Energy supply device and energy supply method

Abstract

To prevent adverse influences from being exerted upon an energy application subject by applying unnecessary energy to the energy application subject.SOLUTION: An energy application device EA comprises: application means 10 for applying energy to an energy application subject AS; and detection means 20 for detecting unnecessary energy, which is not necessary to be applied to the energy application subject AS, in the energy to be applied by the application means 10. Before applying energy to the energy application subject AS, the detection means 20 detects unnecessary energy.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to an energy application device and an energy application method.

Background Art

[0002] An energy application device for applying energy to an energy application object is known (see, for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In the ultraviolet irradiation device 1 (energy application device) described in Patent Document 1, since it is not configured to detect the energy before applying ultraviolet rays (energy) to the adhesive tape 14 (energy application object), there is a problem that unnecessary energy that does not need to be applied is applied to the energy application object, which has an adverse effect on the energy application object.

[0005] An object of the present invention is to provide an energy application device and an energy application method capable of preventing unnecessary energy from being applied to an energy application object and having an adverse effect on the energy application object.

Means for Solving the Problems

[0006] The present invention employs the configuration described in the claims.

Effects of the Invention

[0007] According to the present invention, unwanted energy can be detected before energy is supplied to the object to be energized, thereby preventing unwanted energy from being supplied to the object and adversely affecting it. Furthermore, by providing a cooling mechanism, the detection mechanism, which has been heated by thermal energy, can be quickly cooled. [Brief explanation of the drawing]

[0008] [Figure 1] An explanatory diagram of an energy supply device according to one embodiment of the present invention. [Modes for carrying out the invention]

[0009] An embodiment of the present invention will be described below with reference to Figure 1. In this embodiment, the X, Y, and Z axes are orthogonal to each other. The X and Y axes are axes within a predetermined plane, and the Z axis is an axis perpendicular to the predetermined plane. Furthermore, in this embodiment, when directions are indicated based on a view from the front direction of Figure 1, which is parallel to the Y axis, "up" is the direction of the Z-axis arrow and "down" is the opposite direction, "left" is the direction of the X-axis arrow and "right" is the opposite direction, and "front" is the front direction in Figure 1, which is parallel to the Y axis and "back" is the opposite direction.

[0010] The energy transfer device EA includes an energy transfer means 10 that performs an energy transfer process for transferring energy to an adhesive sheet AS, which is the object to be energy transferred; a detection means 20 that performs a detection process for detecting thermal energy, which is unnecessary energy that does not need to be transferred to the adhesive sheet AS from the energy transferred by the energy transfer means 10; and a cooling means 30 that performs a cooling process for cooling the detection means 20.

[0011] The imparting means 10 includes a linear motor 11 as a drive device, a lid member 12 supported on the output shaft 11A of the linear motor 11 and having a recess 12A formed on its upper surface, a housing 13, an energy irradiation means 14 for irradiating energy onto the adhesive sheet AS, and a table 15 positioned above the energy irradiation means 14 and supported by the housing 13. The energy irradiation means 14 comprises a linear motor 14A as a drive device supported on the bottom surface 13A of the housing 13, a cover 14C supported by the slider 14B of the linear motor 14A, a light-emitting means 14D housed inside the cover 14C and composed of a high-pressure mercury lamp or an LED (light-emitting diode) lamp, and a light-collecting means 14E such as a reflector or lens that collects the energy emitted by the light-emitting means 14D. The light-emitting means 14D generates energy that includes ultraviolet light, which reduces the adhesive strength of the adhesive sheet AS. However, the energy generated by the light-emitting means 14D includes unwanted energy. This unwanted energy includes thermal energy that heats the adhesive sheet AS and the adherend WK, adversely affecting them. The table 15 has a recess 15A with a support surface 15B on its bottom surface where a first through hole 15C is formed, and a second through hole 15D.

[0012] The detection means 20 is supported on the bottom surface of the recess 12A and includes a temperature sensor 21 as a detection device having a receiving portion 21A that receives the energy emitted by the energy application means 10, and is configured to detect thermal energy before energy is applied to the adhesive sheet AS. The detection means 20 detects thermal energy by detecting the temperature value of the receiving portion 21A, which changes temperature due to the heating of the receiving portion 21A, from the energy emitted by the energy application means 10.

[0013] The cooling means 30 includes a gas blowing device 31 that blows a gas AR, such as air or a single gas, from the nozzle 31A, and is configured to cool the receiving section 21A.

[0014] The operation of the energy supply device EA described above will now be explained. First, the user of the energy supply device EA (hereinafter simply referred to as "user") inputs a signal to start automatic operation to the energy supply device EA, in which each component is positioned at the initial position shown by the solid line in Figure 1, via an operating means not shown, such as an operation panel or a personal computer. Next, the user or a transport means not shown, such as an articulated robot or a belt conveyor, places the integrated object UP, in which the ring frame RF as a frame member and the adherend WK are integrated via an adhesive sheet AS, at a predetermined position on the support surface 15B, as shown in Figure 1. The supply means 10 then drives the linear motor 11, and as shown by the dashed line in Figure 1, lowers the lid member 12 to contact the housing 13 and the table 15.

[0015] Subsequently, the energy supply means 10 drives the light-emitting means 14D to generate energy, which is then supplied to the receiving portion 21A by the light-collecting means 14E. At this time, the detection means 20 drives the temperature sensor 21 to detect the temperature of the receiving portion 21A and detect the thermal energy. Next, if the temperature of the receiving portion 21A detected by the detection means 20 is below a predetermined value, the energy supply means 10 drives the linear motor 14A to move the light-emitting means 14D back and forth, irradiating the adhesive sheet AS with ultraviolet light and supplying energy. When the light-emitting means 14D returns to its initial position, the energy supply means 10 stops driving the light-emitting means 14D, and then the cooling means 30 drives the linear motor 11 to return the lid member 12 to its initial position. Next, the cooling means 30 drives the gas-blowing device 31 to blow gas AR onto the receiving portion 21A to cool it. Subsequently, the user or a transporting means (not shown) transports the integrated object UP to the next process, and the same operation as described above is repeated thereafter.

[0016] Here, if the detection means 20 detects that the temperature of the receiving portion 21A exceeds a predetermined value and unnecessary thermal energy that does not need to be applied to the adhesive sheet AS is detected, the detection means 20 outputs a predetermined signal to the application means 10 and warning devices (not shown) such as a display or speaker. Upon receiving the predetermined signal, the warning devices emit a warning signal, such as a screen display or sound, via a display or speaker, to inform the user that unnecessary thermal energy has been detected. Meanwhile, the application means 10 stops driving the light-emitting means 14D, then drives the linear motor 11 to return the lid member 12 to its initial position. After that, the user replaces or repairs the light-emitting means 14D, and then inputs a signal to start automatic operation again via an operating means (not shown), and the above operation is repeated thereafter.

[0017] According to the above embodiment, by detecting thermal energy before energy is applied to the adhesive sheet AS, it is possible to prevent thermal energy from being applied to the adhesive sheet AS and adversely affecting it.

[0018] As described above, the best configurations, methods, etc., for carrying out the present invention are disclosed in the above description, but the present invention is not limited thereto. That is, although the present invention is mainly illustrated and described in relation to specific embodiments, those skilled in the art can make various modifications to the embodiments described above in terms of shape, material, quantity, and other detailed configurations without departing from the scope of the technical idea and objectives of the present invention. Furthermore, the descriptions of shapes, materials, etc. disclosed above are illustrative to facilitate understanding of the present invention and do not limit the present invention, so descriptions of components with some or all of those limitations removed are included in the present invention.

[0019] For example, the energy supply means 10 may include a shutter 16 that opens and closes the first through-hole 15C, as shown by the dashed line in Figure 1, and by opening the shutter 16 for a predetermined time while driving the light-emitting means 14D to emit light, energy may be supplied to the receiving part 21A for a predetermined time. Alternatively, as shown by the dashed line in Figure 1, the energy supply means 17 such as a pressurizing pump or turbine may be provided that communicates with the recess 15A via a pipe 17A, and an inert gas such as nitrogen gas or argon gas may be supplied by the gas supply means 17 into the space formed by the lid member 12, the recess 15A and the adhesive sheet AS. Alternatively, the recess 12A may not be formed in the lid member 12, or a recess 12A may be formed on the lower surface of the lid member 12, and the temperature sensor 21 may be supported on the upper surface of the recess 12A. Alternatively, the housing 13 may not be provided. As the light-emitting means 14D, for example, an LED (Light Emitting) may be provided. Diode lamps, high-pressure mercury lamps, low-pressure mercury lamps, metal halide lamps, xenon lamps, halogen lamps, etc. may be used, or a combination thereof may be used as appropriate. Energy may also be applied to the adhesive sheet AS by moving the table 15 while moving the light-emitting means 14D, either without moving it or while moving it. The energy applying means 10 may apply energy to the adhesive sheet AS by, for example, heating the adhesive sheet AS with heating means such as a coil heater or the heating side of a heat pipe when it is necessary to heat or cool the adhesive sheet AS, cooling the adhesive sheet AS with cooling means such as a Peltier element or the cooling side of a heat pipe, blowing a gas heated by the heating means or cooled by the cooling means onto the adhesive sheet AS, applying vibration to the adhesive sheet AS with vibration means such as an ultrasonic vibrator or a vibrator to apply energy to the adhesive sheet AS, applying bias to the adhesive sheet AS with pressing means such as a pressing roller or a pressing head or biasing means such as a spring or resin to apply energy to the adhesive sheet AS, or applying electromagnetic wave or light energy such as ultraviolet rays, infrared rays, visible light, sound waves, microwaves, X-rays or gamma rays to the adhesive sheet AS. As the electromagnetic wave or light energy, any wavelength may be adopted as long as it can apply energy to the adhesive sheet AS, and it may be a single wavelength or a multi-wavelength. Appropriate energy may be adopted according to the properties, materials, qualities, compositions, etc. of the adhesive sheet AS. The energy applied by the energy applying means 10 and the unnecessary energy may be any energy such as electromagnetic wave or light energy, thermal energy, kinetic energy, elastic energy, sound energy, electrical energy, chemical energy, or energy combined thereof, and can be arbitrarily determined in consideration of the characteristics, qualities, properties, materials, compositions and configurations, etc. of the energy application object. Among the energy applied by the energy applying means 10, the necessary energy that needs to be applied to the energy application object and the unnecessary energy may be the same type of energy. For example, when both the necessary energy and the unnecessary energy are thermal energy, the temperature of the receiving portion 21A may be regarded as necessary energy up to a predetermined temperature and unnecessary energy at a temperature higher than the predetermined temperature.

[0020] The detection means 20 may include a plurality of detection devices. The detection device may be a temperature detection device such as an infrared camera in addition to a temperature sensor, or may be a device that detects other unnecessary energies such as ultraviolet rays and infrared rays. For example, electromagnetic wave detection devices such as ultraviolet sensors and infrared sensors, calorimetric devices such as calorimeters and infrared cameras, vibration detection devices such as vibration meters and Doppler radars, etc., any device that can detect unnecessary energy that does not need to be applied to the energy application object may be used. The detection device and the receiving part may be integrated or separate. The unnecessary energy generated by the application means 10 may be detected via a state quantity representing a physical or chemical state other than temperature, or may be detected as it is without passing through the state quantity. The detection of unnecessary energy by the detection means 20 may detect the type of unnecessary energy, or may detect at least one of them such as the amount, intensity, and type of unnecessary energy. The type and intensity of energy may also be detected based on state quantities such as illuminance, luminous intensity, and temperature. For example, the receiving part 21A may be irradiated with ultraviolet rays of the first intensity, infrared rays of the first intensity, ultraviolet rays of the second intensity, and infrared rays of the second intensity for a predetermined time, and the temperature of the receiving part 21A detected by the temperature sensor 21 may be used to determine whether the energy is ultraviolet rays or infrared rays and detect it, or the intensity of the energy may be detected. The temperature sensor 21 does not necessarily have to be provided on the lid member 12, may be provided on the lower or upper surface of the lid member 12, or may be provided on the housing 13 or the table 15. For example, it may be provided at a position above the first through hole 15C, or may be provided inside the second through hole 15D. It may detect thermal energy before placing the integrated object UP on the support surface 15B. The receiving part 21A may be a part of the lid member 12, or may be provided on the housing 13 or the table 15. When it is a part of the lid member 12, it may be formed of a material with a higher thermal conductivity than the material of other parts of the lid member 12, or may be formed of a material with the same thermal conductivity as the material of other parts. The values such as the amount and intensity of unnecessary energy that do not need to be applied to the adhesive sheet AS can be arbitrarily determined by the user.

[0021] The cooling means 30 may be configured to cool the receiving portion 21A by raising and lowering the lid member 12, or, for example, as shown by the dashed line in Figure 1, a cooling device 32 such as a Peltier element or the cooling side of a heat pipe may be provided inside the lid member 12 to cool the receiving portion 21A, or a gas blowing device 31 may blow the gas cooled by the cooling device 32 onto the receiving portion 21A from the nozzle 31A to cool the receiving portion 21A, or it may or may not be provided in the energy supply device EA of the present invention.

[0022] The object to which energy is transferred may be a WK substrate, a ring frame RF, or it may not be attached to a WK substrate or ring frame RF. For integrated UP, a ring frame RF is not necessary. The frame members may be other than the ring frame RF, including non-annular (without a connected outer circumference), circular, elliptical, polygonal, or other shapes.

[0023] The material, type, shape, etc., of the energy-transferred object, adhesive sheet AS, adherend WK, and frame member are not particularly limited. For example, the energy-transferred object, adhesive sheet AS, adherend WK, and frame member may be circular, elliptical, polygonal (triangle, square, etc.), or have other shapes. The adhesive sheet AS may be of a pressure-sensitive adhesive type, a heat-sensitive adhesive type, etc. If a heat-sensitive adhesive sheet AS is used, it may be bonded by an appropriate method, such as providing a suitable heating means to heat the adhesive sheet AS, such as a suitable coil heater or the heating side of a heat pipe. Furthermore, such adhesive sheets AS can be anything, for example, a single layer consisting only of an adhesive layer, a two-layer sheet with a substrate and an adhesive layer laminated together, a three-layer or three-or-more-layer sheet with one or more intermediate layers laminated between the substrate and the adhesive layer, a three-layer or three-or-more-layer sheet with one or more cover layers laminated on the upper surface of the substrate, a sheet in which the substrate, intermediate layer, or cover layer is provided in a peelable manner, a single-layer double-sided adhesive sheet consisting only of an adhesive layer, a double-sided adhesive sheet with adhesive layers laminated on both outermost surfaces of one or more intermediate layers, and so on. Moreover, the adherend WK can be, for example, a single object such as food, a resin container, a semiconductor wafer such as a silicon semiconductor wafer or a compound semiconductor wafer, a circuit board, an information recording substrate such as an optical disc, a glass plate, a steel plate, a ceramic, a wooden board, or a resin, or a composite object formed from two or more of these, and any form of component or article can also be targeted. Furthermore, the term "adhesive sheet AS" can be replaced with any sheet, film, tape, etc., such as an information label, decorative label, protective sheet, dicing tape, die attach film, die bonding tape, or recording layer forming resin sheet, depending on its functional and application-based characteristics.

[0024] The means and processes in this invention are not limited in any way as long as they can perform the operations, functions, or processes described for those means and processes, and are certainly not limited at all to the components or processes of a single embodiment shown in the above-mentioned embodiments. For example, the imparting means can be anything that imparts energy to the object to be energized, and is not limited in any way as long as it is within the scope of the art in light of the common general knowledge at the time of filing (the same applies to other means and processes).

[0025] The drive equipment in the above embodiment can be electric equipment such as rotary motors, linear motors, single-axis robots, articulated robots with two or more axes, actuators such as air cylinders, hydraulic cylinders, rodless cylinders, and rotary cylinders, or a combination of these directly or indirectly. In the above embodiment, if a rotating member such as a roller is used, a drive device for rotating the rotating member may be provided, the surface of the rotating member or the rotating member itself may be made of a deformable material such as rubber or resin, the surface of the rotating member or the rotating member itself may be made of a non-deformable material, other members such as rotating or non-rotating shafts or blades may be used instead of rollers, and if a pressing means or pressing member such as a pressing roller or pressing head that presses the object to be pressed is used, in addition to rollers, round bars, blade materials, brush-like members, a blowing of gas such as air or gas may be used instead of or in combination with those exemplified above. A method using force may be employed, the pressing object may be made of a deformable material such as rubber, resin, or sponge, or it may be made of a non-deformable material such as metal or resin, and if a support (holding) means or support (holding) member or other means for supporting (holding) the supported member (held member) is employed, a configuration may be adopted in which the supported member is supported (held) by gripping means such as mechanical chucks or chuck cylinders, Coulomb force, adhesive (adhesive sheet, adhesive tape), adhesive agent (adhesive sheet, adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, drive equipment, etc., and if a biasing means is employed, it may be made of a spring, rubber, resin or drive equipment, etc. [Explanation of Symbols]

[0026] EA... Energy supply device 10...Method of granting 20...Detection means 30...Cooling means AS…Adhesive sheet (object to which energy is imparted)

Claims

1. A means for imparting energy, including light necessary for the process, to an adhesive sheet on which a predetermined process is to be performed, The system includes a detection means positioned opposite the energy-giving means, which detects thermal energy, which is unnecessary energy that does not need to be applied to the adhesive sheet, from the energy that is applied by the energy-giving means, The imparting means comprises a light-emitting means that emits energy including light, and a light-collecting means that collects the emitted energy so as to converge toward the adhesive sheet, and before imparting the energy including light to the adhesive sheet, the collected energy is directly imparted toward the detection means. The energy application device is characterized in that the detection means detects thermal energy as unwanted energy before the energy including light is applied to the adhesive sheet.

2. The energy supply device according to claim 1, further comprising a cooling means for cooling the detection means.

3. A process of applying energy, including light necessary for the process, to an adhesive sheet on which a predetermined process is to be performed, using an energy application means, A detection step is performed in which a detection means positioned opposite the energy application means detects thermal energy, which is unnecessary energy that does not need to be applied to the adhesive sheet, from the energy applied in the application step. The imparting step includes the steps of: emitting energy including light; concentrating the emitted energy toward the adhesive sheet; and directly imparting the collected energy toward the detection means before imparting the energy including light to the adhesive sheet. The energy application method is characterized in that, in the detection step, thermal energy as unwanted energy is detected before energy including light is applied to the adhesive sheet.

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