of the valve and its operating time, leakage due to damage to the diaphragm 22, and the aging deterioration and individual differences of the valve V.

[0054] ● Control Unit As shown in Figure 5, the valve V according to this embodiment has a communication processing unit 70 that communicates data detected by a sensor with the valve control device 80. In the example in Figure 5, the valve V and the valve control device 80 are connected via a network NW. The control device 100 is also connected to the valve control device 80 and transmits open and close commands to control the opening and closing of the valve V. The open and close commands are transmitted to the solenoid valve B via the valve control device 80. The solenoid valve B is installed in the flow path of the drive fluid, and the valve V opens and closes in accordance with the opening and closing of the drive fluid.

[0055] ● Valve control device 80 The valve control device 80 is, for example, a server and is implemented by one or more hardware configurations. Furthermore, some or all of the functional components of the valve control device 80 may be configured using cloud computing. The valve control device 80 consists mainly of a functional block comprising an operating time measurement unit 81, a delay time determination unit 82, a command control unit 83, and a communication processing unit 84, comprising a CPU (Central Processing Unit), a computer program executed by the CPU, and RAM (Random Access Memory) and ROM (Read Only Memory) for storing the computer program and predetermined data.

[0056] The operating time measurement unit 81 is a functional unit that measures the operating time of valve V based on the operating pressure applied to valve V and the open / closed state of valve V. The operating time is, for example, the time from a predetermined point in time when the operating pressure is applied to valve V to a predetermined point in time during the opening operation of valve V.

[0057] Figure 6 shows an image of how the operating time is calculated, with the horizontal axis representing the change over time and the vertical axis representing the output values ​​of the operating pressure sensor D and the position sensor. According to this graph, when an open command is issued to the solenoid valve B and operating pressure is introduced into the operating pressure chamber 52, the stem 43 rises and the position sensor (magnetic sensor M) shows a predetermined output value. Also, when a close command is issued to the solenoid valve B and the operating pressure in the operating pressure chamber 52 is discharged, the stem 43 descends after a certain time lag and the position sensor (magnetic sensor M) shows a predetermined output value. This time lag, that is, the time from a predetermined point in time when the operating pressure changes to a predetermined point in time when the corresponding operation is detected by the position sensor (magnetic sensor M), corresponds to the operating time of the valve opening and closing operation. For example, in Figure 6, time t1 represents the operating time during the valve opening operation, and time t2 represents the second operating time during the valve closing operation. Note that the operating pressure, which marks the start of the operating time, and the position sensor output, which marks the end of the operating time, are arbitrary predetermined values, and the values ​​on the axes shown on the left and right of Figure 6 are merely examples. The operating time measurement unit 81 obtains the operating time by referring to the measurement results of the operating pressure sensor D and the magnetic sensor M, which are acquired from the valve V via the communication processing unit 84.

[0058] The delay time determination unit 82 is a functional unit that determines the delay time of the open command transmitted to the solenoid valve B based on the difference between the operating time measured by the operating time measurement unit 81 and the reference time. Specifically, the delay time is an absolute value obtained from the formula "reference time - operating time". The reference time is an appropriate value for the time required from pressurization to the opening operation of valve V. The reference time may be a value that is pre-stored in an appropriate memory unit. Alternatively, the reference time may be a value stored by measuring the operating time in the initial state when valve V is first put into use. Furthermore, the reference time may be the design value for the operating time of valve V.

[0059] The operating time tends to increase due to aging, mainly due to wear of the O-ring O2 (see Figure 2). When the operating time increases, the timing of the valve opening and closing operations in response to the valve V opening and closing commands deviates from the initial state, and the flow rate of the process gas does not become the specified amount. In other words, a faster operating time for valve opening increases the time the valve is open and fluid is flowing, i.e., the valve opening time, and increases the flow rate of the process gas above the specified amount. Conversely, a faster operating time for valve closing shortens the valve opening time and reduces the flow rate of the process gas below the specified amount (the operating time for valve closing may be referred to as the "second operating time" below). Therefore, for the delay time obtained by "reference time - operating time" above, "reference time - operating time = delay time > 0", and the command control unit 83, described later, can delay the opening command by the amount of the delay time, thereby making the operating time for valve opening match the reference time. Furthermore, in a normally closed valve like the one in this configuration, the response speed of the valve opening operation tends to be slower than the response speed of the valve closing operation due to the relationship between the frictional force of the O-ring and the biasing force of the spring. In other words, in the case of the valve V according to this embodiment, since the spring 44 is always biased in the closing direction, the time it takes for the operating pressure to be released from the operating pressure chamber 52 during the closing operation, and for the spring 44 to overcome the frictional force of the O-ring O2 and close the valve, is faster than the time it takes to accumulate operating pressure in the operating pressure chamber 52 to build up a force that overcomes the biasing force of the spring 44 and the frictional force of the O-ring O2 and open the valve. Therefore, it is the valve opening operation that is most likely to experience discrepancies in operating time due to wear of the O-ring O2, etc.

[0060] The command control unit 83 is a functional unit that delays the transmission of open or close commands to the solenoid valve B from the control device 100. For example, when the command control unit 83 receives an open command from the control device 100, it waits for the delay time determined by the delay time determination unit 82 before transmitting the open command to the solenoid valve B.

[0061] Therefore, the delay time determination unit 82 compares the operating time from the point in time when the operating pressure is increased and changes, to the point in time when the valve opens based on the change in the output of the magnetic sensor M, with a reference time, and determines the delay time based on the difference between the operating time and the reference time. With this configuration, the opening time of the valve V can be delayed and the valve opening time of the valve V can be shortened. Consequently, even if the operating time of the valve V has become faster due to aging or other reasons, the flow rate of the process gas controlled by the valve V can be guaranteed to be at the specified amount.

[0062] Furthermore, the operating time measurement unit 81 may acquire the time from the moment the operating pressure pressurized in valve V is released until the moment of valve closing detected based on the change in the output of the magnetic sensor M as the second operating time at valve closing. The delay time determination unit 82 determines the second delay time given to the closing command based on the difference between this second operating time at valve closing and a predetermined second reference time. The second reference time is an appropriate value for the time required from the release pressure from valve V to the closing operation, and may be a value pre-stored in a suitable memory unit, or a value measured and stored from the second operating time in the initial state when valve V is first put into use. Furthermore, the second reference time may be the design value for the second operating time of valve V. The second reference time is set separately from the first reference time. Also, the second delay time is determined independently of the first delay time.

[0063] When the command control unit 83 receives a close command from the control device 100, it waits for the duration of the second delay time before transmitting the close command to the solenoid valve B. With this configuration, even if the valve V has a faster second operating time when closing, the flow rate of the process gas controlled by the valve V can be guaranteed to be at the specified amount.

[0064] Furthermore, the delay time determination unit 82 may determine the delay time for the opening command by referring to the respective operating times and second operating times of the valve opening and valve closing operations. The valve closing operation shortens due to deterioration over time, thereby shortening the valve opening time. Therefore, with this configuration, the respective delay times and second delay times are determined based on the valve opening and valve closing operations, the reference time and the second reference time, and the opening command is delayed based on a third delay time obtained by canceling out these delay times and the second delay time. With this configuration, the valve opening time can be controlled more appropriately. Specifically, due to the difference between the valve closing and valve opening operations described above, "delay time > second delay time", so the third delay time can be obtained from the formula "delay time - second delay time".

[0065] The communication processing unit 84 is a functional unit that communicates with the control device 100 and the solenoid valve B. The communication processing unit 84 receives open and close commands from the control device 100. The communication processing unit 84 also receives the measurement results of the operating pressure sensor D and the magnetic sensor M from the communication processing unit 70 of the valve V. Furthermore, the communication processing unit 84 transmits open and close commands to the solenoid valve B.

[0066] ● Processing Flow Using Figure 7, the processing flow in which the valve control device 80 transmits an open command to the solenoid valve B will be explained. First, the operating time measurement unit 81 of the valve control device 80 receives the measurement results from the operating pressure sensor D and the magnetic sensor M, and obtains the time from the pressurization of the operating pressure to the valve opening operation, i.e., the operating time when the valve is open (step S101).

[0067] Next, the delay time determination unit 82 determines the delay time for the open command by referring to the operating time and the reference time (step S102).

[0068] Next, the command control unit 83 delays the open command by the delay time and transmits it to the solenoid valve B (step S103). Then the process returns to step S101, and thereafter steps S101 to S103 are repeated periodically.

[0069] Figure 8 shows another embodiment of the processing flow performed by the valve control device 80, in which the operating time of the open command and the close command are referenced, and the open command is sent and transmitted for a determined delay time. First, the operating time measurement unit 81 calculates the operating time when the valve is open (step S201). The operating time measurement unit 81 also receives the measurement results from the operating pressure sensor D and the magnetic sensor M and calculates the time from when the operating pressure is released by a predetermined amount until the valve closes, i.e., the second operating time when the valve is closed (step S202). Steps S201 and S202 can be performed in any order and may be performed simultaneously.

[0070] Next, the delay time determination unit 82 determines the third delay time by referring to the operating time when the valve is open and when it is closed, the second operating time, the reference time, and the second reference time (step S203).

[0071] Next, the command control unit 83 delays the open command by the third delay time and transmits it to the solenoid valve B (step S204). Then the process returns to step S201, and thereafter steps S201 to S204 are repeated periodically.

[0072] According to the valve V of this embodiment described above, changes in operating time due to changes in the valve actuator over time can be monitored. Furthermore, the valve control device 80 allows for precise adjustment of the operating time of the valve V with a simple configuration by adjusting the transmission timing of the open command sent to the solenoid valve B based on the change in operating time. The functional units of the valve control device 80 may be configured inside the control device 100. However, if the valve control device 80 is implemented as hardware independent of the control device 100, the operating time of the valve V can be precisely adjusted by connecting the valve control device 80 to any control device 100. In other words, the valve control device 80 offers high convenience because the operating time can be adjusted without modifying the system of the control device 100.

[0073] Furthermore, the operating time of valve V in response to the control signal tends to shorten mainly due to aging changes such as wear of the O-ring O2 (see Figure 2). As aging progresses further, the response speed tends to slow down due to increased leakage within the actuator unit 5 (see Figure 2). Therefore, it is possible to monitor changes in the response speed and detect the timing when the response speed begins to slow down to determine if there is an abnormality in valve V.

[0074] Although the present invention has been described above using embodiments, the technical scope of the present invention is not limited to the scope described in the above embodiments, and various modifications and changes are possible within the scope of its gist. [Explanation of symbols]

[0075] V-valve 1. Valve body section 11 Base 12 Cylindrical section 12a Recess 12b Slit 13 seats 2. Hood section 22 diaphragm 23 discs 24 Sensor Bonnet 25 Diaphragm retainer 26 Retaining Adapter 4. Second bonnet section 41. Second bonnet body 43 Stem 44 Springs 60 Flexible Cables P pressure sensor D Operating pressure sensor T temperature sensor M Magnetic sensor (position sensor, open / close sensor) 80 Valve control device 81 Operating time measurement unit 82 Delay Time Determination Unit 83 Command and Control Unit 84 Communication Processing Unit

Claims

1. An operating time measuring unit that measures the operating time of the valve based on the operating pressure of the valve and the open / closed state of the valve, A command control unit that delays the open command transmitted from the control device to the valve and transmits it to the valve based on the aforementioned operating time and a predetermined reference time, A delay time determination unit determines a delay time to delay the opening command based on the difference between the operating time and the reference time, Equipped with, The command control unit delays the open command by the delay time, The delay time determination unit refers to the time from a predetermined point in time when the operating pressure rises to a predetermined point in time when a valve opening operation corresponding to the rise is detected as the operating time, and refers to the time from a predetermined point in time when the operating pressure falls to a predetermined point in time when a valve closing operation corresponding to the fall is detected as the second operating time, and determines the delay time based on the operating time, the reference time, the second operating time, and a predetermined second reference time. Valve control device.

2. An operating time measurement step for measuring the operating time of the valve based on the operating pressure of the valve and the open / closed state of the valve, A command control step of delaying the open command to the valve transmitted from the control device based on the aforementioned operating time and a predetermined reference time, and then transmitting it to the valve; A delay time determination step in which a delay time is determined to delay the opening command based on the difference between the operating time and the reference time, Includes, The command control step delays the open command by the delay time, The delay time determination step involves referring to the time from a predetermined point in time when the operating pressure rises to a predetermined point in time when a valve opening operation corresponding to the rise is detected as the operating time, referring to the time from a predetermined point in time when the operating pressure falls to a predetermined point in time when a valve closing operation corresponding to the fall is detected as the second operating time, and determining the delay time based on the operating time, the reference time, the second operating time, and a predetermined second reference time. Valve control method.

3. An operating time measurement command for measuring the operating time of the valve based on the valve's operating pressure and the valve's open / closed state, A command control command is transmitted to the valve with a delay in the open command transmitted from the control device to the valve, based on the aforementioned operating time and a predetermined reference time. A delay time determination command that determines a delay time to delay the opening command based on the difference between the operating time and the reference time, Have the computer run it, The command control instruction delays the open command by the delay time, The delay time determination command refers to the time from a predetermined point in time when the operating pressure rises to a predetermined point in time when a valve opening operation corresponding to the rise is detected as the operating time, and refers to the time from a predetermined point in time when the operating pressure falls to a predetermined point in time when a valve closing operation corresponding to the fall is detected as the second operating time, and determines the delay time based on the operating time, the reference time, the second operating time, and a predetermined second reference time. Valve control program.

4. Valves and A control device that transmits an open command to the valve, A valve control device that adjusts the operating time as the time from a predetermined point in time when the operating pressure applied to the valve changes to a predetermined point in time when an action corresponding to the change is detected, A valve control system comprising, The aforementioned valve is A valve that controls the flow and blockage of fluid in a flow path by opening and closing the valve in accordance with the aforementioned operating pressure, An operating pressure sensor for measuring the operating pressure pressurized in the valve, An open / close sensor that detects at least the open / closed state of the valve, Equipped with, The valve control device is An operating time measuring unit that measures the operating time based on the operating pressure and the open / closed state of the valve, A command control unit that delays the open command transmitted from the control device to the valve and transmits it to the valve based on the aforementioned operating time and a predetermined reference time, A delay time determination unit determines a delay time to delay the opening command based on the difference between the operating time and the reference time, Equipped with, The command control unit delays the open command by the delay time, The delay time determination unit refers to the time from a predetermined point in time when the operating pressure rises to a predetermined point in time when a valve opening operation corresponding to the rise is detected as the operating time, and refers to the time from a predetermined point in time when the operating pressure falls to a predetermined point in time when a valve closing operation corresponding to the fall is detected as the second operating time, and determines the delay time based on the operating time, the reference time, the second operating time, and a predetermined second reference time. Valve control system.

Images